JP2015169641A - Surface roughness measurement unit, three-dimensional measurement system, method of displaying operational state of surface roughness measurement unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow confirmation of whether a surface roughness measurement unit is operating for measurement or not without adding a signal line connecting the surface roughness measurement unit and a controller to each other.SOLUTION: Surface roughness measurement units 1 and 200 include: styluses 12, 233U, and 233D moving along a surface of a measurement object W; motors 28 and 240 which generate a driving force for moving the stylus 12 along the surface of the measurement object W or generate an urging force for bringing the styluses 233U and 233D into contact with the surface of the measurement object W; determination circuits 180 and 380 which determine whether the motors 28 and 240 are operating or not on the basis of motor application voltages applied to the motors 28 and 240; and display units 190 and 390 which display determination results of the determination circuits 180 and 380.

Description

  The present invention relates to a surface roughness measuring unit and a three-dimensional measuring system including a surface roughness measuring unit as a measuring head.

  2. Description of the Related Art A surface roughness measuring machine that measures surface roughness (sometimes referred to as surface properties) such as micro unevenness and waviness on a workpiece surface is known. The surface roughness measuring machine includes a surface roughness measuring unit and a controller that controls the surface roughness measuring unit. The surface roughness measuring unit includes a stylus that contacts the workpiece surface, a drive unit that moves the stylus along the workpiece surface, and a detector that detects a displacement amount of the stylus in a direction that intersects the moving direction of the stylus by the drive unit. Is provided. By recording the displacement amount and the movement amount of the stylus by the drive unit in correspondence with each other, the surface roughness can be measured.

  In low-speed measurement, since the moving speed of the stylus is slow, it is difficult to determine whether the stylus is moving visually. Therefore, it is difficult to determine whether the surface roughness measurement unit is performing a measurement operation by looking at the stylus.

  In a large surface roughness measuring machine (for example, refer to Patent Document 1 (FIG. 1)), a surface roughness measuring unit is equipped with a pilot LED (Light Emitting Diode) indicating a moving direction of a stylus. The lighting of the pilot LED is controlled by a controller that controls the drive unit of the surface roughness measuring unit. In order to control the lighting of the pilot LED, the surface roughness measuring unit and the controller are connected by a signal line dedicated to the pilot LED lighting control.

  In a small surface roughness measuring instrument (for example, see Patent Document 2 (FIG. 1)), a signal line dedicated to pilot LED lighting control is added due to the limitation of the number of signal lines connecting the surface roughness measuring unit and the controller. Difficult to do.

Japanese Patent No. 4417986 JP 2013-195241 A

  An object of the present invention is to provide a surface roughness measuring unit capable of confirming whether or not the surface roughness measuring unit is performing a measurement operation without adding a signal line connecting the surface roughness measuring unit and the controller, An object of the present invention is to provide a three-dimensional measurement system and a method for displaying an operation state of a surface roughness measurement unit.

  The surface roughness measuring unit according to the first aspect of the present invention includes a stylus that moves along the surface of the object to be measured, a driving force for moving the stylus along the surface of the object to be measured, or the stylus. A motor that generates an urging force for contacting the surface of the object to be measured, a determination circuit that determines whether the motor is operating based on a motor applied voltage applied to the motor, and a And a display unit for displaying the determination result.

  The determination circuit preferably determines normal rotation and reverse rotation of the motor. It is preferable that the display unit includes a first lamp that displays normal rotation of the motor and a second lamp that displays reverse rotation of the motor.

  The determination circuit is preferably connected to the motor via a buffer.

  The determination circuit is preferably connected to the motor via a smoothing filter.

  The determination circuit is preferably connected to the motor and an overvoltage protection circuit.

  The display unit preferably includes a lamp that is turned on when the determination circuit determines that the motor is operating, and is turned off when the determination circuit determines that the motor is not operating.

  It is preferable that the display unit includes a lamp that blinks when the determination circuit determines that the motor is operating, and that is constantly lit when the determination circuit determines that the motor is not operating.

  A three-dimensional measuring system according to a second aspect of the present invention includes the surface roughness measuring unit and a three-dimensional measuring machine connected to the surface roughness measuring unit as a measuring head.

  An operation state display method for a surface roughness measuring unit according to a third aspect of the present invention is provided. The surface roughness measuring unit moves the stylus along the surface of the object to be measured. The operation state display method of the surface roughness measuring unit generates a driving force for moving the stylus along the surface of the object to be measured or an urging force for bringing the stylus into contact with the surface of the object to be measured. It is determined whether or not the motor is operating based on a motor applied voltage applied to the motor, and a determination result of whether or not the motor is operating is displayed.

  According to the present invention, a surface roughness measuring unit that can confirm whether or not the surface roughness measuring unit is performing a measurement operation without adding a signal line connecting the surface roughness measuring unit and the controller, three-dimensional It is possible to provide a measuring system and a method for displaying the operating state of the surface roughness measuring unit.

