JP2015210196A - Thermal flow velocity and flow rate sensor and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a non-directional thermal flow velocity and flow rate sensor in which detection sensitivity of a flow velocity detector has no sensitivity dependency on the flow direction of a fluid.SOLUTION: A thermal flow velocity and flow rate sensor 20 includes: a substrate essential part 21b that is the essential part of a plate-like substrate 21; a slender support part 2 for a flow velocity detector integrally extending from the substrate essential part 21b; and the substrate 21 implementing the flow velocity detector. The substrate 21 implementing the flow velocity detector is formed into a polygon having a plurality of faces. A temperature measuring element 26 is implemented on any one of faces of the substrate 21. One or a plurality of heater elements 27 are implemented on each face of the substrate 21 of the flow velocity detector. The flow velocity detector is configured by thermally coupling the temperature measuring element 26 with the heater element 27 via the substrate 21.

Description

  The present invention relates to a thermal flow rate / flow rate sensor that measures the flow rate and flow rate of a fluid, and in particular, includes a heater element that generates heat by a supply current and a temperature measurement element that detects a temperature from the heater element that changes according to the flow rate. The present invention relates to a non-directional thermal flow rate / flow rate sensor in which the detection sensitivity of the flow rate detection unit has no sensitivity depending on the flow rate direction of the fluid.

  Generally, a thermal flow rate / flow rate sensor uses the fact that when a heater element such as a heating wire is placed in a fluid, the amount of heat taken away from the object by the fluid changes depending on the flow rate of the fluid. The flow rate of the fluid is calculated from the measurement result. In general, the thermal flow rate / flow rate sensor compensates for the effects of temperature changes on the output (heat amount) from the flow rate detection unit when the temperature of the fluid that is the target of flow rate detection changes. It has an element.

Here, the operation principle of a general thermal flow rate / flow rate sensor will be described.
First, when a heating element having a constant heat source is present in the fluid, a physical phenomenon is used in which the heat of the heating element moves to the fluid according to the flow velocity. This physical phenomenon is generally known as the King equation, as shown in the following equation (1).

Q = (a + bu) (T−Ta) Formula (1)
Here, Q is the amount of heat generated by the heating element, u is the flow velocity, T is the temperature of the heating element, Ta is the temperature of the surrounding fluid, and a and b are constants, which depend on the material and structure of the heating element.

  From the above equation (1), in order to measure the flow velocity, when the calorific value Q is constant, the temperature of the heating element temperature T and the temperature Ta of the surrounding fluid must be measured. When the heat generation amount Q is indefinite, the heat generation amount Q, the heating element temperature T, and the temperature Ta of the surrounding fluid must be measured and obtained. In addition, since a and b are values depending on the material and structure of the heating element, if the material and structure are the same, in principle, a and b are also determined values.

  Accordingly, the inventor has disclosed a method for manufacturing a thermal flow rate / flow rate sensor and a thermal flow rate / flow rate sensor, and a flow rate detection unit that measures the temperature of the heat from the heat generation unit (heater element) for detecting the flow rate. By using a single plate-shaped substrate as the substrate, a general-purpose substrate manufacturing apparatus is used, and electronic components to be mounted on the flow velocity detection unit are also mounted on a general-purpose surface using a general-purpose automatic mounting machine. The first purpose is to form a flow velocity detection unit by mounting components, and furthermore, by providing a space between the flow velocity detection unit and the air temperature measurement unit, the temperature from the heat generation unit of the flow velocity detection unit is increased. The second purpose is to reduce the heat conduction to the measurement unit, and the flow rate detection unit is further provided with a space around the temperature measurement unit to further reduce the heat conduction from the heat generation unit of the flow rate detection unit. To heat from The third purpose is to reduce the influence on the temperature measurement unit, and the provision of a guard part that protects the flow rate detection part that protrudes from the substrate provides a thermal flow rate due to external impact. -A patent application was previously filed for a thermal flow velocity / flow rate sensor for the fourth purpose of preventing damage to the flow rate sensor and preventing burns due to erroneous contact of the flow velocity detector (see Japanese Patent Application No. 2013-200122).

  The thermal flow rate / flow rate sensor previously filed by the inventor has directivity in detection sensitivity of the flow rate / flow rate with respect to the direction of fluid flow. Therefore, when the flow direction is determined as in a fluid flowing through a pipe, a duct or the like, the effect is sufficiently obtained even with a thermal flow velocity / flow rate sensor having directivity in detection sensitivity.

  However, in the case of a space where the flow direction and flow velocity of the fluid are not controlled, such as the natural environment, living space, plant and animal growth environment, or the space where the flow direction cannot be predicted, detection is performed. In a thermal flow velocity / flow rate sensor having directivity in sensitivity, a measurement error due to a difference in detection sensitivity occurs. Therefore, in order to improve the measurement accuracy of the thermal flow rate / flow rate sensor, there is a thermal flow rate / flow rate sensor that can obtain non-directional detection sensitivity that is not related to the direction in which the fluid flows.

  As this non-directional thermal type flow velocity / flow rate sensor, there is a conventional example 1 (Japanese Utility Model Laid-Open No. 05-62862). As shown in FIG. 13, the shape of the element 113 that detects the wind speed is formed in a substantially spherical shape, and the thickness of the pin 112 that holds the element 113 is made smaller than the diameter of the element 113. Further, the element 113 is held between a pair of pins 112 and 112 in a twisted position. The pin 112 is erected on the pedestal 111.

  The element 113 is a platinum wire 114 having a diameter of 30 μm to 50 μm wound in a coil shape, and is spherically hardened with glass, alumina or the like, and has an outer diameter D of 1.0 mm. The axial length C1 of the coil 114a is 0.8 mm, the outer diameter C2 of the coil is 0.8 mm, and the conductor portion 114b extending from the coil 114a is spot-welded to the two pins 112 and 112. Further, the entire pin 112, element 113, etc. are covered with a protective wire mesh 115.

  In the wind speed sensor configured as described above, since the element 113 is formed in a spherical shape, the ability to detect the wind speed of the element 113 with respect to the wind from any direction is constant. That is, the wind speed detection sensitivity is non-directional.

  Further, in the conventional example 2 (Japanese Patent Laid-Open No. 5-142237) shown in FIGS. 14A and 14B, in addition to the omnidirectionality in the horizontal direction, the vertical direction is also omnidirectional. A spherical sensor 205 having a support 204 including a lead wire attached at one end, and a heating element connected to a lead wire fixed at the center position of the spherical sensor 205. A flow rate measurement probe 201 that conducts heat generated by energization of the heating element to the surface of the spherical sensor 205 and measures a flow rate by a change in the amount of heat generated by passage of the fluid. By forming a protrusion 206 that is substantially symmetrical with the support portion 204 at a position symmetrical to 204, the directivity characteristics in the vertical direction are improved so as to be omnidirectional. Reference numeral 202 denotes a probe body, and 203 denotes a connector.

  Further, the conventional example 3 shown in FIGS. 15 (a) to 15 (c) (Japanese Patent Laid-Open No. Hei 8-248053) uses a cylindrical probe to remove the directivity in the horizontal direction. A wind speed detection element 312 is supported at the tip of the member 316, and the wind speed detection element 312 has a heat generating metal resistance wire (platinum resistance wire 318) wound around the outer periphery of the rod-shaped member. Further, the temperature compensating element 314 is supported on the outer periphery of the first cylindrical portion 316b, and the temperature compensating element 314 has a heat generating metal resistance wire (platinum resistance wire 318) wound around the outer periphery of the ring-shaped member. For this reason, the wind hits equally from any direction around the shaft. For this reason, the thermal flow rate sensor 310 becomes non-directional.

  Further, the support member 316 is formed of a heat insulating material in a rod shape, and supports the wind speed detecting element 312 at the tip thereof, and supports the temperature compensating element 314 on the outer periphery, so that the wind is equally applied from any direction around the axis. It is configured as follows. For this reason, the detection sensitivity of the flow velocity and flow rate of the thermal flow velocity sensor 310 is non-directional.

Japanese Utility Model Publication No. 5-62862 (conventional example 1) JP-A-5-142237 (conventional example 2) JP-A-8-248053 (conventional example 3)

  Generally, when there is an object present in the fluid, turbulent flow such as vortex is generated in the downstream direction of the object. On the other hand, when this object has a certain area or more with respect to the direction in which the fluid flows, a portion where the flow velocity decreases, i.e., a stagnation portion, is generated on the downstream side. It flows on the surface of the object at a flow rate different from the original flow rate. Therefore, there is a difference between the amount of heat released from the upstream direction of the object and the amount of heat released from the downstream direction. Therefore, since the heat radiation amount is different between the case where the heat generating portion (heater element) of the heat source is on the upstream side and the case where it is on the downstream side, directivity occurs in the detection sensitivity detected by the flow velocity detection unit. Such directivity of detection sensitivity causes a measurement error when measuring the flow velocity / flow rate by the thermal flow velocity / flow rate sensor. In addition, when a temperature measuring element for measuring the object temperature for measuring the heat outflow to the fluid is provided separately from the heater element, this temperature measuring element also functions as a heat dissipation part and directly detects the object temperature. Therefore, the effect of the difference in the heat radiation appears more strongly.

  In Conventional Example 1 to Conventional Example 3 shown in FIGS. 13 to 15, as a method of reducing the measurement error due to the directivity of the detection sensitivity of the wind speed / air volume sensor, the wind speed / air volume detection unit has a spherical or cylindrical shape. What is used.

However, in order to make the wind speed / air volume detection section into a spherical or cylindrical shape, in Conventional Example 1, as shown in FIG. 13, a spherical probe supported by a conducting wire section 114b between two pins 112. Is installed. In Conventional Example 2, as shown in FIGS. 14A and 14B, a spherical sensor 205 is newly attached to the probe 202. Thus, in both Conventional Example 1 and Conventional Example 2, the wind speed / air volume detector is formed in a spherical or cylindrical shape.

