JP2015198100A5 - - Google Patents

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Publication number
JP2015198100A5
JP2015198100A5 JP2014073561A JP2014073561A JP2015198100A5 JP 2015198100 A5 JP2015198100 A5 JP 2015198100A5 JP 2014073561 A JP2014073561 A JP 2014073561A JP 2014073561 A JP2014073561 A JP 2014073561A JP 2015198100 A5 JP2015198100 A5 JP 2015198100A5
Authority
JP
Japan
Prior art keywords
guide frame
engaged
bearing unit
guide
chamber apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014073561A
Other languages
English (en)
Japanese (ja)
Other versions
JP6290686B2 (ja
JP2015198100A (ja
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Publication date
Application filed filed Critical
Priority to JP2014073561A priority Critical patent/JP6290686B2/ja
Priority claimed from JP2014073561A external-priority patent/JP6290686B2/ja
Publication of JP2015198100A publication Critical patent/JP2015198100A/ja
Publication of JP2015198100A5 publication Critical patent/JP2015198100A5/ja
Application granted granted Critical
Publication of JP6290686B2 publication Critical patent/JP6290686B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014073561A 2014-03-31 2014-03-31 チャンバ装置及び処理システム Active JP6290686B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014073561A JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014073561A JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Publications (3)

Publication Number Publication Date
JP2015198100A JP2015198100A (ja) 2015-11-09
JP2015198100A5 true JP2015198100A5 (enExample) 2017-04-06
JP6290686B2 JP6290686B2 (ja) 2018-03-07

Family

ID=54547648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014073561A Active JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Country Status (1)

Country Link
JP (1) JP6290686B2 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483021U (enExample) * 1977-11-24 1979-06-12
JPS5560761A (en) * 1978-10-31 1980-05-08 Murata Mach Ltd Double shutter
JP2001008757A (ja) * 1999-07-01 2001-01-16 Nanbu Plastics Co Ltd 引出し案内機構並びに引出し及び懸架用レール
JP4699705B2 (ja) * 2004-03-09 2011-06-15 日本アキュライド株式会社 スライドレールの収納時保持装置
JP2011024630A (ja) * 2009-07-21 2011-02-10 Okamura Corp デスク装置
US8261928B2 (en) * 2010-06-02 2012-09-11 Eaton Corporation Swing bolt splash shield

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