JP2015528786A - 熱的な方法におけるガラス変形の回避 - Google Patents
熱的な方法におけるガラス変形の回避 Download PDFInfo
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
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Abstract
Description
−ガラス基板、
−該ガラス基板の一方の側に付与された機能被覆、
−前記ガラス基板の、前記機能被覆とは反対の側に面状に結合された補助層、及び
−前記機能被覆を熱処理するための、前記ガラス基板に入射する250nm〜4000nmの波長領域の放射線出力Pgesを有する、少なくとも1つの放射体フィールド
を有している。有利な構成では、ガラス基板の両面に、各1つの前記放射体フィールドが配置されている。
P10>P30については、P20>P30が当てはまる、又は
P10<P30については、P20<P30が当てはまる
を満たしていれば、いずれにしろ達成され得る。
2 多層体
3 処理面
4,4.1,4.2 放射体フィールド
5 電磁放射線
10,10.1,10.2 機能被覆
11 バリア層
12 電極
13 前駆体層
14 別の前駆体層
20,20.1,20.2 補助層
21 付着層
22 保護層
23 吸収層
30,30.1,30.2 ガラス基板
41 カバープレート
42 ボトムプレート
50 プロセスボックス
51 スペーサ
52 フレーム部材
z 基板厚さ
T 温度
Claims (15)
- ガラス基板変形を回避する多層体ユニット(1)であって、
−多層体(2)を有しており、
該多層体(2)は、ガラス基板(30)と、該ガラス基板(30)の一方の側に付与された機能被覆(10)と、前記ガラス基板(30)の、前記機能被覆(10)とは反対の側に面状に結合された補助層(20)とを備えており、
−2つの放射体フィールド(4)を有しており、
これらの放射体フィールド(4)は、両放射体フィールド(4)間に位置しており且つ前記多層体(2)が配置された処理面と、前記機能被覆(10)を熱処理するための、前記ガラス基板(30)に入射する250nm〜4000nmの波長領域の放射線出力Pgesとを備えており、
前記補助層(20)は、前記入射放射線出力Pgesの10%〜60%の、吸収された放射線出力P20を有している
ことを特徴とする、ガラス基板変形を回避する多層体ユニット。 - 前記補助層(20)は、好適には蒸着、陰極スパッタ、又は電気化学的な成膜により、前記ガラス基板(30)に付与されている、請求項1記載の多層体ユニット。
- 前記補助層(20)は、前記ガラス基板(30)に解離可能に結合されている、請求項1記載の多層体ユニット。
- 前記補助層(20)は、支持体プレート(40)に、好適にはプロセスボックス(50)のボトムプレート(41)又はカバープレート(42)に付与されている、請求項3記載の多層体ユニット。
- 前記補助層(20)は、前記入射放射線出力Pgesの10%〜40%、好適には20%〜30%の、吸収された放射線出力P20を有している、請求項1から4までのいずれか1項記載の多層体ユニット。
- 前記補助層(20)は、前記機能被覆(10)において吸収された放射線出力P10の50%〜150%、好適には75%〜125%の、吸収された放射線出力P20を有している、請求項1から5までのいずれか1項記載の多層体ユニット。
- 前記補助層(20)は、グラファイト、炭化ケイ素及び/又は窒化ホウ素から成り、好適には10nm〜10μmの層厚さを有する少なくとも1つの層を有している、請求項1から6までのいずれか1項記載の多層体ユニット。
- 前記補助層(20)は、前記ガラス基板(30)に配置された吸収層(23)と、該吸収層(23)に配置された保護層(22)とを有している、請求項1から7までのいずれか1項記載の多層体ユニット。
- 前記吸収層(23)は、金属、好適にはアルミニウム、モリブデン、銅、コバルト、ニッケル、チタン及び/又はタンタル、又は半金属化合物、好適には炭化ケイ素、酸化亜鉛、硫化カドミウム、テルル化カドミウム、アンチモン化インジウム、インジウムアーセナイド及び/又はアンチモン化亜鉛を有しており、且つ/又は前記保護層(22)は、窒化ケイ素、窒化チタン、窒化モリブデン、酸化アルミニウム及び/又は窒化アルミニウムを有している、請求項1から8までのいずれか1項記載の多層体ユニット。
- 前記補助層(20)は、前記ガラス基板(30)と前記吸収層(23)との間に、付着層(21)を有しており、該付着層(21)は、好適には窒化ケイ素及び/又は酸窒化ケイ素を含んでいる、請求項1から9までのいずれか1項記載の多層体ユニット。
- 前記機能被覆(10)は、薄膜太陽電池の半導体層に転換される前駆体層(13,14)を有しており、該前駆体層(13,14)は、好適には銅、インジウム、ガリウム、硫黄及び/又はセレンから成る、請求項1から10までのいずれか1項記載の多層体ユニット。
- 前記機能被覆(10)は、少なくとも1つのバリア層(11)、好適には50nm〜300nmの厚さを有する窒化ケイ素層と、電極(12)、好適には200nm〜700nmの厚さを有するモリブデン層と、前駆体層(13)、好適には300nm〜1000nmの厚さを有する銅−インジウム−ガリウム層と、別の前駆体層(14)、好適には700nm〜2000nmの厚さを有するセレン層とを有している、請求項1から11までのいずれか1項記載の多層体ユニット。
- 請求項1から12までのいずれか1項記載の多層体ユニット(1)を用いて熱処理する方法において、
イ)ガラス基板(30)の一方の側に機能被覆(10)を付与し、前記ガラス基板(30)の、前記機能被覆(10)とは反対の側に補助層(20)を結合し、
ロ)前記ガラス基板(30)を、2つの放射体フィールド(4)間に位置する処理面内に配置して、前記ガラス基板(30)に入射する250nm〜4000nmの波長領域の放射線出力Pgesでもって、470℃〜600℃の温度に加熱し、その際に前記補助層(20)は、前記入射放射線出力Pgesの10%〜60%の放射線出力P20を吸収し、
ハ)前記ガラス基板(30)を、470℃未満の温度に冷却する
ことを特徴とする、請求項1から12までのいずれか1項記載の多層体ユニット(1)を用いて熱処理する方法。 - 前記補助層(20)を、好適には蒸着、陰極スパッタ及び/又は化学気相成膜により、前記ガラス基板(30)に付与する、請求項13記載の方法。
- 少なくとも1つの前駆体層(13)が、熱処理、好適には高速熱処理により、薄膜太陽電池の半導体吸収体層に転換される際に、ガラス基板(30)の変形を回避するための、請求項1から12までのいずれか1項記載の多層体ユニット(1)の使用。
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EP2360721A1 (de) | 2010-02-23 | 2011-08-24 | Saint-Gobain Glass France | Vorrichtung zum Positionieren von mindestens zwei Gegenständen, Anordnungen, insbesondere Mehrschichtkörperanordnungen, Anlage zum Prozessieren, insbesondere zum Selenisieren, von Gegenständen, Verfahren zum Positionieren von mindestens zwei Gegenständen |
EP2360720A1 (de) | 2010-02-23 | 2011-08-24 | Saint-Gobain Glass France | Vorrichtung zum Positionieren von mindestens zwei Gegenständen, Anordnungen, insbesondere Mehrschichtkörperanordnungen, Anlage zum Prozessieren, insbesondere zum Selenisieren, von Gegenständen, Verfahren zum Positionieren von mindestens zwei Gegenständen |
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