JP2015145024A - Fume recovery device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fume recovery device which achieves high fume recovery efficiency.SOLUTION: A first suction part 31 is capable of suctioning an atmosphere in a preheating zone 12. A second suction part 32 is capable of suctioning an atmosphere in a heating zone 13. A third suction part 33 is capable of suctioning an atmosphere in a cooling zone 14. A first recovery part 41 is capable of recovering fume contained in the atmosphere suctioned by the first suction part 31. A second recovery part 42 is capable of recovering fume contained in the atmosphere suctioned by the second suction part 32. A third recovery part 43 is capable of recovering fume contained in the atmosphere suctioned by the third suction part 33.

Description

  The present invention relates to a fume collecting device that collects fumes generated in a soldering device.

  2. Description of the Related Art Conventionally, a fume recovery apparatus that recovers fumes generated in a reflow furnace of a soldering apparatus is known. For example, in the fume recovery device of Patent Document 1, a suction unit is provided in the heating zone of the reflow furnace, and the atmosphere in the heating zone is suctioned by the suction unit to recover the fume.

Japanese Patent Laid-Open No. 7-212031

  In the fume recovery device of Patent Document 1, a suction unit is provided only in the heating zone among the preheating zone and the heating zone of the reflow furnace. Therefore, it becomes difficult to collect the fumes generated particularly in the preheating zone, and there is a possibility that the recovery efficiency of the fumes generated in the soldering apparatus is lowered. When the recovery efficiency of the fumes decreases, the amount of fumes adhering to the inside of the soldering apparatus increases, which may increase the cleaning time and the number of cleanings of the soldering apparatus. As a result, the operation rate of the soldering apparatus may be reduced.

  Moreover, in the fume collection device of Patent Document 1, it is necessary to increase the suction force of the suction unit to a predetermined value or more in order to increase the collection efficiency of the fume generated in the preheating zone. However, since the suction part is provided only in the heating zone, if the suction force of the suction part is increased to a predetermined value or more, it may be difficult to manage the oxygen concentration of the atmosphere in each zone.

  Furthermore, in the fume collection device of Patent Document 1, the suction part is formed to have a large length from the suction port through which the atmosphere flows to the collection part for collecting the fume. Therefore, the temperature of the atmosphere is lowered in the middle of the suction part, and there is a possibility that the agglomerated fumes adhere to the inside of the suction part. If fume adheres to the inside of the suction portion, the flow passage area of the suction portion may be reduced and suction efficiency may be reduced. In order to recover the suction efficiency of the suction part, it is necessary to clean the fumes adhering to the inside of the suction part.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a fume collection device having high fume collection efficiency.

The present invention is a fume recovery device capable of recovering fumes generated in a soldering device, and includes a first suction part, a second suction part, a third suction part, a first recovery part, a second recovery part, and a third recovery part. Department.
A soldering apparatus to which the fume recovery apparatus of the present invention is applied includes a transport rail, a preheating zone, a heating zone, and a cooling zone. The transport rail transports the substrate. The preheating zone is provided so as to cover the transport rail, has an inlet, and preheats the substrate transported by the transport rail via the inlet. The heating zone covers the conveyance rail and is connected to the side opposite to the inlet of the preheating zone, and heats the substrate conveyed from the preheating zone by the conveyance rail and solders the components. The cooling zone covers the transport rail, connects to the opposite side of the heating zone to the preheating zone, has an outlet on the opposite side of the heating zone, is transported from the heating zone by the transport rail, and is transported to the outside via the outlet The substrate to be cooled is cooled.

The first suction unit can suck the atmosphere in the preheating zone. The second suction unit can suck the atmosphere in the heating zone. The third suction unit can suck the atmosphere in the cooling zone.
The first recovery part can recover fumes contained in the atmosphere sucked by the first suction part. The second recovery part can recover fumes contained in the atmosphere sucked by the second suction part. The third recovery part can recover fumes contained in the atmosphere sucked by the third suction part.

  In the present invention, the first suction unit and the first recovery unit, the second suction unit and the second recovery unit, and the third suction unit and the first corresponding to the preheating zone, the heating zone, and the cooling zone of the soldering apparatus, respectively. Three recovery units are provided. Therefore, the collection efficiency of fumes generated in the soldering apparatus can be increased. Thereby, the quantity of the fume adhering inside each zone of a soldering apparatus can be reduced, and the cleaning time and the frequency | count of cleaning of a soldering apparatus can be reduced. As a result, the operating rate of the soldering apparatus can be improved.

