JP2015099835A - Ashing device and treatment object holding structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ashing device and a treatment object holding structure which allow a treatment object to be efficiently subjected to ashing treatment.SOLUTION: In the ashing device, a frame-like holding member which holds the periphery of a tabular treatment object having both surfaces as treatment object surfaces is interposed and held between enclosures of a pair of ultraviolet irradiation units including light sources which irradiate respective treatment object surfaces with vacuum violet rays via light transmission windows, so that a treatment gas containing an active seed source activated by vacuum ultraviolet rays flows on one surface side and the other surface side of the treatment object. Treatment spaces formed of gaps which are formed between the treatment object surfaces of the treatment object and light emission surfaces of the light transmission windows and have a prescribed size and light source installation spaces set to an inert gas atmosphere are formed in a state of being air-tightly defined by the light transmission windows. In the treatment object holding structure, the tabular treatment object and tabular light-transmissive window members constituting the light transmission windows are held by the common frame-like holding member.

Description

  The present invention relates to an ashing apparatus for processing an object to be processed having both surfaces to be processed, such as a multilayer wiring board material, using vacuum ultraviolet rays, and an object holding structure suitably used in the ashing apparatus. About.

  At present, for example, a dry cleaning method using ultraviolet rays is known as a method for performing a desmear (smear removal) process in a substrate manufacturing process. In particular, a method using active oxygen such as ozone generated by vacuum ultraviolet rays radiated from an excimer lamp is suitably used because a predetermined treatment can be performed more efficiently and in a short time.

  For example, Patent Document 1 describes that in dry desmear processing, organic substances are decomposed and removed using active species (active oxygen atoms) decomposed from ozone. Further, it is described that it is preferable to use ozone treatment utilizing the action of ozone and active species and ultraviolet irradiation treatment in combination for decomposition and removal of organic substances.

JP-A-8-180757

In recent years, in the desmear (smear removal) process in the substrate manufacturing process, it is desired to shorten the processing time of an object to be processed.
In response to such a request, in the processing method using active species as described above, if the amount of active species contributing to the processing of the object to be processed is increased, the processing time of the object to be processed is shortened. Can be The active species are usually generated by irradiating a processing gas containing a predetermined concentration of oxygen with vacuum ultraviolet rays. Therefore, in order to increase the amount of active species, a processing gas containing a high concentration of oxygen is used. Supplying as an active species source is conceivable.
However, since the vacuum ultraviolet rays from the light source are absorbed by oxygen, when the oxygen concentration of the active species source is increased, the amount of ultraviolet rays absorbed by the active species source (oxygen) increases. Therefore, in order to suppress a decrease in the amount of ultraviolet rays reaching the surface to be processed, it is necessary to reduce the irradiation distance between the ultraviolet light source and the object to be processed.

  Further, when processing an object to be processed having both surfaces to be processed, such as a multilayer wiring board material, the processing time of the object to be processed is shortened by simultaneously ashing both surfaces of the object to be processed. It is possible.

  The present invention has been made based on the above circumstances, and an ashing device capable of performing an ashing process on an object to be processed with high processing efficiency and an object holding structure suitably used in the ashing apparatus. The purpose is to provide a body.

The ashing device of the present invention includes a pair of light transmission windows facing each of the surfaces to be processed of a plate-like object whose one surface and the other surface are processed surfaces, and each of the surfaces to be processed. A pair of ultraviolet irradiation units including an ultraviolet light source that irradiates vacuum ultraviolet rays through the light transmission window;
A frame-shaped holding member that holds the periphery of the object to be processed is sandwiched and held by a housing in the pair of ultraviolet irradiation units, so that the object to be processed is provided on one surface side and the other surface side of the object to be processed. A processing space formed by a gap having a predetermined size formed between a surface to be processed of the object and a light emitting surface of the light transmission window, and a light source arrangement space in which the ultraviolet light source is disposed are the light transmission window. Formed in an airtight manner, and
The inside of the light source arrangement space is an inert gas atmosphere, and a processing gas containing an activated species source activated by vacuum ultraviolet light from the ultraviolet light source is circulated in the processing space. To do.

