JP2015118089A - Defect detection device and method for polarization film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a defect detection device and method for a polarization film.SOLUTION: The defect detection device 100 for a polarization film includes: a receiving unit 110 for receiving an inspection result for a polarization film inspected by an automatic optical inspection machine; and a detection unit 130 for analyzing the inspection result and detecting the defect of the polarization film. On the basis of two or more parameters of the defect type (Defect Type), delta X (Dx), delta Y (Dy), area (Area), density (Density), size (Size), peak (Peak), and thickness (Thickness), the detection unit determines that the defect form of the polarization film is at least one of the bonded foreign matter, bonded air bubble, foreign matter, bright point, scratch, association bright point, and one string.

Description

  The present invention relates to a polarizing film defect detection apparatus and method, and more particularly, to a system and method for automatically detecting defects in a polarizing film produced in real time using inspection results of an automatic optical inspection machine.

  Manufacturers that produce polarizing films used as LCD optical materials have an in-line (IN-LINE) Automatic Optical Inspection System (hereinafter referred to as “Automatic Optical Inspection”) for real-time inspection of products produced at high speed. It is called “machine”). In general, an inline automatic optical inspection machine applies ink or barcode marking to the location where a defect occurs, and discards or further inspects the location where ink or barcode marking was applied in the subsequent process. Have gone.

  However, when the defect occurs continuously at a specific point in time, or when it is unclear whether a defect such as a fine defect has actually occurred, overload and hardware of the automatic optical inspection machine There is an inconvenience that it is impossible to mark all occurrences of the defect without omission due to a problem of wear performance. In addition, there is a possibility that a product that is not marked at a location where a defect occurs may be marketed to a customer company without being recognized as a defective product in a subsequent process. For this reason, in the subsequent process, an inspector finally visually inspects the product. However, such visual inspection work has a problem of high cost and labor.

  Furthermore, in the prior art, only information on the defect occurrence rate using only the number of defects detected in the polarizing film disk could be obtained, so that the outflow of defects (that is, the marking leakage to the location where the defect occurred) ) There is a problem that the possibility cannot be considered.

  On the other hand, there has been proposed a failure analysis system and method for automatically extracting a fatal failure of a semiconductor wafer on which a plurality of chips each having a plurality of memory cells are formed (see, for example, Patent Document 1 below). In the defect analysis system and method, since the quality is determined only by considering only the defects in the X and Y directions, the joined foreign matter, the joined bubble, the foreign matter, the bright spot, the scratch, the crowded bright spot, and the single thread There is a problem that various defects such as these cannot be accurately identified.

Korean Published Patent No. 2000-0077024

  The present invention has been devised to solve the above-described problems, and its purpose is to automatically detect defects in a polarizing film produced in real time using the inspection results of an automatic optical inspection machine. It is to provide an apparatus and method that can.

  Another object of the present invention is to provide a defect detection apparatus for a polarizing film capable of accurately discriminating various defects of a polarizing film such as bonded foreign particles, bonded bubbles, foreign particles, bright spots, scratches, crowding bright spots, and single yarns, and the like. Is to provide a method.

  In order to achieve the above-described object, the present invention includes a receiving unit that receives an inspection result for a polarizing film inspected by an automatic optical inspection machine, and a detection unit that analyzes the inspection result and detects a defect in the polarizing film. The detection unit includes a defect type (Defect Type), a Delta X (Dx), a Delta Y (Dy), an area (Area), a density (Density), a size (Size), a peak (Peak), and a thickness. Based on two or more parameters of (Thickness), the defect form of the polarizing film is at least one of a joined foreign matter, a joined bubble, a foreign matter, a bright spot, a scratch, a crowded bright spot, and a single thread. A polarizing film defect detection device is provided which is characterized as follows.

  In order to achieve the above-described object, the present invention includes a step of receiving an inspection result for a polarizing film inspected by an automatic optical inspection machine, and a step of analyzing the inspection result to detect a defect in the polarizing film. In the step of detecting the defect, defect type (Defect Type), Delta X (Dx), Delta Y (Dy), Area (Area), Density (Size), Size (Size), Peak (Peak) Based on two or more parameters of thickness (Thickness), the polarizing film has a defect form of at least one of a joined foreign matter, a joined bubble, a foreign matter, a bright spot, a scratch, a crowded bright spot, and a single thread. The present invention provides a method for detecting a defect in a polarizing film, characterized in that it is discriminated as a single one.

