JP2015145324A - Production method of nano carbon fiber-coated diamond particle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a saw wire having excellent holding power of diamond abrasive grains and stable cutting efficiency, by producing diamond particles of which the surface is coated with nano carbon fibers, using the obtained diamond particles as the abrasive grains so as to improve adhesion to a plating film.SOLUTION: A saw wire, having a formed plating film with diamond particles dispersed therein, is obtained by producing diamond particles of which the surface is coated with nano carbon fibers by conducting a ligand exchange reaction between an aromatic ring on surfaces of graphitized diamond particles and a ferrocene-containing polymer in the presence of nano carbon fibers, and subjecting the surface of a strand to a plating treatment by feeding the obtained diamond particles into a plating solution.

Description

  The present invention relates to a manufacturing method for coating nanocarbon fibers such as carbon nanotubes on the surface of diamond particles.

  In recent years, hollow carbon nanotubes or nanocarbon fibers that are not hollow bodies (in the present invention, these are collectively referred to as nanocarbon fibers) are unique properties, that is, fine fibers with a nanometer fiber diameter. In view of the fact that the aspect ratio (fiber length / fiber diameter) is large and that it has excellent mechanical strength, it is used in various fields. For example, in Patent Document 1, a composite metal plating film that uniformly contains nanocarbon fibers having a diameter of 10 to 100 nm and an aspect ratio (= length / diameter) of 5 to 200 is formed on the surface of the film by electrolytic plating. A nanocarbon fiber-containing electrodeposition tool is described.

  For slicing processing of brittle materials such as silicon crystal, sapphire, gallium arsenide, crystal, glass, and magnetic materials, wire saws are used that cut while pressing a material to be cut against a traveling wire (saw wire). An example of the wire saw method is a loose abrasive wire saw. The saw wire is reciprocated or traveled in one direction, and a workpiece is cut while continuously supplying a slurry liquid containing loose abrasive grains.

  As a next-generation method, a fixed-abrasive wire saw in which diamond abrasive grains are fixed to the surface of a saw wire with metal plating or a resin binder has been proposed and put into practical use. Since the electrodeposited diamond saw wire used for the fixed abrasive wire saw does not require the use of a slurry solution, the silicon wafer cutting efficiency is superior to the free abrasive method. Further, since free abrasive grains are not scattered and waste liquid treatment is produced, there are advantages that the working environment is excellent and the manufacturing cost can be reduced. However, the manufacturing cost for fixing the diamond abrasive grains to the wire surface is high, and wire breakage caused by dropping of diamond abrasive grains on the surface during the cutting process and a reduction in cutting efficiency are problems. Electrodeposited diamond wires that have been marketed in the past are made of conductive carbon compounds such as titanium carbide and silicon carbide and nickel metal on the surface of diamond abrasive grains in order to increase the affinity with nickel plating, which is the base for coating piano wires. Is used to secure adhesion to the nickel plating film (see Patent Document 2).

JP 2000-253318 A JP 2011-137213 A

  Since the above-mentioned coated diamond abrasive grains are fixed to the wire surface by nickel plating in the saw wire manufacturing process, the initial cutting performance is lowered due to the nickel plating depositing on the diamond abrasive grain surface, and the diamond abrasive grains and nickel plating There are problems such as dropping of diamond abrasive grains during cutting due to insufficient adhesiveness of the steel, reduction in cutting efficiency due to such troubles, and occurrence of breakage of the saw wire. For this reason, material design has been actively conducted to improve the initial machinability of the saw wire having diamond abrasive grains fixed to the surface and to maintain the cutting efficiency.

