JP2015198012A - substrate processing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently form an organic layer of an organic light emitting diode on a substrate.SOLUTION: A burning device 132, a temperature control device 134 and a substrate carrier device 122 respectively include: processing containers 200, 300, 400 in which each inside atmosphere is kept in an atmosphere of a predetermined oxygen concentration lower than ambient air and a predetermined dew-point temperature lower than ambient air; gas supply parts 240, 320, 420 for supplying the processing container 200, 300, 400 with an inert gas; air exhaustion parts 250, 330, 430 for exhausting air in respective processing containers 200, 300, 400; refiners 263, 341, 441 for removing oxygen and moisture in each atmosphere of the processing containers 200, 300, 400; and gas circulation systems 260, 340, 440 for returning atmospheres refined by the refiners 263, 341, 441 to the processing containers 200, 300, 400.

Description

  The present invention relates to a substrate processing system for forming an organic layer of an organic light emitting diode on a substrate.

  An organic light emitting diode (OLED) is a light emitting diode using light emission of an organic EL (Electroluminescence). In recent years, organic EL displays using organic light-emitting diodes are advantageous in that they are thin and light, have low power consumption, and are excellent in terms of response speed, viewing angle, and contrast ratio. It is attracting attention as a next generation flat panel display (FPD).

  In the organic light emitting diode, for example, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer, which are organic layers, are laminated in this order from the anode side between the anode and the cathode on the substrate. It has a structure. When manufacturing such an organic light emitting diode, for a specific organic layer, in order to suppress deterioration of the organic layer such as a decrease in the luminous efficiency of the organic layer or a shortened emission lifetime, a low oxygen and low dew point Is required to be processed in the atmosphere.

  Therefore, for example, Patent Document 1 discloses an apparatus for manufacturing an organic EL display for the purpose of maintaining such a low oxygen low dew point atmosphere. Specifically, the manufacturing apparatus of Patent Document 1 includes an organic EL manufacturing line installed inside a sealed chamber, means for supplying nitrogen gas inside the sealed chamber, and nitrogen gas supplied inside the sealed chamber as a filter. Means for passing it back into the sealed chamber.

JP 2013-140721 A

  However, in the manufacturing apparatus described in Patent Document 1, a low oxygen and low dew point atmosphere is maintained in all processes of the organic EL production line. The atmosphere is maintained. For this reason, for example, a large amount of nitrogen gas is required at the time of starting up the manufacturing apparatus, which increases the manufacturing cost of the organic EL display. In particular, with the recent increase in the size of organic EL displays, the size of the chamber has increased, and the influence of the consumption of nitrogen gas appears significantly.

  This invention is made | formed in view of this point, and it aims at efficiently forming the organic layer of an organic light emitting diode on a board | substrate.

  In order to achieve the above object, the present invention provides a substrate processing system for forming an organic layer of an organic light emitting diode on a substrate, wherein the organic layer is applied on the substrate and further dried. A baking device for baking the organic layer, a temperature adjusting device for adjusting the temperature of the substrate after baking the organic layer with the baking device, a substrate transfer device for transferring the substrate to the baking device and the temperature adjusting device, The baking apparatus, the temperature control apparatus, and the substrate transfer apparatus are each maintained in an atmosphere having a predetermined oxygen concentration lower than the air and a predetermined dew point temperature lower than the air. A processing vessel, a gas supply unit that supplies an inert gas into the processing vessel, an exhaust unit that exhausts the inside of the processing vessel, and a purifier that removes oxygen and moisture in the atmosphere in the processing vessel. The refiner Is characterized by having a gas circulation system for returning the purified atmosphere in the processing vessel, the.

  As a result of intensive studies by the inventors, a specific organic layer, such as a hole transport layer and a light-emitting layer, is applied on the substrate, and then the substrate is heat-treated, so that a low oxygen and low dew point atmosphere is required. I understood. In the substrate processing system of the present invention, a gas circulation system is provided in a baking apparatus and a temperature control apparatus that perform heat treatment, and a substrate transfer apparatus that transfers the substrate to the baking apparatus and the temperature control apparatus. Then, in these apparatuses, for example, after replacing the atmosphere of the processing container with an inert gas using a gas supply unit, the atmosphere of the processing container can be recycled using a gas circulation system. Then, while the atmosphere in the processing container is being recycled, the substrate can be appropriately heat-treated while the atmosphere in the processing container is maintained at a predetermined oxygen concentration and a predetermined dew point temperature.

  Moreover, for example, the inert gas is supplied from the gas supply unit into the processing container only when the firing apparatus, the temperature control apparatus, and the substrate transfer apparatus are started up, that is, when the atmosphere in the processing container is started up from the atmospheric state. . On the other hand, during normal operation, the atmosphere of the processing container can be recycled to stop the supply of inert gas from the gas supply unit. Therefore, the consumption of the inert gas can be suppressed to a small amount, and the heat treatment of the substrate can be performed efficiently.

  The atmosphere control in the processing container in the baking apparatus, the atmosphere control in the processing container in the temperature control apparatus, and the atmosphere control in the processing container in the substrate transfer apparatus may be performed individually.

  The pressure in the processing container of the baking apparatus and the pressure in the processing container of the temperature control apparatus may be positive from the atmosphere and negative from the pressure in the processing container of the substrate transfer apparatus. .

  The substrate processing system further includes a control unit that controls the atmosphere in the processing container of the baking apparatus, the atmosphere in the processing container of the temperature control apparatus, and the atmosphere in the processing container of the substrate transfer apparatus, and the control unit Supplies an inert gas from the gas supply unit into the processing container, exhausts the processing container by the exhaust unit, and replaces the atmosphere in the processing container with an inert gas, The first step of making the atmosphere with a low oxygen concentration and a dew point temperature lower than the atmosphere and the supply of the inert gas from the gas supply unit are stopped, and the gas is purified by the purifier using the gas circulation system. And the second step of maintaining the atmosphere in the processing container at a predetermined oxygen concentration and a predetermined dew point temperature, and performing the second step of returning the atmosphere to the processing container. Circulation It may control the system.

  The gas circulation system further includes a pipe that connects the processing vessel and the purifier, and the control unit is configured so that, in the first step, the inert gas supplied from the gas supply unit in the pipe. The atmosphere may be replaced with an inert gas, and the atmosphere may be controlled to have an oxygen concentration lower than that of air and a dew point temperature lower than that of air.

  In the first step, the control unit may control the atmosphere in the processing container so as not to pass through the purifier.

  The purifier includes a plurality of purification cylinders for removing oxygen and moisture in the atmosphere in the processing vessel, another gas supply unit for supplying a regeneration gas containing hydrogen gas to the purification cylinder, and the inside of the purification cylinder. An exhaust unit for exhausting the exhaust gas, and the control unit purifies the atmosphere in the processing vessel with the one purification cylinder in the second step, and the other gas with respect to the other purification cylinder. While supplying the regeneration gas from the supply unit, the other exhaust unit and the other exhaust unit are controlled so that the other exhaust unit exhausts the inside of the purification cylinder to regenerate the other purification cylinder. May be.

  The substrate processing system further includes an oxygen concentration meter that measures an oxygen concentration of an atmosphere in the processing container, and a dew point thermometer that measures a dew point temperature of the atmosphere in the processing container, and the control unit includes: The atmosphere in the processing container may be controlled based on the measurement result of the oxygen concentration meter and the measurement result of the dew point thermometer.