  According to the apparatus and method for detecting a defect in a polarizing film according to the present invention, it is possible to automatically detect a defect in a polarizing film produced in real time using the inspection result of an automatic optical inspection machine. In particular, based on defect type (Defect Type), Delta X (Dx), Delta Y (Dy), Area (Area), Density (Size), Size (Peak), Thickness (Thickness), etc. In addition, it is possible to accurately determine that the defect form of the polarizing film is a bonded foreign material, a bonded bubble, a foreign material, a bright spot, a scratch, a crowded bright spot, a single thread, or the like.

  In addition, this eliminates the failure analysis process by the operator (operator), and by immediately determining the cause of the defect, it is possible to shorten the defect occurrence section of the polarizing film.

It is a block diagram which shows an example of the automatic optical inspection machine employable in this invention. It is a block diagram of the defect detection apparatus of the polarizing film which concerns on one Embodiment of this invention. It is a figure which shows the joining foreign material detection algorithm which concerns on one Embodiment of this invention. It is a figure which shows the joining bubble detection algorithm which concerns on one Embodiment of this invention. It is a figure which shows the foreign material detection algorithm which concerns on one Embodiment of this invention. It is a figure which shows the bright spot detection algorithm which concerns on one Embodiment of this invention. It is a figure which shows the scratch detection algorithm which concerns on one Embodiment of this invention. It is a figure which shows the crowding bright spot detection algorithm which concerns on one Embodiment of this invention. It is a figure which shows the single thread detection algorithm which concerns on one Embodiment of this invention.

  Hereinafter, a polarizing film defect detection apparatus and method according to the present invention will be described in detail with reference to the accompanying drawings.

  First, in order to help understanding of the present invention, an automatic optical inspection machine will be briefly described. FIG. 1 is a diagram illustrating an example of an automatic optical inspection machine that performs defect inspection on a polarizing film.

  The produced polarizing film is wound and stored in a disk shape. Such a polarizing film disk is fed out from a feeding portion (not shown) when inspected for defects and is conveyed by a roller 12 in a predetermined traveling direction. Is done. At this time, the conveyance speed of the polarizing film 10 is sensed by a speed sensing device such as the encoder 11 and is used to generate information on a defect occurrence point in the future.

  At this time, the automatic optical inspection machine includes an optical device 20 having at least one illumination device 21 and at least one imaging device 22 corresponding to the illumination device 21, so that an optical image of the polarizing film being conveyed can be displayed. Can be acquired.

  The configuration and design method of the optical device 20 vary depending on the defect item (that is, type and content) to be detected using the automatic optical inspection machine. Performs transmission inspection, reflection inspection, polarization blocking inspection (so-called cross inspection), and the like.

  For this reason, the optical device 20 selectively or in parallel drives the reflected illumination and the imaging device corresponding thereto, the transmission illumination and the imaging device corresponding thereto according to the defect item to be inspected, It is designed to acquire optical images for detecting various defect types.

  The optical image acquired through the optical device 20 in this way is transferred to the image analysis / inspection device 40, and the image analysis / inspection device 40 performs analysis on the transferred optical image to thereby exist in the polarizing film. Detect various defects. The video analysis / inspection apparatus 40 generates data related to the detected defect (hereinafter referred to as “inspection result data”) and stores it.

  At this time, the occurrence location of the defect based on the inspection result data is transferred to the marking system 30, and the marking control unit 32 of the marking system 30 controls the marking means 31 to correspond to the occurrence location of the defect. A defect is marked on the polarizing film.

  The inspection result data is transferred to the output device 50, the display device 60, etc., and the result is output, transferred to the administrator server 70, and stored and managed.

  As described above, the polarizing film that has been subjected to the defect inspection is stored in the original disk shape by being wound again by a winding unit (not shown).