  On the other hand, research and development is also in progress on the surface treatment of diamond particles used for diamond abrasive grains. Grafting reaction for surface treatment of diamond particles is carried out using the functional group on the particle surface as a scaffold, so it is chemically stable, and it is difficult to graft on the diamond particle surface with few functional groups present on the surface. Met. Therefore, surface treatment methods for diamond particles have been reported using acid treatment of diamond particles and introduction of carboxyl groups, etc., using a coupling reaction with aminosilane as a scaffold (Toshiki Tsubota and 7 others, “ Surface modification of diamond powder using a silane coupling agent ”, Surface Technology, Vol. 53, No. 6, p. 413-418, 2002). However, aminosilane is hydrolyzed in solution. The treatment is not suitable for diamond particles used in saw wires.

  As a result of intensive studies to solve the above-mentioned problems, the present invention produces diamond particles whose surfaces are coated with nanocarbon fibers, and the obtained diamond particles are used as abrasive grains between the plating film and An object of the present invention is to provide a saw wire having improved adhesion and excellent diamond abrasive grain retention and stable cutting efficiency.

  The method for producing nanocarbon fiber-coated diamond particles according to the present invention comprises subjecting a ferrocene-containing polymer to a ligand exchange reaction between an aromatic ring on the surface of a diamond particle graphitized in the presence of nanocarbon fibers and a ferrocene-containing polymer. Then, the surface of the diamond particles is covered with nanocarbon fibers. Furthermore, the average particle diameter of the diamond particles is 1 μm to 1000 μm. Furthermore, the thickness of the graphite layer on the diamond particle surface is 0.1 nm to 100 nm. Further, the nanocarbon fiber has a fiber diameter of 1 nm to 200 nm and an aspect ratio of 1 to 500.

  In the present invention, nanocarbon fiber-coated diamond particles can be obtained by performing a ligand exchange reaction between an aromatic ring on the surface of graphitized diamond and a ferrocene-containing polymer in the presence of nanocarbon fibers. By performing the saw wire plating process using the obtained diamond particles, the nanocarbon fibers on the surface of the diamond particles are taken into the plating film and exhibit an anchor effect. Therefore, the adhesion between the plating film and the diamond particles is improved, and a saw wire having excellent holding power of diamond abrasive grains and stable cutting efficiency can be obtained.

  In addition, since the present invention can be produced without exposing the nanocarbon fiber-coated diamond particles to high temperatures, the nanocarbon fiber-coated diamond is maintained while maintaining the mechanical properties such as fracture strength and hardness of the base diamond particles. Particles can be obtained, and a decrease in cutting efficiency can be suppressed when used as saw wire abrasive grains.

It is explanatory drawing which shows the manufacturing process of a carbon nanotube covering diamond particle. It is the image which image | photographed the surface of the diamond particle before a process. It is the image which image | photographed the surface of the diamond particle after a process. It is explanatory drawing which shows another manufacturing process of a carbon nanotube covering diamond particle. It is the image which image | photographed the surface of the diamond particle after a process. It is explanatory drawing which shows another manufacturing process of a carbon nanotube covering diamond particle. It is the image which image | photographed the surface of the diamond particle after a process.

  Hereinafter, the present invention will be described in detail. The method for producing nanocarbon fiber-coated diamond particles according to the present invention is characterized in that nanocarbon fiber-coated diamond particles are produced by grafting a ferrocene-containing polymer and nanocarbon fibers onto the surface of a graphite particle whose surface is graphitized. To do.

  In the presence of an aluminum chloride catalyst, the inventors of the present invention performed a reaction between a graphitized diamond particle and a ferrocene-containing polymer, thereby arranging an aromatic ring on the surface of the graphitized diamond particle and a ferrocene site of the ferrocene-containing polymer. It has been found that the ligand exchange reaction proceeds and the ferrocene-containing polymer is grafted onto the surface of the diamond particles.

  In the present invention, the surface of the diamond particle is graphitized to utilize the ligand exchange reaction between the aromatic ring of the diamond surface graphite layer and the ferrocene-containing polymer. Therefore, it is possible to coat nanocarbon fibers on the surface of diamond particles.

