JP2015196168A - Laser processing apparatus, laser processing method, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser processing apparatus which enables an improvement in the printing quality of laser processing with a laser oscillator and prevents an elongation of printing time, a processing data preparation apparatus that prepares processing data which controls the laser processing apparatus, and program.SOLUTION: A laser processing apparatus calculates an expansion reserve excitation period for expanding the reserve excitation period with respect to a minimum reserve excitation period that is a reserve excitation period necessary to a minimum limit for obtaining printing quality, on the basis of a travel time required for a galvano-scanner to travel from a standby position to a processing start position, so that the reserve excitation period is calculated the basis of the minimum reserve excitation period and the expansion reserve excitation period (SS12, S13). Further, when the galvano-scanner travels from the standby position to the processing start position, reserve exciting light of an output threshold value or less is outputted to an excitation semiconductor laser over the calculated reserve excitation period (S14, S15).

Description

  The present invention relates to a laser processing device that drives and controls a laser oscillator, a processing data creation device that creates processing data for controlling the laser processing device, and a program.

  2. Description of the Related Art Conventionally, various proposals have been made regarding the technology of a laser processing apparatus that processes a workpiece with a laser beam. For example, in Patent Document 1, the laser marking apparatus has a duty ratio smaller than that of the print signal, and the laser oscillation is turned off for the preliminary signal in which the applied voltage based on this is smaller than the threshold voltage for causing laser oscillation. A laser marking device that outputs to a laser oscillator in the state is disclosed. As a result, the rise of the laser output can be made steep. As a result, it is possible to print clearly (darker) at the beginning of character writing than in the middle.

Japanese Patent Laid-Open No. 2000-22250

  By the way, when the output period of the preliminary signal is long, the rise is steep, but the printing time after the printing operation is started becomes long. On the other hand, if the output period of the spare signal is short, there is a problem that the rising is slow.

  Therefore, the present invention has been made to solve the above-described problems, and can improve the printing quality of laser processing by a laser oscillator, and the laser processing apparatus and laser processing apparatus that do not increase the printing time. It is an object of the present invention to provide a machining data creation device and a program for creating machining data for controlling the process.

  The invention according to claim 1 made to solve this problem is a laser processing apparatus, which includes a pumping semiconductor laser that emits pumping light and a laser medium, and is emitted from the pumping semiconductor laser By receiving the excitation light, the laser medium is excited to oscillate a pulse laser and receive excitation light with an output higher than an output threshold that is the maximum output value of the excitation light that does not oscillate the pulse laser. A laser oscillator configured to oscillate a pulse laser corresponding to the output of the excitation light, a scanning unit that scans the processing object with the pulse laser oscillated from the laser oscillator, and a processing position of the pulse laser. Based on the processing information acquired by the acquisition unit that acquires processing information including the processing unit, the scanning unit moves from the standby position to the processing start position. A first calculation means for calculating a movement time required until the first excitation light is output to the excitation semiconductor laser based on the movement time calculated by the first calculation means. A second calculation means for calculating a preliminary excitation period; and the preliminary excitation period calculated by the second calculation means when the scanning unit moves from the standby position to the processing start position. Output to the pumping semiconductor laser, and when the scanning unit moves from the processing start position, output means for outputting the pumping light higher than the output threshold to the pumping semiconductor laser, and The second calculation means includes the preliminary excitation period equal to or longer than the minimum preliminary excitation period necessary for oscillating the pulse laser having a predetermined output at the processing start position from the laser oscillator. Calculating a, wherein.

  Further, the invention according to claim 2 is the laser processing apparatus according to claim 1, wherein the second calculation means includes a determination means for determining whether or not the movement time is shorter than the minimum preliminary excitation period. And third calculating means for calculating the minimum preliminary excitation period as the preliminary excitation period in response to the determination that the moving time is short by the determining means.

  The invention according to claim 3 is the laser processing apparatus according to claim 2, wherein the second calculation unit is configured to determine that the moving time is not short by the determination unit. And a fourth calculation means for calculating a period obtained by adding the minimum preliminary excitation period to the extended preliminary excitation period for extending the preliminary excitation period as the preliminary excitation period.

  According to a fourth aspect of the present invention, there is provided a machining data creating apparatus for creating machining data for controlling a laser machining apparatus, wherein the laser machining apparatus includes an excitation semiconductor laser that emits excitation light, and a laser medium. And receiving the pumping light emitted from the pumping semiconductor laser to excite the laser medium to oscillate a pulse laser and to generate a maximum output value of the pumping light that does not oscillate the pulse laser. A laser oscillator configured to oscillate a pulse laser corresponding to the output of the excitation light when receiving an excitation light with an output higher than a certain output threshold, and the pulse laser oscillated from the laser oscillator as a workpiece A scanning unit that scans, and the processing data creation device includes an acquisition unit that acquires processing information including a processing position of the pulse laser, and the acquisition Based on the processing information acquired by the stage, a first calculation unit that calculates a movement time required for the scanning unit to move from the standby position to the processing start position, and the movement time calculated by the first calculation unit Based on the second calculation means for calculating a preliminary excitation period that is a period for outputting the preliminary excitation light below the output threshold to the excitation semiconductor laser, and the scanning unit moves from the standby position to the processing start position In the preliminary excitation period calculated by the second calculation means, preliminary excitation light below the output threshold is output to the excitation semiconductor laser, and the scanning unit moves from the processing start position. Processing data creating means for creating processing data for outputting the pumping light higher than the output threshold to the pumping semiconductor laser, and the second calculation unit It is to calculate the preliminary excitation period of at least the minimum pre-excitation period required for oscillating the pulse laser of a predetermined output in the machining start position from the laser oscillator, characterized by.