1 is a diagram illustrating a configuration of a three-dimensional measurement system according to a first embodiment. 1 is an external view of a surface roughness measuring unit according to a first embodiment. FIG. 3 is a diagram illustrating the inside of a drive unit according to the first embodiment. FIG. 3 is a diagram showing a part of a cross section of the probe according to the first exemplary embodiment. It is a figure at the time of the probe concerning Embodiment 1 contacting a workpiece | work. 1 is a schematic diagram of an operation state display system according to a first exemplary embodiment. It is the schematic of the operation state display system concerning Embodiment 2. It is the schematic of the operation state display system concerning Embodiment 3. It is a figure which shows the internal mechanism of the surface roughness measurement unit concerning Embodiment 4. FIG. It is the schematic of the operation state display system concerning Embodiment 4.

  The main point of the present invention is the structure of the surface roughness measuring unit, but some of the surface roughness measuring units can be attached to a coordinate measuring machine and used. First, the configuration of a three-dimensional measurement system including a three-dimensional measuring machine will be described.

  FIG. 1 is a diagram illustrating a configuration of the three-dimensional measurement system 100. The three-dimensional measuring system 100 includes a three-dimensional measuring machine 120 and a computer terminal 140.

  The three-dimensional measuring machine 120 includes a surface plate 121 on which a workpiece W, which is an object to be measured, is placed, a measuring head 122 that measures the contour shape of the workpiece W, and this measuring head 122 is tertiary in the X, Y, and Z directions. And a moving mechanism 130 that moves the original.

  Here, a touch sensor probe having a contact ball 127 at the tip of the stylus is shown as the measurement head 122, but the measurement head 122 can be replaced with another type. (That is, in the following description, a surface roughness measuring unit that can be used in place of the touch sensor probe will be described.)

As shown in FIG. 1, an X, Y, Z orthogonal coordinate system is defined as a machine coordinate system.
The X direction is the left-right direction in FIG. 1, the Y direction is the direction from the back to the front in FIG. 1, and the Z direction is the up-down direction.

The moving mechanism 130 includes a portal frame 131, an X slider 133, a Z-axis spindle 134, and a drive mechanism (not shown).
The portal frame 131 has a horizontal beam 132 horizontally mounted in the X-axis direction and is provided so as to be movable in the Y-axis direction.

The X slider 133 has a column having a length in the Z-axis direction, and is slidable in the X-axis direction along the horizontal beam 132.
The Z-axis spindle 134 is inserted into the X slider 133 and is slidable in the Z-axis direction.

  The drive mechanism (not shown) includes a motor that drives the portal frame 131, the X slider 133, and the Z-axis spindle 134 in each axial direction.

The touch sensor probe as the measurement head 122 is attached to the lower end of the Z-axis spindle 134, and the touch sensor probe includes a contact ball 127.
The three-dimensional measuring machine 120 moves the measuring head 122 with the moving mechanism 130 and brings the contact ball 127 into contact with the workpiece W, thereby measuring the shape of the workpiece W.

  As described above, the three-dimensional measurement system 100 can exchange the measurement head. For example, the measurement head is first used as a touch sensor probe to measure the contour shape of the workpiece. Then, a surface roughness measuring unit is attached to the lower end of the Z-axis spindle instead of the touch sensor probe. The workpiece surface roughness is measured by this surface roughness measuring unit.

(Embodiment 1)
The surface roughness measuring unit according to the first embodiment of the present invention will be described.
The surface roughness measurement unit can be used by being connected to the moving mechanism 130 of the three-dimensional measurement system 100 instead of the touch sensor probe.
Embodiments of the present invention will be described below with reference to the drawings.

FIG. 2A is a side view of the surface roughness measuring unit 1.
FIG. 2B is a top view of the surface roughness measuring unit 1.
FIG. 2C is a front view of the surface roughness measuring unit 1.

The surface roughness measurement unit 1 includes a stylus unit 3, a drive unit 4, a second support unit 6, and a joint unit 40.
The surface roughness measuring unit 1 is connected to the moving mechanism 130 (specifically, the lower end of the Z-axis spindle) by the joint portion 40. (In addition, the 2nd support part 6 is connected with the joint part 40, and makes the stylus unit 3 and the drive part 4 cooperate with the joint part 40.) The 2nd support part 6 supports the drive part 4. FIG. .

  FIG. 3 is a diagram for explaining the internal mechanism of the drive unit 4, and FIG. 4 is a diagram for explaining the internal mechanism of the stylus unit 3. First, the mechanism of the stylus unit 3 will be described with reference to FIG.

The stylus unit 3 includes a case body 18 having a space inside, a stylus lever 20 provided so as to be swingable in the case body 18, and a displacement detection unit 16.
The case body 18 has a substantially rectangular parallelepiped body portion, a nose portion 17 protruding from the tip of the body portion, and a skid 11 is provided at the tip of the nose portion 17.

  The skid 11 has a through hole 19 bent in an L shape inside thereof, and the through hole 19 is continuous with the cavity in the nose portion 17.

The stylus lever 20 has a downward stylus 12 at its tip. The stylus 12 may be referred to as a stylus.
(For convenience of explanation, the vertical direction of the surface roughness measuring unit 1 is expressed by defining the vertical direction as shown on the paper surface in FIGS. 2a and 3 to 5. Also, the left side of the paper surface is the surface roughness. The front of the thickness measurement unit 1 and the right side of the drawing are expressed as the rear of the surface roughness measurement unit 1.)
The stylus lever 20 is inserted from the trunk portion to the nose portion 17, and is arranged so that the stylus 12 at the tip faces the outside from the lower end opening of the skid 11.
The stylus lever 20 is attached to the internal space of the trunk portion by a leaf spring 21 at an intermediate portion thereof.
The leaf spring 21 serves as a pivot point for the stylus lever 20 and elastically supports the stylus lever 10 so that the stylus 12 can be balanced with the stylus 12 slightly protruding from the lower surface of the skid 11. Yes.