  The diamond particles used in the method for producing nanocarbon fiber-coated diamond particles according to the present invention are diamond particles whose surface is graphitized in a nitrogen atmosphere. The average particle diameter of the diamond particles is preferably 1 μm to 1000 μm, more preferably 5 μm to 50 μm. As such diamond particles, those of single crystal type and polycrystalline type which are usually available can be used. In addition, the thickness of the graphite layer on the diamond particle surface is not particularly limited, but graphite itself exhibits hydrophobicity, and if this layer is too thick, diamond particles are likely to aggregate due to hydrophobic interaction. The thickness is preferably 0.1 nm to 100 nm, more preferably 0.5 nm to 50 nm, and even more preferably 1 nm to 20 nm.

  Since the nanocarbon fiber is not particularly limited, it is preferable to use a commercially available single-walled carbon nanotube or multi-walled carbon nanotube. The fiber diameter is 1 nm to 200 nm and the aspect ratio (= fiber length / fiber diameter) is 1 to 500. It is good to use what has been set. In the present invention, in order to suppress diamond particles from dropping in a wire saw cutting process, it is not necessary to disperse nanocarbon fibers, and nano-fibers on the surface of graphitized diamond particles are utilized by utilizing the property of being easily aggregated (bundled). Carbon fiber can be coated. And it is thought that the outstanding holding power is acquired when it is used as a diamond abrasive grain because the nano carbon fiber which coat | covers the diamond particle surface is taken in in a metal plating film, and exhibits an anchor effect. In addition, even when the size of the diamond particles is large, the diamond particles are held in the plating film so that they are not easily dropped off.

In order to produce nanocarbon fiber-coated diamond particles, a ligand exchange reaction between the aromatic ring of the graphite layer formed on the diamond particle surface and the ferrocene-containing polymer is necessary as described above. It has already been reported that in the presence of an aluminum chloride catalyst, a ligand exchange reaction between a condensed aromatic ring on the surface of carbon black and ferrocene proceeds, and a hecyclopentadienyl group can be introduced on the particle surface (reference: M Miyake, K. Yasuda, T. Takashima, T. Teranishi: Chem. Lett., 1999, 1037). By using such a ligand exchange reaction, it has become possible for the first time to use the graphene sheet surface, not the edge portion of the condensed aromatic ring of carbon black. In addition, the present inventors have reported the graft reaction to the carbon material surface by the ligand exchange reaction between the condensed aromatic ring on the surface of the carbon material such as carbon black, carbon fiber, and graphite and the vinylferrocene-containing copolymer. (Reference: N. Tsubokawa, N. Abe, Y. Seida, K. Fujiki: Chem. Lett., 2000, 900.). According to these reports, the reaction between carbon fiber and vinyl ferrocene-methyl methacrylate copolymer (poly (Vf-co-MMA)) (Mn = 2.1 × 10 ⁴ ) is not possible in systems where aluminum or aluminum chloride is not added. In contrast, the graft ratio was only 2% or less, but in the presence of aluminum chloride, the grafting reaction of poly (vf-co-MMA) on the carbon fiber surface proceeded, and the graft ratio was 4. 4%. Furthermore, in the coexistence of aluminum chloride and aluminum, the grafting reaction of poly (Vf-co-MMA) was promoted, and the graft ratio reached 27.6%.

  The present invention utilizes these reactions, and in the presence of an aluminum chloride catalyst, the surface of the graphitized diamond particles is reacted with the ferrocene-containing polymer by reacting the graphitized diamond particles with the ferrocene-containing polymer. A ferrocene-containing polymer is grafted onto the surface of the diamond particle by a ligand exchange reaction with a ferrocene moiety. And nanocarbon fiber-coated diamond particles can be obtained by adding nanocarbon fibers.

  As the strand of the saw wire, a steel bus such as a piano wire is generally used, and the wire diameter of the strand is appropriately set according to the application and is not particularly limited, but is 0.1 mm to 0.2 mm. preferable. The element wire may be preliminarily plated with brass, copper, nickel or the like.