  In the present invention, since the first suction part, the second suction part, and the third suction part are provided corresponding to each of the preheating zone, the heating zone, and the cooling zone of the soldering apparatus, the suction force of each suction part is increased. It can be set below a predetermined value. Therefore, the oxygen concentration of the atmosphere in each zone of the soldering apparatus can be easily managed.

The schematic diagram which shows the fume collection | recovery apparatus by one Embodiment of this invention. (A) is the perspective view which shows the tool of the fume collection | recovery apparatus by one Embodiment of this invention, and its vicinity, (B) is the figure which looked at (A) from the arrow B direction. Sectional drawing which shows the 2nd suction | inhalation part of the fume collection | recovery apparatus by one Embodiment of this invention, a 2nd collection | recovery part, and its vicinity.

Hereinafter, a fume recovery device according to an embodiment of the present invention will be described with reference to the drawings.
(One embodiment)

  A fume recovery device according to an embodiment of the present invention is shown in FIG. The fume collecting apparatus 1 is applied to the soldering apparatus 10 and is used to collect fumes generated when the component 3 is soldered to the substrate 2 by the soldering apparatus 10. Here, the board | substrate 2 is used for the electronic control unit, meter, etc. which control each part of a vehicle, for example. The component 3 is an electronic component such as a semiconductor module or a capacitor. In the present embodiment, the component 3 is a surface mount type component (SMD).

First, the soldering apparatus 10 to which the fume recovery apparatus 1 is applied will be described. The soldering apparatus 10 includes a transport rail 11, a preheating zone 12, a heating zone 13, a cooling zone 14, and the like.
The transport rail 11 is configured, for example, by arranging two long members so as to be parallel to each other. The transport rail 11 transports the substrate 2 in the longitudinal direction from one end to the other end.

The preheating zone 12, the heating zone 13, and the cooling zone 14 are each a part of a reflow furnace of the soldering apparatus 10.
The preheating zone 12 is provided so as to cover the transport rail 11 and has an inlet 121 at one end. The preheating zone 12 preheats the board | substrate 2 conveyed via the inlet 121 by the conveyance rail 11, for example by sending a hot air from the ventilation part which is not shown in figure.

  The heating zone 13 is provided so as to cover the transport rail 11 and to be connected to the side opposite to the inlet 121 of the preheating zone 12. The heating zone 13 heats the board | substrate 2 conveyed from the preheating zone 12 with the conveyance rail 11, for example by sending a hot air from the ventilation part 20 (refer FIG. 3), and solders the components 3. FIG.

  The cooling zone 14 covers the transport rail 11, is connected to the heating zone 13 on the opposite side to the preheating zone 12, and has an outlet 141 on the opposite side to the heating zone 13. The cooling zone 14 cools the board | substrate 2 conveyed from the heating zone 13 by the conveyance rail 11 and conveyed outside via the exit 141, for example by sending cold air from the ventilation part which is not shown in figure.

Thus, the soldering apparatus 10 is an apparatus for soldering, for example, the surface-mounted component 3 to the mounting surface of the substrate 2 by reflow. In the preheating zone 12, the heating zone 13, and the cooling zone 14, fumes are generated by evaporating the resin, activator, solvent, and the like contained in the flux from the solder paste 4 between the substrate 2 and the component 3 (FIG. 2). (See (B)).
The fume collection device 1 according to the present embodiment is a device for collecting fume generated in the soldering device 10 described above.

In the present embodiment, the soldering apparatus 10 further includes a gas introduction unit 15 and a concentration sensor 16.
The gas introduction unit 15 introduces nitrogen (gas) into the heating zone 13, the preheating zone 12, and the cooling zone 14 by, for example, jetting nitrogen into the heating zone 13. The concentration sensor 16 is provided, for example, in the heating zone 13 and detects the concentration of oxygen in the atmosphere in the heating zone 13. In the present embodiment, nitrogen is introduced from the gas introduction unit 15 into the heating zone 13, the preheating zone 12, and the cooling zone 14 in accordance with the oxygen concentration detected by the concentration sensor 16. Thereby, the oxygen concentration of the atmosphere in the heating zone 13, the preheating zone 12, and the cooling zone 14 is kept constant. As a result, the heating zone 13, the preheating zone 12, and the cooling zone 14 can be maintained in an environment suitable for soldering.

