JP2015175502A5 - - Google Patents

Download PDF

Info

Publication number
JP2015175502A5
JP2015175502A5 JP2014054756A JP2014054756A JP2015175502A5 JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5 JP 2014054756 A JP2014054756 A JP 2014054756A JP 2014054756 A JP2014054756 A JP 2014054756A JP 2015175502 A5 JP2015175502 A5 JP 2015175502A5
Authority
JP
Japan
Prior art keywords
fluid control
control device
joint members
flow path
support mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014054756A
Other languages
English (en)
Japanese (ja)
Other versions
JP6347969B2 (ja
JP2015175502A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014054756A priority Critical patent/JP6347969B2/ja
Priority claimed from JP2014054756A external-priority patent/JP6347969B2/ja
Publication of JP2015175502A publication Critical patent/JP2015175502A/ja
Publication of JP2015175502A5 publication Critical patent/JP2015175502A5/ja
Application granted granted Critical
Publication of JP6347969B2 publication Critical patent/JP6347969B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014054756A 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材 Active JP6347969B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014054756A JP6347969B2 (ja) 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014054756A JP6347969B2 (ja) 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材

Publications (3)

Publication Number Publication Date
JP2015175502A JP2015175502A (ja) 2015-10-05
JP2015175502A5 true JP2015175502A5 (enExample) 2016-11-24
JP6347969B2 JP6347969B2 (ja) 2018-06-27

Family

ID=54254863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014054756A Active JP6347969B2 (ja) 2014-03-18 2014-03-18 流体制御装置および流体制御装置用継手部材

Country Status (1)

Country Link
JP (1) JP6347969B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11156305B2 (en) 2016-06-21 2021-10-26 Fujikin Incorporated Fluid control system
KR102152822B1 (ko) 2016-06-21 2020-09-07 가부시키가이샤 후지킨 유체제어장치
JP7065531B2 (ja) 2017-05-31 2022-05-12 株式会社フジキン バルブ装置および流体制御装置
US11339881B2 (en) 2018-02-28 2022-05-24 Fujikin Incorporated Valve device and fluid control device
CN112997031A (zh) 2018-10-31 2021-06-18 株式会社富士金 流体控制装置和流体控制装置的制造方法
US11906062B2 (en) 2018-12-27 2024-02-20 Fujikin Incorporated Fluid control device, joint block and manufacturing method for fluid control device
CN115306936B (zh) * 2022-08-30 2026-01-20 广东威灵电机制造有限公司 阀组件、连接管路和热管理系统
CN115839480A (zh) * 2022-11-25 2023-03-24 中科艾尔(北京)科技有限公司 一种特气柜

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置
JP2002130479A (ja) * 2000-10-23 2002-05-09 Tokyo Electron Ltd 集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置

Similar Documents

Publication Publication Date Title
USD801286S1 (en) Seal
WO2017059107A8 (en) Sealing high pressure flow devices
JP2017502738A5 (enExample)
TWD177386S (zh) 流體控制閥之部分
MX2017008395A (es) Grifo de extracción operado por sensor.
TWD170098S (zh) 流量控制閥之部分
PH12016501489B1 (en) Connection device for connecting two fluid circuits
MX357012B (es) Válvulas de inversión de flujo sanguíneo y sistemas relacionados.
JP2016503867A5 (enExample)
WO2015065824A3 (en) Key seal and valve
WO2014135873A3 (en) Valve assembly
GB201009242D0 (en) Valve assembly
MX380660B (es) Regulador de fluidos con dispositivo de campo con cierre brusco y convertible.
WO2014140609A3 (en) Downhole shifting tool
WO2015007538A8 (de) Vorrichtung zur erzeugung einer keimfreien fluidverbindung
WO2014190295A3 (en) Two part assembly
JP2018086703A5 (enExample)
MX352685B (es) Anillo de sellado.
WO2012047684A3 (en) Fluidic processor and method of use
BR112018003712A2 (pt) conjunto de luva de fechamento, luva de fechamento, e, sistema de poço
WO2014141083A3 (en) Valve for formworks and formworks equipped with said valve
LU92284B1 (en) Gas valve with rubber seal packing on the closing member
JP2016540938A5 (enExample)
WO2014110523A3 (en) Method and apparatus for sealing tubulars
EA201691722A1 (ru) Корпус, в частности промышленный корпус