JP2015070582A - Mesa type crystal vibration piece and crystal device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mesa type crystal vibration piece excellent in vibration properties by preventing an extraction electrode from being disconnected and confining energy caused by the vibration of a crystal vibration piece, and a crystal device using the crystal vibration piece.SOLUTION: A crystal vibration piece (10) comprises: a central part (15) having a first thickness; and a peripheral part (16) formed so as to surround the central part and having a second thickness thinner than the first thickness. Further, the crystal vibration piece comprises: excitation electrodes (102a) formed in the central part respectively; a pair of extraction electrodes (103a) extracted from the excitation electrodes to a peripheral part; and a pair of electrode pads (105a) connected with the extraction electrodes. A first area (106a) where the extraction electrode is formed and a second area (101a) where the electrode pad is formed, are formed in the same height as the central part, and the first area is an ion doped area where metal ions are doped, a twin crystal area where crystal axes of the crystal are reversed or an amorphous area where a single crystal state of the crystal is destroyed.

Description

  The present invention relates to a mesa-type quartz crystal resonator element having a thick central portion and a peripheral portion formed so as to surround the central portion, and a crystal device having the crystal resonator piece.

  For electronic devices, a quartz crystal vibrating piece that vibrates in thickness is used. In the quartz crystal vibrating piece, the vibration due to the excitation electrode propagates to the electrode pad that is a bonding region with the base. For this reason, the quartz crystal resonator element of Patent Document 1 has a notch, a groove, or a recess formed on the substrate of the quartz crystal resonator element in order to suppress the vibration of the excitation electrode from propagating to the electrode pad.

  Further, Patent Document 2 discloses a mesa-type quartz crystal vibrating piece having a thickness-shear vibration in which a central portion to be excited is formed thicker than a peripheral portion in order to confine energy. The quartz crystal resonator element of Patent Document 2 is provided with a highly viscous region that adds viscosity to the electrode pad region. This high-viscosity region is obtained by ion implantation of metal materials (for example, Ag, Au, Cu, Al, Li, Mg, Ti, Cr, Fe, Ni, Zn, Ge, Mo, Sn, W, Pt, Pb, etc.) A metal material is infiltrated into the quartz substrate at the molecular level by thermal diffusion.

JP 2011-097623 A JP 2008-154181 A

  As shown in Patent Document 1, when a notch, a groove, or a recess is formed in the substrate of the crystal vibrating piece, an extraction electrode from the excitation electrode to the electrode pad must also be formed in the notch, the groove, etc. The extraction electrode sometimes breaks. Further, in the mesa-type crystal resonator, an extraction electrode must be formed at a step between the central portion and the peripheral portion, and the extraction electrode may be disconnected.

  Therefore, the present invention provides a mesa-type crystal vibrating piece having excellent vibration characteristics by preventing disconnection of an extraction electrode and confining energy due to vibration of the crystal vibrating piece, and a crystal device using the crystal vibrating piece.

  A mesa-type quartz crystal resonator element according to a first aspect has a mesa having a central portion having a first thickness between both main surfaces and a peripheral portion having a second thickness smaller than the first thickness so as to surround the central portion. This is a type of crystal vibrating piece. In addition, the mesa-type quartz crystal resonator element includes an excitation electrode formed at the center of both main surfaces, a pair of extraction electrodes that are respectively extracted from the excitation electrode to the peripheral portion on both main surfaces, and a pair connected to the extraction electrodes. The first region where the extraction electrode is formed and the second region where the electrode pad is formed are formed at the same height as the central portion, and the first region is doped with metal ions It is an ion doping region, a twin region where the crystal axis of crystal is inverted, or an amorphous region where the single crystal state of crystal is broken.

  In the mesa-type quartz crystal resonator element according to the second aspect, in the first aspect, the second region is an ion doping region, a twin region, or an amorphous region.

  The mesa-type quartz crystal resonator element according to the third aspect is the third shape having the same shape as the first area at a position that is mirror-symmetric with respect to the central part of the first area with the central part in between. A region is formed, and the third region is an ion doping region, a twin region, or an amorphous region.