  The inspection result data of the automatic optical inspection machine is generally stored in a file format such as a database or Excel. The automatic optical inspection machine has defect brightness, width, length, size (area), shape (circularity / linearity), detection optical group (projection / reflection / polarization) as inspection results for individual polarizing film disks LOT. Generate and store various data such as blocking.

  At this time, a file transfer protocol (FTP) is used for transferring the inspection result data in order to ensure the accessibility of a large number of users or administrators. The inspection result data transferred in this way is stored in the storage unit in the polarizing film defect detection apparatus according to the present invention, and is converted into a predetermined common format via the data conversion unit for unifying the analysis format. . Here, the common format is a mark language that is a data language, for example, an extensible markup language (XML), a hypertext markup language (HTML), or the like. Therefore, in the future, data analysis will be performed with converted XML or the like.

  However, the conversion of the inspection result data as described above is made into a common format for analyzing data acquired from different types of inspection machines, assuming that the inspection machine storage data format may be different for each line. In contrast to this, if the stored data format of the inspection machine is the same, the data conversion process can be omitted. It should be noted that even if the stored data formats are different, data analysis can be performed in accordance with the respective data formats, and it goes without saying that it can be omitted in such cases.

  Hereinafter, based on FIGS. 2 to 9, the polarizing film defect detection apparatus and method according to the present invention will be described. For reference, the polarizing film defect detection apparatus according to the present invention may be realized by the video analysis / inspection apparatus 40 described above or a part thereof, or may be realized by a separate apparatus.

  FIG. 2 is a configuration diagram of a polarizing film defect detection apparatus according to an embodiment of the present invention. Referring to FIG. 2, a polarizing film defect detection apparatus 100 according to an embodiment of the present invention includes a receiving unit 110, a storage unit 120, a detection unit 130, a notification unit 140, and the like.

  First, the receiving unit 110 receives inspection result data regarding a polarizing film inspected by an automatic optical inspection machine. The storage unit 120 stores the received inspection result data.

  Here, as described above, the inspection result data is data indicating the inspection result of the automatic optical inspection machine. In the case of the preferred embodiment of the present invention, defect type (Defect Type), Delta X (Dx), Delta Information on Y (Dy), area (Area), density (Density), size (Size), peak (Peak), thickness (Thickness), and the like is included.

  For reference, Table 1 below shows defect type (Defect Type), Delta X (Dx), Delta Y (Dy), Area (Area), Density (Size), Size (Size), Peak (Peak), and Thickness. The definition of the parameter for (Thickness) is shown.

Referring to Table 1, Delta X (Dx) indicates the X-axis (width direction of the polarizing film) size of the region recognized as a defect, and Delta Y (Dy) indicates the Y-axis ( The longitudinal direction) size of a polarizing film is shown. The delta X (Dx) and the delta Y (Dy) are set with reference to a pixel, and for example, the number of X-axis pixels in an area recognized as a defect is multiplied by an X-axis spatial resolution (actual size of the X-axis pixel). Then, it is determined by multiplying the number of Y-axis pixels in the area recognized as a defect by the Y-axis spatial resolution (actual size of the Y-axis pixels). The area (Area) indicates the total area recognized as a defect. Similarly, the area (Area) is set based on a pixel, and is determined by multiplying the total number of pixels recognized as defects by the actual unit area of the pixel, for example. The density (Density) indicates the ratio of the area actually recognized as the defect to the entire square area of the X axis and the Y axis of the area recognized as the defect, that is, Area × 100 / (Dx × Dy). Although the size (Size) indicates the size of the defect, in one embodiment of the present invention, the size of the defect is estimated by taking the average of delta X (Dx) and delta Y (Dy). The peak (Peak) indicates a difference between the maximum value / minimum value of the brightness of the portion recognized as a defect and the surrounding average brightness. For reference, when the brightness is displayed on a monitor, black can be converted to a digital value of 0 and white can be converted to a digital value of 255 and displayed as a value from 0 to 255. Although the thickness (Thickness) indicates the thickness of the defect, in one embodiment of the present invention, the thickness of the defect is estimated based on Area / (√Dx ² + Dy ² ). The defect type (Defect Type) is divided into a black defect (black spot), a white defect (white spot), and a black and white defect (uneven shape), and the black defect (black spot) is lower (darker) than the reference shadow (Gray). The white defect (white point) means a defect that is higher (brighter) than the reference shadow (Gray), and the black and white defect (irregularity) is a defect that includes a portion that is higher and lower than the reference shadow (Gray). Means.

