JP2015113936A - Valve and bellows pump using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve capable of reducing water-hammer phenomenon, and a bellows pump using the valve.SOLUTION: A valve 60 includes a valve casing 61 and a valve element 62. The valve casing has a fluid inlet portion 63 and a fluid outlet portion 64. The valve element has a valve portion 68 capable of being brought into contact with and separated from a valve seat 66 disposed at a fluid inlet portion side, and is disposed in the valve casing movably in the axial direction, and biased by a biasing member 69 so that the valve portion is brought into contact with the valve seat. The valve portion of the valve element has a leakage passage 70 for communicating spaces 71, 72 holding the valve element therebetween with respect to the axial direction of the valve casing when it is brought into contact with the valve seat, and the leakage passage is deformed to be shifted to a closing direction, when the valve portion is pressed to the valve seat by external force in a state of being kept into contact with the valve seat.

Description

  The present invention relates to a valve and a bellows pump using the valve.

  In a semiconductor or liquid crystal manufacturing facility or the like, a bellows pump is used to flow a fluid such as ultrapure water or a chemical solution (see, for example, Patent Document 1). This type of bellows pump generally includes a pump case, a bellows, a driving device, a suction side check valve, and a discharge side check valve.

  The pump case has a suction flow path for sucking fluid and a discharge flow path for discharging fluid. The bellows is provided in the pump case, and is configured to be able to expand and contract in order to suck fluid from the suction flow path and discharge the fluid to the discharge flow path.

  The drive device is configured to extend and contract the bellows. The suction-side check valve allows only a fluid flow from the suction flow path into the bellows. The discharge-side check valve allows only a fluid flow from the bellows toward the discharge flow path.

  In such a bellows pump, when the suction stroke is switched to the discharge stroke, that is, when the bellows is switched from the expanded state to the contracted state, the internal pressure of the bellows changes from negative pressure to positive pressure, and in the process, the bellows The internal pressure of the intake valve suddenly rises suddenly, and the suction side check valve changes from the open state to the closed state, thereby rapidly shutting off the fluid suction.

  However, since the flow of fluid from the suction flow path into the bellows does not stop immediately due to inertia, the suction side check valve (valve contacting the valve seat) in which the fluid in the suction flow path is closed (This phenomenon is the so-called “water hammer (water hammer) phenomenon”), and the water hammer phenomenon causes the bellows pump to vibrate greatly.

  At this time, a large vibration of the bellows pump propagates from the bellows pump to piping connected to the bellows pump. As a result, there is a problem that the fluid cannot normally flow using the bellows pump to the bellows of the bellows pump and / or the connection point between the bellows pump and the pipe (for example, the bellows pump). There was a risk of damage and damage to the connection portion between the bellows and the pipe).

JP-A-10-196521

  The present invention has been made in view of such circumstances, and an object thereof is to provide a valve capable of alleviating the water hammer phenomenon and a bellows pump using the valve.

  The invention according to claim 1 has a cylindrical valve casing having a fluid inlet portion and a fluid outlet portion, and a valve portion capable of contacting or separating from a valve seat provided on the fluid inlet portion side, A valve body provided in the valve casing so as to be movable in the axial direction of the valve casing and biased so that the valve portion abuts against the valve seat by a biasing member, However, the valve portion has a leakage passage for communicating a space sandwiching the valve body with respect to the axial center direction of the valve casing when contacting the valve seat, and the valve portion is provided in the valve seat. When pressed against the valve seat by an external force in the contact state, the leak passage is deformed so as to shift in the closing direction.

  According to a second aspect of the present invention, in the valve according to the first aspect, the valve portion has a plurality of components arranged in parallel around the axis of the valve casing, and among the plurality of components, The leakage passage is formed between at least one pair of adjacent structures.

