JP2015095620A - Dividing method and cooling mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dividing method by which a sufficient interval is formed between chips and even a highly ductile material can be divided with high accuracy, and to provide a cooling mechanism used in the dividing method.SOLUTION: A dividing method for a work piece comprises: a holding step in which an expandable sheet 7 on the outer periphery side of a work piece W is held by first, second, third, and fourth holding means 10A, 10B, 10C, and 10D; a cooling step in which cooling air is jetted to the rear face of the expandable sheet 7 and also cooling air is jetted to the surface Wa of the work piece W, thereby cooling the work pieces W; and a dividing step in which the expandable sheet 7 is expanded, thereby dividing the work piece W having a dividing initiation point as a starting point. Accordingly, the work piece W can be divided with high accuracy. Additionally, since an interval formation step is carried out after the dividing step, a sufficient interval is formed between adjacent chips C, thereby preventing contact of chips C during the handling of the work piece W.

Description

  The present invention relates to a dividing method for dividing a workpiece on which division starting points are formed and a cooling mechanism capable of cooling the workpiece in the dividing method.

  Devices to be processed such as semiconductor wafers are respectively formed in regions partitioned by grid-like division lines on the surface thereof, and individual device chips having devices by dividing along the division lines It is divided into. As a method of dividing a work piece into individual device chips, a laser beam having a wavelength that is transparent to the work piece is positioned inside the work piece corresponding to the division line, and laser light is positioned. Has been proposed to divide the workpiece by applying an external force to the workpiece after the modified layer is formed inside the workpiece by irradiating along the planned dividing line (for example, the following) Patent Document 1).

  In addition, in the above method, there is also proposed a method of dividing a workpiece by forming a modified layer inside the workpiece by laser irradiation and then polishing and thinning the workpiece. (For example, see Patent Document 2 below). Since the workpiece divided by the dividing method has no space between the divided chips, there is a possibility that adjacent chips may come into contact with each other and be damaged when the workpiece is handled. For this reason, Patent Document 3 below discloses an expansion device that can expand a sheet to which a workpiece is attached to form a gap between adjacent chips. The expansion device disclosed in Patent Document 3 is also used as a device for applying an external force for dividing a workpiece.

Japanese Patent No. 3408805 Japanese Patent No. 3762409 JP 2011-077742A

  In the expansion device described above, since the sheet is expanded radially, the expansion amount of the sheet is almost the same in any direction. Therefore, for example, if the chip size is different in the vertical and horizontal directions, the interval formed between the chips is different in the first direction (for example, the vertical direction of the chip) and the second direction (for example, the horizontal direction of the chip). Even if the gap is formed, the gap is insufficient in the other direction, and adjacent chips may come into contact with each other when the workpiece is handled. In addition, when the workpiece is made of a highly ductile material, there is a problem that even if the sheet is expanded, it is difficult to be divided.

  The present invention has been made in view of the above circumstances, and even when the workpieces have different chip sizes in the vertical and horizontal directions, a sufficient space is formed between the chips by expanding the sheet, and the sheet is made of a highly ductile material. The purpose of this is to make it possible to divide with high accuracy.

  The present invention is a method for dividing a workpiece having a division starting point along a division line, and an adhesion step for adhering the workpiece on an expanded sheet having a size larger than the workpiece, First clamping means and second clamping means opposed to each other in the direction of the workpiece, and third clamping means and fourth opposed to sandwich the workpiece in the second direction orthogonal to the first direction. A sandwiching step for sandwiching the expanded sheet on the outer peripheral side of the workpiece by the sandwiching means, and after performing the sandwiching step, cooling air is sprayed to the back surface side of the expanded sheet and applied to the surface of the workpiece. A cooling step of cooling the workpiece by injecting cooling air; and during the cooling step or after the cooling step, the first clamping means and the second clamping means are And the third clamping means and the fourth clamping means are separated from each other in the second direction to expand the expanded sheet, thereby dividing the workpiece from the division starting point. A dividing step.

  In the present invention, after performing the cooling step, after performing the cooling stop step of stopping the injection of the cooling air, the cooling stop step, and the dividing step, the first clamping means and the second clamping means And the third clamping means and the fourth clamping means are separated from each other in the second direction to expand the expanded sheet. An interval forming step for forming an interval between the chips of the workpiece.

  In the present invention, after the dividing step is performed, the divided workpiece is accommodated in the opening of the annular frame, the back surface of the annular frame is pasted on the expanded sheet, and the expanded sheet is annularly formed. An annular frame mounting step for forming a workpiece unit in which the workpiece divided through the expanded sheet is mounted on the annular frame.