  The invention according to claim 5 is a program that is executed by a computer that controls a laser processing apparatus, the laser processing apparatus including a pumping semiconductor laser that emits pumping light and a laser medium, By receiving the excitation light emitted from the excitation semiconductor laser, the laser medium is excited to oscillate a pulse laser and is higher than an output threshold that is a maximum output value of the excitation light that does not oscillate the pulse laser. A laser oscillator configured to oscillate a pulse laser corresponding to the output of the excitation light if the output excitation light is received, and a scanning unit that scans the workpiece with the pulse laser oscillated from the laser oscillator; The program is acquired by an acquisition process for acquiring processing information including a processing position of the pulse laser and the acquisition process. Based on the processing information, based on the first calculation process for calculating the movement time required for the scanning unit to move from the standby position to the processing start position, and on the movement time calculated by the first calculation process, A second calculation process for calculating a preliminary excitation period, which is a period for outputting the preliminary excitation light below the output threshold to the excitation semiconductor laser, and when the scanning unit moves from the standby position to the processing start position, In the preliminary excitation period calculated by the second calculation process, the preliminary excitation light below the output threshold is output to the excitation semiconductor laser, and the output is performed when the scanning unit moves from the processing start position. An output process for causing the pumping semiconductor laser to output the pumping light higher than a threshold value, and the second calculation process outputs a predetermined output from the laser oscillator at the processing start position. That of calculating the preliminary excitation period of at least the minimum pre-excitation period required for oscillating the pulsed laser, characterized by.

That is, in the laser processing apparatus according to the first aspect of the invention, the preliminary excitation period is calculated based on the moving time required for the scanning unit to move from the standby position to the processing start position. Further, when the scanning unit moves from the standby position to the processing start position, preliminary excitation light having an output threshold value or less is output to the excitation semiconductor laser in the calculated preliminary excitation period.
That is, in the laser processing apparatus according to the first aspect of the present invention, as the time for outputting the preliminary excitation light below the output threshold to the excitation semiconductor laser, according to the time for the scanning unit to move from the standby position to the processing start position, The pre-excitation period can be extended. Even when the movement time is shorter than the minimum pre-pumping period, the pre-pumping light is output to the pumping semiconductor laser at least in the minimum pre-pumping period, so that the rise is steep and the print quality of laser processing can be improved. Even when the movement time is longer than the minimum preliminary excitation period, the preliminary excitation period is within the time required for the scanning unit to move from the standby position to the processing start position, so that it is possible to prevent an increase in printing time.

In the laser processing apparatus according to the second aspect of the present invention, the movement time is shorter than the preliminary excitation period (minimum preliminary excitation period) necessary for oscillating a pulse laser having a predetermined output at the processing start position from the laser oscillator. In this case, a preliminary excitation period (minimum preliminary excitation period) necessary to oscillate the pulse laser having a predetermined output at the machining start position from the laser oscillator is calculated as the preliminary excitation period.
That is, in the laser processing apparatus according to the second aspect of the present invention, at least a preliminary excitation period (minimum preliminary excitation period) necessary for oscillating a pulse laser having a predetermined output at the processing start position from the laser oscillator is preliminary excited. Secure as a period. Therefore, a pulse laser with a predetermined output can be oscillated from the laser oscillator at the machining start position. As a result, even when the rise characteristic of the laser oscillator output that guarantees the minimum print quality is obtained, the rise of the pulse laser oscillated from the laser oscillator can be made steep.

In the laser processing apparatus according to the third aspect of the present invention, the movement time is shorter than the pre-excitation period (minimum pre-excitation period) necessary for oscillating a pulse laser having a predetermined output at the processing start position from the laser oscillator. If not, the movement time is calculated as the preliminary excitation period.
In other words, in the laser processing apparatus according to the third aspect of the present invention, a time longer than the pre-excitation period (minimum pre-excitation period) necessary to oscillate the pulse laser having a predetermined output at the processing start position from the laser oscillator. (Extended pre-excitation period + minimum pre-excitation period) is secured as the pre-excitation period. Therefore, a pulse laser with a predetermined output can be oscillated from the laser oscillator at the machining start position. As a result, even when the rise characteristic of the laser oscillator output that guarantees the minimum print quality is obtained, the rise of the pulse laser oscillated from the laser oscillator can be made steep.

Further, in the machining data creation apparatus according to the fourth aspect of the invention, machining data for controlling the laser machining apparatus is created as follows. Based on the movement time required for the scanning unit to move from the standby position to the machining start position, an extended pre-excitation period that extends the pre-excitation period is calculated relative to the minimum pre-excitation period, and the pre-excitation period is set to the minimum pre-excitation period. And based on the extended pre-excitation period. Furthermore, when the scanning unit moves from the standby position to the processing start position, processing data is generated for causing the excitation semiconductor laser to output preliminary excitation light having an output threshold value or less during the calculated preliminary excitation period.
In other words, in the machining data creation device according to the fourth aspect of the invention, when machining data for controlling the laser machining device is created, preliminary excitation light having an output threshold value or less is output to the pumping semiconductor laser to the laser machining device. The preliminary excitation period can be extended according to the time for the scanning unit to move from the standby position to the machining start position. Even when the movement time is shorter than the minimum pre-pumping period, the pre-pumping light is output to the pumping semiconductor laser at least in the minimum pre-pumping period, so that the rise is steep and the print quality of laser processing can be improved. Even when the movement time is longer than the minimum preliminary excitation period, the preliminary excitation period is within the time required for the scanning unit to move from the standby position to the processing start position, so that it is possible to prevent an increase in printing time.

In the program according to the fifth aspect of the invention, when the program is executed, the laser processing apparatus is controlled as follows. Extension that extends the pre-excitation period to the minimum pre-excitation period, which is the minimum pre-excitation period necessary to obtain print quality, based on the movement time required for the scanning unit to move from the standby position to the processing start position The preliminary excitation period is calculated, and the preliminary excitation period is calculated based on the minimum preliminary excitation period and the extended preliminary excitation period. Further, when the scanning unit moves from the standby position to the processing start position, preliminary excitation light having an output threshold value or less is output to the excitation semiconductor laser in the calculated preliminary excitation period.
In other words, in the program according to the fifth aspect of the invention, when the laser processing apparatus is controlled, the scanning unit is moved from the standby position as the time for the laser processing apparatus to output the preliminary pumping light below the output threshold to the pumping semiconductor laser. The preliminary excitation period can be extended according to the time required to move to the processing start position. Even when the movement time is shorter than the minimum pre-pumping period, the pre-pumping light is output to the pumping semiconductor laser at least in the minimum pre-pumping period, so that the rise is steep and the print quality of laser processing can be improved. Even when the movement time is longer than the minimum preliminary excitation period, the preliminary excitation period is within the time required for the scanning unit to move from the standby position to the processing start position, so that it is possible to prevent an increase in printing time.

