JP2015081382A - Hard alloy, micro-drill and method of producing hard alloy - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hard alloy which has a long life, suppresses unexpected breakage and provides a tool reduced in variation of performance between products and a method of producing a hard alloy.SOLUTION: A hard alloy includes hard-phase particles based on tungsten carbide and a bond-phase metal which is based on an iron-group metal and bonds the hard-phase particles together and is processed by ion beam processing. When a total of 10-60 observation visual fields, with a total visual field area of 30,000 μmor greater, are set in three or more parts in an arbitrary cross section of the hard alloy and a number of pores of equivalent circle diameters of smaller than 1 μm is measured, the number of such pores is 0.02 pore/μmor smaller.

Description

  The present invention relates to a cemented carbide comprising hard phase particles containing tungsten carbide (WC) and a binder phase metal mainly composed of an iron group metal and bonding the hard phase particles. In particular, the present invention relates to a cemented carbide that can provide a tool that can suppress sudden breakage and has a small variation in performance between products in addition to a long life.

  As a material for a cutting tool, a cemented carbide including hard phase particles such as WC and a binder phase metal mainly containing Co and bonding the hard particles to each other is used. In addition, as a material for so-called micro drills having a drill diameter φ of 1 mm or less, so-called ultra-fine cemented carbides having ultra-fine WC particles having a particle diameter of 1 μm or less as hard phase particles have been developed (for example, patent documents). 1). Patent Document 1 discloses a cemented carbide comprising ultrafine WC hard phase particles and a binder phase metal that is present between the hard phase particles and is relatively thin and has a uniform structure with few thick portions. It is disclosed. In addition, as a manufacturing method of this cemented carbide, when performing raw isostatic pressing (HIP) by sintering the raw material powder after forming, the raw material powder is separately mixed by an attritor and dispersed by a dispersing device. The use of the mixed powder obtained by performing is disclosed.

JP 2013-060666 A

  The conventional cemented carbide has a structure as described above, so that fine uneven wear can be reduced and a long-life tool can be obtained. However, there are still variations in the life between products due to sudden breakage of the tool.

  The present invention has been made in view of the above circumstances, and one of its purposes is a cemented carbide that can provide a tool that has a long life and can suppress sudden breakage and has small variations in performance between products. Is to provide. Another object of the present invention is to provide a micro drill made of the above cemented carbide. Another object of the present invention is to provide a method for producing the above cemented carbide.

The cemented carbide of the present invention includes hard phase particles mainly composed of tungsten carbide and a binder phase metal mainly composed of an iron group metal and bonding the hard phase particles. In this cemented carbide, the number of pores having an equivalent circle diameter of less than 1 μm is 0.020 / μm ² or less. The number of the pores is such that the total number of fields of view is 10 or more and 60 or less and the total field of view is 30000 μm ² or more at three or more locations having different arbitrary cross sections of the cemented carbide formed by ion beam processing. Take an observation field.

  The micro drill of the present invention is made of the cemented carbide of the present invention.

  The manufacturing method of the cemented carbide according to the present invention includes the following raw material preparation step, mixing step, forming step, sintering step, and pressing step. The raw material preparation step prepares a raw material powder containing a tungsten carbide powder and an iron group metal powder. The tungsten carbide powder has an average particle size of 0.1 μm or more and 0.7 μm or less. The iron group metal powder has an average particle size of 0.2 μm or more and 0.6 μm or less, and a content of more than 0% by mass and 15% by mass or less. In the mixing step, the raw material powder is mixed and dispersed individually to produce a mixed powder. In the forming step, the mixed powder is formed to produce a formed body. In the sintering step, the compact is sintered at 1340 ° C. or higher and 1400 ° C. or lower to produce a sintered body. The pressing step performs hot isostatic pressing at 1360 ° C. or higher and 1430 ° C. or lower and a sintering temperature or higher in an inert gas atmosphere of 8 MPa or higher.

  The cemented carbide of the present invention has a small number of fine pores and is excellent in wear resistance and fracture resistance. In particular, when the product has a small diameter, variation in mechanical performance between products is small.

  The micro drill of the present invention has a long life and is unlikely to cause sudden breakage, so that the performance variation between products is small.

  The method for producing a cemented carbide according to the present invention can produce a cemented carbide that can be used suitably for a tool that has a long life, can suppress sudden breakage, and has little variation between products.

Sample No. 3 is a photomicrograph (2000 magnification). Sample No. It is 15 micrographs (2000 times). Sample No. It is 15 micrographs (5000 times). Sample No. It is 15 micrographs (35000 times).

<< Description of Embodiments of the Present Invention >>
The inventor has intensively studied the cause of sudden breakage that causes variations in performance among products in a conventional cemented carbide tool (particularly a tool having a small diameter such as a micro drill).

  In the above-described conventional cemented carbide, cross-sectional observation with a general microscope of pores (hereinafter sometimes referred to as coarse nests) having a size (for example, equivalent circle diameter of 1 μm or more) that has been considered to be a cause of breakage in the past. According to the results, it was confirmed that it was sufficiently reduced. In addition, it was confirmed that pores (hereinafter sometimes referred to as micro nests) having a size smaller than the coarse nest (for example, the equivalent circle diameter of less than 1 μm) were not recognized by cross-sectional observation using a general microscope. . Nevertheless, sudden breakage may occur in conventional tools made of cemented carbide.

  Therefore, in order to reexamine the confirmation of the nest from the sample observation method itself, the general method for forming the cross section of the sample and the properties of the cross section formed by the method were reviewed. Then, according to the conventional observation method, it was found that the cross section was covered with the extended portion where the binder phase metal was extended due to the sliding contact between the cutting tool and the sample at the time of forming the cross section. This extension is a factor that obstructs the confirmation of the micro nest of the cemented carbide. If this extension is removed, or if a cross section is taken so that this extension does not form, the cemented carbide will be more appropriately I thought it would be possible to evaluate the characteristics. Therefore, the cross section was observed by devising a technique for removing the stretched part or a technique in which the stretched part was not formed. As a result, if the specimen is observed by a technique that removes the extension or a specific observation technique in which the extension is not formed, the presence of microscopic nests that are not recognized by cross-sectional observation using a general microscope may be observed. The knowledge that there is.

  Based on the above findings, we consider that the number of micro nests may cause sudden breakage, and in order to investigate the effect of the number of micro nests, we have further developed a method of manufacturing a cemented carbide with a small number of micro nests. We studied diligently. Specifically, in addition to performing mixing and dispersion of the raw material powder individually, HIP after sintering was performed at a specific atmospheric pressure and at a specific temperature. Through this observation method, we obtained the knowledge that the number of micro nests was very small compared to conventional cemented carbide. And, as will be described in detail in the test examples described later, when the fracture resistance due to the number of micro nests was evaluated, when the number of micro nests is a specific number or less, long life and sudden breakage It was found that a tool with a small variation in performance between products could be obtained. The present invention is based on these findings. First, the contents of the embodiment of the present invention will be listed and described.

(1) The cemented carbide according to the embodiment includes hard phase particles mainly composed of tungsten carbide and a binder phase metal mainly composed of an iron group metal and bonded to each other. In this cemented carbide, the number of pores having an equivalent circle diameter of less than 1 μm is 0.020 / μm ² or less. The number of the pores is such that the total number of fields of view is 10 or more and 60 or less and the total field of view is 30000 μm ² or more at three or more locations having different arbitrary cross sections of the cemented carbide formed by ion beam processing. Take an observation field.

