JP2015080828A - Industrial robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an industrial robot capable of suppressing degradation of conveyance accuracy of a conveyance object even if operation speed is increased.SOLUTION: In an industrial robot, hand support members 5 and 6 fixed with hands 3 and 4 thereto linearly move in a Y direction in relation to an arm 7, and the arm 7 linearly moves in the Y direction in relation to an arm support member 11. When viewed from the Y direction, a first action position F1 where driving force of a first drive mechanism for driving the hand support member 5 acts on the hand support member 5 is located on a lower side of a center of gravity G1 of a portion moved in the Y direction by the driving force of the first drive mechanism. A second action position F2 where driving force of a second drive mechanism for driving the hand support member 6 acts on the hand support member 6 is located on a lower side of a center of gravity G2 of a portion moved in the Y direction by the driving force of the second drive mechanism. A third action position F3 where driving force of a third drive mechanism for driving the arm 7 acts on the arm 7 is located on a lower side of a center of gravity G3 of a portion moved in the Y direction by the driving force of the third drive mechanism.

Description

  The present invention relates to an industrial robot that transports a predetermined transport object.

  Conventionally, an industrial robot that transports a substrate such as a glass substrate for a liquid crystal display is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 includes an upper fork and a lower fork on which a substrate is mounted, a first moving body to which the upper fork is fixed, a second moving body to which the lower fork is fixed, and a first movement. A common base for movably holding the body and the second moving body, and a base for movably holding the common base. The first moving body and the second moving body can reciprocate linearly in the horizontal direction with respect to the common base. Further, the first moving body and the second moving body can reciprocate in the same direction with respect to the common base. The common base can be reciprocated linearly in the horizontal direction with respect to the base. In addition, the common base can be reciprocated with respect to the base in the same direction as the movement direction of the first moving body and the second moving body with respect to the common base.

  In addition, the industrial robot described in Patent Document 1 includes a first drive unit for reciprocating the first moving body, a second drive unit for reciprocating the second moving body, and a reciprocating drive for the common base. And a third drive unit. The first drive unit includes a motor fixed to the common base, a ball screw rotatably held by the common base and rotated by the power of the motor, and a ball nut fixed to the first moving body and screwed to the ball screw. Yes. The second drive unit includes a motor fixed to the common base, a ball screw rotatably held by the common base and rotated by the power of the motor, and a ball nut fixed to the second moving body and screwed to the ball screw. Yes. The third drive unit includes a motor fixed to the base, a ball screw rotatably held by the base and rotated by the power of the motor, and a ball nut fixed to the common base and screwed to the ball screw.

  In the industrial robot described in Patent Document 1, when the substrate is transferred, the first moving body or the second moving body linearly moves relative to the common base, and the first moving body or the second moving body relative to the common base. The common base moves linearly relative to the base in the same direction as the relative movement direction of the two moving bodies. At this time, the first moving body, the second moving body, and the common base are guided by the linear guide.

Japanese Patent Laid-Open No. 11-238775

  In recent years, in order to increase the production efficiency of a substrate manufacturing system in which an industrial robot for transporting a substrate is installed, it is required to increase the operation speed of the industrial robot. In the industrial robot described in Patent Document 1, since the first moving body, the second moving body, and the common base are driven using the ball screw and the ball nut, the first moving body, the second moving body, and the common at the time of movement are used. A moment about the ball screw is generated at the base. Therefore, in this industrial robot, if the moving speed of the first moving body, the second moving body, and the common base is increased, there is a possibility that large vibrations are generated in the first moving body, the second moving body, and the common base. When large vibrations occur in the first moving body, the second moving body, and the common base, the operations of the upper and lower forks on which the substrate is mounted may become unstable, and the substrate transport accuracy may be reduced.

  Therefore, an object of the present invention is to provide an industrial robot capable of suppressing a decrease in the conveyance accuracy of a conveyance object even if the operation speed is increased.

  In order to solve the above-described problems, the industrial robot of the present invention includes a first hand and a second hand on which an object to be transported is mounted, a first hand support member to which the first hand is fixed, and a second hand. The first hand support member and the second hand support member so that the second hand support member to be fixed, and the first hand support member and the second hand support member can linearly reciprocate in the same horizontal direction. An arm holding member, an arm supporting member holding the arm so as to be linearly reciprocable in the same direction as the moving direction of the first hand supporting member and the second hand supporting member relative to the arm, A first drive mechanism for reciprocating the one hand support member; a second drive mechanism for reciprocating the second hand support member with respect to the arm; and a second drive mechanism for reciprocating the arm with respect to the arm support member. When the first hand support member, the second hand support member, and the arm are moved in the first direction, the first hand and the second hand are vertically moved when viewed from the first direction. The first operating position where the driving force of the first driving mechanism acts on the first hand support member when viewed from the first direction is the first driving position by the driving force of the first driving mechanism. The second operating position, which is below the center of gravity of the portion that moves in one direction and where the driving force of the second driving mechanism acts on the second hand support member, moves in the first direction by the driving force of the second driving mechanism. The third operating position where the driving force of the third driving mechanism acts on the arm is below the center of gravity of the portion that moves in the first direction by the driving force of the third driving mechanism. It is characterized by.

