JP2015178453A - Method and apparatus processing glass plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for processing a glass plate comprises: obliquely cutting a scribe groove line of a closed curve downwards in the thickness direction of the glass plate and toward the inner region of the closed curve on the upper surface of a glass plate by a cutter wheel; suctioning and raising the inside of the inner region of the scribe groove line of the closed curve by an adsorption pad from the upper surface side in the state of pressing the glass plate in the outer region of the closed curve to form a projecting bending faced upward to a glass plate; and making progress of a scribe groove reach the opposite surface to remove the inner region of the scribe groove line of the closed curve.SOLUTION: In the processing device 1, a scribe line 9 is formed so as to be inclined downward at a scribe position 4 toward the inner region 48 of a closed curve, i.e., the inner region 14 of the scribe line 9 and in the thickness direction of a glass plate.

Description

  The present invention relates to a method and an apparatus for cutting and forming an opening (hole) in an inner area of a glass plate.

  The present invention also relates to a processing method and a processing apparatus for a glass plate in which an opening for a sunroof window is cut out and formed in a ceiling area in a windshield (Palorama roof glass) that doubles as a front window and a ceiling in an automobile.

  Furthermore, it is related with the processing method and processing apparatus which cut and form an opening part in the inside of the glass plate for side glasses of a motor vehicle.

  Patent Document 1 discloses that the formation of an opening in a glass plate for an automobile is performed by clipping with a pressurized water jet.

  Patent Document 2 discloses a scribing method using a cutter wheel in a method of cutting out a glass substrate for a magnetic disk or an optical disk from a glass plate.

  This scribing method uses a cutter wheel that has different left and right blade angles with respect to the wheel ridgeline as a cutter wheel, and moves in a state of standing vertically to the glass plate surface and is inclined with respect to the thickness direction of the glass plate. It is a method of forming. In addition, using a cutter wheel with the same blade angle on the left and right with respect to the wheel ridgeline, the wheel ridgeline is moved in a state inclined with respect to the glass plate surface, and a scribe groove inclined with respect to the thickness direction of the glass plate is formed. A method is disclosed. In both cases, a scribe groove inclined with respect to the thickness direction of the glass plate is formed by a cutter wheel on the glass plate surface, and then the glass plate surface is heated, the glass plate is deformed, and a draft is formed below the scribe line. It is a method to do.

JP 2012-519642 A JP-A-7-223828

  About patent document 1, in order to cut and form the opening part to a glass plate by a pressurized water jet, the cutting speed of a glass plate is slow, and it takes a very long time to complete the cutting, and a very low-efficiency processing operation It is.

  In Patent Document 2, only a diagram in which a scribe line is formed by inclining a cutter wheel and an explanation that a scribe groove inclined in a thickness direction is formed in a glass plate when the cutter wheel is inclined and scribed is disclosed. Not. There is no disclosure of the structure of the scribing device set with the cutter wheel tilted.

  Then, this invention exists in providing the processing method and processing apparatus of a glass plate which can form an opening part in the inner area of a glass plate speedily and with sufficient quality.

  Moreover, it exists in providing the processing method and processing apparatus of a glass plate which can process continuously the glass plate in which the opening part was formed.

  According to the present invention, a scribe groove line having a closed curve is formed on the upper surface of a glass plate by being inclined downward with respect to the thickness direction of the glass plate and toward the inner region of the closed curve by a cutter wheel. While holding in the outer area, the inside of the inner area of the closed scribe groove line from the upper surface side is sucked by the suction pad and lifted upward to form a convex bend facing upward on the glass plate And the progress of the scribe groove is made to reach the opposing surface, and the inner side of the closed-curved scribe groove line is extracted.

  Further, the present invention provides a scribing position in which a scribe groove line having a closed curve is inclined on the upper surface of the glass plate by a cutter wheel so as to incline downward toward the inner side of the closed curve with respect to the thickness direction of the glass plate, In addition, while holding the glass plate in the outer area of the closed curve, the inside of the inner area of the scribe groove line of the closed curve is sucked by the suction pad from the upper surface side, lifted upward, and directed upward to the glass plate. The glass plate processing apparatus is provided with a sampling position for forming a convex bend, allowing the progress of the scribe groove to reach the opposing surface, and extracting the inner area of the scribe groove line of the closed curve.