  Furthermore, the present invention is a workpiece cooling mechanism used in the above dividing method, and includes a first plate portion having a size larger than the workpiece, and a first side wall portion depending from the first plate portion. A first cooling chamber defined by the first side wall portion, and a first cooling air jet port connected to a cooling air supply source is formed on the first plate portion or the first side wall portion. The first box body and the work piece adhered to the surface of the expanded sheet are covered with the first cooling chamber, and the cooling air flows out between the expanded sheet and the lower surface of the first side wall portion. First moving means for moving the first box relative to the surface of the expanded sheet on which the work piece is adhered to a cooling position and a retreat position where a gap is formed; and a first moving means having a size larger than the work piece. A second plate portion and a second side wall portion erected from the second plate portion, A first cooling body having a second cooling chamber defined by a side wall portion, wherein the second plate portion or the second side wall portion has a second cooling air jet port connected to a cooling air supply source; A second box that forms a pair with the workpiece, and the workpiece is covered with the second cooling chamber from the back side of the expanded sheet with the workpiece adhered to the surface, and the upper surface of the expanded sheet and the second side wall portion. A second moving means for moving the second box relative to the back surface of the expanded sheet on which the work piece is pasted at a cooling position and a retreat position in which a gap for cooling air outflow is formed, Is provided.

The dividing method according to the present invention includes a first clamping means and a second clamping means opposed to the first direction, and a third clamping means and a fourth clamping means opposed to the second direction, from the outer peripheral side of the workpiece. In order to sandwich the protruding expand sheet, separate the first sandwiching means and the second sandwiching means, and separate the third sandwiching means and the fourth sandwiching means, the expansion amounts differ in the first direction and the second direction. The expanded sheet can be expanded, and the workpiece can be reliably divided.
Further, in the above dividing method, after the clamping step is performed, the cooling step is performed at the same time as the dividing step or before the dividing step is performed. Therefore, the protective film or the workpiece itself to be adhered to the workpiece Is formed of a material having high ductility, the ductility can be lowered by cooling the protective film or the workpiece itself, and it can be easily divided with high accuracy.

  By performing the cooling stop step after the cooling step and then performing the interval forming step, the expanded tape can be expanded with the expanded ductility restored, so that there is sufficient space between adjacent chips. An interval can be formed and adjacent chips can be prevented from coming into contact with each other when a workpiece divided into individual chips is handled.

  By performing the annular frame mounting step after performing the dividing step, the annular frame becomes unnecessary when the workpiece is cooled, so it takes time for the annular frame to return to room temperature after the cooling step is performed, There is no problem of condensation on the annular frame in a room temperature atmosphere.

  The cooling mechanism according to the present invention can cover the workpiece on the front side of the expanded sheet with the first cooling chamber, and can cover the back side of the expanded sheet with the second cooling chamber. The amount of cooling air used in the chamber can be reduced, energy for cooling the workpiece can be reduced, and the workpiece can be rapidly cooled. In addition, the cooling mechanism is not provided with a cooling chamber that cools the work piece together with the annular frame, so there is no need to fill the cooling chamber with cooling air, and the cooling air used can be further reduced. Can be suppressed.

It is a perspective view which shows an example of an expansion device. It is a perspective view which shows an example of the expanded sheet on which the workpiece was stuck. It is sectional drawing which shows the structure of a cooling mechanism. It is sectional drawing which shows the 1st example of a sticking step. It is sectional drawing which shows the 2nd example of a sticking step. It is a top view which shows a clamping step. It is sectional drawing which shows a clamping step. It is sectional drawing which shows a cooling step and a division | segmentation step. It is sectional drawing which shows a cooling stop step. It is sectional drawing which shows a normal temperature air injection step. It is sectional drawing which shows a space | interval formation step. It is sectional drawing which shows an annular frame mounting step.

1 Configuration of Expansion Device The expansion device 1 illustrated in FIG. 1 is an example of an expansion device that can expand the expanded sheet 7 to which the workpiece W illustrated in FIG. 2 is attached. The expansion device 1 has a device base 2, and a holding table 3 that holds a workpiece W via an expand sheet 7 can be moved up and down by a table support 30 at the center of the upper surface 2 a of the device base 2. It is supported. The upper surface of the holding table 3 is a holding surface 3 a that holds the workpiece W.

  On the upper surface 2a of the apparatus base 2, a first holding means 10A and a second holding means 10B for expanding the expanded sheet 7 shown in FIG. 2 in the ± X direction (first direction) are held in the first direction. 3 are arranged to face each other so as to sandwich 3.

  Further, on the upper surface 2a of the apparatus base 2, the third clamping means 10C and the fourth clamping means 10D for expanding the expand sheet 7 in the ± Y direction (second direction) orthogonal to the ± X direction are in the second direction. In FIG. 2, the holding tables 3 are disposed so as to face each other.