The displacement detector 16 is disposed inside the trunk.
The displacement detection unit 16 includes a ferrite plate 22 and an inductance detector 23.

  The ferrite plate 22 is attached to the upper surface of the rear end of the stylus lever 20. An inductance detector 23 is attached at a position facing the ferrite plate 22 in the internal space of the trunk portion.

  The lower surface of the skid 11 is a workpiece contact surface that comes into contact with the workpiece W during measurement. When the lower surface of the skid 11 moves along the measurement surface of the workpiece W, the stylus 12 moves up and down due to the surface roughness of the measurement surface. When the stylus 12 moves up and down, the inductance detector 23 detects this up and down movement. The surface roughness of the workpiece W measurement surface is measured by the detection signal output from the inductance detector 23. The stylus unit 3 outputs the measurement result of the surface roughness of the measurement surface of the workpiece W to the outside.

Next, returning to FIG. 3, the drive unit 4 will be described.
FIG. 3 is a diagram illustrating a mechanism of the drive unit 4.
The drive unit 4 includes a first support unit 7, a power mechanism unit 24, and a contact detection unit 15. The drive case 5 is indicated by a dotted line.

  The first support portion 7 includes an L-shaped frame 25, connection means 14 that connects the stylus unit 3 to the frame 25, and a guide portion 26 that regulates the moving direction of the frame 25.

  The frame 25 is disposed on the upper side of the stylus unit 3 and cantilever-supports the rear end of the stylus unit 3. Here, the frame 25 is positioned so as to cover the upper side of the stylus unit 3 like a roof (roof), and is bent at a right angle from the member 25 a and faces the rear end of the stylus unit 3. And a member 25b to be formed.

The connecting means 14 connects the rear end of the stylus unit 3 and the member 25b, and is specifically a leaf spring here. The plate spring urges the stylus unit 3 in a direction in which the stylus unit 3 is separated from the member 25a if no other force is applied.
In FIG. 3, it can be seen that the tip of the stylus unit 3 (ie, the skid 11) is inclined so as to fall below the rear end of the stylus unit 3.

The guide part 26 has a guide shaft 27 and supports the frame 25 so as to be movable in parallel.
A guide shaft 27 passes through holes in bearings 27a and 27b provided on the upper surface of the member 25a.

The power mechanism unit 24 includes a motor 28, a feed screw 29, and a screw receiving nut 30.
A screw receiving nut 30 that is screwed into the feed screw 29 is provided on the lower end surface of the member 25b. Of course, the feed screw 29 is provided in parallel with the guide shaft 27.

  A motor 28 is connected to the end of the feed screw 29 into which the screw receiving nut 30 is screwed. When the motor 28 is driven to rotate, the feed screw 29 moves in a direction parallel to the measurement surface, and the frame 25 is guided. It moves along the shaft 27.

  Here, the configuration in which the motor 28, the feed screw 29, and the screw receiving nut 30 are provided on the lower surface side of the member 25b of the frame 25 is described. However, for example, the motor 28, the feed screw 29, and the screw receiving nut 30 are provided on the side surface side or the upper surface side of the frame 25. May be.

The contact detection unit 15 is disposed between the stylus unit 3 and the frame 25 and detects that the skid 11 has contacted the workpiece W.
FIG. 5 is a view when the skid 11 (and the stylus 12) contacts the workpiece W. FIG.
Specifically, the contact detection unit 15 includes a photo sensor 151 and a shielding plate 152.

The photosensor 151 is disposed on the lower surface of the member 25a, and the photosensor 151 includes a light emitting portion 151a and a light receiving portion 151b.
The light emitting unit 151a emits light, and the light receiving unit 151b receives the light. If light cannot be received by the light receiving unit 151b, it can be detected that there is a shield between the light emitting unit 151a and the light receiving unit 151b.
The shielding plate 152 is disposed at a position facing the photosensor 151 on the upper surface of the case body 18 of the stylus unit 3.

It has already been described that the stylus unit 3 is urged by the connecting means 14 so that the skid 11 is lowered from the rear end when the skid 11 is not in contact with the measurement surface of the workpiece W. . At this time, since the stylus unit 3 and the member 25a are separated from each other, the shielding plate 152 does not block the light of the photosensor 151 (see FIG. 3).
On the other hand, when the skid 11 comes into contact with the measurement surface of the workpiece W, the skid 11 is pushed up by the measurement surface, and thereby the stylus unit 3 is pushed up. Then, the upper surface of the stylus unit 3 and the lower surface of the member 25a approach each other, and the shielding plate 152 blocks the light from the photosensor 151 (see FIG. 5).
In this way, a slight change in the inclination of the stylus unit 3 due to the skid 11 coming into contact with the workpiece W is detected by the photosensor 151.
When the surface roughness measurement unit 1 detects that the skid 11 has contacted the workpiece W by the contact detection unit 15, the surface roughness measurement unit 1 outputs this detection result.
Upon receiving this detection result, the moving mechanism 130 stops moving in the direction approaching the workpiece. Then, the surface roughness measuring unit 1 starts measuring the surface roughness of the workpiece W. That is, the stylus unit 3 is advanced and retracted along the surface of the workpiece W by rotating the motor 28.

