JP2015198100A5 - - Google Patents

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Publication number
JP2015198100A5
JP2015198100A5 JP2014073561A JP2014073561A JP2015198100A5 JP 2015198100 A5 JP2015198100 A5 JP 2015198100A5 JP 2014073561 A JP2014073561 A JP 2014073561A JP 2014073561 A JP2014073561 A JP 2014073561A JP 2015198100 A5 JP2015198100 A5 JP 2015198100A5
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JP
Japan
Prior art keywords
guide frame
engaged
bearing unit
guide
chamber apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014073561A
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English (en)
Japanese (ja)
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JP6290686B2 (ja
JP2015198100A (ja
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Priority to JP2014073561A priority Critical patent/JP6290686B2/ja
Priority claimed from JP2014073561A external-priority patent/JP6290686B2/ja
Publication of JP2015198100A publication Critical patent/JP2015198100A/ja
Publication of JP2015198100A5 publication Critical patent/JP2015198100A5/ja
Application granted granted Critical
Publication of JP6290686B2 publication Critical patent/JP6290686B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014073561A 2014-03-31 2014-03-31 チャンバ装置及び処理システム Active JP6290686B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014073561A JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014073561A JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Publications (3)

Publication Number Publication Date
JP2015198100A JP2015198100A (ja) 2015-11-09
JP2015198100A5 true JP2015198100A5 (enrdf_load_stackoverflow) 2017-04-06
JP6290686B2 JP6290686B2 (ja) 2018-03-07

Family

ID=54547648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014073561A Active JP6290686B2 (ja) 2014-03-31 2014-03-31 チャンバ装置及び処理システム

Country Status (1)

Country Link
JP (1) JP6290686B2 (enrdf_load_stackoverflow)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483021U (enrdf_load_stackoverflow) * 1977-11-24 1979-06-12
JPS5560761A (en) * 1978-10-31 1980-05-08 Murata Mach Ltd Double shutter
JP2001008757A (ja) * 1999-07-01 2001-01-16 Nanbu Plastics Co Ltd 引出し案内機構並びに引出し及び懸架用レール
JP4699705B2 (ja) * 2004-03-09 2011-06-15 日本アキュライド株式会社 スライドレールの収納時保持装置
JP2011024630A (ja) * 2009-07-21 2011-02-10 Okamura Corp デスク装置
US8261928B2 (en) * 2010-06-02 2012-09-11 Eaton Corporation Swing bolt splash shield

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