  The plating solution used for the wire plating treatment is not particularly limited, but is selected from the group consisting of nickel ions, cobalt ions, copper ions, gold ions, iron ions, palladium ions, platinum ions, tin ions and rhodium ions. Those containing one or more metal ions can be used, and particularly preferred is a metal plating solution containing nickel ions.

  In order to uniformly disperse the above-mentioned nanocarbon fiber-coated diamond fine particles in the plating solution, mechanical stirring by ultrasonic vibration is also possible, but the agglomeration / precipitation of diamond fine particles is suppressed, and the diamond in the plating solution In order to stably disperse the particles, it is preferable to add a surfactant as a dispersant. Examples of the surfactant to be added include anionic surfactants such as anionic and cationic surfactants, and nonionic surfactants. For example, in the case of an ionic surfactant, there are alkylbenzene sulfonate, dialkyldimethylammonium salt, and the like, and these may be appropriately selected depending on the ionic functional group introduced on the surface of diamond particles. As an alkyl group used here, it is a C1-C6 integer, such as methyl, ethyl, propyl, butyl, pentyl, hexyl.

  The amount of diamond particles added to the plating solution is preferably 0.5 to 10 g / liter in the composition in the plating solution. If plating is performed using a plating solution in which the added amount of diamond particles is adjusted within this range, the diamond particles can be uniformly dispersed in the metal plating film, and the optimum amount of diamond particles deposited during cutting can be arbitrarily set. It can also be adjusted.

  When a known electrolytic plating process is performed using the plating solution manufactured as described above, the element wire of the saw wire is subjected to an electrolytic plating process with respect to the plating solution in which diamond particles are stably dispersed. A metal plating film in which diamond particles are dispersed can be formed on the surface of the wire. And the nanocarbon fiber which coat | covers the surface of a diamond particle is taken in in a metal plating film, exhibits an anchor effect, and it becomes possible to raise the retention strength of a diamond particle.

  The present invention will be described in more detail with reference to examples below, but the present invention is not limited to these examples.

Example 1
1. Synthesis of vinyl ferrocene-methyl methacrylate copolymer [Poly (vinyl ferrocene-co-methyl methacrylate); poly (Vf-co-MMA)] Vinyl ferrocene (Vf; manufactured by Sigma-Aldrich Co.) was added to a polymerization test tube. 5.40 mmol, methyl methacrylate (MMA; manufactured by Kanto Chemical Co., Inc.) 48.0 mmol, 2,2′-azobisisobutyronitrile (AIBN; manufactured by Kanto Chemical Co., Ltd.) 0.54 mmol, toluene 5.0 ml of (manufactured by Kanto Chemical Co., Inc.) was added to form a vacuum sealed tube, and polymerized at 70 ° C. for 24 hours. After the polymerization treatment, the reaction solution was dropped into excess methanol (manufactured by Kanto Chemical Co., Inc.), and the produced Poly (Vf-co-MMA) was suction filtered. Thereafter, the obtained Poly (Vf-co-MMA) was dissolved again in toluene, the same operation was repeated twice, and then used after drying under reduced pressure.

The obtained poly (Vf-co-MMA) had a molecular weight of 1.3 × 10 ⁴ and a vinylferrocene content of 9.3 mol%.

2. Production of carbon nanotube-coated diamond particles (one-step method)
As shown in FIG. 1, 0.05 g of Poly (Vf-co-MMA) is added to a test tube equipped with a reflux condenser, and 0.025 g of multi-walled carbon nanotube (MW-CNT; manufactured by Nanocyl Ltd.) is used as a carbon nanotube. 0.1 g of diamond particles having a graphitized surface (GD; manufactured by Sumiishi Materials Co., Ltd.) are added, and then 92.4 mg of anhydrous aluminum chloride (AlCl ₃ ; manufactured by Kanto Chemical Co., Ltd.) and aluminum powder (Al; particles) 4.73 mg of 53 μm to 150 μm in diameter) and 10 ml of 1,4-dioxane (manufactured by Kanto Chemical Co., Inc.) as a reaction solvent were added.