It is a figure which shows schematic structure of the laser processing apparatus 1 which concerns on this embodiment. 2 is an explanatory diagram showing a schematic configuration of a laser oscillator 11. FIG. 2 is a block diagram showing an electrical configuration of the laser processing apparatus 1. FIG. It is a figure which shows the irradiation position of the galvano scanner 18 on the process target object 6. FIG. When the movement time from the standby position P0 to the processing start position P1 is shorter than the minimum preliminary excitation period T2, the output of the pulse laser light L, the position of the galvano scanner 18 and the drive current of the excitation semiconductor laser 28 are related to time. It is a figure shown by. When the movement time from the standby position P0 to the processing start position P1 is longer than the minimum preliminary excitation period T2, the output of the pulse laser light L, the position of the galvano scanner 18 and the drive current of the excitation semiconductor laser 28 are related to time. It is a figure shown by. 4 is a flowchart illustrating an example of a drive control process by a laser controller 3 of the laser processing apparatus 1. It is a flowchart which shows an example of the process about calculation of the galvano movement time. It is a flowchart which shows an example of the process about calculation of a preliminary | backup excitation period.

  DETAILED DESCRIPTION Hereinafter, a laser processing apparatus, a processing data creation apparatus, and a program according to an embodiment of the present invention will be described in detail with reference to the drawings. First, a schematic configuration of the laser processing apparatus 1 according to the present embodiment will be described with reference to FIGS. 1 to 3.

[1. Schematic configuration of laser processing apparatus]
As shown in FIG. 1, a laser processing apparatus 1 according to this embodiment includes a laser processing apparatus main body 2, a laser controller 3, and a power supply unit 5. The laser processing apparatus main body 2 performs a process of marking characters, symbols, figures, and the like by two-dimensionally scanning the processing surface 6A of the processing target 6 with the laser beam L.

  The laser controller 3 is configured by a computer and is connected to a personal computer (hereinafter referred to as “PC”) 7 so as to be capable of bidirectional communication, and is also electrically connected to the laser processing apparatus main body 2 and the power supply 5. ing. The laser controller 3 drives and controls the laser processing apparatus main body 2 and the power supply unit 5 based on print information (processing information), control parameters, various instruction information, and the like transmitted from the PC 7. That is, the laser controller 3 controls the entire laser processing apparatus 1.

  A schematic configuration of the laser processing apparatus main body 2 will be described with reference to FIG. In the description of the laser processing apparatus body 2, the direction in which the laser beam L is emitted from the laser oscillator 11 is the front direction of the laser processing apparatus body 2. Further, the vertical direction of the main body base 12 with respect to the mounting surface to which the laser oscillator 11 is mounted is the vertical direction of the main body 2 of the laser processing apparatus. And the direction orthogonal to the up-down direction and the front-rear direction of the laser processing apparatus main body 2 is the left-right direction of the laser processing apparatus main body 2.

  As shown in FIG. 1, the laser processing apparatus main body 2 includes a main body base 12, a laser oscillation unit 13 that emits laser light L, an optical shutter unit 15, a light damper (not shown), and a half mirror (not shown). And a reflection mirror 16, an optical sensor 17, a galvano scanner 18, an fθ lens 19, and the like, and covered with a substantially rectangular parallelepiped housing cover (not shown).

  The laser oscillation unit 13 includes a laser oscillator 11, a beam expander 21, and the like. The beam expander 21 adjusts the beam diameter of the laser light L (for example, increases the beam diameter), and is provided coaxially with the laser oscillator 11. The half mirror (not shown) is disposed on the front side of the optical shutter unit 15, is disposed so as to form an angle of 45 degrees obliquely to the rear right with respect to the optical path of the laser light L, and is incident from the rear side. Transmits almost all of L.

  The half mirror reflects a part of the laser beam L incident from the rear side, for example, 1% of the laser beam L to the reflection mirror 16 at a reflection angle of 45 degrees. The reflection mirror 16 reflects the incident laser light L toward the front side at a reflection angle of 45 degrees. The optical sensor 17 is composed of a photodetector or the like that detects the light emission intensity of the laser light L, the laser light L reflected by the reflection mirror 16 is incident, and the light emission intensity of the incident laser light L is detected.

  The galvano scanner 18 is attached to the upper side of a through-hole formed in the front end portion of the main body base 12 and two-dimensionally scans the laser light L emitted from the laser oscillation unit 13 downward. The galvano scanner 18 includes a galvano X-axis motor 22 and a galvano Y-axis motor 23 that are fitted into the respective mounting holes 25 from the outside so that the respective motor shafts are orthogonal to each other. Scanning mirrors attached to the tip end face each other inside. Then, the laser light L is two-dimensionally scanned downward by controlling the rotation of the motors 22 and 23 to rotate the scanning mirrors. The two-dimensional scanning direction is a front-rear direction (X direction) and a left-right direction (Y direction).

  The fθ lens 19 condenses the laser light L that is two-dimensionally scanned by the galvano scanner 18 on the processing surface 6A of the processing target 6 disposed below. Therefore, by controlling the rotation of the motors 22 and 23, the laser light L is moved in the front-rear direction (X direction) and the left-right direction (Y direction) in a desired print pattern on the processing surface 6A of the processing target 6. Two-dimensional scanning is performed.

  Next, a schematic configuration of the power supply unit 5 will be described with reference to FIG. As shown in FIG. 1, in the power supply unit 5, an excitation semiconductor laser 28, a laser driver 29, a power supply 31, and a cooling device 32 are arranged in a casing 27. The power supply 31 supplies a driving current for driving the pumping semiconductor laser 28 to the pumping semiconductor laser 28 via the laser driver 29. The laser driver 29 DC drives the pumping semiconductor laser 28 based on the drive information input from the laser controller 3.

The pumping semiconductor laser 28 is optically connected to the laser oscillator 11 by an optical fiber 33. The pumping semiconductor laser 28 emits laser light having a wavelength λ ₁ with an output [W] proportional to the current value exceeding the threshold current for generating laser light with respect to the pulsed drive current input from the laser driver 29. The light is emitted into the optical fiber 33. Therefore, the laser oscillator 11 receives the laser light having the wavelength λ ₁ of the pumping semiconductor laser 28 (hereinafter referred to as “pumping light”) through the optical fiber 33. As the pumping semiconductor laser 28, for example, a laser bar using GaAs can be used.