  The substrate processing system further includes a door for opening and closing the inside of the processing container with respect to the outside, and the control unit controls opening and closing of the door based on a measurement result of the oximeter. Also good.

  The gas circulation system provided in the baking apparatus includes a cooler that cools an atmosphere before being purified by the purifier, and an atmosphere after being cooled by the cooler and before being purified by the purifier And a filter for removing the foreign matter.

  The gas circulation system provided in the temperature adjusting device may further include a temperature adjuster that adjusts the temperature of the atmosphere in the processing container.

  According to the present invention, an organic layer of an organic light emitting diode can be appropriately and efficiently formed on a substrate.

It is a flowchart which shows the main processes of the manufacturing method of an organic light emitting diode. It is a side view which shows the outline of a structure of an organic light emitting diode. It is a top view which shows the outline of a structure of the partition of an organic light emitting diode. It is a top view which shows the outline of a structure of the substrate processing system concerning this Embodiment. It is a longitudinal cross-sectional view which shows the outline of a structure of a baking apparatus. It is explanatory drawing which shows the outline of a structure of a baking apparatus, a temperature control apparatus, and a 3rd board | substrate conveyance apparatus. It is a schematic diagram which shows the outline of a structure of a refiner. It is explanatory drawing which shows the atmosphere control in a 1st operation mode. It is explanatory drawing which shows the atmosphere control in a 1st operation mode. It is explanatory drawing which shows the atmosphere control in 2nd operation mode. It is explanatory drawing which shows the atmosphere control in 2nd operation mode. It is explanatory drawing of the airflow which arises in a substrate processing system.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. The present invention is not limited to the embodiments described below.

<1. Manufacturing method of organic light emitting diode>
First, a method for manufacturing an organic light emitting diode will be described. FIG. 1 shows a main processing flow of a method for manufacturing an organic light emitting diode.

  First, when manufacturing the organic light emitting diode 1 as shown in FIG. 2, an anode (anode) 10 is formed on a glass substrate G as a substrate (step S1 in FIG. 1). The anode 10 is formed using, for example, a vapor deposition method. For the anode 10, a transparent electrode made of, for example, ITO (Indium Tin Oxide) is used.

  Thereafter, a partition wall 20 is formed on the anode 10 as shown in FIG. 3 (step S2 in FIG. 1). The partition wall 20 is patterned into a predetermined pattern by performing, for example, a photolithography process and an etching process. A plurality of slit-shaped openings 21 are formed in the partition wall 20 side by side in the column direction (X direction) and the row direction (Y direction). Inside the opening 21, a plurality of organic layers 30 to 34 and a cathode 40 are stacked to form a pixel, as will be described later. For the partition wall 20, for example, a photosensitive polyimide resin is used.

  Thereafter, a plurality of organic layers 30 to 34 are formed on the anode 10 in the opening 21 of the partition wall 20 as shown in FIG. Specifically, a hole injection layer 30 that is an organic layer is formed on the anode 10 (step S3 in FIG. 1), and a hole transport layer 31 that is an organic layer is formed on the hole injection layer 30 (see FIG. 1). 1, a light emitting layer 32 that is an organic layer is formed on the hole transport layer 31 (step S5 in FIG. 1), and an electron transport layer 33 that is an organic layer is formed on the light emitting layer 32 (FIG. 1). Step S6), an electron injection layer 34, which is an organic layer, is formed on the electron transport layer 33 (Step S7 in FIG. 1).

  Thereafter, a cathode 40 is formed on the electron injection layer 34 (step S8 in FIG. 1). The cathode 40 is formed using, for example, a vapor deposition method. For the cathode 40, for example, aluminum is used.

  In the organic light emitting diode 1 manufactured as described above, a predetermined number of holes injected in the hole injection layer 30 are applied to the hole transport layer 31 by applying a voltage between the anode 10 and the cathode 40. A predetermined number of electrons that are transported to the light emitting layer 32 through the electron injection layer 34 are transported to the light emitting layer 32 through the electron transport layer 33. Then, holes and electrons recombine in the light emitting layer 32 to form excited molecules, and the light emitting layer 32 emits light.

<2. Substrate processing system>
Next, the substrate processing system 100 according to the present embodiment will be described. FIG. 4 is an explanatory diagram showing an outline of the configuration of the substrate processing system 100. Note that the anode 10, the partition wall 20, and the hole injection layer 30 are formed in advance on the glass substrate G to be processed by the substrate processing system 100, and the hole transport layer 31 is formed in the substrate processing system 100.

  The substrate processing system 100 includes a loading / unloading station 101 for loading and unloading a plurality of glass substrates G from outside to the outside in a cassette unit, and a processing including a plurality of processing apparatuses for performing predetermined processing on the glass substrates G. The station 102 is integrally connected.

  The loading / unloading station 101 is provided with a cassette mounting table 110. The cassette mounting table 110 can mount a plurality of cassettes C in a row in the X direction. That is, the carry-in / out station 101 is configured to be capable of holding a plurality of glass substrates G.

  The carry-in / out station 101 is provided with a substrate transport body 112 that can move on a transport path 111 extending in the X direction. The substrate transfer body 112 is also movable in the vertical direction and the vertical direction, and can transfer the glass substrate G between the cassette C and the processing station 102. Note that the substrate transport body 112 transports the glass substrate G by suction and holding, for example.

  In the processing station 102, a first substrate transfer device 120, a second substrate transfer device 121, and a third substrate transfer device 122 are arranged in this order from the load / unload station 101 side in the Y direction. Each of the substrate transfer devices 120, 121, and 122 is provided with a substrate transfer body (not shown) that transfers the glass substrate G. The substrate transfer body is also movable in the horizontal direction, the vertical direction, and the vertical direction, and can transfer the glass substrate G to each device provided adjacent to these substrate transfer devices 120, 121, and 122.

  The third substrate transfer device 122 is provided with a baking device 132, a temperature control device 134, and a buffer device 136, which will be described later, and the inside of these devices 132, 134, and 136 is an atmosphere of low oxygen and low dew point. (Hereinafter referred to as a low oxygen, low dew point atmosphere). For this reason, the interior of the third substrate transfer device 122 is also maintained in a low oxygen, low dew point atmosphere. In the following description, a low oxygen atmosphere refers to an atmosphere having an oxygen concentration lower than that of the air, for example, an atmosphere having an oxygen concentration of 10 ppm or less, and a low dew point atmosphere refers to an atmosphere having a dew point temperature lower than that of the air, such as a dew point temperature of − An atmosphere of 70 ° C. or lower. As such a low oxygen low dew point atmosphere, for example, an inert gas such as nitrogen gas is used.

  Between the carry-in / out station 101 and the first substrate transfer device 120, and between the first substrate transfer device 120 and the second substrate transfer device 121, there are transition devices 123 and 124 for delivering the glass substrate G, respectively. Is provided. Between the second substrate transfer device 121 and the third substrate transfer device 122, a load lock device 125 capable of temporarily storing the glass substrate G is provided. The load lock device 125 is configured to be able to switch the internal atmosphere, that is, to switch between an air atmosphere and a low oxygen and low dew point atmosphere. The load lock device 125 is connected to the third substrate transfer device 122 via the gate valve 126. In the processing station 102 (substrate processing system 100), the glass substrate G is processed and transported in the atmosphere at the upstream side (Y direction negative direction side) of the load lock device 125, and the downstream side of the load lock device 125. In the (Y direction positive direction side), the glass substrate G is processed and transported in a low oxygen and low dew point atmosphere.

