JP2015168013A - Grinding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily exchange a chuck table in a short time.SOLUTION: In holding means having a constitution in which a chuck table for sucking and holding a plate-shaped workpiece is supported by a support table 30, there are arranged, at a connecting face 31 of the support table 30, second positioning parts 34a, 34b which are connected to a first positioning part of the chuck table, and position the chuck table to a prescribed position, a first suction hole which makes an adsorption face and a lower face of the chuck table communicate with each other is connected to second suction holes 35a, 35b which are opened at the connecting face 31, and third suction holes 36a to 36d are opened at the connecting face 31 at their one-side ends. A first changeover valve 16 can make the second suction holes 35a, 35b selectively communicate with a suction source 50 or an air supply source 60, a second changeover valve 17 can make the third suction holes 36a to 36d selectively communicate with the suction source 50 or the air supply source, and thus, the chuck table becomes exchangeable without using an attachment screw or the like.

Description

  The present invention relates to a grinding apparatus provided with holding means for sucking and holding a plate-like workpiece.

  In a grinding machine that grinds the workpiece held on the chuck table, when suctioning and holding multiple types of plate workpieces with different sizes and shapes on the chuck table, the size and shape of the suction area is the size and shape of the plate workpiece. If it does not match, the plate-like workpiece cannot be held with sufficient suction force. In order to solve this, a chuck table has been proposed in which the suction area is divided into a plurality of parts and the suction area can be switched in accordance with the size and shape of the plate-like workpiece (for example, Patent Document 1 and Patent Document 2). reference).

JP 2013-226607 A JP-A-3-32538

  In the chuck table, in order to divide the suction area into a plurality of areas, it is necessary to provide a boundary between the suction areas. However, when the plate-like workpiece is thinned to about 10 μm to 20 μm by grinding, the boundary becomes the plate-like workpiece. May be transferred. In order to prevent this problem from occurring, instead of using a chuck table with a plurality of suction areas, a plurality of chuck tables having a single suction area are prepared and matched to the size and shape of the plate workpiece. Can be replaced.

  However, in order to replace the chuck table, remove the chuck table by loosening the multiple mounting screws that are circumferentially arranged on the outer periphery of the chuck table and fix the chuck table to the support table, and attach another chuck table. After that, it is necessary to tighten the mounting screws. Moreover, since it is necessary to equalize the tightening torque when tightening the mounting screw, the tightening torque must be managed. For this reason, exchanging the chuck table takes a lot of labor and time.

  The present invention has been considered in view of such a problem, and an object thereof is to make it possible to easily replace a chuck table in a short time without trouble.

A grinding apparatus according to the present invention includes a holding unit that sucks and holds a plate-shaped workpiece, and a grinding unit that grinds the plate-shaped workpiece by bringing a rotating grinding wheel into contact with the plate-shaped workpiece held by the holding unit. And the holding means includes a chuck table for sucking and holding the plate-like workpiece, a support table for supporting the chuck table, and a rotating means for rotating the support table. The chuck table is provided on the upper surface of the chuck table, and a suction surface on which the plate-like workpiece is placed, a first positioning portion provided on the lower surface of the chuck table, and the lower surface of the chuck table And a first suction hole communicating between the suction surface and the suction surface, and the support table is provided on the connection surface, connected to the lower surface of the chuck table, A second positioning portion for positioning the chuck table at a predetermined position by being connected to the positioning portion, and a second suction hole having one end opened in the connection surface and connected to the first suction hole And a third suction hole having one end opened in the connection surface, and a pipe connected to the second suction hole and a pipe connected to the suction source are communicated to each other, and the chuck table A suction holding state for sucking and holding the plate-like workpiece placed on the suction surface, and a pipe connected to the second suction hole and a pipe connected to an air supply source are communicated to each other. A first switching valve that switches between a holding release state for releasing suction holding of the plate-like workpiece placed on the suction surface, a pipe connected to the third suction hole, and a pipe connected to a suction source To hold the chuck table by suction. A second switching valve for switching between a state and a holding release state in which the piping connected to the third suction hole and the piping connected to the air supply source are communicated to release the suction holding of the chuck table; And a control unit for controlling the first switching valve and the second switching valve.
One of the lower surface of the chuck table and the connection surface of the support table includes a concave portion, and the other includes a convex portion that engages with the concave portion, the concave portion and the convex portion are fitted, and the first It is preferable that the chuck table is positioned by connecting one positioning portion and the second positioning portion.