  And it was made to graft-react at 80 degreeC for 24 hours, stirring with a magnetic stirrer in nitrogen stream. After the reaction, methanol was added to terminate the reaction by deactivating the activity of aluminum chloride. Moreover, the removal of aluminum in the product obtained after the reaction was performed by dispersing the product in a solvent by ultrasonic irradiation, and after several minutes, the precipitated aluminum was removed.

In addition, since the non-grafted polymer is also contained in the supernatant liquid, in order to remove this, the reaction product is dispersed in dioxane, which is a good solvent for the polymer, and subjected to ultrasonic cleaning for about 5 minutes, and then 1.5%. Centrifugation was performed at × 10 ⁴ rpm for about 40 minutes to remove the supernatant solution in which the non-grafted polymer was dissolved. This operation was repeated three times to remove the non-grafted polymer.

  Furthermore, the aluminum chloride contained in the product is removed by dissolving ultrasonically in 1 mol / liter dilute hydrochloric acid, and then centrifuging the supernatant to remove the supernatant. This was done by removing. The obtained carbon nanotube-coated diamond particles were sufficiently dried at 50 ° C. under reduced pressure. The unreacted carbon nanotubes were separated using the difference in specific gravity between the diamond fine particles and the carbon nanotubes.

  The surface of the obtained carbon nanotube-coated diamond fine particles was photographed with a scanning electron microscope (SEM; manufactured by JEOL Ltd.). FIG. 2A shows an image obtained by photographing the surface of diamond particles before treatment, and FIG. 2B shows an image obtained by photographing the surface of diamond particles after treatment. Comparing these images, it can be seen that the surfaces of the diamond particles are covered with carbon nanotubes.

(Example 2)
As shown in FIG. 3, carbon nanotube-coated diamond particles were produced by a two-step method in which Poly (Vf-co-MMA) and graphitized diamond particles (GD) were grafted and then reacted with carbon nanotubes (CNT).

1. Synthesis of Poly (Vf-co-MMA) Grafted Diamond Particles In a test tube equipped with a reflux condenser, 0.1 g of graphitized diamond particles (GD) used in Example 1 and Poly obtained in Example 1 were used. 0.05 g of (Vf-co-MMA) was added, then, as in Example 1, 92.4 mg of anhydrous aluminum chloride and 4.73 mg of aluminum powder, 10 ml of 1,4-dioxane as a reaction solvent were added, and a nitrogen stream was added. The grafting reaction was carried out at 80 ° C. for 24 hours while stirring with a magnetic stirrer. After the reaction, methanol was added to terminate the reaction by deactivating the activity of aluminum chloride. Moreover, the removal of aluminum in the product obtained after the reaction was performed by dispersing the product in a solvent by ultrasonic irradiation, and after several minutes, the precipitated aluminum was removed.

In addition, since the non-grafted polymer is also contained in the supernatant liquid, in order to remove this, the reaction product is dispersed in dioxane, which is a good solvent for the polymer, and subjected to ultrasonic cleaning for about 5 minutes, and then 1.5%. Centrifugation was performed at × 10 ⁴ rpm for about 40 minutes to remove the supernatant solution in which the non-grafted polymer was dissolved. This operation was repeated three times to remove the non-grafted polymer.

  Furthermore, the aluminum chloride contained in the product is removed by dissolving ultrasonically in 1 mol / liter dilute hydrochloric acid, and then centrifuging the supernatant to remove the supernatant. This was done by removing. The obtained Poly (Vf-co-MMA) grafted diamond particles were sufficiently dried at 50 ° C. under reduced pressure. The graft ratio of Poly (Vf-co-MMA) to diamond particles (mass% of grafted polymer with respect to diamond particles) was 32.7%.