The fume collection device 1 includes a first suction unit 31, a second suction unit 32, a third suction unit 33, a first collection unit 41, a second collection unit 42, a third collection unit 43, tools 51 and 52, a heater 61, The heat insulating material 62, the induction | guidance | derivation part 63, the heat exchanger 70, the filters 73 and 74, the gas curtain part 80, etc. are provided.
The first suction unit 31 is provided, for example, in the preheating zone 12 and can suck the atmosphere in the preheating zone 12. The second suction unit 32 is provided in, for example, the heating zone 13 and can suck the atmosphere in the heating zone 13. The third suction part 33 is provided in the cooling zone 14, for example, and can suck the atmosphere in the cooling zone 14.

  Here, the first suction part 31 is formed in a cylindrical shape or a tubular shape, and is provided so that a first suction port 34 that is an inlet of an atmosphere to be sucked is positioned on the upper side in the vertical direction of the preheating zone 12. The second suction part 32 is formed in a cylindrical shape or a tubular shape, and is provided so that the second suction port 35 that is an inlet for the atmosphere to be sucked is positioned on the upper side in the vertical direction of the heating zone 13. The third suction portion 33 is formed in a cylindrical shape or a tubular shape, and is provided such that a third suction port 36 that is an inlet of an atmosphere to be sucked is positioned on the upper side in the vertical direction of the cooling zone 14.

  The first recovery part 41 is formed in a cylindrical shape or a tubular shape, and is provided so that one end thereof is connected to the side opposite to the first suction port 34 of the first suction part 31, and is in an atmosphere sucked by the first suction part 31. The contained fumes can be recovered. The second recovery part 42 is formed in a cylindrical shape or a tubular shape, and is provided so that one end thereof is connected to the side opposite to the second suction port 35 of the second suction part 32, and is in an atmosphere sucked by the second suction part 32. The contained fumes can be recovered. The third recovery portion 43 is formed in a cylindrical shape or a tubular shape, and is provided so that one end thereof is connected to the side opposite to the third suction port 36 of the third suction portion 33, and is in an atmosphere sucked by the third suction portion 33. The contained fumes can be recovered.

  The tools 51 and 52 are provided, for example, in the heating zone 13 and separate a surface (mounting surface) on which the component 3 of the substrate 2 is soldered from an outer side in the surface direction of the substrate 2. In the present embodiment, the tools 51 and 52 are formed in, for example, a plate shape, and are provided so as to be parallel to the transport direction of the substrate 2 and to face each other. As shown in FIG. 2, when the component 3 on the substrate 2 is soldered in the heating zone 13, the lifting unit 17 of the soldering apparatus 10 lifts the substrate 2 so as to move upward in the vertical direction. As a result, the end of the mounting surface of the substrate 2 comes into contact with the lower end surfaces of the tools 51 and 52. As a result, at the time of soldering the component 3, the substrate 2 is separated from the surface (mounting surface) to which the component 3 is soldered from the surface direction outside of the substrate 2 by the tools 51 and 52. Therefore, it is possible to suppress fumes generated from the solder paste 4 during soldering of the component 3 from being scattered to the outside in the surface direction of the substrate 2.

  The heater 61 is, for example, an electric heater capable of generating heat, and is provided in each of the first suction unit 31, the second suction unit 32, and the third suction unit 33. That is, a total of three heaters 61 are provided in the fume collection device 1. The heater 61 can heat the atmosphere sucked by the first suction unit 31, the second suction unit 32, or the third suction unit 33. FIG. 3 shows an example in which the heater 61 is provided inside the second suction part 32.

  The heat insulating material 62 is a heat insulating material such as glass wool, and is provided in each of the first suction portion 31, the second suction portion 32, and the third suction portion 33. That is, a total of three heat insulating materials 62 are provided in the fume collecting apparatus 1. The heat insulating material 62 can block the movement of heat between the inside and outside of the first suction part 31, the second suction part 32, or the third suction part 33. FIG. 3 shows an example in which the heat insulating material 62 is provided outside the second suction part 32.

  The guide part 63 is formed in a plate shape, for example, and is provided in each of the first suction part 31, the second suction part 32, and the third suction part 33. That is, a total of three guiding units 63 are provided in the fume collecting device 1. The guiding portion 63 can be guided so that the atmosphere sucked by the first suction portion 31, the second suction portion 32, or the third suction portion 33 flows while turning. FIG. 3 shows an example in which the guide part 63 is provided inside the second suction part 32.