According to the grinding device of the present invention, the chuck table can be easily removed by switching the second switching valve to the holding release state, and the chuck table can be removed by switching the second switching valve to the suction holding state. Can be easily attached. Further, since the chuck table is positioned by connecting the first positioning part and the second positioning part, the troublesome adjustment work is not required and the chuck table can be easily replaced in a short time.
If a concave portion and a convex portion are provided on the lower surface of the chuck table and the connecting surface of the support table, the first positioning portion and the second positioning portion can be easily connected by fitting the concave portion and the convex portion. As a result, the positioning of the chuck table is further facilitated, and the chuck table can be prevented from being laterally displaced.

The perspective view which shows a grinding device. The perspective view which shows the upper surface side and lower surface side of a chuck table. The perspective view which shows the connection surface side and lower surface side of a support table. The perspective view which shows the upper surface side and lower surface side of another example of a chuck table. The perspective view which shows the connection surface side and lower surface side of another example of a support table.

  A grinding apparatus 10 shown in FIG. 1 is a grinding apparatus capable of grinding a plurality of types of plate-like workpieces having different sizes and shapes. The holding unit 11 sucks and holds the plate-like workpiece, and the plate-like shape held by the holding unit 11. Grinding means 14 for grinding the workpiece with a grinding wheel 40 and grinding feed means 15 for moving the grinding means 14 in the ± Z directions are provided.

  The holding means 11 supports a plurality of chuck tables 20a and 20b, one of the chuck tables, a support table 30 that can rotate and move in the ± Y direction, and an axis parallel to the ± Z direction. And a rotating means (not shown) for rotating the support table 30.

  A suction surface 21 on which a plate-like workpiece is placed is provided on the upper surface of each chuck table 20a, 20b. The suction surface 21 has a size and shape that match the size and shape of the plate-like workpiece. The chuck tables 20a and 20b are selectively used in accordance with the plate workpiece to be ground. For example, the chuck table 20a is used when grinding a circular plate-shaped workpiece, and the chuck table 20b is used when grinding a square plate-shaped workpiece. The chuck table is not limited to the two types shown in FIG.

  The grinding means 14 includes a grinding wheel 143 to which a grinding wheel 40 is fixed in an annular shape, a mount 141 to which the grinding wheel 143 is mounted, and a motor 142 that rotates the mount 141 about an axis parallel to the ± Z direction. When the motor 142 rotates the mount 141, the grinding wheel 143 attached to the mount 141 rotates.

  In the grinding feed means 15, the motor 152 rotates the screw shaft 151 parallel to the ± Z direction, whereby the moving portion 153 engaged with the screw shaft 151 is guided by the guide 154 and moved in the ± Z direction. The grinding means 14 is fixed to the moving unit 153 and moves in the ± Z direction as the moving unit 153 moves. When the grinding feed means 15 moves the grinding means 14 in the −Z direction, the lower surface of the rotating grinding wheel 40 is brought into contact with the upper surface of the plate-like work held by the holding means 11 so that the plate-like work is moved. Can be ground.

  Hereinafter, the chuck table 20a illustrated in FIG. 1 will be described. The chuck table 20b also has the same structure as the chuck table 20a except for the shape of the suction surface. As shown in FIG. 2, the chuck table 20 a has a cylindrical shape with an axis parallel to the ± Z direction as a central axis, and an adsorption surface 21 is provided on the upper surface 22. The suction surface 21 is an upper surface of a cylindrical suction portion 21a formed of a porous material, and the suction portion 21a is fitted in a cylindrical recess provided on the upper surface 22 of the chuck table 20a.

