JP2015206641A5 - - Google Patents

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JP2015206641A5
JP2015206641A5 JP2014086323A JP2014086323A JP2015206641A5 JP 2015206641 A5 JP2015206641 A5 JP 2015206641A5 JP 2014086323 A JP2014086323 A JP 2014086323A JP 2014086323 A JP2014086323 A JP 2014086323A JP 2015206641 A5 JP2015206641 A5 JP 2015206641A5
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microwave
ferromagnetic resonance
sample
magnetic field
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JP2014086323A
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JP2015206641A (ja
JP6614631B2 (ja
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Claims (4)

  1. マイクロ波発振器から出力されたマイクロ波を第１マイクロ波と第２マイクロ波に分岐器で分岐し、試料Ｓを配置される導波路を設けられた第１経路とこれを含まない第２経路とにそれぞれ伝送させた後、これらを結合器で結合させて検出器で検出を行いつつ、前記第１マイクロ波による高周波磁場Ｈ RF とともに磁石から外部直流磁場Ｈ B を前記導波路に印加し、外部直流磁場Ｈ B の強度を掃引することで前記導波路内の前記試料Ｓに強磁性共鳴を生じさせて該検出を行う強磁性共鳴測定装置であって、
    前記第１経路及び／又は前記第２経路には、前記第１マイクロ波と前記第２マイクロ波の位相を１８０度反転させるよう位相シフタが与えられるととともに、前記第１マイクロ波と前記第２マイクロ波の振幅を同じとなるように位相振幅調整器が与えられ、前記磁石から前記試料Ｓに低周波変調磁場ＨLFを印加し、前記検出器の出力信号から前記低周波変調磁場ＨLFの変調周波数成分を抽出することを特徴とする強磁性共鳴測定装置。
  2. 前記マイクロ波発振器は、基準信号源及びフェーズロックドループ回路を含むことを特徴とする請求項１記載の強磁性共鳴測定装置。
  3. 前記導波路は複数の帯状導体箔を備えたコプレーナ導波路であって、前記試料Ｓは前記帯状導体箔の中央部に配置されることを特徴とする請求項１又は２に記載の強磁性共鳴測定装置。
  4. ６０ｄＢ以上の消光比を有することを特徴とする請求項１乃至３のうちの１つに記載の強磁性共鳴測定装置。
JP2014086323A 2014-04-18 2014-04-18 強磁性共鳴測定装置 Active JP6614631B2 (ja)

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JP2014086323A JP6614631B2 (ja) 2014-04-18 2014-04-18 強磁性共鳴測定装置

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JP2014086323A JP6614631B2 (ja) 2014-04-18 2014-04-18 強磁性共鳴測定装置

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JP2015206641A JP2015206641A (ja) 2015-11-19
JP2015206641A5 true JP2015206641A5 (ja) 2017-06-01
JP6614631B2 JP6614631B2 (ja) 2019-12-04

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10761154B2 (en) * 2018-01-19 2020-09-01 Taiwan Semiconductor Manufacturing Company, Ltd. Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices
US10754000B2 (en) * 2018-08-07 2020-08-25 Taiwan Semiconductor Manufacturing Company, Ltd. Multi-probe ferromagnetic resonance (FMR) apparatus for wafer level characterization of magnetic films
KR102659339B1 (ko) * 2020-12-29 2024-04-19 한국기초과학지원연구원 강자성 공명 및 역스핀홀 전압측정 시스템용 동일평면 도파관 및 그를 이용한 프로우브 인서트
US11726062B2 (en) * 2021-03-19 2023-08-15 Taiwan Semiconductor Manufacturing Company Ltd Magnetic layer characterization system and method

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US4593248A (en) * 1984-03-27 1986-06-03 The Medical College Of Wisconsin, Inc. Oxymeter
JP3322688B2 (ja) * 1992-04-23 2002-09-09 住友特殊金属株式会社 電子スピン共鳴装置
JP2009115772A (ja) * 2007-11-05 2009-05-28 Keycom Corp 伝送線路を用いたｅｓｒ検出器
JP2012103234A (ja) * 2010-11-10 2012-05-31 Keycom Corp Ｅｓｒ検出器

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