  According to a third aspect of the present invention, there is provided a suction flow path for sucking fluid, a pump body having a discharge flow path for discharging fluid, and a pump body provided in the pump body, wherein the fluid is supplied to the suction flow path. A bellows configured to be extendable and retractable for inhaling and discharging to the discharge flow path, a movable body coupled to the bellows and configured to be movable to expand and contract the bellows, and the movable A driving device for moving the body; and a valve according to claim 1 or 2, wherein the suction side check valve allows only the flow of fluid from the suction flow path into the bellows; A bellows pump comprising a discharge-side check valve that allows only a fluid flow from the inside of the bellows toward the discharge flow path.

  ADVANTAGE OF THE INVENTION According to this invention, the valve which can relieve a water hammer phenomenon and the bellows pump using this valve can be provided.

It is a side sectional view of a valve concerning a 1st embodiment of the present invention, and a bellows pump provided with this valve. (A) It is side surface sectional drawing of the suction side non-return valve comprised by the valve in the bellows pump of FIG. (B) It is a front view of the valve body in the suction side check valve of (a). (A) It is a figure which shows the state which has the suction side non-return valve of FIG. 2 in an open position. (B) It is a figure which shows the state which exists in the position which the valve body contact | abutted to the valve seat in the suction side check valve of FIG. (C) It is a figure which shows the state which has the suction side non-return valve of FIG. 2 in a closed position. It is side surface sectional drawing of the valve which concerns on 2nd Embodiment of this invention, and the bellows pump provided with this valve.

[First Embodiment]
First, a first embodiment of the present invention will be described with reference to the drawings.

  As shown in FIG. 1, in the present embodiment, the bellows pump 1 includes a pump unit 2 and a pulsation suppressing unit 3 provided alongside the pump unit 2. The pump unit 2 and the pulsation suppressing unit 3 have a common partition wall 5 and are arranged coaxially with each other. The partition wall 5 is formed with a suction flow path 6 for sucking fluid, a discharge flow path 7 for discharging fluid, and an intermediate flow path 8.

  The pump unit 2 includes a bellows 10. The bellows 10 is provided in the pump body 4 to suck fluid from the suction flow path 6 and to the discharge flow path 7 (in the present embodiment, the discharge flow path via the intermediate flow path 8). 7) It is configured to be extendable in the axial direction (left-right direction in FIG. 1) for discharging.

  In the present embodiment, the pump body 4 includes the partition wall 5 and a bottomed cylindrical pump casing 11 attached to a side wall portion on one side in the axial direction (right side in FIG. 1) of the partition wall 5; It is constituted by a bottomed cylindrical casing 41 attached to a side wall portion on the other side in the axial center direction of the partition wall 5 (left side in FIG. 1).

  In the pump body 4, the bellows 10 is disposed in an internal space of the pump casing 11 formed by being surrounded by the partition wall 5 and the pump casing 11. The bellows 10 has an opening peripheral edge 12 on the other side in the axial center direction, and the opening peripheral edge 12 is fixed to the pump body 4 by being joined between the partition wall 5 and the pump casing 11. ing.

  The bellows 10 has a closed end 13 on one side in the axial direction, and is provided so as to protrude from the partition wall 5 toward the bottom wall of the pump casing 11. As a result, using the bellows 10, the internal space of the pump casing 11 is hermetically partitioned into a pump working chamber 14 located in the bellows 10 and a pump working chamber 15 located outside the bellows 10. ing.

  The bellows 10 has a cylindrical bellows portion 18 between the opening peripheral edge portion 12 and the closed end portion 13, and moves the closed end portion 13 in the internal space of the pump casing 11. The axial direction of the pump casing 11 can be expanded and contracted. Here, the bellows 10 is made of a fluororesin such as polytetrafluoroethylene (PTFE).

  In the pump unit 2, a fluid suction port 21 and a discharge port 22 are communicated with the pump working chamber 14. The suction port 21 communicates with the suction flow path 6, and the discharge port 22 communicates with the intermediate flow path 8. A suction-side check valve 23 and a discharge-side check valve 24 that can be alternately opened and closed as the bellows 10 expands and contracts are provided in the middle of the suction flow path 6 and the intermediate flow path 8. ing.

