JP2015177564A - actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To appropriately detect the state of at least one of two members, while appropriately controlling the state of at least one of the two members facing each other.SOLUTION: An actuator (1) includes a first member (11) and a second member (12) which faces the first member. A first control electrode (113) and a first detection electrode (114) are formed on a first opposite face (111), facing the second member, of the first member. A second control electrode (123) and a second detection electrode (124) are formed on a second opposite face (121), facing the first member, of the second member. The first control electrode is electrically separated from the first detection electrode, and/or the second control electrode is electrically separated from the second detection electrode.

Description

  The present invention relates to an actuator capable of controlling (for example, moving) the state of at least one of two opposing members.

  As an example of a product that employs such an actuator, an optical filter disclosed in Patent Document 1 is exemplified. The optical filter disclosed in Patent Document 1 includes a first substrate, a second substrate facing the first substrate, and a first reflective film provided on a first facing surface where the first substrate faces the second substrate. A second reflective film provided on a second opposing surface where the second substrate faces the first substrate, a first electrode provided on the first opposing surface, and a second electrode provided on the second opposing surface And.

JP 2011-191554 A

  The first and second electrodes disclosed in Patent Document 1 control (that is, change) the gap between the first substrate and the second substrate by controlling (for example, moving) the state of the first substrate. ) Is used for. Here, in order to control the gap with high accuracy, the actual state of the gap (in other words, the state of the first substrate) is detected and based on the detection result. It is preferable to control the gap. However, since the optical filter disclosed in Patent Document 1 only includes the first electrode and the second electrode that are used to control the gap, the actual state of the gap is detected. There is a technical problem that it cannot be done.

  On the other hand, even in the optical filter disclosed in Patent Document 1, it is possible to detect the actual state of the gap by using the first electrode and the second electrode used to control the gap. It can also be considered possible. However, the signal for controlling the gap and the signal for detecting the state of the gap flow in a mixed manner on the same electrode (that is, the first and second electrodes). Therefore, there arises a technical problem that the configuration of the signal processing circuit for controlling the gap and detecting the state of the gap becomes complicated.

  The technical problem described above may occur not only in the optical filter described above but also in an arbitrary structure (for example, an actuator) that controls the state of two opposing members.

  Examples of problems to be solved by the present invention include the above. It is an object of the present invention to provide an actuator that can detect the state of at least one of the two members while controlling the state of at least one of the two opposing members relatively easily. And

The actuator which solves the above-mentioned subject is provided with the 1st member and the 2nd member which counters the 1st member, and (i) A first control electrode, and (ii) a first detection electrode different from the first control electrode is formed,
Of the second member, a second facing surface facing the first member has (i) a second control electrode facing the first control electrode, and (ii) different from the second control electrode and A second detection electrode facing the first detection electrode is formed, and the first control electrode and the first detection electrode and / or the second control electrode and the second detection electrode are electrically Have been separated.

  Such an operation and gain of the present invention will be clarified from the embodiments described below.

It is the top view and I-I 'sectional view of the actuator of the 1st example. It is a graph which shows the relationship between the space | interval between a 1st sensor electrode and a 2nd sensor electrode, and the electrostatic capacitance of a 1st sensor electrode and a 2nd sensor electrode. It is a top view and III-III 'sectional view of an actuator of the 2nd example. It is a top view and IV-IV 'sectional view of an actuator of the 3rd example. It is the top view and V-V 'sectional view of the actuator of the 4th example. It is the upper side figure and VI-VI 'sectional drawing of the actuator of 5th Example.

  Hereinafter, embodiments of the actuator of the present invention will be described in order.

<1>
The actuator of the present embodiment includes a first member and a second member that faces the first member. Of the first members, the first facing surface that faces the second member has (i) first 1 control electrode, and (ii) a first detection electrode different from the first control electrode is formed, and a second facing surface of the second member facing the first member is (i) A second control electrode facing the first control electrode, and (ii) a second detection electrode facing the first detection electrode,
The first control electrode and the first detection electrode and / or the second control electrode and the second detection electrode are electrically separated.

  According to the actuator of this embodiment, the first member and the second member face each other. The first member includes a first facing surface facing the second member (in other words, facing the second facing surface). Two types of electrodes (that is, a first control electrode and a first detection electrode) are formed on the first facing surface. The second member includes a second facing surface that faces the first member (in other words, faces the first facing surface). Two types of electrodes (that is, a second control electrode and a second detection electrode) are formed on the second facing surface.

  In the present embodiment, in particular, the first control electrode and the first detection electrode and / or the second control electrode and the second detection electrode are electrically separated. For example, in the first aspect of the actuator, the first control electrode and the first detection electrode are electrically separated, and the second control electrode and the second detection electrode are electrically separated. For example, in the second aspect of the actuator, the first control electrode and the first detection electrode are electrically separated, while the second control electrode and the second detection electrode are not electrically separated. Also good. For example, in the third aspect of the actuator, the second control electrode and the second detection electrode are electrically separated, while the first control electrode and the first detection electrode are not electrically separated. Also good.

  The state where “A and B are electrically separated” means a state where A and B are not electrically connected (that is, not electrically connected). In other words, the state where “A and B are electrically separated” means a state where A and B are electrically independent.

  Thus, according to the actuator of the present embodiment, two types of pairs of electrodes are formed on each of the first member and the second member. For this reason, the actuator can use one type of pair of electrodes (for example, the first and second control electrodes) of these two types of paired electrodes for the first application. On the other hand, the actuator uses the other type of pair of electrodes (for example, the first and second detection electrodes) of the two types of pair of electrodes for a second use different from the first use. Can be used. Therefore, in the actuator of this embodiment, the operation for the second application can be performed while performing the operation for the first application.

  Specifically, for example, the actuator is configured to connect one type of a pair of electrodes (for example, the first and second control electrodes) of these two types of a pair of electrodes to at least one of the first and second members. It can be used to control one state. On the other hand, the actuator changes the state of at least one of the first and second members to the other pair of electrodes (for example, the first and second detection electrodes) of the pair of two types of electrodes. Can be used to detect. Therefore, the actuator can control the state of at least one of the first and second members while detecting what state the at least one of the first and second members is actually in. . Therefore, compared with an actuator in which a pair of two types of electrodes is not formed, the actuator of this embodiment can control the state of at least one of the first and second members with high accuracy.

  In addition, in the actuator of this embodiment, the first control electrode and the first detection electrode and / or the second control electrode and the second detection electrode are electrically separated. For this reason, the actuator is in a state where the signal flowing through the first and second control electrodes for the first application and the signal flowing through the first and second detection electrodes for the second application are electrically separated. These two types of signals can be handled. Therefore, compared with an actuator in which the first control electrode and the first detection electrode are not electrically separated and the second control electrode and the second detection electrode are not electrically separated, In the actuator, the configuration of a signal processing circuit for performing signal processing for the first application and performing signal processing for the second application is simplified.

  Specifically, for example, the actuator has at least one of the signal flowing through the first and second control electrodes and the first and second members to control the state of at least one of the first and second members. These two types of signals can be handled in a state where the signals flowing through the first and second detection electrodes are electrically separated from each other in order to detect this state. Therefore, compared with an actuator in which the first control electrode and the first detection electrode are not electrically separated and the second control electrode and the second detection electrode are not electrically separated, In the actuator, the configuration of the signal processing circuit for controlling the state of at least one of the first and second members and detecting the state of at least one of the first and second members is simplified.