  In the industrial robot of the present invention, driving of the first drive mechanism that reciprocates the first hand support member when viewed from the first direction that is the movement direction of the first hand support member, the second hand support member, and the arm. The first action position where the force acts on the first hand support member is below the center of gravity of the portion that moves in the first direction by the driving force of the first drive mechanism, and reciprocates the second hand support member. The second operating position where the driving force of the second driving mechanism acts on the second hand support member is below the center of gravity of the portion that moves in the first direction by the driving force of the second driving mechanism, and reciprocates the arm. The third operating position where the driving force of the third driving mechanism to be moved acts on the arm is below the center of gravity of the portion that moves in the first direction by the driving force of the third driving mechanism. Therefore, in the present invention, the generation of the moment centered on the first action position when viewed from the first direction of the portion that moves in the first direction by the driving force of the first drive mechanism, including the first hand, Generation of a moment centering on the second action position when viewed from the first direction of the portion that moves in the first direction by the driving force of the second drive mechanism, including two hands, and the first hand and the second It is possible to suppress the generation of a moment centering on the third action position when viewed from the first direction of the portion that moves in the first direction by the driving force of the third driving mechanism including the hand. Therefore, in the present invention, even if the operating speed of the industrial robot is increased, the vibrations of the first hand and the second hand on which the object to be transported are suppressed and the decrease in the transport accuracy of the object to be transported is suppressed. It becomes possible.

  In the present invention, for example, the first drive mechanism includes a first screw member in which a male screw is formed and rotatably held by the arm, and a female screw that is engaged with the male screw of the first screw member. A first nut member fixed to the hand support member, and the second drive mechanism is engaged with a second screw member formed with a male screw and rotatably held by the arm, and a male screw of the second screw member And a second nut member fixed to the second hand support member. The first action position is an engagement position between the male screw of the first screw member and the female screw of the first nut member. The second action position is an engagement position of the second screw member, the male screw, and the female screw of the second nut member.

  In the present invention, for example, the third drive mechanism includes a third screw member in which a male screw is formed and rotatably held by either one of the arm and the arm support member, and a male screw of the third screw member. And a third nut member fixed to either the arm or the arm support member. The third action position includes a third screw member, a male screw, and a female screw of the third nut member. Is the engagement position.

  In the present invention, for example, the industrial robot has a first guide rail and a first guide block for guiding the first hand support member in the first direction, and a second hand support member for guiding the second hand support member in the first direction. A second guide rail and a second guide block are provided, a direction perpendicular to the vertical direction and the first direction is a second direction, one of the second directions is a third direction, and the other of the second directions is a fourth direction. Then, the first guide rail is fixed to the side surface on the third direction side of the arm, the second guide rail is fixed to the side surface on the fourth direction side of the arm, and the first screw member is fixed to the third direction of the arm. The second screw member is disposed along the side surface on the fourth direction side of the arm. In this case, it is possible to reduce the distance between the first screw member and the second screw member in the second direction.

  In the present invention, the first drive mechanism includes a first motor that rotates the first screw member, the second drive mechanism includes a second motor that rotates the second screw member, and the first motor has a first direction. The second motor is fixed to the other end side of the arm in the first direction, and the first motor and the second motor are the first motor when viewed from the first direction. The rotation center and the rotation center of the second motor are arranged so as to coincide with each other, and when viewed from the first direction, the rotation center of the first motor and the rotation center of the second motor are above the third operation position, In addition, the distance between the rotation center of the first motor and the axis of the first screw member in the second direction is equal to the distance between the rotation center of the second motor and the axis of the second screw member in the second direction. It is preferable. If comprised in this way, it will become easy to make the gravity center of the part which moves to a 1st direction with the driving force of a 3rd drive mechanism and a 3rd action position correspond in a 2nd direction.

  In the present invention, for example, the third drive mechanism is engaged with the third screw member in which the male screw is formed and rotatably held by either one of the arm and the arm support member, and the third screw member. A third nut member that is fixed to either the arm or the arm support member and a third motor that rotates the third screw member. The third motor is viewed from the first direction. The rotation center of the third motor and the axis of the third screw member are aligned with each other.

  In the present invention, when viewed from the first direction, the first hand is disposed below the second hand, the arm is disposed below the first hand, and is perpendicular to the vertical direction and the first direction. When the second direction is the third direction, the second direction is the third direction, and the other of the second directions is the fourth direction, the first hand support member is disposed on the third direction side of the arm and the second direction. The second hand support member is arranged on the fourth direction side of the arm and the first hand, and is located on the fourth direction side of the second action position. It is preferable to be connected to 2 hands. That is, it is preferable that the first hand is cantilevered by the first hand support member and the second hand is cantilevered by the second hand support member. With this configuration, the first hand support member and the first hand support member and the first hand support member are supported by the first hand support member and the second hand is supported by the second hand support member. It is possible to reduce the weight of the two-hand support member.

  When the first hand is cantilevered by the first hand support member and the second hand is cantilevered by the second hand support member, the first hand is both supported by the first hand support member. Compared with the case where the second hand is supported on both ends by the second hand support member, the first action of the portion moving in the first direction by the driving force of the first driving mechanism when viewed from the first direction. The moment centered on the position and the moment centered on the second action position when viewed from the first direction of the portion moving in the first direction by the driving force of the second drive mechanism are likely to occur. In the present invention, the generation of these moments can be suppressed as described above.

  As described above, in the industrial robot of the present invention, it is possible to suppress a decrease in the conveyance accuracy of the conveyance object even if the operation speed is increased.