In the ashing device of the present invention, each of the pair of ultraviolet irradiation units includes a housing that is open on one side,
Each of the light transmissive windows is configured by a plate-like light transmissive window member that is airtightly held at a position on the inner side of the opening edge of the housing.
A configuration in which a processing gas flow opening for flowing a processing gas in the processing space is formed at a protruding edge portion protruding outward from the light transmissive window member in each of the casings. It can be.

  In the ashing device of the present invention, each of the light transmitting windows is configured by a plate-like light transmitting window member held by a holding member that holds an object to be processed. May have a configuration in which a processing gas distribution opening for distributing the processing gas in the processing space is formed.

The workpiece holding structure of the present invention is for light irradiation treatment,
A pair of plate-like lights disposed on the plate-like object to be processed and on the one surface side and the other surface side of the object to be processed so as to face the one surface and the other surface with a gap of a predetermined size, respectively. A transparent window member, and a common frame-shaped holding member that holds the periphery of the object to be processed and the pair of light-transmissive window members, and each of the gaps includes the holding member. A processing gas distribution opening for allowing the processing gas to flow therethrough is formed.

  According to the ashing device of the present invention, each of the processing surfaces of the plate-shaped processing object whose both surfaces are processing surfaces is processed at the same time. The processing space in which the processing gas is circulated and the light source arrangement space, which is an inert gas atmosphere, are hermetically partitioned by the light transmission window to form a substantially sealed space. For this reason, the degree of decrease in the amount of vacuum ultraviolet light from the ultraviolet light source can be suppressed to a small level, and the atmosphere of the processing space can be kept substantially constant by the processing gas being circulated. Accordingly, it is possible to increase the amount of vacuum ultraviolet light that contributes to the processing of the object to be processed, and to stably generate active species, so that the active species can reliably contribute to the processing of the object to be processed. Therefore, the desired ashing process can be performed efficiently.

  According to the object-holding structure of the present invention, the light-exiting surface of the light-transmitting window member is used for simultaneously processing each of the surfaces to be processed of the flat plate-like object having both surfaces to be processed. Since the atmosphere in the processing space formed by maintaining the state where the surface of the object to be processed and the surface to be processed are in close proximity can be maintained substantially constant, the desired light irradiation process can be performed efficiently and in a short time An object-holding structure that can handle the above is provided.

It is sectional drawing which shows the outline of a structure in an example of the ashing apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows the operation state of the ashing apparatus shown in FIG. It is sectional drawing which shows the outline of a structure in an example of the ashing apparatus which concerns on the 2nd Embodiment of this invention. It is sectional drawing which shows the operation state of the ashing apparatus shown in FIG.

  Hereinafter, embodiments of the present invention will be described in detail.

[First Embodiment]
The ashing device according to the first embodiment of the present invention is configured so that vacuum ultraviolet light having a wavelength of 220 nm or less from an ultraviolet irradiation unit is irradiated to a surface to be processed through a light transmission window. A transmission window is provided on the ultraviolet irradiation unit side.

FIG. 1 is a cross-sectional view schematically showing the configuration of an example of an ashing device according to the first embodiment of the present invention.
This ashing apparatus simultaneously processes each of the processing surfaces 12 and 13 of a plate-shaped processing object 11 whose one surface and the other surface are processing surfaces, and the processing object 11 A conveying means (not shown) is provided that conveys (four rounds) with the holding member 15 having a rectangular frame shape, for example. In this example, the object to be processed 11 is conveyed in a direction (in a direction perpendicular to the paper surface in FIG. 1) along the surface direction of the surfaces 12 and 13 to be processed while being suspended.

A pair of ultraviolet irradiation units 20a and 20b provided with housings 21a and 21b, one of which is open, are disposed opposite to each other on both sides of the conveyance path of the object 11 to be processed.
In this example, the flat light transmissive window member 40a (40b) constituting the light transmissive window is located at a position on the inner side of the opening edge of the casing 21a (21b) in the ultraviolet irradiation unit 20a (20b). Thus, the light source arrangement space S1 constituting the sealed space is formed in the housing 21a (21b).

  Inside the light source arrangement space S1 in each of the ultraviolet irradiation units 20a and 20b, an ultraviolet radiation lamp 35 that is long in one direction and that constitutes the ultraviolet light source is arranged in a posture in which the lamp central axis extends in the vertical direction. As the ultraviolet lamp 35, for example, a rectangular lamp having a flat cross-sectional shape perpendicular to the longitudinal direction can be used. Here, the number of the ultraviolet lamps 35 is not particularly limited, and can be appropriately set according to the purpose. For example, when a plurality of ultraviolet lamps 35 are used, each lamp central axis is arranged in a state where it is positioned in the same vertical plane parallel to the processing surfaces 12 and 13 of the processing object 11.

