JP2015182879A - Substrate transportation processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate transportation processing device which can perform stable substrate processing by suppressing the disturbance of tension which is generated at each substrate which travels between substrate processing rolls in a plurality of rows, in a substrate processing device using roll-to-roll.SOLUTION: A substrate transportation processing device continuously transports a thin-steel long-length substrate by making it pass a substrate processing part, and processes a surface of the substrate in transportation. The substrate processing part has a main roll part and a sub-roll part which form a substrate parallel-traveling part by the bridging of the substrate a plurality of times, the sub-roll part is arranged so as to rotate around a rotating shaft which has an angle at which the sub-roll part is brought into a relationship which is twisted with respect to the rotating shaft of the main roll part, and a tension roll which abuts on the substrate parallel-traveling part, and adjusts the tension of the substrate is arranged between the main roll part and the sub-roll part. The tension roll is independently arranged at each of a plurality of substrates of the substrate parallel-traveling part, and can individually adjust the tension of each substrate of the substrate parallel-traveling part.

Description

  The present invention relates to a base material transport processing apparatus that performs processing on a base material of a thin long plate being transported.

  As a substrate processing apparatus that performs a predetermined process on a substrate, for example, in a film forming apparatus (substrate processing apparatus) that forms a thin film on a substrate, a single-wafer substrate is formed in a chamber by sputtering, CVD, or the like. It is known that a thin film is formed on a base material in a state where is fixed, and for example, a solar cell module, an organic EL, and the like are formed by such a film forming apparatus.

  Recently, the advantage is that the substrate can be used without waste, and the film forming process speed does not depend on the film forming rate in each film forming chamber. Equipment) has been developed. For example, as shown in FIG. 8, the roll-to-roll type transport film forming apparatus includes a delivery reel B, a take-up reel C, and a plurality of film forming units D. A predetermined thin film is sequentially formed on the base material A by the base material A having passed through the plurality of film forming processing units D. Then, by finally being wound on the take-up reel C, the film-forming substrate A for which all film-forming processes have been completed is formed in a wound state.

  This film forming process part D has a chamber D1 in which a film forming process is performed, and a roll part D2 disposed in the chamber D1. This roll part D2 has the cylindrical main roll part F and the sub roll part G, as shown to Fig.9 (a). The main roll part F has a rotation axis f (main roll axis) arranged perpendicular to the conveying direction of the substrate A, and the sub roll part G has a rotation axis g (sub roll axis) as the main roll. For example, it is configured as a Nelson roll so as to be inclined at a predetermined angle that is in a torsional relationship with respect to the rotation axis f of the portion F. That is, the cylindrical secondary roll portion G extending in the secondary roll axial direction is disposed so that the outer peripheral surfaces of the main roll portion F and the secondary roll portion G are opposed to each other with the whole inclined at a predetermined angle. .

  The base material A travels between the main roll portion F and the sub roll portion G in a plurality of rows at a predetermined interval by the base material A being alternately bridged between the main roll portion F and the sub roll portion G a plurality of times. It is like that. And the film-forming material supply part H is arrange | positioned facing the part which the base material A drive | works in multiple rows, By supplying raw material gas from this film-forming material supply part H, on the base material A A thin film having a predetermined thickness is formed on the substrate (for example, see Patent Document 1). The source gas and the base material A are heated by a heat source (not shown) provided in the film forming material supply unit H and a heat source (not shown) installed between the main roll unit F and the sub roll unit G. As a result, the film can be formed at a predetermined film forming temperature.

JP 2013-139621 A

  However, the film forming and conveying apparatus has a problem that the film forming process is not stable. That is, since the rotation axis g of the sub roll part G is twisted with respect to the rotation axis f of the main roll part F, the distance between the main roll part F and the sub roll part G is the central part of the base material parallel running part. Therefore, the tension applied to each base material A of the base material parallel running portion is different. As a result, as shown in FIG. 9B, there is a problem that the running posture of the base material A is disturbed (the base material A is displaced upward in the drawing), and the film forming process is not stable.

  Further, even when the distance between the main roll part F and the sub roll part G is structurally equal, the heat source and the roll part D2 and the sub roll part G provided in the film forming material supply part H As a result of the influence of the heat source installed between the base materials A, the peripheral length of each base material A changes irregularly with the thermal expansion of the base material A of the base material parallel running portion. As described above, there was a problem that the film forming process was not stable.