  The mesa-type quartz crystal resonator element according to a fourth aspect is the mesa-type quartz crystal resonator element according to the first aspect, wherein the quartz crystal resonator element includes a vibrating portion formed by the central portion and the peripheral portion, and a frame surrounding the vibrating portion with a space therebetween, A connecting portion that connects the vibrating portion and the frame, the pair of extraction electrodes are extracted via the connection portion and the frame, and the electrode pad is formed on the frame.

  In the fourth aspect, the mesa-type quartz crystal resonator element according to the fifth aspect is that the frame has the first thickness.

  A quartz crystal device according to a sixth aspect includes the quartz crystal vibrating piece according to the first to third aspects, a base plate on which the quartz vibrating piece is placed, and a lid plate joined to the base plate.

  A crystal device according to a seventh aspect includes the crystal resonator element according to the fourth aspect or the fifth aspect, a base plate bonded to one main surface of the frame, and a lid plate bonded to the other main surface of the frame.

  According to the present invention, there are provided a mesa type crystal vibrating piece having excellent vibration characteristics by preventing disconnection of an extraction electrode and confining energy due to vibration of the crystal vibrating piece, and a crystal device using the crystal vibrating piece. be able to.

1 is an exploded perspective view of a crystal device 100. FIG. (A) is AA sectional drawing of FIG. (B) is BB sectional drawing of FIG. FIG. 4A is a plan view of the quartz crystal vibrating piece 20. (B) is CC sectional drawing of Fig.3 (a). 2 is an exploded perspective view of a crystal device 300. FIG. FIG. 4A is a plan view of the quartz crystal vibrating piece 30. (B) is DD sectional drawing of Fig.5 (a). (C) is EE sectional drawing of Fig.5 (a).

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It should be noted that the scope of the present invention is not limited to these forms unless otherwise specified in the following description.

(First embodiment)
<Configuration of Crystal Device 100>
FIG. 1 is an exploded perspective view of the quartz crystal device 100. The crystal device 100 includes a lid plate 11, a base plate 12, and a crystal vibrating piece 10. The quartz crystal vibrating piece 10 is formed as an AT-cut quartz crystal vibrating piece, for example. The AT-cut quartz crystal resonator element has a principal surface (YZ plane) inclined with respect to the Y axis of the crystal axis (XYZ) by 35 degrees 15 minutes from the Z axis in the Y axis direction around the X axis. In the following description, the new tilted axes are used as the Y ′ axis and the Z ′ axis with reference to the axial direction of the AT-cut crystal vibrating piece. That is, in the quartz crystal device 100, the longitudinal direction of the quartz crystal device 100 is described as the X-axis direction, the height direction of the quartz crystal device 100 is defined as the Y′-axis direction, and the direction perpendicular to the X and Y′-axis directions is described as the Z′-axis direction.

  The crystal vibrating piece 10 is a mesa-type crystal vibrating piece in which the central portion 15 is formed in a convex shape on both the upper surface (+ Y′-axis side surface) and the lower surface (−Y′-axis side surface). The crystal vibrating piece 10 is formed so that the upper surface and the lower surface have the same shape. The mesa-type crystal vibrating piece 10 concentrates energy in the central portion 15 by forming the peripheral portion 16 formed around the central portion 15 thinner than the central portion 15 in the Y′-axis direction. Support portions 101a and 101b are formed at both ends of the side on the −X axis side of the crystal vibrating piece 10, and the support portions 101a and 101b are formed to have the same thickness as the central portion 15 of the crystal vibrating piece 10 in the Y′-axis direction. ing. The support portions 101 a and 101 b are formed for fixing and electrically connecting the crystal vibrating piece 10. The support portion 101a on the upper surface and the central portion 15 of the quartz crystal vibrating piece 10 are formed flat without a step through the connection portion 106a. That is, on the upper surface, the support portion 101a, the central portion 15, and the connection portion 106a are formed at the same height. Similarly, the support portion 101b on the lower surface and the central portion 15 of the quartz crystal vibrating piece 10 are formed flat via a connection portion 106b (see FIG. 2B). That is, on the lower surface, the support portion 101b, the central portion 15, and the connection portion 106b are formed at the same height. The center portion 15, the support portions 101a and 101b, and the connection portions 106a and 106b of the quartz crystal vibrating piece 10 shown above are formed by wet etching. Further, the connecting portions 106a and 106b are ion doping regions 141 doped with metal ions.