  As the ultraviolet lamp 35, for example, a low-pressure mercury lamp that emits ultraviolet light having a peak at a wavelength of 185 nm, a deuterium lamp that emits ultraviolet light having a wavelength of 180 to 370 nm, or a xenon excimer lamp that emits vacuum ultraviolet light having a center wavelength of 172 nm is used. be able to. Among these, it is preferable to use a xenon excimer lamp because the intensity of vacuum ultraviolet rays is high and active species can be generated efficiently.

  The housing 21a (21b) in the ultraviolet irradiation unit 20a (20b) has a housing main body 22a (22b) that is open on one side, and the end surfaces are in contact with each other on the opening side of the housing main body 22a (22b). It is comprised by the frame-shaped window holding body 25a (25b) provided integrally. An endless seal member 30 made of, for example, an O-ring is provided over the entire periphery of the opening end surface of the housing 21a (21b).

  The casing main body 22a (22b) has an inert gas supply through-hole 23a and an inert gas discharge through-hole 23b in each of a pair of opposed peripheral walls positioned in the lamp central axis direction. It is formed to extend along the direction.

The window holder 25a (25b) has a window member holding portion 26 formed by a stepped portion, and the light transmissive window member 40a (40b) has a light exit surface 42a (42b) to be processed of the object 11 to be processed. In a posture extending in parallel with the surface 12 (13), the peripheral edge portion of the light incident surface 41a (41b) is supported by the window member holding portion 26 and is airtightly fixed.
Further, the projecting edge portions 27 projecting outward from the light exit surface 42a (42b) of the light transmissive window member 40a (40b) in the window holder 25a (25b) are mutually positioned in the lamp central axis direction. A processing gas supply through hole 28a and a processing gas discharge through hole 28b are formed in each of the opposed peripheral walls so as to extend along the lamp central axis direction. An opening is formed.

As a material constituting the light transmissive window members 40a and 40b, any material can be used as long as it can transmit the vacuum ultraviolet rays from the ultraviolet radiation lamp 35. For example, quartz glass can be used.
The thickness of the light transmissive window members 40a and 40b is, for example, 3 to 7 mm.

This ashing device supplies a processing gas containing a processing gas source, which is activated by a vacuum ultraviolet ray from an ultraviolet radiation lamp 35, into a processing space, which will be described later, via a processing gas supply through hole 28a. Source supply means (not shown) is provided.
As the processing gas supplied by the active species source supply means, for example, oxygen gas, a mixed gas in which ozone is mixed with oxygen gas, water vapor, or the like can be used. Here, when water vapor is used as the processing gas, hydroxyl radicals (OH radicals) are generated as active species in addition to oxygen radicals.
The oxygen concentration in the processing gas is preferably 50% by volume or more, for example. By using a processing gas having an oxygen concentration of 50% by volume or more, the amount of ozone and active species (oxygen radicals) generated by vacuum ultraviolet rays can be increased, and the intended processing can be performed reliably. Can do.

  Further, this ashing device is a driving means for moving each of the ultraviolet irradiation units 20a and 20b in a direction away from and a direction approaching the conveyance path of the workpiece 11 (indicated by a white arrow in FIG. 1). (Not shown).

  In the above, as the object 11 to be processed, for example, a plurality of insulating layers and a plurality of wiring layers are alternately laminated, and one or a plurality of insulating layers have via holes or through holes for electrical connection between the wiring layers. A multilayer wiring board material formed so as to extend through in the thickness direction can be exemplified. Such a multilayer wiring board material usually has a smear (residue) resulting from the material constituting the insulating layer or conductive layer, which is inevitably generated when forming a via hole or a through hole.