  The cooling device 32 cools the power source 31 and the pumping semiconductor laser 28 by an electronic cooling method, and controls the temperature of the pumping semiconductor laser 28, so that the oscillation wavelength of the pumping semiconductor laser 28 can be finely adjusted. The cooling device 32 may be a water cooling type cooling device, an air cooling type cooling device or the like.

  Next, a schematic configuration of the laser oscillator 11 will be described with reference to FIG. As shown in FIG. 2, the laser oscillator 11 includes a fiber connector 36, a condensing lens 37, a reflecting mirror 38, a laser medium 39, a passive Q switch 41, an output coupler 42, a window, and a casing 35. 43 is arranged. An optical fiber 33 is connected to the fiber connector 36, and excitation light emitted from the excitation semiconductor laser 28 is incident through the optical fiber 33.

The condensing lens 37 condenses the excitation light incident from the fiber connector 36. The reflecting mirror 38 transmits the excitation light condensed by the condenser lens 37 and reflects the laser light emitted from the laser medium 39 with high efficiency. The laser medium 39 is excited by the excitation light emitted from the excitation semiconductor laser 28 and oscillates the laser light. Examples of the laser medium 39 include neodymium-added gadolinium vanadate (Nd: GdVO ₄ ) crystal to which neodymium (Nd) is added as a laser active ion, neodymium-added yttrium vanadate (Nd: YVO ₄ ) crystal, Nd: A YAG crystal or the like can be used.

The passive Q switch 41 is a crystal having a property that when the light energy stored inside exceeds a certain value, the transmittance becomes 80% to 90%. Accordingly, the passive Q switch 41 functions as a Q switch that oscillates the laser light oscillated by the laser medium 39 as a pulsed pulse laser. As the passive Q switch 41, for example, a chrome YAG (Cr: YAG) crystal or a Cr: MgSiO ₄ crystal can be used. Therefore, the laser oscillator 11 oscillates a pulse laser through the passive Q switch 41.

  The output coupler 42 constitutes a reflecting mirror 38 and a laser resonator. The output coupler 42 is, for example, a partial reflecting mirror constituted by a concave mirror whose surface is coated with a dielectric layer film, and the reflectance at a wavelength of 1063 nm is 80% to 95%. The window 43 is formed of synthetic quartz or the like, and transmits the laser light emitted from the output coupler 42 to the outside.

Therefore, the laser oscillator 11 receives pumping light having an output higher than the “output threshold” that is the maximum output value of pumping light that does not oscillate the pulse laser from the pumping semiconductor laser 28 via the optical fiber 33, and pumping light. When the output period is longer than the “period threshold” that is the minimum output period in which the laser oscillator 11 oscillates the pulse laser, the pulse of wavelength λ ₂ having an average output proportional to the output value exceeding the output threshold of the excitation light Oscillates the laser. The “output threshold” and “period threshold” are determined by the characteristics of the pumping semiconductor laser 28, the type of Nd: YVO ₄ crystal, Nd: YAG crystal, or a combination thereof.

  Next, the circuit configuration of the laser processing apparatus 1 will be described with reference to FIG. As shown in FIG. 3, the laser processing apparatus 1 includes a laser controller 3 that controls the entire laser processing apparatus 1, a galvano controller 45, a galvano driver 46, a laser driver 29, and the like. The laser controller 3 is electrically connected with a galvano controller 45, a laser driver 29, an optical sensor 17, and the like.

  In addition, the PC 7 is connected to the laser controller 3 so as to be capable of two-way communication, and can receive print information (processing information) transmitted from the PC 7, control parameters of the laser processing apparatus main body 2 and various instruction information from the user. It is configured. The PC 7 is electrically connected to an input operation unit 61 including a mouse 63 and a keyboard 64, a liquid crystal display (LCD) 62, and the like via an input / output interface (not shown).

  The laser controller 3 includes an arithmetic unit that performs overall control of the laser processing apparatus 1, a CPU 51 as a control unit, a RAM 52, a ROM 53, a timer 54 that measures time, and the like. The CPU 51, RAM 52, ROM 53, and timer 54 are connected to each other via a bus line (not shown), and exchange data with each other.

  The RAM 52 is for temporarily storing various calculation results calculated by the CPU 51, XY coordinate data of the print pattern, and the like. The ROM 53 stores various programs, and stores various programs such as calculating the XY coordinate data of the print pattern based on the print information (processing information) transmitted from the PC 7 and storing it in the RAM 52. ing. The ROM 53 stores data such as the start point, end point, focus, curvature, etc. of the font of each character composed of straight lines and elliptical arcs for each type of font. The ROM 53 stores a drive control processing program (see FIGS. 7 to 9) described later.

  The CPU 51 performs various calculations and controls based on various programs stored in the ROM 53. For example, the CPU 51 outputs XY coordinate data, galvano scanning speed information, and the like of the print pattern calculated based on the print information (processing information) input from the PC 7 to the galvano controller 45. Further, the CPU 51 sets the excitation light output [W] and the excitation light output period [ms] of the excitation semiconductor laser 28 set based on the print information (processing information) input from the PC 7. A drive pattern (processing data) is output to the laser driver 29.

  The galvano controller 45 calculates the drive angle, rotation speed, and the like of the galvano X-axis motor 22 and the galvano Y-axis motor 23 based on the XY coordinate data, galvano scanning speed information, etc. of the print pattern input from the laser controller 3. Motor drive information representing the drive angle and rotation speed is output to the galvano driver 46. The galvano driver 46 drives and controls the galvano X-axis motor 22 and the galvano Y-axis motor 23 based on the motor drive information indicating the drive angle and rotation speed input from the galvano controller 45, and performs two-dimensional scanning with the laser light L. To do.

  The laser driver 29 drives the pumping semiconductor laser 28 based on the laser driving information such as the pumping light output [W] and the pumping light output period [ms] input from the laser controller 3. Control. Specifically, the laser driver 29 generates a pulsed drive current having a current value proportional to the excitation light output [W] of the laser drive information input from the laser controller 3, and outputs the excitation light of the laser drive information. During the period [ms], the laser beam is output to the pumping semiconductor laser 28. As a result, the pumping semiconductor laser 28 emits pumping light with pumping light output [W] into the optical fiber 33 during the output period [ms].