According to said structure, it can be set as the cemented carbide which can obtain the tool with a long life and the small dispersion | variation in the performance between products. When the cutting tool is made of this cemented carbide by reducing the number of pores (micro nests) having an equivalent circle diameter of less than 1 μm to 0.020 / μm ² or less, as shown in a test example described later, This is because sudden breakage can be suppressed. Further, since the number of the micro nests is as very small as 0.020 / μm ² or less, there is substantially no pore (coarse nest) having an equivalent circle diameter of 1 μm or more, so that the tool life is extended. be able to. The fact that there is substantially no coarse nest means that the number of microscopic nests described above, that is, the total number of fields of view is 10 to 60 and the total field of view at three or more different locations of the cemented carbide. Is not detected in the measurement performed by taking the observation field of view so that the value becomes 30000 μm ² or more.

(2) As one form of the cemented carbide according to the above-described embodiment, the ratio of the area of tungsten carbide particles having a particle diameter of more than 1.0 μm is 1.00% or less. Tungsten carbide when calculating the equivalent circle diameter of the tungsten carbide particles by taking an observation field so that the total field number is 5 to 30 and the total field area is 1000 μm ² or more on the surface of the cemented carbide. It is a ratio to the total area of the particles.

  Coarse particles are likely to be a starting point for sudden breakage (especially likely to occur at the initial stage of use), and therefore sudden breakage can be suppressed by reducing the number of coarse particles. Moreover, since there are few coarse particles, it can have a uniform characteristic over the whole cemented carbide alloy. Furthermore, since the number of coarse particles is small, it is easy to achieve uniform thickness of the binder phase metal. And since the tungsten carbide particles are uniform and fine, fine uneven wear and the like can be effectively reduced.

(3) As one form of the cemented carbide according to the above embodiment, the average thickness of the binder phase metal is 0.14 μm or less, and the existence ratio of the binder phase metal having a thickness of 0.5 μm or more is 0.15%. The following may be mentioned. Here, in an arbitrary cross section of the cemented carbide, an observation visual field is taken so that the total visual field number is 5 or more and 30 or less and the total visual field area is 1000 μm ² or more, and each bonded phase existing between the tungsten carbide particles in the observation visual field. When the metal is approximated to one circle, the average of the diameter of the circle is defined as the average thickness of the binder phase metal, and the ratio of the number of circles having a diameter of 0.5 μm or more to the total number of circles is 0. The existence ratio is 5 μm or more.

  Since variation in thickness promotes wear, wear resistance can be improved by making the thickness uniform. There are almost no locally thick portions of the binder phase metal such as micro-aggregation or uneven distribution of iron group metal, and ultrafine tungsten carbide particles are uniformly dispersed in the binder phase metal. Therefore, if a cutting tool is comprised with this cemented carbide, minute uneven wear can be suppressed and the tool life can be extended. In addition, since there is almost no micro-aggregation or uneven distribution of iron group metals, it has high mechanical properties (for example, strength (bending strength)) and strength when compared with cemented carbide of the same composition. The variation of is small.

  (4) As one form of the cemented carbide according to the embodiment, the cemented carbide contains vanadium and chromium. In this case, when the content of the iron group metal is α (mass%) and the vanadium content when the total amount in terms of carbide is the vanadium content is β (mass%), the content of the iron group metal It is preferable that the ratio (β / α) × 100 of the vanadium content with respect to is 2% or more and 7% or less.

  By setting the ratio to 2% or more, a uniform and fine structure is obtained. This is because the grain growth of tungsten carbide particles in the manufacturing process can be suppressed. By making the said ratio 7% or less, the said coarse nest does not exist substantially and the number of the said micro nest is very few. This is because vanadium precipitation can be suppressed during the manufacturing process, so that the generation of defects due to vanadium precipitation and the inhibition of sintering associated with the generation of defects can be suppressed, and the generation of the coarse nest and the increase of the micro nest can be suppressed. .

  (5) As one form of the cemented carbide according to the above-described embodiment, the vanadium content with respect to the entire cemented carbide is 0.35 mass% or more and 0.60 mass% or less.

  By setting the vanadium content to 0.35% by mass or more with respect to the entire cemented carbide, the effect of suppressing the growth of tungsten carbide particles can be sufficiently obtained. On the other hand, by setting the content of vanadium to 0.60% by mass or less, it is possible to suppress deterioration of mechanical properties due to deterioration of wettability with the binder phase metal.

(6) As one form of the cemented carbide which concerns on the said embodiment, it is mentioned that the number of the said pores is 0.005 piece / micrometer < ² > or less.

  According to the above configuration, since the number of micro nests that can cause sudden breakage is further reduced, it is possible to obtain a tool that has a longer life and a smaller variation in performance between products.

  (7) The micro drill according to the embodiment is made of the cemented carbide according to any one of the above (1) to (6).

  According to said structure, since it consists of a cemented carbide alloy with few said micro nests, it is long-lived, and it is hard to produce sudden breakage, and the dispersion | variation in the performance between products is small.

  (8) The manufacturing method of the cemented carbide according to the embodiment includes the following raw material preparation step, mixing step, forming step, sintering step, and pressing step. The raw material preparation step prepares a raw material powder containing a tungsten carbide powder and an iron group metal powder. The tungsten carbide powder has an average particle size of 0.1 μm or more and 0.7 μm or less. The iron group metal powder has an average particle size of 0.2 μm or more and 0.6 μm or less, and a content of more than 0% by mass and 15% by mass or less. In the mixing step, the raw material powder is mixed and dispersed individually to produce a mixed powder. In the forming step, the mixed powder is formed to produce a formed body. In the sintering step, the compact is sintered at 1340 ° C. or higher and 1400 ° C. or lower to produce a sintered body. The pressing step performs hot isostatic pressing at 1360 ° C. or higher and 1430 ° C. or lower and a sintering temperature or higher in an inert gas atmosphere of 8 MPa or higher.

  According to said structure, the cemented carbide which can be utilized suitably for the tool with long life and the small dispersion | variation in the performance between products can be manufactured. By mixing and dispersing the mixing process separately, both pulverization and dispersion can be performed satisfactorily, and it has a fine and uniform structure throughout and is substantially free of the coarse nest. An alloy is obtained. In addition, the number of the micro nests can be reduced by performing HIP under the specific atmospheric pressure and at the specific temperature.

  (9) As one form of the manufacturing method of the cemented carbide which concerns on the said embodiment, it is mentioned that raw material powder contains vanadium carbide powder and chromium carbide powder. In this case, when the content of the iron group metal powder is α (mass%) and the content of the vanadium carbide powder is β (mass%), the ratio of the content of the vanadium carbide powder to the content of the iron group metal powder ( β / α) × 100 is preferably 2% or more and 7% or less.

  By setting the ratio to 2% or more, grain growth of tungsten carbide particles can be suppressed in the sintering process or the pressing process. By setting the ratio to 7% or less, vanadium can be prevented from depositing and becoming a defect in the sintering process, and generation of the coarse nest and increase of the micro nest due to inhibition of sintering can be suppressed.