  In the crystal vibrating piece 10, a pair of excitation electrodes 102 a and 102 b are arranged to face both thick main surfaces of the central portion 15. Further, the excitation electrode 102a is drawn out by the extraction electrode 103a to the end of the quartz vibrating piece 10 on the −Z axis side on the −X axis side, and the lower surface side (−Y ′ axis side) of the quartz vibrating piece 10 by the side electrode 104a. The electrode pad 105a is formed. The excitation electrode 102b is extracted by the extraction electrode 103b to the end of the quartz vibrating piece 10 on the −Z ′ axis side on the −X axis side to form an electrode pad 105b. The excitation electrode 102a is formed at the central portion 15 on the upper surface of the quartz crystal vibrating piece 10 formed thick, the extraction electrode 103a is formed at the connection portion 106a, and the side electrode 104a and the electrode pad 105a are formed at the support portion 101a. In addition, the excitation electrode 102b is formed in the central portion 15 on the lower surface of the quartz crystal vibrating piece 10 formed thick, the extraction electrode 103b is formed in the connection portion 106b, and the electrode pad 105b is formed in the support portion 101b.

  The excitation electrode 102a and the extraction electrode 103a on the upper surface side are integrally formed and have a seamless structure, that is, a structure having no discontinuous surface. Further, the excitation electrode 102b, the extraction electrode 103b, and the electrode pad 105b on the lower surface side are integrally formed to have a seamless structure. Further, when forming the electrode on the lower surface side, the electrode pad 105a and the side electrode 104 on the side surface on the X-axis side and the Z′-axis side are also formed at the same time, so that the electrode pad 105a to the excitation electrode 102a are electrically connected. The

  The base plate 12 is made of glass or a piezoelectric material, and a base recess 121 that is recessed toward the −Y ′ axis is formed in the central region of the upper surface (the surface on the + Y ′ axis). Has a first end face 126a. Further, the base plate 12 is formed with four base castellations 122a to 122d extending in the Y′-axis direction. Here, the base castellations 122a and 122b are formed on the −X axis side, and the base castellations 122c and 122d are formed on the + X axis side. In addition, base side electrodes 123a to 123d are formed on the base castellations 122a to 122d, respectively. A pair of connection electrodes 124 a and 124 b are formed on the first end surface 126 a of the base plate 12. Here, the connection electrode 124a is electrically connected to the base side surface electrode 123a, and the connection electrode 124b is electrically connected to the base side surface electrode 123c. Further, the base plate 12 has external electrodes 125a to 125d electrically connected to the base side electrodes 123a to 123d on the mounting surface 126b, respectively.

  In the quartz crystal device 100, the electrode pad 105a and the electrode pad 105b of the quartz crystal vibrating piece 10 are respectively placed on the connection electrode 124a and the connection electrode 124b of the base plate 12 via a conductive adhesive (not shown). Thereby, the electrode pad 105a is electrically connected to the connection electrode 124a, and the electrode pad 105b is electrically connected to the connection electrode 124b. In the quartz crystal device 100, the length of the quartz crystal vibrating piece 10 in the X-axis direction is smaller than the length of the base recess 121 in the X-axis direction, so that when the quartz crystal vibrating piece 10 is placed on the base plate 12, the quartz crystal The tip of the vibrating piece 10 on the + X axis side does not contact the base plate 12. When an alternating voltage (a potential alternating between positive and negative) is applied to the external electrodes 125a and 125c, the quartz crystal vibrating piece 10 vibrates in a thickness-shear manner.

  The lid plate 11 includes a lid recess 111 that is recessed toward the + Y ′ axis in the central region of the surface on the −Y ′ axis, and a second end surface 116 that is formed around the lid recess 111. By joining the second end surface 116 of the lid plate 11 and the first end surface 126 of the base plate 12 via the low melting point glass 140, the lid concave portion 111 and the base concave portion 121 are cavities (non-containers) for housing the crystal vibrating piece 10. Formed). In addition, the cavity is filled with an inert gas or hermetically sealed in a vacuum state.