The surface roughness measuring unit 1 according to the present embodiment can detect a slight change in the inclination of the stylus unit 3 when the skid 11 contacts the measurement surface of the workpiece W.
Therefore, although it is difficult to set the stylus unit 3 to an appropriate position with respect to the surface of the workpiece W only by the driving accuracy of the moving mechanism 130 of the coordinate measuring machine 120, the detection signal from the contact detection unit 15 is used. Thus, the skid 11 (and the stylus) can be properly brought into contact with the workpiece W.
Further, when contact between the skid 11 and the workpiece W is detected by the contact detection unit 15, the movement of the surface roughness measuring unit 1 by the moving mechanism 130 is stopped, so that delicate parts such as the skid 11 are damaged. Accidents can be prevented.
Furthermore, since the contact detection unit 15 can accurately detect the contact between the workpiece W and the skid 11, it is not necessary to bring the surface roughness measurement unit 1 to the workpiece W slowly and intentionally in order to avoid an accident. Can be further improved.
Here, the contact detection unit 15 may be configured to detect that the stylus unit 3 has contacted the workpiece W due to the displacement of the stylus 12. However, considering the measurement range and resolution of the displacement detection unit 16 of the stylus unit 3, the stylus unit 3 will have to be approached relatively slowly with respect to the workpiece. In this regard, the stylus unit according to the present embodiment does not require the surface roughness measuring unit 1 to be brought slowly and slowly to the workpiece W, and can further improve the measurement efficiency.
Furthermore, since the measurement unit 1 according to the present embodiment includes the drive unit 4 that drives the skid 11, when the surface roughness is measured, the driving of the moving mechanism 130 can be stopped. The movement of the moving mechanism 130 does not cause fluctuations in the surface roughness measurement results. Therefore, the measurement unit 1 according to the present embodiment can accurately detect the surface roughness. In addition, since the driving mechanism 130 of the coordinate measuring machine is not used for surface roughness measurement, it can be mounted on other devices such as robots and machine tools.

  The surface roughness measurement unit 1 according to the present embodiment includes an operation state display system that displays the operation state of the surface roughness measurement unit 1. The operation state display system will be described below.

  Referring to FIG. 6, a controller 150 for controlling surface roughness measuring unit 1 is provided, and controller 150 and surface roughness measuring unit 1 are connected by a cable. The sensor circuit 170 provided in the surface roughness measuring unit 1 and the controller 150 are connected by a signal line. The sensor circuit 170 includes, for example, a displacement detection unit 16 and a movement detection unit (not shown) that detects the movement of the frame 25 by the drive unit 4.

  The controller 150 supplies a motor drive voltage to the electrodes 28 a and 28 b of the motor 28 included in the drive unit 4, and supplies a power supply 160 for the sensor circuit 170 to the surface roughness measurement unit 1. The motor drive voltage may be referred to as a motor control signal or a motor applied voltage. The surface roughness measurement unit 1 may be referred to as a drive detection unit. The operation state display system includes buffers 185a and 185b, a determination circuit 180, and a display unit 190. The determination circuit 180 and the display unit 190 are operated by the power supply 160 for the sensor circuit 170. Therefore, the controller 150 does not need to separately supply power for the determination circuit 180 and the display unit 190. The determination circuit 180 also serves as a motor application voltage detection circuit.

  Here, the measurement operation of the surface roughness measurement unit 1 will be briefly described. The motor 28 generates a driving force for moving the stylus 12 along the surface of the workpiece W based on the motor driving voltage. Specifically, the motor 28 moves the frame 25 that supports the stylus unit 3 along the guide shaft 27. Thereby, the stylus 12 moves along the surface of the workpiece W. A movement detector (not shown) detects the movement of the frame 25. The displacement detector 16 detects the displacement of the stylus 12 in a direction that intersects the moving direction of the frame 25. By recording the movement amount of the frame 25 and the displacement amount of the stylus 12 in correspondence with each other, the surface roughness can be measured.

  The determination circuit 180 of the operation state display system determines whether the motor 28 is operating based on the motor applied voltage applied to the motor 28. The display unit 190 displays the determination result of the determination circuit 180. Therefore, whether or not the surface roughness measuring unit 1 is performing a measurement operation can be displayed on the display unit 190 without adding a signal line for controlling the display unit 190. In other words, it is possible to confirm whether or not the surface roughness measurement unit 1 is performing a measurement operation without adding a signal line connecting the surface roughness measurement unit 1 and the controller 150.

  Further, the user can confirm whether or not the surface roughness measuring unit 1 is performing a measurement operation near the workpiece W. Even if the moving speed of the frame 25 being measured is low, the user can confirm that the surface roughness measuring unit 1 is performing the measuring operation. The display unit 190 can display whether or not the motor 28 is operating based on the motor applied voltage that is actually applied to the motor 28. Usability of the surface roughness measuring unit 1 is improved by the operation state display system.