  A coating device 130 for applying an organic material for forming the hole transport layer 31 on the glass substrate G (hole injection layer 30) is provided on the positive side in the X direction of the first substrate transport device 120. . In the coating device 130, an organic material is applied to a predetermined position on the glass substrate G, that is, inside the opening 21 of the partition wall 20 by an inkjet method. The organic material of the present embodiment is a solution obtained by dissolving a predetermined material for forming the hole transport layer 31 in an organic solvent.

  A plurality of reduced-pressure drying devices 131 for drying the organic material applied by the coating device 130 under reduced pressure are stacked on the positive side in the X direction and the negative side in the X direction of the second substrate transport device 121, for example, five in total. It has been. The reduced pressure drying device 131 has, for example, a turbo molecular pump (not shown), and the organic atmosphere is dried by reducing the internal atmosphere to, for example, 1 Pa or less.

  On the positive side in the X direction of the third substrate transfer device 122, a baking device 132 as a heat treatment device is provided via a gate valve 133 to heat and bak the organic material dried by the vacuum drying device 131. . The inside of the baking apparatus 132 is maintained in a low oxygen, low dew point atmosphere. The configuration of the baking apparatus 132 will be described later. Instead of the gate valve 133, a shutter may be used.

  On the negative side in the X direction of the third substrate transfer device 122, a temperature adjustment device as a heat treatment device that adjusts the glass substrate G heat-treated by the baking device 132 to a predetermined temperature, for example, room temperature (23 ° C. ± 1 ° C.). 134 is provided via a gate valve 135. The inside of the temperature control device 134 is maintained in a low oxygen low dew point atmosphere. The temperature adjusting device 134 is provided with a plurality of mounting plates (not shown) for mounting the glass substrate G therein, and the glass substrate G on the mounting plate is adjusted to a predetermined temperature. The In place of the gate valve 135, a shutter may be used.

  A buffer device 136 that temporarily stores a plurality of glass substrates G is provided via a gate valve 137 on the Y direction positive direction side of the third substrate transfer device 122. The inside of the temperature control device 134 is maintained in a low oxygen low dew point atmosphere. In place of the gate valve 137, a shutter may be used.

  In the processing station 102, the number and arrangement of the coating device 130, the vacuum drying device 131, the baking device 132, the temperature adjusting device 134, and the buffer device 136 can be arbitrarily selected.

  The substrate processing system 100 is provided with a control unit 140. The control unit 140 is, for example, a computer and has a program storage unit (not shown). The program storage unit stores a program for controlling processing of the glass substrate G in the substrate processing system 100. The program is recorded on a computer-readable storage medium H such as a computer-readable hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnetic optical desk (MO), or a memory card. May have been installed in the control unit 140 from the storage medium H.

  Next, the processing method of the glass substrate G performed using the substrate processing system 100 configured as described above will be described.

  First, a cassette C containing a plurality of glass substrates G is loaded into the loading / unloading station 101 and placed on the cassette mounting table 110. Thereafter, the glass substrates G are sequentially taken out from the cassette C on the cassette mounting table 110 by the substrate carrier 112.

  The glass substrate G taken out from the cassette C is transported to the transition device 123 of the processing station 102 by the substrate transport body 112 and further transported to the coating device 130 by the first substrate transport device 120. And in the coating device 130, the organic material for the positive hole transport layer 31 is apply | coated on the glass substrate G (hole injection layer 30) with the inkjet method. The coating process in the coating apparatus 130 does not have to be performed in a low oxygen, low dew point atmosphere.

  Next, the glass substrate G is transferred to the transition device 124 by the first substrate transfer device 120 and further transferred to the reduced pressure drying device 131 by the second substrate transfer device 121. In the vacuum drying apparatus 131, the internal atmosphere is decompressed, and the organic material applied on the glass substrate G is dried. The coating process in the vacuum drying apparatus 131 need not be performed in a low oxygen, low dew point atmosphere.

  Next, the glass substrate G is transferred to the load lock device 125 by the second substrate transfer device 121. When the glass substrate G is carried into the load lock device 125, the inside thereof is switched to a low oxygen and low dew point atmosphere. Thereafter, the inside of the load lock device 125 and the inside of the third substrate transport device 122 that is similarly maintained in a low oxygen and low dew point atmosphere are communicated.

  Next, the glass substrate G is transferred to the baking device 132 by the third substrate transfer device 122. The inside of the baking apparatus 132 is also maintained in a low oxygen and low dew point atmosphere. And in the baking apparatus 132, the glass substrate G mounted on the hot platen is heated by predetermined temperature, for example, 200 to 250 degreeC, and the organic material of the said glass substrate G is baked.

  Next, the glass substrate G is transferred to the temperature adjustment device 134 by the third substrate transfer device 122. The inside of the temperature control device 134 is also maintained in a low oxygen and low dew point atmosphere. In the temperature adjusting device 134, the glass substrate G is adjusted to a predetermined temperature, for example, room temperature. Thus, the hole transport layer 31 is formed on the glass substrate G (hole injection layer 30).

  The glass substrate G on which the hole transport layer 31 is formed is transferred to the load lock device 125 by the third substrate transfer device 122. When the glass substrate G is carried into the load lock device 125, the inside thereof is switched to the atmospheric atmosphere. Thereafter, the inside of the load lock device 125 and the inside of the second substrate transport device 121 are brought into communication.

  Next, the glass substrate G is sequentially transferred by the second substrate transfer device 121, the first substrate transfer device 120, and the substrate transfer body 112, and is accommodated in the cassette C on the cassette mounting table 110. Thus, a series of processing of the glass substrates G in the substrate processing system 100 is completed.

  Note that the glass substrate G on which the temperature control in the temperature control device 134 has been completed and the hole transport layer 31 is formed is not returned to the cassette C of the loading / unloading station 101 but is carried out of the substrate processing system 100 from the buffer device 136. May be.

<3. Control of low oxygen and low dew point atmosphere>
Next, atmosphere control in an apparatus downstream of the load lock apparatus 125, that is, an apparatus that requires a low oxygen and low dew point atmosphere will be described. In describing the atmosphere control, first, the configuration of the baking apparatus 132 that requires a low oxygen and low dew point atmosphere will be described.

  As shown in FIG. 5, the baking apparatus 132 has the processing container 200 which can seal an inside. Inside the processing container 200, a processing unit 210 that houses and heat-treats the glass substrate G is formed. In the processing unit 210, mounting plates 211 on which the glass substrate G is mounted are provided in a plurality of stages, for example, 15 stages in the vertical direction. In addition, a plurality of, for example, two heaters 212 for heating the glass substrate G on the mounting plate 211 are provided on the side of the processing unit 210 in the vertical direction.