  The first clamping means 10A and the second clamping means 10B are formed on the lower clamping mechanism 11a that presses the lower surface of the expanded sheet 7, the upper clamping mechanism 12a that presses the upper surface of the expanded sheet 7, and the upper surface 2a of the apparatus base 2. A movable base 13a movably disposed along the recessed portion 4a and the recessed portion 4b, and a first direction moving means 14a for moving the lower holding mechanism 11a and the upper holding mechanism 12a in the first direction. Each has. The third clamping means 10C and the fourth clamping means 10D are provided along the lower clamping mechanism 11b that presses the lower surface of the expanded sheet 7, the upper clamping mechanism 12b that presses the upper surface of the expanded sheet 7, and the concave portion 4c and the concave portion 4d. A movable base 13b that is movably disposed, and a second direction moving means 14b that moves the lower clamping mechanism 11b and the upper clamping mechanism 12b in the second direction are provided.

  The lower clamping mechanism 11 a includes a lower clamping part 110 having a rectangular parallelepiped shape extending in the second direction, and an L-shaped arm part 111 having one end connected to the lower clamping part 110. On the upper surface side of the lower clamping unit 110, a plurality of rollers 113 are arranged in a direction parallel to the second direction. The plurality of rollers 113 provided in the lower clamping mechanism 11a can rotate around a rotation axis parallel to the first direction, and about half of the outer peripheral surface protrudes from the upper surface of the lower clamping unit 110 and is mounted. Yes.

  The upper clamping mechanism 12a includes an upper clamping unit 120 extending in parallel with the lower clamping unit 110, and an L-shaped arm unit 121 having one end connected to the upper clamping unit 120. A plurality of rollers (not shown) are arranged in alignment in a direction parallel to the second direction. The plurality of rollers provided in the upper clamping mechanism 12a can rotate around a rotation axis parallel to the first direction, and about half of the outer peripheral surface protrudes from the lower surface of the upper clamping unit 120 and is mounted.

  The lower clamping mechanism 11b includes a rectangular parallelepiped lower clamping part 110 extending in a first direction, and an arm part 112 having an end connected to the lower clamping part 110 and extending in a second direction. On the upper surface side of the lower clamping unit 110, a plurality of rollers 113 are arranged in a direction parallel to the first direction. The plurality of rollers 113 provided in the lower clamping mechanism 11b can rotate around a rotation axis parallel to the second direction, and about half of the outer peripheral surface protrudes from the upper surface of the lower clamping unit 110 and is mounted. Yes.

  The upper clamping mechanism 12 b includes an upper clamping unit 120 extending in parallel with the lower clamping unit 110 and an arm unit 122 having one end connected to the upper clamping unit 120 and extending in parallel with the arm unit 112. A plurality of rollers (not shown) are arranged on the lower surface side of the upper clamping unit 120 in alignment with a direction parallel to the first direction. The plurality of rollers provided in the upper clamping mechanism 12a are rotatable around a rotation axis parallel to the second direction, and about half of the outer peripheral surface protrudes from the lower surface of the upper clamping unit 120 and is mounted.

  The first direction moving means 14a includes a ball screw 140 extending in the X-axis direction, a bearing portion 141 that rotatably supports one end of each ball screw 140, and a motor 142 connected to the other end of each ball screw 140. Provided on the upper surface 2 a of the apparatus base 2. The second direction moving means 14b includes a ball screw 140 extending in the Y-axis direction, a bearing portion 141 that rotatably supports one end of each ball screw 140, and a motor 142 connected to the other end of each ball screw 140. Provided on the upper surface 2a of the apparatus base 2, respectively.

  The movable base 13a includes a support portion 130 that supports the lower holding portion 11a and the upper holding portion 12a, a slide portion 131 that is connected to the lower portion of the support portion 130 and is movable in the first direction, and one of the support portions 130. A guide rail 132 formed on the surface side of the support portion 130 and a guide groove 133 formed so as to penetrate from the one surface side of the support portion 130 to the other surface side. A ball screw 140 is screwed into a nut formed inside the slide portion 131, and the slide portion 131 can be reciprocated in the first direction by driving the ball screw 140 by the motor 142.

  The movable base 13b includes an L-shaped support part 134 that supports the lower holding part 11b and the upper holding part 12b, and a slide part 135 that is movable in the second direction is provided below the support part 134. Are connected. A ball screw 140 is screwed into a nut formed inside the slide portion 135, and the slide portion 135 can be reciprocated in the second direction by driving the ball screw 140 by the motor 142.