  As described above, the actuator according to the present embodiment performs the operation for the first application on at least one of the two opposing members (that is, the first member and the second member) relatively easily. An operation for a second application on at least one of the two members may be performed. Specifically, for example, the actuator of the present embodiment can control the state of the two members while controlling the state of at least one of the two opposing members (that is, the first and second members) relatively easily. At least one of the states can be detected.

<2>
In another aspect of the actuator of the present embodiment, the first and second control electrodes are electrodes for controlling the state of at least one of the first and second members, and the first and second The detection electrode is an electrode for detecting the state of at least one of the first and second members.

  According to this aspect, the actuator can relatively easily control at least one of the two opposing members (that is, the first and second members) while controlling at least one of the two members. The state can be detected.

<3>
In another aspect of the actuator of the present embodiment, an initial interval between the first detection electrode and the second detection electrode is smaller than an initial interval between the first control electrode and the second control electrode. .

  According to this aspect, the operation for the first application using the first and second control electrodes and the operation for the second application using the first and second detection electrodes are respectively required. Can be suitably performed while satisfying. The “initial interval” means an interval at which each state of the first and second members is in an initial state (for example, a state where each of the first and second members is not controlled). To do.

  As a specific example, for example, the first and second control electrodes are electrodes for controlling the state of at least one of the first and second members, and the first and second detection electrodes are first. An actuator that is an electrode is assumed to detect the state of at least one of the second member.

  In such an actuator, typically, a signal for controlling the state of at least one of the first and second members is supplied to the first and second control electrodes. As a result, the state of at least one of the first and second members is controlled by the electrostatic force generated in the first and second control electrodes. In this case, when the distance between the first and second control electrodes is smaller than a predetermined ratio (for example, 2/3) with respect to the initial distance between the first and second control electrodes, A pull-in state occurs where the second control electrodes come into contact with each other. When the pull-in state occurs, it becomes difficult to control the state of at least one of the first and second members. For this reason, in order to relatively increase the control amount of at least one of the first and second members, it is preferable that the initial interval between the first and second control electrodes is relatively large.

  On the other hand, in such an actuator, the capacitance of the first and second detection electrodes is detected in order to detect the state of at least one of the first and second members. This is because the capacitances of the first and second detection electrodes vary depending on the distance between the first and second detection electrodes. For this reason, the space | interval between the 1st and 2nd detection electrode is detectable based on the electrostatic capacitance of a 1st and 2nd detection electrode. As a result, the state of at least one of the first and second members is detected from the interval between the first and second detection electrodes. Here, the detection accuracy of at least one of the first and second members substantially depends on the detection accuracy of the interval between the first and second detection electrodes. The detection accuracy of the interval between the first and second detection electrodes is such that the amount of change in the capacitance of the first and second detection electrodes with respect to a predetermined amount of change in the interval between the first and second detection electrodes increases. improves. Then, considering that the capacitances of the first and second detection electrodes are inversely proportional to the interval between the first and second detection electrodes, the initial interval between the first and second detection electrodes is relatively The smaller the amount, the larger the amount of change in the capacitance of the first and second detection electrodes with respect to a predetermined amount of change in the spacing between the first and second detection electrodes. Therefore, in order to improve the detection accuracy of the interval between the first and second detection electrodes (in other words, the detection accuracy of the state of at least one of the first and second members), the first and second detections are performed. It is preferred that the initial spacing between the electrodes is relatively small.

  As described above, it is preferable that the initial interval between one of the two types of electrodes (for example, the first and second control electrodes) is relatively large, while the two types of the pair of electrodes A contradictory demand may arise that the initial spacing between the other type of electrodes (eg, the first and second detection electrodes) is preferably relatively small. Therefore, in the actuator of this aspect, in order to meet such a contradicting demand, the initial interval between the first detection electrode and the second detection electrode is set to the initial interval between the first control electrode and the second control electrode. It is smaller than the interval. Therefore, the actuator of this aspect, for example, can control at least one of the two members while suitably controlling at least one of the two opposing members (that is, the first and second members). It can detect suitably.

<4>
In another aspect of the actuator of the present embodiment, one first detection electrode and another first detection electrode are formed on the first opposing surface, and the second opposing surface includes One second detection electrode facing the one first detection electrode and another second detection electrode facing the other first detection electrode are formed, and the first first detection electrode And the first second detection electrode are different from the initial distance between the other first detection electrode and the other second detection electrode.

  According to this aspect, the actuator includes a plurality of combinations of the first and second detection electrodes. In particular, the initial spacing between the first and second detection electrodes in each of these combinations is different. For this reason, the actuator can change suitably the combination of the 1st and 2nd detection electrode used in order to perform operation | movement for a 2nd use as needed.

  As a specific example, for example, an actuator is assumed in which the first and second detection electrodes are electrodes for detecting the state of at least one of the first and second members.

  In such an actuator, as described above, the capacitances of the first and second detection electrodes are detected in order to detect the state of at least one of the first and second members. Furthermore, as described above, in order to improve the detection accuracy of at least one of the first and second members, it is preferable that the initial interval between the first and second detection electrodes is relatively small. . However, if the initial interval between the first and second detection electrodes is relatively small, the first and second detection electrodes may contact each other depending on the control amount of at least one of the first and second members. There is a high possibility that In this case, there arises a technical problem that it becomes difficult to detect the state of at least one of the first and second members using the first and second detection electrodes that have come into contact. Therefore, the actuator solves such a technical problem by changing the combination of the first and second detection electrodes used to detect the state of at least one of the first and second members. For example, when the control amount in the state of at least one of the first and second members is the first amount, the actuator uses the first and second detection electrodes having a relatively small initial interval, The state of at least one of the first and second members is detected. On the other hand, the first and second detection electrodes are in contact with each other because the control amount in the state of at least one of the first and second members changes to a second amount different from the first amount. If the possibility that the initial distance is relatively high, the actuator uses the first and second detection electrodes having a relatively large initial distance instead of the first and second detection electrodes having a relatively small initial distance. The state of at least one of the first and second members is detected. As a result, the actuator can detect the state of at least one of the first and second members regardless of the control amount of the state of at least one of the first and second members.

<5>
In another aspect of the actuator in which one first and second detection electrodes and the other first and second detection electrodes are formed as described above, the first and second detection electrodes are the first and second detection electrodes. A first detection mode for detecting a state using the one first detection electrode and the one second detection electrode, and an electrode for detecting the state of at least one of the two members; The second detection mode for detecting the state is switched using the detection electrode and the other second detection electrode.

  According to this aspect, as described above, the actuator can change the combination of the first and second detection electrodes used to detect the state of at least one of the first and second members. As a result, the actuator can detect the state of at least one of the first and second members regardless of the control amount of the state of at least one of the first and second members.

<6>
In another aspect of the actuator of the present embodiment, the first detection electrode and the second detection electrode are semi-permeable membranes.

  According to this aspect, the actuator can be used as a Fabry-Perot type spectroscopic element.

<7>
In another aspect of the actuator of the present embodiment, the first detection electrode is divided into a plurality of first electrode portions distributed on a virtual plane intersecting in a direction in which the first member and the second member face each other. The second detection electrode is divided into a plurality of second electrode portions distributed on a virtual plane intersecting in a direction in which the first member and the second member face each other.