  In addition, an air supply unit 220 that supplies a predetermined gas to the processing unit 210 is formed inside the processing container 200. The air supply unit 220 is provided with a plurality of, for example, three filters 221 for removing foreign substances in the gas in the vertical direction. As the filter 221, for example, a HEPA filter (High Efficiency Particulate Air Filter) is used. Further, a fan 222 for blowing gas from the air supply unit 220 to the processing unit 210 via the filter 221 is provided on the side of the air supply unit 220.

  In the processing container 200, the number and arrangement of the placement plate 211, the heater 212, the filter 221, and the fan 222 can be arbitrarily selected.

  As shown in FIGS. 5 and 6, the processing container 200 is provided with an air supply unit 230 for supplying clean dry air via an air supply pipe 231. In the air supply unit 230, for example, dry air having an oxygen concentration of 21%, which is the same as the atmosphere, and a moisture concentration of 1.029 ppm or less, that is, a dew point temperature of −76 ° C. or less and normal temperature (23 ° C. ± 1 ° C.). Reserved. The air supply pipe 231 is connected to the air supply unit 220 via a purifier 263 described later. The dry air supplied from the air supply unit 230 to the air supply unit 220 is supplied to the processing unit 210 by the fan 222 after foreign matters are removed through the filter 221. In addition, the connection location of the supply pipe 231 is not limited to this embodiment, and the supply pipe 231 may be directly connected to the supply section 220, for example.

  The processing container 200 is provided with a gas supply unit 240 for supplying nitrogen gas, which is an inert gas, via an air supply pipe 241. The gas supply unit 240 stores, for example, nitrogen gas having an oxygen concentration of 10 ppm or less and a water concentration of 1.029 ppm or less, that is, a dew point temperature of −76 ° C. or less and a normal temperature (23 ° C. ± 1 ° C.). Yes. In this embodiment, nitrogen gas is used as the inert gas, but other inert gas such as argon gas may be used as long as a low oxygen low dew point atmosphere can be realized. The air supply pipe 241 is connected to the air supply unit 220 via a purifier 263 described later. The nitrogen gas supplied from the gas supply unit 240 to the air supply unit 220 is supplied to the processing unit 210 by the fan 222 after foreign matters are removed through the filter 221. In addition, the connection location of the supply pipe 241 is not limited to this embodiment, and the supply pipe 241 may be directly connected to the supply section 220, for example.

  The processing container 200 is provided with an exhaust unit 250 that exhausts the atmosphere in the processing container 200, more specifically, the atmosphere in the processing unit 210. For the exhaust part 250, for example, a negative pressure generator such as a vacuum pump is used. The exhaust unit 250 and the processing unit 210 are connected via an exhaust pipe 251.

  The processing vessel 200 is provided with a gas circulation system 260 that purifies and returns the atmosphere in the processing vessel 200, more precisely, the atmosphere in the processing unit 210. Since the atmosphere circulated in the gas circulation system 260 is mainly nitrogen gas, in the following description, the gas circulation system 260 will be described as purifying and returning the nitrogen gas. The gas circulation system 260 includes a cooler 261, a filter 262, and a purifier 263. The cooler 261, the filter 262, and the purifier 263 are provided in this order from the processing unit 210 side (upstream side) in the pipe 264 connecting the processing unit 210 and the air supply unit 220.

  The cooler 261 cools the nitrogen gas from the processing unit 210 to a predetermined temperature, for example, room temperature. This predetermined temperature is a temperature at which the filter 262 and the purifier 263 are not damaged by heat. The filter 262 removes foreign matters such as an organic solvent in the nitrogen gas cooled by the cooler 261.

  The purifier 263 removes oxygen and moisture in the nitrogen gas from which foreign matter has been removed by the filter 262. As shown in FIG. 7, the above-described air supply pipe 231 of the air supply unit 230 and the air supply pipe 241 of the gas supply unit 240 are connected to the purifier 263. These supply pipes 231 and 241 are connected to the upstream side in a pipe 264 in the refiner 263, respectively. Further, valves 232 and 242 are provided in the air supply pipes 231 and 241, respectively.

  The pipe 264 is branched into a pipe 264 a and a pipe 264 b on the downstream side of the air supply pipes 231 and 241. Each piping 264a, 264b is provided with valves 265, 265 for controlling the flow of nitrogen gas, respectively. The nitrogen gas that has flowed to the pipe 264 a side is purified and supplied to the air supply unit 220. On the other hand, the nitrogen gas flowing to the pipe 264b side is supplied to the air supply unit 220 as it is without being purified.

  The pipe 264 a is further branched into two pipes via valves 266 and 266, and is connected to two purification cylinders 267 and 267. The inside of the purification cylinder 267 is filled with a catalyst for removing oxygen and moisture. Then, when the nitrogen gas passes through the purification cylinder 267, oxygen and moisture in the nitrogen gas are removed, and the nitrogen gas is purified. In the present embodiment, the purification cylinder 267 purifies the nitrogen gas up to the oxygen concentration of the nitrogen gas before entering the purification cylinder 267. Since a catalyst deteriorates when a predetermined amount of nitrogen gas is purified in the purification cylinder 267, the catalyst in the other purification cylinder 267 is replaced while the nitrogen gas is purified in one purification cylinder 267. For this reason, two purification cylinders 267 and 267 are provided.

  In the two pipes 264 a, a gas supply unit 268 that supplies a regeneration gas containing hydrogen gas is provided via an air supply pipe 269 on the downstream side of the purification cylinder 267. The supply pipe 269 is provided with valves 270 and 270 for controlling the flow of the regeneration gas. Then, the regeneration gas supplied from the gas supply unit 268 is supplied to the purification cylinder 267 through the supply pipe 269 and the pipe 264a. With this regeneration gas, the deteriorated catalyst in the purification cylinder 267 is regenerated, and the purification cylinder 267 is regenerated.

  The two pipes 264 a are provided with an exhaust section 271 through the exhaust pipe 272 for collecting and exhausting the regeneration gas in the purification cylinder 267 on the upstream side of the purification cylinder 267. The exhaust pipe 272 is provided with valves 273 and 273 for controlling the flow of the regeneration gas. For the exhaust part 271, for example, a negative pressure generator such as a vacuum pump is used. Then, the regeneration gas supplied from the gas supply unit 268 is exhausted to the exhaust unit 271 through the pipe 264 a and the exhaust pipe 272 after regenerating the purification cylinder 267.

  Note that the purifier 263 may be provided with a gas supply unit (not shown) for supplying new nitrogen gas. For example, when the oxygen concentration of new nitrogen gas supplied from the gas supply unit is 10 ppm or less, the gas supply unit is connected to the pipe 264 a on the downstream side of the purification cylinder 267. Then, a new nitrogen gas having an appropriate oxygen concentration is added to the nitrogen gas purified by the purification cylinder 267, whereby the nitrogen gas having a predetermined oxygen concentration is supplied into the processing container 200. On the other hand, for example, when the oxygen concentration of new nitrogen gas supplied from the gas supply unit is larger than 10 ppm, the gas supply unit is connected to the pipe 264 a on the upstream side of the purification cylinder 267. Then, new nitrogen gas from the gas supply unit and nitrogen gas in the processing container 200 are purified in the purification cylinder 267, whereby nitrogen gas having a predetermined oxygen concentration is supplied into the processing container 200.