  The movable base 13a and the movable base 13b are provided with a lower lifting means 15 for raising and lowering the lower clamping mechanism 11a and the lower clamping mechanism 11b, and an upper lifting means 16 for raising and lowering the upper clamping mechanism 12a and the upper clamping mechanism 12b. Is disposed along the guide groove 133. The lower lifting means 15 includes a ball screw 150 extending in the Z-axis direction, a bearing portion 151 connected to one end of the ball screw 150, and a motor 152 connected to the other end of the ball screw 150. The ball screw 150 is screwed into a nut formed on the base end portion 111a of the arm portion 111 and the base end portion 112a of the arm portion 112, and the ball screw 150 is driven by the motor 152, whereby the lower clamping mechanism 11a and The lower clamping mechanism 11b can be moved up and down in the Z-axis direction.

  The upper lifting / lowering means 16 has the same configuration as the lower lifting / lowering means 15, and is connected to the ball screw 160 extending in the Z-axis direction, a bearing portion 161 connected to one end of the ball screw 160, and the other end of the ball screw 160. And a motor 162. The ball screw 160 is screwed into nuts formed on the base end portion 121a of the arm portion 121 and the base end portion 122a of the arm portion 122, and the ball screw 160 is driven by the motor 162, whereby The clamping mechanism 12b can be moved up and down in the Z-axis direction.

2 Configuration of Cooling Mechanism The cooling mechanism 20 shown in FIG. 3 is a cooling mechanism that cools the workpiece W when the expander 1 expands the expanded sheet 7 shown in FIG. It is an example. The cooling mechanism 20 is mounted on the expansion device 1 and includes a first box 21 that covers the upper side of the workpiece W and a second box 23 that covers the lower side of the workpiece W. I have.

  The first box body 21 includes a first plate part 210 having a size larger than the workpiece W and a first side wall part 211 depending from the outer peripheral end of the first plate part 210, and the first side wall part 211. The first cooling chamber 212 is defined by For example, when the first plate portion 210 is formed in a circular shape, the diameter of the first plate portion 210 is formed longer than the diameter of the workpiece W. A first air outlet 213 is formed in the first plate portion 210. In the illustrated example, the first air outlet 213 is formed in the first plate portion 210, but may be formed in the first side wall portion 211. The second box 23 includes a second plate portion 230 having a size larger than the workpiece W, and a second side wall portion 231 erected from the outer peripheral end of the second plate portion 230. A second cooling chamber 232 defined by the side wall portion 231 is provided. For example, when the second plate portion 230 is formed in a circular shape, the diameter of the second plate portion 230 is longer than the diameter of the workpiece W. A second air outlet 233 is formed in the second plate portion 230. The second air outlet 233 may also be formed on the second side wall portion 231.

  The first box body 21 and the second box body 23 are made of a heat insulating member, for example, polypropylene having a low thermal conductivity. The first air outlet 213 is selectively connected to the cooling air supply source 25 and the room temperature air supply source 26 via the first valve 27. By switching the first valve 27, the cooling air supply source 25 can be communicated with or blocked from the first cooling air flow path 215 connected to the first air outlet 213. Further, by switching the first valve 27, the room temperature air supply source 26 can be communicated with or blocked from the first room temperature air flow path 216 connected to the first air outlet 213.

  The cooling mechanism 20 includes first moving means 22 for moving the first box 21 in the vertical direction and the horizontal direction with respect to the upper surface of the expanded sheet 7 to which the workpiece W is adhered, and the workpiece W is adhered. Second moving means 24 for moving the second box 23 in the vertical and horizontal directions with respect to the lower surface of the expanded sheet 7 is provided.

  The first moving means 22 is connected to a spring 220 having one end fixed to the first plate portion 210, a support plate 221 having the other end of the spring 220 fixed to support the first plate portion 210, and an upper surface of the support plate 221. The transfer arm 222 is provided. The first box body 21 can be positioned at the cooling position and the retracted position by the movement of the transfer arm 222 in the horizontal direction or the vertical direction. Here, the cooling position of the first box body 21 is a slight gap for cooling air to flow between the expanded sheet 7 and the upper surface of the first side wall 211 while covering the workpiece W in the first cooling chamber 212. The position where 214 is formed is indicated. On the other hand, the retracted position of the first box body 21 refers to a position where the first box body 21 is farther from the workpiece W than the cooling position.

  The second moving means 24 has the same configuration as the first moving means 22, and a spring 240 having one end fixed to the second plate portion 230, and the other end of the spring 240 fixed to the second plate portion 230. A support plate 241 to be supported and a transfer arm 242 connected to the upper surface of the support plate 241 are provided. By moving the transfer arm 242 in the horizontal direction or the vertical direction, the second box body 23 can be positioned at the cooling position and the retreat position. Here, the cooling position of the second box body 23 is a slight gap for cooling air to flow between the expanded sheet 7 and the upper surface of the second side wall portion 231 while covering the workpiece W in the second cooling chamber 232. The position where 234 is formed is indicated. On the other hand, the retracted position of the second box body 23 refers to a position where the second box body 23 is farther from the workpiece W than the cooling position.