  The suction side check valve 23 is configured to allow only the flow of fluid from the suction flow path 6 into the bellows 10. That is, the suction-side check valve 23 allows the suction of fluid from the suction flow path 6 to the pump action chamber 14, and allows the backflow of fluid from the pump action chamber 14 to the suction flow path 6. It is configured to prevent it.

  The discharge-side check valve 24 is configured to allow only a fluid flow from the bellows 10 toward the intermediate flow path 8 serving as a discharge flow path. That is, the discharge side check valve 24 allows the discharge of the fluid from the pump working chamber 14 toward the intermediate flow path 8 and the reverse flow of the fluid from the intermediate flow path 8 toward the pump working chamber 14. It is configured to prevent it.

  In the pump casing 11, a movable body 26 is provided that is connected to the bellows 10 and configured to be movable so as to extend and contract the bellows 10. The movable body 26 is fixed to the closed end portion 13 of the bellows 10. In the bellows pump 1, a driving device for moving the movable body 26 is provided.

  In the present embodiment, the drive device includes an air cylinder 31 and an air supply device (compressor) (not shown). In the air cylinder 31, a shaft member 27 is connected to the movable body 26. The shaft member 27 is provided so as to protrude from the pump working chamber 15 through the substantially center of the bottom wall portion of the pump casing 11 and to protrude outside the pump casing 11.

  A piston 28 is fixed to the protruding portion of the shaft member 27. The piston 28 is disposed in a cylinder 29 provided on the bottom wall portion of the pump casing 11, and is fitted to the cylinder 29 so as to be slidable in the axial center (extension / contraction) direction of the bellows 10. Air holes 32 and 33 are formed in the bottom wall portion of the pump casing 11 and the cylinder 29, respectively.

  The air supply device alternately supplies pressurized air to the pump working chamber 15 and the internal space surrounded by the cylinder 29 and the piston 28 through the air hole 32 or the air hole 33. It is configured to be able to. By supplying the pressurized air, the piston 28 of the air cylinder 31 is reciprocated in the axial direction of the bellows 10 so as to move the movable body 26 so that the bellows 10 can be expanded and contracted. It has become.

  Here, proximity sensors 35 and 36 are attached to the air cylinder 31, and a sensor sensing plate 37 is attached to the piston 28. As the piston 28 reciprocates, the sensor sensing plate 37 alternately approaches the proximity sensors 35 and 36 so that the supply destination of the pressurized air supplied from the air supply device is the pump. The interior of the working chamber 15 and the internal space of the cylinder 29 are automatically switched.

  Further, as shown in FIG. 1, the pulsation suppressing unit 3 includes a bellows 40. The bellows 40 sucks fluid from a suction flow channel (in the present embodiment, the intermediate flow channel 8 functioning as a suction flow channel) and discharges the fluid to the discharge flow channel 7 in the axial direction (see FIG. 1 in the left-right direction).

  In the present embodiment, the bellows 40 is disposed in an internal space of the casing 41 formed by being surrounded by the partition wall 5 and the casing 41. The bellows 40 has an opening peripheral edge 42 on one axial direction side, and the opening peripheral edge 42 is fixed to the pump body 4 by being joined between the partition wall 5 and the casing 41. .

  The bellows 40 has a closed end portion 43 on the other side in the axial direction, and is provided so as to protrude from the partition wall 5 to the bottom wall portion side of the casing 41. As a result, the internal space of the casing 41 is partitioned in a sealed manner using the bellows 40 into a liquid chamber 44 located inside the bellows 40 and an air chamber 45 located outside the bellows 40.

  The bellows 40 has a cylindrical bellows portion 48 between the opening peripheral edge portion 42 and the closed end portion 43, and moves the closed end portion 43 in the internal space of the casing 41. The casing 41 can be expanded and contracted with the axial direction of the casing 41 as the expansion and contraction direction. Here, the bellows 40 is made of a fluororesin such as PTFE.