  As shown in FIG. 6, the baking apparatus 132 includes oxygen concentration meters 280 and 281 that measure the oxygen concentration of the atmosphere in the processing container 200 and a dew point thermometer 282 that measures the dew point temperature of the atmosphere in the processing container 200. Is provided. The one oxygen concentration meter 280 and the dew point thermometer 282 are provided, for example, in the pipe 264 on the downstream side of the purifier 263 of the gas circulation system 260. The other oxygen concentration meter 281 is provided in a door 290 provided in the processing container 200, for example. In addition, the number and arrangement | positioning of an oxygen concentration meter and a dew point thermometer can be selected arbitrarily.

  The measurement results of the oxygen concentration meters 280 and 281 and the measurement result of the dew point thermometer 282 are transmitted to the control unit 140, respectively. In the control unit 140, based on these measurement results, the gas supply unit 240 and the exhaust unit are configured so that the atmosphere in the processing container 200 has a predetermined oxygen concentration (10 ppm or less) and a predetermined dew point temperature (−70 ° C. or less). 250, controls the gas circulation system 260. If the measurement results of the oxygen concentration meters 280 and 281 are different, control is performed so that both measurement results have a predetermined oxygen concentration.

  Further, for example, during maintenance of the baking apparatus 132, the door 290 is opened after replacing the low oxygen low dew point atmosphere in the processing container 200 with an air atmosphere. That is, the control unit 140 controls the door 290 to be opened when the measurement results of both the oximeters 280 and 281 reach 21%. In such a case, since the door 290 is not opened while the oxygen concentration in the atmosphere in the processing container 200 does not reach 21%, the maintenance of the baking apparatus 132 can be performed safely. The door 290 may be provided with a display (not shown) on which the measurement results of the oximeters 280 and 281 are displayed.

  Note that the operation of each unit in the baking apparatus 132 is controlled by the control unit 140 described above.

  Next, the temperature control device 134 will be described. As shown in FIG. 6, the temperature control device 134 has a processing container 300 that can be sealed inside. Inside the processing container 300, mounting plates (not shown) for mounting the glass substrate G are provided in a plurality of stages, and further a filter (not shown) for removing foreign substances in the gas supplied into the processing container 300. Or a fan (not shown) for sending gas into the processing container 300. In addition, the internal structure of the processing container 300 is arbitrary, and detailed description is abbreviate | omitted here.

  The processing container 300 is provided with an air supply unit 310 for supplying clean dry air via an air supply pipe 311. Since the air supply unit 310 and the air supply pipe 311 are the same as the air supply unit 230 and the air supply pipe 231 of the baking apparatus 132 described above, description thereof will be omitted. Note that the air supply pipe 311 is connected to the processing container 300 via a purifier 341 to be described later, but the connection location of the air supply pipe 311 is not limited to this embodiment. For example, the air supply pipe 311 is connected to the processing container 300. It may be directly connected.

  The processing container 300 is provided with a gas supply unit 320 for supplying nitrogen gas, which is an inert gas, via an air supply pipe 321. Since these gas supply part 320 and the supply pipe 321 are the same as the gas supply part 240 and the supply pipe 241 of the baking apparatus 132 mentioned above, description is abbreviate | omitted. Note that the air supply pipe 321 is connected to the processing container 300 via a purifier 341 to be described later, but the connection location of the air supply pipe 321 is not limited to this embodiment. For example, the air supply pipe 321 is connected to the processing container 300. It may be directly connected.

  The processing container 300 may be provided with an ionizer for dry air or an ionizer for nitrogen gas.

  The processing container 300 is provided with an exhaust part 330 for exhausting the atmosphere in the processing container 300 via an exhaust pipe 331. Since the exhaust part 330 and the exhaust pipe 331 are the same as the exhaust part 250 and the exhaust pipe 251 of the firing apparatus 132 described above, description thereof will be omitted.

  The processing container 300 is provided with a gas circulation system 340 that purifies and returns the atmosphere in the processing container 300. Since the atmosphere circulated in the gas circulation system 340 is mainly nitrogen gas, in the following description, the gas circulation system 340 will be described as purifying and returning the nitrogen gas. The gas circulation system 340 includes a purifier 341 and a temperature controller 342. The purifier 341 and the temperature controller 342 are provided in this order from the upstream side in the pipe 343 connected to the processing vessel 300. The arrangement of the temperature controller 342 is not limited to this embodiment, and the temperature controller 342 may be provided on the upstream side of the refiner 341.

  The purifier 341 removes oxygen and moisture in the nitrogen gas exhausted from the processing vessel 300. The configuration of the purifier 341 is the same as that of the purifier 263 of the baking apparatus 132 shown in FIG. Further, the above-described air supply pipe 311 of the air supply unit 310 and the air supply pipe 321 of the gas supply unit 320 are connected to the purifier 341. Further, the refiner 341 is provided with a gas supply unit 344 for supplying a regeneration gas for regenerating the refiner cylinder of the refiner 341 via an air supply pipe 345, and the regeneration gas after regenerating the refiner cylinder is supplied. An exhaust part 346 for exhausting is provided via an exhaust pipe 347. The gas supply unit 344, the air supply pipe 345, the exhaust part 346, and the exhaust pipe 347 are also the same as the gas supply part 268, the air supply pipe 269, the exhaust part 271, and the exhaust pipe 272 of the baking apparatus 132 described above, and thus the description thereof is omitted. To do.

  The temperature controller 342 adjusts the nitrogen gas that has passed through the purifier 341 to a predetermined temperature, for example, room temperature (23 ° C. ± 1 ° C.).

  The temperature controller 134 is provided with oxygen concentration meters 350 and 351 that measure the oxygen concentration of the atmosphere in the processing container 300 and a dew point thermometer 352 that measures the dew point temperature of the atmosphere in the processing container 300. The configurations and arrangements of the oxygen concentration meters 350 and 351 and the dew point thermometer 352 are the same as those of the oxygen concentration meters 280 and 281 and the dew point thermometer 282 of the baking apparatus 132 described above, respectively, and thus description thereof is omitted. Further, the atmosphere control in the processing container 300 and the control of the door 360 provided in the processing container 300 using the oxygen concentration meters 350 and 351 and the dew point thermometer 352 are the same as those in the baking apparatus 132 described above. Is omitted.

  The operation of each unit in the temperature control device 134 is controlled by the control unit 140 described above.

  Next, the third substrate transfer device 122 will be described. As shown in FIG. 6, the third substrate transfer apparatus 122 has a processing container 400 that can be sealed inside. A substrate transport body (not shown) that transports the glass substrate G is provided inside the processing container 400.

  The processing container 400 is provided with an air supply unit 410 that supplies clean dry air via an air supply pipe 411. The air supply unit 410 and the air supply pipe 411 are the same as the air supply unit 230 and the air supply pipe 231 of the baking apparatus 132 described above, respectively, and thus description thereof is omitted. The supply pipe 411 is connected to the processing container 400 via a purifier 441 described later. However, the connection portion of the supply pipe 411 is not limited to the present embodiment. For example, the supply pipe 411 is connected to the processing container 400. It may be directly connected.

  The processing container 400 is provided with a gas supply unit 420 for supplying nitrogen gas, which is an inert gas, via an air supply pipe 421. Since these gas supply part 420 and the supply pipe 421 are the same as the gas supply part 240 and the supply pipe 241 of the baking apparatus 132 mentioned above, description is abbreviate | omitted. Note that the air supply pipe 421 is connected to the processing container 400 via a purifier 441 to be described later. However, the connection portion of the air supply pipe 421 is not limited to this embodiment, and for example, the air supply pipe 421 is connected to the processing container 400. It may be directly connected.