  (10) As one form of the manufacturing method of the cemented carbide according to the embodiment, when the raw material powder includes chromium carbide powder and vanadium carbide powder of the specific ratio, the temperature of the hot isostatic press and sintering It is mentioned that the difference with temperature is 30 ° C. or more. In this case, for example, it is particularly preferable to perform the dispersion by a bead mill.

  According to the above configuration, a cemented carbide with a smaller number of the microscopic nests can be obtained.

  (11) As one form of the manufacturing method of the cemented carbide which concerns on the said embodiment, while raw material powder contains chromium carbide powder and the said specific ratio vanadium carbide powder, temperature of hot isostatic pressing and sintering When the difference from the temperature is 30 ° C. or more, the ratio (β / α) × 100) of the content β of vanadium carbide powder to the content α of iron group metal powder is 4% or more and 5.5% or less. Can be mentioned. In this case, for example, it is particularly preferable to perform the dispersion by a bead mill.

  According to said structure, the cemented carbide alloy in which the number of the said micro nests is still smaller is obtained.

  (12) As one form of the manufacturing method of the cemented carbide which concerns on the said embodiment, when raw material powder contains chromium carbide powder and the vanadium carbide powder of the said specific ratio, vanadium carbide powder with respect to content (alpha) of iron group metal powder The ratio β of content β (β / α) × 100 is 4% or more and 6% or less. In this case, for example, it is particularly preferable to perform the dispersion by a jet mill.

  According to the above configuration, a cemented carbide with a smaller number of the microscopic nests can be obtained.

  (13) As one form of the manufacturing method of the cemented carbide according to the above embodiment, the ratio (β / α) × 100 of the content β of vanadium carbide powder to the content α of iron group metal powder is 4% or more and 6%. In the following cases, the difference between the temperature of the hot isostatic press and the sintering temperature is more than 30 ° C. In this case, for example, it is particularly preferable to perform the dispersion by a jet mill.

  According to said structure, the cemented carbide alloy in which the number of the said micro nests is still smaller is obtained.

<< Details of Embodiment of the Present Invention >>
Details of the embodiment of the present invention will be described below. In addition, this invention is not limited to these illustrations, is shown by the claim, and intends that all the changes within the meaning and range equivalent to a claim are included.

(Cemented carbide)
The cemented carbide according to the embodiment includes hard phase particles mainly composed of tungsten carbide (WC) and a binder phase metal mainly composed of an iron group metal and bonding the hard phase particles. The main feature of this cemented carbide is that the number of pores of a specific size is small. First, the cemented carbide according to the embodiment will be described, and then a method for manufacturing the cemented carbide will be described.

[Hard phase particles]
The hard phase particles are constituent particles of a ceramic powder containing WC. “Contains (mainly includes)” WC means that a majority of the hard phase, particularly 90% or more, is WC by mass%. Of course, the case where it is comprised only by WC substantially is included. The hard phase particles constitute the remainder of the cemented carbide excluding the binder phase metal and the grain growth inhibitor described later. The particle size of WC constituting the hard phase particles is preferably as small as possible. For example, 0.7 μm or less is preferable. If it does so, a bending strength and abrasion resistance will improve easily. Moreover, it is preferable that the average particle diameter of WC shall be 0.1 micrometer or more. If it does so, since an average particle diameter is not too small, it is easy to suppress a thermal crack.

  When the cemented carbide is not only small in average particle size of WC particles but also has a small amount of coarse WC particles, it is easy to make the thickness of the binder phase metal described later uniform, and the WC particles are also uniform. Moreover, it is expected that fine uneven wear can be effectively reduced by being fine. Specifically, it is preferable that the ratio of the area of the WC particles having a particle diameter of more than 1.0 μm with respect to the entire WC particles (total area) is 1.00% or less. The proportion of WC particles having a particle size of more than 1.0 μm is preferably as small as possible, and particularly preferably substantially absent. That is, it is particularly preferable that the maximum diameter of each WC particle is 1.00 μm or less. “Substantially absent” means that it is not detected in the measurement of the particle size of the WC particles described later.

The average particle diameter of the WC particles and the ratio of the area of the WC particles having a particle diameter of more than 1.0 μm are analyzed by an image analysis apparatus obtained by observing the surface of the cemented carbide with a scanning electron microscope (SEM). And it can obtain | require from the value which calculated the equivalent circle diameter of each WC particle. For example, the magnification can be appropriately selected so that the magnification is 8000 to 20000 times, the number of observation fields is 5 to 30, and the total observation area is 1000 μm ² or more. Further, the ratio of the area of WC particles having a particle diameter of more than 1.0 μm can also be obtained by an EBSD (Electron Back-Scatter Diffraction) method in the cross section of the cemented carbide.

[Binder phase metal]
The binder phase metal exists relatively thinly and uniformly between the hard phase particles described above, and bonds the hard phase particles to each other. Specifically, the ratio that the average thickness of the binder phase metal is 0.14 μm or less and the thickness is 0.5 μm or more is 0.15% or less. That is, the ratio of the portion where the thickness of the binder phase metal is large is small, and 99% or more of the binder phase metal can be said to have a thickness of less than 0.5 μm. A cemented carbide satisfying at least one of an average thickness of 0.14 μm or less and a ratio of a thickness of 0.5 μm or more of 0.15% or less can suppress micro-aggregation and uneven distribution of the binder phase. , Micro drills) can be manufactured and drilling can be performed, so that minute uneven wear can be suppressed and a longer life can be achieved. Not only is the average thickness small, but there are almost no thick portions of the binder phase metal such as micro-aggregation or uneven distribution of the binder phase, and the hard phase particles are uniformly dispersed in the binder phase metal. Because there is.

The thickness of the binder phase metal is the diameter when the binder phase metal existing between the hard phase particles is approximated as one grain (circular cross section). Specifically, the measurement is performed as follows. Cutting is performed so that an arbitrary cross section of the cemented carbide is obtained, and in this cross section, each part is measured with an FE-SEM (Field Emission Scanning Electron Microscope) at a magnification of 5000 to 10,000 times, and the total number of fields of view is 5 or more. The observation field of view is taken so that the total visual field area is 30 μm or less and the total visual field area is 1000 μm ² or more, and this observation image is taken. In the photographed image, the hard phase particles are displayed in gray and the binder phase metal is displayed in black. Each black area is approximated to a circle by using this imaged image processing apparatus. That is, each of the plurality of binder phase metal regions is regarded as a circle. The diameter of each of these circles is measured, and each diameter is taken as the thickness of one binder phase metal region. The diameter of each circle is measured at five or more selected locations, and the average is taken as the average thickness of the binder phase metal. Further, the number of circles having a diameter of 0.5 μm or more is obtained, and the ratio (%) of the number of circles having a diameter of 0.5 μm or more to the number of all circles is expressed as “thickness is 0.5 μm or more. Ratio ".

  Examples of the iron group metal constituting the binder phase metal include Ni and Co. When the binder phase metal is mainly Co, the sinterability is improved, the sintered body is easily made dense, and the strength and fracture toughness of the cemented carbide can be improved. On the other hand, when Ni is the main component, the corrosion resistance of the cemented carbide can be improved. When the binder phase metal does not contain a grain growth inhibitor described later, the binder phase metal is substantially composed only of an iron group metal. When a grain growth inhibitor is contained, it is allowed that elements (V and Cr) due to the grain growth inhibitor are present (solid solution) in the binder phase metal. That is, the phrase “mainly composed of an iron group metal” means that a metal other than the iron group metal (for example, W, V, Cr, etc.) is included.

