JP2015056398A5 - - Google Patents

Description

(3) beginners, also aware of a problem because there do not know the solution, and as it is acquired.

In this embodiment, instead of setting the parameters of the user viewing conditions, the optimum parameter settings in accordance with an observation purpose selected by the user is to be set automatically. The choices for the purpose of observation are the observation conditions that the user often uses or wants the user to use, and are the conditions that even a beginner can grasp and select. There are all types of observation purposes: “standard observation”, “observation that emphasizes surface structure”, “observation that emphasizes material distribution”, “observation that emphasizes surface structure and material distribution”, “observation that emphasizes structure” The observation objectives for high vacuum observation are “standard observation”, “observation that emphasizes the surface structure”, “observation that emphasizes the material distribution”, “ There are a maximum of five observations: “observation emphasizing surface structure and material distribution” and “observation analyzing elements”. The observation objectives for low-vacuum observation are "observation that emphasizes material distribution", "observation that emphasizes surface structure and material distribution", "observation that emphasizes structure", "observation that emphasizes surface structure", There are a maximum of five “observations for analyzing elements”.

Claims (21)

A charged particle source that emits a charged particle beam;
A charged particle optical system that irradiates the sample with the charged particle beam; and
A detector for detecting a signal generated from the sample by irradiation of the charged particle beam;
A sample stage for holding the sample and moving the sample;
A sample chamber in which the sample stage is disposed;
A display unit for displaying a sample image formed based on the signal ;
A controller that controls the charged particle source, the charged particle optical system, the detector, the sample stage, the sample chamber, and the display unit ;
With
The controller is
To the sample image, the image is distorted, there is a brightness unevenness, there is no stereoscopic effect, or images is blurred, of the following symptoms, the operator when at least any one is occurring Display the button to be pressed on the display unit,
When the button is pressed, in accordance with the observation conditions, and displays a message that describes the cause on the display unit, the charged particle beam device. The button is
The sample image is blurred on the sample screen and the first button that the operator presses when the image is distorted, uneven in brightness, or has no three-dimensional effect. The charged particle beam device according to claim 1, wherein the charged particle beam device indicates a second button that is pressed by an operator when the phenomenon occurs. The control unit further includes:
A message confirming to the operator whether the sample image should be observed with a different image quality;
A third button that the operator presses when observing the sample image with a different image quality;
The charged particle according to claim 2, wherein a message indicating a solution is displayed on the display unit when any one of the first to third buttons is pressed together with the sample image. Wire device. The charged particle beam apparatus according to claim 1, wherein the observation conditions include an acceleration voltage, a working distance, a condenser lens, an objective movable diaphragm, a detection signal, a degree of vacuum, and an image capturing method. The charged particle beam apparatus according to claim 1 , wherein the observation condition includes an observation purpose. Wherein, when the first button is pressed, in accordance with the degree of vacuum can sample chamber configured charged particle beam device, displays a message that describes the causes and solutions to the display unit, wherein Item 3. A charged particle beam device according to Item 2 . Wherein, when the first button is pressed, depending on the type of detector mounted on the charged particle beam device, displays a message that describes the causes and solutions to the display unit, wherein Item 3. A charged particle beam device according to Item 2 . When the first button is pressed, the control unit writes a charge-up as a cause in a high vacuum observation condition, and displays a message describing the addition of metal coding as a solution on the display unit . The charged particle beam apparatus according to claim 2 . When the first button is pressed, the control unit records charge-up as a cause in a high vacuum observation condition, and changes to a lower acceleration voltage or a switch to a low vacuum mode as a solution. The charged particle beam apparatus of Claim 2 which displays the described message on the said display part. When the first button is pressed, the control unit displays a charge-up message as a cause in a low-vacuum observation condition and a message describing a change to a lower vacuum as a solution on the display unit. The charged particle beam device according to claim 2 . 3. The control unit according to claim 2, wherein, when the first button is pressed, the control unit displays a message indicating that the sample is insufficiently attached as a cause and confirming the fixation of the sample as a solution on the display unit . Charged particle beam device. Wherein, when the second button is pressed, the image adjustment noted insufficient cause, displays a message describing the manual focus adjustment on the display unit, a charged particle beam apparatus according to claim 2, wherein . Wherein, when the second button is pressed, it shows information about the sample mounting insufficient cause, a message with a verification of the sample fixing as a solution for displaying on the display unit, according to claim 2, wherein Charged particle beam device. Wherein, when the second button is pressed, describing the deviation of the calibration as the cause, the solution displays a message describing the resetting of the calibration on the display unit as, according to claim 2, wherein Charged particle beam device. When the second button is pressed, the control unit indicates that the resolution is insufficient as a cause in the observation condition at a low acceleration voltage, and a message indicating a change to a higher acceleration voltage as a solution. The charged particle beam apparatus according to claim 2, wherein the charged particle beam apparatus is displayed on a display unit. Detect the signal generated from the sample by the irradiation of the charged particle beam,
A sample image is formed based on the detected signal and displayed on the display unit,
It said sample images, the image is distorted, there is a brightness unevenness, there is no stereoscopic effect, or images is blurred, of the following symptoms, the operator when at least any one is occurring Display the button to be pressed on the display unit,
A method for observing a sample of a charged particle beam apparatus, wherein when the button is pressed, a message describing the cause is displayed on the display unit according to an observation condition. The button is
The sample image is blurred on the sample screen and the first button that the operator presses when the image is distorted, uneven in brightness, or has no three-dimensional effect. The sample observation method of the charged particle beam apparatus according to claim 16, wherein a second button pressed by an operator when a phenomenon occurs is indicated. A message confirming of whether the operator wishes to observe the specimen image in another image quality, the display unit and a third button which the operator presses when observing the specimen image in another image quality together with the sample images The charged particle beam apparatus sample observation method according to claim 17, wherein a message describing a solution is displayed on the display unit when any one of the first to third buttons is pressed. 18. When the first button is pressed, in a high vacuum observation condition, a message indicating charge up as a cause and a message indicating addition of metal coding as a solution is displayed on the display unit . Sample observation method for charged particle beam apparatus. 18. The sample observation method for a charged particle beam apparatus according to claim 17, wherein when the second button is pressed, a message indicating that image adjustment is insufficient as a cause and a message indicating manual focus adjustment is displayed on the display unit. Irradiating a sample with a charged particle beam generated from a charged particle beam source of a charged particle beam device, forming a sample image based on a signal generated from the sample, and displaying it on a display unit;
To the sample image, the image is distorted, there is a brightness unevenness, there is no stereoscopic effect, or images is blurred, of the following symptoms, depression operator when at least any one is occurring Button to display on the display section,
A display control program for a computer for controlling the display unit , which displays a message describing the cause on the display unit according to an observation condition when the button is pressed.