  Further, the present invention is a glass plate processing apparatus in which the lifting operation by sucking the inner region of the scribe groove line at the extraction position is performed by NC control by an NC control motor.

FIG. 1 is a plan view of a glass plate (product) in which an opening is formed. FIG. 2 is a plan view of a glass plate on which scribe lines for forming openings are formed. FIG. 3 is an explanatory view of the posture of the cutter wheel during scribing using the cutter wheels having the same left and right blade angles. FIG. 4 is an explanatory view of the posture of the cutter wheel during scribing using cutter wheels having different left and right blade angles. FIG. 5 is an explanatory diagram showing a direction in which an inner area of a scribe line formed in a closed curve is extracted. FIG. 6 is an explanatory view showing a state in which the inner region of the scribe line is extracted from the glass plate. FIG. 7 is a front view of the glass plate processing apparatus. FIG. 8 is a front view of the scribing device for the glass plate. FIG. 9 is an explanatory view of each processing position and the conveying device showing the processing device of the present glass plate in a longitudinal section. FIG. 10 is a cross-sectional view of a scribe position when a cutter wheel having the same left and right blade angles with respect to a ridge line is used. FIG. 11 is a cross-sectional view of a scribe position when a cutter wheel having the same left and right blade angles with respect to a ridge line is used. FIG. 12 is an explanatory view of the extraction position shown by a cross section. FIG. 13 is an explanatory view of the extraction position shown by a cross section. FIG. 14 is an explanatory view of the extraction position shown by a cross section. FIG. 15 is a cross-sectional view of the grinding position. FIG. 16 is a cross-sectional view of a scribe position when a cutter wheel having different left and right blade angles with respect to a ridge line is used. FIG. 17 is a plan view of the extraction position.

  Specific examples of the present invention will be described with reference to the drawings.

  As shown in FIGS. 8 and 9, the glass plate processing apparatus 1 is arranged with a carry-in position 3, a scribe position 4, an extraction position 5, a grinding position 6, and a take-out conveyor 7 arranged on a straight line at equal intervals from the right. Has been.

  Further, a conveying device 8 for the glass plate 2 is provided in the back.

  The conveying device 8 is provided above the carry-in standby conveyor 75 at the carry-in position 3, above the scribe work table 13 at the scribe position 4, above the belt conveyor at the extraction position 5, and at the grinding work table 24 at the grinding position 6. The upper part and the upper part of the take-out conveyor 7 are installed in a straight line.

  The carry-in position 3 is a position for positioning the glass plate 2 on the carry-in conveyor 75 and waiting the glass plate 2 for carry-in.

  The scribe position 4 is a position at which the scribe line 9 is cut and formed in the inner region 16 of the glass plate 2.

  The scribe line 9 is formed along the shape of the opening to be formed and is a closed curve.

  The extraction position 5 is a position at which the inner region 14 surrounded by the closed-curved scribe line 9 formed at the scribe position 4 is extracted upward to form the opening 10 in the glass plate 2.

  The grinding position 6 is a position for grinding the inner edge 20 of the opening 10 formed at the extraction position 5.

  The takeout conveyor 7 is a conveyor for taking out the processed glass plate 2 out of the apparatus.

  The transfer device 8 repeats the reciprocating linear movement corresponding to the distance between the positions, for example, between the scribe position 4 and the extraction position 5 to move the glass plate 2 from the carry-in position 3 to the scribe position 4. From the extraction position 5 to the grinding position 6 and from the grinding position 6 to the extraction position 7, one after another is sent.

  This glass plate processing apparatus 1 includes an NC device (not shown), and forms a scribe line 9 on the glass plate 2 at the scribe position 4, an extraction operation at the extraction position 5, and a glass plate 2 at the grinding position 6. The grinding of the inner edge 20 of the opening and the reciprocating linear motion of the transport device 8 are performed under NC control.

  And as for the processing apparatus 1 of this glass plate, as shown in FIG. 9, the left-right direction F is an X-axis seeing from the front.

  The positions 3, 4, 5, 6 are arranged along the X axis.

  Further, the conveying device 8 is also arranged in parallel with the X axis.

  As shown in FIG. 9, the scribe position 4 includes a scribe head 12 having a cutter wheel 11 at the lower end and a scribe work table 13 that supports the glass plate 2 in a plane. The grinding position 6 includes a grinding head 22 having a grinding wheel 21 at the lower end and a grinding work table 24 that holds the glass plate 2 by suction. In addition, it is a plurality of suction cups 23, 23, 23,.