  According to this aspect, compared with the case where each of the first and second detection electrodes is not divided, the plurality of first and second electrodes obtained by dividing the first and second detection electrodes, respectively. Using the portion, the operation for the second application using the first and second detection electrodes can be performed in a new manner.

  As a specific example, for example, an actuator is assumed in which the first and second detection electrodes are electrodes for detecting the state of at least one of the first and second members.

  In such an actuator, as described above, the capacitances of the first and second detection electrodes are detected in order to detect the state of at least one of the first and second members. Here, since the first and second detection electrodes are each divided into a plurality of first and second electrode portions, the capacitance for each combination of the first and second electrode portions facing each other is detected. . For example, the capacitance of a combination of one first electrode portion and one second electrode portion that face each other, and the capacitance of a combination of another first electrode portion and another second electrode portion that face each other. Detected. As a result, the interval for each combination of the first and second electrode portions facing each other is detected. Here, considering that the plurality of first electrode portions and the plurality of second electrode portions are distributed on a virtual plane where the first member and the second member intersect each other, the actuator is Detecting the tilt (in other words, tilt) of at least one of the first and second members by detecting the capacitance (in other words, the interval) for each combination of the first and second electrode portions facing each other. can do. Therefore, the actuator can operate to correct the detected tilt.

  Such an operation and other advantages of the present embodiment will be further clarified from examples described below.

  As described above, the actuator according to the present embodiment includes the first and second control electrodes and the first and second detection electrodes, and / or the first control electrode and the first detection electrode are The second control electrode and the second detection electrode are electrically separated. Therefore, it is possible to detect the state of at least one of the two members while controlling the state of at least one of the two members facing each other relatively easily.

  Hereinafter, embodiments of the actuator of the present invention will be described with reference to the drawings.

(1) First Embodiment First , the actuator 1 of the first embodiment will be described with reference to FIGS. 1 (a) to 1 (c). FIG. 1A is a top view of the actuator 1 of the first embodiment. FIG. 1B is a sectional view taken along the line II ′ of the actuator 1 of the first embodiment shown in FIG. 1A (however, no drive signal is supplied to the first actuator electrode 113 and the second actuator electrode 123). FIG. FIG. 1C shows a cross section taken along the line II ′ of the actuator 1 of the first embodiment shown in FIG. 1A (provided that drive signals are supplied to the first actuator electrode 113 and the second actuator electrode 123). FIG. 1A to 1C, an example in which the actuator 1 is disposed in a virtual three-dimensional space defined by mutually orthogonal X, Y, and Z axes will be described. To proceed.

  As shown in FIGS. 1A and 1B, the actuator 1 includes a first substrate 11 that is a specific example of “first member” and a second that is a specific example of “second member”. And a substrate 12.

  The first substrate 11 is a planar or plate-like member along the XY plane. The first substrate 11 has a rectangular shape on the XY plane. The second substrate 12 is also a planar or plate-like member along the XY plane. The second substrate 11 has a rectangular shape on the XY plane. The first substrate 11 and the second substrate 12 may be, for example, a glass substrate, a silicon substrate, or a substrate made of other materials.

  In the first substrate 11, the thickness of the portion 112 of the first substrate 11 (that is, the length along the Z-axis direction) is smaller than the thickness of the other portion of the first substrate 11. . In the example shown in FIG. 1A, the portion 112 having a relatively small thickness has a ring shape on the XY plane. That is, the first substrate 11 has a membrane structure.

  The first substrate 11 and the second substrate 12 are supported by a support member 13 that extends along the Z-axis direction. In the initial state, the support member 13 has an interval along the Z-axis direction between the first substrate 11 and the second substrate 12 (hereinafter, the interval along the Z-axis direction is simply referred to as “interval”) “d1. The first substrate 11 and the second substrate 12 are supported so that

  The “initial state” means a state in which the first substrate 11 is not distorted. That is, the “initial state” means a state in which drive signals are not supplied to the first actuator electrode 113 and the second actuator electrode 123 described later.

  The first substrate 11 includes a first facing surface 111. The first facing surface 111 is a surface parallel to the XY plane among the surfaces of the first substrate 11 and faces the second substrate 12 (in other words, faces the −Z axis direction, or is the second This is a surface facing the facing surface 121.

  The second substrate 12 includes a second facing surface 121. The second facing surface 121 is a surface parallel to the XY plane among the surfaces of the second substrate 12 and faces the first substrate 11 (in other words, faces the + Z axis direction or is the first facing). This is a surface facing the surface 111. The second facing surface 121 is a surface parallel to the first facing surface 111.

  The second facing surface 121 is surrounded by the first surface 121a and the first surface 121a, and protrudes toward the first substrate 11 side (in other words, the + Z-axis direction side) compared to the first surface 121a. Surface 121b. That is, a step is substantially formed on the second facing surface 121.

  In the first embodiment, the interval between the first substrate 11 and the second substrate 12 described above is the interval between the first facing surface 111 and the second surface 121b. However, the interval between the first substrate 11 and the second substrate 12 may be the interval between the first facing surface 111 and the first surface 121a.

  A first actuator electrode 113 which is a specific example of “first control electrode” and a first sensor electrode 114 which is a specific example of “first detection electrode” are formed on the first facing surface 111. Yes. A second actuator electrode 123, which is a specific example of “second control electrode”, and a second sensor electrode 124, which is a specific example of “second detection electrode”, are formed on the second facing surface 121. Yes. Each of the first actuator electrode 113, the first sensor electrode 114, the second actuator electrode 123, and the second sensor electrode 124 is, for example, an electrode containing metal.

  In the example shown in FIG. 1A, each of the first actuator electrode 113, the first sensor electrode 114, the second actuator electrode 123, and the second sensor electrode 124 has a ring shape on the XY plane. . Further, the center of each of the first actuator electrode 113 and the first sensor electrode 114 and the second actuator electrode 123 and the second sensor electrode 124 is a portion 112 having a relatively small thickness (that is, a winding defining a membrane structure). It matches the center of the part. In FIG. 1A, for convenience, the shapes of the first actuator electrode 113, the first sensor electrode 114, the second actuator electrode 123, and the second sensor electrode 124 are indicated by dotted lines.

  The first actuator electrode 113 is opposed to the second actuator electrode 123. That is, the first actuator electrode 113 and the second actuator electrode 123 are arranged along the Z-axis direction. The first sensor electrode 114 is opposed to the second sensor electrode 124. That is, the first sensor electrode 114 and the second sensor electrode 124 are arranged along the Z-axis direction.

  The first actuator electrode 113 and the second actuator electrode 123 are electrodes for controlling the state of the first substrate 11. Specifically, the first actuator electrode 113 and the second actuator electrode 123 are electrodes for distorting or moving the first substrate 11.

  More specifically, the first actuator electrode 113 and the second actuator electrode 123 are supplied with a drive signal for controlling the state of the first substrate 11 from a drive signal processing circuit (not shown). When the drive signal is supplied to the first actuator electrode 113 and the second actuator electrode 123, an electrostatic force is generated between the first actuator electrode 113 and the second actuator electrode 123. As a result, the first actuator electrode 113 and the second actuator electrode 123 pull (or move away) from each other along the Z-axis direction. As a result, the first substrate 11, which has a membrane structure and is more easily distorted than the second substrate 12, is distorted as shown in FIG. That is, in the first embodiment, the second substrate 12 functions as a fixed substrate that is substantially fixed, while the first substrate 11 functions as a movable substrate that can move substantially. Yes. As a result, the distance between the first substrate 11 and the second substrate 12 changes.