It is a top view of the industrial robot concerning an embodiment of the invention. It is a figure which shows an industrial robot from the EE direction of FIG. It is a figure which shows the principal part of an industrial robot from the HH direction of FIG. It is a figure for demonstrating the internal structure of the arm shown in FIG. 1, and the structure of the peripheral part from the upper surface. It is a figure for demonstrating the internal structure of an arm, and the structure of the peripheral part from the JJ direction of FIG. It is a figure for demonstrating the structure of the peripheral part of an arm from the KK direction of FIG. It is a figure for demonstrating structures, such as a 1st hand support member and a 2nd hand support member, from the LL direction of FIG. It is a figure for demonstrating schematic operation | movement of the 1st hand shown in FIG. 2, a 2nd hand, and an arm.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a diagram showing the industrial robot 1 from the EE direction of FIG. FIG. 3 is a diagram showing a main part of the industrial robot 1 from the HH direction of FIG. In the following description, the three directions orthogonal to each other are defined as an X direction, a Y direction, and a Z direction, the X direction is a front-rear direction, the Y direction is a left-right direction, and the Z direction is a vertical direction. In this embodiment, the industrial robot 1 is arranged so that the Z direction and the vertical direction coincide. In the following description, the X1 direction side is the “right” side, the X2 direction side is the “left” side, the Y1 direction side is the “front” side, the Y2 direction side is the “rear (rear)” side, and the Z1 direction side is The “upper” side and the Z2 direction side are the “lower” side.

  The industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. is there. The robot 1 includes a hand 3 as a first hand on which the substrate 2 is mounted, a hand 4 as a second hand on which the substrate 2 is mounted, and a hand support member as a first hand support member to which the hand 3 is fixed. 5, a hand support member 6 as a second hand support member to which the hand 4 is fixed, an arm 7 that holds the hand support members 5, 6, a main body 8 that supports the arm 7, and the main body 8 And a base member 9 that is supported so as to be movable in a direction (specifically, a left-right direction).

  The main body 8 includes an arm support member 11 that holds the arm 7, an elevating member 12 that can be moved up and down while the arm support member 11 is fixed, and a columnar member 13 that supports the elevating member 12 so as to be movable in the vertical direction. A base 14 that constitutes the lower end portion of the main body 8 and that can move horizontally with respect to the base member 9, and a swivel member 15 that has the lower end of the columnar member 13 fixed and that can pivot with respect to the base 14. I have.

  The arm 7 is held on the distal end side of the arm support member 11. The proximal end side of the arm support member 11 is fixed to the elevating member 12. The elevating member 12 moves up and down together with the arm 7 and the like with respect to the columnar member 13 formed in a columnar shape whose longitudinal direction is the vertical direction by the power of an elevating mechanism (not shown). The base 14 moves in the left-right direction with respect to the base member 9 by the power of a moving mechanism (not shown). That is, the main body 8 moves in the left-right direction with respect to the base member 9 by the power of the moving mechanism. Further, the turning member 15 turns with respect to the base 14 by the power of a turning mechanism (not shown).

  The hand support member 5 and the hand support member 6 are held by the arm 7 so as to be linearly reciprocable in the front-rear direction of FIG. That is, the arm 7 holds the hand support members 5 and 6 so that the hand support member 5 and the hand support member 6 can linearly reciprocate in the same horizontal direction. The robot 1 includes a first drive mechanism 21 that reciprocates the hand support member 5 with respect to the arm 7, and a second drive mechanism 22 that reciprocates the hand support member 6 with respect to the arm 7 (FIG. 4). reference).

  The arm 7 is held by an arm support member 11 so as to be linearly reciprocable in the front-rear direction of FIG. That is, the arm support member 11 holds the arm 7 so as to be linearly reciprocable in the same direction as the movement direction of the hand support members 5 and 6 with respect to the arm 7. The robot 1 includes a third drive mechanism 23 that reciprocates the arm 7 with respect to the arm support member 11 (see FIGS. 5 and 6).

  In addition, the front-back direction (Y direction) of this form is the 1st direction used as the moving direction of the hand support members 5 and 6 and the arm 7. FIG. The left-right direction (X direction) is a second direction orthogonal to the front-rear direction and the up-down direction, which are the first direction, the X2 direction is a third direction that is one of the second directions, and the X1 direction is The fourth direction is the other of the second directions.

(Configuration of hand, hand support member, arm and drive mechanism)
FIG. 4 is a view for explaining the internal structure of the arm 7 shown in FIG. 1 and the structure of its peripheral portion from the top. FIG. 5 is a view for explaining the internal structure of the arm 7 and the structure of its peripheral portion from the JJ direction of FIG. FIG. 6 is a view for explaining the structure of the peripheral portion of the arm 7 from the KK direction of FIG. FIG. 7 is a view for explaining the structure of the hand support members 5, 6 and the like from the LL direction of FIG.

  Each of the hands 3 and 4 includes two fork portions 25 on which the substrate 2 is mounted, and a hand base portion 26 to which a base end of the fork portion 25 is fixed. The hand 3 and the hand 4 are arranged so as to overlap each other in the vertical direction when viewed from the front-rear direction. In this embodiment, the hand 3 is disposed below the hand 4 when viewed from the front-rear direction.