  However, it is generally very technically difficult to accurately manufacture such a spherical shape or a cylindrical shape. In addition, the number of steps for manufacturing a spherical or cylindrical shape increases the number of manufacturing steps as compared to the case of manufacturing a plate shape. In addition, a dedicated process / part or production facility is required to attach the heater or the temperature measuring element to the spherical shape or the curved shape. Furthermore, in the case of the wind speed sensors shown in Conventional Example 1 and Conventional Example 2, there is a problem that the number of parts and the number of manufacturing processes associated therewith increase, and the manufacturing cost of the wind speed / air volume sensor increases.

  As shown in FIG. 15, the conventional example 3 has the same structure as the conventional example 1 and the conventional example 2 because of the above structure.

  On the other hand, the inventor previously applied thermal flow rate / flow rate sensor is also included. Generally, in the case of a wind speed / air volume sensor having a structure in which a heater element and a temperature measuring element are arranged on a plate-like substrate surface, -The air volume detector is supported by a thin support member. Therefore, the detection sensitivity with respect to the influence which it has on the flow direction of the fluid by using a plate-shaped board | substrate and the flow velocity from the direction where the supporting member is arrange | positioned falls. That is, there is a problem that the detection sensitivity differs between the installation surface of the heater element and the other surfaces. Thus, the detection sensitivity varies depending on the direction in which the fluid flows. That is, directivity occurs in detection sensitivity. In such a thermal type flow velocity / flow rate sensor having directivity, there is a problem that a measurement error occurs due to a difference in detection sensitivity of the flow velocity / flow rate associated with the flowing direction of fluid.

  As described above, the prior art has many of these problems. Therefore, in the present invention, in the thermal type flow rate / flow rate sensor, as a substrate portion of the flow rate detection unit comprising a heat generation unit (heater element) for detecting the flow rate and a temperature measuring element for measuring the temperature of heat from the heat generation unit, A plate-shaped or polygonal single substrate having a plurality of surfaces is used. The electronic component mounted on the flow velocity detection unit uses a general-purpose surface-mount component, and further, the heater element is a plate-shaped substrate. The first object is to make the detection sensitivity of the flow velocity detector non-directional by mounting each of the polygonal substrates having a plurality of surfaces on both surfaces.

  Further, in the present invention, when the substrate portion on which the flow velocity detection unit is mounted has a plate shape, heat conduction is good even when a plurality of heater elements are mounted on one surface and a temperature measuring element is mounted on the other surface. By providing the structure between both sides, the heat transfer characteristics between the heater element and the temperature measuring element are improved, and the difference in detection sensitivity of the flow velocity detection unit due to the direction of fluid flow is eliminated. The second object is to improve the directivity so that

Further, according to the present invention, when the substrate portion on which the flow velocity detection unit is mounted has a plate-like shape, a plurality of heater elements are mounted on one surface and the temperature measuring element is mounted on the other surface, and the flow velocity detection unit support unit The center line of the flow velocity and the center line of the flow velocity detector have an offset structure, so that the difference in detection sensitivity of the flow velocity detector due to the direction of fluid flow is eliminated, so that the detection sensitivity becomes omnidirectional. The third purpose is to improve the above.

  Further, in the present invention, in the case of a fluid that flows in parallel with the substrate portion on which the flow velocity detection unit is mounted, by forming a heat radiation pattern or a heat radiation portion on the substrate portion excluding the flow velocity detection portion support portion that supports the flow velocity detection portion. The fourth object is to improve the directivity so that the difference in heat release due to the difference in the direction of fluid flow is reduced and the detection sensitivity of the flow velocity detector becomes non-directional.

  Further, according to the present invention, in the case of fluid flowing in a direction perpendicular to the plate surface of the plate-like portion on which the flow velocity detection unit is mounted, the end face of the plate-like substance is arranged in addition to arranging the heater element and the signal line pattern on the plate-like portion. By installing a temperature measuring element in the sensor, the difference in the temperature detection sensitivity of the wind speed detection unit due to the difference in the fluid flow direction is reduced, and the directivity is improved so that the detection sensitivity of the flow velocity detection unit becomes omnidirectional This is the fifth purpose.

  The invention according to claim 1 is a flow rate detector having a heater element that generates heat by a supply current and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow rate, and a thermal flow rate / flow rate. The main part of the sensor substrate, the elongated flow rate support part integrally extending from the main part of the sensor, the board part on which the flow rate detection part is mounted, and the board part are formed on the board part. In the thermal flow rate / flow rate sensor that measures the flow rate and flow rate of the fluid with a space around the flow rate detection unit, the substrate part on which the flow rate detection unit is mounted has a plurality of circuit patterns. Forming a polygonal shape having a surface, the temperature measuring element is mounted on any one of the polygonal substrate portions on which the flow velocity detector is mounted, and the heater element is mounted on each polygonal substrate portion on which the flow velocity detector is mounted. Mounted on the surface to implement the flow velocity detector. A temperature measuring element via the substrate portion, which is constituted the flow rate detecting portion and a heater element thermally connected to.

  The invention according to claim 2 is the invention according to claim 1, wherein the temperature measuring element is mounted on the top of the end surface of the polygonal substrate portion on which the flow velocity detection unit is mounted.

  According to a third aspect of the present invention, in the invention according to any one of the first to second aspects, the polygonal substrate portion on which the flow velocity detection unit is mounted is formed in a plate shape composed of a front surface and a back surface, and is measured. The temperature element is mounted on either the front surface or the back surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted, and the heater element is mounted on the front and back surfaces of the plate-shaped substrate portion on which the flow velocity detection unit is mounted. Is implemented.

  The invention according to claim 4 is the invention according to any one of claims 1 to 2, wherein the polygonal substrate portion on which the flow velocity detection unit is mounted is formed in a quadrangular prism shape having four equal surfaces, The temperature measuring element is mounted on any one of the square columnar substrate portions on which the flow velocity detection unit is mounted, and the heater element is mounted on each surface of the square columnar substrate portion on which the flow velocity detection unit is mounted. .

  According to a fifth aspect of the present invention, there is provided a flow rate detector having a heater element that generates heat by a supply current, and a temperature measuring element that detects a temperature of heat from the heater element that changes in accordance with the flow rate, A belt-shaped outer peripheral portion constituting a plate-shaped substrate main portion which is a main portion of the flow sensor, a pair of elongated shape flow velocity detecting portion support portions integrally extending from the belt-shaped outer peripheral portion toward the center, A substrate portion mounted on a plate-shaped flow velocity detection unit formed integrally with the substrate main part, being positioned at the center of the belt-shaped outer periphery supported by the tip of the pair of flow velocity detection unit support portions; It consists of a circuit pattern for the flow velocity detection part formed on this substrate part, and the main part of the board constituting the belt-shaped outer periphery is a guard part that protects the flow velocity detection part, and a space is provided around the flow velocity detection part Measure the flow rate and flow rate of the fluid In the thermal flow rate / flow rate sensor, the temperature measuring element is mounted on one surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted, and the heater element is mounted on the plate-shaped substrate portion on which the flow rate detection unit is mounted. The flow rate detection unit is configured by thermally connecting a temperature measuring element and a heater element via a substrate portion mounted on each surface and mounting the flow rate detection unit.

  According to a sixth aspect of the present invention, in the fifth aspect of the invention, the center line of the flow velocity detecting portion supporting portion for supporting the flow velocity detecting portion so as to be positioned at the center of the main part of the substrate constituting the belt-shaped outer peripheral portion. This is a saddle type offset structure.

  The invention according to claim 7 is the invention according to any one of claims 1 to 6, wherein a heat radiating portion is integrally extended on a substrate portion on which the flow velocity detecting portion is mounted.

  The invention according to claim 8 is the invention according to any one of claims 1 to 7, wherein a plurality of heater elements are mounted on each surface of the substrate portion on which the flow velocity detection unit is mounted.

  The invention according to claim 9 is the invention according to any one of claims 1 to 7, wherein the heater element is mounted on one surface of the substrate portion on which the flow velocity detector is mounted, and the heater element is mounted. A heat dissipation pattern is provided on each surface of the substrate portion on which the flow rate detection unit excluding the substrate portion is mounted, and the heat dissipation pattern and the heater element are thermally connected to each other by a member having high thermal conductivity. The flow rate detection unit is configured by thermally connecting a temperature measuring element, a heater element, and a heat radiation pattern via a substrate portion on which the is mounted.

  The invention according to claim 10 is the invention according to claim 9, wherein a plurality of heater elements are mounted on any one surface of the substrate portion on which the flow velocity detector is mounted, and the heat radiation pattern is a substrate on which the heater element is mounted. A plurality of flow velocity detectors excluding the portion are provided on each surface of the substrate portion on which the flow velocity detector is mounted.

  According to an eleventh aspect of the present invention, in the invention according to any one of the ninth to tenth aspects, the member having a high thermal conductivity is a wiring material for a substrate.

  The invention according to claim 12 is the invention according to claim 11, wherein the wiring material of the substrate is a through hole or a via hole.

  The invention according to claim 13 is the invention according to any one of claims 3 and 5 to 6, wherein the wiring material of the substrate having high thermal conductivity is provided on the side surface of the substrate portion on which the flow velocity detection unit is mounted. A through-hole or via hole is formed in a semi-cylindrical shape, and the heater elements mounted on each surface of the plate-shaped substrate portion on which the flow velocity detector is mounted are thermally connected to each other by the through-hole or via hole formed in the semi-cylindrical shape. Is connected to.

  The invention according to claim 14 is the invention according to claim 13, wherein the heat radiating portion is integrally extended on the substrate portion on which the flow velocity detecting portion is mounted.