  The present invention has been made in view of the above problems, and in a base material transport processing apparatus using a roll-to-roll, a base that travels in a plurality of rows between rolls disposed facing each other in a chamber for processing the base material. It aims at providing the base material conveyance processing apparatus which can perform the stable base material processing by suppressing disorder of tension which arises in each material.

  In order to solve the above-described problems, the base material transport processing apparatus of the present invention continuously transports a thin plate-shaped base material from the delivery reel unit to the take-up reel unit through the base material processing unit, and A base material transport processing device for processing a surface of a base material by performing a predetermined process on the base material being transported by a material processing unit, wherein the base material processing units are arranged to face each other and the base material is It has a main roll part and a sub roll part that form a base material parallel running part by being spanned a plurality of times, and the sub roll part has an angle that is a relation between the rotation axis of the main roll part and a twist. A tension roll is provided between the main roll portion and the sub roll portion to adjust the tension of the base material in contact with the base material parallel running portion. Each of the plurality of base materials of the base material parallel running section. Provided independently, it is characterized by individually controlled tension of the base material parallel running portions each substrate.

  According to the substrate transport processing apparatus, tension rolls are independently provided on each of the plurality of substrates of the substrate parallel running portion between the main roll portion and the sub roll portion forming the substrate parallel running portion. And since this tension roll can adjust the tension | tensile_strength of each base material of a base material parallel running part separately, disorder of the tension | tensile_strength which arises in each base material which drive | works in multiple rows | lines can be suppressed. Therefore, since the running posture of each base material of the base material parallel running portion can be stabilized, stable base material processing can be performed.

  As a specific aspect, the base material processing unit may be configured to perform a film forming process.

  According to this configuration, it is possible to form a stable film formation on the base material by suppressing the disturbance of the tension generated in each base material traveling between the rolls in a plurality of rows.

  Further, the sub-roll part has a plurality of individual rolls corresponding to the base material of the base material parallel running part, and the plurality of individual rolls are arranged in parallel with the rotation axis direction of the main roll. In addition, the rotation axis of each individual roll may be set to an angle that is in a torsional relationship with the rotation axis of the main roll portion.

  According to this configuration, the sub-roll unit has a plurality of individual rolls, and these individual rolls have the above-described configuration, so that the distance between the main roll unit and the sub-roll unit is the center portion and the axis. The problem that differs between the end portions in the direction is solved, and the problem of the tension applied to the base material resulting from the difference in the distance between the rolls in the axial direction is solved structurally. However, even with this structure, it is difficult to completely eliminate the problem that the tension applied to each base material is different due to the influence of heat for maintaining the film forming temperature. Since the tension of the material can be adjusted individually, even if a thermal problem occurs, it is possible to suppress the tension disturbance occurring in each of the base materials traveling in a plurality of rows. That is, since the tension applied to each base material can be reliably adjusted, a stable film forming process can be performed.

  According to the base material transport processing apparatus of the present invention, in the base material transport processing apparatus using roll-to-roll, stable base material processing can be performed by suppressing disturbance of tension generated in each base material traveling in a plurality of rows. It can be carried out.

It is a figure which shows the conveyance film forming apparatus (base material conveyance processing apparatus) in one Embodiment of this invention. It is the figure which expanded the film forming process part of the said conveyance film forming apparatus (base material conveyance processing apparatus). It is the schematic of the roll for film forming, and is the figure seen from the A direction in FIG. It is the schematic of the roll for film forming, and is the figure seen from the B direction in FIG. It is a schematic sectional drawing of a sub roll part, (a) is a sectional view which looked at a sub roll part from the direction orthogonal to a sub roll axis, and (b) looked at a sub roll part from the sub roll axis direction. It is sectional drawing. It is the schematic which shows the tension roll in the roll for film forming. (A) is a figure which shows a solar cell module, (b) is a figure which shows a photovoltaic cell. It is a figure which shows the conventional conveyance film forming apparatus. It is a figure which shows the conventional Nelson roll.

  Next, an embodiment of the transport film forming apparatus of the present invention will be described. Here, FIG. 1 is a schematic diagram illustrating the entire transport film forming apparatus (base material transport processing apparatus) in the present embodiment, and FIG. 2 is a diagram illustrating a main configuration of a film forming processing unit. In the present embodiment, a transport film forming apparatus that performs a film forming process on a base material will be described as an example of the base material transport processing apparatus. Then, as an object of the transport film forming apparatus, it will be described as an example applied to film formation of a solar cell module.