  The first sensor electrode 114 and the second sensor electrode 124 are electrodes for detecting the state of the first substrate 11. Specifically, the first sensor electrode 114 and the second sensor electrode 124 are electrodes for detecting an interval between the first substrate 11 and the second substrate 12.

  More specifically, when the distance between the first substrate 11 and the second substrate 12 changes, the distance between the first sensor electrode 114 and the second sensor electrode 124 also changes. For example, as shown in FIGS. 1B and 1C, the first substrate 11 is distorted so that the distance between the first substrate 11 and the second substrate 12 is changed from “d1” to “d1” (however, In the example shown in FIG. 1C, when d1 ′ <d1) ”, the distance between the first sensor electrode 114 and the second sensor electrode 124 is also changed from“ d2 ”to“ d2 ′ (however, In the example shown in 1 (c), it changes to d2 ′ <d2) ”. As the spacing between the first sensor electrode 114 and the second sensor electrode 124 changes, the capacitances of the first sensor electrode 114 and the second sensor electrode 124 also change. Therefore, the detection signal processing circuit (not shown) detects the capacitance between the first sensor electrode 114 and the second sensor electrode 124 as a detection signal, thereby setting the interval between the first substrate 11 and the second substrate 12. It can be detected substantially.

  Particularly in the first embodiment, the second actuator electrode 123 is formed on the first surface 121 a of the second facing surface 121. On the other hand, the second sensor electrode 124 is formed on the second surface 121 b of the second facing surface 121. As a result, the distance d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is smaller than the distance d2 between the first actuator electrode 113 and the second actuator electrode 123 in the initial state.

  In addition, in the first embodiment, the first actuator electrode 113 and the first sensor electrode 114 are electrically separated. In other words, the first actuator electrode 113 and the first sensor electrode 114 are electrically independent. In other words, the first actuator electrode 113 and the first sensor electrode 114 are not electrically connected.

  In addition, in the first embodiment, the second actuator electrode 123 and the second sensor electrode 124 are electrically separated. In other words, the second actuator electrode 123 and the second sensor electrode 114 are electrically independent. In other words, the second actuator electrode 123 and the second sensor electrode 124 are not electrically connected.

  According to the actuator 1 described above, two types of electrodes (that is, the first actuator electrode 113 and the first sensor electrode 114) are formed on the first substrate 11. Also on the second substrate 12, two types of electrodes (that is, the second actuator electrode 123 and the second sensor electrode 124) are formed. For this reason, the actuator 1 uses the first actuator electrode 113 and the second actuator electrode 123 of these two types of electrodes to control the state of the first substrate 11 (that is, distorts the first substrate 11). Can do. On the other hand, the actuator 1 detects the state of the first substrate 11 by using the first sensor electrode 114 and the second sensor electrode 124 of these two types of electrodes (that is, the first substrate 11 and the second substrate). 12 is detected). Accordingly, the actuator 1 distorts the first substrate 11 while detecting the interval between the first substrate 11 and the second substrate 12 (that is, controls the interval between the first substrate 11 and the second substrate 12). can do. For example, the actuator 1 can distort the first substrate 11 by a desired amount so that the interval between the first substrate 11 and the second substrate 12 becomes a desired interval. Therefore, the actuator 1 distorts the first substrate 11 with higher accuracy than the actuator of the first comparative example in which the first sensor electrode 114 and the second sensor electrode 124 are not formed (that is, the first substrate 11 and the second sensor electrode 124). The distance between the two substrates 12 can be accurately controlled).

  In addition, in the actuator 1 of the first embodiment, the first actuator electrode 113 and the first sensor electrode 114 are electrically separated, and the second actuator electrode 123 and the second sensor electrode 124 are electrically separated. Have been separated. For this reason, in order to detect the distance between the drive signal supplied to the first actuator electrode 113 and the second actuator electrode 123 in order to distort the first substrate 11 and the first substrate 11 and the second substrate 12. The detection signals flowing through the first sensor electrode 114 and the second sensor electrode 124 are electrically separated. That is, the actuator 1 can handle these two types of signals in a state where the drive signal and the detection signal are electrically separated. Therefore, the actuator of the second comparative example in which the first actuator electrode 113 and the first sensor electrode 114 are not electrically separated and the second actuator electrode 123 and the second sensor electrode 124 are not electrically separated. In comparison with the actuator 1, in the actuator 1, a drive signal processing circuit that performs signal processing for distorting the first substrate 11 and detection that performs signal processing for detecting the interval between the first substrate 11 and the second substrate 12 are detected. The circuit configuration of the signal processing circuit is simplified.

  Thus, the actuator 1 of the first embodiment can detect the state of the first substrate 11 while controlling the state of the first substrate 11 relatively easily. That is, the actuator 1 of the first embodiment can detect the distance between the first substrate 11 and the second substrate 12 while distorting the first substrate 11 relatively easily.

  In addition, according to the actuator 1 of the first embodiment, the distance d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is equal to the first actuator electrode 113 and the second actuator electrode 123 in the initial state. It becomes smaller than the distance d2 between. Here, a technical effect realized by making the interval d3 smaller than the interval d2 will be described with reference to FIG. FIG. 2 is a graph showing the relationship between the distance between the first sensor electrode 114 and the second sensor electrode 124 and the capacitance of the first sensor electrode 114 and the second sensor electrode 124.

  First, in the actuator 1 of the first embodiment, as described above, the first substrate 11 is distorted by the electrostatic force generated in the first actuator electrode 113 and the second actuator electrode 123. In this case, when the distance between the first actuator electrode 113 and the second actuator electrode 123 is smaller than a predetermined ratio with respect to the distance d1 in the initial state (for example, 2/3 of the distance d1), A pull-in state occurs in which the first actuator electrode 113 and the second actuator electrode 123 come into contact with each other. When the pull-in state occurs, it becomes difficult to distort the first substrate 11 by the electrostatic force generated in the first actuator electrode 113 and the second actuator electrode 123. For this reason, in order to widen the movable range of the first substrate 11 by relatively increasing the strain amount of the first substrate 11, the distance between the first actuator electrode 113 and the second actuator electrode 123 in the initial state. It is preferable that d2 is relatively large.