  A fifteenth aspect of the invention is the invention according to any one of the thirteenth to fourteenth aspects, in which a plurality of heater elements are mounted on each surface of the substrate portion on which the flow velocity detection unit is mounted.

  The invention according to claim 16 is the invention according to any one of claims 13 to 14, wherein the heater element is mounted on one surface of the substrate portion on which the flow velocity detection unit is mounted, and the flow velocity detection unit is mounted. A heat dissipation pattern is provided on the other surface of the plate-shaped substrate portion to be mounted, and the heat dissipation pattern and the heater element are thermally connected by a through-hole or a via hole formed in a semi-cylindrical shape, and the flow velocity detection unit is mounted. A flow rate detector is formed by thermally connecting a temperature measuring element, a heater element, and a heat radiation pattern via a substrate portion.

  The invention according to claim 17 is the invention according to claim 16, wherein a plurality of heater elements are mounted on one surface of the substrate portion on which the flow velocity detecting portion is mounted, and the heat radiation pattern is mounted on the flow velocity detecting portion. A plurality of substrates are provided on the other surface of the substrate portion.

  Since the invention according to claim 1 is configured as described above, the difference in the amount of heat released to the fluid between the upstream side and the downstream side of each heater element based on the difference in the direction of flow of the fluid Since it can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional. Accordingly, measurement errors of the flow velocity / flow rate sensor can be eliminated. In addition, since the heater element and the temperature measuring element have a structure in which they are thermally connected directly via the board portion of the mounting location, the flow rate detecting unit 5 with good responsiveness can be obtained and the individual difference is small. Since the flow velocity detection unit 5 is obtained, adjustment as a thermal flow velocity / flow rate sensor is not required, and the cost is reduced.

  Furthermore, since the plurality of heater elements and the temperature measuring elements are thermally connected by members having high thermal conductivity, the directivity characteristic of the detection sensitivity of the flow velocity detection unit based on the difference in the fluid flow direction is further increased. Good omnidirectionality can be obtained. Furthermore, the heater element is mounted on one surface and the temperature measuring element is mounted on the other surface, and the heat conduction is performed between the heater element and the temperature measuring element and between the heater element mounting location and the opposite surface. Since it is thermally connected with a member having a high rate, heat transfer characteristics are improved. Therefore, since the difference in the amount of heat released to the fluid can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional.

  Since the invention according to claim 2 is configured as described above in the invention according to claim 1, there is an effect similar to that of the invention according to claim 1. Furthermore, since the temperature measuring element is mounted on the top of the end surface of the substrate part, any surface of the temperature measuring element is always in contact with the flow direction regardless of the fluid flow direction, and the flow rate detection unit detects The directivity can be improved so that the sensitivity becomes omnidirectional.

  Since the invention which concerns on Claim 3 was comprised as mentioned above in the invention in any one of Claims 1-2, there exists an effect similar to the said Example 1-2. In addition, since the board portion on which the flow velocity detector is mounted has a plate shape, the number of parts and the number of manufacturing processes associated therewith are fewer than in the conventional example, making the board easier to manufacture, and the wind speed / air volume sensor. The manufacturing cost is reduced.

  Since the invention which concerns on Claim 4 was comprised as mentioned above in the invention of Claims 1-2, there exists an effect similar to the invention of Claims 1-2.

  Since the invention which concerns on Claim 5 was comprised as mentioned above, since the several heater element is mounted also in the circumference | surroundings of a temperature measuring element and the back surface of a board | substrate part, the flow velocity detection part based on the difference in the direction through which a fluid flows The directivity can be further improved so that the detection sensitivity becomes non-directional. In addition, the heater element is mounted on one surface and the temperature measuring element is mounted on the other surface, and between the heater element and the temperature measuring element and between the heater element mounting portion and the opposite surface, Since it is thermally connected by a member having high conductivity, heat transfer characteristics are improved. Therefore, since the difference in the amount of heat released to the fluid can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional. In addition, the flow velocity detection unit 5 includes a heater element 4 that is a general-purpose surface-mounting electronic component and a temperature measuring element 3 that measures the temperature of heat from the heater, and a plate-shaped electronic substrate. Since each electronic component can be mounted on a substrate by an automatic mounting machine generally used in this manufacturing method, automation of the assembly process is facilitated, and the assembly cost is very low.

  Since the invention according to claim 6 is configured as described above in the invention according to claim 5, the same effect as that of claim 5 is obtained. Furthermore, when the fluid flows from the direction of the flow velocity detection unit support to the flow velocity detection unit and when the fluid flows from a direction different from the direction of the flow velocity detection unit support to the fluid detection unit, the former case may occur. There was a phenomenon in which the amount of heat released to the fluid was large, which caused directivity, but in this invention, the flow rate detection unit support and the center line of the flow rate detection unit have an offset structure, Since the amount of heat release due to the difference in the direction of fluid flow can be dispersed, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional.

  Since the invention which concerns on Claim 7 was comprised as mentioned above in the invention of Claims 1-6, there exists an effect similar to the invention of Claims 1-6. In addition, by using the heat radiation part and the heat radiation pattern 711 in combination, the directivity can be improved so that the detection sensitivity of the thermal flow rate / flow rate sensor 70 becomes non-directional.

  Since the invention according to claim 8 is configured as described above in the inventions according to claims 1 to 7, the same effects as the inventions according to claims 1 to 7 are obtained. In addition, since a plurality of heater elements are mounted around the temperature measuring element and on the back surface of the substrate portion, the directional characteristics are set so that the detection sensitivity of the flow velocity detection unit based on the difference in the fluid flow direction becomes non-directional. Can be further improved. In addition, the heater element is mounted on one surface and the temperature measuring element is mounted on the other surface, and between the heater element and the temperature measuring element and between the heater element mounting location and the opposite surface, heat conduction is performed. Since it is thermally connected with a member having a high rate, heat transfer characteristics are improved. Therefore, since the difference in the amount of heat released to the fluid can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional. In addition, the flow velocity detection unit uses a heater element that is a general-purpose electronic component for surface mounting, and a temperature measuring element that measures the temperature of heat from the heater element, and a method for manufacturing a plate-shaped electronic substrate Since each electronic component can be mounted on a board by an automatic mounting machine generally used in the above, the assembly process can be automated easily, and the assembly cost is very low.

  Even if the temperature of the temperature measuring element is lowered, if the heater elements are arranged so as to sandwich the temperature measuring element, the number of heater elements is increased, and the temperature of the temperature measuring element can be recovered more quickly. Therefore, the responsiveness as a thermal flow rate / flow rate sensor can be improved.

  Since the invention according to claim 9 is configured as described above in the inventions according to claims 1 to 7, the same effects as the inventions according to claims 1 to 7 are obtained. In addition, the heat radiation pattern formed on the substrate portion on which the temperature measuring element is formed can reduce the difference in the heat radiation amount due to the difference in the fluid flow direction. Therefore, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional.

  Further, since the plurality of heat radiation patterns, heater elements, and temperature measuring elements are thermally connected by members having high thermal conductivity, the detection sensitivity of the flow velocity detection unit is directed based on the difference in the direction of fluid flow. The characteristic can be further improved omnidirectionality. Furthermore, the heater element is mounted on one surface and the temperature measuring element is mounted on the other surface, and the heat conduction is performed between the heater element and the temperature measuring element and between the heater element mounting location and the opposite surface. Since it is thermally connected with a member having a high rate, heat transfer characteristics are improved. Therefore, since the difference in the amount of heat released to the fluid can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional. In addition, by using the heat radiation pattern and the heat radiation portion in combination, the directivity can be improved so that the detection sensitivity of the thermal flow rate / flow rate sensor becomes non-directional.

  Since the invention according to claim 10 is configured as described above in the invention according to claim 9, there is an effect similar to that of claim 9. Furthermore, even if the temperature of the temperature measuring element is lowered, if the heater elements are arranged so as to sandwich the temperature measuring element, the number of heater elements can be increased so that the temperature of the temperature measuring element can be recovered more quickly. Therefore, the responsiveness as a thermal flow rate / flow rate sensor can be improved.

  Since the invention according to claim 11 is configured as described above in the invention according to claims 9 to 10, the same effects as those of claims 9 to 10 are obtained.

  Since the invention according to claim 12 is configured as described above in the invention according to claim 11, the same effect as that of claim 11 is obtained. In addition, the heat conductivity of the member having high thermal conductivity is further improved by thermally and mechanically joining the temperature measuring element and the heat radiation pattern through a through-hole or via-hole which is a wiring material of the substrate. . Therefore, since the difference in the amount of heat released to the fluid can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detector becomes non-directional. It is also easy to manufacture the flow velocity detection unit.

  Since the invention according to claim 13 is configured as described above in the invention according to claim 3, claim 5 to claim 6, the same effects as those of claims 3 and 5 to 6 are obtained. . In addition, on the side surface of the end surface of the substrate part, heat dissipation from the side surface direction is promoted by a through-hole or via hole formed in a semi-cylindrical shape opening outward, so that the detection sensitivity of the flow velocity detection unit becomes omnidirectional. Further, the directivity can be improved.

  Since the invention according to claim 14 is configured as described above in the invention according to claim 13, the same effect as that of claim 13 is obtained. Furthermore, since the heat radiation portion is formed on the substrate portion, the heat radiation is further promoted, and the directivity can be further improved so that the detection sensitivity of the flow velocity detection portion becomes non-directional.

  Since the invention according to claim 15 is configured as described above in the invention according to claims 13 to 14, the same effects as those of claims 13 to 14 are obtained.

Since the invention according to claim 16 is configured as described above in the invention according to claims 13 to 14, the same effects as those of claims 13 to 14 are obtained. In addition, by using the heat radiation pattern and the heat radiation portion in combination, the directivity can be improved so that the detection sensitivity of the thermal flow rate / flow rate sensor becomes non-directional.