  The content of the binder phase metal with respect to the entire cemented carbide is 15% by mass or less (however, excluding 0% by mass). If the content of the binder phase metal is more than 15% by mass, the toughness of the cemented carbide increases, but the wear resistance decreases. Within the range of more than 0 and not more than 15% by mass, the wear resistance of the cemented carbide tends to increase as the content of the binder phase metal decreases, and the bending strength and toughness tend to increase as the content increases. The content of the iron group metal can be adjusted in accordance with desired characteristics within the above range. The content of the binder phase metal can be 3% by mass or more, further 5% by mass or more, and particularly 6% by mass or more. The content of the binder phase metal can be 10% by mass or less, particularly 8% by mass or less. The content of the binder phase metal with respect to the entire cemented carbide substantially matches the content of the iron group metal powder of the raw material powder prepared at the time of manufacture.

[Grain growth inhibitor]
It is preferable to use an ultrafine WC powder as the hard phase particles and to contain a grain growth inhibitor in order to suppress the grain growth of the hard phase particles during sintering during the production process. Examples of the grain growth inhibitor include compounds such as vanadium (V) carbide (VC) and chromium (Cr) carbide (Cr ₃ C ₂ ). At least one of VC and Cr ₃ C ₂ may be contained, but preferably both are contained.

Some of VC and Cr ₃ C ₂ may exist in the cemented carbide as V and Cr. The content of V and Cr in the cemented carbide (the total content of V and Cr contained in VC and Cr ₃ C ₂ and V and Cr present in a single metal element) is, for example, ICP (inductively coupled plasma emission) It is calculated by analyzing in (Analysis). Therefore, the total content of carbide when V or Cr is converted into carbide is obtained by using the content of V or Cr. The calculated total content of carbides substantially coincides with the contents of VC and Cr ₃ C ₂ contained as a grain growth inhibitor during production.

  When the total amount of V converted to carbide is V content β (mass%), and the iron group metal content is α (mass%) among the above-mentioned binder phase metals, V of iron group metal content α The content β ratio (β / α) × 100 is preferably 2% or more and 7% or less. By setting the ratio (β / α) × 100 to 2% or more, a cemented carbide having a uniform and fine structure can be obtained. This is because coarsening of the hard phase particles during the production process can be suppressed. By setting the ratio (β / α) × 100 to 7% or less, it is possible to obtain a cemented carbide with substantially no coarse nests and a very small number of micro nests. This is because the precipitation of V can be suppressed in the manufacturing process, so that the generation of defects due to the precipitation of V and the inhibition of sintering accompanying the generation of defects can be suppressed, and the generation of the coarse nest and the increase of the micro nest can be suppressed. . The ratio (β / α) × 100 is more preferably 4% to 7%, further preferably 4% to 6%, and particularly preferably 4% to 5.5%. Further, if the total amount of Cr converted into carbide is the Cr content γ (mass%), the ratio of the Cr content γ to the iron group metal content α (γ / α) × 100 is 4% or more and 7%. In particular, it can be 5% or more and 6% or less. Furthermore, the ratio ((β + γ) / α) × 100 of V content β and Cr content γ to the content α of iron group metal powder (β + γ) × 100 is 8% or more and 10.5% or more. 13% or less and 11.5% or less.

The content β of V with respect to the entire cemented carbide is preferably 0.2 mass% or more and 0.6 mass% or less, and particularly preferably 0.35 mass% or more and 0.60 mass% or less. On the other hand, the Cr content with respect to the entire cemented carbide is preferably 0.5% by mass or more and 1.0% by mass or less. The Cr content can be, for example, 0.5% by mass or more and 0.7% by mass or less. When V is 0.2% by mass or more and Cr ₃ C ₂ is 0.5% by mass or more, a grain growth suppressing effect can be obtained. When V is 0.6% by mass or less and Cr is 1.0% by mass or less, the appearance of precipitated phases such as V and Cr can be suppressed, and a decrease in toughness due to the appearance can be suppressed. In particular, when V is excessive, the bending strength tends to decrease due to poor wettability between V and the iron group metal. By containing V and Cr in the above range, it is possible to obtain a cemented carbide with a small variation in the maximum diameter and particle size of the hard phase particles in the cemented carbide and a small proportion of coarse hard phase particles.

[Pore]
The smaller the number of micro-sized pores (small nests) in the cemented carbide, the better. Specifically, it may be 0.020 / μm ² or less. By doing so, a tool having a long life and small variations between products can be obtained. The micro nest here refers to a pore having an equivalent circle diameter of less than 1 μm. The number of micro nests is preferably 0.015 / μm ² or less, more preferably 0.010 / μm ² or less, and particularly preferably 0.005 / μm ² or less. Although it is desired that there are no micro nests, that is, the number of micro nests is theoretically 0 (zero), it is actually difficult to set to 0. Therefore, regarding the number of micro nests, if no micro nest is found at the detection limit, the number of micro nests is regarded as zero.

The number of micro nests is measured at three or more locations in any cross section of a cemented carbide processed by stress-less processing represented by ion beam processing, with a total field of view of 10 to 60 and a total field of view of 30000 μm. ^The observation field of view is taken so that it becomes ² or more. Examples of the ion beam processing include ion milling processing and focused ion beam processing.

  The observation cross-section formation method includes (1) a cross-section formation method in which no extended portion is generated, and (2) a cross-section formation method in which the generated extended portion is removed afterwards. In any method, it is preferable to irradiate the ion beam under a condition that a sufficient observation area is obtained and the surface properties of the cemented carbide itself are not affected as much as possible. In any irradiation method, Ar or Ga can be used as the ion species of the ion beam.

  For example, in the case of the former (1), an appropriate surface of the sample may be irradiated with an ion beam with a discharge voltage of 1.5 kV, an acceleration voltage of 6 kV, a protrusion amount of 50 μm, and an irradiation time of 2 hours to 4 hours. Can be mentioned. In this case, it is not necessary to wrap the surface of the sample in advance. The ion beam irradiation may be performed, for example, by placing a shielding plate on the irradiation target, partially projecting the irradiation target from the shielding plate, and performing the projection. At this time, the length protruding from the shielding plate to be irradiated is set as the protrusion amount. In this method, a part of the sample is removed by ion beam irradiation to form a cross section, and the formed cross section is observed.

  On the other hand, in the latter case (2), lapping is performed once on a predetermined surface, usually a cross section, of the sample, and then an ion beam is irradiated. A stretched portion is formed by lapping, but the stretched portion is removed by removing a depth of several μm from the irradiated surface by irradiation with an ion beam. Irradiation with this ion beam is relatively gentle compared to the former (1) because it is only necessary to remove the extended portion formed in the cross section, rather than forming the observation cross section by local removal of the sample. It may be performed according to conditions. More specifically, at least one condition such as a long distance from the irradiation source to the sample, a shallow ion beam irradiation angle with respect to the sample, and a short irradiation time may be mentioned. For example, the irradiation time can be about several minutes. In this method, the cross section from which the extended portion is removed is observed.