  On the other hand, in the actuator 1 of the first embodiment, the distance between the first substrate 11 and the second substrate 12 is detected based on the capacitances of the first sensor electrode 114 and the second sensor electrode 124. For this reason, the detection accuracy of the interval between the first substrate 11 and the second substrate 12 is such that the first sensor electrode 114 and the second sensor electrode 114 are changed with respect to a predetermined amount of change in the interval between the first substrate 11 and the second substrate 12. The larger the amount of change in the capacitance of the sensor electrode 124, the better. However, considering that the distance between the first substrate 11 and the second substrate 12 is substantially equivalent to the distance between the first sensor electrode 114 and the second sensor electrode 124, the first substrate 11. The detection accuracy of the interval between the first sensor electrode 114 and the second substrate 12 is determined by the static of the first sensor electrode 114 and the second sensor electrode 124 with respect to a predetermined change in the interval between the first sensor electrode 114 and the second sensor electrode 124. The larger the amount of change in capacitance, the better. Here, the capacitances of the first sensor electrode 114 and the second sensor electrode 124 are expressed by the dielectric constant of the medium between the first sensor electrode 114 and the second sensor electrode 124 × (the first sensor electrode 114 or the second sensor The surface area of the electrode 124 / the distance between the first sensor electrode 114 and the second sensor electrode 124). That is, as shown in FIG. 2, the capacitances of the first sensor electrode 114 and the second sensor electrode 124 are inversely proportional to the distance between the first sensor electrode 114 and the second sensor electrode 124. Then, as can be seen from the graph shown in FIG. 2, the smaller the distance d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state, the smaller the distance between the first sensor electrode 114 and the second sensor electrode 124. The amount of change in the capacitance of the first sensor electrode 114 and the second sensor electrode 124 with respect to the change in the predetermined amount of the interval becomes larger. For example, as shown in FIG. 2, when the distance between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is “d3a”, the first sensor electrode 114 and the second sensor electrode 124 The amount of change in capacitance of the first sensor electrode 114 and the second sensor electrode 124 with respect to a change in the predetermined amount ± Δd of the interval between the two is “Va”. On the other hand, when the distance between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is “d3b (where d3b> d3a)”, the first sensor electrode 114 and the second sensor electrode 124 are used. The change amount of the electrostatic capacitance of the first sensor electrode 114 and the second sensor electrode 124 with respect to the change of the predetermined amount ± Δd of the interval between the first and second sensor electrodes is “Vb (where Vb <Va)”. That is, when the distance between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is relatively small “d3a”, the detection accuracy of the capacitance is the same as that of the first sensor electrode 114 in the initial state. This is better than the detection accuracy when the distance from the second sensor electrode 124 is “d3b”, which is relatively large. In other words, detection of the distance between the first substrate 11 and the second substrate 12 when the distance between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is relatively small “d3a”. The accuracy is higher than the distance between the first substrate 11 and the second substrate 12 when the distance between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is relatively large “d3b”. It is good. Therefore, in order to improve the detection accuracy of the interval between the first substrate 11 and the second substrate 12, the interval d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is relatively set. Small is preferable.

  Thus, while it is desired that the distance d2 between the first actuator electrode 113 and the second actuator electrode 123 in the initial state is relatively large, the first sensor electrode 114 and the second sensor electrode 124 in the initial state are desired. It is desirable that the distance d3 between the two is relatively small. In other words, it is desirable that the distance d1 and the distance d3 satisfy requirements that are mutually contradictory. Considering that it is desired that the distance d2 and the distance d3 satisfy such contradictory requirements, in the actuator 1 of the first embodiment, the gap between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is required. Is smaller than the distance d2 between the first actuator electrode 113 and the second actuator electrode 123 in the initial state. As a result, since the actuator 1 can relatively increase the distance d2 between the first actuator electrode 113 and the second actuator electrode 123 in the initial state, the distortion amount of the first substrate 11 is relatively increased. By increasing the size, the movable range of the first substrate 11 can be expanded. On the other hand, since the actuator 1 can relatively reduce the distance d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state, the first substrate 11 and the second substrate 12 It is possible to improve the detection accuracy of the interval between the two.

  Note that the actuator 1 shown in FIGS. 1A to 1C is merely an example. Therefore, the present invention is not limited to the actuator 1 shown in FIGS. 1 (a) to 1 (c). Some examples of modifications of the actuator 1 are listed below.

  The first substrate 11 may not be a planar or plate-like member. The shape of the first substrate 11 on the XY plane may not be rectangular. The second substrate 12 may not be a planar or plate-like member. The shape of the second substrate 12 on the XY plane may not be rectangular.

  The shape of the portion 112 having a relatively small thickness on the XY plane may not be a ring shape. The first substrate 11 may not include the portion 112 having a relatively small thickness. The first substrate 11 may not have a membrane structure.

  The support member 13 may be a separate member from both the first substrate 11 and the second substrate 12. The support member 13 may be a member integrated with at least one of the first substrate 11 and the second substrate 12.

  At least one of the first facing surface 111 and the second facing surface 121 may be a surface that is not parallel to the XY plane (that is, a surface that is inclined with respect to the XY plane). At least one of the first facing surface 111 and the second facing surface 121 may include a surface that is not parallel to the XY plane. At least one of the first facing surface 111 and the second facing surface 121 may include a curved surface. The second facing surface 121 may include a surface that is not parallel to the first facing surface 111 (that is, a surface that is inclined with respect to the first facing surface 111).

  In addition to or instead of the second opposing surface 121 including the first surface 121a and the second surface 121b, the first opposing surface 111 is surrounded by the first surface and the first surface and compared with the first surface. And the second surface protruding toward the second substrate 12 side (in other words, the −Z-axis direction side). That is, in addition to or instead of forming a step on the second facing surface 121, a step may be formed on the first facing surface 111. In this case, the first actuator electrode 113 may be formed on the first surface of the first facing surface 111. On the other hand, the first sensor electrode 114 may be formed on the second surface of the first facing surface 111.

  The second surface 121b included in the second facing surface 121 may not be surrounded by the first surface 121a included in the second facing surface 121. Similarly, when the first facing surface 111 includes the first surface and the second surface, the second surface included in the first facing surface 111 may not be surrounded by the first surface included in the first facing surface 111. Good.

  At least one of the first actuator electrode 113, the first sensor electrode 114, the second actuator electrode 123, and the second sensor electrode 124 may not have a ring shape on the XY plane. In addition, the center of at least one of the first actuator electrode 113 and the first sensor electrode 114 and the second actuator electrode 123 and the second sensor electrode 124 is a portion 112 of which the thickness defining the membrane structure is relatively small. It does not have to coincide with the center.

  In addition to or instead of the first substrate 11 being distorted, the second substrate 12 may be distorted. That is, in addition to or instead of changing the distance between the first substrate 11 and the second substrate 12 due to the distortion of the first substrate 11, the first substrate 11 and the second substrate due to the distortion of the second substrate 12. The interval between 12 may vary. In other words, the second substrate 12 may function as a movable substrate that can move substantially. In this case, the first actuator electrode 113 and the second actuator electrode 123 are electrodes for controlling the state of the second substrate 12 in addition to or instead of being electrodes for controlling the state of the first substrate 11. It may be. The first sensor electrode 114 and the second sensor electrode 124 are electrodes for detecting the state of the second substrate 12 in addition to or instead of being electrodes for detecting the state of the first substrate 11. Also good.

  When the second substrate 12 is distorted, the second substrate 12 preferably has a membrane structure like the first substrate 11. However, even when the second substrate 12 is distorted, the second substrate 12 may not have a membrane structure like the first substrate 11. Alternatively, even when the second substrate 12 is not distorted, the second substrate 12 may have a membrane structure like the first substrate 11.

  The state in which the distance d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is smaller than the distance d2 between the first actuator electrode 113 and the second actuator electrode 123 in the initial state is It may be realized by a structure other than the step formed on the two opposing surfaces 121. For example, even when no step is formed on the second facing surface 121, the gap d3 is smaller than the gap d2 by sandwiching an interposed member between the second facing surface 121 and the second sensor electrode 124. A state may be realized. For example, a state in which the distance d3 is smaller than the distance d2 may be realized by sandwiching an interposed member between the first facing surface 111 and the first sensor electrode 124. For example, by making the thickness of the first sensor electrode 114 (that is, the length along the Z-axis direction) larger than the thickness of the first actuator electrode 113, a state in which the distance d3 becomes smaller than the distance d2 is realized. Also good. For example, a state in which the distance d3 is smaller than the distance d2 may be realized by making the thickness of the second sensor electrode 124 larger than the thickness of the second actuator electrode 123.