  The heat exchanger 70 is provided in each of the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43. That is, a total of three heat exchangers 70 are provided in the fume recovery apparatus 1. The heat exchanger 70 can cool the atmosphere sucked by the first suction unit 31, the second suction unit 32, or the third suction unit 33. FIG. 3 shows an example in which the heat exchanger 70 is provided in the second recovery unit 42. The heat exchanger 70 includes a heat exchange unit 71, a chiller 72, and the like.

  The heat exchange part 71 has a flow path inside, for example, and has heat radiating fins on the outer wall. The chiller 72 can flow cooling water through the flow path of the heat exchange unit 71. Thereby, the atmosphere around the heat exchange unit 71 is cooled. Here, the fumes in the cooled atmosphere aggregate.

  The filters 73 and 74 are formed of, for example, a nonwoven fabric or the like, and are provided in each of the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43. That is, a total of three filters 73 and 74 are provided in the fume collection device 1 respectively. The filters 73 and 74 can collect fumes aggregated in the atmosphere. FIG. 3 shows an example in which the filters 73 and 74 are provided inside the second collection unit 42.

  In the present embodiment, the filters 73 and 74 are provided on the opposite side of the second suction unit 32 with respect to the heat exchange unit 71 of the second recovery unit 42. The filters 73 and 74 are provided so as to be arranged in series in the flow direction of the atmosphere in the first recovery part 41, the second recovery part 42, or the third recovery part 43 (see FIG. 3).

  In the present embodiment, a fan 37 is provided in each of the first recovery part 41, the second recovery part 42, and the third recovery part 43. The fan 37 is provided inside the other end of each of the first recovery part 41, the second recovery part 42, and the third recovery part 43. FIG. 3 shows an example in which the fan 37 is provided inside the other end of the second recovery part 42. When the fan 37 rotates, the atmosphere in the preheating zone 12, the heating zone 13, and the cooling zone 14 changes from the first suction port 34, the second suction port 35, and the third suction port 36 to the first suction unit 31 and the second suction unit. 32, suctioned by the third suction part 33 and guided to the first recovery part 41, the second recovery part 42, and the third recovery part 43.

  In the present embodiment, the fume collection device 1 further includes a circulation unit 38. The circulation unit 38 includes the other ends of the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43, the air blowing unit in the preheating zone 12, the air blowing unit 20 in the heating zone 13, and the air blowing unit in the cooling zone 14. Is connected.

  The blower part of the preheating zone 12 and the blower part 20 of the heating zone 13 have a main body 21, a fan 22, a heater 23, a blower nozzle 24, a suction hole 25, and the like (see FIG. 3). On the other hand, the air blower in the cooling zone 14 does not have the heater 23, but has a main body 21, a fan 22, a blower nozzle 24, a suction hole 25, and the like (not shown).

  The fan 22 and the heater 23 are provided in the main body 21. The ends of the circulation unit 38 opposite to the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43 are connected to the main body 21, and therefore, the first recovery unit 41, the second recovery unit 42, the atmosphere in the third recovery unit 43 can flow into the main body 21 via the circulation unit 38. The heater 23 is an electric heater capable of generating heat, for example. When the fan 22 rotates, the atmosphere that has passed through the heater 23 becomes hot air and is ejected from the blower nozzle 24. In the present embodiment, for example, the air blowing nozzle 24 of the air blowing unit 20 in the heating zone 13 is provided in the main body 21 so that the jet outlet (end portion) for jetting hot air is positioned relatively close to the component 3.

  In the present embodiment, the main body 21 is provided with a plurality of suction holes 25 for sucking the atmosphere between the plurality of blower nozzles 24. When the fan 37 rotates, the atmosphere in the preheating zone 12, the heating zone 13, and the cooling zone 14 passes through the suction hole 25, the main body 21, the first suction port 34, the second suction port 35, and the third suction port 36, respectively. Thus, the suction is performed by the first suction unit 31, the second suction unit 32, and the third suction unit 33.

  As described above, the circulation unit 38 circulates (circulates) the atmosphere via the filters 73 and 74 into the preheating zone 12, the heating zone 13, or the cooling zone 14. Therefore, the amount of nitrogen or the like introduced from the gas introduction unit 15 into the preheating zone 12, the heating zone 13, or the cooling zone 14 can be reduced.