  The arm 7 is disposed on the lower side of the hand 3. The arm 7 is formed in a substantially rectangular parallelepiped shape elongated in the front-rear direction. Specifically, the arm 7 includes an upper surface and a lower surface parallel to the XY plane composed of the front-rear direction and the left-right direction, left and right side surfaces parallel to the YZ plane composed of the front-rear direction and the up-down direction, It is formed in a substantially rectangular parallelepiped shape having front and rear side surfaces parallel to the ZX plane composed of a direction and a left-right direction. The arm 7 is formed in a hollow shape. The width of the arm 7 in the left-right direction is narrower than the width of the hands 3, 4 in the left-right direction.

  As shown in FIG. 7, two guide rails 27 for guiding the hand support member 5 in the front-rear direction are fixed to the left side surface of the arm 7. Two guide rails 28 for guiding the hand support member 6 in the front-rear direction are fixed to the right side surface of the arm 7. Two guide rails 29 for guiding the arm 7 in the front-rear direction are fixed to the lower surface of the arm 7. The two guide rails 27 are fixed to the left side surface of the arm 7 with a predetermined interval in the vertical direction, and the two guide rails 28 are fixed to the arm 7 with a predetermined interval in the vertical direction. It is fixed on the right side. The fixed position of the guide rail 27 and the fixed position of the guide rail 28 are substantially the same in the vertical direction. The two guide rails 29 are fixed to the lower surface of the arm 7 with a predetermined interval left and right. The guide rail 27 of this embodiment is a first guide rail, the guide rail 28 is a second guide rail, and the guide rail 29 is a third guide rail.

  As shown in FIG. 7, the hand support member 5 is formed in a block shape having a substantially L shape when viewed from the front-rear direction. The hand support member 5 includes a hand fixing portion 5a to which the hand 3 is fixed, and a block fixing portion 5b to which two guide blocks 30 engaged with the guide rail 27 are fixed. The hand fixing part 5 a and the block fixing part 5 b are arranged on the left side of the arm 7. That is, the hand support member 5 is disposed on the left side of the arm 7. The guide block 30 of this embodiment is a first guide block.

  The two guide blocks 30 are fixed to the right end side of the block fixing portion 5b with a predetermined interval in the vertical direction. The lower end side of the hand fixing portion 5a is connected to the left end of the block fixing portion 5b. The upper end surface of the hand fixing portion 5a is disposed above the upper end of the block fixing portion 5b. The lower surface of the hand base portion 26 of the hand 3 is fixed to the upper end surface of the hand fixing portion 5a. That is, the hand support member 5 is disposed below the hand 3. In this embodiment, the hand fixing portion 5a is connected to the lower surface of the hand base portion 26 of the hand 3 on the left side of the center of the hand 3 in the left-right direction.

  As shown in FIG. 7, the hand support member 6 is formed in a block shape having a substantially L shape when viewed from the front-rear direction. The hand support member 6 includes a hand fixing portion 6a to which the hand 4 is fixed, and a block fixing portion 6b to which two guide blocks 31 engaged with the guide rail 28 are fixed. The two guide blocks 31 are fixed to the left end side of the block fixing portion 6b with a predetermined interval in the vertical direction. The guide block 31 of this embodiment is a second guide block.

  The lower end side of the hand fixing portion 6a is connected to the right end of the block fixing portion 6b. In order to prevent interference with the substrate 2 mounted on the hand 3, the hand fixing portion 6 a is formed to extend upward from the right end of the block fixing portion 6 b toward the upper right side and then to the upper side. Yes. The upper end surface of the hand fixing portion 6a is disposed above the upper end of the block fixing portion 6b. A hand base portion 26 of the hand 4 is fixed to the upper end side of the hand fixing portion 6a. In the present embodiment, the hand fixing part 6 a is connected to the right end of the hand base part 26 of the hand 4.

  The lower end side of the hand fixing part 6 a and the block fixing part 6 b are arranged on the right side of the arm 7. Further, the upper end side of the hand fixing portion 6 a is disposed on the right side of the hand 3. That is, the hand support member 6 is disposed on the right side of the arm 7 and the hand 3. Further, the lower end side of the hand fixing part 6 a and the block fixing part 6 b are arranged below the hand 3.

  As shown in FIG. 7, the arm support member 11 includes a block fixing member 33 to which two guide blocks 32 that engage with the guide rail 29 are fixed. The block fixing member 33 is fixed to the upper surface on the distal end side of the arm support member 11. The two guide blocks 32 are fixed to the upper end side of the block fixing member 33 with a predetermined interval left and right. The guide block 32 of this embodiment is a third guide block.

  The first drive mechanism 21 is disposed below the hand 3. As shown in FIG. 4, the first drive mechanism 21 has a screw member 36 as a first screw member having a male screw formed on the outer peripheral surface, and a female screw that engages with the male screw of the screw member 36 formed on the inner peripheral surface. A nut member 37 as a first nut member, a motor 38 as a first motor for rotating the screw member 36, and a power transmission mechanism 39 for transmitting the power of the motor 38 to the screw member 36.

  The screw member 36 is, for example, a ball screw. The screw member 36 is disposed on the left side of the arm 7 with the front-rear direction as the axial direction. That is, the screw member 36 is disposed along the left side surface of the arm 7. Both front and rear ends of the screw member 36 are rotatably held by bearings fixed to the left side surface of the arm 7. That is, the screw member 36 is rotatably held by the arm 7 via the bearing. The nut member 37 is fixed to the block fixing portion 5 b of the hand support member 5. As shown in FIG. 7, the screw member 36 and the nut member 37 are disposed between the two guide rails 27 and the two guide blocks 30 in the vertical direction. Further, the shaft centers of the screw member 36 and the nut member 37 are arranged on the left side of the engaging portion between the guide rail 27 and the guide block 30.