  The scribe head 12 at the scribe position 4 and the grinding head 22 at the grinding position 6 are both mounted on the common X-axis moving table 25 via the angle control means 17.

  Now, as shown in FIGS. 9 and 10, on the front of the glass plate processing apparatus 1, a pedestal 27 is installed in a straight line above and below the scribe position 4, the extraction position 5, and the grinding position 6. ing. The gantry 27 is erected on gate-shaped frames 29 and 29 that are erected before and after the machine base 28. Two guide rails 30, 30 arranged in the left-right direction, that is, parallel to the X-axis, and the guide rails 30, 30 are attached to the guide rails 30, 30 movably on the front surface of the mount 27. The X-axis moving table 25 attached to the X-axis moving table 25 through the slide block and the guide rails 30 and 30 are connected to the X-axis moving table 25 via nuts. A feed screw 31 and an X-axis servo motor 32 connected to one end of the feed screw 31 via a toothed belt and a pulley are provided. The X-axis moving table 25 is NC-controlled by the X-axis servo motor 32 and X Move the axis.

  On the front surface of the X-axis moving table 25, a bearing device 33 is attached at a position corresponding to the scribe position 4, and a bearing device 34 is attached at a position corresponding to the grinding position 6.

  The bearing device 33 includes a rotating shaft 36 held by a bearing (not shown).

  The bearing device 34 includes a rotating shaft 37 held by a bearing (not shown).

  The rotation shafts 36 and 37 are incorporated in a state where the rotation axis is orthogonal to the XY plane coordinate system, that is, the upper surface of the glass plate 2, and the angle is rotated by being orthogonal to the upper surface of the glass plate 2.

  The rotary shaft 36 at the scribe position 4 has a scribe head 12 attached to a lower end portion 39 via a clamp bracket 42 and a bracket body 43. Further, an angle control motor 40 is connected to the upper end portion 38 of the rotating shaft 36 via spur gears 41 and 41.

  On the other hand, the rotating shaft 37 has a grinding head 22 attached to the lower end portion 39 via a clamp bracket 44. Similarly, an angle control motor 45 is connected to the upper end portion 38 of the rotating shaft 37 via a spur gear 46.

  Each of the angle control motors 40 and 45 is held by a bracket erected from the front of the X-axis moving table 25. Accordingly, each of the rotary shaft 36 and the rotary shaft 37 is driven by angle control rotation by the angle control motors 40 and 45, and the scribe head 12 and the grinding head 22 attached to the respective lower end portions 39 are moved to the glass plate 2. The angle is rotated around an axis 15 orthogonal to the upper surface. In addition, the angle control motor 40 and the angle control motor 45 are synchronously driven so that the angle control rotation of the scribe head 12 and the grinding head 22 is performed in synchronization.

  The scribe head 12 at the scribe position 4 includes a spline shaft 47 having a cutter wheel 11 at the lower end, a head main body 48 that holds the spline shaft 47 so as to be freely reciprocated without rotating, and an upper portion of the head main body 48. An air cylinder device 49 that elastically presses the cutter wheel 11 against the glass plate 2 when the spline shaft 47 is moved back and forth to move the cutter wheel 11 up and down and scribe the glass plate 2. It comprises a base base 50 on which a body 48 is mounted so that its position can be adjusted in the X and Y directions.

  The scribe head 12 moves in a state where the spline shaft 47 is pushed by the air cylinder device 49 and elastically pressed against the surface of the cutter wheel 11 glass plate 2 in forming the scribe line 9 on the surface of the glass plate 2. 9 is formed.

  Therefore, as shown in FIG. 3, when the cutter wheel 11 having the same left and right blade angles is used as the cutter wheel 11 provided at the lower end of the scribe head 12, as shown in FIGS. The bracket body 43 is attached in an inclined posture with respect to the glass plate surface. The scribing head 12 is attached in a posture inclined downward toward the inner region 14 surrounded by the scribe line 9 to be formed.

  Note that the scribe head 12 is attached to the bracket body 43 so as to be inclined downward toward the inner region of the scribe line 9 to be formed on the base stand 50.