  However, the purpose of making the interval d3 smaller than the interval d2 is mainly to distort the first substrate 11 while detecting the interval between the first substrate 11 and the second substrate 12. Therefore, the technical effect realized by electrically separating the first actuator electrode 113 and the first sensor electrode 114 and electrically separating the second actuator electrode 123 and the second sensor electrode 124 (that is, The circuit configuration of the drive signal processing circuit that performs signal processing for distorting the first substrate 11 and the detection signal processing circuit that performs signal processing for detecting the interval between the first substrate 11 and the second substrate 12 is simplified. From the viewpoint of aiming at a technical effect that the distance d3 can be reduced, the distance d3 may not be smaller than the distance d2. For example, the interval d3 and the interval d2 may be the same. The interval d3 may be larger than the interval d2.

  While the first actuator electrode 113 and the first sensor electrode 114 are electrically separated, the second actuator electrode 123 and the second sensor electrode 124 may not be electrically separated. In other words, while the first actuator electrode 113 and the first sensor electrode 114 are not electrically connected, the second actuator electrode 123 and the second sensor electrode 124 may be electrically connected. Even in this case, the actuator 1 treats the potential of the second actuator electrode 123 and the potential of the second sensor electrode 124 as a common potential so that the drive signal and the detection signal are electrically separated from each other. Two types of signals can be handled.

  Alternatively, the second actuator electrode 123 and the second sensor electrode 124 may be electrically separated while the first actuator electrode 113 and the first sensor electrode 114 are not electrically separated. In other words, the first actuator electrode 113 and the first sensor electrode 114 are electrically connected, while the second actuator electrode 123 and the second sensor electrode 124 may not be electrically connected. Even in this case, the actuator 1 treats the potential of the first actuator electrode 113 and the potential of the first sensor electrode 114 as a common potential so that the drive signal and the detection signal are electrically separated from each other. Two types of signals can be handled.

  However, the purpose of electrically separating the first actuator electrode 113 and the first sensor electrode 114 and / or the second actuator electrode 123 and the second sensor electrode 124 is mainly a signal for distorting the first substrate 11. This is to simplify the circuit configuration of the drive signal processing circuit that performs processing and the detection signal processing circuit that performs signal processing for detecting the interval between the first substrate 11 and the second substrate 12. Accordingly, the technical effect realized mainly by making the interval d3 smaller than the interval d2 (that is, the first substrate 11 can be distorted while detecting the interval between the first substrate 11 and the second substrate 12). In view of the main purpose of the technical effect), the first actuator electrode 113 and the first sensor electrode 114 are not electrically separated, and the second actuator electrode 123 and the second sensor electrode 124 may not be electrically separated.

(2) Second Embodiment Next, an actuator 2 according to a second embodiment will be described with reference to FIGS. 3 (a) and 3 (b). FIG. 3A is a top view of the actuator 2 according to the second embodiment. FIG. 3B is a cross-sectional view taken along the line III-III ′ of the actuator 2 according to the second embodiment shown in FIG. In FIGS. 3A to 3B, as in FIGS. 1A to 1C, an example in which the actuator 3 is arranged in a virtual three-dimensional space is used. Proceed with the explanation. Further, the same reference numerals are assigned to the same components as those provided in the actuator 1 of the first embodiment, and the detailed description thereof is omitted.

  As shown in FIGS. 3A and 3B, in the actuator 2 of the second embodiment, the second opposing surface 221 of the second substrate 22 has a plurality of second surfaces 221b (that is, the second surface 221b−). 1 and the second surface 221b-2) is different from the actuator 1 of the first embodiment in that the second facing surface 121 is not necessarily provided with a plurality of second surfaces 121b. . The second surface 221b-1 protrudes toward the first substrate side (in other words, the + Z-axis direction side) compared to the second surface 221b-2. That is, a plurality of steps are substantially formed on the second facing surface 221. The other features of the second facing surface 221 of the second embodiment may be the same as the other features of the second facing surface 121 of the first embodiment.

  Furthermore, in the actuator 2 of the second embodiment, a plurality of first sensor electrodes 214 (that is, the first sensor electrode 214-1 and the first sensor electrode 214-2) are formed on the first facing surface 121. In this respect, the first sensor electrode 114 is not necessarily formed on the first facing surface 111, and is different from the actuator 1 of the first embodiment. The other features of the first sensor electrode 214-1 and the first sensor electrode 214-2 of the second embodiment are the same as the other features of the first sensor electrode 114 of the first embodiment. Good.

  Furthermore, in the actuator 2 of the second embodiment, a plurality of second sensor electrodes 224 (that is, the second sensor electrode 224-1 and the second sensor electrode 224-2) are formed on the second facing surface 221. In this respect, the second sensor electrode 124 is not necessarily formed on the second facing surface 121, and is different from the actuator 1 of the first embodiment. Specifically, the second sensor electrode 224-1 facing the first sensor electrode 214-1 is formed on the second surface 221b-1. Furthermore, a second sensor electrode 224-2 facing the first sensor electrode 214-2 is formed on the second surface 221b-2. As a result, the distance d31 between the first sensor electrode 214-1 and the second sensor electrode 224-1 in the initial state is between the first sensor electrode 214-2 and the second sensor electrode 224-2 in the initial state. Is smaller than the interval d32. That is, the actuator 2 of the second embodiment includes a plurality of combinations of the first sensor electrode 214 and the second sensor electrode 224 that face each other. Furthermore, the distance d3 between the first sensor electrode 214 and the second sensor electrode 224 in the initial state in each combination is different. The other features of the second sensor electrode 224-1 and the second sensor electrode 224-2 of the second embodiment are the same as the other features of the second sensor electrode 124 of the first embodiment. Good.

  Other components included in the actuator 2 of the second embodiment may be the same as other components included in the actuator 1 of the first embodiment.

  The actuator 2 of the second embodiment described above can also enjoy various effects that the actuator 1 of the first embodiment enjoys. In addition, the actuator 2 of the second embodiment is a combination of the first sensor electrode 214 and the second sensor electrode 224 used to detect the distance between the first substrate 11 and the second substrate 22 as necessary. Can be changed as appropriate. Hereinafter, an operation of appropriately changing the combination of the first sensor electrode 214 and the second sensor electrode 224 used for detecting the distance between the first substrate 11 and the second substrate 22 will be described.

  As described in the first embodiment, in order to improve the detection accuracy of the distance between the first substrate 11 and the second substrate 22, the first sensor electrode 114 and the second sensor electrode 124 in the initial state It is preferable that the interval d3 is relatively small. However, if the distance d3 between the first sensor electrode 114 and the second sensor electrode 124 in the initial state is relatively small, when the strain amount of the first substrate 11 is relatively large, the first sensor electrode 114 and the first sensor electrode 114 There is a high possibility that the two sensor electrodes 124 come into contact. In this case, it is difficult to detect the distance between the first substrate 11 and the second substrate 22 using the first sensor electrode 114 and the second sensor electrode 124 that have come into contact with each other. Will occur.