  Next, the operation state display system will be described in detail. The determination circuit 180 includes comparison circuits 181a and 181b that compare the input voltage with the reference voltage Vref, and an OR circuit 182. The display unit 190 includes a lighting circuit 191 and a lamp 196. The lamp 196 is, for example, an LED provided on the drive case 5 of the drive unit 4 or the housing of the second support unit 6. The lamp 196 may be referred to as a pilot lamp.

  The electrode 28a of the motor 28 is connected to the input of the buffer 185a. The output of the buffer 185a is connected to the input of the comparison circuit 181a. The output of the comparison circuit 181a is connected to the first input of the OR circuit 182. The electrode 28b of the motor 28 is connected to the input of the buffer 185b. The output of the buffer 185b is connected to the input of the comparison circuit 181b. The output of the comparison circuit 181b is connected to the second input of the OR circuit 182. The output of the OR circuit 182 is connected to the lighting circuit 191. The lighting circuit 191 is connected to the lamp 196. The buffers 185a and 185b may be referred to as buffer amplifiers.

  A motor applied voltage is generated at the electrode 28a when the motor 28 is rotating forward, and a motor applied voltage is generated at the electrode 29a when the motor 29 is rotating backward. The determination circuit 180 determines that the motor 28 is operating when the motor applied voltage is detected at one of the electrode 28a and the electrode 28b, and the motor 28 is operating when the motor applied voltage is not detected at both the electrode 28a and the electrode 28b. It is determined that it is not. When the determination circuit 180 determines that the motor 28 is operating, the lighting circuit 191 lights the lamp 196. When the determination circuit 180 determines that the motor 28 is not operating, the lighting circuit 191 turns off the lamp 196. That is, the lamp 196 is turned on when the motor 28 is rotating forward or reverse, and the lamp 196 is turned off when the motor 28 is stopped. Since the lamp 196 is lit only during the operation of the motor 28, power consumption by the lamp 196 is suppressed.

  Further, since the determination circuit 180 is connected to the motor 28 via the buffers 185 a and 185 b, the determination circuit 180 and the subsequent circuit (for example, the lighting circuit 191) affect the control of the motor 28 by the controller 150. Is prevented.

(Embodiment 2)
Next, an operation state display system according to the second embodiment will be described. In the operation state display system according to the present embodiment, the lamp 196 is blinked when the motor 28 is operating, and the lamp 196 is always lit when the motor 28 is not operating. In the following description, items common to the first embodiment may be omitted.

  Referring to FIG. 7, the controller 150 for controlling the surface roughness measuring unit 1 includes a motor drive circuit 151 that applies a motor drive voltage to the electrodes 28 a and 28 b of the motor 28. The operation state display system according to the present embodiment includes buffers 185a and 185b, smoothing filters 188a and 188b, overvoltage protection circuits 189a and 189b, a determination circuit 180, a buffer 186, and a display unit 190. The smoothing filters 188a and 188b are, for example, low-pass filters. The overvoltage protection circuits 189a and 189b are voltage clamp circuits, for example. The determination circuit 180 includes comparison circuits 181a and 181b. The display unit 190 includes a lamp 196 and a flashing circuit 193.

  The electrode 28a of the motor 28 is connected to the input of the buffer amplifier 185a. The output of the buffer amplifier 185a is connected to the input of the smoothing filter 188a. The output of the smoothing filter 188a is connected to the first input of the overvoltage protection circuit 189a and the determination circuit 180. The first input of the determination circuit 180 is connected to the input of the comparison circuit 181a. The electrode 28b of the motor 28 is connected to the input of the buffer amplifier 185b. The output of the buffer amplifier 185b is connected to the input of the smoothing filter 188b. The output of the smoothing filter 188b is connected to the second input of the overvoltage protection circuit 189b and the determination circuit 180. The second input of the determination circuit 180 is connected to the input of the comparison circuit 181b. The output of the determination circuit 180 is connected to the blinking time constant changeover switch 194 of the blinking circuit 193 via the buffer 186. The output of the blinking circuit 193 is connected to the lamp 196.

  The determination circuit 180 outputs a negative logic when the motor 28 is operating regardless of forward rotation or reverse rotation. The lamp 196 is always lit when the motor 28 is not operating, and blinks by the negative logic output of the determination circuit 180 when the motor 28 is operating. In other words, when the determination circuit 180 determines that the motor 28 is operating, the blinking circuit 193 causes the lamp 196 to blink. When the determination circuit 180 determines that the motor 28 is not in operation, the blinking circuit 193 always turns on the lamp 196. That is, the lamp 196 blinks when the motor 28 is rotating forward or reverse, and the lamp 196 is always lit when the motor 28 is stopped. Since the lamp 196 blinks and always lights up correspondingly while the motor 28 is operating and stopped, it can be seen that the display unit 190 is not functioning when the lamp 196 is off.

  Furthermore, since the determination circuit 180 is connected to the motor 28 via the smoothing filter 188a, noise components such as a back electromotive voltage of the motor 28 are removed from the signal input to the determination circuit 180. Since the first input of the determination circuit 180 is connected to the overvoltage protection circuit 189a and the electrode 28a of the motor 28, and the second input of the determination circuit 180 is connected to the overvoltage protection circuit 189b and the electrode 28b of the motor 28, the logic operation The input voltage of the determination circuit 180 is prevented from exceeding the logic voltage.