  The detection unit 130 analyzes the inspection result data to detect a defect in the polarizing film. In this regard, FIGS. 3 to 9 show a detection algorithm according to an embodiment of the present invention. Hereinafter, the polarization according to the present invention performed by the detection unit 130 with reference to FIGS. 3 to 9 will be described. A film defect detection method will be described.

  FIG. 3 is a diagram illustrating a bonded foreign object detection algorithm according to an embodiment of the present invention.

  Referring to FIG. 3, in step S <b> 310, the detection unit 130 determines whether the defect type (Defective Type) is uneven (black and white defect), and the defect type (Defective Type) is uneven (black and white defect). If not, skip. If the defect type (Defect Type) is uneven (black and white defect), in step S320, the detection unit 130 determines whether the size (Size) is 300 μm or more, and the size (Size) is 300 μm. If not, skip (Skip). If the size (Size) is 300 μm or more, in step S330, the detection unit 130 determines that the defect form of the polarizing film is a bonded foreign material.

  FIG. 4 is a diagram illustrating a bonded bubble detection algorithm according to an embodiment of the present invention.

Referring to FIG. 4, in step S410, the detection unit 130 determines whether or not the defect type (Defective Type) is a black point (black defect), and the defect type (Defective Type) is not a black point (black defect). Skip (Skip). If the defect type (Defect Type) is a black dot (black defect), in step S420, the detection unit 130 determines whether the size (Size) is 100 μm or more and less than 540 μm, and the size (Size). Is skipped when it is not 100 μm or more and less than 540 μm. If, when the size (Size) is less than or 100μm 540μm, in step S430, the detection unit 130 includes an area (Area), it is judged whether or not 90 [mu] m ² or more 1140 microns ² or less, the area (Area) is when 90 [mu] m ² or more 1140 microns ² not less skipped (skip). If, when the area (Area) is 90 [mu] m ² or more 1140 microns ² or less, in step S440, the detection unit 130 determines whether the delta X (Dx) is 120μm or more 780μm or less, Delta X (Dx ) Is not 120 μm or more and 780 μm or less, skipping. If the delta X (Dx) is not less than 120 μm and not more than 780 μm, in step S450, the detection unit 130 determines whether the delta Y (Dy) is not more than 210 μm, and the delta Y (Dy) is not more than 210 μm. If not, skip. If the delta Y (Dy) is 210 μm or less, in step S460, the detection unit 130 determines whether the thickness (Thickness) is less than 66 μm, and the thickness (Thickness) is not less than 66 μm. Skip (Skip). If the thickness (Thickness) is less than 66 μm, in step S470, the detection unit 130 determines whether or not the peak (Peak) is less than 20, and if the peak (Peak) is not less than 20, Skip (Skip). If the peak is less than 20, in step S480, the detection unit 130 determines that the defect form of the polarizing film is a bonded bubble.

  FIG. 5 is a diagram illustrating a foreign object detection algorithm according to an embodiment of the present invention.

Referring to FIG. 5, in step S510, the detection unit 130 determines whether or not the defect type (Defective Type) is a black point (black defect), and the defect type (Defective Type) is not a black point (black defect). Skip (Skip). If the defect type (Defect Type) is a black dot (black defect), in step S520, the detection unit 130 determines whether the size (Size) is 160 μm or less, and the size (Size) is 160 μm or less. If not, skip. If the size (Size) is less than 160 .mu.m, in step S530, the detection unit 130 determines whether an area (Area) is 300 [mu] m ² or less, when the area (Area) is not 300 [mu] m ² or less Skip to (Skip). If the area (Area) is 300 μm ² or less, in step S540, the detection unit 130 determines whether or not the delta X (Dx) is 150 μm or less, and the delta X (Dx) is not 150 μm or less. Skip (Skip). If the delta X (Dx) is 150 μm or less, in step S550, the detection unit 130 determines that the defect form of the polarizing film is a foreign substance.