  In the pulsation suppressing unit 3, the intermediate flow path 8 and the discharge flow path 7 are communicated with the liquid chamber 44. At a position facing the closed end portion 43 of the bellows 40, a stopper wall 51 for restricting excessive extension that may occur due to an unexpected situation of the bellows 40 is spaced a predetermined distance from the closed end portion 43. They are spaced apart.

  The casing 41 is provided with an automatic air supply / exhaust adjustment device 52. The automatic air supply / exhaust adjustment device 52 can balance the liquid pressure in the liquid chamber 44 and the air pressure (enclosed pressure) in the air chamber 45 so that excessive expansion and contraction deformation does not occur in the bellows 40. It is configured.

  Specifically, when the capacity of the liquid chamber 44 increases beyond a predetermined range, the automatic air supply / exhaust adjustment device 52 sucks into the air chamber 45 to increase the air pressure in the air chamber 45, and When the capacity of 44 decreases beyond a predetermined range, the sealed pressure is lowered by exhausting from the inside of the air chamber 45.

  Next, the operation of the bellows pump 1 will be described.

  In the pump unit 2, when the pressurized air from the air supply device is supplied to the internal space surrounded by the cylinder 29 and the piston 28 of the air cylinder 31 through the air hole 33, the bellows 10 is shown in FIG. 1. Elongate to the right. As a result, the pump working chamber 14 becomes negative pressure and the discharge side check valve 24 is closed, while the suction side check valve 23 is opened and the fluid from the suction flow path 6 is in the open position. The air is sucked into the pump working chamber 14 through the suction check valve 23 (suction process).

  Thereafter, when pressurized air from the air supply device is supplied to the pump working chamber 15 through the air holes 32, the bellows 10 in the extended state contracts in the left direction in FIG. As a result, the suction-side check valve 23 is closed, while the discharge-side check valve 24 is opened, so that the fluid sucked and stored in the pump working chamber 14 is in the open position. 24 is discharged toward the intermediate flow path 8 (the discharge passage 7) (discharge process).

  When the bellows pump 1 is driven, such a suction process and a discharge process are repeated in the pump unit 2. Thereby, a predetermined pump operation of the pump unit 2 is executed.

  Further, in the present embodiment, the fluid discharged from the discharge port 22 of the pump unit 2 becomes a pulsating flow due to the expansion / contraction operation of the pump unit 2, and the pulsation suppression is performed via the intermediate flow path 8. It is fed into the liquid chamber 44 formed inside the bellows 40 of the section 3. Then, after the fluid is temporarily stored in the liquid chamber 44, the fluid is transferred from the discharge flow path 7 to the outside of the pulsation suppressing unit 3 (the bellows pump 1).

  At this time, when the discharge pressure of the fluid from the pump unit 2 tends to increase, the bellows 40 expands in the pulsation suppressing unit 3 to increase the capacity of the liquid chamber 44 and absorb the discharge pressure. To do. Therefore, the amount of fluid transferred from the liquid chamber 44 to the outside of the pulsation suppressing unit 3 is smaller than the amount of liquid discharged from the pump unit 2 toward the pulsation suppressing unit 3.

  When the fluid discharge pressure starts to decrease in this state, the pressure of the fluid becomes lower than the sealed pressure in the air chamber 45 compressed by the extension of the bellows 40, so that the bellows 40 contracts, The capacity of the liquid chamber 44 is reduced. Therefore, the amount of fluid transferred from the liquid chamber 44 to the outside of the pulsation suppressing unit 3 is larger than the amount of liquid discharged from the pump unit 2 toward the pulsation suppressing unit 3.

  The fluid is transferred from the pulsation suppressing unit 3 to the outside while the pulsation is attenuated by the repeated operation of the volume change of the liquid chamber 44 accompanying the expansion and contraction operation of the bellows 40. Thereby, in the bellows pump 1, the fluid is continuously and smoothly discharged from the bellows pump 1 toward the outside.