3. Dividing Method Hereinafter, a method of dividing the workpiece W subjected to the DBG processing shown in FIG. 4 while using the cooling mechanism 20 shown in FIG. 3 in the expansion device 1 shown in FIG. 1 will be described. Here, DBG (Dicing Before Grinding) processing means that, as shown in FIG. 4 (a), the groove G is formed by cutting along the planned dividing line of the workpiece W before thinning the workpiece. The workpiece W is ground and the workpiece W is separated into individual chips C starting from the groove G. A tape 5 that protects the surface Wa of the workpiece W is attached to the surface Wa of the workpiece W that has been subjected to the DBG processing, and DAF ( A highly ductile film 6 called “Die Attach Film” is attached. The film 6 itself may be a workpiece.

(1) Adhesion step As shown in FIG. 4A, the workpiece W is adhered to the expanded sheet 7 having a size larger than the diameter of the workpiece W. Specifically, the expanding surface 7 is pulled out in the first direction in the expansion device 1 shown in FIG. 1 from the roll unit 70 in which the expanding sheet 7 is wound in a roll shape shown in FIG. After placing horizontally on 3 a, the film 6 on the back surface Wb side of the workpiece W is stuck on the upper surface of the expanded sheet 7. At the time of sticking, the direction of the groove G formed vertically and horizontally is made parallel to the first direction or the second direction. Thereafter, as shown in FIG. 4B, the workpiece W is sucked and held by the holding surface 3 a of the holding table 3, and the tape 5 is peeled from the surface Wa of the workpiece W. In this way, the workpiece W is adhered to the expanded sheet 7 so that the expanded sheet 7 protrudes from the outer peripheral side of the workpiece W.

  In addition, the film 6 may not be attached in advance to the back surface Wb of the workpiece W, and the film 6 is attached in advance to the upper surface of the expanded sheet 7 as shown in FIG. The workpiece W may be stuck on the upper surface of the expanded sheet 7 by sticking the workpiece W.

(2) Nipping Step After the sticking step is performed, the expanded sheet 7 protruding from the outer peripheral side of the workpiece W is sandwiched using the expansion device 1 shown in FIG. First, the two first direction moving means 14a are operated, and the slide portions 131 are horizontally moved in the first direction so that the first holding means 10A and the second holding means 10B approach each other. That is, the first clamping means 10A is moved in the + X direction, and the second clamping means 10B is moved in the -X direction. Further, the two second direction moving means 14b are operated to horizontally move the slide portions 135 in the second direction so that the third holding means 10C and the fourth holding means 10D approach each other. That is, the third clamping means 10C is moved in the + Y direction, and the fourth clamping means 10D is moved in the -Y direction. In this way, as shown in FIG. 6, the first clamping means 10A, the second clamping means 10B, the third clamping means 10C, and the fourth clamping means 10D are brought close to each other. At this time, the expanded sheet 7 placed horizontally on the holding surface 3a of the holding table 3 is shown in FIG. Each of the lower holding portions 110 and each of the upper holding portions 120 is positioned.

  Next, each lower raising / lowering means 15 is operated to raise each lower holding part 110 and each upper raising / lowering means 16 is operated to lower each upper holding part 120. As shown in FIG. 7, the roller 113 of the lower clamping unit 110 presses the lower surface of the expanded sheet 7 and the roller 123 of the upper clamping unit 120 presses the upper surface of the expanded sheet 7. The upper and lower surfaces of the expanding sheet 7 protruding on the outer peripheral side are sandwiched. After the expanded sheet 7 is clamped by the first clamping means 10A, the second clamping means 10B, the third clamping means 10C, and the fourth clamping means 10D, the holding table 3 is lowered to expand the expanded sheet 7 and the covered sheet from the holding surface 3a. The workpiece W is separated.

(3) Cooling Step After performing the sandwiching step, as shown in FIG. 8, the workpiece W adhered to the upper surface of the expanded sheet 7 is cooled using the cooling mechanism 20. The first box body 21 is moved to the upper side of the workpiece W adhered to the upper surface of the expanded sheet 7 by the transport arm 222 of the first moving means 22. Further, the second box body 23 is moved to the lower side of the expanded sheet 7 by the transport arm 242 of the second moving means 24. Next, the first moving means 22 operates to move the first box 21 to the cooling position, and the second moving means 24 operates to move the second box 23 to the cooling position.

  When the first box 21 and the second box 23 are moved to the cooling position, the first valve 27 and the second valve 28 are opened, and the cooling air supply source 25 is connected to the first cooling air flow path 215 and the second cooling air flow. Communicate with the road 235. Cooling air is injected into the first cooling chamber 212 from the first cooling air outlet 213, and cooling air is injected into the second cooling chamber 232 from the second cooling air outlet 233. The cooling air accumulated in the first cooling chamber 212 and the second cooling chamber 232 flows out from the gap 214 and the gap 234 to the outside. The allowable amount of cooling air in the first cooling chamber 212 and the second cooling chamber 232 is, for example, 100 cc.