[2. Drive control processing]
Next, drive control processing by the laser controller 3 of the laser processing apparatus 1 configured as described above will be described with reference to FIGS.

  As shown in FIG. 7, first, in step (hereinafter abbreviated as “S”) 11, the CPU 51 of the laser controller 3 acquires processing information from the PC 7. The processing information includes information on the moving speed of the galvano scanner 18, the processing start position, the standby position, and the like.

  With reference to FIG. 4, the process of this embodiment is demonstrated.

  As shown in FIG. 4, before the CPU 51 outputs the processing data to the galvano controller 45 and the laser driver 29 in S15 to be described later, the irradiation position on the processing object 6 is set to the standby position P0 (X0, Y0). ). In the present embodiment, the standby position P0 is the scanning origin of the galvano scanner 18, and is the irradiation position on the workpiece 6 through which the laser light L passes on the optical axis of the fθ lens 19. The scanning origin is a position where the galvano scanner 18 irradiates the processing surface 6A of the workpiece 6 when no voltage is applied to the motors 22 and 23 of the galvano scanner 18.

  Note that the standby position P0 may not be on the scanning origin or on the optical axis of the fθ lens 19. For example, the standby position P <b> 0 may be the irradiation position of the laser beam that has finished processing the workpiece 6 last time. In this case, the irradiation position of the laser beam that has finished processing the workpiece 6 last time is read from the encoder of the galvano scanner and stored in the RAM 52. Then, the galvano scanner 18 is controlled to move from the irradiation position of the laser beam L that has been processed last time to the irradiation position of the laser beam L that starts processing this time. The standby position P0 may be an irradiation position on the workpiece 6 at a timing at which an operation related to printing is started.

  When the CPU 51 outputs processing data to the galvano controller 45 and the laser driver 29 in S15 to be described later, the galvano controller 45 starts processing the irradiation position on the processing object 6 from the standby position P0 (X0, Y0). It moves to position P1 (X1, Y1) with movement speed Va.

  Next, according to the processing data, the laser driver 29 causes the pumping semiconductor laser 28 to output pumping light, and as a result, the laser oscillator 11 outputs the pulsed laser light L. While the laser driver 29 outputs the pulse laser beam L, the galvano controller 45 moves the irradiation position on the workpiece 6 from the machining start position P1 (X1, X2) to P2 (X2, Y2).

  Further, according to the processing data, the laser driver 29 causes the pumping semiconductor laser 28 to output, and as a result, the laser oscillator 11 outputs the pulsed laser light L. While the laser driver 29 outputs the pulse laser beam L, the galvano controller 45 moves the irradiation position on the workpiece 6 from P2 (X2, Y2) to the machining end position P3 (X3, Y3).

  Immediately after the irradiation position on the workpiece 6 moves to P3 according to the processing data, the laser driver 29 stops the output of the excitation light from the excitation semiconductor laser 28. As a result, the laser oscillator 11 causes the pulse laser beam to be emitted. L output is stopped. The galvano controller 45 moves the irradiation position on the processing object 6 from the processing end position P3 to another position in a state where the pumping semiconductor laser 28 stops outputting the excitation light. In this way, the laser driver 29 and the galvano controller 45 irradiate the pulse laser beam and process the workpiece 6.

  In S12, the CPU 51 of the laser controller 3 performs a process for calculating the galvano travel time.

  In this process, as shown in FIG. 8, the CPU 51 of the laser controller 3 first acquires necessary data from the processing information in S21. The acquired data includes data relating to the moving speed Va of the galvano scanner 18, the processing start position P1, and the standby position P0.

  In S22, the CPU 51 of the laser controller 3 calculates the moving time of the galvano scanner 18 from the data acquired in S21. In the calculation, the following equation is used: movement time = (distance of processing start position P1−standby position P0) / movement speed Va. The moving speed Va is, for example, 300 [mm / s].

  Thereafter, the process returns to FIG. 7 and proceeds to S13. In S13, the CPU 51 of the laser controller 3 performs a process for calculating the preliminary excitation period.

  In this process, as shown in FIG. 9, the CPU 51 of the laser controller 3 first determines in S31 whether or not the movement time of the galvano scanner 18 is shorter than the minimum preliminary excitation period T2. The minimum pre-excitation period T2 is a pre-excitation period of the excitation semiconductor laser 28 that is the minimum necessary for obtaining print quality. The minimum pre-excitation period T2 is a period in which pre-excitation light below the output threshold is output to the excitation semiconductor laser. The movement time of the galvano scanner 18 is the movement time calculated in S22 of FIG. As will be described in detail later, the preliminary excitation period is at least the minimum preliminary excitation period T2. The minimum preliminary excitation period T2 is a preliminary excitation period necessary for oscillating a pulse laser having a predetermined output S1 from the laser oscillator 11 at the processing start position. The minimum preliminary excitation period T2 is a period in which energy necessary for oscillating the output S1 of the predetermined pulse laser from the laser oscillator 11 at u3 which is the timing of outputting the excitation light is stored in the laser medium 39. The energy stored in the laser medium 39 is obtained by subtracting the energy attenuation amount for the minimum pre-excitation period T2 from the total energy obtained by multiplying the energy of the excitation light output from the excitation semiconductor laser 28 by the minimum pre-excitation period T2. Energy. The minimum preliminary excitation period T2 is set so that the energy stored in the laser medium 39 is equal to or greater than the energy for oscillating the output S1 of the predetermined pulse laser from the laser oscillator 11 at u3 which is the timing for outputting the excitation light. ing. The predetermined output S1 is, for example, 3 [W].

  Here, when the movement time of the galvano scanner 18 is shorter than the minimum preliminary excitation period T2 (S31: YES), the CPU 51 of the laser controller 3 calculates the minimum preliminary excitation period T2 as the preliminary excitation period in S32, The calculated preliminary excitation period is included in the processing information. Thereafter, returning to FIG. 7, the process proceeds to S14.

  In this way, when the process of S32 is executed, each process of S14 and S15 of FIG. 6 described later is executed, so that the case shown in FIG. 5 is obtained.