  As shown in FIGS. 1 and 2, the transport film forming apparatus includes a delivery reel unit 10, a take-up reel unit 20, and a film formation processing unit (base material processing unit) 30. When the base material 2 wound around 10 passes through the film forming treatment section 30, surface treatment for forming the solar cells 4 on the base material 2 is performed (film forming treatment is performed), and the take-up reel section By being wound around 20, a roll-shaped solar cell base material 4 ′ is formed. That is, a thin film necessary for a solar cell is laminated on the base material 2 by a so-called roll-to-roll, in which the base material 2 is continuously conveyed from the delivery reel unit 10 to the take-up reel unit 20, and the solar cell base material 4 'is formed. In this solar cell base material 4 ′, the strip-shaped solar cells 4 shown in FIG. 7B are formed by the subsequent cutting step, and further, the solar cells 4 are bonded to each other through a joining step. The solar cell modules 1 are arranged and joined in the short direction (FIG. 7A).

  In the present embodiment, the description will proceed with the delivery reel unit 10 side as the upstream side and the subsequent process side where the substrate 2 is processed, that is, the take-up reel unit 20 side as the downstream side.

  The delivery reel unit 10 is for supplying the substrate 2 to the downstream side. The delivery reel unit 10 includes a delivery roll 11 around which the base material 2 is wound, and the base material 2 can be sent out by controlling the drive of the delivery roll 11. That is, by controlling the rotation of the delivery roll 11 by a control device (not shown), the delivery amount of the base material 2 can be increased and decreased. Specifically, the base material 2 is sent to the downstream side by rotating the delivery roll 11 while the base material 2 receives a tensile force from the downstream side, and the base material 2 is appropriately braked to apply the brake to the base material. 2 is sent out at a constant speed without bending.

  Here, the base material 2 is a thin plate long body, and a long body having a flat plate shape with a thickness of 0.01 mm to 0.2 mm and a width of 5 mm to 50 mm is applied. Moreover, although it does not specifically limit as a material, Stainless steel, copper, etc. are used suitably.

  The take-up reel unit 20 takes up the supplied base material 2. The take-up reel unit 20 has a take-up roll 21 as in the case of the delivery reel unit 10, and the base material 2 can be taken up by controlling the drive of the take-up roll 21. . That is, the amount of winding of the base material 2 can be increased and decreased by controlling the rotation of the winding roll 21 by a control device (not shown). Specifically, by adjusting the rotation of the take-up roll 21, it is possible to prevent the substrate 2 that has been sent out from being bent, and the substrate 2 is wound so that it does not receive excessive tension. It has become. In this embodiment, the base material 2 that has exited the delivery reel unit 10 is transported at a constant speed and is controlled to be taken up by the take-up reel unit 20. The delivery reel unit 10 and the take-up reel unit 20 are arranged in a chamber (shown by a broken line) that forms a vacuum environment.

  The film formation processing unit (base material processing unit) 30 is for forming (forming a film) a thin film necessary for the solar cell on the base material 2, and in the present embodiment, a plurality of film formation processing units 30. Is provided. Specifically, a plurality of film forming units 30 are arranged in a straight line between the delivery reel unit 10 and the take-up reel unit 20, and the base material 2 sent out from the delivery reel unit 10 is formed into each film forming unit. A thin film is sequentially formed on the base material 2 by running through the processing unit 30 and passing therethrough. That is, thin films such as a lower electrode layer 3a, a photoelectric conversion layer 3b, and an upper electrode layer 3c are formed in this order from the base material 2 side to form a solar cell base material 4 ′ (see FIG. 7B). .

  These film formation processing units 30 are configured by a CVD, sputtering, or vapor deposition apparatus. As shown in FIG. 2, as shown in FIG. 2, a chamber 31 and a film formation roll (base material treatment roll) accommodated in the chamber 31. 5 and a material supply unit 6. The chamber 31 maintains the inside in a vacuum environment. A predetermined thin film is formed on the substrate 2 by supplying a specific source gas (material for forming a thin film) from the material supply unit 6 into the chamber 31 maintained in a vacuum environment. The chamber 31 is formed with an inlet portion 31a and an outlet portion 31b. After the base material 2 conveyed from the upstream side is supplied into the chamber 31 from the inlet portion 31a and subjected to film formation in the chamber 31, It is conveyed downstream through the outlet 31b. The inlet portion 31a and the outlet portion 31b are sealed so that the base material 2 can pass therethrough, and even when the base material 2 travels by conveyance, each chamber 31 has a vacuum degree appropriate for forming each thin film. It is supposed to be kept.