  FE-SEM can be used for cross-sectional observation. And it is preferable that the selection of said three places is a place which each separated 1 mm or more. By this observation method, the extended portion generated in the case of the conventional general observation method as described above is not formed, and the periphery of the micro nest looks shining due to the edge effect in the electron microscope observation (for example, FIGS. 2 to 4 ( The above-mentioned micro nest can be observed). In the conventional general observation method, the extended portion is formed, so that a sufficient edge effect cannot be obtained. In the electron microscope observation, since the binder phase looks dark (the hard phase is bright), it is difficult to distinguish the micro nest from the binder phase unless a sufficient edge effect is obtained. For this reason, in the conventional general observation technique, “number evaluation” that requires observation with a relatively low magnification and a large area is virtually impossible.

  Note that pores (coarse nests) having a size larger than the micro nest (equivalent circle diameter of 1 μm or more) are substantially absent. “Substantially absent” means not detected by the measurement of the number of micro nests.

[Usage]
Cemented carbide has high bending strength, excellent wear resistance (high hardness), and high toughness, so that it can be suitably used as a material for various members where such characteristics are desired. For example, it is suitable for a cutting tool material, particularly a cutting tool material that performs fine processing. Specific examples of the tool include a micro drill having a drill diameter of 0.01 to 0.3 mm. In addition, it can be used for materials such as tie bar cut punches and tie bar cut dies, glass lens molds, thin blade slitters, water jet nozzles, and saw blades for high hardness wood.

[Function and effect]
According to the above-mentioned cemented carbide, it is possible to obtain a tool having a long life and a small variation in performance between products. This is because the cemented carbide has a small number of microscopic nests, and if the cemented carbide is made of a cutting tool, sudden breakage can be suppressed. In addition, since the cemented carbide has a fine and uniform structure, if the cutting tool is formed of this cemented carbide, the minute uneven wear can be reduced and the life can be extended.

[Production method of cemented carbide]
The manufacturing method of a cemented carbide comprises a raw material preparation step, a mixing step, a forming step, a sintering step, and a pressing step. The main feature of this cemented carbide manufacturing method is that mixing and dispersion are individually performed in the mixing step, and the pressing step is performed at a specific atmospheric pressure and at a specific temperature. Hereinafter, each process will be described in detail.

[Raw material preparation process]
A raw material powder containing a hard phase powder and an iron group metal powder is prepared.

(Hard phase powder)
The hard phase powder is preferably ultrafine WC powder. Specifically, the average particle size of the WC powder is preferably 0.1 μm or more and 0.7 μm or less. By setting the average particle size of the WC powder to 0.1 μm or more, it is possible to suppress grain growth and coarse particles when reprecipitating during sintering or the like. By setting the average particle size of the WC powder to 0.7 μm or less, the WC particles present in the cemented carbide can be made fine. The average particle size of the WC powder is particularly preferably from 0.1 μm to 0.5 μm. Such ultrafine WC powder can be produced by a direct carbonization method in which tungsten oxide is directly carbonized.

(Iron group metal powder)
The iron group metal powder is also preferably fine. Specifically, the average particle size of the iron group metal powder is preferably 0.2 μm or more and 0.6 μm or less. By setting the average particle size of the iron group metal powder to 0.2 μm or more, it is possible to suppress reaggregation in the mixing step described later, and thus it is possible to suppress the iron group metal from becoming coarse. By making the average particle size of the iron group metal powder 0.6 μm or less, it is possible to suppress the presence of coarse iron group metal in the cemented carbide. In particular, it is preferable to use an iron group metal powder having a specific surface area determined by the BET method of 1 m ² / g or more. It is preferable to perform shape observation with an SEM or the like and select so that the aggregates and coarse particles of the primary particles are reduced and not included. As described above, the content α of the iron group metal powder having a size within the above range may include more than 0% by mass and 15% by mass or less.

(Grain growth inhibitor)
When the grain growth inhibitor is contained, the grain growth inhibitor is preferably fine. Specifically, the average particle size of VC is preferably 0.2 μm or more and 0.4 μm or less, and the average particle size of Cr ₃ C ₂ is preferably 0.3 μm or more and 2.0 μm or less. By setting the average particle size of VC to 0.2 μm or more and the average particle size of Cr ₃ C ₂ to 0.3 μm or more, reaggregation can be suppressed in the mixing step described later. When the average particle size of VC is 0.4 μm or less and the average particle size of Cr ₃ C ₂ is 2.0 μm or less, it can be suppressed from becoming a starting point of fracture when present as carbide in the cemented carbide. Breakage resistance can suppress a fall. As described above, the VC content β is preferably 2% to 7% of the ratio (β / α) × 100 to the content α of the iron group metal powder. More preferably, the ratio (β / α) × 100 satisfies 4% to 5.5%. In this case, it is particularly preferable to use a bead mill for the dispersing device in the mixing step described later. Further, the ratio (γ / α) × 100 satisfies 4% to 7% and the ratio ((β + γ) / α) × 100 satisfies at least one of 8% to 11.5%. You can also. On the other hand, the ratio (β / α) × 100 is preferably 4% or more and 6% or less. In this case, it is particularly preferable to use a jet mill for the dispersing device in the mixing step described later. Further, the above ratio ((β + γ) / α) × 100 may be satisfied from 10.5% to 13%. As described above, the content β of VC with respect to the entire cemented carbide is preferably 0.2% by mass or more and 0.6% by mass or less, and the content γ of the Cr ₃ C ₂ is 0 as described above. It is preferable to set it to 0.5 mass% or more and 1.0 mass% or less.

[Mixing process]
The mixed powder is prepared by individually mixing and dispersing the raw material powder. Thus, by using mixing and dispersion together, both grinding and dispersion can be performed well, and a cemented carbide having a fine and uniform structure throughout can be obtained. In addition, a cemented carbide with substantially no coarse nest (equivalent circle diameter of 1 μm or more) can be obtained. To perform mixing and dispersion individually, after mixing processing by a mixing device, dispersion processing may be performed by a dispersing device, or a mixing device and a dispersing device are connected and a raw material is circulated between them. And processing may be performed. For mixing the raw material powder, for example, a wet pulverizing / dispersing device called an attritor or a ball mill can be used. For dispersing the raw material powder, for example, a bead mill, a sand mill, a wet jet mill or the like can be used.

  An attritor has a cylindrical container filled with a granular dispersion and grinding medium (media) having a diameter of 0.03 mm to 30 mm, generally about 3 mm to 15 mm, and a stirring shaft provided with an arm at a high speed. It is an apparatus that disperses and pulverizes the object to be dispersed and pulverized, which is mixed with a liquid and made into a slurry, by rotating and colliding and contacting (scratching) the media in a high-speed rotation field. Conventionally, raw material powder is mixed by an attritor using a cemented carbide ball having a diameter of about 3 to 5 mm as a medium. By using an attritor, it is possible to pulverize coarse hard phase particles together with mixing and promote uniformization. The ball mill does not include a stirring shaft, and is different from the attritor in that the container itself rotates to disperse and pulverize the object to be dispersed and pulverized. Specifically, it is possible to use a medium made of cemented carbide and having a diameter of 0.03 mm to 30 mm, and generally about 3 mm to 15 mm.