  Thus, in the above ashing apparatus, the workpiece 11 held by the holding member 15 is transported along the transport path by the transport means and placed at a predetermined position. And each of a pair of ultraviolet irradiation unit 20a, 20b is sequentially moved in the direction which approaches the to-be-processed object 11 by a drive means, and as shown in FIG. 2, in holding member 15 and each ultraviolet irradiation unit 20a, 20b With the end faces of the casings 21a and 21b in contact with each other via the seal members 30 and 30, the holding member 15 is held and held by the casings 21a and 21b of the respective ultraviolet irradiation units 20a and 20b. As a result, on one side and the other side of the object 11 to be processed, a process for forming a sealed space that is airtightly partitioned by the light source arrangement space S1 in which the ultraviolet radiation lamp 35 is arranged and the light transmissive window members 40a and 40b. The working space S2 is formed, and the processing surface 12 (13) of the processing object 11 and the light emitting surface 42a (42b) of the light transmissive window member 40a (40b) are arranged close to each other. The Here, the distance d between the treated surface 12 (13) of the workpiece 11 and the light emitting surface 42a (42b) of the light transmissive window member 40a (40b) is, for example, 3 mm or less, preferably 1 mm. It is as follows.

  Next, an inert gas such as nitrogen gas (indicated by a broken arrow in FIG. 2) is inactivated by an inert gas supply means (not shown) in the light source arrangement space S1 in the ultraviolet irradiation unit 20a (20b). The inert gas is supplied through the active gas supply through hole 23a, and the inert gas is circulated in the light source arrangement space S1, whereby the atmosphere in the light source arrangement space S1 is replaced with the inert gas atmosphere. On the other hand, the active species source supplying means supplies the processing space S2 by the gap between the processing surface 12 (13) of the processing object 11 and the light emitting surface 42a (42b) of the light transmissive window member 40a (40b). For example, a processing gas having an oxygen concentration of 50% by volume or more (indicated by a solid arrow in FIG. 2) is supplied through the processing gas supply through hole 28a. The processing gas is circulated in the processing space S2 along the processing surface 12 (13) of the processing object 11 and the light emitting surface 42a (42b) of the light transmissive window member 40a (40b), and the processing gas. It is discharged from the discharge through hole 28b.

Then, when the ultraviolet radiation lamp 35 in each ultraviolet radiation unit 20a (20b) is turned on, vacuum ultraviolet light (shown by a white arrow in FIG. 2) from the ultraviolet radiation lamp 35 is transmitted through the light transmitting window member 40a. It irradiates toward the to-be-processed surface 12 (13) of the to-be-processed object 11 via (40b). As a result, vacuum ultraviolet rays that reach the surface 12 (13) of the object 11 to be processed, and ozone and active species (oxygen radicals) that are generated by irradiating the processing gas with the vacuum ultraviolet rays are processed. Smear (organic resin) formed on the treated surfaces 12 and 13 of the object 11 is decomposed and removed.
In the above, the illuminance of the ultraviolet rays irradiated on the workpiece 11 is, for example, 10 to 200 mW / cm ² . Moreover, although the ultraviolet irradiation time with respect to the to-be-processed object 11 is suitably set considering the illumination intensity of an ultraviolet-ray, the residual state of a smear, etc., it is 50 to 300 seconds, for example. The ashing process is performed while the inert gas and the processing gas are continuously supplied.

Thus, according to the ashing device having the above-described configuration, the processing surfaces 12 and 13 of the object to be processed 11 are simultaneously processed. A state in which the light source arrangement space S1 that is an inert gas atmosphere and the processing space S2 in which the processing gas is circulated, which is airtightly partitioned by the conductive window member 40a (40b), constitutes a substantially sealed space. It is said. Accordingly, the degree of decrease in the amount of vacuum ultraviolet light from the ultraviolet radiation lamp 35 can be suppressed to a small level, and the atmosphere of the processing space S2 can be kept substantially constant by the processing gas being circulated. . As a result, the amount of vacuum ultraviolet light that contributes to the ashing treatment of the workpiece 11 can be increased, and active species (oxygen radicals) can be stably generated. Since the ashing process can be surely contributed, the intended ashing process can be performed efficiently and in a short time.
Further, since the object 11 is processed in a vertical posture, it is possible to prevent the object 11 from being bent due to its own weight and to perform uniform processing.

[Second Embodiment]
The ashing device according to the second embodiment of the present invention has a configuration in which vacuum ultraviolet light having a wavelength of 220 nm or less from an ultraviolet irradiation unit is irradiated to a surface to be processed through a light transmission window. A transmission window is provided on the workpiece side.