  The motor 38 is disposed on the front end side inside the arm 7 and is fixed to the front end side inside the arm 7. The motor 38 is fixed to the front end side of the arm 7 so that the output shaft protrudes to the front side. In this embodiment, when viewed from the front-rear direction, the center of the arm 7 and the rotation center of the motor 38 substantially coincide. The power transmission mechanism 39 includes a pulley fixed to the front end side of the output shaft of the motor 38, a pulley fixed to the front end side of the screw member 36, and a belt spanned between the pulleys.

  The second drive mechanism 22 is disposed below the hand 3. As shown in FIG. 4, the second drive mechanism 22 has a screw member 41 as a second screw member having a male screw formed on the outer peripheral surface, and a female screw that engages with the male screw of the screw member 41 formed on the inner peripheral surface. A nut member 42 as a second nut member, a motor 43 as a second motor for rotating the screw member 41, and a power transmission mechanism 44 for transmitting the power of the motor 43 to the screw member 41.

  The screw member 41 is, for example, a ball screw. The screw member 41 is disposed on the right side of the arm 7 with the front-rear direction as the axial direction. That is, the screw member 41 is disposed along the right side surface of the arm 7. Both front and rear ends of the screw member 41 are rotatably held by bearings fixed to the right side surface of the arm 7. That is, the screw member 41 is rotatably held by the arm 7 via the bearing. The nut member 42 is fixed to the block fixing portion 6 b of the hand support member 6. As shown in FIG. 7, the screw member 41 and the nut member 42 are disposed between the two guide rails 28 and the two guide blocks 31 in the vertical direction. Further, the axial centers of the screw member 41 and the nut member 42 are arranged on the right side of the engaging portion between the guide rail 28 and the guide block 31.

  The motor 43 is disposed on the rear end side in the arm 7 and is fixed on the rear end side in the arm 7. The motor 43 is fixed to the rear end side of the arm 7 so that the output shaft protrudes rearward. In this embodiment, when viewed from the front-rear direction, the center of the arm 7 and the rotation center of the motor 43 substantially coincide. In this embodiment, the rotation center of the motor 38 and the rotation center of the motor 43 coincide with each other when viewed from the front-rear direction. The power transmission mechanism 44 includes a pulley fixed to the rear end side of the output shaft of the motor 43, a pulley fixed to the rear end side of the screw member 41, and a belt spanned between the pulleys.

  As shown in FIG. 7, in this embodiment, the distance D1 between the rotation center of the motors 38 and 43 and the axis of the screw member 36 and the rotation center of the motors 38 and 43 and the axis of the screw member 41. The distance D2 in the left-right direction is equal.

  The third drive mechanism 23 is disposed below the arm 7. The third drive mechanism 23 includes a screw member 46 as a third screw member having a male screw formed on the outer peripheral surface, and a third nut member having a female screw engaging with the male screw of the screw member 46 formed on the inner peripheral surface. Nut member 47 and a motor 48 as a third motor for rotating the screw member 46.

  The screw member 46 is, for example, a ball screw. The screw member 46 is disposed on the lower side of the arm 7 with the front-rear direction as the axial direction. That is, the screw member 46 is disposed along the lower surface of the arm 7. Both front and rear ends of the screw member 46 are rotatably held by bearings fixed to the lower surface of the arm 7. That is, the screw member 46 is rotatably held by the arm 7 via the bearing. The nut member 47 is fixed to the block fixing member 33. That is, the nut member 47 is fixed to the arm support member 11 via the block fixing member 33. As shown in FIG. 7, the screw member 46 and the nut member 47 are disposed between the two guide rails 29 and the two guide blocks 32 in the left-right direction.

  The motor 48 is fixed to the rear end side of the lower surface of the arm 7. The motor 48 is fixed to the lower surface of the arm 7 so that the output shaft projects forward. The front end side of the output shaft of the motor 48 and the rear end side of the screw member 46 are connected via a coupling 49. When viewed from the front-rear direction, the rotation center of the motor 48 and the axis of the screw member 46 are connected. And are consistent. Further, when viewed from the front-rear direction, the rotation center of the motor 48 and the axis of the screw member 46 coincide with the rotation centers of the motors 38 and 43 (that is, the center of the arm 7) in the left-right direction. That is, when viewed from the front-rear direction, the rotation centers of the motors 38 and 43 are arranged on a line CL1 parallel to the vertical direction passing through the rotation center of the motor 48 and the axis of the screw member 46. And the upper center of the axis of the screw member 46.

  In this embodiment, the engagement position where the male screw of the screw member 36 and the female screw of the nut member 37 are engaged is a first operation position F1 where the driving force of the first driving mechanism 21 with respect to the hand support member 5 acts. . The engagement position where the male screw of the screw member 41 and the female screw of the nut member 42 are engaged is a second operation position F2 where the driving force of the second driving mechanism 22 with respect to the hand support member 6 acts. The engagement position where the male screw of the screw member 46 and the female screw of the nut member 47 are engaged is a third action position F3 where the driving force of the third drive mechanism 23 with respect to the arm 7 acts.