2. Reaction of Poly (Vf-co-MMA) Grafted Diamond Particles with Carbon Nanotubes 0.05 g of Poly (Vf-co-MMA) grafted diamond particles obtained in a test tube equipped with a reflux condenser and Example 1 Then, 0.025 g of the carbon nanotube used in Example 1 was added, and then 92.4 mg of anhydrous aluminum chloride and 4.73 mg of aluminum powder and 10 ml of 1,4-dioxane as a reaction solvent were added in the same manner as in Example 1. The mixture was reacted at 80 ° C. for 24 hours while stirring with a magnetic stirrer. After the reaction, methanol was added to terminate the reaction by deactivating the activity of aluminum chloride. Moreover, the removal of aluminum in the product obtained after the reaction was performed in the same manner as described above.

  The unreacted carbon nanotubes were separated using the difference in specific gravity between the diamond particles and the carbon nanotubes as in Example 1. The surface of the obtained carbon nanotube-coated diamond particles was photographed with SEM. FIG. 4 shows a photographed image. From the photographed image, it can be seen that the surfaces of the diamond particles are covered with carbon nanotubes.

(Example 3)
As shown in FIG. 5, carbon nanotube-coated diamond particles were produced by a two-step method in which Poly (Vf-co-MMA) and carbon nanotubes (CNT) were grafted and then reacted with graphitized diamond particles (GD).

1. Synthesis of Poly (Vf-co-MMA) -grafted carbon nanotubes To a test tube equipped with a reflux condenser, 0.1 g of carbon nanotubes used in Example 1 and 0.1 g of Poly (Vf-co-MMA) were added, Subsequently, as in Example 1, 92.4 mg of anhydrous aluminum chloride and 4.73 mg of aluminum powder, 20 ml of 1,4-dioxane as a reaction solvent were added, and the mixture was stirred at 80 ° C. while stirring with a magnetic stirrer in a nitrogen stream. The grafting reaction was performed for 24 hours. After the reaction, methanol was added to terminate the reaction by deactivating the activity of aluminum chloride. Moreover, the removal of aluminum in the product obtained after the reaction was performed by dispersing the product in a solvent by ultrasonic irradiation, and after several minutes, the precipitated aluminum was removed.

In addition, since the non-grafted polymer is also contained in the supernatant liquid, in order to remove this, the reaction product is dispersed in dioxane, which is a good solvent for the polymer, and subjected to ultrasonic cleaning for about 5 minutes, and then 1.5%. Centrifugation was performed at × 10 ⁴ rpm for about 40 minutes to remove the supernatant solution in which the non-grafted polymer was dissolved. This operation was repeated three times to remove the non-grafted polymer.

  Furthermore, the aluminum chloride contained in the product is removed by dissolving ultrasonically in 1 mol / liter dilute hydrochloric acid, and then centrifuging the supernatant to remove the supernatant. This was done by removing. The obtained Poly (Vf-co-MMA) grafted carbon nanotubes were sufficiently dried at 50 ° C. under reduced pressure. The graft ratio of Poly (Vf-co-MMA) to carbon nanotubes (mass% of grafted polymer with respect to carbon nanotubes) was 54.5%.

2. Reaction of Poly (Vf-co-MMA) Grafted Carbon Nanotubes with Diamond Particles In a test tube equipped with a reflux condenser, 0.05 g of the obtained Poly (Vf-co-MMA) grafted carbon nanotubes and Example 1 were used. 0.05 g of the diamond particles used in Example 1 were added, and then 92.4 mg of anhydrous aluminum chloride and 4.73 mg of aluminum powder and 10 ml of 1,4-dioxane as a reaction solvent were added in the same manner as in Example 1 in a nitrogen stream. Then, the mixture was reacted at 80 ° C. for 24 hours while stirring with a magnetic stirrer. After the reaction, methanol was added to terminate the reaction by deactivating the activity of aluminum chloride. Also, the removal of aluminum in the product obtained after the reaction is carried out by 1. The same method was used. The unreacted carbon nanotubes were separated using the difference in specific gravity between the diamond particles and the carbon nanotubes, as in Example 1. The surface of the obtained carbon nanotube-coated diamond particles was photographed with SEM. FIG. 6 shows a photographed image. From the photographed image, it can be seen that the surfaces of the diamond particles are covered with carbon nanotubes.