  In the lid plate 11, the length of the lid recess 111 in the X-axis direction is larger than the length of the crystal vibrating piece 10 in the X-axis direction and the length of the base recess 121 in the X-axis direction. Further, the low melting point glass 140 joins the lid plate 11 and the base plate 12 outside the first end face 126a of the base plate 12 (the width is about 300 μm).

  The low melting point glass 140 may be a lead-free vanadium-based glass that melts at 350 ° C. to 410 ° C. Vanadium-based glass is in the form of a paste with a binder and a solvent added, and is melted and then solidified to adhere to other members. Vanadium-based glass can also control the thermal expansion coefficient flexibly by controlling the glass structure. In FIG. 1, the low-melting-point glass 140 as a sealing material is drawn transparent so that the entire connection electrodes 124 a and 124 b can be seen.

  In the first embodiment, the quartz crystal vibrating piece 10 is placed on the first end face 126 a of the base plate 12, but may be housed inside the base recess 121. At this time, the connection electrode is formed to extend from the base castellations 122 a and 122 c to the bottom surface of the base recess 121 via the second end surface 116. In this case, the lid plate may have a flat plate shape in which no lid recess is formed.

  FIG. 2A is a cross-sectional view taken along the line AA in FIG. When the thickness of the region where the peripheral portion 16 is formed is the thickness TA and the thickness of the region where the central portion 15 is formed is the thickness TB, the thickness TB is thicker than the thickness TA. In the quartz crystal vibrating piece 10, the central portion 15 is formed thick in this manner, so that energy due to vibration generated in the central portion 15 is confined in the central portion 15.

  FIG. 2B is a cross-sectional view taken along the line BB in FIG. In the quartz crystal resonator element 10, the total thickness of the connection portion 106 a and the connection portion 106 b is also formed to the same thickness TB as the thickness of the central portion 15. In addition, in the quartz crystal resonator element 10, ions are implanted into the connection portions 106 a and 106 b with a metal material, and the connection portions 106 a and 106 b are ion doping regions 141 doped with metal ions. Examples of metal materials used for ion implantation include Ag, Au, Cu, Al, Li, Mg, Ti, Cr, Fe, Ni, Zn, Ge, Mo, Sn, W, Pt, and Pb. In such an ion doping region 141, the crystal structure is disordered. Since the central portion 15 and the connecting portions 106a and 106b have the same height, energy caused by vibration generated in the central portion 15 easily leaks from the connecting portions 106a and 106b. However, the connecting portions 106a and 106b have an ion doping region 141. Since the formed crystals of the connecting portions 106a and 106b are broken, the vibration energy of the central portion 15 can be confined.

  In the crystal vibrating piece 10, the central portion 15, the connecting portions 106 a and 106 b, and the support portions 101 a and 101 b are formed at the same height, so that the excitation electrode and the extraction electrode are formed on a notch or a groove. This prevents the lead electrode from being disconnected. Further, by forming the peripheral portion 16 around the central portion 15 and forming the ion doping region 141 in the connecting portions 106a and 106b, vibration energy can be confined in the central portion 15. Therefore, it is possible to maintain an excellent state without deteriorating the vibration characteristics of the quartz crystal vibrating piece 10. That is, the quartz crystal vibrating piece 10 can have excellent vibration characteristics.

  In the crystal vibrating piece 10, the metal material is injected into the connection portions 106a and 106b by ion implantation. However, the vibration energy may be prevented from flowing out from the connection portions 106a and 106b by other methods. For example, the connection portions 106a and 106b may be made amorphous by irradiation with a laser beam, and amorphous regions may be formed in the connection portions 106a and 106b. The connection portions 106a and 106b are made amorphous by, for example, irradiating the connection portions 106a and 106b with an excimer laser. In the amorphous region, the single crystal state is broken, so that vibration energy can be prevented from leaking from the central portion 15. Alternatively, the connection portions 106a and 106b may be heated to a temperature equal to or higher than the α-β transition point by laser irradiation to invert the electric axis of the crystal and to form twins. It is also possible to prevent vibration energy from leaking out from the central portion 15 by forming twinned twin regions in the connecting portions 106a and 106b.