  Cooling air is continuously injected into the first cooling chamber 212 and the second cooling chamber 232 for about 1 minute, for example, and the room temperature is lowered to, for example, −10 ° C. As a result, the workpiece W covered by the first cooling chamber 212 and the second cooling chamber 232 and the film 6 attached to the workpiece W are rapidly cooled. When the film 6 is cooled, the ductility becomes low and the film 6 is easily divided. At this time, the flow rate of the cooling air in the first cooling chamber 212 and the second cooling chamber 232 is adjusted as necessary. For example, when the flow rate of the cooling air to the first cooling chamber 212 and the second cooling chamber 232 increases, the spring 220 and the spring 240 contract to bring the first box body 21 and the second box body 23 into the retracted position. Move.

(4) Dividing Step While performing the cooling step, the expanded sheet 7 is expanded by the first clamping means 10A, the second clamping means 10B, the third clamping means 10C, and the fourth clamping means 10D shown in FIG. The object W and the film 6 are divided.

  The two first direction moving means 14a shown in FIG. 1 are operated, and the slide portions 131 are horizontally moved in the first direction so that the first holding means 10A and the second holding means 10B are separated from each other. . That is, the first clamping means 10A is moved in the −X direction, and the second clamping means 10B is moved in the + X direction. The relative separation distance between the first clamping means 10A and the second clamping means 10B is the amount of expansion of the expanded sheet 7 in the first direction.

  Further, by operating the two second direction moving means 14b, the slide parts 135 are moved in the second direction in the recessed parts 4c and the recessed parts 4d so that the third holding means 10C and the fourth holding means 10D are separated from each other. Move horizontally. That is, the third clamping means 10C is moved in the −Y direction, and the second clamping means 10B is moved in the + Y direction. The relative separation distance between the third clamping means 10C and the second clamping means 10B is the amount of expansion of the expanded sheet 7 in the second direction. The expansion in the first direction and the expansion in the second direction may be performed at the same time or may be performed at different timings.

  The expansion amount in the first direction and the expansion amount in the second direction of the expand sheet 7 may be the same or different. For example, in the case where the chips C constituting the workpiece W are formed in a square shape in plan view, the number of division lines to be parallel to the first direction and the number of division lines to be parallel to the second direction are Therefore, the expansion amount in the first direction and the expansion amount in the second direction of the expand sheet 7 are made equal. On the other hand, the chip C is formed in a rectangle having a long side and a short side in plan view. For example, when the long side is parallel to the first direction and the short side is parallel to the second direction, Because the number of planned division lines parallel to the direction of the number is larger than the number of planned division lines parallel to the second direction, the expansion amount in the first direction and the expansion amount in the second direction of the expand sheet 7 are made equal. In this case, the amount of expansion per line is smaller for the division line scheduled in parallel with the first direction. Therefore, in this case, by making the expansion amount in the second direction larger than the expansion amount in the first direction, the division line parallel to the first direction and the division line parallel to the second direction The amount of expansion can be made uniform.

  In this way, the first clamping means 10A, the second clamping means 10B, the third clamping means 10C, and the fourth clamping means 10D move in directions away from each other. The expanded sheet 7 clamped by the roller 113 of the section 110 and the roller 123 of each upper clamping section 120 is pulled outward. At this time, since the cooling step is performed at the same time, the cooled film 6 is in a state of being easily divided, and as the expanded sheet 7 expands, as shown in the partially enlarged view, the groove G The film 6 is broken together with the workpiece W from the starting point, and is divided into individual chips C with the film 6 with high accuracy.

  Further, while the expand sheet 7 is expanded in the first direction, the roller 113 provided in the lower holding mechanism 11b and the upper holding mechanism 12b are shown following the extension in the first direction. Roller not to roll in the first direction. In addition, while the expand sheet 7 is expanded in the second direction, the roller 113 provided in the lower holding mechanism 11a and the upper holding mechanism 12a are shown following the expansion in the second direction. Roller not to roll in the second direction. Therefore, the expansion of the expand sheet 7 in the first direction and the second direction is smoothly performed.

  In addition, when the workpiece W is not divided into individual chips C and the division starting points are formed between the chips, by executing the dividing step, the division starting points are broken and the individual chips C are broken. Can be divided into Moreover, the space | interval of the adjacent chip | tip C can be expanded by expanding the expanded sheet 7 further after division | segmentation.

  Since the cooling state inside the first cooling chamber 212 and the second cooling chamber 232 continues for a predetermined time after the cooling step is performed, the dividing step may be performed after the cooling step and the cooling stop step described later are performed. .