  Dispersing devices such as a bead mill and a sand mill have substantially the same configuration as the attritor, but the size of the media is smaller than that used in the attritor and the form of the stirring shaft used is also different. In the bead mill, it is preferable that the medium is made of cemented carbide and has a diameter of about 0.03 mm to 2 mm, particularly about 0.5 mm to 1.5 mm, and a stirring shaft having a pin is used. In the sand mill, it is preferable to use a cemented carbide medium having a diameter of about 1 mm to about 5 mm, particularly about 1 mm to about 4 mm, and a stirring shaft having a disk is used. In addition, a wet jet mill (a device that disperses the dispersion target by applying pressure to the slurry-like dispersion target and injecting it from the nozzles arranged opposite to each other and causing the objects to collide with each other) can be used as the dispersion apparatus. .

The total processing time for mixing and dispersion is preferably 5 to 20 hours, and more preferably 5 to 10 hours. The processing time for mixing alone is preferably less than 10 hours, more preferably 1 to 4 hours. By setting the processing time for mixing only in the above range, the pulverized iron group metal (Co) can be prevented from re-aggregating and coarsening, and the cemented carbide using this powder is made of the iron group metal (Co). It is considered that micro-aggregation and uneven distribution are difficult. In addition, by setting an appropriate total processing time, the ratio of the binder phase metal having an average binder phase metal thickness of 0.14 μm or less and a thickness of 0.5 μm or more is set to 0. It can be made 15% or less. In addition, a cemented carbide that satisfies the 3σ _t of the thickness of the binder phase metal of 0.2 or less can also be used. Furthermore, by performing the treatment of mixing and dispersion within the above range, the grain growth inhibitor can be uniformly dispersed and the grain growth of the hard phase can be suppressed, so that there are few coarse hard phase particles, A cemented carbide in which uniform and fine hard phase particles are uniformly dispersed is obtained. In addition, a cemented carbide can be obtained in which the coarse nest is substantially absent.

[Molding process]
The mixed powder is molded to produce a molded body. Examples of the molding include press molding or extrusion. The pressure for press molding is preferably 49 MPa or more and 200 MPa or less (500 to 2000 kg / cm ² ).

[Sintering process]
The molded body is sintered to produce a sintered body. The sintering temperature may be 1340 ° C. or higher and 1400 ° C. or lower, and particularly preferably 1360 ° C. or higher and 1380 ° C. or lower. Then, it is easy to suppress the grain growth of the hard phase. The sintering atmosphere is preferably a vacuum or an Ar atmosphere (Ar: 50 Torr (6.7 kPa) or more). The sintering time is preferably 0.2 to 2 hours.

[Pressing process]
A cemented carbide is produced by hot isostatic pressing (HIP) on the sintered body. The atmosphere of HIP is an inert gas atmosphere (particularly Ar atmosphere), and the atmospheric pressure is 8 MPa or more, and 10 MPa or more is particularly preferable. The temperature of HIP is 1360 ° C. or higher and 1430 ° C. or lower, and 1360 ° C. or higher and 1410 ° C. or lower is particularly preferable. Within this temperature range, the temperature is set higher than the sintering temperature. Thus, it is easier to reduce the number of micro nests by applying HIP at a specific temperature under the specific atmospheric pressure. As the atmospheric pressure is increased and the HIP temperature is raised, especially the HIP temperature is made higher than the sintering temperature, the effect of densification of the sintered body can be easily obtained, so the number of micro nests is reduced. it can. The HIP temperature can be higher than the sintering temperature by 30 ° C. or more, more than 30 ° C., particularly 50 ° C. or more. In this case, it is particularly preferable to use, for example, a jet mill in the dispersion in the mixing step. Further, the HIP temperature can be higher than the sintering temperature by 20 ° C. or higher, and further by 30 ° C. or higher. In this case, it is particularly preferable to use, for example, a bead mill in the dispersion in the mixing step.

[Function and effect]
According to the above-mentioned cemented carbide manufacturing method, it is possible to manufacture a cemented carbide that can be used suitably for a tool that has a long life, can suppress sudden breakage, and has little variation between products. Mixing and dispersing are performed individually in the mixing step, and HIP is performed at a specific temperature range and higher than the sintering temperature under a specific atmospheric pressure, thereby forming a fine and uniform structure throughout. At the same time, a cemented carbide with a small number of the microscopic nests can be obtained.

<< Test Example 1 >>
Samples of cemented carbide were prepared by preparing raw material powders, mixing raw material powders, forming, sintering, and HIP, and observing the structure and measuring the number of micro nests.

First, WC powder with an average particle size of 0.5 μm, Co powder with an average particle size of 0.2 μm, VC powder with an average particle size of 0.4 μm, and Cr ₃ C ₂ with an average particle size of 0.5 μm. The raw material powder which adjusted each so that it might become content shown in Table 1 was prepared.

  The raw material powder was mixed and dispersed according to the mixing conditions shown in Table 1, or only mixed to produce a mixed powder. “ATR” shown in the equipment of Table 1 indicates an attritor using a cemented carbide ball having a diameter of 3.00 to 6.00 mm as a medium. The bead mill uses a cemented carbide ball having a diameter of 0.5 to 1.5 mm as a medium. In this mixing step, when both mixing and dispersion are performed, a dispersion apparatus such as a bead mill and an attritor are connected, and a raw material is circulated between the two. The total treatment time was adjusted so as to be the time shown in Table 1, and the mixing treatment was performed.

The obtained mixed powder was molded into a round bar shape to produce a molded body. Molding was performed by press molding at a pressure of 98 MPa (1000 kg / cm ² ).

  The molded body was sintered to produce a sintered body. Sintering was performed at the temperature and time shown in Table 1 in an Ar atmosphere (Ar: 80 kPa).

  The sintered body was subjected to HIP, and sample No. 1 to Sample No. Fifteen cemented carbide round bars (diameter 2 mm x length 30 mm) were prepared. HIP was performed under the pressure, temperature, and time shown in Table 1 in an Ar atmosphere.

  In the obtained cemented carbide round bar, the average particle diameter of WC particles (μm), the ratio of the particle diameter of WC particles exceeding 1.0 μm, the average thickness of the binder phase metal (μm), the thickness of the binder phase metal The existence ratio (%) of 0.5 μm or more and the number of micro nests (equivalent circle diameter less than 1 μm) were examined as follows. The results are shown in Table 2.

[Measurement of particle size of WC particles]
The image of the cemented carbide surface observed with an SEM, taking an observation field so that the magnification is 8000 to 20000 times, the number of observation fields is 5 to 30, and the total observation area is 1000 mm ² or more is used as an image analyzer. And analyzed. And the average particle diameter (micrometer) of WC particle | grains calculated | required calculating the circle equivalent diameter of all the WC particles which exist in each visual field, and averaging it. On the other hand, the ratio of the particle diameter of WC particles exceeding 1.0 μm is the area and total area of all WC particles present in each visual field, and the particle diameter is more than 1.0 μm with respect to the total area of WC particles. The ratio of the area of the particles was calculated.