  Further, the scribe head 12 is attached so that the scribe point of the cutter wheel 11 provided at the lower end is positioned on the axis 15 of the rotation shaft 36 during the scribe operation.

  By attaching the scribe head 12 in a downward inclined posture toward the inner region 14 of the scribe line 9, the lower cutter wheel 11 is directed to the glass plate surface on the blade surface side and toward the inner region of the scribe line 9. It is in a state of touching in a downward inclined posture.

  Accordingly, when the cutter wheel 11 inclined toward the inner area 14 is scribed along a closed curve or a rectangular line, a downwardly inclined scribe groove is formed, and the direction of the vertical crack 26 is of course always the inner area of the scribe line 9. 14 is formed to be inclined obliquely downward.

  In addition, as shown in FIG. 3, the range of the set inclination angle of the cutter wheel 11 is 1 ° to 10 ° from the vertical when the wheel diameter is 5 mm and the blade edge is below 154 ° to 160 °. The optimum is 6.5 °.

  Furthermore, the attachment structure of the scribe head 11 to the bracket body 43 can freely change and set the tilt angle of the cutter wheel 11 with respect to the upper surface of the glass plate 2.

  As shown in FIG. 4, when a cutter wheel 11A having different left and right blade angles is used as the cutter wheel 11 provided at the lower end of the scribe head 12, the scribe head 12 has a glass plate surface as shown in FIGS. The bracket body 43 is attached in a posture perpendicular to the bracket. In this case, the cutter wheel 11A is set in a state in which the edge line of the blade angle stands perpendicular to the glass plate surface. The cutter wheel 11 </ b> A is set with the blade surface having a small blade angle facing the inner region of the scribe line 9.

  On the other hand, the scribe work table 13 corresponding to the scribe head 12 is provided with slide devices 54, 54 arranged along the Y-axis direction on the upper surface of the machine base 28 as shown in FIGS. 8, 9, 10, and 11. Is placed. The slide devices 54 and 54 include guide rails 55 and 55 and slide blocks 56 and 56 assembled to the guide rails 55 and 55, and the scribe work table 13 includes slide blocks 56, 56, 56, and 56. Installed on.

  The Y-axis movement of the scribe work table 13 is performed by a feed screw 57 provided between the guide rails 55 and 55 and a Y-axis control motor 58 connected to the feed screw 57.

  On the other hand, a grinding head 22 is attached to the lower end 39 of the rotary shaft 37 corresponding to the grinding position 6 via a clamp bracket 65, and the grinding head 22 includes a spindle motor 60 having a grinding wheel 21 and a spindle motor 60. The X-axis direction slide device 61 and the Y-axis direction slide device 62 are provided to hold the spindle motor 60 and to finely move the spindle motor 60 and thus the grinding wheel 21 in the X-axis direction and the Y-axis direction. .

  In the X-axis direction slide device 61, the grinding head 22 is attached to the lower end portion 39 of the rotating shaft 37 via the clamp bracket 65.

  The grinding head 22 attached to the lower end 39 of the rotary shaft 37 is set and adjusted so that the grinding work point on the grinding wheel 21 is located on the axis of the rotary shaft 37. An angle control motor 45 is connected to the portion 38 via a spur gear 46.

  The rotation shaft 37 receives angle control rotation drive by the angle control motor 45, and controls the angle of the grinding head 22 and the grinding wheel 21 around the axis 17 orthogonal to the glass plate 2. The grinding process is always performed in accordance with the normal line of the contour line of the grinding process.

  By adjusting the position adjusting means 60, the peripheral end surface (grinding surface) of the grinding wheel 21 is aligned with the axis 17 of the rotating shaft 37.

  In the figure, reference numeral 52 denotes a vertical slide device for setting the vertical position of the grinding head 22.

  In the figure, reference numeral 51 denotes a motor device that moves the vertical slide device 52 up and down to switch the height position of the grinding head 22 and the grinding wheel 21. When grinding the inner edge 20 of the opening 10, it is lowered to match the height of the glass plate.

  In addition, the grinding position 6 includes a grinding work table 24 that has a grinding wheel 21 and moves on the X axis while corresponding to the grinding head 22 that moves the Y axis while holding the glass plate 2 on the upper surface. Arranged on the base 28.