(Embodiment 3)
Next, an operation state display system according to the third embodiment will be described. The operation state display system according to the present embodiment displays the rotation direction of the motor 28. In the following description, items common to the first or second embodiment may be omitted.

  Referring to FIG. 8, the operating state display system according to the present embodiment includes buffers 185a and 185b, smoothing filters 188a and 188b, overvoltage protection circuits 189a and 189b, a determination circuit 180, buffers 186a and 186b, The display unit 190 is provided. The determination circuit 180 includes comparison circuits 181a and 181b. The display unit 190 includes lamps 196a and 196b and lighting circuits 192a and 192b. The lamps 196a and 196b are, for example, LEDs provided in the drive case 5 of the drive unit 4 or the housing of the second support unit 6. Lamps 196a and 196b may be referred to as pilot lamps.

  The output of the comparison circuit 181a is connected to the lighting ON / OFF switch 195a of the lighting circuit 192a via the buffer 186a. The output of the lighting circuit 192a is connected to the lamp 196a. The output of the comparison circuit 181b is connected to the lighting ON / OFF switch 195b of the lighting circuit 192b via the buffer 186b. The output of the lighting circuit 192b is connected to the lamp 196b.

  The determination circuit 180 determines normal rotation and reverse rotation of the motor 28. The lamp 196a indicates normal rotation of the motor 28. The lamp 296b displays the reverse rotation of the motor 28. The direction of rotation of the motor 28 can be displayed by the two lamps 196a and 196b.

  Specifically, the determination circuit 180 determines that the motor 28 is rotating forward when the motor applied voltage is detected at the electrode 28a of the motor 28 and the motor applied voltage is not detected at the electrode 28b of the motor 28. The determination circuit 180 determines that the motor 28 is reversed when the motor application voltage is not detected at the electrode 28 a and the motor application voltage is detected at the electrode 28 b of the motor 28. The determination circuit 180 determines that the motor 28 is not operating when the motor applied voltage is not detected in both the electrode 28a and the electrode 28b.

  When the determination circuit 180 determines that the motor 28 is rotating forward, the lighting circuit 192a turns on the lamp 196a, and the lighting circuit 192b turns off the lamp 196b. When the determination circuit 180 determines that the motor 28 is rotating in reverse, the lighting circuit 192a turns off the lamp 196a, and the lighting circuit 192b turns on the lamp 196b. If the determination circuit 180 determines that the motor 28 is not operating, the lighting circuits 192a and 192b turn off the lamps 196a and 19b, respectively. That is, only the lamp 196a is lit when the motor 28 is rotating forward, only the lamp 196b is lit when the motor 28 is rotating backward, and both lamps 196a and 196b are switched on when the motor 28 is stopped. Goes off.

(Embodiment 4)
Next, a surface roughness measuring unit according to the fourth embodiment will be described. In the present embodiment, whether or not the surface roughness measuring unit is performing a measurement operation is displayed based on a voltage applied to a motor that generates an urging force for bringing the stylus into contact with the surface of the workpiece W.

  Referring to FIG. 9, a surface roughness measuring unit 200 according to the fourth embodiment includes a workpiece detector 230 that detects a workpiece W, a drive mechanism 280 that drives the workpiece detector 230, a casing 236, and a casing 272. Is provided. The work detector 230 is accommodated in the casing 236. The drive mechanism 280 is accommodated in the casing 272.

  Hereinafter, a case where the drive mechanism 280 moves the workpiece detector 230 in the horizontal direction and the styluses 233U and 233D included in the workpiece detector 230 swing in the vertical direction will be described. However, the movement direction of the workpiece detector 230 by the drive mechanism 280 is described. The swinging directions of the styluses 233U and 233D need only intersect with each other, and are not limited to the horizontal direction and the vertical direction.

  The drive mechanism 280 includes a guide rail 281, a slider 282, a position detector 283, and a feed mechanism 284.

A guide rail 281 is fixedly provided along the moving direction of the work detector 230, and a slider 282 is provided so that the guide rail 281 can slide.
The position detector 283 detects the position of the slider 282 in the moving direction. The feed mechanism 284 includes a feed screw shaft 285, a motor 286, and a power transmission mechanism 287, and the feed screw shaft 285 and the slider 282 are screwed together. The rotational power of the motor 286 is transmitted to the feed screw shaft 285 via the power transmission mechanism 287. The slider 282 moves along the moving direction by the rotation of the feed screw shaft 285.

Next, the configuration of the work detector 230 will be described.
The work detector 230 includes a bracket 231, a measurement arm 233, styluses 233 U and 233 D, a balance weight 234, a displacement detector 235, and a boil coil motor 240.

  A bracket 231 is suspended and supported by the slider 282, and a measurement arm 233 is supported by the bracket 231 so as to swing up and down (circular movement) about the rotation shaft 232. The styluses 233U and 233D are provided so as to protrude perpendicularly to the longitudinal direction of the measurement arm 233 at the distal end (left end in FIG. 9) of the measurement arm 233. The tip of the measurement arm 233 is exposed from the casing 236. Here, it is assumed that the stylus 233U is provided upward and the stylus 233D is provided downward. The balance weight 234 is provided on the base end side (right end in FIG. 9) of the measurement arm 233 so that the position can be adjusted.