  Next, the suction side check valve 23 will be described in more detail.

  As shown in FIGS. 1 and 2, the suction side check valve 23 is constituted by a valve 60 including a cylindrical valve casing 61 and a valve body 62. In the present embodiment, the valve casing 61 and the valve body 62 are made of a fluororesin.

  The valve casing 61 has a fluid inlet portion 63 and a fluid outlet portion 64. In the present embodiment, the valve casing 61 is disposed on the one side in the axial direction of the partition wall 5 on the fluid inlet portion 63 side in a state where the fluid inlet portion 63 is disposed so as to communicate with the suction flow path 6. It is being fixed to the side wall part. A valve seat 66 corresponding to the valve body 62 is formed on the side wall portion.

  The valve casing 61 is formed in a cylindrical shape, and is arranged with the axial center direction aligned with the axial center direction of the bellows 10. The valve casing 61 is provided with openings at both ends in the axial direction, and the fluid inlet portion 63 is configured from the opening at the other axial end in the axial direction (the left side in FIG. 2). The fluid outlet 64 is configured from an opening on one end side in the center direction (right side in FIG. 2).

  The valve body 62 has a valve portion 68 that can be brought into contact with or separated from the valve seat 66 provided on the fluid inlet portion 63 side. The valve body 62 is provided in the valve casing 61 so as to be movable in the axial direction thereof, and is urged by an urging member 69 so that the valve portion 68 contacts the valve seat 66.

  When the valve body 62 abuts on the valve seat 66, the valve section 68 has a leakage passage 70 for communicating spaces 71 and 72 sandwiching the valve body 62 with respect to the axial direction of the valve casing 61. (See FIG. 3B). The valve body 62 is configured to be deformed so that the leakage passage 70 moves in the closing direction when the valve portion 68 is pressed against the valve seat 66 by an external force in a state where the valve portion 68 is in contact with the valve seat 66. ing.

  In the present embodiment, the valve portion 68 is formed so as to exhibit a hollow truncated cone shape as a whole. The valve portion 68 is arranged so that the diameter-reduced side faces the fluid inlet portion 63, and a part of the fluid is exposed to the suction flow path 6 when the valve portion 68 abuts on the valve seat 66. It has an outer peripheral surface on the inlet portion 63 side and an inner peripheral surface on the fluid outlet portion 64 side.

  The outer peripheral surface of the valve portion 68 has a conical surface (tapered surface). The conical surface includes a contact surface that contacts the valve seat 66, and a part thereof can be exposed to the suction flow path 6. It is formed as follows. The inner peripheral surface of the valve portion 68 has a curved surface that extends along the outer peripheral surface, and the curved surface is formed so as to face the inside of the valve casing 61.

  In the present embodiment, the valve portion 68 has a plurality of (in the present embodiment, four) structural bodies 73 arranged around the axis of the valve casing 61, and the plurality of structural bodies 73. Among them, the leakage passage 70 is formed between at least one pair of adjacent structures 73.

  Specifically, each component 73 is formed in a substantially uniform shape with the other components 73. Each structural body 73 has an outer peripheral surface 74, an inner peripheral surface 75, and an opposing surface 76 that faces the opposing surface 76 of the adjacent constituent body 73. An outer peripheral surface 74 of the plurality of components 73 forms an outer periphery of the valve portion 68, and an inner peripheral surface 75 of the plurality of components 73 forms an inner periphery of the valve portion 68.

  The facing surface 76 of each structural body 73 is disposed at a predetermined interval from the facing surface 76 of the adjacent structural body 73 in a normal state where the structural bodies 73 are not pressed against the valve seat 66. Thereby, a slit (gap) 77 is formed between the adjacent structural bodies 73. The slit 77 is formed so as to penetrate between the outer peripheral surface and the inner peripheral surface of the valve portion 68 so that the space 71 on the suction flow path 6 side and the space 72 on the valve casing 61 side communicate with each other. The leakage passage 70 is configured.