  The material supply unit 6 is for supplying a material for forming a thin film on the substrate 2. The material supply unit 6 has an ejection unit (not shown) that ejects a raw material gas that is a raw material of the thin film. Then, the raw material gas ejected from the ejection part is decomposed in the plasma atmosphere and deposited on the base material 2 to form a predetermined thin film. The material supply unit 6 is provided in a state where the ejection unit faces the base material parallel running unit 2a. In the example of FIG. 2, it is provided in a state facing the base material parallel running portion 2 a formed on the outer peripheral surface 51 a of the main roll portion 51. Specifically, one material supply unit 6 is provided in common with respect to the plurality of base materials 2 of the base material parallel running portion 2a, and faces the plurality of base materials 2 of the base material parallel running portions 2a. It is arranged at a position. Thereby, a predetermined thin film is formed on the plurality of base materials 2.

  The film-forming roll 5 is disposed to face the material supply unit 6 and forms the base material parallel running part 2a in a state where a plurality of base materials 2 are arranged. Here, FIG. 3 and FIG. 4 are schematic views of the film-forming roll 5, FIG. 3 is a view seen from the A direction in FIG. 2, and FIG. 4 is a view seen from the B direction in FIG. It is. The film-forming roll 5 has a main roll portion 51 and a sub-roll portion 52, which are arranged facing each other at a predetermined distance. Then, the base material 2 is alternately bridged between the main roll portion 51 and the sub roll portion 52, and the base material parallel running portion 2a in a state where one base material 2 is arranged in a plurality of rows at predetermined intervals in the axial direction. Running to form.

  The main roll unit 51 is a roll arranged in a state orthogonal to the conveyance direction of the base material 2. The main roll unit 51 has a main roll shaft 53 (rotation axis of the main roll unit 51) extending in one direction, and the main roll shaft 53 is orthogonal to the transport direction of the base material 2 transported from the upstream side. Arranged in a state. The main roll portion 51 is connected to a servo motor (not shown), and the main roll shaft 53 can be rotated and stopped about the axis by driving and controlling the servo motor.

  Moreover, the main roll part 51 has a substantially cylindrical shape, and the base material 2 is conveyed along the outer peripheral surface 51a. Specifically, after the conveyed base material 2 travels along the outer peripheral surface 51a of the main roll unit 51, it travels again along the outer peripheral surface 51a of the main roll unit 51 via the sub-roll unit 52. In addition, the base material 2 is alternately bridged between the main roll portion 51 and the sub roll portion 52, so that the base material 2 is aligned on the outer peripheral surface 51 a of the main roll portion 51 in the axial direction at a predetermined interval. A running portion 2a is formed. That is, when the main roll unit 51 rotates, the base material 2 travels on the outer peripheral surface 51a of the main roll unit 51 in a state where a plurality of rows are arranged in the axial direction.

  The sub-roll unit 52 is a roll disposed to face the main roll unit 51. The sub-roll unit 52 includes a sub-roll shaft 54 and individual rolls 7 provided on the sub-roll shaft 54, and a plurality of individual rolls 7 are arranged along the main roll shaft 53. .

  The sub roll shaft 54 is formed of a rod-like member extending in one direction as will be described later. The sub roll shaft 54 is disposed in a state orthogonal to the transport direction of the base material 2 transported from the upstream side. That is, the sub roll shaft 54 is provided in parallel to the main roll shaft 53 and is disposed so as to be equidistant from the main roll portion 51 in the axial direction. Further, the sub roll shaft 54 is fixedly provided without being connected to the driving device. Therefore, the secondary roll shaft 54 does not rotate around its axis even while the substrate 2 is traveling, and is fixed while being kept parallel to the main roll shaft 53.