The gas curtain unit 80 has an injection port 81, a suction port 82, and the like.
The injection port 81 is provided, for example, on the upper side in the vertical direction of the inlet 121 and the outlet 141 of the soldering apparatus 10, and can inject a gas such as nitrogen toward the lower side in the vertical direction along the opening surfaces of the inlet 121 and the outlet 141. It is. The suction port 82 is provided, for example, below the inlet 121 and the outlet 141 in the vertical direction, and can suck nitrogen or the like sprayed from the spray port 81. The gas curtain unit 80 injects nitrogen or the like from the injection port 81 and sucks nitrogen or the like through the suction port 82, so that the inside of the preheating zone 12, the heating zone 13, and the cooling zone 14 via the inlet 121 or the outlet 141. Outflow to the outside of the atmosphere can be suppressed. Further, the gas curtain unit 80 can suppress the air outside the soldering apparatus 10 from flowing into the preheating zone 12, the heating zone 13, and the cooling zone 14 via the inlet 121 or the outlet 141. Thereby, the fluctuation | variation of the oxygen concentration in the preheating zone 12, the heating zone 13, or the cooling zone 14 can be suppressed.

  As described above, (1) the soldering device 10 to which the fume recovery device 1 of the present embodiment is applied includes the transport rail 11, the preheating zone 12, the heating zone 13, and the cooling zone 14. The transport rail 11 transports the substrate 2. The preheating zone 12 is provided so as to cover the transport rail 11, has an inlet 121, and preheats the substrate 2 transported by the transport rail 11 via the inlet 121. The heating zone 13 covers the conveyance rail 11 and is connected to the side opposite to the inlet 121 of the preheating zone 12, and heats the substrate 2 conveyed from the preheating zone 12 by the conveyance rail 11 to solder the component 3. The cooling zone 14 covers the conveyance rail 11, is connected to the heating zone 13 on the opposite side to the preheating zone 12, has an outlet 141 on the opposite side to the heating zone 13, and is conveyed from the heating zone 13 by the conveyance rail 11. The substrate 2 conveyed outside through the outlet 141 is cooled.

  The first suction unit 31 can suck the atmosphere in the preheating zone 12. The second suction unit 32 can suck the atmosphere in the heating zone 13. The third suction unit 33 can suck the atmosphere in the cooling zone 14.

  The first recovery unit 41 can recover the fumes contained in the atmosphere sucked by the first suction unit 31. The second recovery unit 42 can recover the fumes contained in the atmosphere sucked by the second suction unit 32. The third recovery unit 43 can recover the fumes contained in the atmosphere sucked by the third suction unit 33.

  In the present embodiment, the first suction unit 31 and the first recovery unit 41, and the second suction unit 32 and the second recovery unit 42 correspond to the preheating zone 12, the heating zone 13, and the cooling zone 14 of the soldering apparatus 10, respectively. And the 3rd suction part 33 and the 3rd recovery part 43 are provided. Therefore, the recovery efficiency of fumes generated in the soldering apparatus 10 can be increased. Thereby, the quantity of the fume adhering inside each zone of the soldering apparatus 10 can be reduced, and the cleaning time and the frequency | count of cleaning of the soldering apparatus 10 can be reduced. As a result, the operating rate of the soldering apparatus 10 can be improved.

  Moreover, in this embodiment, since the 1st suction part 31, the 2nd suction part 32, and the 3rd suction part 33 are provided corresponding to each of the preheating zone 12, the heating zone 13, and the cooling zone 14 of the soldering apparatus 10. The suction force of each suction part can be set to a predetermined value or less. Therefore, the oxygen concentration of the atmosphere in each zone of the soldering apparatus 10 can be easily managed.

  (2) In the present embodiment, the first suction part 31 is provided so that the first suction port 34 that is an inlet of the atmosphere to be sucked is positioned above the preheating zone 12 in the vertical direction. The second suction part 32 is provided so that the second suction port 35, which is an inlet for the atmosphere to be sucked, is positioned on the upper side in the vertical direction of the heating zone 13. The third suction part 33 is provided so that the third suction port 36, which is an inlet for the atmosphere to be sucked, is positioned above the cooling zone 14 in the vertical direction. Since the atmosphere having a high temperature moves upward in the vertical direction, the atmosphere can be efficiently sucked by the first suction port 34, the second suction port 35, and the third suction port 36.

  (3) In the present embodiment, tools 51 and 52 are further provided. The tools 51 and 52 are provided in the heating zone 13 of the soldering apparatus 10, and separate the surface on which the component 3 of the substrate 2 is soldered from the outside in the surface direction of the substrate 2. Thereby, when the component 3 is soldered in the heating zone 13, it is possible to prevent the fumes generated from the solder paste 4 from scattering to the outside in the surface direction of the substrate 2. Therefore, it is possible to suppress fume from adhering to the inside of the heating zone 13.