  Since the invention according to claim 17 is as described above in the invention according to claim 16, even when the temperature of the temperature measuring element is lowered, the temperature measuring element can be arranged to be sandwiched by a plurality of heater elements. Therefore, the temperature of the temperature measuring element can be recovered more quickly, and the responsiveness as a thermal flow rate / flow rate sensor can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS It is a principal part schematic diagram which shows 1st Example of this invention, (a) is a principal part front view, (b) is a principal part expansion perspective view of a figure (a). It is a principal part schematic diagram which shows the 2nd Example of this invention, (a) is a principal part front view, (b) is a principal part expansion perspective view of figure (a). It is a principal part perspective view which shows the 3rd Example of this invention. It is a principal part perspective view which shows the modification of the 3rd Example of this invention. It is a principal part schematic diagram which shows the 4th Example of this invention, (a) is a principal part front view, (b) is a principal part expansion perspective view of figure (a). It is a principal part top view which shows the 5th Example of this invention. It is a principal part top view which shows the 6th Example of this invention. It is a principal part top view which shows the 7th Example of this invention. It is a principal part top view which shows the 8th Example of this invention. FIG. 4 is a directional characteristic diagram showing the results of comparative measurement using prototype A of the present invention and a conventional product, where (a) is a directional characteristic diagram in the horizontal direction and (b) is a directional characteristic diagram in the vertical direction. It is a directivity characteristic figure of the horizontal direction which shows the result of having measured comparatively using prototype A and prototype B of this invention. It is a directional characteristic figure of the horizontal direction which shows the result of comparative measurement using prototype A and prototype C of this invention. It is a front view of the wind speed sensor which shows the prior art example 1. FIG. FIG. 2 shows Conventional Example 2, in which (a) is a side view of a flow velocity measuring probe, and (b) is a partial cross-sectional view showing a spherical sensor portion. FIG. 7 is a perspective view of a thermal type flow rate sensor, showing Conventional Example 3;

  A flow rate detector having a heater element that generates heat by a supply current and a temperature measuring element that detects the temperature of the heat from the heater element that changes in accordance with the flow rate, and a main part of the substrate of the thermal flow rate / flow rate sensor. A main part of the substrate, an elongated flow rate detection unit support part integrally extending from the main part of the substrate, a substrate part for mounting the flow rate detection part, and a circuit pattern for the flow rate detection part formed on the substrate part In a thermal flow rate / flow rate sensor that measures the flow rate and flow rate of a fluid with a space around the flow rate detection unit, the substrate part on which the flow rate detection unit is mounted is formed in a plate shape consisting of the front and back surfaces The temperature measuring element is mounted on either the front surface or the back surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted, and the heater element is mounted on the plate-shaped substrate portion on which the flow velocity detection unit is mounted. Whether to mount on the front and back Alternatively, the temperature measuring element is mounted on the top of the end surface of the plate-shaped substrate instead of being mounted on either the front surface or the back surface of the substrate portion, and is measured via the substrate portion on which the flow velocity detection unit is mounted. The flow rate detector is configured by thermally connecting the temperature element and the heater element.

  Also, a flow rate detector having a heater element that generates heat by a supply current, and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow rate, and a main part of the thermal flow rate / flow rate sensor A belt-shaped outer peripheral portion constituting the plate-shaped substrate main portion, a pair of elongated support portions for the flow velocity detecting portion integrally extending in the center direction from the belt-shaped outer peripheral portion, and the pair of flow velocity detecting portions A substrate portion that is supported by the tip of the supporting portion and is located at the center of the belt-shaped outer peripheral portion and on which a plate-shaped flow velocity detecting portion formed integrally with the main portion of the substrate is mounted, and formed on this substrate portion The substrate main portion constituting the belt-shaped outer peripheral portion is used as a guard portion for protecting the flow velocity detection portion, and the flow velocity of the fluid having a space around the flow velocity detection portion and Thermal flow velocity to measure flow rate In the quantity sensor, the temperature measuring element is mounted on one surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted, and the heater element is mounted on each surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted. Then, the flow rate detection unit is configured by thermally connecting the temperature measuring element and the heater element via the substrate portion on which the flow rate detection unit is mounted.

  Further, the heater element is mounted on one surface of the substrate portion on which the flow velocity detection unit is mounted, and a heat radiation pattern is provided on each surface of the substrate portion on which the flow velocity detection unit is mounted except for the substrate portion on which the heater element is mounted. Provide. By thermally connecting the heat dissipation pattern and the heater element through a through hole formed of a member having high thermal conductivity, the temperature measuring element, the heater element, and the heat dissipation pattern are connected to each other through the substrate portion on which the flow velocity detection unit is mounted. A thermally connected flow rate detector is configured.

  A first embodiment of the present invention will be described in detail with reference to FIG. FIGS. 1A and 1B are schematic views of a main portion showing a first embodiment of the present invention, in which FIG. 1A is a front view of the main portion and FIG. 1B is an enlarged perspective view of the main portion of FIG. The circuit pattern formed on the substrate 1 is not described.

  In the first embodiment, in the thermal type flow rate / flow rate sensor 15, a substrate of a flow rate detection unit comprising a heat generation unit (heater element 7) for detecting a flow rate and a temperature measuring element 6 for measuring the temperature of heat from the heat generation unit. As the part 1a, a plate-like shape or a polygonal substrate having a plurality of surfaces is used, and the electronic component mounted on the flow velocity detection unit 4 uses a general-purpose surface-mounted component, and furthermore, a plate-like substrate. In the case of a polygonal substrate having a plurality of surfaces, the heater element 7 is mounted on each surface of the substrate portion 1a. It aims at improving the directivity so that the detection sensitivity of the signal becomes omnidirectional. In this embodiment, the heater element and the temperature measuring element use general-purpose surface-mounted components, but are not limited thereto. The heater element and the temperature measuring element can obtain the same effect without using general-purpose surface-mounted components.

  1 (a) and 1 (b), reference numeral 1 denotes a plate-shaped substrate, and on both sides of one end of the substrate 1, an elongated flow velocity detection unit support portion integrally extending from the substrate main portion 1b. 2 and the temperature measurement unit support 3 are formed to be separated from each other. A substrate portion 1a on which the flow velocity detection unit 4 supported by the flow velocity detection unit support 2 is mounted is formed at the tip of the flow velocity detection unit support 2. A substrate portion 1c on which the temperature measuring unit 5 supported by the temperature measuring unit support 3 is mounted is formed at the tip of the temperature measuring unit support 3.

  The plate-like substrate 1 is not limited to this embodiment, and glass epoxy FR-4, which is generally widely sold as a printed board, is used in all embodiments described later. Alternatively, a substrate material formed of a member having low thermal conductivity such as a ceramic substrate or a silicon substrate may be used.

  A circuit pattern (not shown) for a flow velocity detection unit and a circuit pattern for temperature measurement (not shown) are respectively provided on the surfaces of the substrate portion 1a on which the flow velocity detection unit 4 is mounted and the substrate portion 1c on which the temperature measurement unit 5 is mounted. ) Is formed. Heater elements 7 and 7 that are general-purpose surface-mounted components are respectively disposed facing each other at the mounting locations on the front and back surfaces of the substrate portion 1a, and further, the heater elements mounted at the mounting locations of the substrate portion 1a. A general-purpose temperature measuring element 6 is mounted adjacent to 7 by soldering to constitute the flow velocity detection unit 4. A temperature measuring element 8, which is a general-purpose surface mounting component, is mounted by soldering on a surface mounting portion of the substrate portion 1 c to constitute the temperature measuring unit 5.

  Therefore, the flow velocity detection unit 4 has a structure integrally formed and supported on the substrate main portion 1b by the flow velocity detection portion support portion 2, and the air temperature measurement portion 5 is formed by the air temperature measurement portion support portion 3. The structure is integrally formed and supported by 1b. In addition, the temperature measuring element 6 and the heater element 7 are mounted on the surface of the substrate portion 1a, and the temperature measuring element 6 and the heater element 7 are disposed adjacent to each other so as to be directly connected to each other. It has a structured.

  Further, a space 9 is provided around each of the flow velocity detection unit 4 and the air temperature measurement unit 5, and a space 10 is also provided between the flow velocity detection unit 4 and the air temperature measurement unit 5. Yes. As described above, the plate-shaped substrate 1 includes the substrate portion 1a for the flow velocity detection unit 4 and the substrate portion 1c for the temperature measurement unit 5 which are the flow velocity detection unit support 2 and the temperature measurement unit support 3 respectively. The structure is integrally connected to the substrate main portion 1b via the. Note that a mounting hole 11 for mounting the thermal flow rate / flow rate sensor 15 to another apparatus and a signal extraction pad 12 are formed in the substrate main portion 1b. In this embodiment, the substrate portion for the flow velocity detection unit and the substrate portion for the air temperature measurement unit are integrally connected to the main part of the substrate through the flow velocity detection unit support unit and the air temperature measurement unit support unit, respectively. Although the structure is provided and the flow velocity detection unit and the air temperature measurement unit are formed on the same substrate, the present invention is not limited to this. The same effect can be obtained even if the flow rate detection unit and the temperature measurement unit are separated.

  Next, the operation of the flow velocity detection unit 4 will be described. First, the heater elements 7 and 7 mounted on the front surface and the back surface of the substrate portion 1a are heated by a supply current from an internal power supply wiring (not shown) of the substrate portion 1a. When the thermal flow rate / flow rate sensor 15 is arranged in the fluid, the heat of the heater element 7 changes according to the flow rate of the fluid, and this heat is measured via the substrate at the mounting portion of the substrate portion 1a. Direct thermal conduction to 6. The temperature of the conducted heat is measured by the temperature measuring element 6, and the flow velocity and the flow rate are calculated from the measured value based on the operating principle of the thermal flow velocity / flow rate sensor described above.