  The lower surface 23 of the chuck table 20a is provided with two first positioning portions 24a and 24b for positioning the chuck table 20a at a predetermined position. The first positioning portions 24a and 24b are bottomed cylindrical recesses whose central axis is an axis parallel to the ± Z direction, and are provided at equal distances and opposite directions from the central axis of the chuck table 20a.

  The chuck table 20a is provided with two first suction holes 25a and 25b that allow the suction surface 21 and the lower surface 23 to communicate with each other. The first suction holes 25a and 25b are holes that penetrate the portion excluding the suction portion 21a of the chuck table 20a in the ± Z direction. One end is connected to the lower surface of the suction portion 21a and opens, and the other end is the chuck table. An opening is formed on the lower surface 23 side of 20a. The first suction holes 25a and 25b are provided at the same distance from the central axis of the chuck table 20a and in the opposite direction.

  As shown in FIG. 3, the support table 30 has a cylindrical shape with an axis parallel to the ± Z direction as a central axis, and the chuck table 20a is attached to a connection surface 31 connected to the lower surface 23 of the chuck table 20a. Two second positioning portions 34a and 34b for positioning at positions are provided. The second positioning portions 34a and 34b are columnar convex portions having an axis parallel to the ± Z direction as a central axis, and are provided at positions corresponding to the first positioning portions 24a and 24b of the chuck table 20a. Yes. That is, the two second positioning portions 34a and 34b are provided at the same distance from the central axis of the support table 30 and in opposite directions, and the distance from the central axis of the support table 30 to the second positioning portions 34a and 34b is as follows. The distance from the central axis of the chuck table 20a to the first positioning portions 24a and 24b is equal. The second positioning portions 34a and 34b are formed in a shape that engages and connects with the first positioning portions 24a and 24b. That is, the outer diameter and height of the second positioning portions 34a and 34b are slightly smaller than the inner diameter and depth of the first positioning portions 24a and 24b. When the chuck table 20a is placed on the support table 30, the first positioning portions 24a and 24b and the second positioning portions 34a and 34b are connected to position the chuck table 20a at a predetermined position. . Two first positioning portions 24a and 24b are provided at symmetrical positions with respect to the central axis of the chuck table 20a, and two second positioning portions 34a and 34b correspondingly correspond to the central axis of the support table 30. The first positioning portions 24a and 24b and the second positioning portions 34a and 34b can be connected even when the chuck table 20a is rotated 180 degrees. Therefore, there are two positions where the chuck table 20a is positioned, which are rotated 180 degrees around the central axis. As a result, the angle at which the chuck table 20a must be rotated to position the chuck table 20a is within 180 degrees.

  The support table 30 is provided with two second suction holes 35a and 35b connected to the first suction holes 25a and 25b of the chuck table 20a when the chuck table 20a is positioned. The second suction holes 35 a and 35 b are through-holes that penetrate the support table 30 in the ± Z direction. One end is connected to the connection surface 31 to open, and the other end is connected to the lower surface 33 of the support table 30. The opening on the connection surface 31 side is provided at a position corresponding to the opening on the lower surface 23 side of the first suction holes 25a and 25b of the chuck table 20a. That is, the two second suction holes 35a and 35b are provided at the same distance from the central axis of the support table 30 and in opposite directions, and the distance from the central axis of the support table 30 to the second suction holes 35a and 35b is as follows. The angle between the center axis of the chuck table 20a and the first suction holes 25a and 25b and the angle between the second positioning portion 34a and the second suction hole 35a with respect to the center axis of the support table 30 is This is equal to the angle formed by the first positioning portion 24a and the first suction hole 25a with respect to the central axis of the chuck table 20a. Two first suction holes 25a and 25b are provided at symmetrical positions with respect to the central axis of the chuck table 20a, and two second suction holes 35a and 35b correspondingly correspond to the central axis of the support table 30. The second suction holes 35a and 35b are connected to the first suction holes 25a and 25b even when the chuck table 20a is positioned in a state rotated by 180 degrees.