  With reference to FIG. 5, the processing data when the movement time T4 of the galvano scanner 18 is shorter than the minimum preliminary excitation period T2 will be described in detail.

  The laser driver 29 causes the preliminary pumping current A1 to flow through the pumping semiconductor laser 28 only during the minimum preliminary pumping period T2 from the timing u2 when the operation related to printing is started. The preliminary excitation current A1 is, for example, 2 [A]. At timing u2, the irradiation position of the pulse laser beam L is at the standby position P0. The minimum preliminary excitation period T2 is, for example, 20 [msec].

  At timing u5, the laser driver 29 starts the movement from the standby position P0 to the processing start position P1 at the moving speed Va while the preliminary excitation current A1 is supplied to the pumping semiconductor laser 28. From timing u5, at timing u3 after the movement time T4, the irradiation position of the pulsed laser light L reaches the processing start position P1. The movement time T4 is (processing start position P1−standby position P0) / movement speed Va. The movement time T4 is calculated in advance at S22 and stored in the RAM 52. The movement time T4 is, for example, 13 [msec].

  From the timing u3, the laser driver 29 supplies the excitation current A2 to the excitation semiconductor laser 28 only during the excitation period T3. The excitation current A2 is, for example, 5 [mA]. At timing u3, the irradiation position of the pulse laser beam L is at the processing start position P1. The galvano controller 45 starts to move from the machining start position P1 to the machining end position P3 via P2 at the movement speed Va. The excitation period T3 is, for example, 44 [msec]. The excitation period T3 is a period during which the irradiation position of the pulse laser beam L moves from the processing start position P1 to the processing end position P3 via P2. Therefore, the excitation period T3 is ((P2-P1) + (P3-P2)) / movement speed Va. The excitation period T3 is calculated in advance in S14 by the CPU 51 and is generated as processed data. The laser driver 29 causes the excitation current A2 to flow through the excitation semiconductor laser 28, whereby the laser oscillator 11 outputs the pulsed laser light L with a predetermined output S1. The frequency of the pulse laser beam L at the timing u3 is, for example, 10 [kHz]. From timing u3, after a period T8 for stabilizing the pulse laser beam L, the pulse laser beam L is stabilized. Specifically, the output of the pulse laser beam L is 5 [W], and the frequency of the pulse laser beam L is 30 [kHz]. The period T8 for stabilizing the pulse laser beam is, for example, 4 [msec].

  At timing u6, the laser driver 29 starts the movement from P2 to the processing end position P3 at the moving speed Va while the excitation current A2 is supplied to the excitation semiconductor laser 28.

  At timing u 4, the laser driver 29 stops applying current to the pumping semiconductor laser 28. When the laser driver 29 stops applying the current to the pumping semiconductor laser 28, the laser oscillator 11 stops the output of the pulsed laser light L. The processing period T7 is a period from the timing u2 at which printing starts to the processing end timing u4. That is, the processing period T7 is a period obtained by adding the excitation period T3 to the minimum preliminary excitation period T2. Thus, when the movement time T4 of the galvano scanner 18 is shorter than the minimum preliminary excitation period T2, the laser driver 29 and the galvano controller 45 drive the excitation semiconductor laser 28 and the galvano scanner 18.

  That is, the moving time for the galvano scanner 18 to move from P0 to P1 is shorter than the minimum preliminary excitation period T2 of the excitation semiconductor laser 28. Therefore, the processing period T7 is the sum of the minimum preliminary excitation period T2 and the excitation period T3 of the excitation semiconductor laser 28.

  Further, a minimum preliminary excitation period T2 that is a preliminary excitation period immediately before the processing start timing u3 is longer than a movement time T4 in which the galvano scanner 18 moves from P0 to P1. However, the minimum pre-excitation period T2 is as very short as 20 [msec]. In general, the movement time from the standby position P0 to the processing start position P1 is almost 20 [msec] or more, which is the minimum preliminary excitation period T2. Therefore, even when the movement time is short, the minimum preliminary excitation period T2 of the excitation semiconductor laser 28 can be used. The excitation period T3 immediately after the processing start timing u3 is equal to the movement time for the galvano scanner 18 to move from P1 to P3 via P2.

  On the other hand, when the movement time of the galvano scanner 18 is not shorter than the minimum preliminary excitation period T2 (S31: NO), the CPU 51 of the laser controller 3 preliminarily excites the movement time T4 of the galvano scanner 18 in S33. It is calculated as a period, and the calculated preliminary excitation period is included in the processing information. Thereafter, returning to FIG. 7, the process proceeds to S14.

  In this way, when the process of S33 is executed, each process of S14 and S15 of FIG. 7 described later is executed, so that the case shown in FIG. 6 is obtained.

  With reference to FIG. 6, the processing data when the movement time T4 of the galvano scanner 18 is longer than the minimum preliminary excitation period T2 will be described in detail.

  The laser driver 29 supplies the preliminary excitation current A1 to the excitation semiconductor laser 28 only during the preliminary excitation period T6 from the timing u1 when the operation related to printing is started. The preliminary pumping current A1 is the time when the laser oscillator 11 receives pumping light having an output lower than the “output threshold” that is the maximum output value of pumping light that does not oscillate the pulse laser from the pumping semiconductor laser 28 via the optical fiber 33. In addition, the current is applied to the semiconductor laser 28 for excitation. Therefore, the excitation current A2 of the excitation semiconductor laser 28 is larger than the preliminary excitation current A1. At timing u1, the irradiation position of the pulse laser beam L is at the standby position P0. The preliminary excitation period T6 is a period obtained by adding the minimum preliminary excitation period T2 to the extended preliminary excitation period T1. The extended preliminary excitation period T1 is, for example, 6 [msec]. The preliminary excitation period T6 is, for example, 26 [msec]. Further, at timing u1, the galvano controller 45 starts moving from the standby position P0 to the machining start position P1 at the moving speed Vb. From the timing u1, at the timing u3 after the movement time T4, the irradiation position of the pulsed laser light L reaches the processing start position P1. The movement time T4 is (machining start position P1−standby position P0) / movement speed Vb. The movement time T4 is calculated in advance at S22 and stored in the RAM 52. The moving speed Vb is, for example, 150 [mm / sec].