  Further, in the quartz crystal resonator element 10, ions are implanted only in the connection portions 106 a and 106 b to form the ion doping region 141, but not only the connection portions 106 a and 106 b but also the peripheral portion 16 surrounding the central portion 15 and the support portion 101 a, An ion doping region 141 may also be formed in 101b.

(Second Embodiment)
The quartz crystal resonator element may be formed so that the central portion and the periphery thereof are line-symmetric with respect to a straight line that passes through the center of the central portion and extends in the Z′-axis direction. Hereinafter, the crystal vibrating piece 20 in which the central portion and the periphery thereof are formed in line symmetry will be described. In the following examples, the same parts as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description thereof is omitted.

<Configuration of Crystal Vibrating Piece 20>
FIG. 3A is a plan view of the crystal vibrating piece 20. In the crystal vibrating piece 10, the connection portions 106 a and 106 b and the support portions 101 a and 101 b are formed as regions having the same height as the central portion 15, but in the crystal vibrating piece 20, three pieces having the same height as the central portion 15 are further formed. Third regions 206a and 206b are formed as eye regions. The third region 206a is formed on the upper surface, and the third region 206b is formed on the lower surface. The third region 206a is connected to the central portion 15 and formed so that the widths in the X-axis direction and the Z′-axis direction are equal to the connection portion 106a. The third region 206a is formed at a position where the connecting portion 106a is mirror-symmetrical with the central portion 15 in between. The quartz crystal vibrating piece 20 is formed so as to be rotationally symmetric with respect to a straight line that passes through the center of the central portion 15 and extends in the X-axis direction. That is, the upper surface and the lower surface of the quartz crystal vibrating piece 20 are formed in the same shape, and the widths in the X-axis direction and the Z′-axis direction are also equal to the connecting portion 106 b on the lower surface and extend in the Z′-axis direction through the center of the central portion 15. The third region 206b is formed at a position that is line symmetric with respect to the straight line.

  FIG.3 (b) is CC sectional drawing of Fig.3 (a). In the quartz crystal resonator element 20, as shown in FIG. 3B, the heights of the connection portion 106a, the central portion 15, the third region 206a, and the support portion 101a are formed to be equal. For this reason, the extraction electrode 105a is not formed on a cutout, a groove, or the like as in the case of the quartz crystal vibrating piece 10, and the extraction electrode is prevented from being disconnected. In addition, a third region 206a is formed at a position that is symmetrical in the X-axis direction of the connecting portion 106a in the central portion 15. For this reason, in the crystal vibrating piece 20, the symmetry around the central portion 15 is increased.

  In the central portion 15, the shape of the central portion 15 and the shape around the central portion 15 affect the confinement of vibration energy. As shown in FIGS. 3A and 3B, in the crystal vibrating piece 20, the connecting portion 106 a and the third region 206 a are formed at positions that are mirror-symmetric with respect to the central portion 15. Therefore, the symmetry of the central portion 15 increases and the vibration characteristics of the quartz crystal vibrating piece 20 are improved.

(Third embodiment)
A frame may be formed on the crystal vibrating piece. Hereinafter, a quartz crystal device using a quartz crystal vibrating piece having a frame will be described. Moreover, about the same part as 1st Embodiment and 2nd Embodiment, the same code | symbol as 1st Embodiment and 2nd Embodiment is attached | subjected and the description is abbreviate | omitted.

<Configuration of Crystal Device 300>
FIG. 4 is an exploded perspective view of the quartz crystal device 300. The crystal device 300 is formed by the crystal vibrating piece 30, the lid plate 31, and the base plate 32. The lid plate 31 has a recess 311 that is recessed toward the + Y′-axis side in the central region of the surface at the −Y′-axis side. A bonding surface 312 is formed around the recess 311.