  The individual roll 7 is a roll that is rotatably provided on the sub roll shaft 54. Here, FIG. 5 is a schematic cross-sectional view of the sub-roll portion 52, and FIG. 5 (a) is a cross-sectional view of the sub-roll portion 52 as viewed from a direction orthogonal to the sub-roll shaft 54, and FIG. ) Is a cross-sectional view of the sub roll portion 52 as viewed from the sub roll shaft 54 direction. As shown in FIGS. 3 to 5, the individual rolls 7 are small rolls formed in a short length, and are provided in a plurality on the secondary roll shaft 54. All the individual rolls 7 are provided in a state where the outer peripheral surface 7 a faces the outer peripheral surface 51 a of the main roll portion 51. In the present embodiment, the individual rolls 7 are arranged at a predetermined interval in the extending direction of the sub roll shaft 54, and each individual roll 7 is arranged to have a predetermined angle with respect to the sub roll shaft 54. ing. Specifically, each individual roll 7 is arranged so that the central axis 71 (the rotation axis of the sub roll portion 52) has the same angle α with respect to the sub roll axis 54, and all the individual rolls 7 are arranged. Are arranged in a state having a constant angle α with respect to the main roll portion 51 (main roll shaft 53). And since the sub roll axis | shaft 54 and the main roll axis | shaft 53 are arrange | positioned at equal distance over the axial direction, each individual roll 7 is arrange | positioned at equal distance with respect to the main roll part 51. FIG.

  In addition, each individual roll 7 is formed to rotate around each central axis 71. Specifically, the individual roll 7 has an inner diameter roll 72 fixed to the sub-roll shaft 54 and a bearing 73 provided to be fitted on the outer diameter side of the inner diameter roll 72. When the outer ring rotates with respect to the inner diameter roll 72, the individual roll 7 can rotate around the central axis 71. That is, the outer peripheral surface 7 a formed by the bearings 73 of all the individual rolls 7 is disposed so as to face the outer peripheral surface 51 a of the main roll portion 51, and the bearings 73 of the individual rolls 7 are located with respect to the main roll portion 51. It rotates in the state which has a predetermined angle. And the base material 2 spanned by the main roll part 51 and the sub roll part 52 is spanned by the outer peripheral surface 51a of the main roll part 51, and the bearing 73 of the separate roll 7, and the main roll part 51 is driven. Thus, when the base material 2 travels, the base material 2 travels while being in sliding contact with the bearings 73 of the individual rolls 7, so that the bearings 73 of the individual rolls 7 are freely rotated in accordance with the travel of the base material 2. It is supposed to be.

  In this way, each individual roll 7 is arranged at an equal distance from the main roll unit 51 and is arranged so as to be rotatable in a state inclined at a predetermined angle α. The base material 2 that travels can travel while being applied with the same tension. That is, as shown in FIG. 3, the secondary roll shaft 54 is inclined parallel to the main roll shaft 53 so that the central shaft 71 of all the individual rolls 7 is twisted with respect to the main roll shaft 53. The points P1 to P5 where the base material 2 traveling on the outer peripheral surface 7a of the individual roll 7 is farthest from the main roll portion 51 are arranged on the sub roll shaft 54, and P1 to P5 are the main rolls. It is arranged equidistant from the part 51. The distances k1 to k5 between P1 to P5 and the contact point at which the base material 2 contacts the outer peripheral surface 51a of the main roll portion 51 are all equal (k1 =... = K5). Thus, the tension applied to each of the base materials 2 spanned between the main roll portion 51 and the sub roll portion 52 (the tension applied to each of the base materials 2 of the base material parallel running portion 2a) is substantially uniform. It becomes a state. And since it travels in the state which has a predetermined angle alpha with respect to the main roll part 51, even when the base material 2 is run over the main roll part 51 and the sub roll part 52, the base material 2 is the axis. It is possible to travel stably while maintaining the initial travel position on the individual roll 7 without moving in the direction.

  Moreover, the sub roll part 52 has an axial direction movement mechanism and an inclination adjustment mechanism. Here, the axial direction moving mechanism moves the sub roll part 52 in the axial direction with respect to the main roll part 51, and the inclination adjusting mechanism adjusts the inclination angle of the individual roll 7. In this embodiment, as shown in FIG. 5, the sub roll shaft 54 is formed of two shafts 54a, and the individual rolls 7 are fixed to the shafts 54a. Both ends of the sub roll shaft 54 are supported by a support base (not shown). Two shafts 54a can be moved in the axial direction on the support base, and both of the two shafts 54a can be moved in the axial direction (axial movement mechanism), or the shafts 54a can be moved one by one. The relative movement (tilt adjustment mechanism) is possible.

