JP2015099271A5

JP2015099271A5 -

Info

Publication number: JP2015099271A5
Application number: JP2013239231A
Authority: JP
Filing date: 2013-11-19
Publication date: 2017-01-05
Anticipated expiration: 2033-11-19

Description

本発明は、たとえば、
少なくとも一部が導電性部材で形成された振動部と、
前記振動部のうち前記導電性部材で形成された部分を通じて電気的に互いに接続され、前記振動部の少なくとも片側を支持する複数の金属ねじり梁と、
前記複数の金属ねじり梁に対して駆動電流を通電する駆動回路と、
前記複数の金属ねじり梁を流れる電流に対して磁界が作用するように配置された磁石と、を備え、
前記駆動回路は、前記振動部に回転振動を発生させるための第１の周波数の駆動電流を前記複数の金属ねじり梁に対して通電することを特徴とする振動装置を提供する。 The present invention is, for example,
A vibrating portion at least partially formed of a conductive member;
A plurality of metal torsion beams that are electrically connected to each other through a portion formed of the conductive member of the vibrating portion and support at least one side of the vibrating portion;
A drive circuit for supplying a drive current to the plurality of metal torsion beams;
A magnet arranged so that a magnetic field acts on a current flowing through the plurality of metal torsion beams,
The drive circuit provides a vibration device characterized in that a drive current having a first frequency for generating rotational vibration in the vibration unit is applied to the plurality of metal torsion beams .

ねじり梁１１、１２の脇には磁石４２、４３が配置（併設）されている。磁石４２、４３が発生する磁界がねじり梁１１、１２を流れる電流に作用する。図６において、駆動回路２４３、２４４は、駆動回路２４５として一体化されており、第１の周波数ｆ１の駆動電流と第２の周波数ｆ２の駆動電流とが重畳された駆動電流をねじり梁１１、１２に通電する。第１の周波数ｆ１は振動ミラー１０の回転振動モード近傍の周波数であり、第２の周波数ｆ２は振動ミラー１０の共振モードと重ならない周波数である。ねじり梁１１、１２および導電性部材１３によって電流ループが形成されているため、第１の周波数ｆ１の駆動電流はねじり梁１１、１２を通過する際に磁石４２、４３からの磁界による作用を受ける。その結果、振動ミラー１０に回転軸Ｌを中心にした回転トルクが励起される。第２の周波数ｆ２の駆動電流はねじり梁１１、１２を加熱させるため、ねじり梁１１、１２の温度が環境温度よりも高い所定の温度に維持される。その結果、ねじり梁１１、１２のばね特性が所望の特性に安定する。このときの制御方法はすでに説明したとおりである。 Magnets 42 and 43 are arranged (adjacent) beside the torsion beams 11 and 12. The magnetic field generated by the magnets 42 and 43 acts on the current flowing through the torsion beams 11 and 12. In FIG. 6, the drive circuits 243 and 244 are integrated as a drive circuit 245, and the drive current in which the drive current of the first frequency f1 and the drive current of the second frequency f2 are superimposed on the torsion beam 11, 12 is energized. The first frequency f1 is a frequency in the vicinity of the rotational vibration mode of the oscillating mirror 10, and the second frequency f2 is a frequency that does not overlap with the resonance mode of the oscillating mirror 10. Since the current loop is formed by the torsion beams 11 and 12 and the conductive member 13, the drive current of the first frequency f 1 is affected by the magnetic field from the magnets 42 and 43 when passing through the torsion beams 11 and 12. . As a result, rotational torque about the rotation axis L is excited in the vibrating mirror 10. Since the drive current of the second frequency f2 heats the torsion beams 11 and 12, the temperature of the torsion beams 11 and 12 is maintained at a predetermined temperature higher than the environmental temperature. As a result, the spring characteristics of the torsion beams 11 and 12 are stabilized to a desired characteristic. The control method at this time is as already described.

Claims

  A vibrating portion at least partially formed of a conductive member;
  A plurality of metal torsion beams that are electrically connected to each other through a portion formed of the conductive member of the vibrating portion and support at least one side of the vibrating portion;
  A drive circuit for supplying a drive current to the plurality of metal torsion beams;
  A magnet arranged so that a magnetic field acts on a current flowing through the plurality of metal torsion beams,
  The drive circuit supplies a drive current having a first frequency for generating rotational vibration to the vibration unit to the plurality of metal torsion beams.

The drive current of the first frequency, the drive current of the first frequency, and the drive current of the first frequency so that the temperature of the plurality of metal torsion beams becomes a current amount of drive current maintained at a predetermined temperature higher than the environmental temperature. 2. The vibration device according to claim 1, further comprising control means for controlling drive currents having different second frequencies.

The vibration device according to claim 1, wherein the plurality of metal torsion beams are provided on both sides of the vibration part.

The other end side of the plurality of metal torsion beams, one end of which is connected to the vibrating portion, is electrically insulated and fixed to a fixing member. The vibration device described.

5. The vibration device according to claim 1, wherein the plurality of metal torsion beams are formed of an alloy material that forms the conductive member. 6.

An optical scanning device comprising the vibration device according to claim 1.