  Moreover, (4) In this embodiment, the heater 23 is further provided. The heater 23 is provided in each of the first suction part 31, the second suction part 32, and the third suction part 33, and heats the atmosphere sucked by the first suction part 31, the second suction part 32, or the third suction part 33. Is possible. Accordingly, the temperature of the atmosphere flowing through the first suction unit 31, the second suction unit 32, or the third suction unit 33 is lowered, and fume is generated in the first suction unit 31, the second suction unit 32, or the third suction unit 33. Can be prevented from aggregating. Therefore, it is possible to suppress fume from adhering to the inside of the first suction unit 31, the second suction unit 32, or the third suction unit 33.

  Moreover, (5) In this embodiment, the heat insulating material 62 is further provided. The heat insulating material 62 is provided in each of the first suction unit 31, the second suction unit 32, and the third suction unit 33, and the inner side and the outer side of the first suction unit 31, the second suction unit 32, or the third suction unit 33. It is possible to block the heat transfer. Accordingly, the temperature of the atmosphere flowing through the first suction unit 31, the second suction unit 32, or the third suction unit 33 is lowered, and fume is generated in the first suction unit 31, the second suction unit 32, or the third suction unit 33. Can be prevented from aggregating. Therefore, it is possible to suppress fume from adhering to the inside of the first suction unit 31, the second suction unit 32, or the third suction unit 33.

  Moreover, (6) In this embodiment, the guidance | induction part 63 is further provided. The guide part 63 is provided in each of the first suction part 31, the second suction part 32, and the third suction part 33, and the atmosphere sucked by the first suction part 31, the second suction part 32, or the third suction part 33 is provided. It can be guided to flow while turning. Thereby, the fumes in the atmosphere flow in the vicinity of the central axis of the first suction unit 31, the second suction unit 32, or the third suction unit 33, and the first recovery unit 41, the second recovery unit 42, or the third recovery unit 43. Led to. Therefore, it is possible to suppress fume from adhering to the inside of the first suction unit 31, the second suction unit 32, or the third suction unit 33.

  Moreover, (7) In this embodiment, the heat exchanger 70 is further provided. The heat exchanger 70 is provided in each of the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43, and is sucked by the first suction unit 31, the second suction unit 32, or the third suction unit 33. The atmosphere can be cooled. Thereby, the fumes contained in the atmosphere can be forcibly aggregated. As a result, the fume collection efficiency in the first collection unit 41, the second collection unit 42, and the third collection unit 43 can be improved.

  (8) In the present embodiment, filters 73 and 74 are further provided. The filters 73 and 74 are provided in each of the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43, and can collect fumes aggregated in the atmosphere. Thereby, the fume collection efficiency in the first collection unit 41, the second collection unit 42, and the third collection unit 43 can be improved.

  (9) In this embodiment, a plurality (73, 74) of filters (73, 74) are provided for any one of the first recovery unit 41, the second recovery unit 42, and the third recovery unit 43. ing. As a result, the fume recovery efficiency can be further improved.

  (10) In the present embodiment, the filters 73 and 74 are provided so as to be arranged in series in the flow direction of the atmosphere in the first recovery unit 41, the second recovery unit 42, or the third recovery unit 43. ing. Therefore, it is possible to further improve the fume recovery efficiency.

  Moreover, (11) In this embodiment, the circulation part 38 is further provided. The circulation unit 38 discharges and circulates the atmosphere via the filters 73 and 74 into the preheating zone 12, the heating zone 13, or the cooling zone 14. Therefore, the amount of nitrogen or the like introduced from the gas introduction unit 15 into the preheating zone 12, the heating zone 13, or the cooling zone 14 can be reduced.

  Moreover, (12) In this embodiment, the gas curtain part 80 is further provided. The gas curtain unit 80 is provided at the inlet 121 and the outlet 141 of the soldering apparatus 10 and has an injection port 81 through which a gas such as nitrogen can be injected. The gas curtain unit 80 injects a gas such as nitrogen from the injection port 81 along the opening surfaces of the inlet 121 and the outlet 141, whereby the preheating zone 12, the heating zone 13, and the cooling zone 14 that pass through the inlet 121 or the outlet 141. The outflow to the outside of the atmosphere inside can be suppressed. Further, the gas curtain unit 80 can suppress the air outside the soldering apparatus 10 from flowing into the preheating zone 12, the heating zone 13, and the cooling zone 14 via the inlet 121 or the outlet 141. Thereby, the fluctuation | variation of the oxygen concentration in the preheating zone 12, the heating zone 13, or the cooling zone 14 can be suppressed.