  The two shafts 54 a are prismatic members having the same shape, and are inserted into through holes 72 a provided in the inner diameter roll 72 of the individual roll 7. And the pin 90 is being fixed to the shaft 54a at equal intervals along the longitudinal direction, and this pin 90 and the separate roll 7 are connected. Therefore, when the two shafts 54 a are both moved in the axial direction by the axial movement mechanism, all the individual rolls 7 provided on the sub roll shaft 54 are moved in the direction of the main roll shaft 53 with respect to the main roll portion 51. Can do.

  Further, the inner diameter roll 72 of the individual roll 7 is provided with a pin hole having a diameter larger than the diameter of the pin 90, and the pin 90 provided on the shaft 54a is inserted into the pin hole to be connected. Yes. That is, the individual roll 7 can be rotated with respect to the pin 90 in a state where the pin 90 is inserted into the pin hole. Therefore, when the other shaft 54a is moved in the axial direction with one shaft 54a fixed, the individual roll 7 follows the axial movement of the other shaft 54a with the pin 90 inserted in the pin hole. The tilt angle of the individual rolls 7 can be adjusted by rotating them. For example, from the state shown in FIG. 5, by moving the right shaft 54a downward with respect to the left shaft 54a, the inclination angle of the individual rolls 7 with respect to the two shafts 54a can be increased. The inclination angle of the individual roll 7 can be reduced (inclination adjusting mechanism).

  The film forming roll 5 is provided with a tension roll 55. The tension roll 55 adjusts the tension of each base material 2 that forms the base material parallel running portion 2 a, and is provided between the main roll portion 51 and the sub roll portion 52. The tension roll 55 abuts on each of the base materials 2 independently and can adjust the tension of each base material 2 individually. That is, as described above, in the film-forming roll 5, each individual roll 7 is usually arranged at an equal distance from the main roll portion 51, and the central axis 71 of the individual roll 7 is at a predetermined angle. Since each of the base materials 2 is arranged so as to be rotatable in an inclined state, substantially the same tension is applied to each base material 2. However, when the source gas supplied from the material supply unit 6 is maintained at a temperature suitable for the film forming process, or when a heater for heating the base material 2 is attached, the base material 2 is heated to a high temperature. Due to the thermal expansion caused by the exposure, the tension applied to the base material 2 differs in each of the base material parallel running portions 2a, and the base material 2 cannot travel stably in the film-forming roll 5, and the film is formed. There arises a problem that the processing is not stable. Therefore, the tension roll 55 adjusts the tension of each base material 2, whereby the tension applied to the base material 2 can be kept constant and the film forming process can be stabilized.

  The tension roll 55 has a tension roll main body 551 that contacts the base material 2 and a weight portion 552, and is provided independently on each base material 2 of the base material parallel running portion 2a. Specifically, the tension roll main body 551 and the weight portion 552 are connected by a support portion 553, and are provided so as to be rotatable about the support portion 553.

  The tension roll body 551 is a substantially cylindrical roll, and is arranged in a direction in which the axis is orthogonal to the traveling direction of the base material 2, and the outer peripheral surface abuts and supports the back surface of the base material 2. That is, when the base material 2 travels, the tension roll body 551 can rotate about the axis.

  The weight portion 552 is a weight for bringing the tension roll body 551 into contact with the base material 2. The weight portion 552 is set to be heavier than the tension roll body 551, and the weight portion 552 is positioned below the tension roll body 551 in the vertical direction when the support portion 553 is free to rotate. ing.

  When the weight roll 552 is at the lowest position in the vertical direction (the state indicated by the two-dot chain line in FIG. 6), the tension roll 55 has a height position at which the tension roll body 551 comes into contact with the base material 2. It is provided so that it may become higher than 2 normal driving path height. Then, in the state where the substrate 2 is brought into contact with the film forming process (the state of the broken line in FIG. 6), the weight portion 552 is positioned higher than the lowest position in the vertical direction by rotating around the support portion 553. The tension roll main body 551 and the base material 2 are brought into contact with each other in the state of being displaced in the direction. Thereby, the tension applied to the base material 2 can be adjusted. That is, when the base material 2 expands due to thermal influence, the tension of the base material 2 changes, but the weight portion 552 affected by gravity tends to be displaced to the lowest position in the vertical direction. As a result, as shown by the solid line in FIG. 6, the tension is adjusted so as to be displaced toward the tension roll body 551 base 2 and to compensate for the change in tension with respect to the elongation of the base 2. Such adjustment of the tension of the base material 2 is performed individually for each base material 2 of the base material parallel running portion 2a. Therefore, even when the tension disturbance generated in the base material 2 due to the influence of heat or the like occurs in the film forming process, the tension is adjusted for each base material 2 by the tension roll 55, so that each of the base material parallel running portions 2a. The running posture of the substrate 2 is stable, and a stable film forming process is possible.