  The quartz crystal vibrating piece 30 is formed by a vibrating part 301, a frame 302 that surrounds the vibrating part 301 with a space therebetween, and a connecting part 303 that connects the vibrating part 301 and the frame 302. A space between the vibrating portion 301 and the frame 302 is a through groove 304 that penetrates the crystal vibrating piece 30 in the Y′-axis direction. The connecting portion 303 is connected to the + Z′-axis side of the −X-axis side of the vibrating portion 301 and the −Z′-axis side of the + X-axis side, and is further connected to the frame 302. In the frame 302, frame castellations are formed on the outer side surface of the side on the −X axis side of the frame 302 and the outer side surface of the side on the + X axis side. A frame castellation 302a is formed on the + Z ′ axis side of the frame 302 on the −X axis side, a frame castellation 302b is formed on the −Z ′ axis side of the −X axis side, and a −Z ′ axis on the + X axis side. A frame castellation 302c is formed on the side, and a frame castellation 302d is formed on the + Z′-axis side on the + X-axis side. An excitation electrode 305a is formed on the surface on the + Y′-axis side of the vibration unit 301, and an excitation electrode 305b is formed on the surface on the −Y′-axis side. The excitation electrode 305a is electrically connected to the electrode pad 308a on the −Y′-axis side of the frame 302 via the extraction electrode 306a and the side surface electrode 307a formed on the frame castellation 302a. The excitation electrode 305b is electrically connected to the electrode pad 308b on the −Y′-axis side of the frame 302 via the extraction electrode 306b.

  The base plate 32 is formed with a recess 321 that is recessed toward the −Y ′ axis in the central region of the surface at the + Y ′ axis. Further, a bonding surface 326 is formed so as to surround the recess 321. Base castellations 322 a to 323 d are formed on the side surfaces of the base plate 32 on the + X axis side and the −X axis side so as to be recessed in the center of the base plate 32. A base castellation 322a is formed on the + Z ′ axis side of the base plate 32 on the −X axis side, a base castellation 322b is formed on the −Z ′ axis side of the −X axis side, and −Z ′ on the + X axis side. A base castellation 322c is formed on the axis side, and a base castellation 322d is formed on the + Z ′ axis side on the + X axis side. A connection electrode 324a and a connection electrode 324b are formed around the surface on the + Y′-axis side of the base castellation 322a and the base castellation 322c. The connection electrode 324a and the connection electrode 324b are externally formed on the surface on the −Y′-axis side of the base plate 32 via the side electrode 323a and the side electrode 323c formed on the base castellation 322a and the base castellation 322c. It is electrically connected to the electrode 325a and the external electrode 325c (not shown). Further, the side electrode 323b and the side electrode 323d formed on the base castellation 322b and the base castellation 322d are electrically connected to the external electrode 325b and the external electrode 325d, respectively.

  In the quartz crystal device 300, the bonding surface 312 of the lid plate 31 and the surface on the + Y′-axis side of the frame 302 are bonded with a sealing material (not shown), and the bonding surface 326 of the base plate 32 and the −Y′-axis side of the frame 302. These surfaces are joined by a sealing material. When the joint surface 326 of the base plate 32 and the surface on the −Y′-axis side of the frame 302 are joined, the electrode pad 308a and the connection electrode 324a are electrically joined, and the electrode pad 308b and the connection electrode 324b are electrically joined. Are electrically joined.

  FIG. 5A is a plan view of the quartz crystal vibrating piece 30. The vibration part 301 of the quartz crystal vibrating piece 30 is formed by a central part 301a where the excitation electrode 305a and the excitation electrode 305b are formed, and a peripheral part 301b formed around the central part 301a. An excitation electrode 305 a is formed on the surface of the central portion 301 a on the + Y′-axis side, and the excitation electrode 305 is extracted to the frame 302 via an extraction electrode 306 a formed on the coupling portion 303.

  FIG.5 (b) is DD sectional drawing of Fig.5 (a). In the crystal vibrating piece 30, the central portion 301 a and the frame 302 are formed to have the same thickness in the Y′-axis direction, and the peripheral portion 301 b is formed to be thinner in the Y′-axis direction than the central portion 301 a and the frame 302. Has been. The excitation electrode 305a and the excitation electrode 305b are formed in the central portion 301a.

  FIG.5 (c) is EE sectional drawing of Fig.5 (a). In the crystal vibrating piece 30, the connecting portion 303 is formed to have the same thickness as the central portion 301 and the frame 302. Therefore, each excitation electrode, extraction electrode, and electrode pad formed on the upper surface or the lower surface of the crystal vibrating piece 30 are connected to each other on a flat surface. Thereby, a level | step difference does not arise in the area | region in which an extraction electrode is formed, but it is prevented that the extraction electrode disconnects. Further, in the crystal vibrating piece 30, ion doping regions 141 are formed on the upper surface and the lower surface of the connecting portion 303.