  In this embodiment, as shown in FIG. 7, when viewed from the front-rear direction, the first action position F1 is below the center of gravity G1 of the portion that moves in the front-rear direction by the driving force of the first drive mechanism 21. The second operation position F2 is below the center of gravity G2 of the portion that moves in the front-rear direction by the driving force of the second drive mechanism 22. That is, when viewed from the front-rear direction, the first action position F1 and the center of gravity G1 overlap in the up-down direction, and the second action position F2 and center of gravity G2 overlap in the up-down direction. F1 and the center of gravity G1 substantially coincide with each other, and the second action position F2 and the center of gravity G2 substantially coincide with each other. Specifically, when viewed from the front-rear direction, the center of gravity G1 is on a line CL2 parallel to the vertical direction passing through the axis of the screw member 36, and the center of gravity G2 passes through the axis of the screw member 41. It is on a line CL3 parallel to the vertical direction.

  In this embodiment, the parts that move in the front-rear direction by the driving force of the first drive mechanism 21 are the hand 3, the hand support member 5, the guide block 30, and the nut member 37, and the center of gravity G1 is the hand 3, the hand support member 5. The center of gravity of the guide block 30 and the nut member 37. Further, the parts that move in the front-rear direction by the driving force of the second drive mechanism 22 are the hand 4, the hand support member 6, the guide block 31, and the nut member 42. The center of gravity G2 is the hand 4, the hand support member 6, and the guide. This is the center of gravity of the block 31 and the nut member 42.

  Further, as described above, in this embodiment, when viewed from the front-rear direction, the rotation center of the motor 48 and the axis of the screw member 46 and the rotation centers of the motors 38 and 43 (that is, the center of the arm 7) are the same. The distances D1 between the rotation centers of the motors 38 and 43 and the axis of the screw member 36 and the distances D2 between the rotation centers of the motors 38 and 43 and the axis of the screw member 41 are equal in the left-right direction. The third action position F3 is below the center of gravity G3 of the portion that moves in the front-rear direction by the driving force of the third drive mechanism 23. That is, when viewed from the front-rear direction, the third action position F3 and the center of gravity G3 overlap in the vertical direction, and the third action position F3 and the center of gravity G3 substantially coincide with each other in the left-right direction. Specifically, when viewed from the front-rear direction, the center of gravity G3 is on a line CL1 parallel to the vertical direction passing through the axis of the screw member 46. The rotation centers of the motors 38 and 43 are on the upper side of the third operation position F3.

  In this embodiment, the parts that move in the front-rear direction by the driving force of the third driving mechanism 23 are the hands 3, 4, the hand support members 5, 6, the arm 7, the first driving mechanism 21, the second driving mechanism 22, and the guide rail. 27-29, guide blocks 30, 31, screw member 46, coupling 49, and bearings for supporting the screw members 36, 41, 46, and the center of gravity G3 includes the hands 3, 4, the hand support members 5, 6, and the arm. 7, the first drive mechanism 21, the second drive mechanism 22, the guide rails 27 to 29, the guide blocks 30 and 31, the screw member 46, the coupling 49, and the center of gravity of the bearing or the like that supports the screw members 36, 41, 46. .

  As described above, the lower end side of the hand fixing portion 5a of the hand support member 5 is connected to the left end of the block fixing portion 5b. That is, the hand support member 5 is connected to the hand 3 on the left side of the first operation position F1. Further, as described above, the lower end side of the hand fixing portion 6a of the hand support member 6 is connected to the right end of the block fixing portion 6b. That is, the hand support member 6 is connected to the hand 4 on the right side of the second operation position F2.

(Schematic movement of hand and arm)
FIG. 8 is a diagram for explaining a schematic operation of the hands 3 and 4 and the arm 7 shown in FIG.

  In the robot 1 configured as described above, before the substrate 2 is loaded into the substrate accommodating portion (not shown) in which the substrate 2 is accommodated or before the substrate 2 is unloaded from the substrate accommodating portion, for example, FIG. As shown in FIG. 8A, the arm 7 moves relative to the front side with respect to the arm support member 11, and the hand 3, hand support member 5, hand 4, and hand support member 6 move forward with respect to the arm 7. It is moving relative.

  When the board 2 mounted on the hands 3 and 4 is carried into the board housing part, or when the board 2 housed in the board housing part is carried out by the hands 3 and 4, the motor 48 is activated, As shown in FIGS. 8B and 8C, the arm 7 moves rearward with respect to the arm support member 11. When the arm 7 moves rearward with respect to the arm support member 11, the hands 3 and 4 also move rearward with respect to the arm support member 11 together with the arm 7.

  When the board 2 mounted on the hand 4 is carried into the board housing part or when the board 2 housed in the board housing part is carried out by the hand 4, the motor 43 is activated together with the motor 48. Then, as shown in FIG. 8B, the hand 4 and the hand support member 6 move rearward. Similarly, when the board 2 mounted on the hand 3 is carried into the board housing part or when the board 2 housed in the board housing part is carried out by the hand 3, the motor 38 is started together with the motor 48. Then, as shown in FIG. 8C, the hand 3 and the hand support member 5 move rearward.