  (13) In the present embodiment, the gas curtain unit 80 further includes a suction port 82 capable of sucking the gas ejected from the ejection port 81. Thereby, if nitrogen etc. which were suck | inhaled from the suction inlet 82 are again injected from the injection outlet 81, consumption of nitrogen etc. by the gas curtain part 80 can be reduced.

(Other embodiments)
In another embodiment of the present invention, the first suction part may be provided such that the first suction port is located at a position other than the upper side in the vertical direction of the preheating zone. The second suction part may be provided such that the second suction port is located at a position other than the upper side in the vertical direction of the heating zone. The third suction part may be provided such that the third suction port is located at a position other than the upper side in the vertical direction of the cooling zone.

  In the above-described embodiment, an example is shown in which the tools (51, 52) are provided so as to be parallel to the substrate transport direction and to face each other. On the other hand, in another embodiment of the present invention, the tools may be provided so as to be perpendicular to the substrate transport direction and to face each other. Further, any number of tools may be provided in any posture as long as the surface (mounting surface) on which the components of the substrate are soldered is separated from the outside in the surface direction of the substrate.

  Further, in the above-described embodiment, when soldering the components on the board in the heating zone, the lifting part of the soldering device lifts the board to move upward in the vertical direction, and the end of the board mounting surface is below the tool. The example which contact | abuts to an end surface was shown. On the other hand, in another embodiment of the present invention, when the lifting unit lifts the substrate to move vertically upward, the side surface, which is the wall surface perpendicular to the mounting surface of the substrate, abuts or faces the tool. Also good. Further, the soldering apparatus does not include an elevating unit that elevates and lowers the substrate, and the fume collecting apparatus may elevate the tool and separate the mounting surface of the substrate from the outer side in the surface direction of the substrate.

In another embodiment of the present invention, the heater may be provided in at least one of the first suction part, the second suction part, and the third suction part. Moreover, the fume collection | recovery apparatus does not need to be provided with the heater.
Moreover, in other embodiment of this invention, a heat insulating material is good also as being provided in at least any one of a 1st suction part, a 2nd suction part, and a 3rd suction part. Moreover, the fume collection | recovery apparatus does not need to be equipped with the heat insulating material.

Further, in another embodiment of the present invention, the guide part may be provided in at least one of the first suction part, the second suction part, and the third suction part. Further, the fume recovery device may not include the guiding unit.
In another embodiment of the present invention, the heat exchanger may be provided in at least one of the first suction part, the second suction part, and the third suction part. Moreover, the fume collection | recovery apparatus does not need to be provided with the heat exchanger.

In another embodiment of the present invention, the filter may be provided in at least one of the first suction unit, the second suction unit, and the third suction unit.
In another embodiment of the present invention, one or three or more filters are provided per at least one of the first recovery unit, the second recovery unit, and the third recovery unit. It may be.

In another embodiment of the present invention, the filter may be provided so as to be arranged in parallel in the flow direction of the atmosphere in the first recovery unit, the second recovery unit, or the third recovery unit, for example. Further, the fume recovery device may not include a filter.
Moreover, in other embodiment of this invention, the fume collection | recovery apparatus does not need to be provided with the circulation part.

Moreover, in other embodiment of this invention, the gas curtain part does not need to have an inlet.
Moreover, in other embodiment of this invention, a gas curtain part is good also as injecting gas other than nitrogen from an injection port. Moreover, the fume collection | recovery apparatus does not need to be provided with the gas curtain part.

In another embodiment of the present invention, the gas introduction unit may introduce a gas other than nitrogen into the heating zone. The gas introduction unit may introduce a gas such as nitrogen into the preheating zone or the cooling zone. Further, the soldering apparatus may not include the gas introduction unit and the concentration sensor. Moreover, the conveyance rail of the soldering apparatus may have a heater that can heat the substrate.
Thus, the present invention is not limited to the above-described embodiment, and can be implemented in various forms without departing from the gist thereof.