(5) Cooling stop step After performing the cooling step (after performing the cooling step together with the dividing step), the first valve 27 is closed as shown in FIG. The cooling air flow path 215 is shut off, and the injection of cooling air from the first cooling air ejection port 213 to the first cooling chamber 212 is stopped. Further, the second valve 28 is closed, the cooling air supply source 25 and the second cooling air flow path 235 are shut off, and the cooling air is injected from the second cooling air outlet 233 to the second cooling chamber 232. Stop.

(6) Room temperature air injection step After performing the cooling stop step, the interiors of the first cooling chamber 212 and the second cooling chamber 232 are brought to room temperature as shown in FIG. The first valve 27 is opened to allow the room temperature air supply source 26 and the first room temperature air flow path 216 to communicate with each other, and room temperature air is injected from the first cooling air outlet 213 toward the first cooling chamber 212, and the second The valve 28 is opened to allow the room temperature air supply source 26 and the second room temperature air flow path 236 to communicate with each other, and room temperature air is jetted from the second cooling air outlet 233 toward the second cooling chamber 232.

  The room temperature of the first cooling chamber 212 and the second cooling chamber 232 can be returned to the normal temperature by continuously injecting the normal temperature air into the first cooling chamber 212 and the second cooling chamber 232, for example, for about 1 minute. And the temperature of the expanded sheet 7 that has been cooled rises, the ductility of the expanded sheet 7 increases, and it becomes easy to expand.

(7) Space | interval formation step After implementing a normal temperature air injection step, as shown in FIG. 11, the expanded sheet 7 is expanded further and the space | interval between each chip | tip C is formed. Similar to the dividing step, the first holding means 10A and the second holding means 10B shown in FIG. 1 are separated from each other in the first direction, and the third holding means 10C and the fourth holding means 10D are connected to the second holding means 10D. In the direction, as shown in FIG. 11, the expanded sheet 7 held by the rollers 113 of the lower holding portions 110 and the rollers 123 of the upper holding portions 120 is pulled outward. At this time, since the expanded sheet 7 is in a state of being easily expanded, as the expanded sheet 7 is further expanded, as shown in the partially enlarged view, the groove G between the adjacent chips C becomes large, A sufficient space can be formed between the chips C. Thereby, it is possible to prevent the adjacent chips C from coming into contact with each other when the divided workpiece W is handled. Similar to the dividing step, the expansion amount in the first direction and the expansion amount in the second direction of the expanded sheet 7 may be equal or different.

(8) Annular Frame Mounting Step After performing the interval forming step, the workpiece W divided into individual chips C is supported by the metallic annular frame 8 as shown in FIG. Specifically, the holding table 3 shown in FIG. 1 rises and supports the workpiece W from below via the expanded sheet 7. After that, as shown in FIG. 12, the back surface side of the annular frame 8 whose center is opened is attached to the expanded sheet 7, and the workpiece W is accommodated in the opening of the annular frame 8. Next, the expanded sheet 7 is cut into an annular shape by using the cutter 9 along the outer periphery of the annular frame 8. In this way, the workpiece unit WU in which the annular frame and the workpiece W are integrated with each other via the expand sheet 7 is formed. When the workpiece unit WU is thus formed, the chip C with the film 6 is later picked up from the expanded sheet 7.

As described above, the clamping step is performed, and the first clamping means 10A, the second clamping means 10B, the third clamping means 10C, and the fourth clamping means 10D perform the outer peripheral side of the workpiece in the first direction and the second direction. In order to sandwich the expanded sheet 7 that protrudes, separate the first sandwiching means 10A and the second sandwiching means 10B, and separate the third sandwiching means 10C and the fourth sandwiching means 10D, the first direction and the second direction The expanding sheet can be expanded with different expansion amounts, and the workpiece can be reliably divided.
In addition, after the sandwiching step is performed, the work piece W and the highly ductile film 6 attached to the work piece W are attached in order to perform the cooling step at the same time as the division step or before the division step. The workpiece W and the film 6 can be divided with high accuracy.

In order to cool the work piece, the work piece mounted on the annular frame via the expand sheet can be placed in a cooling chamber provided in a cooling device or the like, but generally the annular frame is made of metal. Since the object is widely used, after cooling the work piece together with the annular frame in the cooling chamber, if the work piece is placed in a normal temperature atmosphere together with the annular frame, there is a problem that condensation is likely to occur. The annular frame has a problem that it takes time to return to room temperature.
However, in the method of dividing the workpiece W using the cooling mechanism 20, even if the annular frame 8 that supports the workpiece W is made of metal, the annular frame that mounts the workpiece W on the annular frame 8 is used. Since the cooling step is performed before the mounting step is performed, it is not necessary to cool the workpiece W together with the annular frame 8, and there is a problem that condensation occurs when the cooled annular frame 8 is returned to room temperature. There is no need to return the annular frame to room temperature.