  The support table 30 is provided with four third suction holes 36a to 36d that penetrate the support table 30 in the ± Z direction. The third suction holes 36 a to 36 d have one end connected to an annular groove 32 provided in the connection surface 31 and opened, and the other end connected to the lower surface 33 and opened.

  As shown in FIG. 3, the grinding apparatus 10 shown in FIG. 1 includes a first switching valve 16 for switching the holding state of the plate-like workpiece placed on the chuck table 20a, and a first switching valve 16 for switching the holding state of the chuck table 20a. Two switching valves 17, pipes 181 to 186 connected to the first switching valve 16 and the second switching valve 17, and a control unit 19 that controls the first switching valve 16 and the second switching valve 17. It has.

  The first switching valve 16 is a three-way valve, and pipes 181 to 183 are connected to three terminals, respectively. The second switching valve 17 is a three-way valve, and pipes 184 to 186 are connected to three terminals, respectively. The pipe 181 is connected to the opening on the lower surface 33 side of the second suction holes 35a and 35b. The pipe 184 is connected to the opening on the lower surface 33 side of the third suction holes 36a to 36d. The pipes 182 and 185 are connected to a suction source 50 that sucks air. The pipes 183 and 186 are connected to a supply source 60 that supplies air.

  The second switching valve 17 causes the pipe 184 and the pipe 186 to communicate with each other under the control of the control unit 19. As a result, air is supplied to the groove portion 32 through the third suction holes 36a to 36d, and the holding release state is released in which the suction holding of the chuck table 20a placed on the connection surface 31 is released. On the other hand, the second switching valve 17 causes the pipe 184 and the pipe 185 to communicate with each other when switched by the control of the control unit 19. As a result, the air in the groove 32 is sucked through the third suction holes 36a to 36d, and the chuck table 20a placed on the connection surface 31 is sucked and held.

  The first switching valve 16 causes the pipe 181 and the pipe 182 to communicate with each other under the control of the control unit 19. As a result, air is sucked from the suction surface 21 through the second suction holes 35a and 35b and the first suction holes 25a and 25b connected thereto, and the plate-like workpiece placed on the suction surface 21 is sucked and held. It will be in the suction holding state. In addition, when the first switching valve 16 is switched under the control of the control unit 19, the pipe 181 and the pipe 183 communicate with each other. Thereby, the air supplied from the supply source 60 is discharged from the suction surface 21 through the second suction holes 35 a and 35 b and the first suction holes 25 a and 25 b connected thereto, and is placed on the suction surface 21. The holding release state is released to release the suction holding of the plate-like workpiece.

  When replacing the chuck table 20a, first, the control unit 19 switches the second switching valve 17 to the holding release state, and releases the suction holding of the chuck table 20a. Thereafter, the chuck table 20a placed on the support table 30 is removed. An operation such as loosening the mounting screw is unnecessary, and the chuck table 20a can be easily removed.

  Next, for example, the chuck table 20b shown in FIG. 1 having a different size and shape of the suction surface 21 is placed on the support table 30, and the first positioning portions 24a and 24b of the chuck table 20b and the second of the support table 30 are placed. The positioning parts 34a and 34b are connected. Thereby, the chuck table 20a can be easily positioned at a predetermined position.

  Thereafter, the control unit 19 switches the second switching valve 17 to the suction holding state and holds the chuck table 20a by suction. Work such as tightening the mounting screw is not necessary, and it is not necessary to manage the tightening torque of the mounting screw, and the chuck table 20a can be easily mounted.