DESCRIPTION OF SYMBOLS 1 ... Fume collection device 2 ... Board 3 ... Component 10 ... Soldering device 11 ... Transfer rail 12 ... Preheating zone 121 ... Entrance 13 ... Heating zone 14・ ・ ・ Cooling zone 141 ・ ・ Outlet 31 ・ ・ ・ First suction part 32 ・ ・ ・ Second suction part 33 ・ ・ ・ Third suction part 41 ・ ・ ・ First recovery part 42 ・ ・ ・ Second recovery part 43 ... Third recovery unit

Claims (13)

A transport rail (11) for transporting the substrate (2);
A preheating zone (12) provided to cover the transport rail, having an inlet (121), and preheating the substrate transported by the transport rail via the inlet;
A heating zone (13) that covers the conveying rail, is connected to the opposite side of the inlet of the preheating zone, heats the substrate conveyed from the preheating zone by the conveying rail, and solders the component (3); ,
Covering the transport rail, connected to the heating zone on the opposite side of the preheating zone, and having an outlet (141) on the opposite side of the heating zone, transported from the heating zone by the transport rail to the outlet A cooling zone (14) for cooling the substrate transported to the outside via,
A fume collecting device (1) capable of collecting fumes generated by a soldering device (10) comprising:
A first suction section (31) capable of sucking the atmosphere in the preheating zone;
A second suction part (32) capable of sucking the atmosphere in the heating zone;
A third suction part (33) capable of sucking the atmosphere in the cooling zone;
A first recovery part (41) capable of recovering fumes contained in the atmosphere sucked by the first suction part;
A second recovery part (42) capable of recovering fumes contained in the atmosphere sucked by the second suction part;
A third recovery part (43) capable of recovering fumes contained in the atmosphere sucked by the third suction part;
A fume recovery device. The first suction part is provided such that a first suction port (34) that is an inlet of an atmosphere to be sucked is positioned on the upper side in the vertical direction of the preheating zone,
The second suction part is provided such that a second suction port (35), which is an inlet of the atmosphere to be sucked, is positioned on the upper side in the vertical direction of the heating zone,
2. The fume according to claim 1, wherein the third suction part is provided such that a third suction port (36), which is an inlet of an atmosphere to be sucked, is positioned above the cooling zone in the vertical direction. Recovery device.   3. The tool according to claim 1, further comprising a tool (51, 52) provided in the heating zone and separating a surface on which the component of the substrate is soldered and an outer surface in the surface direction of the substrate. Fume collection device.   An atmosphere provided in at least one of the first suction unit, the second suction unit, and the third suction unit, and heated by the first suction unit, the second suction unit, or the third suction unit. The fume recovery device according to any one of claims 1 to 3, further comprising a possible heater (61).   Provided in at least one of the first suction part, the second suction part, and the third suction part, and the inner side and the outer side of the first suction part, the second suction part, or the third suction part. The fume recovery device according to any one of claims 1 to 4, further comprising a heat insulating material (62) capable of blocking heat transfer.   The atmosphere sucked by the first suction unit, the second suction unit, or the third suction unit is provided in at least one of the first suction unit, the second suction unit, and the third suction unit. The fume recovery device according to any one of claims 1 to 5, further comprising a guide portion (63) that can be guided to flow while flowing.   An atmosphere that is provided in at least one of the first recovery unit, the second recovery unit, and the third recovery unit, and is sucked by the first suction unit, the second suction unit, or the third suction unit. The fume recovery device according to any one of claims 1 to 6, further comprising a heat exchanger (70) capable of being cooled.   A filter (73, 74) provided in at least one of the first recovery unit, the second recovery unit, and the third recovery unit and capable of collecting fumes aggregated in an atmosphere is further provided. The fume collection device according to any one of claims 1 to 7.   The fume recovery apparatus according to claim 8, wherein a plurality of the filters are provided for at least one of the first recovery unit, the second recovery unit, and the third recovery unit.   The fume recovery according to claim 9, wherein the filter is provided so as to be arranged in series in a flow direction of an atmosphere in the first recovery unit, the second recovery unit, or the third recovery unit. apparatus.   The circulation part (38) which discharges | circulates and circulates the atmosphere which passed through the said filter in the said preheating zone, the said heating zone, or the said cooling zone is provided as described in any one of Claims 8-10 characterized by the above-mentioned. The fume recovery device described.   The inlet or the outlet is provided at the inlet and the outlet and has an injection port (81) capable of injecting gas, and the gas is injected from the injection port along the opening surface of the inlet and the outlet. The gas curtain part (80) which can suppress the outflow to the outer side of the atmosphere inside the said preheating zone, the said heating zone, and the said cooling zone which went through via is further provided. The fume recovery device according to item.   The fume recovery apparatus according to claim 12, wherein the gas curtain unit further includes an intake port (82) capable of sucking a gas injected from the injection port.

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