  Therefore, the actuator 2 of the second embodiment changes the combination of the first sensor electrode 214 and the second sensor electrode 224 used to detect the distance between the first substrate 11 and the second substrate 22. Solve such technical problems. For example, when the strain amount of the first substrate 11 is relatively small, the actuator 2 uses the first sensor electrode 214-1 and the second sensor electrode 224-1 that have relatively small intervals in the initial state, An interval between the first substrate 11 and the second substrate 22 is detected. On the other hand, the possibility that the first sensor electrode 214-1 and the second sensor electrode 224-1 come into contact with each other due to the relatively large amount of distortion of the first substrate 11 is relatively high. In this case, the actuator 2 replaces the first sensor electrode 214-1 and the second sensor electrode 224-1 having a relatively small interval in the initial state with the first sensor electrode 214 having a relatively large interval in the initial state. -2 and the second sensor electrode 224-2 are used to detect the interval between the first substrate 11 and the second substrate 22. As a result, the actuator 2 can detect the interval between the first substrate 11 and the second substrate 22 regardless of the amount of distortion of the first substrate 11.

  In the example of the actuator 2 shown in FIG. 3, two first sensor electrodes 214 are formed on the first facing surface 111 and two second sensor electrodes 224 are formed on the second facing surface 221. However, three or more first sensor electrodes 214 may be formed on the first facing surface 111 and three or more second sensor electrodes 224 may be formed on the second facing surface 221. In this case, it is preferable that three or more second surfaces 221b on which two or more steps are formed and the corresponding second sensor electrodes 224 are formed are formed on the second facing surface 221.

(3) Third Embodiment Next, the actuator 3 of the third embodiment will be described with reference to FIGS. 4 (a) and 4 (b). FIG. 4A is a top view of the actuator 3 of the third embodiment. FIG. 4B is a sectional view taken along the line IV-IV ′ of the actuator 3 of the third embodiment shown in FIG. In FIGS. 4A to 4B, as in FIGS. 1A to 1C, an example in which the actuator 3 is arranged in a virtual three-dimensional space is used. Proceed with the explanation. In addition, the same reference numerals are given to the same components as those provided in the actuator 1 of the first embodiment to the actuator 2 of the second embodiment, and the detailed description thereof is omitted.

  As shown in FIG. 4A and FIG. 4B, the actuator 3 of the third embodiment has the first sensor electrodes 314-1 and 314-2 and the third sensor compared to the actuator 2 of the second embodiment. The shapes of the two sensor electrodes 324-1 and 324-2 are different in that they are different from the shapes of the first sensor electrodes 214-1 and 214-2 and the second sensor electrodes 224-1 and 224-2. Specifically, each of the first sensor electrodes 314-1 and 314-2 and the second sensor electrodes 324-1 and 324-2 has a circular shape in that it has a circular shape. It is different from the first sensor electrodes 214-1 and 214-2 and the second sensor electrodes 224-1 and 224-2. Other components included in the actuator 3 of the third embodiment may be the same as other components included in the actuator 2 of the second embodiment.

  Such an actuator 3 of the third embodiment can also suitably enjoy various effects that the actuator 2 of the second embodiment enjoys.

  Note that the shapes of the first surface 121a and the second surfaces 221b-1 and 221b-2 included in the second facing surface 221 may be appropriately changed according to the shapes of the second sensor electrodes 324-1 and 324-2. . That is, the second opposing surface 221 can form the second surface 221b-1 having an arbitrary shape on which the second sensor electrode 324-1 can be formed and the second sensor electrode 324-2 thereon. The second surface 221b-2 having an arbitrary shape and the first surface 121a other than the second surfaces 221b-1 and 221b-2 may be included.

(4) Fourth Embodiment Next, an actuator 4 according to a fourth embodiment will be described with reference to FIGS. 5 (a) and 5 (b). FIG. 5A is a top view of the actuator 4 according to the fourth embodiment. FIG. 5B is a VV ′ sectional view of the actuator 4 according to the fourth embodiment shown in FIG. 5A to 5B, as in FIGS. 1A to 1C, an example in which the actuator 4 is arranged in a virtual three-dimensional space is used. Proceed with the explanation. In addition, the same reference numerals are given to the same components as those included in the actuator 1 of the first embodiment to the actuator 3 of the third embodiment, and detailed description thereof is omitted.

  As shown in FIGS. 5A and 5B, the actuator 4 of the fourth embodiment has a shape of the first sensor electrode 414 and the second sensor electrode 424 as compared with the actuator 1 of the first embodiment. And the material is different in that it is different from the shape and material of the first sensor electrode 114 and the second sensor electrode 124. Specifically, the first sensor electrode 414 and the second sensor electrode 424 have a ring shape or a circular shape in that they have a circular shape on the XY plane. It is different from the first sensor electrode 114 and the second sensor electrode 124 that are not necessarily provided. The first sensor electrode 414 and the second sensor electrode 424 are different from the first sensor electrode 114 and the second sensor electrode 124 that are not necessarily semi-permeable membranes in that they are semi-permeable membranes.

  In addition, in the actuator 4 of the fourth embodiment, at least a portion 415 where the first sensor electrode 414 is formed in the first substrate 41 is semi-transmissive (in other words, light transmissive). Thus, at least a portion of the first substrate 11 where the first sensor electrode 114 is formed is not necessarily translucent, and is different from the actuator 1 of the first embodiment. Further, the actuator 4 of the fourth embodiment is characterized in that at least a portion of the second substrate 42 where the second sensor electrode 424 is formed has a semi-transmissive 425, and at least of the second substrate 12. The portion where the second sensor electrode 124 is formed is not necessarily translucent, and is different from the actuator 1 of the first embodiment.

  Other components included in the actuator 4 of the fourth embodiment may be the same as other components included in the actuator 1 of the first embodiment.

  Such an actuator 4 of the fourth embodiment can also suitably enjoy various effects that the actuator 1 of the first embodiment enjoys. In addition, the actuator 4 of the fourth embodiment can be used as a so-called Fabry-Perot type spectroscopic element.

  Note that the first sensor electrode 414 may not have a circular shape on the XY plane. However, the first sensor electrode 414 preferably has a shape that can cover a region through which light passes. The second sensor electrode 424 may not have a circular shape on the XY plane. The second sensor electrode 424 preferably has a shape that can cover a region through which light passes.

(5) Fifth Embodiment Next, an actuator 5 according to a fifth embodiment will be described with reference to FIGS. 6 (a) and 6 (b). FIG. 6A is a top view of the actuator 5 of the fifth embodiment. FIG. 6B is a sectional view taken along the line VI-VI ′ of the actuator 5 of the fifth embodiment shown in FIG. 6 (a) to 6 (b), as in FIGS. 1 (a) to 1 (c), an example in which the actuator 5 is arranged in a virtual three-dimensional space is used. Proceed with the explanation. In addition, the same reference numerals are given to the same components as those included in the actuator 1 of the first embodiment to the actuator 4 of the fourth embodiment, and the detailed description thereof is omitted.