  The processing container 400 is provided with an exhaust part 430 for exhausting the atmosphere in the processing container 400 via an exhaust pipe 431. Since the exhaust part 430 and the exhaust pipe 431 are the same as the exhaust part 250 and the exhaust pipe 251 of the baking apparatus 132 described above, respectively, description thereof is omitted.

  The processing container 400 is provided with a gas circulation system 440 that purifies and returns the atmosphere in the processing container 400. Since the atmosphere circulated in the gas circulation system 440 is mainly nitrogen gas, in the following description, the gas circulation system 440 will be described as purifying and returning the nitrogen gas. The gas circulation system 440 has a purifier 441. The purifier 441 is provided in a pipe 442 connected to the processing container 400.

  The purifier 441 removes oxygen and moisture in the nitrogen gas exhausted from the processing vessel 400. The configuration of the refiner 441 is the same as that of the refiner 263 of the baking apparatus 132 shown in FIG. Further, the above-described supply pipe 411 of the air supply unit 410 and the supply pipe 421 of the gas supply unit 420 are connected to the purifier 441. Further, the purifier 441 is provided with a gas supply unit 443 for supplying a regeneration gas for regenerating the purification cylinder of the purification machine 441 via an air supply pipe 444, and the regeneration gas after further regenerating the purification cylinder is supplied. An exhaust part 445 for exhausting is provided via an exhaust pipe 446. The gas supply unit 443, the air supply pipe 444, the exhaust part 445, and the exhaust pipe 446 are also the same as the gas supply part 268, the air supply pipe 269, the exhaust part 271, and the exhaust pipe 272 of the baking apparatus 132 described above, respectively, and thus description thereof is omitted. To do.

  Note that the gas circulation system 440 may be provided with a filter (not shown) that removes foreign matters in the nitrogen gas before being purified by the purifier 441, similarly to the filter 262 of the baking apparatus 132 described above. .

  The third substrate transfer device 122 is provided with an oxygen concentration meter 450 that measures the oxygen concentration of the atmosphere in the processing container 400 and a dew point thermometer 451 that measures the dew point temperature of the atmosphere in the processing container 300. The configuration and arrangement of the oxygen concentration meter 450 and the dew point thermometer 451 are the same as those of the oxygen concentration meter 280 and the dew point thermometer 282 of the baking apparatus 132 described above, respectively, and thus the description thereof is omitted. The atmosphere control in the processing container 400 using the oxygen concentration meter 450 and the dew point thermometer 451 is also the same as that of the baking apparatus 132 described above, and thus the description thereof is omitted.

  The operation of each unit in the third substrate transport apparatus 122 is controlled by the control unit 140 described above. In the buffer device 136, the same atmosphere control as that of the third substrate transfer device 122 is performed. That is, as with the third substrate transfer device 122, the air supply unit 410, the gas supply unit 420, the exhaust unit 430, and the gas circulation system. 440 is provided.

  Next, atmosphere control performed in the baking apparatus 132, the temperature adjustment apparatus 134, and the third substrate transfer apparatus 122 configured as described above will be described. The atmosphere control is performed in two stages, a first operation mode and a second operation mode. The first operation mode is, for example, an operation mode performed when starting up each of the devices 132, 134, and 122. Specifically, the atmosphere in the processing containers 200, 300, and 400 is changed from the atmospheric state to the devices 132, This is an operation mode when starting up 134 and 122. The second operation mode is an operation mode during normal operation.

  First, the first operation mode will be described. As shown in FIG. 8, in the baking apparatus 132, nitrogen gas is supplied from the gas supply unit 240 into the processing container 200, and the processing container 200 is exhausted by the exhaust unit 250. Then, the atmosphere in the processing container 200 is replaced with nitrogen gas from an air atmosphere having an oxygen concentration of 21%.

  Similarly, also in the gas circulation system 260, the atmosphere in the pipe 264 is replaced with nitrogen gas. At this time, as shown in FIG. 9, in the gas circulation system 260, the nitrogen gas is allowed to flow to the pipe 264 b side and does not pass through the purification cylinder 267. When an atmosphere having a high oxygen concentration is passed through the purification cylinder 267, the catalyst in the purification cylinder 267 is immediately deteriorated. Therefore, in the first operation mode, the atmosphere in the pipe 264 is obtained using nitrogen gas from the gas supply unit 240. Is replaced with nitrogen gas.

  Then, the first operation mode is performed until the oxygen concentration in the atmosphere in the processing container 200 and the atmosphere in the pipe 264 becomes 100 ppm, for example. Here, nitrogen gas is supplied from the gas supply unit 240 in the first operation mode, but supply of nitrogen gas from the gas supply unit 240 is stopped in the second operation mode. Then, in order to reduce the consumption of nitrogen gas as much as possible, it is preferable to shorten the operation time in the first operation mode as much as possible. Therefore, the first operation mode is not performed until the oxygen concentration reaches the target of 10 ppm or less, and is performed to such an extent that the oxygen concentration can be reduced to the target of 10 ppm or less in the second operation mode. Note that it is possible to arbitrarily set how much the oxygen concentration is lowered in the first operation mode.

  By performing the first operation mode, the dew point temperatures of the atmosphere in the processing container 200 and the atmosphere in the pipe 264 become −70 ° C. or less, which is the target dew point temperature.

  In the first operation mode, the temperature control device 134 and the third substrate transfer device 122 perform the same atmosphere control as the atmosphere control for the baking device 132 described above, and the oxygen concentrations of the atmospheres in the processing vessels 300 and 400 are respectively set. 100 ppm. Further, the dew point temperature of the atmosphere in the processing containers 300 and 400 is also −70 ° C. or lower.

  Next, the second operation mode will be described. As shown in FIG. 10, the firing apparatus 132 stops the supply of nitrogen gas from the gas supply unit 240 and the exhaust by the exhaust unit 250.

  Further, the gas circulation system 260 is used to purify the nitrogen gas in the processing container 200, and the purified nitrogen gas is returned to the processing container 200. Specifically, the nitrogen gas exhausted from the processing container 200 is cooled to a predetermined temperature by the cooler 261. Subsequently, the cooled nitrogen gas passes through the filter 262, and foreign matters such as an organic solvent in the nitrogen gas are removed. Then, as shown in FIG. 11, in the purifier 263, nitrogen gas is caused to flow to the pipe 264 a side to pass through the purification cylinder 267. In the purification cylinder 267, the oxygen and moisture of the nitrogen gas are removed, and the nitrogen gas is purified. The oxygen concentration of the nitrogen gas purified by the purification cylinder 267 is equal to or lower than the oxygen concentration of the nitrogen gas before entering the purification cylinder 267. The nitrogen gas purified in this way is returned to the processing container 200. The purification of nitrogen gas in the gas circulation system 260 is continuously performed, and the oxygen concentration of the atmosphere in the processing container 200 becomes a target of 10 ppm or less.