  Since it is configured in this way, in the thermal flow rate / flow rate sensor 15, the heater elements 7 and 7 are mounted on both surfaces of the substrate portion 1a, so that the upstream of each heater element 7 and 7 based on the difference in the direction of fluid flow. Since the difference in the amount of heat radiation to the fluid on the downstream side and the downstream side can be reduced, the directivity can be improved so that the detection sensitivity of the detection sensitivity of the flow velocity detector 4 becomes non-directional. Accordingly, measurement errors of the thermal flow rate / flow rate sensor can be eliminated.

  In addition, since the heater element 7 and the temperature measuring element 6 have a structure in which they are thermally connected directly via the board portion 1a at the mounting location, a flow rate detection unit 4 with good responsiveness can be obtained. Since the flow velocity detection unit 4 with little difference is obtained, adjustment as a thermal flow velocity / flow rate sensor is not required, and the cost is reduced.

  Further, the substrate portion 1a on which the flow velocity detection unit 4 is mounted, the substrate portion 1c on which the air temperature measurement unit 5 is mounted, the flow velocity detection portion support portion 2, the air temperature measurement support portion 3 and the substrate main portion 1b are all integrated. It is the structure formed in. Therefore, as described above, the substrate 1 and the substrate material of the flow velocity detection unit support 2 are made of a member having low thermal conductivity (FR-4 substrate: thermal conductivity is 0.45 W / m / K). Yes. In addition, by forming the flow velocity detecting portion support portion 2 to be elongated, heat conduction from the flow velocity detecting portion 4 to the main portion 1b of the substrate can be suppressed, and further, the flow velocity detecting portion supporting portion 2 is fixed through the mounting hole 11. It is also possible to suppress heat conduction to the device.

  Further, since the two heater elements 7 are disposed to face each other with the substrate portion 1a interposed therebetween, the temperature of the temperature measuring element 6 can be recovered more quickly even when the temperature of the temperature measuring element 6 is lowered. Therefore, the responsiveness as a thermal flow rate / flow rate sensor is improved.

  A second embodiment of the present invention will be described in detail with reference to FIG. FIGS. 2A and 2B are schematic views showing the main part of a second embodiment of the present invention, wherein FIG. 2A is a front view of the main part and FIG. 2B is an enlarged perspective view of the main part of FIG. The same parts as those in the first embodiment are denoted by the same names and the same numbers, and the description thereof is omitted. Further, the circuit pattern formed on the substrate 21 is not described.

  In the second embodiment, similarly to the first embodiment, in the case of a plate-shaped substrate, the heater elements are respectively mounted on both surfaces, and the temperature measuring element is mounted on the top of the end surface of the substrate, so that the flow rate detector The object is to improve the directional characteristics so that the detection sensitivity becomes non-directional.

  In the second embodiment, as shown in FIGS. 2A and 2B, in the thermal flow velocity / flow rate sensor 20, the temperature measuring element 26 is the top of the end surface of the substrate portion 21 a on which the flow velocity detection unit 24 is mounted. Similarly to the case of the first embodiment, the heater elements 27 are mounted on the front and back surfaces of the substrate portion 21a so as to face each other.

  Since it is configured in this way, the same effects as those of the first embodiment can be obtained. Furthermore, since the temperature measuring element 26 is mounted on the end surface top portion 21aa of the substrate portion 21a of the substrate 21, any surface of the temperature measuring element 26 is always in contact with the flow direction regardless of the fluid flowing direction. Therefore, the directivity can be reduced so as to be omnidirectional. In addition, since the temperature measuring element 26, which is an electronic component, is also mounted on the end surface top 21aa of the substrate portion 21a, the mounting efficiency of the substrate 21 is improved.

  A third embodiment of the present invention will be described in detail with reference to FIG. FIG. 3 is a perspective view showing the principal part of a third embodiment of the present invention. In addition, about the same part as the 1st and 2nd Example, the same name and the same number are used and the description is abbreviate | omitted. Also, the temperature measuring element for measuring the temperature is omitted. The circuit pattern formed on the substrate 31 is not described.

  In the third embodiment, the heater element 37 is mounted on each surface of the polygonal substrate portion 31a having a plurality of surfaces so that the detection sensitivity of the flow velocity detection unit becomes nondirectional. It aims to improve.

  In the third embodiment, as shown in FIG. 3, in the thermal flow rate / flow rate sensor 30, the substrate portion 31a of the substrate 31 on which the flow rate detector 34 is mounted is formed in a quadrangular prism shape having four uniform surfaces. Has been. The heater elements 37, 37,... Are mounted so as to be opposed to each other on each surface of the quadrangular columnar substrate portion 31a. The temperature measuring element 36 is mounted on any one surface of the rectangular substrate portion 31a on which the flow velocity detection unit 34 is mounted.

  In the third embodiment, the substrate portion 31a on which the flow velocity detector 34 is mounted is formed in a quadrangular prism shape having four uniform surfaces, but is not limited to this, and is triangular, pentagonal The shape may be a hexagonal shape, or may be a polygonal shape having a plurality of surfaces.

  In addition, as shown in FIG. 4, instead of mounting the temperature measuring element 36 on any one surface of the square columnar substrate portion 31a on which the flow velocity detection unit 34 is mounted, the rectangular column on which the flow velocity detection unit 34 is mounted. You may mount in the end surface top part 31aa of the shape board | substrate part 31a.

  Since it is configured in this way, the same effects as those of the first and second embodiments can be obtained. Further, the heater elements 37, 37,... Are mounted on each surface of the substrate portion 31a. Therefore, since it can respond to the flow of the fluid in all directions, the detection sensitivity of the flow velocity detection unit 34 based on the difference in the direction of flow of the fluid can be further improved omnidirectional. Also, as shown in FIG. 4, the structure in which the temperature measuring element 36 is mounted on the end surface top 31aa of the board portion 31a improves the mounting efficiency of the electronic components on the board 31.

  A fourth embodiment of the present invention will be described in detail with reference to FIG. FIGS. 5A and 5B are schematic views showing the main part of a fourth embodiment of the present invention. FIG. 5A is a front view of the main part, and FIG. 5B is an enlarged perspective view of the main part of FIG. In addition, about the same part as 1st Example-3rd Example, the same name and the same number are used and the description is abbreviate | omitted. Further, the circuit pattern formed on the substrate 141 is not described.

  In the fourth embodiment, as in the second embodiment, the heater elements 27 are mounted on both surfaces (front and back surfaces) of the substrate portion 141a, and the temperature measuring element 26 is mounted on the end surface top portion 141aa of the substrate portion 141a. Thus, an object is to improve the directivity so that the detection sensitivity of the flow velocity detection unit 24 becomes non-directional.

  As shown in FIGS. 5A and 5B, in the same manner as in the second embodiment, in the thermal flow rate / flow rate sensor 140, the both sides of one end of the plate-shaped substrate 141 are integrated with each other from the substrate main portion 141b. The elongated flow velocity detecting portion support portion 142 and the temperature measuring portion support portion 143 are formed so as to be separated from each other. A substrate portion 141 a on which the flow velocity detection unit 24 supported by the flow velocity detection unit support 142 is mounted is formed at the tip of the flow velocity detection unit support 142. A substrate portion 141c on which the temperature measuring unit 25 supported by the temperature measuring unit support 143 is mounted is formed at the tip of the temperature measuring unit support 143.

  Further, after cylindrical through holes are formed on both side surfaces of the substrate portion 141a, both side surfaces of the substrate portion 141a are cut to form semi-cylindrical through holes 150 that open outward. ing. Therefore, both surfaces (front surface and back surface) of the substrate portion 141a are thermally and mechanically connected via the through hole 150. In the fourth embodiment, the cylindrical through hole 150 is formed on the side surfaces of both ends of the substrate portion 141a. However, the cylindrical through hole 150 may be formed on only one of the side surfaces of the end portion. In the fourth embodiment, through holes are used, but the present invention is not limited to this. For example, the same effect can be obtained even if a via hole is used instead of a through hole. The same applies to the following embodiments.

  A circuit pattern (not shown) for the flow rate detection unit and a circuit pattern for temperature measurement (not shown) are respectively provided on the surfaces of the substrate part 141a on which the flow rate detection unit 24 is mounted and the substrate part 141c on which the temperature measurement unit 25 is mounted. ) Is formed.

  The temperature measuring element 26 is mounted on the end surface top 141aa of the substrate portion 141a on which the flow velocity detection unit 24 is mounted, and the heater element 27 is provided on the front and back surfaces of the substrate portion 141a as in the second embodiment. The two sides are arranged so as to face each other.

  Since it is configured in this way, the same effects as those of the first and second embodiments are obtained. Furthermore, by exposing the copper foil surface applied to the inner surface of the semi-cylindrical through hole 150 that opens outward, the heat radiation from the side surface direction of the substrate portion 141a can be promoted, so the flow velocity The directivity can be improved so that the detection sensitivity of the detection unit 24 becomes non-directional.

  In addition, the thermal type flow velocity and flow sensor 10, 20, 30 using the shape of the board | substrates 1, 21, 31, and 141 shown in FIGS. , 140 can be applied to both.

  A fifth embodiment of the present invention will be described in detail with reference to FIG. FIG. 6 is a plan view showing the principal part of a fifth embodiment of the present invention. In addition, about the same part as the 1st-4th Example, the same name and the same number are used and the description is abbreviate | omitted. Also, the temperature measuring element for measuring the temperature is omitted. The circuit pattern formed on the substrate 41 is not described.

  In the fifth embodiment, when the substrate portion on which the flow velocity detection unit is mounted has a plate shape, the plurality of heater elements 47 are disposed on one surface of the substrate portion 41a, and the temperature measuring elements 46 are disposed on the other surface of the substrate portion 41a. By mounting, while improving the heat transfer characteristics between the heater element 47 and the temperature measuring element 46, and eliminating the difference in detection sensitivity of the flow rate detection unit 44 depending on the direction of fluid flow, the flow rate detection unit 44 The object is to improve the directional characteristics so that the detection sensitivity becomes non-directional.