  In the crystal vibrating piece 30, the central portion 301a where the excitation electrodes 305a and 305b are formed is formed thicker than the peripheral portion 301b, and is connected to the central portion 301a and formed at the same height as the central portion 301a. Since the coupling portion 303 is an ion doping region 141 in which metal ions are doped, energy due to vibration generated in the center portion 301a is prevented from leaking from the center portion 301a. Therefore, energy by vibration can be confined in the entire central portion 301a, and the vibration characteristics of the quartz crystal vibrating piece 30 can be maintained in an excellent state.

  As described above, the optimal embodiment of the present invention has been described in detail. However, as will be apparent to those skilled in the art, the present invention can be implemented with various modifications and variations within the technical scope thereof.

  For example, in the above-described embodiment, the case where the piezoelectric vibrating piece is an AT-cut crystal vibrating piece has been described. However, the present invention can be similarly applied to a BT-cut quartz vibrating piece that vibrates in the thickness-slip mode. Further, the piezoelectric vibrating piece can be basically applied not only to a crystal material but also to a piezoelectric material including lithium tantalate, lithium niobate, or piezoelectric ceramic.

10, 20, 30... Crystal resonator element 11, 31... Lid plate 12, 32... Base plate 15 .. center part 16 .. peripheral part 100, 300 .. crystal device 101 a, 101 b ... support part 102 a, 102 b. ... Extraction electrodes 104a and 104b ... Side electrodes 105a and 105b ... Electrode pads 106a and 106b ... Connection part 111 ... Lid recess 116 ... Second end face 121 ... Base recesses 122a to 122d, 322a to 323d ... Base castellations 123a to 123d ... Base Side electrodes 124a, 124b ... connection electrodes 125a-125d ... external electrodes 126a ... first end face 126b ... mounting surface 140 ... low melting point glass 141 ... ion doping regions 206a, 206b ... third region 301 ... vibration part 302 ... frame 302a to 302b ... Frame castellation 303 ... Connection part 304 ... Through grooves 312, 326 ... Bonding surface

Claims (7)

A mesa-type quartz crystal vibrating piece having a central portion of a first thickness between both main surfaces and a peripheral portion of a second thickness that is formed to surround the central portion and is thinner than the first thickness,
Excitation electrodes respectively formed in the central portions of the two main surfaces;
A pair of extraction electrodes respectively drawn from the excitation electrode to the peripheral part on both the main surfaces;
A pair of electrode pads connected to the extraction electrode,
The first region where the extraction electrode is formed and the second region where the electrode pad is formed are formed at the same height as the central portion,
The mesa-type quartz crystal vibrating piece, wherein the first region is an ion-doped region doped with metal ions, a twin region where the crystal axis of the crystal is inverted, or an amorphous region where the single crystal state of the crystal is broken.   2. The mesa crystal resonator element according to claim 1, wherein the second region is the ion doping region, the twin region, or the amorphous region. A third region having the same shape as the first region is formed at a position that is mirror-symmetric with respect to the central portion of the first region with the central portion interposed therebetween,
3. The mesa crystal resonator element according to claim 1, wherein the third region is the ion doping region, the twin region, or the amorphous region. The quartz crystal resonator element includes a vibrating portion formed by the central portion and the peripheral portion, a frame that surrounds the vibrating portion with a space therebetween, and a connecting portion that connects the vibrating portion and the frame. ,
The pair of extraction electrodes are extracted through the connection portion and the frame,
The crystal vibrating piece according to claim 1, wherein the electrode pad is formed on the frame.   The quartz crystal resonator element according to claim 4, wherein a thickness of the frame is the first thickness. The quartz crystal vibrating piece according to any one of claims 1 to 3,
A base plate on which the crystal vibrating piece is placed;
A crystal device comprising: a lid plate joined to the base plate. The quartz crystal resonator element according to claim 4 or 5,
A base plate joined to one main surface of the frame;
And a lid plate bonded to the other main surface of the frame.