FIG. 3 is a cross-sectional view schematically showing the configuration of an example of the ashing device according to the second embodiment of the present invention.
The ashing apparatus is for processing each of the processing surfaces 12 and 13 of a flat plate-like object 11 whose one surface and the other surface are processing surfaces, and includes the object 11 to be processed. Conveying means (not shown) for conveying the workpiece holding structure 10 is provided. In this example, the workpiece holding structure 10 is in a suspended state in a direction along the surface direction of the workpiece surfaces 12 and 13 of the workpiece 11 (in FIG. 3, a direction perpendicular to the paper surface). It is conveyed to.

The workpiece holding structure 10 has a plate-like workpiece 11 and a predetermined size on each of the workpiece surfaces 12 and 13 of the workpiece 11 on one side and the other side of the workpiece 11. A pair of flat light-transmitting window members 40a and 40b disposed in parallel with each other through a gap d, and the workpiece 11 and the pair of light-transmitting window members 40a and 40b are held. And a common frame-shaped holding member 15a. And the process by the clearance gap between the to-be-processed surface 12 (13) of the to-be-processed object 11 and the light transmissive window member 40a (40b) which comprises sealed space in the one surface side and other surface side of the to-be-processed object 11 A working space S2 is formed.
The holding member 15a is formed with a processing gas distribution opening for distributing a processing gas containing an active species source activated by vacuum ultraviolet rays from the ultraviolet radiation lamp 35 to the processing space S2.

In this example, the holding member 15a includes a base body 16 made of a rectangular frame body and a cover made of a U-shaped frame body integrally provided in an embedded state on the inner surface side of the base body 16. The workpiece holder 17 is constituted. And in the cross section along the surface direction of the to-be-processed object 11, process gas is introduce | transduced and discharged | emitted to the surrounding wall of the base | substrate 16 located in the open direction (in this example, upward direction) of the to-be-processed object holding body 17. The opening 18 is formed so as to extend in the longitudinal direction of the peripheral wall (a direction perpendicular to the paper surface in FIG. 3), thereby forming a processing gas distribution opening.
The object to be processed 11 is fixed by holding the three sides around the object to be processed by the object holder 17, and each of the light transmissive window members 40 a and 40 b is held by the base 16 at the periphery (four sides). Has been fixed.

As a material constituting the base 16 in the holding member 15a, for example, a metal material such as aluminum, stainless steel, or copper can be used.
Moreover, as a material which comprises the to-be-processed object holding body 17 in the holding member 15a, resin materials, such as fluorine resins, such as Teflon (trademark), and PEEK (polyetheretherketone) resin, can be used, for example. When the workpiece holder 17 is made of a resin material, the workpiece holder 17 can function as a scratch prevention material or a buffer material for the workpiece 11.

  A pair of ultraviolet irradiation units 20a and 20b are arranged opposite to each other on both sides of the conveyance path of the workpiece holding structure 10. Each of the ultraviolet irradiation units 20a (20b) is configured by a casing 21a (21b) that is open at one side (conveyance path direction) and an ultraviolet light source disposed inside the casing 21a (21b). Here, the ultraviolet light source has the same configuration as the ultraviolet light source in the ashing device according to the first embodiment, and is configured by one or a plurality of rod-shaped ultraviolet radiation lamps 35.

The casing 21a (21b) has an inert gas supply through-hole 23a and an inert gas discharge through-hole 23b in each of a pair of opposed peripheral walls positioned in the lamp central axis direction, in the lamp central axis direction. It is formed to extend along.
In addition, an endless seal member 30 made of, for example, an O-ring is provided on the open end surface of the casing 21a (21b) over the entire circumference of the open end surface.

  This ashing device includes active species source supply means (not shown) for supplying the processing gas into the processing space S2 in the workpiece holding structure 10. Here, the active species source supply means has the same configuration as the active species source supply means in the ashing device according to the first embodiment.

  Further, the ashing apparatus moves each of the ultraviolet irradiation units 20a and 20b in a direction away from and a direction approaching the conveyance path of the workpiece holding structure 10 (indicated by white arrows in FIG. 3). Driving means (not shown) to be provided.