  From the timing u3, the laser driver 29 supplies the excitation current A2 to the excitation semiconductor laser 28 only during the excitation period T3. The laser oscillator 11 receives pumping light having an output higher than the “output threshold” that is the maximum output value of pumping light that does not oscillate the pulse laser from the pumping semiconductor laser 28 via the optical fiber 33. In this case, the current is applied to the pumping semiconductor laser 28. At timing u3, the irradiation position of the pulse laser beam L is at the processing start position P1. The laser driver 29 causes the excitation current A2 to flow through the excitation semiconductor laser 28, so that the laser oscillator 11 outputs the pulsed laser light L at the output S3. At timing u3, the galvano controller 45 starts moving from the machining start position P1 to the machining end position P3 via P2 at the movement speed Va. The output S3 is 4 [W], for example. The frequency of the pulse laser beam L at the timing u3 is, for example, 15 [kHz]. From timing u3, after a period T9 for stabilizing the pulse laser beam L, the pulse laser beam L is stabilized. Specifically, the output of the pulse laser beam L is 5 [W], and the frequency of the pulse laser beam L is 30 [kHz]. The period T9 for stabilizing the pulse laser beam is, for example, 3 [msec].

  At timing u6, the laser driver 29 starts the movement from P2 to the processing end position P3 in a state where the excitation current A2 is supplied to the excitation semiconductor laser 28.

  At timing u 4, the laser driver 29 stops applying current to the pumping semiconductor laser 28. When the laser driver 29 stops applying the current to the pumping semiconductor laser 28, the laser oscillator 11 stops the output of the pulsed laser light L. The processing period T5 is a period from a timing u1 at which an operation related to printing is started to a processing end timing u4. That is, the processing period T5 is a period obtained by adding the excitation period T3 to the preliminary excitation period T6. Thus, when the moving time T4 of the galvano scanner 18 is longer than the minimum preliminary excitation period T2, the laser driver 29 and the galvano controller 45 drive the excitation semiconductor laser 28 and the galvano scanner 18.

  That is, the movement time T4 for the galvano scanner 18 to move from P0 to P1 is longer than the minimum preliminary excitation period T2 of the excitation semiconductor laser 28. Therefore, the processing period T5 is the sum of the movement time T4 of the galvano scanner 18 and the excitation period T3.

  Furthermore, since the preliminary excitation period T6 until immediately before the processing start timing u3 is equal to the moving time of the galvano scanner 18, the extended preliminary excitation period T1 is added to the minimum preliminary excitation period T2 in the excitation semiconductor laser 28. Value. The excitation period T3 immediately after the processing start timing u3 is equal to the movement time for the galvano scanner 18 to move from P1 to P3 via P2.

  Therefore, in the case shown in FIG. 5, compared with the case shown in FIG. 6, the extended preliminary excitation period T1 is added to the minimum preliminary excitation period T2 of the excitation semiconductor laser 28 without increasing the excitation period T3. Furthermore, by adding the extended pre-excitation period T1 to the minimum pre-excitation period T2, the laser output of the laser oscillator 11 at the timing u3 becomes more stable.

  Returning to FIG. 6, in S <b> 14, the CPU 51 of the laser controller 3 generates processing data of the galvano scanner 18 and the pumping semiconductor laser 28 from the processing information (including the preliminary pumping period). In S <b> 15, the CPU 51 of the laser controller 3 outputs the processed data to the galvano controller 45 and the laser driver 29. After S15 ends, the CPU 51 ends the drive control process.

[3. Summary]
That is, in the laser processing apparatus 1 according to the present embodiment, the preliminary excitation period is extended with respect to the minimum preliminary excitation period T2 based on the movement time required for the galvano scanner 18 to move from the standby position P0 to the processing start position P1. The extended pre-excitation period T1 is calculated (S21, S22), and the pre-excitation period is calculated based on the minimum pre-excitation period T2 and the extended pre-excitation period T1 (S31, S32, S33). Further, when the galvano scanner 18 moves from the standby position P0 to the processing start position P1, pre-excitation light below the output threshold is output to the excitation semiconductor laser 28 in the calculated pre-excitation period T6 (S14, S15).

  That is, in the laser processing apparatus 1 according to the present embodiment, as shown in the case of FIG. 6, the galvano scanner 18 starts processing from the standby position P0 as the time for outputting the preliminary excitation light below the output threshold to the excitation semiconductor laser 28. There is a case where it is extended until the time for moving to the position P1. In this case, the output of the pulse laser after the timing u3 is further stabilized, and the printing quality of the laser processing by the laser oscillator 11 configured to oscillate the pulse laser corresponding to the output of the excitation light can be improved.

  In the laser processing apparatus 1 according to the present embodiment, the preliminary pumping period (minimum preliminary pumping period T2) of the pumping semiconductor laser 28 required to oscillate a pulse laser having a predetermined output S1 from the laser oscillator at the processing start position. ) If the moving time of the galvano scanner 18 is shorter (S31: YES), the minimum preliminary excitation period T2 is calculated as the preliminary excitation period (S32).

  That is, in the laser processing apparatus 1 according to the present embodiment, at least the preliminary excitation period (minimum preliminary excitation period T2) of the excitation semiconductor laser 28 is secured as the preliminary excitation period, as in the case of FIG. Therefore, a pulse laser having a predetermined output S1 can be oscillated from the laser oscillator at the machining start position. As a result, even when the rising characteristic of the output of the laser oscillator 11 that guarantees the minimum printing quality is obtained, the rise of the pulse laser oscillated from the laser oscillator 11 can be made steep.

  In the laser processing apparatus 1 according to the present embodiment, when the moving time of the galvano scanner 18 is not shorter than the preliminary excitation period (minimum preliminary excitation period T2) of the excitation semiconductor laser 28 (S31: NO), the galvano scanner The movement time of 18 is calculated as the preliminary excitation period (S33).

  That is, in the laser processing apparatus 1 according to the present embodiment, as shown in the case of FIG. 6, a longer time (the extended preliminary excitation period T1 is set to the minimum preliminary excitation period) than the preliminary excitation period (minimum preliminary excitation period T2) of the excitation semiconductor laser 28. The period added to the excitation period T2) is secured as a preliminary excitation period. Therefore, a pulse laser having a predetermined output S1 can be oscillated from the laser oscillator at the machining start position. As a result, the rise of the pulse laser oscillated from the laser oscillator 11 can be made steeper.