  In this embodiment, the valve body 62 includes a holding portion 78 for holding the valve portion 68 and a connecting piece 79 for connecting the holding portion 78 and the valve portion 68 so as to be elastically deformable. have. The connecting pieces 79 are provided in the same number as the constituent members 73 of the valve portion 68. The valve portion 68 (the plurality of constituent bodies 73), the holding portion 78, and the connecting piece 79 have an integral structure.

  The holding portion 78 is formed in a cylindrical shape having an outer diameter substantially the same as the inner diameter of the valve casing 61. The holding part 78 is provided closer to the fluid outlet part 64 than the valve part 68 and is arranged coaxially with the valve part 68. The holding portion 78 is provided in the valve casing 61 and is configured to slide in the axial direction in the valve casing 61 integrally with the valve portion 68.

  The connecting piece 79 is provided so as to extend in the axial direction of the valve casing 61, and is disposed between the valve portion 68 (the components 73) and the holding portion 78. The connecting piece 79 is fixed to the holding portion 78 at one end portion in the longitudinal direction, and is fixed to each component 73 of the valve portion 68 at the other end portion in the longitudinal direction. In this way, each of the components 73 can swing about the longitudinal end of the connecting piece 79 as a fulcrum.

  In the present embodiment, the urging member 69 is provided in the valve casing 61. The urging member 69 is constituted by a compression coil spring that urges the valve body 62 (the valve portion 68) to the valve seat 66 with a predetermined load. The urging member 69 is fitted in the holding portion 78 and is disposed coaxially with the valve casing 61 and the valve body 62.

  With such a configuration, when the bellows pump 1 is switched from the suction stroke to the discharge stroke, that is, when the bellows 10 is switched from the expanded state to the contracted state, first, by the change in the internal pressure accompanying the deformation of the bellows 10 As shown in FIG. 3 (b), the valve portion 68 (the components 73) of the valve body 62 in the state shown in FIG. 3 (a) is pushed by the urging force of the urging member 69. In addition, with the leakage passage 70 in an open state (while the slit 77 is held), the leakage passage 70 comes into contact with the valve seat 66 so as to face the space 71.

  Subsequently, as the internal pressure rises due to the deformation of the bellows 10, the valve portion 68 is pushed by the fluid that has entered the space 72 in the valve casing 61 from the pump action chamber 14 (external force is applied to the valve portion 68. 67). As a result, the valve portion 68 is pressed against the valve seat 66, and the constituent members 73 come close to each other so that the opposing surface 76 abuts the opposing surface 76 of the adjacent constituent member (the slit 77 is closed). Swings in the direction of That is, the leakage passage 70 moves in the closing direction.

  During the transition period of the leakage passage 70 in the closing direction, the fluid flowing from the suction flow path 6 toward the bellows 10 contacts the valve body 62 (the valve portion 68) of the suction side check valve 23. When trying to do so, a part of the fluid enters the leakage passage 70 from the space 71 and leaks into the space 72 and thus into the pump working chamber 14. That is, at this time, a part of the fluid does not collide with the valve body 62 in a state in which the fluid is in contact with the valve seat 66. Therefore, the collision of the fluid with the valve body 62 of the suction side check valve 23 becomes relatively gentle.

  Therefore, when the bellows pump 1 is switched from the suction stroke to the discharge stroke, the water hammer phenomenon can be alleviated, and the vibration of the bellows pump 1 caused by the water hammer phenomenon can be reduced. . As a result, vibration propagated from the bellows pump 1 to a pipe (not shown) connected to the bellows pump 1 can also be reduced. Therefore, it is possible to avoid as much as possible the occurrence of problems caused by such vibrations (for example, damage to the bellows 10 and damage to the connection portion between the bellows 10 and the pipe).