  Thus, the chuck tables 20a and 20b are not attached to the support table 30 with the mounting screws, but are fixed to the support table 30 by sucking and holding the chuck tables 20a and 20b, so that the chuck tables 20a and 20b can be easily replaced. can do. Further, by connecting the first positioning portions 24a, 24b and the second positioning portions 34a, 34b, the chuck tables 20a, 20b can be easily positioned, so that the chuck tables 20a, 20b can be moved in a short time. Can be easily replaced.

  When grinding a plate workpiece, the chuck workpiece 20a, 20b having a size and shape matching the size and shape of the plate workpiece is attached to the support table 30 and sucked and held. The controller 19 is placed on the suction surfaces 21 of 20a and 20b, and the controller 19 switches the first switching valve 16 to the suction holding state to suck and hold the plate-like workpiece. In this state, the grinding means 14 grinds the plate-like workpiece held on the chuck table 20a. While the plate-like workpiece held on the chuck table 20a is being ground, the first positioning portions 24a, 24b and the second positioning portions 34a, 34b are connected, so that the chuck tables 20a, 20b are laterally displaced. Can be prevented. When the grinding is completed, the control unit 19 switches the first switching valve 16 to the holding release state, releases the suction holding of the plate workpiece, and carries the plate workpiece out of the chuck tables 20a and 20b.

  Since the first positioning portions 24a, 24b and the second positioning portions 34a, 34b are connected to each other, the chuck table 20a is positioned at a predetermined position, so that the first suction holes 25a, 25b and the second The suction holes 35a and 35b are securely connected, and the plate-like workpiece can be sucked and held. In addition, since the chuck table 20a is held by suction, air can be prevented from leaking from the connecting portion between the first suction holes 25a, 25b and the second suction holes 35a, 35b, and the plate-like workpiece can be secured. Can be sucked and held.

  The chuck table 20A shown in FIG. 4 is different from the chuck table 20a described in FIG. 2 in that a cylindrical recess 27 centering on the central axis of the chuck table 20A is provided on the lower surface 23. The inner diameter of the recess 27 is larger than the distance between the central axis of the chuck table 20A and the first positioning portions 24a and 24b and the first suction holes 25a and 25b. That is, the openings on the lower surface 23 side of the first positioning portions 24 a and 24 b and the first suction holes 25 a and 25 b are provided in the recess 27.

  The support table 30A shown in FIG. 5 is paired with the chuck table 20A shown in FIG. 4, and a columnar convex portion 37 centering on the central axis of the support table 30A is provided on the connection surface 31. This is different from the support table 30 described in FIG. The outer diameter and height of the convex portion 37 are slightly smaller than the inner diameter and depth of the concave portion 27, and the concave portion 27 and the convex portion 37 are fitted. The openings on the connection surface 31 side of the second positioning portions 34 a and 34 b and the second suction holes 35 a and 35 b are provided on the convex portion 37. It is preferable that the height of the second positioning portions 34 a and 34 b be lower than the height of the convex portion 37. Thereby, even if it is in the state where 1st positioning part 24a, 24b and 2nd positioning part 34a, 34b are not connected, the recessed part 27 and the convex part 37 can be fitted incompletely.

  When the chuck table 20A is placed on the support table 30A and the position of the central axis is matched, the concave portion 27 and the convex portion 37 are fitted. In this state, the chuck table 20A is rotated to find a position where the first positioning portions 24a, 24b and the second positioning portions 34a, 34b are connected, and the chuck table 20A is positioned. Since the concave portion 27 and the convex portion 37 are fitted, it is possible to prevent the center axis from being displaced when the chuck table 20A is rotated. Since the center axis is aligned, it is only necessary to adjust the angle, and the chuck table 20A can be easily positioned. Thereby, the chuck table 20A can be easily replaced. Further, while the plate-like workpiece held on the chuck table 20A is being ground, the concave portion 27 and the convex portion 37 are fitted, so that the chuck table 20A can be prevented from being laterally displaced.