  Thus, in the above ashing apparatus, the workpiece holding structure 10 is transported along the transport path by the transport means and disposed at a predetermined position. Then, each of the pair of ultraviolet irradiation units 20a and 20b is sequentially moved in the direction approaching the workpiece holding structure 10 by the driving means, and as shown in FIG. 4, the holding member in the workpiece holding structure 10 15a and the end surfaces of the casings 21a and 21b of the respective ultraviolet irradiation units 20a and 20b are in contact with each other via the seal members 30 and 30, the workpiece holding structure 10 is moved to the respective ultraviolet irradiation units 20a and 20a. It is sandwiched and held by the housings 21a and 21b of 20b. As a result, the light source arrangement space S1 constituting the sealed space, which is hermetically partitioned by the processing space S2 and the light transmissive window members 40a and 40b in the workpiece holding structure 10, is a housing in the ultraviolet irradiation units 20a and 20b. It is formed inside 21a, 21b.

  Next, an inert gas such as nitrogen gas (indicated by a dashed arrow in FIG. 4) is inactivated by an inert gas supply means (not shown) in the light source arrangement space S1 in the ultraviolet irradiation unit 20a (20b). The inert gas is supplied through the active gas supply through hole 23a, and the inert gas is circulated in the light source arrangement space S1, whereby the atmosphere in the light source arrangement space S1 is replaced with the inert gas atmosphere. On the other hand, a processing gas having an oxygen concentration of, for example, 50% by volume or more is supplied to the processing space S2 in the workpiece holding structure 10 through the opening 18 by the active species source supply means.

  Then, the ultraviolet radiation lamp 35 in each ultraviolet irradiation unit 20a (20b) is turned on, so that the vacuum ultraviolet light from the ultraviolet radiation lamp 35 is applied to the object 11 to be processed via the light transmissive window member 40a (40b). Irradiation is directed toward the processing surface 12 (13). As a result, vacuum ultraviolet rays that reach the surface 12 (13) of the object 11 to be processed, and ozone and active species (oxygen radicals) that are generated by irradiating the processing gas with the vacuum ultraviolet rays are processed. Smear (organic resin) formed on the treated surfaces 12 and 13 of the object 11 is decomposed and removed.

  Thus, according to the workpiece holding structure 10 configured as described above, the light emitting surface 42a (42b) of the light transmissive window member 40a (40b) and the workpiece 12 of the workpiece 11 (13) are close to each other. The atmosphere in the processing space S2 can be kept substantially constant by the processing gas flowing through the processing space S2 formed in such a state. For this reason, it is possible to stably generate active species (oxygen radicals) by irradiating the processing gas with the vacuum ultraviolet rays from the ultraviolet radiation lamp 35, and the workpiece holding structure 10 itself can be The ashing process can be efficiently performed in a short time.

  Therefore, according to the ashing apparatus having the above-described configuration that performs the ashing process on the workpiece in the workpiece holding structure 10, the light transmission property to each other formed when the ashing process of the workpiece 11 is performed. A state in which the light source arrangement space S1 that is an inert gas atmosphere and the processing space S2 in which the processing gas is circulated, which is airtightly partitioned by the window member 40a (40b), constitutes a substantially sealed space; Is done. Accordingly, the degree of decrease in the amount of vacuum ultraviolet light from the ultraviolet radiation lamp 35 can be suppressed to a small level, and the atmosphere of the processing space S2 can be kept substantially constant by the processing gas being circulated. . As a result, it is possible to increase the amount of vacuum ultraviolet light that contributes to the ashing process of the object 11 to be processed, and to reliably contribute the generated active species to the ashing process of the object 11 to be processed. The ashing process can be efficiently performed in a short time.

Moreover, since the to-be-processed surfaces 12 and 13 of the to-be-processed object 11 are covered by the light transmissive window members 40a and 40b, the to-be-processed object 11 is damaged, for example at the time of conveyance of the to-be-processed object holding structure 10. Can be prevented.
Further, since the object 11 is processed in a vertical posture, it is possible to prevent the object 11 from being bent due to its own weight and to perform uniform processing.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, in the ashing device according to the first embodiment, the window holding body that holds the light transmissive window member may be formed integrally with the housing body.