  In the discharge process, after the transition period, the leakage passage 70 (the slit 77) is changed to a leakage passage 70A (slit 77A) closed by the external force 67 as shown in FIG. The side check valve 23 is completely closed, and prevents the backflow of fluid from the pump working chamber 14 toward the suction flow path 6. Thereafter, when the discharge process is switched to the suction process, the pressure on the valve body 62 by the external force 67 is released, so that the suction-side check valve 23 is moved by the swinging of the constituent bodies 73 by elastic return. The leakage passage 70 is opened while moving in the opening direction, and the flow of fluid from the suction flow path 6 toward the pump working chamber 14 is allowed.

  The width of the transition period in the closing direction of the leakage passage 70 (the time until the suction-side check valve 23 is completely closed at the time of switching from the discharge process to the suction process), and the transition period during the transition period The amount of liquid that leaks into the pump working chamber through the leak passage 70 is appropriately set so as not to impair pump performance by changing the shape of the slit 77 or the like.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.

  As shown in FIG. 4, the bellows pump 81 according to the present embodiment is a multi-cylinder bellows pump, whereas the bellows pump 1 according to the first embodiment is a single-cylinder bellows pump. This is different from the bellows pump 1 according to the first embodiment.

  In the present embodiment, the bellows pump 81 has a pair of left and right pump parts arranged symmetrically, and a large transfer amount can be obtained by each pump part operating in a complementary manner.

  That is, the bellows pump 81 includes a pump body 83 constituted by a partition wall 84 and a pump casing 85. The pump casing 85 includes a cylindrical peripheral wall member 87 and side wall members 88 and 89 fixed to the left and right ends of the peripheral wall member 87, respectively. In the pump casing 85, a pair of bellows 91 and 92 are provided symmetrically with respect to the partition wall 84.

  The bellows 91 and 92 have substantially the same structure as the bellows 10 used in the bellows pump 1 shown in FIG. In the bellows 91 and 92, the peripheral edge portions of the openings are fixed to the side wall portion of the partition wall 84 by the annular fixing plates 93 and 94, respectively, while the closed end portions are movable bodies 97 and 98, respectively. It is connected. The movable bodies 97 and 98 are connected via a plurality of connecting rods 99 that penetrate the partition wall 84.

  The partition wall 84 is formed with a suction channel 101 for sucking fluid and a discharge channel 102 for discharging fluid. Between the suction flow path 101 and the discharge flow path 102, there are provided a suction side check valve 103 and a discharge side check valve 104 that can be alternately opened and closed in accordance with the expansion and contraction of the bellows 91. In addition, a suction-side check valve 105 and a discharge-side check valve 106 are provided that can be alternately opened and closed as the bellows 92 expands and contracts.

  Here, each of the suction side check valve 103 and the suction side check valve 105 has substantially the same configuration as the suction side check valve 23 used in the bellows pump 1 shown in FIG. The valve includes a cylindrical valve casing 61 and a valve body 62 having a leakage passage 70.

  Further, the side wall members 88 and 89 of the pump casing 85 are respectively supplied with pressurized air supplied from an air supply device (compressor) (not shown) into the pump casing 85, and the pump casing 85. Air holes 111 and 112 for discharging the air inside are formed. The side wall members 88 and 89 are provided with mounting holes 113 and 114 for attaching proximity sensors for detecting the positions of the movable bodies 97 and 98, respectively.

  In the bellows pump 81, when pressurized air from the air supply device is alternately supplied from the air holes 111 and 112, and the left and right bellows 91 and 92 are alternately expanded and contracted, When fluid is sucked from the suction flow path 101 through the suction-side check valve 105 by the bellows 92 in the right pump section (suction process), the bellows 91 in the pump section on the left side in FIG. The stored fluid is discharged from the discharge flow path 102 through the discharge-side check valve 104 (discharge process).

  On the other hand, in this case, when the fluid is sucked from the suction flow path 101 through the suction side check valve 103 by the bellows 91 in the left pump section in FIG. 4 (suction process), the right pump in FIG. In the part, the fluid stored in the bellows 92 is discharged from the discharge flow path 102 through the discharge check valve 106 (discharge process).