  As shown in FIGS. 6A and 6B, the actuator 5 of the fifth embodiment is that the first actuator electrode 513 is divided into a plurality of first actuator electrode portions 513a to 513d. The first actuator electrode 113 is not necessarily divided, and is different from the actuator 1 of the first embodiment. Further, in the actuator 5 of the fifth embodiment, the second actuator electrode 123 is not necessarily divided in that the second actuator electrode 523 is divided into a plurality of second actuator electrode portions 523a to 523d. This is different from the actuator 1 of the first embodiment. Further, in the actuator 5 of the fifth embodiment, the first sensor electrode 114 is not divided in that the first sensor electrode 514 is divided into a plurality of first sensor electrode portions 514a to 514d. This is different from the actuator 1 of the first embodiment. Further, in the actuator 5 of the fifth embodiment, the second sensor electrode 124 is not necessarily divided in that the second sensor electrode 524 is divided into a plurality of second sensor electrode portions 524a to 524d. This is different from the actuator 1 of the first embodiment. The other features of the first actuator electrode 513 and the second actuator electrode 523 and the first sensor electrode 514 and the second sensor electrode 524 of the second embodiment are the same as the first actuator electrode 113 and the first actuator electrode 113 of the first embodiment, respectively. The other characteristics of the two actuator electrodes 123 and the first sensor electrode 114 and the second sensor electrode 124 may be the same.

  The plurality of first actuator electrode portions 513a to 513d are in a plane along the XY plane (that is, in a plane orthogonal to the direction in which the first substrate 11 and the second substrate 12 face each other, or the first substrate 11 or the first substrate 2 in the plane along the surface of the substrate 12. Further, the plurality of first actuator electrode portions 513a to 513d are preferably electrically separated from each other.

  Similarly, the plurality of second actuator electrode portions 523a to 523d are also distributed in a plane along the XY plane. Furthermore, it is preferable that the plurality of second actuator electrode portions 523a to 523d are electrically separated from each other.

  Similarly, the plurality of first sensor electrode portions 514a to 514d are also distributed in a plane along the XY plane. Furthermore, the plurality of first sensor electrode portions 514a to 514d are preferably electrically separated from each other.

  Similarly, the plurality of second sensor electrode portions 524a to 524d are also distributed in a plane along the XY plane. Furthermore, the plurality of second sensor electrode portions 524a to 524d are preferably electrically separated from each other.

  Other components included in the actuator 5 of the fifth embodiment may be the same as other components included in the actuator 1 of the first embodiment.

  The actuator 5 of the fifth embodiment described above can also enjoy various effects that the actuator 1 of the first embodiment enjoys. In addition, the actuator 5 of the fifth embodiment detects the tilt (in other words, the tilt) of at least one of the first substrate 11 and the second substrate 12 and corrects the tilt. The amount of distortion can be controlled. Hereinafter, an operation of detecting the tilt of at least one of the first substrate 11 and the second substrate 12 and controlling the distortion amount of the first substrate 11 so as to correct the tilt will be described.

  In the actuator 5 of the fifth embodiment, the first sensor electrode 514 is divided into a plurality of first sensor electrode portions 514a to 514d, and the second sensor electrode 524 is divided into a plurality of second sensor electrode portions 524a to 524d. ing. For this reason, as the capacitance of the first sensor electrode 514 and the second sensor electrode 524, (i) the capacitance of the first sensor electrode portion 514a and the second sensor electrode portion 524a, and (ii) the first sensor electrode portion 514b. And (iii) the capacitance of the first sensor electrode portion 514c and the second sensor electrode portion 524d, and (iv) the capacitance of the first sensor electrode portion 514d and the second sensor electrode portion 524d. Capacitance is detected individually. As a result, in the fifth embodiment, as a distance between the first sensor electrode 514 and the second sensor electrode 524, (i) a distance d3a between the first sensor electrode part 514a and the second sensor electrode part 524a, (Ii) a distance d3b between the first sensor electrode part 514b and the second sensor electrode part 524b (iii) a distance d3c between the first sensor electrode part 514c and the second sensor electrode part 524c and (iv) a first A distance d3d between the sensor electrode portion 514d and the second sensor electrode portion 524d is individually detected. If at least one of the first substrate 11 and the second substrate 12 is tilted (that is, tilted), there is a high possibility that at least two of the distances d3a to d3d are displaced. Become. Therefore, a detection signal processing circuit (not shown) can detect the tilt of at least one of the first substrate 11 and the second substrate 12 by detecting the interval d3d from the interval d3a.

  On the other hand, in the actuator 5 of the fifth embodiment, the first actuator electrode 513 is divided into a plurality of first actuator electrode portions 513a to 513d, and the second actuator electrode 523 is divided into a plurality of second actuator electrode portions 523a to 523d. It is divided into Therefore, the drive signal processing circuit (not shown) supplies the drive signal Sa supplied to the first actuator electrode portion 513a and the second actuator electrode portion 523a and the drive signal supplied to the second actuator electrode portion 513b and the second actuator electrode portion 523b. Sb, the drive signal Sc supplied to the first actuator electrode portion 513c and the second actuator electrode portion 523c, and the drive signal Sd supplied to the first actuator electrode portion 513d and the second actuator electrode portion 523d are individually adjusted. be able to. As a result, the amount of distortion of the first substrate 11 is appropriately adjusted so that the detected tilt is corrected.

  It should be noted that at least one of the actuators 1 to 5 of the first embodiment described above can be adopted in at least one of the actuators 1 to 5 of the first embodiment. It may be adopted as another one.

  The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification, and an actuator accompanying such a change can also be used. Moreover, it is included in the technical scope of the present invention.

1, 2, 3, 4, 5 Actuator 11, 41 First substrate 111 First opposing surface 113, 513 First actuator electrode 114, 214, 314, 414, 514 First sensor electrode 12, 22, 42 Second substrate 121 221 Second opposing surface 123, 523 Second actuator electrode 124, 224, 324, 424, 524 Second sensor electrode

Claims (7)

A first member;
A second member facing the first member,
(I) a first control electrode and (ii) a first detection electrode different from the first control electrode are formed on a first facing surface of the first member facing the second member. ,
Of the second member, a second facing surface facing the first member has (i) a second control electrode facing the first control electrode, and (ii) different from the second control electrode and A second detection electrode facing the first detection electrode is formed;
The actuator, wherein the first control electrode and the first detection electrode and / or the second control electrode and the second detection electrode are electrically separated. The first and second control electrodes are electrodes for controlling the state of at least one of the first and second members,
The actuator according to claim 1, wherein the first and second detection electrodes are electrodes for detecting a state of at least one of the first and second members. The initial interval between the first detection electrode and the second detection electrode is smaller than the initial interval between the first control electrode and the second control electrode. The actuator described. One first detection electrode and the other first detection electrode are formed on the first facing surface,
One second detection electrode facing the one first detection electrode and another second detection electrode facing the other first detection electrode are formed on the second facing surface. ,
An initial interval between the one first detection electrode and the one second detection electrode is different from an initial interval between the other first detection electrode and the other second detection electrode. The actuator according to any one of claims 1 to 3. The first and second detection electrodes are electrodes for detecting the state of at least one of the first and second members,
A first detection mode in which a state is detected using the one first detection electrode and the one second detection electrode, and a state is detected using the other first detection electrode and the other second detection electrode. The actuator according to claim 4, wherein the second detection mode is switched. The actuator according to any one of claims 1 to 5, wherein the first detection electrode and the second detection electrode are semi-permeable membranes. The first detection electrode is divided into a plurality of first electrode portions distributed on a virtual plane intersecting in a direction in which the first member and the second member face each other.
The said 2nd detection electrode is divided | segmented into the several 2nd electrode part distributed on the virtual plane where the said 1st member and the said 2nd member cross in the direction which opposes. The actuator according to any one of 6 to 6.

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