In the ashing apparatus of the present invention, it is preferable that the ashing process is performed in a state where the temperature of the surface to be processed of the object to be processed is raised. Specifically, for example, the heating means for heating the surface to be processed of the object to be processed is disposed at a position upstream of the light irradiation processing region by the ultraviolet irradiation unit in the conveyance path of the object to be processed or the object holding structure. It can be set as the structure made. According to such a configuration, the action of ozone and active species can be promoted as the temperature of the surface to be processed of the object to be processed increases, so that the ashing process can be performed with higher efficiency. . In the ashing device according to the third embodiment, a heating means may be provided in the workpiece holding structure to raise the temperature of the workpiece surface of the workpiece.
Furthermore, the same effect can be obtained even if the temperature of the surface to be processed of the object to be processed is increased by circulating the processing space in a state where the temperature of the processing gas is raised by heating. .
The heating condition is preferably such that the temperature of the surface to be processed of the object to be processed is, for example, 80 ° C. or higher and 340 ° C. or lower, more preferably 80 ° C. or higher and 200 ° C. or lower.

  Furthermore, the ashing apparatus of the present invention can be configured to be provided with physical vibration processing means for applying physical vibration to the workpiece during the light irradiation process. According to such a configuration, the active species generated in the processing space can be easily supplied into, for example, a via hole or a through hole in the wiring board material, so that the ashing process can be performed more reliably.

  The ashing device of the present invention is not only for removing smears such as multilayer wiring boards, but also for example, from the surface of a substrate in the manufacturing process of a substrate such as a semiconductor substrate or a liquid crystal panel, or a dry cleaning treatment of a template surface in a nanoimprinting device. It can be used for various ashing processes such as a process for removing the resist and a process for removing the resist residue attached to the substrate on which the resist removal process has been performed.

DESCRIPTION OF SYMBOLS 10 Processed object holding structure 11 Processed object 12, 13 Processed surface 15, 15a Holding member 16 Base | substrate 17 Processed object holding body 18 Opening 20a, 20b Ultraviolet irradiation unit 21a, 21b Case 22a, 22b Case main body 23a Inert gas supply through hole 23b Inert gas discharge through hole 25a, 25b Window holder 26 Window member holding portion 27 Projecting edge portion 28a Processing gas supply through hole 28b Processing gas discharge through hole 30 Seal member 35 Ultraviolet radiation lamps 40a and 40b Light transmissive window members 41a and 41b Light incident surfaces 42a and 42b Light emitting surfaces S1 Light source arrangement space S2 Processing space

Claims (4)

A pair of light transmission windows facing each of the surfaces to be processed of the plate-like object to be processed whose one surface and the other surface are the surfaces to be processed, and each of the surfaces to be processed via the light transmission windows, respectively. A pair of ultraviolet irradiation units equipped with an ultraviolet light source for irradiating vacuum ultraviolet rays,
A frame-shaped holding member that holds the periphery of the object to be processed is sandwiched and held by a housing in the pair of ultraviolet irradiation units, so that the object to be processed is provided on one surface side and the other surface side of the object to be processed. A processing space formed by a gap having a predetermined size formed between a surface to be processed of the object and a light emitting surface of the light transmission window, and a light source arrangement space in which the ultraviolet light source is disposed are the light transmission window. Formed in an airtight manner, and
The inside of the light source arrangement space is an inert gas atmosphere, and a processing gas containing an activated species source activated by vacuum ultraviolet light from the ultraviolet light source is circulated in the processing space. Ashing device. Each of the pair of ultraviolet irradiation units includes a housing that is open on one side,
Each of the light transmissive windows is configured by a plate-like light transmissive window member that is airtightly held at a position on the inner side of the opening edge of the housing.
A processing gas flow opening for flowing a processing gas into the processing space is formed at a protruding edge portion protruding outward from the light transmissive window member in each of the casings. The ashing device according to claim 1.   Each of the light transmission windows is configured by a plate-like light transmission window member held by a holding member that holds an object to be processed, and the holding member includes a processing gas in the processing space. The ashing device according to claim 1, wherein a processing gas circulation opening for circulating the gas is formed. A workpiece holding structure for light irradiation treatment,
A pair of plate-like lights disposed on the plate-like object to be processed and on the one surface side and the other surface side of the object to be processed so as to face the one surface and the other surface with a gap of a predetermined size, respectively. A transparent window member, and a common frame-shaped holding member that holds the periphery of the object to be processed and the pair of light-transmissive window members, and each of the gaps includes the holding member. An object to be processed holding structure is characterized in that a processing gas distribution opening for allowing the processing gas to flow therethrough is formed.

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