  The displacement detector 235 detects the arc motion amount (vertical displacement amount) of the measurement arm 233. The displacement detector 235 includes a scale 235A having a scale graduation (not shown) that is curved along the direction of the arc motion of the measurement arm 233, and a detection head 235B provided to face the scale 235A. The scale 235 </ b> A is fixed to the measurement arm 233 so as to be displaced integrally with the measurement arm 233 on the base end side of the measurement arm 233. The detection head 235B is fixedly disposed with respect to the bracket 231 by a support member (not shown). The arc motion of the measurement arm is detected by the detection head 235B, and the detection head 235B outputs a number of pulse signals (displacement detection pulse signals) corresponding to the amount of arc motion of the measurement arm 233.

The voice coil motor 240 is disposed near the base end of the measurement arm 233, and applies a force to the measurement arm 233 so that the distal end of the measurement arm 233 is biased upward or downward.
The voice coil motor 240 is composed of a magnet 241 and a voice coil 242. The magnet 241 has a cylindrical shape and is provided in the middle of the measurement arm 233. The voice coil 242 is disposed so as to penetrate the magnet 241. The voice coil 242 is fixedly provided, and may be fixed to the bracket 231, for example.

  When a current flows through the voice coil 242, a magnetic force is generated in the voice coil 242. Then, the tip of the measurement arm 233 is biased upward or downward by the interaction between the voice coil 242 and the magnet 241. At this time, if the amount of current (current value) flowing through the voice coil 242 changes, the strength of the urging force applied to the measurement arm changes. Therefore, the voice coil motor 240 functions as a measurement force applying unit that applies a contact force between the stylus and the surface of the workpiece W, that is, a measurement force, and adjusts the force.

  In addition, by switching the direction of the current flowing through the voice coil 242, the direction of the urging force applied to the measurement arm 233 is switched. In other words, the direction of the urging force applied to the measurement arm 233 is switched by switching the direction of the voltage applied to the voice coil 242. For example, what has biased the tip of the measurement arm 233 upward changes downward. Therefore, the voice coil motor 240 also functions as a measurement posture switching unit.

  The surface roughness measurement unit 200 according to the present embodiment includes an operation state display system that displays the operation state of the surface roughness measurement unit 200. The operation state display system will be described below.

  Referring to FIG. 10, a controller 350 for controlling surface roughness measuring unit 200 is provided, and controller 350 and surface roughness measuring unit 200 are connected by a cable. A sensor circuit 370 provided in the surface roughness measuring unit 200 and the controller 350 are connected by a signal line. The sensor circuit 370 includes, for example, a displacement detector 235 and a position detector 283.

  The controller 350 supplies a motor drive voltage to the motor 286 included in the drive mechanism 280, supplies the voice coil motor drive voltage to the voice coil motor 240, and supplies the power supply 360 for the sensor circuit 370 to the surface roughness measurement unit 200. . The motor drive voltage may be referred to as a motor control signal or a motor applied voltage. The voice coil motor drive voltage may be referred to as a voice coil motor control signal or a voice coil motor applied voltage.

  The operation state display system of the surface roughness measurement unit 200 includes buffers 385a and 385b, a determination circuit 380, and a display unit 390. The determination circuit 380 and the display unit 390 are operated by a power supply 360 for the sensor circuit 370. Therefore, the controller 350 does not need to supply power for the determination circuit 380 and the display unit 390 separately. The determination circuit 380 also serves as a voice coil motor applied voltage detection circuit.

  Here, the measurement operation of the surface roughness measurement unit 200 will be briefly described. The motor 286 generates a driving force for moving the stylus 233U or 233D along the surface of the workpiece W based on the motor driving voltage. Specifically, the motor 286 moves the bracket 231 that supports the workpiece detector 230 along the guide rail 281. The voice coil motor 240 generates an urging force for bringing the stylus 233U or 233D into contact with the surface of the workpiece W based on the voice coil motor driving voltage. Accordingly, the stylus 233U or 233D moves along the surface of the workpiece W. The position detector 283 detects the movement of the bracket 231. The displacement detector 235 detects the displacement of the stylus 233U or 233D in a direction that intersects the moving direction of the bracket 231. By recording the movement amount of the bracket 231 in correspondence with the displacement amount of the stylus 233U or 233D, the surface roughness can be measured.

  The motor 286, the stylus 233U, 233D, the work detector 230, the bracket 231, the guide rail 281 and the displacement detector 235 of the surface roughness measuring unit 200 are respectively the motor 28, the stylus 12, This corresponds to the stylus unit 3, the frame 25, the guide shaft 27, and the displacement detector 16.

  The determination circuit 380 of the operation state display system determines whether the voice coil motor 240 is operating based on the voice coil motor applied voltage applied to the voice coil motor 240. Display unit 390 displays the determination result of determination circuit 380. Therefore, it is possible to display on the display unit 390 whether or not the surface roughness measuring unit 200 is performing a measurement operation without adding a signal line for controlling the display unit 390. In other words, it is possible to confirm whether or not the surface roughness measurement unit 200 is performing a measurement operation without adding a signal line connecting the surface roughness measurement unit 200 and the controller 350.