  As shown in FIG. 6, in the thermal flow rate / flow rate sensor 40 of the fifth embodiment, the substrate main portion 41b of the plate-shaped substrate 41 is formed in a shape having a circular belt-shaped outer peripheral portion. A pair of flow velocity detecting portion support portions 42 that integrally extend from the outer peripheral portion toward the center is formed. Further, a substrate portion 41 a that forms the flow velocity detection portion 44 is integrally formed at the tip end portion of the pair of flow velocity detection portion support portions 42 that integrally extend in the central direction. Therefore, the substrate portion 41a has a structure supported by the pair of flow velocity detecting portion support portions 42 at the central portion of the substrate main portion 41b. In order to form such a structure, it is formed by cutting the plate-like substrate 41 with NCM or the like, as in the case of the first to third embodiments.

In the fifth embodiment, the shape of the substrate main portion 41b is formed in the shape of a circular belt-shaped outer peripheral portion. However, the shape is not limited to this, and the belt-shaped outer peripheral portion constituting the substrate main portion 41b is In addition, it may be rectangular or may be polygonal, both of which are flow rates mounted on the substrate portion 41a on the inner side of the belt-shaped outer peripheral portion constituting the substrate main portion 41b or on the central portion. Any structure may be used as long as the detection unit 44 is supported by the flow rate detection unit support unit 42.
In the fourth embodiment, there are two flow velocity detection unit support portions 42. However, one may be used if strength is obtained, and three or more may be used if there is no problem in performance.

  A circuit pattern (not shown) for the flow velocity detection unit is formed at the mounting location of the substrate portion 41a on which the flow velocity detection unit 44 is mounted, and the temperature measuring element 46 is mounted on one surface by soldering. Further, two heater elements 47, 47 are mounted on the same surface so as to sandwich the temperature measuring element 46 by soldering. Further, two heater elements 47a and 47a are further mounted by soldering on the other surface of the substrate portion 41a so as to face the mounting locations of the two heater elements 47.

  Therefore, the heater elements 47 and 47 and the temperature measuring element 46 mounted on one surface of the substrate portion 41a and the two heater elements 47a and 47a mounted on the other surface are both surfaces of the substrate portion 41a ( The front surface and the back surface are connected directly and thermally through the mounting portion of the substrate portion 41a. Further, the flow velocity detection unit 44 has a structure that is supported by a pair of flow velocity detection unit support portions 42 integrally extending from the substrate main portion 41b at the central portion of the belt-shaped outer peripheral portion. A space 49 is formed around the periphery.

  Since it is configured in this way, a plurality of heater elements 47 and 47a are mounted around the temperature measuring element 46 and also on the back surface of the substrate portion 41a. The directivity can be improved so that the detection sensitivity becomes non-directional.

  Further, even when the temperature of the temperature measuring element 46 is lowered, the heater element 47 is arranged so as to sandwich the temperature measuring element 46, and the heater element 47a is also arranged opposite to the other surface via the substrate portion 41a. Therefore, since the temperature of the temperature measuring element 46 can be recovered more quickly by increasing the number of heater elements, the responsiveness as the thermal flow rate / flow rate sensor 40 can be improved.

  In addition, the flow velocity detector 44 uses a heater element 47, which is a general-purpose surface-mounting electronic component, and a temperature measuring element 46 that measures the temperature of heat from the heater element 47. Since each electronic component can be mounted on the substrate by an automatic mounting machine generally used in the manufacturing method of the electronic substrate, the assembly process can be automated and the assembly cost can be reduced.

  A sixth embodiment of the present invention will be described in detail with reference to FIG. FIG. 7 is a plan view showing the principal part of a sixth embodiment of the present invention. In addition, about the same part as the 1st-5th Example, the same name and the same number are used and the description is abbreviate | omitted. Also, the temperature measuring element for measuring the temperature is omitted. The circuit pattern formed on the substrate 51 is not described.

In the fifth embodiment, when the substrate portion 51a on which the flow velocity detector 54 is mounted has a plate shape, a plurality of heater elements 57 are mounted on one surface and the temperature measuring elements 56 are mounted on the other surface, respectively, Detection is achieved by eliminating the difference in detection sensitivity of the flow velocity detector 54 depending on the direction of fluid flow by adopting a saddle-type offset structure between the center line of the flow velocity detector support portion 52 and the center line of the flow velocity detector 54. The purpose is to improve the directional characteristics so that the sensitivity becomes omnidirectional.

  As shown in FIG. 7, in the thermal flow rate / flow rate sensor 50 of the sixth embodiment, the substrate main portion 51b of the plate-shaped substrate 51 has a circular belt-shaped outer peripheral portion, as in the fourth embodiment. A pair of flow velocity detecting portion support portions 52 extending integrally from the belt-shaped outer peripheral portion toward the center is formed. A rectangular substrate portion 51a on which the flow velocity detector 54 is mounted is connected to the substrate main portion 52b so that the flow velocity detector 54 is positioned at the center of the circular belt-shaped outer periphery at the tip of the flow velocity detector support 52. It is integrally formed. And the center of the board | substrate part 52a which mounts the flow velocity detection part 54 and the centerline of a pair of flow velocity detection part support part 52 are formed so that it may become a bowl-shaped offset structure. Accordingly, the substrate portion 51a is supported by the pair of flow velocity detecting portion support portions 52 so as to be positioned at the center of the substrate main portion (circular belt-shaped outer peripheral portion) 51b. In order to form such a structure, it is formed by cutting a plate-shaped substrate with NCM or the like, as in the case of the first to fifth embodiments.

  A temperature measuring element 56 is mounted by soldering on one surface of the substrate portion 51a on which the flow velocity detection unit 54 is mounted, and a heater element 57 is formed on the other surface facing the temperature measuring element 56. It is mounted by soldering. Therefore, the temperature measuring element 56 mounted on one surface and the heater element 57 mounted on the other surface are both surfaces (front and back surfaces) of the substrate portion 51a and are thermally transmitted through the substrate portion 51a. It has a directly connected structure. Accordingly, the flow velocity detection unit 54 is supported so as to be positioned at the center of the belt-shaped outer peripheral portion by the pair of flow velocity detection unit support portions 52 integrally extending from the substrate main portion 51b. And the center line of the pair of flow velocity detecting portion support portions 52 have a saddle type offset structure, and a space 59 is formed around the flow velocity detecting portion 54. Reference numeral 512 denotes a signal extraction hole.

  With this configuration, when the fluid flows from the direction of the flow velocity detection unit support 52 toward the flow velocity detection unit 54, the direction of the fluid detection unit 54 is different from the direction of the flow velocity detection unit support 52. In the case of flowing into the flow, there is a phenomenon in which the amount of heat released to the fluid is reduced in the former case, which is a cause of directivity. Therefore, in the present invention, the center line of the pair of flow velocity detecting portion support portions 52 and the central portion of the flow velocity detecting portion 54 have a saddle-type offset structure, so that the heat radiation amount due to the difference in the fluid flow direction is dispersed. Therefore, the directivity can be improved so that the detection sensitivity of the flow velocity detector 54 becomes non-directional.

  A seventh embodiment of the present invention will be described in detail with reference to FIG. FIG. 8 shows a seventh embodiment of the present invention, and is a plan view of an essential part in which a portion of the flow velocity detector 64 is enlarged. In addition, about the same part as the 1st-6th Example, the same name and the same number are used and the description is abbreviate | omitted. Also, the temperature measuring element for measuring the temperature is omitted. The circuit pattern formed on the substrate 61 is not described.

  In the seventh embodiment, when the substrate portion 61a on which the flow velocity detection unit 64 is mounted has a plate-like shape and fluid flows in parallel with the substrate portion 61a, the heater element 67 is mounted on the substrate portion 61a on which the flow velocity detection unit 64 is mounted. Instead of a part, by forming the heat radiation pattern 611, the difference in heat dissipation due to the difference in the fluid flow direction is reduced, and the directional characteristics are improved so that the detection sensitivity of the flow velocity detection unit 64 becomes omnidirectional In addition, the object is to reduce the number of heater elements 67 to reduce power consumption for heat dissipation.

  As shown in FIG. 8, in the thermal flow rate / flow rate sensor 60 of the seventh embodiment, as in the fifth to sixth embodiments, the substrate main part (not shown) of the plate-shaped substrate 61 is A pair of flow rate detecting portion support portions 62 are formed so as to have a circular belt-shaped outer periphery, and extend integrally from the belt-shaped outer periphery in the center direction. Further, a substrate portion 61 a that forms the flow velocity detection portion 64 is integrally formed at the tip of the pair of flow velocity detection portion support portions 62. Accordingly, the substrate portion 61a is supported by the pair of flow velocity detecting portion support portions 62 at the central portion of the substrate main portion. In order to form such a structure, it is formed by cutting a plate-shaped substrate with NCM or the like, as in the case of the first to sixth embodiments.

  Circuit patterns 613 and 614 for the flow velocity detection unit are formed at the mounting position of the substrate portion 61a on which the flow velocity detection unit 64 is mounted, and the temperature measuring element 66 is soldered to one surface of the substrate portion 61a. It is implemented by. A heater element 67 is mounted on the other surface facing the temperature measuring element 66 by soldering.