  The grinding work table 24 includes a table main body 68 and a plurality of block suction cups 23, 23, 23 that are detachably attached to the upper surface 69 of the table main body 68, and the table main body 68 is an upper surface of the machine base 28. Are attached to two sets of guide rails 70, 70 arranged along the Y-axis direction via slide blocks, and the Y-axis movement of the grinding work table 24 is assembled along the guide rails 70, 70. This is performed by driving the feed screw 71 and the Y-axis control motor 72 connected to the feed screw 71.

  As shown in FIGS. 12, 13, and 14, the extraction position 5 includes a belt conveyor device 80 on which the glass plate 2 carried in from the scribe position 4 is placed by the transport device 8, and an upper portion of the belt conveyor device 80. And an inner region extracting device 81 that proceeds to a position corresponding to the inner region 14 of the closed-curved scribe groove line 9 formed in the glass plate 2. The belt conveyor device 80 has an upper surface formed by a belt 82 which is easy to bend.

  The belt 82 does not have the support surface 83 over the entire mounting glass plate 2, and only has independent partial range support surfaces in at least two locations only in the inner region.

  One is a support surface body 84 fixed immediately below the conveying device 8, and the other is an XY plane below the belt 82 where the scribe groove line 9 of the placed glass plate 2 is formed. It is the support receiving body 85 which moves. The support surface 84 is fixedly supported from the conveyor frame 86. The support receiving body 85 has a case where the upper surface is a flat body and a case where the push-up body 165 is lifted.

  The air cylinder device 166 moves the pusher 165 up and down. The support receiving body 85 is held so as to be moved under NC control by a Y-direction moving means 87 provided at a lower position. The Y-direction moving means 87 is NC-controlled in the X direction by the X-direction moving means 88. Has been moved.

  On the other hand, the extraction device 81 includes a suction cup device 161 provided with a numerical control motor 160, a Y moving means 162 that moves the suction cup device 161 under NC control in the Y direction, and an NC movement in the Y direction. X direction moving means 163 to be controlled, and the X direction moving means 163 is attached to the conveyor frame. The suction cup device 161 has a suction pad 168 at the lower end and moves up and down under NC control.

  The glass plate 2 is placed on the upper surface of the belt 82 of the belt conveyor device 80 at the extraction position 5, and the glass plate lifting device 117 corresponding to the extraction position 5 of the transport device 8 is restored. The suction pads 130, 130, 130, 130 are arranged at positions above the outer area of the scribe groove line 9.

  At this time, the glass plate 2 is supported by the support surface body 84 via the belt 82, and the support receiving body 85 is positioned under the scribe line 9 via the belt 82.

  Next, the push-up body 165 is lifted by about 1 mm to 2 mm, pushed up below the scribe groove line 9 via the belt 82, moved along the scribe groove line 9, and the crack of the scribe groove line 9 progresses. Prompt. Next, the support receiving body 85 is positioned inside the inner region 14 of the scribe groove line 9 with the upper surface being a plane. Then, the suction pads 130, 130, 130, 130 of the transport device 8 are lowered to press the outer area of the scribe groove line 9 downward. Then, the scribing groove line 9 area is supported by the support receiving body 85 from below and pushed by the suction pads 130 and 130 from above, so that the glass plate 2 is bent upward and the vertical crack 19 further proceeds.

  In this state, as shown in FIGS. 6 and 7, the suction pad 168 of the extraction device 81 descends from above, sucks the inner side of the scribe groove line 9, and is controlled by NC to perform the inner suction lifting operation. Do. This lifting operation is repeated several millimeters of lifting, stopping, lowering and moving up and down slowly, or slowly lifting, the vertical crack 19 is advanced to the opposite surface, the inner region 14 is separated upward and taken out, Place on a belt conveyor. Then, the suction pads 130, 130, 130, 130 of the transport device 8 suck and raise the outer region 18 (for product) and move it to the next processing position.

  The conveying device 8 for the glass plate 2 includes a reciprocating table 120. The reciprocating table 120 repeats the reciprocating motion above the carry-in position 3, the scribe position 4, the extraction position 5, and the grinding position 6 in parallel with the X axis.

  The reciprocating table 120 includes glass plate lifting devices 115, 116, 117, and 118 at positions corresponding to the processing positions. That is, the reciprocating table 120 has a glass plate lifting device 115 corresponding to the carry-in position 3, a glass plate lifting device 116 corresponding to the scribe position 4, and a glass plate lifting device 117 corresponding to the extraction position 5. A glass plate lifting device 118 is provided corresponding to the grinding position 6.