  In the above embodiment, in the film forming roll 5, the sub roll shaft 54 is provided in parallel to the main roll shaft 53, and the central axis 71 of the individual roll 7 of the sub roll portion 52 is relative to the main roll shaft 53. However, the main roll shaft 53 is arranged at a predetermined angle having a torsional relationship with respect to the main roll shaft 53, that is, the main roll portion 51 and the subroll. The part 52 may be a Nelson roll.

  Moreover, although the case where the sub roll part 52 had the individual roll 7 was demonstrated in the said embodiment, the sub roll part 52 is formed with one roll like the main roll part 51, and the main roll part 51 and a sub roll The part 52 may constitute a Nelson roll. In these cases, the tension applied to each base material 2 is different from that of the structure without being affected by heat. However, the above-described tension roll 55 is provided so that the tension applied to each base material 2 is kept constant. Processing can be stabilized.

  In the above embodiment, the film forming roll 5 uses the weight to apply tension to the base material 2 to adjust the tension. However, in addition to the weight, the base material 2 is controlled by a cylinder mechanism or a spring mechanism. It is also possible to adjust the tension by applying tension.

  Moreover, although the said embodiment demonstrated the example in which the material supply part 6 was provided so that the base material parallel running part 2a formed in the outer peripheral surface of the main roll part 51 might be opposed, the main roll part 51 and the sub roll part The material supply unit 6 may be provided so as to face the base material parallel running unit 2 a formed between the base material parallel running unit 2 and the substrate 52.

  In the above embodiment, the film forming process is performed by CVD. However, the film forming process may be performed by another film forming process such as sputtering or vapor deposition. And the base material 2 may be processed not only in a dry environment but also in a wet environment.

  Moreover, although the said embodiment demonstrated the example which manufactures a solar cell, the conveyance film forming apparatus of this invention is the base material 2, conveying the flat base material 2 by what is called roll-to-roll, such as organic EL. It can be applied to any application for forming a thin film thereon.

  Moreover, in the said embodiment, although the conveyance film forming apparatus was demonstrated to the example as a base material conveyance processing apparatus, processes, such as a heating, conveying a base material, such as annealing treatment and a plasma processing, are also carried out in a chamber. The base material conveyance processing apparatus performed may be sufficient. That is, even when the base material 2 is subjected to heat treatment or cooling treatment, even when the base material 2 is thermally stretched and contracted, the tension disturbance generated in each of the base materials traveling in a plurality of rows is suppressed. The tension applied to each base material can be reliably adjusted, and the base material 2 can be processed stably.

2 base material 2a base material parallel running part 5 roll for film formation 7 individual roll 10 delivery reel part 20 take-up reel part 30 film formation processing part (base material processing part)
51 Main Roll Part 52 Sub Roll Part 53 Main Roll Axis 54 Sub Roll Axis 55 Tension Roll 71 Center Axis (Rotary Axis of Individual Roll)

Claims (3)

The thin plate long base material is continuously conveyed by passing the base material processing portion from the delivery reel portion to the take-up reel portion, and the base material processing portion performs predetermined processing on the base material processing portion, A substrate transport processing device for processing the surface of a substrate,
The base material processing part has a main roll part and a sub roll part that are arranged to face each other and form a base material parallel part by the base material being spanned multiple times,
The sub-roll part is disposed so as to rotate around a rotation axis having an angle that is a twist relationship with the rotation axis of the main roll part,
Between the main roll part and the sub roll part, a tension roll that adjusts the tension of the base material in contact with the base material parallel running part is provided,
The tension roll is provided independently for each of the plurality of base materials of the base material parallel portion, and the tension of the base material of each of the base material parallel portions can be individually adjusted. .   The substrate transport processing apparatus according to claim 1, wherein a film forming process is performed in the substrate processing unit.   The sub-roll part has a plurality of individual rolls corresponding to the base material of the base material parallel running part, and the plurality of individual rolls are arranged in parallel with the rotation axis direction of the main roll, The substrate transport processing apparatus according to claim 1 or 2, wherein the rotation axis of each individual roll is set to an angle that is in a torsional relationship with the rotation axis of the main roll portion.

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