  In this way, the first stage positioning is performed by the concave portion 27 and the convex portion 37, and then the second stage positioning is performed by the first positioning portions 24a and 24b and the second positioning portions 34a and 34b. Thus, by dividing the positioning of the chuck table 20A into a plurality of stages, the positioning at each stage is further facilitated.

  The number of the first positioning portions 24a and 24b and the second positioning portions 34a and 34b is not limited to two, and may be one or three or more. Further, the first positioning portions 24a and 24b and the second positioning portions 34a and 34b may have shapes that can be engaged with each other and connected, for example, the first positioning portions 24a and 24b are convex. The second positioning portions 34a and 34b may be concave.

  The number of the first suction holes and the second suction holes is not limited to two, and may be one or three or more. Further, the outlet of the second suction hole on the first switching valve 16 side may be configured to be provided not on the lower surface 33 of the support table 30 but on another surface such as a side surface.

  The number of the third suction holes is not limited to four, but may be three or less, or may be five or more. Further, the outlet of the third suction hole on the second switching valve 17 side may be configured to be provided not on the lower surface 33 of the support table 30 but on another surface such as a side surface.

  The convex part and the concave part need only have shapes that fit each other. For example, the convex part may be provided on the chuck table and the concave part corresponding to the convex part may be provided on the support table.

10 grinding equipment,
11 holding means,
14 grinding means, 141 mount, 142 motor,
15 grinding feed means, 151 screw shaft, 152 motor, 153 moving part,
154 guide,
16 first switching valve, 17 second switching valve,
181, 182, 183, 184, 185, 186 piping, 19 control unit,
20a, 20b, 20A chuck table, 21 suction surface, 22 upper surface,
23 Lower surface, 24a, 24b 1st positioning part, 25a, 25b 1st suction hole,
27 recess,
30, 30A support table, 31 connection surface, 32 groove, 33 bottom surface,
34a, 34b second positioning portion, 35a, 35b second suction hole,
36a, 36b, 36c, 36d 3rd suction hole, 37 convex part,
40 grinding wheel, 50 suction source, 60 supply source

Claims (2)

Holding means for sucking and holding the plate-like workpiece;
Grinding means for grinding the plate-like workpiece by bringing a rotating grinding wheel into contact with the plate-like workpiece held by the holding means;
A grinding apparatus comprising:
The holding means is
A chuck table for sucking and holding the plate workpiece;
A support table for supporting the chuck table;
Rotating means for rotating the support table;
With
The chuck table
A suction surface provided on the upper surface of the chuck table, on which the plate-like workpiece is placed;
A first positioning portion provided on the lower surface of the chuck table;
A first suction hole communicating between the lower surface of the chuck table and the suction surface;
With
The support table is
A connection surface connected to the lower surface of the chuck table;
A second positioning portion that is provided on the connection surface and is connected to the first positioning portion to position the chuck table at a predetermined position;
A second suction hole having one end opened in the connection surface and connected to the first suction hole;
A third suction hole having one end opened in the connection surface;
With
A suction holding state in which the pipe connected to the second suction hole and the pipe connected to the suction source are communicated to suck and hold the plate-like workpiece placed on the suction surface of the chuck table; Holding release for releasing the suction and holding of the plate-like work placed on the suction surface of the chuck table by communicating the pipe connected to the second suction hole and the pipe connected to the air supply source A first switching valve that switches between states;
The piping connected to the third suction hole and the piping connected to the suction source are communicated to suck and hold the chuck table, and the piping connected to the third suction hole and the air A second switching valve that communicates with a pipe connected to a supply source to switch the holding release state to release the suction holding of the chuck table;
A control unit for controlling the first switching valve and the second switching valve;
A grinding apparatus comprising: One of the lower surface of the chuck table and the connection surface of the support table includes a concave portion, and the other includes a convex portion that fits into the concave portion,
The grinding apparatus according to claim 1, wherein the chuck table is positioned by fitting the concave portion and the convex portion and connecting the first positioning portion and the second positioning portion.

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