  These glass plate lifting devices 115, 116, 117, 118 are integrated and reciprocate.

  The reciprocating motion of the reciprocating platform 120 is performed under NC control by a transfer control motor 140 described later. The glass plate lifting devices 115, 116, 117, and 118 are provided with lifting devices 121, 122, 123, and 124, respectively.

  The lifting devices 121, 122, 123, and 124 are respectively slidable devices 126 and 126 that are disposed on both sides of the vertical surface of the bracket 119, and the sliding devices 126 and 126 on both sides. Are attached to the lower surface of the lower connecting body 129, and are provided with a plurality of suction pads 130, 130... A frame 131, a rack 132 erected on the upper surface of the lower coupling body 129, a pinion gear 133 meshed with the rack 132, and a servo motor 134 to which the pinion gear 133 is attached and drives the pinion gear 133 are provided.

  The slide devices 126 and 126 on both sides include a slide bush body 135 and the slide shaft 127 that slides up and down in the slide bush body 135, and the slide bush bodies 135 and 135 are vertically moved on the vertical surface of the bracket 119. Installed along the direction. The servo motor 134 having the pinion gear 133 attached to the output shaft is also attached to the bracket 119.

  In each of the lifting devices 121, 122, 123, and 124, the pinion gear 133 is rotated by the servo motor 134, the rack 132 that meshes with the pinion gear 133 is raised and lowered, and the coupling body 129 to which the rack 132 is attached and the coupling body The U-shaped frame 131 attached to 129, and the suction pads 130, 130, 130 are moved up and down. The suction pads 130, 130, 130 come into contact with the upper surface of the glass plate 2 by the lowering of the U-shaped frame 131 to suck and hold the glass plate 2, and the glass plate 2 is lifted by raising the U-shaped frame 131.

  The U-shaped frame 131 is positioned in the outer region 18 of the scribe groove line 9 formed in the glass plate 2 or the outer region 18 of the opening 10 when the suction pads 130 and 130 suck or press the glass plate when lowered. As shown, the frames 171 and 171 are projected forward on the outer regions on both sides of the scrub groove 9 or the opening 10 in the traveling direction, and suction pads 130 and 130 are provided on the side surfaces of the frames 171 and 171. It is attached. The front 170 is open.

  The reciprocating base 120 is attached to slide devices 144 and 144 installed in parallel with the X-axis direction on the lower surface of the second mount 145. The slide devices 144 and 144 include rail bodies 146 and 146 mounted in parallel and a slide block 147 assembled to the rail bodies 146 and 146, and the reciprocating table 120 is mounted on the slide blocks 147 and 147. ing.

  The reciprocating motion of the reciprocating table 120 is moved under NC control by a feed screw 139 attached between the rail bodies 146 and 146 and a transport control motor 140 connected to the feed screw 139. The second gantry 145 is installed on the frames 29 and 29 behind the gantry 27.

1 Processing equipment 2 Glass plate

Claims (3)

  A scribe groove line with a closed curve is formed on the upper surface of the glass plate by slashing down toward the inner side of the closed curve with respect to the thickness direction of the glass plate by the cutter wheel, and then the glass plate is formed in the outer region of the closed curve. In the pressed state, the inside of the inside area of the scribe groove line of the closed curve from the upper surface side is sucked and lifted by the suction pad to form an upward convex bend on the glass plate, and the scribe groove progresses A processing method of a glass plate in which the inner surface of the scribe groove line of the above-mentioned closed curve is extracted.   A scribing position is formed on the upper surface of the glass plate with a cutter wheel so that the scribe groove line of the closed curve is inclined downward with respect to the thickness direction of the glass plate and toward the inner area of the closed curve, and then the glass plate is A convex surface that is pressed from the upper surface side in the outer area of the closed curve and that lifts the inner area of the inner area of the scribe groove line of the closed curve from the upper surface side by the suction pad to lift upward. And a drawing position for drawing the inner region of the scribe groove line of the closed curve. The method for processing a glass plate according to claim 1 or 2, wherein at the extraction position, the lifting operation by suction with an inner suction pad in the inner region of the scribe groove line is performed by NC control with an NC control motor. Processing equipment.

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