  FIG. 6 is a diagram showing a bright spot detection algorithm according to an embodiment of the present invention.

  Referring to FIG. 6, in step S610, the detection unit 130 determines whether or not the defect type (Defective Type) is a white point (white defect), and the defect type (Defective Type) is a white point (white defect). If not, skip. If the defect type (Defect Type) is a white point (white defect), in step S620, the detection unit 130 determines whether or not the peak (Peak) is 16 or more, and the peak (Peak) is 16. If not, skip (Skip). If the peak (Peak) is 16 or more, in step S630, the detection unit 130 determines whether or not the delta Y (Dy) is 450 μm or less, and the delta Y (Dy) is not 450 μm or less. Skip to (Skip). If the delta Y (Dy) is 450 μm or less, in step S640, the detection unit 130 determines that the defect form of the polarizing film is a bright spot.

  FIG. 7 is a diagram illustrating a scratch detection algorithm according to an embodiment of the present invention.

  Referring to FIG. 7, in step S <b> 710, the detection unit 130 determines whether or not the defect type (Defective Type) is a white point (white defect), and the defect type (Defective Type) is a white point (white defect). If not, skip. If the defect type (Defect Type) is a white point (white defect), in step S720, the detection unit 130 determines whether or not the delta X (Dx) is 105 μm or less, and the delta X (Dx). Skip if it is not less than 105 μm. If the delta X (Dx) is 105 μm or less, in step S730, the detection unit 130 determines whether the delta Y (Dy) is 150 μm or more, and the delta Y (Dy) is not 150 μm or more. Skip (Skip). If the delta Y (Dy) is 150 μm or more, in step S740, the detection unit 130 determines whether or not the peak (Peak) is 50 or less, and if the peak (Peak) is not 50 or less. Skip (Skip). If the peak is 50 or less, in step S750, the detection unit 130 determines that the defect form of the polarizing film is a scratch.

  FIG. 8 is a diagram showing a crowding bright spot detection algorithm according to an embodiment of the present invention.

  Referring to FIG. 8, in step S810, the detection unit 130 determines whether the defect type (Defective Type) is a white point (white defect), and the defect type (Defective Type) is a white point (white defect). If not, skip. If the defect type (Defect Type) is a white point (white defect), in step S820, the detection unit 130 determines whether or not the difference between delta X (Dx) and delta Y (Dy) is 45 μm or more. If the difference between delta X (Dx) and delta Y (Dy) is not 45 μm or more, skip (Skip). If the difference between the delta X (Dx) and the delta Y (Dy) is 45 μm or more, in step S830, the detection unit 130 determines whether or not the peak (Peak) is 16 or more. Skip if the Peak is not 16 or more. If the peak (Peak) is 16 or more, in step S840, the detection unit 130 determines whether or not the delta X (Dx) is 420 μm or less, and the delta X (Dx) is not 420 μm or less. Skip to (Skip). If the delta X (Dx) is 420 μm or less, in step S850, the detection unit 130 determines whether the delta Y (Dy) is 1260 μm or less, and the delta Y (Dy) is not 1260 μm or less. Skip (Skip). If the delta Y (Dy) is 1260 μm or less, in step S860, the detection unit 130 determines whether the density (Density) is 7.5 or less, and the density (Density) is 7.5 or less. If not, skip. If the density is 7.5 or less, in step S870, the detection unit 130 determines that the defect form of the polarizing film is a crowded bright spot.

  FIG. 9 is a diagram showing a single thread detection algorithm according to an embodiment of the present invention.

  Referring to FIG. 9, in step S <b> 910, the detection unit 130 determines whether or not the peak is 50 or more, and skips when the peak is not 50 or more. If the peak is 50 or more, in step S920, the detection unit 130 determines whether the density (Density) is 6.75 or less, and if the density (Density) is 6.75 or less. If not, skip. If the density is 6.75 or less, in step S930, the detection unit 130 determines whether the thickness (Thickness) is 42 μm or more, and if the thickness (Thickness) is 42 μm or more. If not, skip. If the thickness (Thickness) is 42 μm or more, in step S940, the detection unit 130 determines whether or not the delta X (Dx) is 150 μm or more, and the delta X (Dx) is not 150 μm or more. Skip (Skip). If the delta X (Dx) is 150 μm or more, in step S950, the detection unit 130 determines that the defect form of the polarizing film is one yarn.