  Reference numeral 611 denotes a heat radiation pattern for radiating the heat generated in the thermal flow rate / flow rate sensor 60 (flow rate detection unit 64) to the outside, and heat is applied to the heater element 67 through the through hole 612 and the heater element circuit pattern 613. Are joined together. The through hole 612 passes through the substrate portion 61a. The heater element circuit pattern 613 is also a circuit pattern for supplying power to the heater element 67, and is formed on the opposite surface (one surface) on which the temperature measuring element 66 is mounted. Accordingly, the heater element 67 and the temperature measuring element 66 are thermally and mechanically connected to the heat radiation pattern 611 through the through hole 612. The heat radiation pattern 611 has a role of correcting a decrease in detection sensitivity with respect to the fluid from the direction of the flow velocity detection unit support 62. Reference numeral 614 denotes a signal extraction circuit pattern to which the temperature measuring element 66 is connected, and is connected to an external device.

  Therefore, the temperature measuring element 66 and the heat radiation pattern 611 mounted on one surface of the substrate portion 61a and the heater element 67 mounted on the other surface are both surfaces (front and back surfaces) of the substrate portion 61a. It has a structure in which the portion 61a is directly thermally connected via the mounting portion. The flow velocity detector 64 is supported by a pair of flow velocity detector support portions 62 integrally extending from the substrate main portion 61b at the central portion of the belt-shaped outer peripheral portion. A space 69 is formed around the periphery.

  The temperature measuring element 66 and the heat radiation pattern 611 and the heater element 67 mounted on both surfaces (one surface and the other surface) with the substrate portion 61a interposed therebetween are thermally connected by a member having high thermal conductivity. The means to do is not limited to the means described in the seventh embodiment.

  Thus, the temperature measuring element 66 and the heat radiation pattern 611 are mounted on one surface and the heater element 67 is mounted on the other surface, and the heater element 67, the temperature measuring element 66, and the heat radiation pattern 611 are connected. Since the heater element 67 and the heat dissipation pattern 611 are thermally connected through the through-hole 612 and the heater element circuit pattern 613, the gap is thermally connected to each other with a member having high thermal conductivity. Heat transfer characteristics are improved.

  Therefore, since the difference in the heat radiation amount to the fluid can be reduced, the directivity can be improved so that the detection sensitivity of the flow velocity detection unit 64 becomes non-directional. Further, by providing the heat radiation pattern 611, the number of heater elements 67 can be reduced, so that power consumption for heat radiation can be reduced.

  In addition, the flow velocity detector 64 uses a heater element 67, which is a general-purpose surface-mounting electronic component, and a temperature measuring element 66 that measures the temperature of heat from the heater element 67. Since each electronic component can be mounted on the substrate by an automatic mounting machine that is generally used in the substrate manufacturing method, the assembly process can be automated easily, and the assembly cost is very low.

  The eighth embodiment of the present invention will be described in detail with reference to FIG. FIG. 9 is a plan view showing the principal part of an eighth embodiment of the present invention. In addition, about the same part as the 1st-7th Example, the same name and the same number are used and the description is abbreviate | omitted. Also, the temperature measuring element for measuring the temperature is omitted. The circuit pattern formed on the substrate 71 is not described.

  In the case of a fluid that flows in parallel with the substrate portion 71a, by providing the heat radiating portion 715 on the substrate portion 71a on which the flow velocity detector 74 is mounted, the difference in the amount of heat release due to the difference in the fluid flow direction is reduced, and the velocity detector 74. It aims at improving the directivity so that the detection sensitivity of the signal becomes omnidirectional.

  As shown in FIG. 9, in the thermal flow rate / flow rate sensor 70 of the eighth embodiment, the substrate main portion 71b of the plate-shaped substrate 71 has a circular belt-shaped outer periphery, as in the fourth to sixth embodiments. A pair of support portions 72 for the flow velocity detection portion are formed which extend integrally from the belt-shaped outer peripheral portion in the center direction. Furthermore, a substrate portion 71a that forms the flow velocity detection portion 74 and a heat dissipation portion 715 that extends to the substrate portion 71a are integrally formed at the distal ends of the pair of flow velocity detection portion support portions 72.

Therefore, the substrate portion 71a on which the flow velocity detection unit 74 is mounted and the heat radiation portion 715 extending on the substrate portion 71a are positioned at the center of the substrate main portion 71b by the pair of flow velocity detection portion support portions 72. It has a structure that is supported as such. In order to form such a structure, it is integrally formed by cutting a plate-shaped substrate with NCM or the like, as in the case of the first to the 76th embodiments.

  A circuit pattern (not shown) for the flow rate detection unit is formed on the substrate portion 71a on which the flow rate detection unit 74 is mounted, and a temperature measuring element 76 is mounted on one surface by soldering. On the other surface of the board portion 71a, two heater elements 77, 77 are mounted by soldering so as to face the temperature measuring element 76.

  A heat dissipation pattern 711 for radiating heat generated in the thermal flow rate / flow rate sensor 70 (flow rate detection unit 74) to the outside includes a through hole (not shown) and a heater element circuit pattern (not shown). It is thermally joined to the heater element 77 through the gap. As in the case of the seventh embodiment, the circuit pattern for supplying power to the heater element 77 is formed on the opposite surface (one surface) on which the temperature measuring element 76 is mounted. The heat radiation pattern 711 has a role of correcting a decrease in detection sensitivity with respect to the flow of fluid from the direction of the flow velocity detection unit support 72. Reference numeral 712 denotes a signal extraction circuit pattern to which the temperature measuring element 76 is connected, and is connected to an external device.

Reference numeral 715 denotes a heat radiating portion that is integrally extended from the substrate portion 71 a on which the flow velocity detecting portion 74 is mounted, and is integrally formed from the substrate 71 together with the extended signal extraction hole 712. The heat radiation unit 715 can average the detection sensitivity of the flow velocity detection unit 74 with respect to the flow of fluid from the direction of the flow velocity detection unit support unit 72. Therefore, the directivity can be improved so that the heat radiation unit 715 suppresses heat radiation from directions other than the direction of the flow velocity detection unit support 72 and the detection sensitivity of the flow velocity detection unit 74 becomes nondirectional. .

  Therefore, as in Example 7, the temperature measuring element 76 and the heat radiation pattern mounted on one surface of the substrate portion 71a and the heater element 77 mounted on the other surface are both surfaces (surfaces) of the substrate portion 71a. And the back surface) are directly connected thermally via the substrate portion 71a. The flow velocity detection unit 74 is supported by a pair of flow velocity detection unit support portions 72 extending integrally from the substrate main portion 71b so as to be positioned at the center of the belt-shaped outer peripheral portion. A space 79 is formed around the portion 74.

  Thus, the heat radiation part 715 improves the directivity so that the detection sensitivity becomes omnidirectional by suppressing heat radiation from directions other than the flow rate detection part support part 72 direction, and the flow speed detection part support part. The decrease in detection sensitivity is corrected for fluid from 72 directions. Therefore, the directivity can be improved so that the detection sensitivity of the thermal flow rate / flow rate sensor 70 becomes non-directional. Further, by providing the heat radiation pattern 611, the number of heater elements 67 can be reduced, so that power consumption for heat radiation can be reduced.

  Further, the heat radiation pattern 711 and the heat radiation portion 715 are heats of a structure in which the center of the flow velocity detection portion 54 described in the sixth embodiment and the center line of the pair of flow velocity detection portion support portions 52 have a saddle type offset structure. The present invention can also be applied to the type flow velocity / flow rate sensor 50. When applied, the same effect as described above can be obtained. Furthermore, since the offset structure is adopted, the amount of heat release can be dispersed due to the difference in the direction of fluid flow, so that the directional characteristics can be further improved so that the detection sensitivity of the flow velocity detector becomes non-directional. .

Next, the results of measuring the directivity characteristics using the prototype of the present invention will be described.
FIG. 10 is a directional characteristic diagram showing the results of comparative measurement of the detection sensitivity of the prototype A of the present invention and the conventional product. (A) is a directional characteristic chart in the horizontal direction, and (b) is a directional characteristic chart in the vertical direction. It is. In addition, as the prototype A of the present invention, the thermal flow rate / flow rate sensor 20 having the shape described in Example 2 was used, and as a conventional product, comparative measurement was performed using a spherical probe. In the figure, the solid line indicates the measurement result by the prototype of the present invention, and the broken line indicates the measurement result by the conventional product.

  As is clear from FIGS. 10A and 10B, the directional characteristics in the horizontal direction are almost good omnidirectional in both the prototype A and the conventional product, but the directional characteristics in the vertical direction are smaller than those in the conventional product. Clearly, the detection sensitivity of the prototype A is excellent in removing directivity. From the above experimental results, it was found that the prototype A according to the present invention has omnidirectionality in the direction of fluid flow, and there is no practical problem even when compared with the conventional product.

  FIG. 11 is a horizontal directional characteristic diagram showing the results of comparative measurement of the detection sensitivities of the prototype B (shown by a broken line) and the prototype A (shown by a solid line) of the present invention, and FIG. It is a directional characteristic figure of the horizontal direction which shows the result of having compared with each other using prototype and prototype C (shown with a broken line).

  Here, the prototype B of the present invention is the thermal flow velocity / flow rate sensor 15 having the shape described in the first embodiment (FIG. 1), and the prototype C is the thermal flow velocity having the shape described in the second embodiment. A thermal flow rate / flow rate sensor having a structure in which a heat radiation pattern and a through hole are formed in the substrate portion 21a on which the flow rate detection unit 24 of the flow rate sensor 20 is mounted.

  As is clear from FIG. 11, the directional characteristics in the horizontal direction are slightly decentered in the prototype B. In the prototype A, almost good directivity characteristics without eccentricity were obtained, and the result was that there was no problem in practical use because the fluid flow direction was omnidirectional.

  As is clear from FIG. 12, the prototype C shows almost the same directivity as the prototype A. Therefore, similar to the prototype A, the prototype C is omnidirectional in the direction of fluid flow, and there is no practical problem.