  In the laser processing apparatus 1 according to the present embodiment, the galvano scanner 18 is based on the distance (P1-P0) until the galvano scanner 18 moves from the standby position P0 to the processing start position P1 and the moving speed Va of the galvano scanner 18. The movement time required for the scanner 18 to move from the standby position P0 to the machining start position P1 is calculated (S21, S22).

  That is, in the laser processing apparatus 1 according to the present embodiment, the movement time required for the galvano scanner 18 to move from the standby position P0 to the processing start position P1 can be accurately calculated.

[4. Others]
In addition, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the meaning.
For example, the PC 7 may perform the drive control process shown in FIGS. However, in such a case, the drive control processing program shown in FIGS. 7 to 9 is stored in the PC 7 itself, and machining information acquisition (S11 in FIG. 7) is acquired from the PC 7 itself, and machining data is output. (S15 in FIG. 7) is performed on the laser controller 3.

1 Laser processing equipment 3 Laser controller 7 PC
DESCRIPTION OF SYMBOLS 11 Laser oscillator 18 Galvano scanner 22 Galvano X-axis motor 23 Galvano Y-axis motor 28 Excitation semiconductor laser 29 Laser driver 45 Galvano controller 46 Galvano driver 51 CPU
52 RAM
53 ROM

Claims (5)

A pumping semiconductor laser that emits pumping light;
A laser medium that receives the pumping light emitted from the pumping semiconductor laser to excite the laser medium to oscillate a pulse laser and not to oscillate the pulse laser; A laser oscillator configured to oscillate a pulse laser corresponding to the output of the excitation light when receiving excitation light with an output higher than an output threshold value,
A scanning unit that scans the workpiece with the pulse laser oscillated from the laser oscillator;
Obtaining means for obtaining machining information including a machining position of the pulse laser;
First calculation means for calculating a movement time required for the scanning unit to move from a standby position to a machining start position based on the machining information obtained by the obtaining means;
Second calculation means for calculating a pre-pumping period, which is a period for outputting pre-pumping light below the output threshold to the pumping semiconductor laser, based on the movement time calculated by the first calculation means;
When the scanning unit moves from the standby position to the processing start position, in the preliminary excitation period calculated by the second calculation means, the preliminary excitation light is output to the excitation semiconductor laser,
An output means for outputting the excitation light higher than the output threshold to the excitation semiconductor laser when the scanning unit moves from the processing start position;
The second calculation means includes
Calculating the preliminary excitation period equal to or greater than the minimum preliminary excitation period necessary for oscillating the pulse laser having a predetermined output at the processing start position from the laser oscillator;
A laser processing apparatus characterized by the above. The laser processing apparatus according to claim 1,
The second calculation means includes
Determining means for determining whether the travel time is shorter than the minimum pre-excitation period;
Third calculation means for calculating the minimum preliminary excitation period as the preliminary excitation period in response to the determination that the moving time is short by the determination means;
A laser processing apparatus characterized by the above. A laser processing apparatus according to claim 2,
The second calculation means includes
In response to determining that the moving time is not short by the determination unit, a period obtained by adding the minimum preliminary excitation period to the extended preliminary excitation period that extends the preliminary excitation period is calculated as the preliminary excitation period. Comprising 4 calculating means;
A laser processing apparatus characterized by the above. A machining data creation device for creating machining data for controlling a laser machining device,
The laser processing apparatus is
A pumping semiconductor laser that emits pumping light;
A laser medium that receives the pumping light emitted from the pumping semiconductor laser to excite the laser medium to oscillate a pulse laser and not to oscillate the pulse laser; A laser oscillator configured to oscillate a pulse laser corresponding to the output of the excitation light when receiving excitation light with an output higher than an output threshold value,
A scanning unit that scans the object to be processed with the pulsed laser oscillated from the laser oscillator, and
The processing data creation device
Obtaining means for obtaining machining information including a machining position of the pulse laser;
First calculation means for calculating a movement time required for the scanning unit to move from a standby position to a machining start position based on the machining information obtained by the obtaining means;
Second calculation means for calculating a pre-pumping period, which is a period for outputting pre-pumping light below the output threshold to the pumping semiconductor laser, based on the movement time calculated by the first calculation means;
When the scanning unit moves from the standby position to the processing start position, preliminary excitation light equal to or less than the output threshold is output to the excitation semiconductor laser in the preliminary excitation period calculated by the second calculation unit. Let
Processing data creating means for creating processing data for causing the pumping semiconductor laser to output the excitation light higher than the output threshold when the scanning unit moves from the processing start position,
The second calculation means includes
Calculating the preliminary excitation period equal to or greater than the minimum preliminary excitation period necessary for oscillating the pulse laser having a predetermined output at the processing start position from the laser oscillator;
Processing data creation device characterized by A program executed by a computer that controls a laser processing apparatus,
The laser processing apparatus is
A pumping semiconductor laser that emits pumping light;
A laser medium that receives the pumping light emitted from the pumping semiconductor laser to excite the laser medium to oscillate a pulse laser and not to oscillate the pulse laser; A laser oscillator configured to oscillate a pulse laser corresponding to the output of the excitation light when receiving excitation light with an output higher than an output threshold value,
A scanning unit that scans the object to be processed with the pulsed laser oscillated from the laser oscillator, and
The program is
An acquisition process for acquiring processing information including a processing position of the pulse laser;
A first calculation process for calculating a movement time required for the scanning unit to move from a standby position to a machining start position based on the machining information acquired by the acquisition process;
A second calculation process for calculating a pre-pumping period, which is a period for outputting pre-pumping light below the output threshold to the pumping semiconductor laser, based on the movement time calculated by the first calculation process;
When the scanning unit moves from the standby position to the processing start position, preliminary excitation light equal to or less than the output threshold is output to the excitation semiconductor laser during the preliminary excitation period calculated by the second calculation process. Let
An output process for outputting the excitation light higher than the output threshold to the excitation semiconductor laser when the scanning unit moves from the processing start position,
The second calculation process includes
Calculating the preliminary excitation period equal to or greater than the minimum preliminary excitation period necessary for oscillating the pulse laser having a predetermined output at the processing start position from the laser oscillator;
A program characterized by

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