Example 4
The produced carbon nanotube-coated diamond particles were dispersed in pure water at a concentration of 1 g / liter and sufficiently dispersed by ultrasonic treatment, and then a cationic surfactant (polydiallyldimethylammonium chloride) was added at 0.02 g / liter. It added so that it might become the density | concentration of liter, and also fully disperse | distributed by the ultrasonic treatment.

The obtained dispersion liquid in which the fine diamond particles and the surfactant were uniformly dispersed was added to the metal plating solution to prepare a plating solution having the following composition.
Nickel sulfate tetrahydrate 500 g / liter Nickel chloride 5 g / liter Boric acid 10 g / liter Carbon nanotube-coated diamond particles 10 g / liter

  The prepared plating solution was adjusted to pH 5.0 by appropriately adding sulfamic acid or nickel carbonate solution. Next, the temperature of the plating solution was raised to 60 ° C. (use temperature of the plating solution). At this time, the carbon nanotube-coated diamond fine particles in the plating solution are maintained in a good dispersion state by stirring, and the produced plating solution can maintain a stable dispersion state even when the temperature is raised to the use temperature. It could be confirmed. The dispersion state was confirmed by visual inspection for the presence or absence of precipitates due to aggregation or suspended matter.

Using the prepared carbon nanotube-coated diamond particle-containing plating solution, piano wire (wire diameter 0.12 mm; manufactured by Toxen Industries Co., Ltd.) is degreased, ground, diamond particle fixed plating treatment (current density: 1 A / dm ² ), Finally, the abrasive grains were fixed by finish plating (current density: 3 A / dm ² ) to produce a saw wire.

The obtained saw wire and the conventional saw wire were cut into a silicon ingot using a single wire saw (manufactured by Takatori Co., Ltd.), thereby verifying the improvement of the abrasive grain holding power. Cutting conditions are as follows.
<Single crystal silicon cutting conditions>
・ Work size Diameter 150mm x Length 125mm
・ Wire specification Diameter 0.12mm
・ Fixed diamond particle diameter 10μm ~ 20μm
・ Line speed 800m / min ・ Wire pitch 1.0mm
・ Tension 20N
・ Coolant Yushiro Chemical Co., Ltd. ・ Single Wire Saw WSD-K2 (manufactured by Takatori Corporation)
・ Cutting time 30 minutes ・ Wire feed rate 0.3 m / min

  As an evaluation method, the amount of movement of silicon was set to 30 mm / time, cutting was performed at an ascending / descending speed of 1.2 mm / minute, and this was repeated three times, and the number of remaining diamond abrasive grains on the surface of the saw wire was observed. As a result, the saw wire obtained in comparison with the conventional product had a large amount of diamond particles on the surface, and an improvement in the retention of diamond particles during cutting was recognized.

Claims (5)

  A nanocarbon fiber in which the surface of the diamond particle is coated with the nanocarbon fiber through the ferrocene-containing polymer through a ligand exchange reaction between the aromatic ring on the surface of the graphitized diamond particle and the ferrocene-containing polymer in the presence of the nanocarbon fiber. A method for producing coated diamond particles.   The manufacturing method according to claim 1, wherein the diamond particles have an average particle diameter of 1 μm to 1000 μm.   The manufacturing method according to claim 1 or 2, wherein a thickness of the graphite layer on the surface of the diamond particles is 0.1 nm to 100 nm.   The manufacturing method according to any one of claims 1 to 3, wherein the nanocarbon fiber has a fiber diameter of 1 nm to 200 nm and an aspect ratio of 1 to 500.   A saw wire on which a plating film in which nano-carbon fiber-coated diamond particles produced by the production method according to claim 1 are dispersed on a surface is formed.