  On the other hand, according to a preferred embodiment of the present invention, the detection unit 130 can detect a defect form of any one of a joined foreign matter, a joined bubble, a foreign matter, a bright spot, a scratch, a crowded bright spot, and a single yarn. If it is skipped without skipping, redetection is performed to find another defect form.

  For example, the detection unit 130 performs the bonded bubble detection algorithm when the bonded foreign object detection algorithm is performed and skipped without detecting the bonded foreign material. If the bonding bubble detection algorithm is performed and the bonding bubble cannot be detected and is skipped, the foreign object detection algorithm is performed again to detect various defect forms.

  Returning to FIG. 2, the notification unit 140 notifies the outside of the defect form detected by the detection unit 130 via an output device (for example, a display, a defect notification device, etc.) and detects the polarizing film. The (operator) can immediately grasp the defect form so that the corresponding defect factor can be quickly removed.

  As described above, the present invention has been described in detail with reference to the embodiment of the present invention. However, such a specific technique is merely a preferable implementation example for those having ordinary knowledge in the technical field to which the present invention belongs. Of course, this does not limit the scope of the present invention. For example, the individual steps constituting each defect detection algorithm described above can perform the same detection function even if the order is changed, and the order of each defect detection algorithm may be changed. Absent.

  Therefore, a person who has ordinary knowledge in the technical field to which the present invention belongs can make various applications and modifications within the scope of the present invention based on the above contents. The scope should be defined by the appended claims and their equivalents.

100: Polarization film defect detection device 110: reception unit 120: storage unit 130: detection unit 140: notification unit

Claims (20)