  With the above configuration, when the bellows pump 1 is driven, such a suction process and a discharge process are repeated in the pair of left and right pump parts. Thereby, a predetermined pump operation of the bellows pump 81 is executed.

  In addition, since the suction side check valve 103 and the suction side check valve 105 having the leakage passage 70 are used in the pair of left and right pump parts, respectively, as in the first embodiment, The water hammer phenomenon can be alleviated when the bellows pump 81 is switched from the suction stroke to the discharge stroke, and the vibration of the bellows pump 81 caused by the water hammer phenomenon can be reduced.

  In addition, although the valve part of the valve body which concerns on this invention is made into the said valve part 68 which has the four said structure 73 of the substantially uniform shape in 1st Embodiment and 2nd Embodiment, it is limited to this. Instead, for example, a valve portion having two or six constituent members may be used, or a valve portion having a plurality of constituent members having different shapes.

  In the first embodiment and the second embodiment, the valve portion of the valve body according to the present invention always includes the leakage passage 70 (the slit 77) between the constituent bodies 73 and the adjacent constituent bodies 73. The valve portion 68 is provided as long as it is a valve portion provided with a leakage passage between at least one pair of adjacent components, and a leakage passage is provided between some components and adjacent components. It is good also as a valve part which does not provide.

  In the first embodiment and the second embodiment, the plurality of constituent bodies 73 of the valve portion 68 in the valve body 62 are integrated with each other using the holding portion 78. Alternatively, the urging member 69 may be used to connect the plurality of structural bodies 73 to the urging member 69 via the connecting piece 79 so as to form an integral structure.

  The valve according to the present invention is suitable for use as a suction side check valve of a bellows pump such as the bellows pump 1 according to the first embodiment and the bellows pump 81 according to the second embodiment. However, it can also be used for other devices such as pumps.

DESCRIPTION OF SYMBOLS 1 Bellows pump 4 Pump body 6 Suction flow path 7 Discharge flow path 8 Intermediate flow path 10 Bellows 23 Suction side check valve 24 Discharge side check valve 26 Movable body 31 Air cylinder 60 Valve 61 Valve casing 62 Valve body 63 Fluid inlet part 64 Fluid outlet portion 66 Valve seat 68 Valve portion 69 Energizing member 70 Leakage passage 71 Space 72 Space 73 Constituent body 81 Bellows pump 83 Pump body 91 Bellows 92 Bellows 97 Movable body 98 Movable body 101 Suction channel 102 Discharge channel 103 Suction Side check valve 104 discharge side check valve 105 suction side check valve 106 discharge side check valve

Claims (3)

A cylindrical valve casing having a fluid inlet and a fluid outlet;
It has a valve part that can contact or separate from a valve seat provided on the fluid inlet part side, and is provided in the valve casing so as to be movable in the axial direction thereof, and the valve part by an urging member A valve body that is biased so as to abut against the valve seat,
The valve body has a leakage passage in the valve portion for communicating a space sandwiching the valve body with respect to an axial direction of the valve casing when contacting the valve seat. When the valve seat is pressed against the valve seat by an external force while being in contact with the valve seat, the valve is deformed so that the leakage passage moves in a closing direction.   The valve portion has a plurality of components arranged in parallel around the axis of the valve casing, and the leakage passage is formed between at least one pair of adjacent components among the plurality of components. The valve according to claim 1, wherein the valve is configured as described above.   A pump body having a suction flow path for sucking fluid and a discharge flow path for discharging fluid; and a pump body provided in the pump body for sucking fluid from the suction flow path and the discharge flow path A bellows configured to be extendable and retractable for discharging to the bellows, a movable body coupled to the bellows and configured to be movable to extend and contract the bellows, and a drive device for moving the movable body And a suction side check valve that allows only a fluid flow from the suction flow path into the bellows, and from the bellows to the discharge flow path. A bellows pump, comprising: a discharge-side check valve that allows only a flow of fluid to flow.

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