JP2015072128A5 - - Google Patents

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Publication number
JP2015072128A5
JP2015072128A5 JP2013206635A JP2013206635A JP2015072128A5 JP 2015072128 A5 JP2015072128 A5 JP 2015072128A5 JP 2013206635 A JP2013206635 A JP 2013206635A JP 2013206635 A JP2013206635 A JP 2013206635A JP 2015072128 A5 JP2015072128 A5 JP 2015072128A5
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JP
Japan
Prior art keywords
semiconductor device
heater
contact pin
stage
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013206635A
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English (en)
Japanese (ja)
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JP6102666B2 (ja
JP2015072128A (ja
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Priority to JP2013206635A priority Critical patent/JP6102666B2/ja
Priority claimed from JP2013206635A external-priority patent/JP6102666B2/ja
Publication of JP2015072128A publication Critical patent/JP2015072128A/ja
Publication of JP2015072128A5 publication Critical patent/JP2015072128A5/ja
Application granted granted Critical
Publication of JP6102666B2 publication Critical patent/JP6102666B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013206635A 2013-10-01 2013-10-01 半導体装置の検査装置および半導体装置の検査方法 Expired - Fee Related JP6102666B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013206635A JP6102666B2 (ja) 2013-10-01 2013-10-01 半導体装置の検査装置および半導体装置の検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013206635A JP6102666B2 (ja) 2013-10-01 2013-10-01 半導体装置の検査装置および半導体装置の検査方法

Publications (3)

Publication Number Publication Date
JP2015072128A JP2015072128A (ja) 2015-04-16
JP2015072128A5 true JP2015072128A5 (https=) 2016-03-10
JP6102666B2 JP6102666B2 (ja) 2017-03-29

Family

ID=53014610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013206635A Expired - Fee Related JP6102666B2 (ja) 2013-10-01 2013-10-01 半導体装置の検査装置および半導体装置の検査方法

Country Status (1)

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JP (1) JP6102666B2 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113979U (https=) * 1979-02-05 1980-08-11
JPH0599983A (ja) * 1991-07-15 1993-04-23 Graphtec Corp 試験装置
JP2005137231A (ja) * 2003-11-05 2005-06-02 Iseki & Co Ltd 掘削装置
JP5266452B2 (ja) * 2007-07-13 2013-08-21 アキム株式会社 温度特性計測装置
JP5011267B2 (ja) * 2008-11-28 2012-08-29 日立アプライアンス株式会社 冷蔵庫

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