[Measurement of thickness of binder phase metal]
A round bar made of cemented carbide was cut so that a cross section parallel to the longitudinal direction was obtained, and in this cross section (longitudinal cross section), each part was 5,000 times by FE-SEM (field emission scanning electron microscope). The observation field was observed so that the total field of view was 5 to 30 times, the total field number was 5 to 30 times, and the total field area was 1000 μm ² or more. In the photographed image, the WC particles are displayed in gray and the binder phase metal is displayed in black. This captured image was processed by an image processing apparatus. Here, binarization was performed so that the area ratio of the black binder phase metal region was equal to the volume fraction of the binder phase metal composition shown in Table 1, and the WC particles and the binder phase metal were separated. It is easier to measure by performing such binarization processing. Each black area was approximated to a circle. That is, each of the plurality of binder phase metal regions is regarded as a circle. The diameter of each of these circles was measured, and each diameter was taken as the thickness of one binder phase metal region. The thickness (μm) of the binder phase metal was obtained by measuring the diameter of each circle at five selected locations and averaging them. On the other hand, the ratio (%) in which the thickness of the binder phase metal is 0.5 μm or more determines the number of circles having a diameter of 0.5 μm or more, and the diameter is 0.5 μm or more for all the numbers of circles. The ratio of the number of a certain circle was calculated and obtained.

[Measurement of the number of micro nests]
Observation using FE-SEM so that the total number of visual fields is 10 or more and 60 or less and the total visual field area is 30000 μm ² or more at three or more locations in any cross section of the cemented carbide processed by ion beam processing. I took a field of view. Here, a method of forming a cross section in which no stretched portion occurs is used. The ion beam irradiation conditions were such that the ion species was Ar, the discharge voltage was 1.5 kV, the acceleration voltage was 6 kV, the protrusion amount was 50 μm, and the irradiation time was 3 hours. The number of micro nests (pieces / μm ² ) was obtained by counting the number of nests having an equivalent circle diameter of less than 1 μm in all observation fields and converting the number per n μm ² . Those with uncertain judgment as to whether or not they were microscopic nests were enlarged and judged.

[result]
Sample No. 1 was prepared by mixing and dispersing individually in the mixing step, and making the HIP under a specific atmosphere and the HIP temperature higher than the sintering temperature. 3-6, Sample No. In all of 8 to 11, the number of the micro nests was 0.020 / μm ² or less. In addition, sample no. 3, 4, 6, Sample No. In any of 8 to 11, (1) the average particle diameter of the WC particles is small, (2) the proportion of the particle diameter of the WC particles is less than 1 μm, (3) the average thickness of the binder phase metal is small, (4 ) The proportion of the binder phase metal thickness is less than 0.5 μm. By mixing and dispersing individually in the mixing step, both pulverization and dispersion can be performed satisfactorily, and a fine and uniform structure can be obtained throughout the entire process. It is thought that the number could be reduced. In addition, it is considered that the number of the fine nests could be further reduced by performing HIP in a specific atmosphere and in a specific temperature range (that is, the HIP temperature was made higher than the sintering temperature). Yeah.

On the other hand, sample no. 13 to 15 and mixing and dispersion were individually performed in the mixing step. 1, sample no. 2 and sample no. 12 and mixing and dispersion were individually performed in the mixing step, and the HIP temperature was made higher than the sintering temperature, but the sample No. 1 with a large VC / Co ratio exceeding 7% was used. In all cases, the number of the micro nests was 0.025 / μm ² or more. Sample No. Nos. 13 to 15 are considered to be because the mixing and dispersion were not performed individually in the mixing step, so that the fine and uniform structure could not be formed throughout, and the number of micro nests could not be reduced. . Sample No. 1, sample no. 2 and sample no. No. 12, because the HIP temperature is low (that is, the HIP temperature is lower than the sintering temperature), the effect of densification of the sintered body by HIP was not sufficiently obtained, and the number of micro nests could not be reduced. Conceivable. Sample No. No. 7 is considered to be because V has inhibited the densification of the sintered body in the sintering process because the ratio of VC / Co is large, and the micro nests could not be sufficiently reduced.

In particular, among sample Nos. 3 and 6 in which dispersion in the mixing process was performed by a jet mill, sample No. 3 having a VC / Co of 4% or more and 6% or less. 3 and Sample No. No. 4 has a number of micro nests of 0.010 / μm ² or less. Compared to 6, the number of the micro nests could be reduced. Among them, the sample No. 1 in which the difference between the HIP temperature and the sintering temperature was over 30 ° C. No. 4 has a number of micro nests of 0.005 / μm ² or less. Compared to 3, the number of the micro nests could be reduced.

On the other hand, the sample No. 1 in which the dispersion in the mixing process was performed by a bead mill. 8-11, sample No. 1 in which the difference between the HIP temperature and the sintering temperature was 30 ° C. or higher. Nos. 9 to 11 have a number of micro nests of 0.015 / μm ² or less. Compared to 8, the number of the micro nests could be reduced. Among them, sample Nos. Having VC / Co of 4% to 5.5%. 10 and sample no. No. 11 has a number of micro nests of 0.005 / μm ² or less. Compared to 9, the number of micro nests could be reduced.

  Sample No. 3 and sample no. The microscope picture imaged with 15 FE-SEM is shown in FIGS. FIG. 3 is a photomicrograph of 2000 times magnification, and FIGS. 15 are photomicrographs of 2000 times, 5000 times, and 35000 times. In each figure, gray is a WC particle and black is a binder phase metal region. Sample No. 1 was prepared by mixing and dispersing individually in the mixing step, producing HIP under a specific atmosphere and at a high temperature, and the HIP temperature higher than the sintering temperature. As shown in FIG. 1, no large black region (bonded phase metal region) was observed, and it was found that the bonded phase metal was uniformly dispersed, and the coarse nest (equivalent circle diameter was 1 μm). Of course, nests having an equivalent circle diameter of less than 1 μm and even nests having an equivalent circle diameter of 0.5 μm or less are not recognized. That is, sample no. 3, the above-mentioned micro nest is not recognized.

  On the other hand, sample No. 1 produced by using only the mixing device without using the mixing device and the dispersing device in the mixing step. As shown in FIG. 2, many bright spots due to the edge effect are recognized. Then, as shown in FIGS. 3 and 4, when a micrograph of the same sample with a higher magnification than that of FIG. 2 is seen, the bright spot has an equivalent circle diameter of less than 1 μm (here, 0.5 μm or less). ), That is, the above-mentioned minute nest. Therefore, sample no. No. 15 shows that a large number of the above-mentioned micro nests exist.

<< Test Example 2 >>
A micro drill made of a cemented carbide of each sample prepared in Test Example 1 was prepared, and a drilling test (through hole) was performed to evaluate the tool life (drill performance).

  Ten microdrills used for the test were prepared for each sample as follows. A cemented carbide is prepared in the same manner as the above sample. In this test, a stepped round bar (large diameter part diameter: φ2 mm, thin diameter part diameter: φ0.1 mm, length from the tip of the small diameter part to the boundary between the small diameter part and the large diameter part: 4 mm) Is made. The obtained stepped round bar was processed with a diamond grindstone to produce a micro drill with a drill diameter of 0.1 mm and a blade length of 4.0 mm.