In a polarizing film defect detection device,
A receiving unit for receiving the inspection result for the polarizing film inspected by the automatic optical inspection machine;
A detection unit for analyzing the inspection result and detecting a defect of the polarizing film;
With
The detection unit includes defect type (Defect Type), delta X (Dx), delta Y (Dy), area (Area), density (Density), size (Size), peak (Peak), and thickness (Thickness). Based on two or more of the parameters, it is determined that the defect form of the polarizing film is at least one of a joined foreign matter, a joined bubble, a foreign matter, a bright spot, a scratch, a crowded bright spot, and a single yarn. A device characterized by that.   The apparatus according to claim 1, further comprising a notifying unit that notifies the defect form detected by the detecting unit via an output device.   The detection unit determines that the defect form of the polarizing film is a bonded foreign material when the defect type (defect type) is uneven and the size (size) is 300 μm or more. The apparatus of Claim 1 or Claim 2. Wherein the detection unit is a defect types (Defect Type) black spot, the size (Size) of less than or 100μm 540μm, area (Area) is at 90 [mu] m ² or more 1140 microns ² or less, delta X (Dx) is more than 120μm When the thickness is 780 μm or less, the delta Y (Dy) is 210 μm or less, the thickness (Thickness) is less than 66 μm, and the peak (Peak) is less than 20, the defect form of the polarizing film is a bonding bubble. The apparatus according to claim 1, wherein the apparatus is determined to be present. When the defect type (Detect Type) is a black spot, the size (Size) is 160 μm or less, the area (Area) is 300 μm ² or less, and the delta X (Dx) is 150 μm or less. The apparatus according to claim 1, wherein the apparatus determines that the defect form of the polarizing film is a foreign substance.   When the defect type (Defect Type) is a white spot, the peak (Peak) is 16 or more, and the delta Y (Dy) is 450 μm or less, the detection unit has a bright spot as the defect form. The apparatus according to claim 1, wherein the apparatus is discriminated as being.   In the detection unit, the defect type (Defect Type) is a white point, the delta X (Dx) is 105 μm or less, the delta Y (Dy) is 150 μm or more, and the peak (Peak) is 50 or less. 3. The apparatus according to claim 1, wherein the apparatus determines that the defect form of the polarizing film is a scratch.   In the detection unit, the defect type (Defect Type) is a white point, the difference between Delta X (Dx) and Delta Y (Dy) is 45 μm or more, Peak (Peak) is 16 or more, and Delta X ( When Dx) is 420 μm or less, Delta Y (Dy) is 1260 μm or less, and the density (Density) is 7.5 or less, it is determined that the defect form of the polarizing film is a crowded bright spot. The apparatus according to claim 1 or 2, characterized in that   The detection unit has a peak (Peak) of 50 or more, a density (Density) of 6.75 or less, a thickness (Thickness) of 42 μm or more, and a delta X (Dx) of 150 μm or more. 3. The apparatus according to claim 1, wherein the apparatus determines that the defect form of the polarizing film is a single yarn.   When the detection unit skips (Skip) any defect form among the joined foreign substance, the joined bubble, the foreign substance, the bright spot, the scratch, the crowding bright spot, and one yarn, and skips the other defect form. 3. The apparatus according to claim 1, wherein the detection is performed again. In the polarizing film defect detection method,
Receiving an inspection result for a polarizing film inspected by an automatic optical inspection machine;
Analyzing the inspection results to detect defects in the polarizing film;
Including
In the step of detecting the defect, the defect type (Defect Type), Delta X (Dx), Delta Y (Dy), Area (Area), Density (Size), Size (Size), Peak (Peak), Thickness ( Based on two or more parameters of Thickness), the defect form of the polarizing film is at least one of a joined foreign matter, a joined bubble, a foreign matter, a bright spot, a scratch, a crowded bright spot, and a single thread. A method characterized by determining that there is.   The method according to claim 11, further comprising notifying the detected defect form via an output device.   In the detection step, when the defect type (Defect Type) is uneven and the size (Size) is 300 μm or more, it is determined that the defect form of the polarizing film is a bonded foreign material. Item 13. The method according to item 11 or item 12. Wherein the detection step is a defect types (Defect Type) black spot, the size (Size) of less than or 100μm 540μm, area (Area) is at 90 [mu] m ² or more 1140 microns ² or less, delta X (Dx) is more than 120μm When the thickness is 780 μm or less, the delta Y (Dy) is 210 μm or less, the thickness (Thickness) is less than 66 μm, and the peak (Peak) is less than 20, the defect form of the polarizing film is a bonding bubble. The method according to claim 11 or 12, wherein it is determined that there is. In the detection step, the defect type (Defect Type) is a black spot, the size (Size) is 160 μm or less, the area (Area) is 300 μm ² or less, and the delta X (Dx) is 150 μm or less. The method according to claim 11, wherein it is determined that the defect form of the polarizing film is a foreign matter.   In the detection step, when the defect type (Defect Type) is a white spot, the peak (Peak) is 16 or more, and the delta Y (Dy) is 450 μm or less, the defect form of the polarizing film is a bright spot. The method according to claim 11, wherein the method is determined as follows.   In the detection step, the defect type (Defect Type) is a white point, the delta X (Dx) is 105 μm or less, the delta Y (Dy) is 150 μm or more, and the peak (Peak) is 50 or less. The method according to claim 11, wherein the method determines that the defect form of the polarizing film is a scratch.   In the detection step, the defect type (Defect Type) is a white point, the difference between Delta X (Dx) and Delta Y (Dy) is 45 μm or more, Peak (Peak) is 16 or more, and Delta X ( When Dx) is 420 μm or less, Delta Y (Dy) is 1260 μm or less, and Density is 7.5 or less, it is determined that the defect form of the polarizing film is a crowded bright spot. 13. A method according to claim 11 or claim 12 characterized in that.   In the detection step, the peak (Peak) is 50 or more, the density (Density) is 6.75 or less, the thickness (Thickness) is 42 μm or more, and the delta X (Dx) is 150 μm or more. 13. The method according to claim 11, wherein it is determined that the defect form of the polarizing film is a single thread.   In the detection step, if any one of the defect forms of the joined foreign matter, the joined bubble, the foreign matter, the bright spot, the scratch, the crowded bright spot, and one thread is not detected and skipped, another defect form is selected. The method according to claim 11 or 12, wherein the detection is performed again.

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