  Since the detailed configuration of the operation state display system of the surface roughness measurement unit 200 can be easily understood from the detailed configuration of the operation state display system of the surface roughness measurement unit 1, the description thereof will be omitted. The buffers 385a and 385b correspond to the buffers 185a and 185b, respectively. The comparison circuit 381a, the comparison circuit 381b, and the OR circuit 382 included in the determination circuit 380 correspond to the comparison circuit 181a, the comparison circuit 181b, and the OR circuit 182 included in the determination circuit 180, respectively. The lighting circuit 391 and the lamp 396 included in the display unit 390 correspond to the lighting circuit 191 and the lamp 196 included in the display unit 190, respectively. The electrode 240a of the voice coil motor 240 is connected to the input of the comparison circuit 381a via the buffer 385a. The electrode 240b of the voice coil motor 240 is connected to the input of the comparison circuit 381b via the buffer 385b. The lamp 396 is, for example, an LED provided on the casing 236 or 272.

Note that the present invention is not limited to the above-described embodiment, and can be changed as appropriate without departing from the spirit of the present invention.
For example, a three-dimensional measuring machine having a portal frame has been described. Of course, the surface roughness measuring unit according to the present embodiment can be applied even if the moving mechanism is an articulated type. is there.
(An articulated type three-dimensional measuring machine is disclosed in, for example, Japanese Patent Application Laid-Open No. 2007-47014.)
In addition, for example, the surface roughness measuring unit having a right angle configuration between the stylus and the stylus lever has been described. However, the internal structure of the stylus unit itself, such as a configuration in which the stylus and the stylus lever are connected straight, is described. It is not limited.
Furthermore, the surface roughness measuring unit according to the present invention can be used by being mounted on, for example, a robot or a machine tool.
Although the photo sensor is illustrated as the contact detection unit 15, it is needless to say that a mechanical contact switch may be used, and the specific configuration is not limited to the example of the embodiment.

The surface roughness measuring units 1 and 200 may be used by being attached to a vertical movement stand.
It is possible to combine the above embodiments within a consistent range. For example, when Embodiments 2 and 3 are combined with each other, when the motor 28 is rotating forward, the lamp 196a can be blinked and the lamp 196b can be constantly lit. When the motor 28 is rotating in the reverse direction, the lamp 196a can be constantly turned on and the lamp 196b can be blinked. If the third and fourth embodiments are combined with each other, the direction of the urging force generated by the voice coil motor 240 can be displayed.

1 ... Surface roughness measuring unit 12 ... Stylus
28 ... Motor 100 ... 3D measuring system 120 ... 3D measuring machine 122 ... Measuring head 180, 380 ... Judgment circuits 185a, 185b, 186, 186a, 186b, 385a, 385b ... Buffers 188a, 188b ... Smoothing filters 189a, 189b ... Overvoltage protection circuit 190, 390 ... Display unit 196, 196a, 196b, 396 ... Lamp 200 ... Surface roughness measuring unit 233D, 233U ... Stylus 240 ... Voice coil motor W ... Workpiece

Claims (9)

A stylus that moves along the surface of the object to be measured;
A motor for generating a driving force for moving the stylus along the surface of the object to be measured or an urging force for bringing the stylus into contact with the surface of the object to be measured;
A determination circuit for determining whether or not the motor is operating based on a motor applied voltage applied to the motor;
A surface roughness measurement unit comprising: a display unit that displays a determination result of the determination circuit. The determination circuit determines normal rotation and reverse rotation of the motor,
The display unit
A first lamp for indicating normal rotation of the motor;
The surface roughness measurement unit according to claim 1, further comprising: a second lamp that displays reverse rotation of the motor. The surface roughness measurement unit according to claim 1, wherein the determination circuit is connected to the motor via a buffer. The surface roughness measuring unit according to any one of claims 1 to 3, wherein the determination circuit is connected to the motor via a smoothing filter. The surface roughness measuring unit according to any one of claims 1 to 4, wherein the determination circuit is connected to the motor and an overvoltage protection circuit. The display unit
6. The lamp according to claim 1, further comprising: a lamp that is turned on when the determination circuit determines that the motor is operating, and is turned off when the determination circuit determines that the motor is not operating. The surface roughness measuring unit described. The display unit
6. A lamp that blinks when the determination circuit determines that the motor is operating, and that is constantly lit when the determination circuit determines that the motor is not operating. 6. The surface roughness measuring unit described in 1. A surface roughness measuring unit according to any one of claims 1 to 7,
A three-dimensional measuring system comprising a three-dimensional measuring machine connected to the surface roughness measuring unit as a measuring head. An operation state display method for a surface roughness measurement unit that moves a stylus along the surface of an object to be measured,
Based on a motor applied voltage applied to a motor that generates a driving force for moving the stylus along the surface of the object to be measured or a biasing force for bringing the stylus into contact with the surface of the object to be measured. Determine if the motor is running,
An operation state display method for a surface roughness measuring unit for displaying a determination result as to whether or not the motor is operating.

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