(Main effects of this form)
As described above, in this embodiment, when viewed from the front-rear direction, the first operation position F1 at which the driving force of the first driving mechanism 21 acts on the hand support member 5 is the driving force of the first driving mechanism 21. The second operating position F2 on the lower side of the center of gravity G1 of the portion that moves in the front-rear direction and where the driving force of the second driving mechanism 22 acts on the hand support member 6 is moved in the front-rear direction by the driving force of the second driving mechanism 22. The third operating position F3, which is below the center of gravity G2 of the moving part and on which the driving force of the third driving mechanism 23 acts on the arm 7, is the center of gravity of the part that moves in the front-rear direction by the driving force of the third driving mechanism 23. It is below G3. Therefore, in the present embodiment, the generation of a moment centered on the first action position F1 when viewed from the front-rear direction of the part that moves in the front-rear direction by the driving force of the first drive mechanism 21 including the hand 3 and the like, 4 and other parts that move in the front-rear direction by the driving force of the second drive mechanism 22, and the generation of moment centered on the second action position F2 when viewed from the front-rear direction, and the hands 3, 4, etc. In addition, it is possible to suppress the generation of a moment centering on the third action position F3 when viewed from the front-rear direction of the portion that moves in the front-rear direction by the driving force of the third drive mechanism 23. Therefore, in this embodiment, even if the moving speed of the hands 3 and 4 and the arm 7 is increased (that is, the operating speed of the robot 1 is increased), the vibration of the hands 3 and 4 on which the substrate 2 is mounted is suppressed. Thus, it is possible to suppress a decrease in the conveyance accuracy of the substrate 2.

  In this embodiment, the hand support member 5 is disposed on the left side of the arm 7 and connected to the hand 3 on the left side of the arm 7. The hand support member 6 is disposed on the right side of the arm 7 and is connected to the hand 4 on the right side of the arm 7. That is, in this embodiment, the hand 3 is cantilevered by the hand support member 5, and the hand 4 is cantilevered by the hand support member 6. Therefore, it is possible to reduce the weight of the hand support members 5 and 6 as compared with the case where the hand 3 is supported by the hand support member 5 and the hand 4 is supported by the hand support member 6. .

  When the hand 3 is cantilevered by the hand support member 5 and the hand 4 is cantilevered by the hand support member 6, the hand 3 is supported by the hand support member 5 and the hand 4 is supported by the hand. Compared to the case where both ends are supported by the member 6, the moment about the first action position F <b> 1 when viewed from the front-rear direction of the portion that moves in the front-rear direction by the driving force of the first drive mechanism 21, and The moment that moves in the front-rear direction by the driving force of the second drive mechanism 22 is likely to occur around the second action position F2 when viewed from the front-rear direction. In this embodiment, as described above, The occurrence of these moments can be suppressed.

  In this embodiment, the motor 38 is fixed to the front end side inside the arm 7, the motor 43 is fixed to the rear end side inside the arm 7, and the motor 38 and the motor 43 are viewed from the front-rear direction. The rotation center of the motor 38 and the rotation center of the motor 43 are arranged so as to coincide with each other. In this embodiment, when viewed from the front-rear direction, the rotation centers of the motors 38 and 43 are above the third action position F3. Furthermore, in this embodiment, the distance D1 between the rotation centers of the motors 38 and 43 and the axis of the screw member 36 is equal to the distance D2 between the rotation centers of the motors 38 and 43 and the axis of the screw member 41. . Therefore, in the present embodiment, in the left-right direction, the center of gravity G3 of the portion that moves in the front-rear direction by the driving force of the third drive mechanism 23 and the third action position F3 can be easily matched.

  In this embodiment, the guide rail 27 is fixed to the left side surface of the arm 7, and the guide rail 28 is fixed to the right side surface of the arm 7. In this embodiment, the screw member 36 is disposed along the left side surface of the arm 7, and the screw member 41 is disposed along the right side surface of the arm 7. Therefore, in this embodiment, it is possible to reduce the distance between the screw member 36 and the screw member 41 in the left-right direction. That is, in this embodiment, the distance between the first action position F1 and the second action position F2 in the left-right direction can be reduced, and therefore the distance between the center of gravity G1 and the center of gravity G2 in the left-right direction can be reduced. Become. Therefore, in this embodiment, the center of gravity G1, the center of gravity G2, and the center of gravity G3 can be brought close to each other in the left-right direction. As a result, the operations of the hands 3, 4 and the arm 7 that are moved by the third drive mechanism 23 are performed. It becomes possible to stabilize.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the two guide rails 27 are fixed to the left side surface of the arm 7 with a predetermined interval in the vertical direction, and the two guide rails 28 are fixed to the right side surface of the arm 7 in the vertical direction. It is fixed at a predetermined interval. In addition, for example, the arm 7 may be formed on the upper surface and / or the lower surface of the arm 7 such that the two guide rails 27 and 28 are fixed with a predetermined distance in the left-right direction.

  In the embodiment described above, the screw member 46 is rotatably held by the arm 7 via a bearing, and the nut member 47 is fixed to the block fixing member 33. In addition, for example, the screw member 46 may be rotatably held by the block fixing member 33 via a bearing, and the nut member 47 may be fixed to the arm 7. In this case, the motor 48 is fixed to the block fixing member 33. In the embodiment described above, the screw member 46 and the motor 48 are connected via the coupling 49, but the screw member 46 and the motor 48 may be connected via a pulley and a belt.

  In the above-described embodiment, the transport object to be transported by the robot 1 is the glass substrate 2 for liquid crystal display, but the transport object to be transported by the robot 1 may be a semiconductor wafer other than the glass substrate 2. .