  In the present embodiment, the nitrogen gas exhausted from the processing vessel 200 passes through one purification cylinder 267 and is purified. However, when purifying the nitrogen gas, two purification cylinders 267 and 267 are used at the same time. Also good. As described above, the oxygen concentration of the atmosphere in the processing container 200 is 100 ppm in the first operation mode, and the oxygen concentration of the atmosphere in the processing container 200 is 10 ppm or less in the second operation mode. For example, if nitrogen gas is passed through two purification cylinders 267 and 267 until the oxygen concentration is changed from 100 ppm to 10 ppm, the nitrogen gas can be purified efficiently.

  Further, in the second operation mode, while the one purification cylinder 267 is purifying the nitrogen gas, the other deteriorated purification cylinder 267 may be regenerated. For example, as indicated by a dotted line in FIGS. 10 and 11, the regeneration gas supplied from the gas supply unit 268 is supplied to the purification cylinder 267 through the supply pipe 269 and the pipe 264a. With this regeneration gas, the deteriorated catalyst in the purification cylinder 267 is regenerated, and the purification cylinder 267 is regenerated. Further, the regenerated gas after regenerating the purification cylinder 267 is exhausted to the exhaust part 271 through the pipe 264 a and the exhaust pipe 272. In this case, for example, when the purification cylinder 267 is deteriorated, the nitrogen gas can be purified using another purification cylinder 267 while the purification cylinder 267 is being regenerated. That is, it is not necessary to stop the operation even during the regeneration of the purification cylinder 267, and the throughput of the substrate processing can be improved.

  In the second operation mode, the glass substrate G is appropriately fired in a state where the atmosphere in the processing container 200 is maintained at a predetermined oxygen concentration and a predetermined dew point temperature.

  In the second operation mode, the temperature control device 134 and the third substrate transfer device 122 perform the same atmosphere control as the atmosphere control for the baking device 132 described above, and the oxygen concentrations of the atmosphere in the processing vessels 300 and 400 are respectively set. The target is 10 ppm or less. Therefore, the temperature adjustment of the glass substrate G in the temperature adjustment device 134 and the conveyance of the glass substrate G in the third substrate conveyance device 122 are appropriately performed.

  The second operation mode is continued even after the atmosphere in the processing containers 200, 300, 400 reaches the target oxygen concentration and the target dew point temperature. That is, during the normal operation, the second operation mode is continuously performed.

  Note that when the second operation mode is ended and, for example, maintenance of the baking apparatus 132 is performed, the recycling of the atmosphere in the processing container 200 by the gas circulation system 260 is stopped. And while supplying dry air from the air supply part 230, the inside of the processing container 200 is exhausted by the exhaust part 250. FIG. Then, the atmosphere in the processing container 200 is replaced with dry air having an oxygen concentration of 21% from nitrogen gas (low oxygen low dew point atmosphere). Thereafter, maintenance of the baking apparatus 132 is performed in an air atmosphere, and when the maintenance is completed, the first operation mode and the second operation mode are performed again to maintain the inside of the processing container 200 in a predetermined low oxygen and low dew point atmosphere. . Note that the atmosphere control after the end of the second operation mode is performed similarly for the temperature adjustment device 134 and the third substrate transfer device 122.

  According to the present embodiment, the atmosphere in the processing containers 200, 300, and 400 is replaced with nitrogen gas in the first operation mode, and the oxygen concentration in the atmosphere is lowered to some extent. Subsequently, in the second operation mode, the atmosphere in the processing containers 200, 300, and 400 is purified using the gas circulation systems 260, 340, and 440, and the atmosphere is set to a predetermined oxygen concentration and a predetermined dew point temperature. For this reason, in the second operation mode, the atmosphere in the processing container 200, 300, 400 is maintained at an appropriate low oxygen low dew point atmosphere, and the heat treatment and conveyance of the glass substrate G in the processing container 200, 300, 400 are appropriately performed. Can be done.

  In the first operation mode and the second operation mode, the atmosphere in the processing containers 200, 300, and 400 is controlled based on the measurement results of the oximeters 280 and 281 and the measurement result of the dew point thermometer 282. The atmosphere is more reliably maintained in a low oxygen / low dew point atmosphere.

  In addition, for example, the first operation mode is set only when each of the devices 132, 134, and 122 is started up, that is, when each of the devices 132, 134, and 122 is started up from the atmosphere in the processing containers 200, 300, and 400. To supply nitrogen gas into the processing vessels 200, 300, and 400 from the gas supply units 240, 320, and 420. During normal operation, the second operation mode is executed to start from the gas supply units 240, 320, and 420. The supply of nitrogen gas is stopped. Therefore, the consumption of nitrogen gas can be suppressed to a small amount, and the heat treatment and conveyance of the glass substrate G can be performed efficiently.

  Further, in the baking device 132, the temperature adjustment device 134, and the third substrate transfer device 122, the above-described atmosphere control in the first operation mode and the second operation mode is performed individually. For this reason, for example, even when only the baking apparatus 132 is maintained, the other temperature control apparatus 134 and the third substrate transfer apparatus 122 can continue normal operation. Therefore, the substrate processing throughput in the substrate processing system 100 can be improved.

  In the substrate processing system 100, a low oxygen and low dew point atmosphere is provided only for the baking apparatus 132, the temperature adjustment apparatus 134, and the third substrate transfer apparatus 122. Further, nitrogen gas is not supplied to the first substrate transfer device 120, the second substrate transfer device 121, the coating device 130, and the vacuum drying device 131, which are other devices, and the low oxygen low dew point atmosphere is not maintained. Since nitrogen gas is used only for heat treatment (conveyance) requiring a low oxygen and low dew point atmosphere in this way, consumption of nitrogen gas can be suppressed to a smaller amount, and the hole transport layer 31 is formed on the glass substrate G. Can be performed more efficiently.

  Next, the airflow in the second operation mode described above will be described with reference to FIG. The arrows in FIG. 12 indicate the direction of airflow. In the second operation mode, as shown in FIG. 12, the pressure in the processing container 200 of the baking apparatus 132 is a positive pressure from the atmosphere and a negative pressure from the pressure in the processing container 400 of the third substrate transfer apparatus 122. ing. That is, an air flow from the third substrate transfer device 122 toward the baking device 132 is generated. Similarly, the pressure in the processing container 300 of the temperature control device 134 is also a positive pressure from the atmosphere and a negative pressure from the pressure in the processing container 400 of the third substrate transfer device 122. That is, an air flow from the third substrate transfer device 122 toward the temperature adjustment device 134 is generated.

  In order to maintain the pressure in the processing containers 200, 300, and 400 in the above relationship, the pressure in the processing containers 200, 300, and 400 is set using nitrogen gas supplied from the gas supply units 268, 344, and 443. Fine adjustment may be made. Further, the atmosphere in the processing container 200 may be exhausted by the exhaust part 250 or the exhaust part 271, or the atmosphere flowing through the gas circulation system 260 may be supplied to the processing container 300 and the processing container 400.

  In such a case, it is possible to suppress the unclean atmosphere in the processing container 200 of the baking apparatus 132 and the processing container 300 of the temperature control apparatus 134 from flowing into the third substrate transfer apparatus 122, respectively. Then, this unclean atmosphere can be suppressed from flowing to the upstream side of the third substrate transfer device 122 via the third substrate transfer device 122. Therefore, the glass substrate G can be appropriately processed in the substrate processing system 100.