  It can be placed in each room in the building and used as part of the comfort sensor. There are PMV (predicted average thermal sensation), ET (effective temperature), OT (working temperature), etc. as comfort evaluation indexes of human living environment, all of which are calculated using the value of wind speed. Temperature sensors and humidity sensors are becoming popular in ordinary households, but fans have been used as a method for maintaining comfort in summer since ancient times, and it is known that the wind is effective in maintaining and improving comfort. ing. This is because by removing the air staying layer and the boundary layer formed on the body surface of the living body by the air flow by the wind, the evaporation of the skin surface is promoted and the skin can obtain a cooling effect.

  However, wind speed sensors have never been used in devices such as air conditioners and electric fans. Since the present invention can provide a thermal flow rate / flow rate sensor with improved cost, durability, and ease of manufacture, the possibility of introduction into a living environment that has not been introduced in the past is expected.

  Similarly, it can be expected to be applied to the monitoring of human living environment and surrounding environment, such as inspection of ventilation function in buildings, inspection and monitoring of labor environment standards, and inspection and monitoring of smoke distribution based on the Health Promotion Law.

  On the other hand, in medical institutions such as hospitals, it is known that the surrounding environment of patients affects the recovery of treatment for patients, and temperature and humidity have been actively managed from the past. In addition, patients who have undergone surgery, immediately after surgery, or patients who have undergone modulation of the bioregulatory function, need to pay more attention to environmental management than patients in other conditions because the body temperature regulation function is reduced. is there. Furthermore, the post-operative course of a surgical patient is particularly required to minimize environmental stress on the patient during and after surgery. However, the air velocity, which is one of the evaluation factors of comfort, has not been actively used until now. In Japan's medical environment where the number of beds is decreasing, early discharge due to short-term recovery of patients will benefit patients who are burdened with medical institutions and are forced to wait for hospitalization. Therefore, introduction into the medical field can be expected.

  In the industrial field, it can be applied to inspection of wind speed and air volume in a clean air environment. In clean rooms and chambers where only the inside of a box-like structure can be made into a clean air environment, attention must be paid to the mixing and mixing of contaminated air, but conventionally the wind speed and volume could not be monitored. In addition, in the field of agriculture, especially in the field of horticulture, it has been found that applying a breeze of 0.3 to 0.7 m / s. To a plant body or plant community is effective in promoting photosynthesis and preventing disease. Therefore, it is expected to be used for monitoring clean air environment and plant production management.

15, 20, 30, 40, 50, 60, 70, 140 Thermal flow rate / flow rate sensor 1, 21, 31, 41, 51, 61, 71, 141 Substrate 1a, 21a, 31a, 41a, 51a, 61a, 71a 141a Substrate portions for the flow velocity detection portion 1b, 21b, 31b, 147b Plate-shaped substrate main portions 41b, 51b, 61b, 71b Substrate main portions (band-shaped outer peripheral portions)
2, 32, 42, 52, 62, 72, 142 Flow rate detection unit support unit 3 Temperature measurement unit support unit 4, 24, 34, 44, 54, 64, 74 Flow rate detection unit 5 Temperature measurement unit 6, 26, 36, 46, 56, 66, 76 Temperature measuring element 7, 27, 37, 47, 57, 67, 77 Heater element 9, 49, 59, 69, 79 Space 150 Semi-cylindrical through hole 611 Heat radiation pattern 612 Through hole 715 Heat dissipation part

Claims (17)

A flow rate detector having a heater element that generates heat by a supply current and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow rate; and a main part of the substrate of the thermal flow rate / flow rate sensor. A substrate main part, an elongated flow velocity detection part support integrally extending from the substrate main part, a substrate part for mounting the flow velocity detection part, and the flow rate detection part formed on the substrate part In a thermal flow rate / flow rate sensor that measures the flow rate and flow rate of a fluid with a space around the flow rate detection unit,
The substrate portion on which the flow velocity detection unit is mounted is formed in a polygonal shape having a plurality of surfaces,
The temperature measuring element is mounted on any one of the polygonal substrate parts on which the flow velocity detection unit is mounted,
The heater element is mounted on each surface of a polygonal substrate portion on which the flow velocity detection unit is mounted,
A thermal flow rate / flow rate sensor comprising a flow rate detection unit configured by thermally connecting the temperature measuring element and the heater element via a substrate portion on which the flow rate detection unit is mounted. The thermal type flow velocity / flow rate sensor according to claim 1, wherein the temperature measuring element is mounted on a top portion of an end surface of a polygonal substrate portion on which the flow velocity detection unit is mounted. The polygonal substrate portion on which the flow velocity detection unit is mounted is formed in a plate shape composed of a front surface and a back surface,
The temperature measuring element is mounted on either the front surface or the back surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted,
The thermal heater / flow velocity / flow rate sensor according to claim 1, wherein the heater element is mounted on a front surface and a back surface of a plate-shaped substrate portion on which the flow velocity detection unit is mounted. The polygonal substrate portion on which the flow velocity detection unit is mounted is formed in a quadrangular prism shape having four uniform surfaces,
The temperature measuring element is mounted on any one of the square pillar-shaped substrate parts on which the flow velocity detection unit is mounted,
3. The thermal flow velocity / flow rate sensor according to claim 1, wherein the heater element is mounted on each surface of a quadrangular prism-shaped substrate portion on which the flow velocity detection unit is mounted. A flow rate detector having a heater element that generates heat by a supply current and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow rate, and a main part of the thermal flow rate / flow rate sensor. A strip-shaped outer peripheral portion constituting the main part of the plate-shaped substrate, a pair of elongated flow velocity detection portion support portions integrally extending in the center direction from the belt-shaped outer peripheral portion, and the pair of flow velocity detection portion support portions A board portion that is supported by the tip of the part and is located at the center of the belt-like outer peripheral portion and that is mounted with the plate-shaped flow velocity detection portion formed integrally with the substrate main portion; A circuit pattern for the flow velocity detection unit formed, and the substrate main portion constituting the belt-shaped outer peripheral portion is used as a guard portion for protecting the flow velocity detection unit, and a space is formed around the flow velocity detection unit. Flow velocity of the installed fluid and The thermal type flow rate-flow rate sensor for measuring a flow rate,
The temperature measuring element is mounted on one surface of a plate-shaped substrate portion on which the flow velocity detection unit is mounted,
The heater element is mounted on each surface of a plate-shaped substrate portion on which the flow velocity detection unit is mounted,
A thermal flow rate / flow rate sensor comprising a flow rate detection unit configured by thermally connecting the temperature measuring element and the heater element via a substrate portion on which the flow rate detection unit is mounted. The center line of the flow velocity detecting portion supporting portion for supporting the flow velocity detecting portion so as to be positioned at the center of the main portion of the substrate constituting the belt-shaped outer peripheral portion has a saddle type offset structure. Item 6. The thermal flow rate / flow rate sensor according to item 5. The thermal flow velocity / flow rate sensor according to any one of claims 1 to 6, wherein a heat radiating portion is integrally extended on a substrate portion on which the flow velocity detection portion is mounted. The thermal type flow velocity / flow rate sensor according to any one of claims 1 to 7, wherein a plurality of the heater elements are mounted on each surface of a substrate portion on which the flow rate detection unit is mounted. The heater element is mounted on one surface of the substrate portion on which the flow velocity detection unit is mounted,
A heat dissipation pattern is provided on each surface of the substrate portion on which the flow velocity detection unit is mounted excluding the substrate portion on which the heater element is mounted,
The heat dissipation pattern and the heater element are thermally connected by a member having high thermal conductivity,
The flow rate detection unit formed by thermally connecting the temperature measuring element, the heater element, and the heat radiation pattern via a substrate portion on which the flow rate detection unit is mounted is configured. The thermal flow velocity / flow rate sensor according to claim 7. A plurality of the heater elements are mounted on one surface of the substrate portion on which the flow velocity detection unit is mounted,
10. The thermal flow velocity and the heat flow pattern according to claim 9, wherein a plurality of the heat radiation patterns are provided on each surface of the substrate portion on which the flow velocity detection unit is mounted except for the substrate portion on which the heater element is mounted. Flow sensor. The thermal flow rate / flow rate sensor according to any one of claims 9 to 10, wherein the member having a high thermal conductivity is a wiring material of a substrate. The thermal flow rate / flow rate sensor according to claim 11, wherein the wiring material of the substrate is a through hole or a via hole. A through hole or via hole, which is a wiring material of a substrate with high thermal conductivity, is formed in a semi-cylindrical shape on the side surface of the substrate portion on which the flow velocity detection unit is mounted,
4. The heater elements mounted on each surface of a plate-shaped substrate portion on which the flow velocity detection unit is mounted are thermally connected to each other through the semi-cylindrical through hole or via hole. The thermal flow velocity / flow rate sensor according to any one of claims 5 to 6. The thermal flow rate / flow rate sensor according to claim 13, wherein a heat radiating unit is integrally extended on a substrate portion on which the flow rate detection unit is mounted. The thermal flow velocity / flow rate sensor according to any one of claims 13 to 14, wherein a plurality of the heater elements are mounted on each surface of a substrate portion on which the flow velocity detection unit is mounted. The heater element is mounted on one surface of the substrate portion on which the flow velocity detection unit is mounted,
On the other surface of the plate-shaped substrate portion on which the flow velocity detection unit is mounted, a heat dissipation pattern is provided,
The heat dissipation pattern and the heater element are thermally connected by a through hole or a via hole formed in the semi-cylindrical shape,
The flow rate detection part formed by thermally connecting the said temperature measuring element, the said heater element, and the said thermal radiation pattern via the board | substrate part which mounts the said flow rate detection part was comprised. The thermal flow velocity / flow rate sensor according to claim 14. A plurality of the heater elements are mounted on one surface of the substrate portion on which the flow velocity detection unit is mounted,
The thermal flow rate / flow rate sensor according to claim 16, wherein a plurality of the heat radiation patterns are provided on the other surface of the substrate portion on which the flow rate detection unit is mounted.

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