1 Robot (industrial robot)
2 Substrate (glass substrate, transport object)
3 hands (first hand)
4 hands (second hand)
5 Hand support member (first hand support member)
6 Hand support member (second hand support member)
7 Arm 11 Arm support member 21 First drive mechanism 22 Second drive mechanism 23 Third drive mechanism 27 Guide rail (first guide rail)
28 Guide rail (second guide rail)
30 guide block (first guide block)
31 Guide block (second guide block)
36 Screw member (first screw member)
37 Nut member (first nut member)
38 Motor (first motor)
41 Screw member (second screw member)
42 Nut member (second nut member)
43 Motor (second motor)
46 Screw member (third screw member)
47 Nut member (third nut member)
48 motor (third motor)
D1 Distance between the rotation center of the first motor and the axis of the first screw member in the second direction D2 Distance between the rotation center of the second motor and the axis of the second screw member in the second direction F1 First operation position F2 Second action position F3 Third action position G1 Center of gravity of the part moving in the first direction by the driving force of the first drive mechanism G2 Center of gravity of the part moving in the first direction by the driving force of the second driving mechanism G3 Third driving mechanism The center of gravity of the part that moves in the first direction with the driving force of X

Claims (7)

A first hand and a second hand on which an object to be conveyed is mounted; a first hand support member to which the first hand is fixed; a second hand support member to which the second hand is fixed; and the first hand. An arm for holding the first hand support member and the second hand support member so that the support member and the second hand support member can linearly reciprocate in the same horizontal direction; An arm support member for holding the arm so as to be linearly reciprocable in the same direction as the movement direction of the first hand support member and the second hand support member; and the first hand support member with respect to the arm A first drive mechanism for reciprocating the second hand, a second drive mechanism for reciprocating the second hand support member with respect to the arm, and a reciprocation of the arm with respect to the arm support member. And a third drive mechanism for moving,
When the movement direction of the first hand support member, the second hand support member and the arm is a first direction,
When viewed from the first direction, the first hand and the second hand are arranged to overlap each other in the vertical direction,
When viewed from the first direction, the first operating position where the driving force of the first driving mechanism acts on the first hand support member moves in the first direction by the driving force of the first driving mechanism. The second operating position on the lower side of the center of gravity of the portion where the driving force of the second driving mechanism acts on the second hand support member moves in the first direction by the driving force of the second driving mechanism. The third action position where the driving force of the third driving mechanism acts on the arm is below the center of gravity of the portion that moves in the first direction by the driving force of the third driving mechanism. Industrial robot characterized by that. The first drive mechanism includes a first screw member that is formed with a male screw and rotatably held by the arm, and a female screw that engages with the male screw of the first screw member, and the first hand support. A first nut member fixed to the member,
The second drive mechanism includes a second screw member that is formed with a male screw and is rotatably held by the arm, and a female screw that is engaged with the male screw of the second screw member, and the second hand support. A second nut member fixed to the member,
The first operation position is an engagement position between a male screw of the first screw member and a female screw of the first nut member,
2. The industrial robot according to claim 1, wherein the second action position is an engagement position of the second screw member, the male screw, and the female screw of the second nut member. The third drive mechanism includes a third screw member in which a male screw is formed and rotatably held by one of the arm and the arm support member, and a female screw engaged with the male screw of the third screw member. And a third nut member fixed to one of the arm and the arm support member.
3. The industrial robot according to claim 2, wherein the third action position is an engagement position of the third screw member, the male screw, and the female screw of the third nut member. A first guide rail and a first guide block for guiding the first hand support member in the first direction; a second guide rail and a second guide for guiding the second hand support member in the first direction; With a guide block,
A direction perpendicular to the up and down direction and the first direction is a second direction, one of the second directions is a third direction, and the other of the second directions is a fourth direction.
The first guide rail is fixed to a side surface of the arm on the third direction side,
The second guide rail is fixed to a side surface of the arm on the fourth direction side,
The first screw member is disposed along a side surface of the arm on the third direction side,
4. The industrial robot according to claim 2, wherein the second screw member is disposed along a side surface of the arm on the fourth direction side. 5. The first drive mechanism includes a first motor that rotates the first screw member,
The second drive mechanism includes a second motor that rotates the second screw member,
The first motor is fixed to one end side of the arm in the first direction, and the second motor is fixed to the other end side of the arm in the first direction, and the first motor and the first motor The two motors are arranged such that the rotation center of the first motor coincides with the rotation center of the second motor when viewed from the first direction,
When viewed from the first direction, the rotation center of the first motor and the rotation center of the second motor are above the third action position, and the rotation center of the first motor in the second direction. And the distance between the rotation center of the second motor and the axis of the second screw member in the second direction is equal to the distance between the axis of the first screw member and the axis of the second screw member. Item 4. The industrial robot according to Item 4. The third drive mechanism includes a third screw member in which a male screw is formed and rotatably held by one of the arm and the arm support member, and a female screw engaged with the male screw of the third screw member. A third nut member fixed to one of the arm and the arm support member, and a third motor for rotating the third screw member,
The said 3rd motor is arrange | positioned so that the rotation center of the said 3rd motor and the axial center of the said 3rd screw member may correspond, seeing from the said 1st direction. Industrial robots. When viewed from the first direction, the first hand is disposed below the second hand, and the arm is disposed below the first hand,
A direction perpendicular to the up and down direction and the first direction is a second direction, one of the second directions is a third direction, and the other of the second directions is a fourth direction.
The first hand support member is disposed on the third direction side of the arm and is connected to the first hand on the third direction side than the first operation position.
The second hand support member is disposed on the fourth direction side of the arm and the first hand and is connected to the second hand on the fourth direction side with respect to the second operation position. An industrial robot according to any one of claims 1 to 6.

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