  In addition, since the atmosphere in the 3rd board | substrate conveyance apparatus 122 is normal temperature, if the said atmosphere flows into the baking apparatus 132 in large quantities, the temperature of the atmosphere in the baking apparatus 132 will fall. For this reason, it is preferable that the pressure difference between the pressure in the processing container 200 of the baking apparatus 132 and the pressure in the processing container 400 of the third substrate transport apparatus 122 is about a little.

<4. Other embodiments>
Although the above substrate processing system 100 has performed the process of forming the hole transport layer 31 on the glass substrate G, the light emitting layer 32 may be formed on the glass substrate G using the substrate processing system 100. Even when the light emitting layer 32 is formed, a low oxygen and low dew point atmosphere is required in the heat treatment of the glass substrate G (the firing process of the light emitting layer 32 and the temperature adjustment process of the glass substrate G). Therefore, if the substrate processing system 100 is used, the formation process of the light emitting layer 32 with respect to the glass substrate G can be performed appropriately and efficiently.

  Further, the substrate processing system 100 for forming the hole transport layer 31 on the glass substrate G and the substrate processing system 100 for forming the light emitting layer 32 on the glass substrate G may be connected and integrated. Further, a substrate processing system for forming the hole injection layer 30 on the glass substrate G may be connected and integrated. Note that the process for forming the hole injection layer 30 does not require a low oxygen and low dew point atmosphere, and the substrate processing system for forming the hole injection layer 30 is supplied with nitrogen gas in the substrate processing system 100 or with nitrogen gas. Recycling is omitted.

  The electron transport layer 33 and the electron injection layer 34 may be formed on the glass substrate G by a vapor deposition method outside the substrate processing system 100, or the glass substrate in the substrate processing system 100 as with the hole transport layer 31. It may be formed on G.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. It is understood.

DESCRIPTION OF SYMBOLS 1 Organic light emitting diode 10 Anode 30 Hole injection layer 31 Hole transport layer 32 Light emitting layer 33 Electron transport layer 34 Electron injection layer 40 Cathode 100 Substrate processing system 101 Loading / unloading station 102 Processing station 120 1st board | substrate conveyance apparatus 121 2nd board | substrate Transport device 122 Third substrate transport device 130 Coating device 131 Vacuum drying device 132 Baking device 134 Temperature control device 140 Control unit 200, 300, 400 Processing vessel 230, 310, 410 Air supply unit 240, 320, 420 Gas supply unit 250, 330, 430 Exhaust part 260, 340, 440 Gas circulation system 261 Cooler 262 Filter 263, 341, 441 Refiner 264, 343, 442 Pipe 267 Refinement cylinder 268, 344, 443 Gas supply part 271, 346, 445 Exhaust part 280 , 281, 350 , 351, 450 Oxygen concentration meter 282, 352, 451 Dew point thermometer 290, 360 Door 342 Temperature controller G Glass substrate

Claims (11)

A substrate processing system for forming an organic layer of an organic light emitting diode on a substrate,
A baking apparatus for baking the organic layer after applying the organic layer on the substrate and further drying the organic layer;
A temperature adjusting device for adjusting the temperature of the substrate after baking the organic layer with the baking device;
A substrate transfer device for transferring the substrate to the baking device and the temperature control device;
The firing device, the temperature control device, and the substrate transfer device are respectively
A processing container in which an internal atmosphere is maintained in an atmosphere having a predetermined oxygen concentration lower than the air and a predetermined dew point temperature lower than the air;
A gas supply unit for supplying an inert gas into the processing container;
An exhaust section for exhausting the inside of the processing container;
A substrate processing system comprising: a purifier that removes oxygen and moisture in the atmosphere in the processing vessel, and a gas circulation system that returns the atmosphere purified by the purifier to the processing vessel. . The atmosphere control in the processing container in the baking apparatus, the atmosphere control in the processing container in the temperature control apparatus, and the atmosphere control in the processing container in the substrate transfer apparatus are performed individually, respectively, The substrate processing system according to claim 1. The pressure in the processing container of the baking apparatus and the pressure in the processing container of the temperature control apparatus are respectively positive pressure from the atmosphere and negative pressure from the pressure in the processing container of the substrate transfer apparatus. The substrate processing system according to claim 1 or 2. A control unit for controlling the atmosphere in the processing container of the baking apparatus, the atmosphere in the processing container of the temperature control apparatus, and the atmosphere in the processing container of the substrate transfer apparatus;
The controller is
An inert gas is supplied from the gas supply unit into the processing container, and the processing container is exhausted by the exhaust unit, and the atmosphere in the processing container is replaced with an inert gas, so that the oxygen concentration is higher than the atmosphere. A first step in which the atmosphere is low and the dew point temperature is lower than the atmosphere;
The supply of the inert gas from the gas supply unit is stopped, and the atmosphere purified by the purifier is returned to the processing container by using the gas circulation system, and the atmosphere in the processing container has a predetermined oxygen concentration. And a second step of maintaining a predetermined dew point temperature;
The substrate processing system according to claim 1, wherein the gas supply unit, the exhaust unit, and the gas circulation system are controlled so as to perform the following. The gas circulation system further includes a pipe connecting the processing vessel and the purifier.
In the first step, the control unit replaces the atmosphere in the pipe with an inert gas by an inert gas supplied from the gas supply unit, and has a lower oxygen concentration than the atmosphere and a dew point than the atmosphere. The substrate processing system according to claim 4, wherein the temperature is controlled to an atmosphere having a low temperature. 6. The substrate processing system according to claim 5, wherein the control unit controls the atmosphere in the processing container so as not to pass through the purifier in the first step. The refiner is
A plurality of purification cylinders for removing oxygen and moisture in the atmosphere in the processing vessel;
Another gas supply unit for supplying a regeneration gas containing hydrogen gas to the purification cylinder;
Another exhaust part for exhausting the inside of the purification cylinder,
In the second step, the control unit supplies the regeneration gas from the other gas supply unit to the other purification cylinder while purifying the atmosphere in the processing container with the one purification cylinder, and The other gas supply unit and the other exhaust unit are controlled so that the inside of the purification cylinder is exhausted by the exhaust part and the other purification cylinder is regenerated. The substrate processing system as described in any one of Claims. An oxygen concentration meter for measuring the oxygen concentration of the atmosphere in the processing vessel;
A dew point thermometer for measuring the dew point temperature of the atmosphere in the processing container,
The said control part controls the atmosphere in the said process container based on the measurement result of the said oxygen concentration meter, and the measurement result of the said dew point thermometer, The any one of Claims 4-7 characterized by the above-mentioned. The substrate processing system as described. A door for opening and closing the inside of the processing container with respect to the outside;
The substrate processing system according to claim 8, wherein the control unit controls opening and closing of the door based on a measurement result of the oximeter. The gas circulation system included in the baking apparatus is:
A cooler for cooling the atmosphere before being purified by the purifier,
The filter according to any one of claims 1 to 9, further comprising a filter that removes foreign matters in the atmosphere after being cooled by the cooler and before being purified by the refiner. The substrate processing system as described. The substrate processing according to claim 1, wherein the gas circulation system provided in the temperature adjusting device further includes a temperature adjusting device that adjusts the temperature of the atmosphere in the processing container. system.

Images