1: Expansion device 2: Device base 3: Holding table 30: Table support portions 4a, 4b, 4c, 4d: Recessed portion 5: Tape 6: Film 7: Expanded sheet 70: Roll portion 8: Ring frame 9: Cutter 10A: No. One clamping means 10B: Second clamping means 10A: Third clamping means 10D: Fourth clamping means 11a, 11b: Lower clamping mechanism 110: Lower clamping parts 111, 112: Arm parts 111a, 112a: Base end part 113: Rollers 12a, b: upper clamping mechanism 120: upper clamping parts 121, 122: arm parts 121a, 122a: base end parts 123: rollers 13a, 13b: movable base 130: support part 131: slide part 132: guide rail 133: Guide groove 134: support portion 135: slide portion 14a: first direction moving means 14b: second direction moving means 14 0: Ball screw 141: Bearing part 142: Motor 15: Lower elevating means 150: Ball screw 151: Bearing part 152: Motor 16: Upper elevating means 160: Ball screw 161: Bearing part 162: Motor 20: Cooling mechanism 21: First box Body 22: First moving means 23: Second box 24: Second moving means 25: Cooling air supply source 26: Room temperature air supply source 27: First valve 28: Second valve 210: First plate portion 211: First One side wall 212: First cooling chamber 213: First air jet 214: First gap 215: First cooling air channel 216: First normal temperature air channel 220: Spring 221: Support plate 222: Transfer arm 230 : Second plate part 231: second side wall part 232: second cooling chamber 233: second air outlet 234: second gap 235: second cooling air flow path 23 : Second cold air flow path 240: Spring 241: support plate 242: transfer arm W: workpiece Wa: surface Wb: backside C: Chip G: Groove WU: workpiece unit

Claims (4)

A method for dividing a workpiece having a division starting point along a division line,
An adhering step of adhering the workpiece onto an expanded sheet having a size larger than the workpiece;
A first clamping means and a second clamping means opposed to each other with the workpiece in the first direction; and a third clamping means opposed to each other with the workpiece in the second direction orthogonal to the first direction. A clamping step of clamping the expanded sheet on the outer peripheral side of the workpiece, respectively, by a fourth clamping means;
After performing the sandwiching step, a cooling step of injecting cooling air to the back side of the expanded sheet and injecting cooling air to the surface of the workpiece to cool the workpiece;
During the cooling step or after the cooling step, the first clamping means and the second clamping means are separated from each other in the first direction, and the third clamping means and the fourth clamping means And a dividing step of dividing the workpiece from the dividing starting point by expanding the expanded sheet by separating the two from each other in the second direction. A cooling stop step for stopping the injection of the cooling air after performing the cooling step;
After performing the cooling stop step and the dividing step, the first clamping means and the second clamping means are separated from each other in the first direction, and the third clamping means and the fourth clamping means are Further comprising a gap forming step of forming a gap between the chips of the workpiece formed by dividing the expanded sheet by separating them from each other in the second direction. The division method described.   After carrying out the dividing step, by sticking the back surface of the annular frame on the expanded sheet in a state where the divided workpiece is accommodated in the opening of the annular frame, and by cutting the expanded sheet into an annular shape The dividing method according to claim 1, further comprising an annular frame mounting step in which a workpiece divided through the expanded sheet forms a workpiece unit mounted on the annular frame. A workpiece cooling mechanism used in the dividing method according to claim 1, 2 or 3,
A first plate portion having a size larger than a workpiece and a first side wall portion hanging from the first plate portion, and having a first cooling chamber defined by the first side wall portion; A first box body in which a first cooling air jet port connected to a cooling air supply source is formed in the plate portion or the first side wall portion;
A cooling position in which the work piece adhered to the surface of the expanded sheet is covered with the first cooling chamber, and a cooling air outflow gap is formed between the expanded sheet and the lower surface of the first side wall, and retracted. First moving means for moving the first box to a position relative to the surface of the expanded sheet to which the workpiece is attached;
A second plate having a size larger than the workpiece and a second side wall standing from the second plate, and having a second cooling chamber defined by the second side wall, A second cooling air outlet connected to a cooling air supply source is formed on the two plate portions or the second side wall portion, and a second box body that forms a pair with the first box body,
Covering the workpiece in the second cooling chamber from the back side of the expanded sheet with the workpiece adhered to the surface, and a cooling air outflow gap between the expanded sheet and the upper surface of the second side wall And a second moving means for moving the second box relative to the back surface of the expanded sheet on which the work piece is adhered to the cooling position and the retreat position in which the sheet is formed.

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