  Using the obtained micro drill, processing was performed under the following conditions, and the number of processing until breakage was examined. Table 3 shows the results of the maximum machining number, the minimum machining number, the average machining number, and the variation (%) in the machining number. Here, the variation (%) in the number of machining was a value calculated by ((maximum machining number−minimum machining number) / average machining number) × 100.

[Cutting conditions]
Work material: One printed circuit board (thickness: 2.4 mm) composed of 20 laminated layers of glass layers and epoxy resin layers. Rotation speed: 250 Krpm
Feeding speed: 1.5m / min
Cutting oil: Not used (dry type)

[result]
Sample No. whose number of micro nests is 0.020 / μm ² or less. In Nos. 3-6 and 8-11, the minimum processing number was 7000 or more, and the variation in the processing number was 30% or less. On the other hand, Sample No. with a micronest number of more than 0.020 / μm ² was used. For 1, 2, and 7, the minimum number of machining was 6000 at most, and the variation in the number of machining was 44% at the smallest. That is, sample no. 3 to 6 and 8 to 11 are sample Nos. Made of the above-mentioned conventional cemented carbide. 1, 2, and sample no. Compared to 7, the minimum number of machining was improved by 1000 or more, and the variation in the number of machining was improved by 14% or more. As described above, a sample having a number of micro nests of 0.020 / μm ² or less has a longer life and a variation in performance between products than the number of micro nests exceeding 0.020 / μm ^2. Is small. It can be seen that the smaller the number of micro nests, the greater the minimum number of processes, the smaller the number of processes, the longer the service life, and the smaller the performance variation between products. Specifically, Sample No. with a micronest number of 0.015 / μm ² or less. Samples Nos. 3, 4, 9 to 11 have sample numbers of 0.020 / μm ² or less. It can be seen that the product has a longer life than 6, 8, and the performance variation between products is small. Furthermore, sample Nos. With a number of micro nests of less than 0.010 / μm ² (the number of micro nests is 0.005 / μm ² or less). Nos. 4, 10, and 11 are sample Nos. With a micronest number of 0.015 / μm ² or less. It can be seen that the product has a longer life than 3, 5, and 9 and has less variation in performance between products. Sample No. 4, 10 and 11 were 9500 at the minimum with the smallest number of machining, and 13% even with the largest variation in the number of machining. That is, this sample No. Nos. 4, 10, and 11 are sample Nos. With a micronest number of more than 0.020 / μm ² . Compared with 1, 2, and 7, the minimum number of machining was improved by 3500 or more, and the variation in the number of machining was improved by 30% or more.

Sample No. Nos. 13 to 15 have a number of micro nests of more than 0.020 / μm ² , the variation in the number of machining is as small as 33%, the smallest number of machining is only 2500, and the tool life is long. It was very low. This is because the proportion of WC particles exceeding 1 μm is high, the average thickness of the binder phase metal is also thick, and the presence ratio of the binder phase metal of 0.5 μm or more is high, so it is not possible to effectively suppress fine uneven wear. This is probably because the tool life could not be extended. That is, although the number of micro nests is large, it is considered that the tool life was exhausted due to fine uneven wear before sudden breakage occurred.

  The cemented carbide of the present invention can be used for materials such as various tools and molds that are desired to have excellent bending strength, wear resistance, and toughness. In particular, it can be used as a tool material for micromachining applications such as a micromachining tool for electronic devices such as a micro drill used for drilling printed circuit boards and the like, and a component machining tool used for manufacturing a micromachine.

Claims (13)

A cemented carbide comprising hard phase particles mainly composed of tungsten carbide and a binder phase metal mainly composed of an iron group metal and bonding the hard phase particles,
Taking an observation field so that the total number of fields is 10 or more and 60 or less and the total field area is 30000 μm ² or more at three or more locations in an arbitrary cross section of the cemented carbide formed by ion beam processing, A cemented carbide having a pore number of 0.02 / μm ² or less when the number of pores having an equivalent diameter of less than 1 μm is measured. When the surface of the cemented carbide is observed so that the total number of visual fields is 5 to 30 and the total visual field area is 1000 μm ² or more, and the equivalent circle diameter of the tungsten carbide particles is calculated, the tungsten carbide particles 2. The cemented carbide according to claim 1, wherein a ratio of the area of the tungsten carbide particles having a particle diameter of more than 1.0 μm is 1.00% or less with respect to the total area. In any cross section of the cemented carbide, an observation visual field is taken so that the total visual field number is 5 or more and 30 or less and the total visual field area is 1000 μm ² or more, and each binder phase existing between the tungsten carbide particles in the observation visual field. When the metal is approximated to one circle, the average diameter of the circle is the average thickness of the binder phase metal, and the ratio of the number of circles having a diameter of 0.5 μm or more to the total number of the circles is the binder phase. When the metal thickness is 0.5 μm or more,
An average thickness of the binder phase metal is 0.14 μm or less;
The cemented carbide according to claim 1 or 2, wherein a ratio of the thickness of the binder phase metal being 0.5 µm or more is 0.15% or less. The cemented carbide contains vanadium and chromium,
When the content of the iron group metal is α (mass%) and the vanadium content when the total amount in terms of carbide is the vanadium content is β (mass%), the content of the iron group metal The cemented carbide according to any one of claims 1 to 3, wherein a ratio (β / α) x 100 of the vanadium content β to the amount α is 2% or more and 7% or less.   The cemented carbide according to claim 4, wherein a content of the vanadium with respect to the entire cemented carbide is 0.35 mass% or more and 0.60 mass% or less. The number of the said pores is 0.005 piece / micrometer < ² > or less, The cemented carbide alloy of any one of Claims 1-5.   A micro drill made of the cemented carbide according to claim 1. Tungsten carbide powder having an average particle size of 0.1 μm or more and 0.7 μm or less and an iron group metal powder having an average particle size of 0.2 μm or more and 0.6 μm or less and a content of more than 0% by mass and 15% by mass or less A raw material preparation step of preparing raw material powder;
A mixing step of individually mixing and dispersing the raw material powder to produce a mixed powder;
A molding step of molding the mixed powder to produce a molded body;
Sintering the molded body at 1340 ° C. to 1400 ° C. to produce a sintered body;
A method for producing a cemented carbide comprising: a pressing step of hot isostatic pressing the sintered body at a temperature of 1360 ° C. or higher and 1430 ° C. or lower and a temperature of the sintering or higher in an inert gas atmosphere of 8 MPa or higher. The raw material powder includes vanadium carbide powder and chromium carbide powder,
When the content of the iron group metal powder is α (mass%) and the content of the vanadium carbide powder is β (mass%), the content β of the vanadium carbide powder with respect to the content α of the iron group metal powder. The method for producing a cemented carbide according to claim 8, wherein the ratio (β / α) × 100 is 2% or more and 7% or less.   The method for producing a cemented carbide according to claim 9, wherein a difference between the temperature of the hot isostatic press and the sintering temperature is 30 ° C. or more.   The method for producing a cemented carbide according to claim 10, wherein the ratio (β / α) × 100 is 4% or more and 5.5% or less.   The method for producing a cemented carbide according to claim 9, wherein the ratio (β / α) × 100 is 4% or more and 6% or less.   The method for producing a cemented carbide according to claim 12, wherein a difference between the temperature of the hot isostatic pressing and the temperature of the sintering is more than 30 ° C.