JP2004014229A - Charged particle beam device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of easy automatic setting of observation conditions suitable for obtaining an observation image having a required image quality. <P>SOLUTION: A plurality of observation images each corresponding to a predetermined observation condition one by one are displayed in display areas 202-205. When an image which represents a image quality required by the operator is selected, the selected image is displayed in a display area 201, and the observation condition with which the selected image is observed is automatically set in the charged particle beam device. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a charged particle beam apparatus for observing a sample image, and more particularly to a charged particle beam apparatus suitable for observing a sample by setting various observation conditions.
[0002]
[Prior art]
In a charged particle beam device represented by a scanning electron microscope, various observation conditions (also referred to as control conditions) such as an acceleration voltage, an emission current of an electron gun, a converging lens condition, a WD, and a condition of a signal detection system of a sample observation image are used. ) Is used as a control parameter, and the sample can be observed with various changes.
[0003]
Note that WD is a distance (Working Distance) between the objective lens and the sample, and is also called a working distance.
[0004]
Here, when observing an arbitrary sample, in order to obtain an observation image in which the necessary information such as the fine morphology and composition of the required sample is maximized, the above-described observation conditions for each sample are set to conditions suitable for each. Must be set to
[0005]
For example, an observation image of a sample that was only seen unclearly at a certain acceleration voltage may be clearly observed at another acceleration voltage. In this case, it is necessary to set the latter acceleration voltage.
[0006]
Therefore, when an operator observes a sample, it is customary to first determine the optimal observation conditions for the sample, set control parameters corresponding to the observation conditions in the charged particle beam apparatus, and then start observation. However, the determination of the observation conditions corresponding to this sample has been conventionally performed based on the experience of the operator, and therefore, the operator requires a high level of skill.
[0007]
Therefore, in the case of an operator or a beginner who does not usually operate the apparatus much, as shown in FIG. 2, when observing the sample, the observation conditions are changed variously for the sample, and the image observation is performed each time. It was necessary to determine appropriate observation conditions by a trial and error method. Here, FIG. 2 shows a general procedure until a beginner determines an observation condition.
[0008]
Even for a skilled operator, it is necessary to set and confirm the observation conditions one by one for various samples every time, so that the operation becomes complicated in such a case.
[0009]
Therefore, even in such a case, several conventional techniques are known as techniques for promptly and easily setting appropriate sample observation conditions. One example of such techniques is an operator's observation. There is a technique in which each of the various setting condition parameters is given a name and stored, and read out from the name when necessary again to automatically set the parameters in the apparatus.
[0010]
Further, as another example, in the case of an apparatus having a function of filling an image, there is a technique in which observation conditions are also added to the image at the same time, and the information is displayed on the filling screen as image information.
[0011]
Further, for a sample observed in the past by an apparatus manufacturer or an operator, the sample name, the observation image, and the observation conditions are stored in a library as a set, and the sample name is called, so that the observation condition is obtained together with the observation image. Are displayed on a screen or the observation conditions are automatically set.
[0012]
[Problems to be solved by the invention]
An important requirement for a charged particle beam system to enable appropriate and quick sample observation is that the information required by the operator, such as the fine morphology and composition of the sample, can be obtained from the image of the sample being observed. Is to select an observation condition so as to be surely obtained.
[0013]
Whether or not the selection of the appropriate observation condition has been correctly performed must be confirmed by setting the selected observation condition in the apparatus and visually confirming an actually obtained observation image. That is, what kind of image quality (image quality) can be obtained for a certain observation condition is very important information for the operator.
[0014]
Furthermore, when observing various specimens or when changing one of a plurality of observation condition parameters, understand how the image quality of the observed image will change without observing the image. Is a difficult task not only for beginners but also for skilled operators.
[0015]
Here, in the above-described automatic setting function of the observation condition according to the related art, there are a case where an observation image is not added and a case where one sample image obtained by observation under one observation condition is added.
[0016]
If no image is added, there is only information on the numerical values and status of the various condition parameters that have been saved, so when the observation conditions are automatically set to the read observation conditions, the operator can actually obtain an observation image of what image quality. There is a problem that it is difficult to select appropriate observation conditions because it is difficult to determine whether or not the observation can be obtained.
[0017]
Further, even when one observation image corresponding to one observation condition is added, only the observation image of the condition to be read out is displayed on the display device. There has been a problem that the operator cannot accurately grasp the change in image quality.
[0018]
On the other hand, in the conventional technology having an image filling function for storing a plurality of observation images, since there is no function for automatically setting observation conditions, an operator is required to add the observation conditions to the observation image having the desired image quality. There was a problem that the conditions had to be set one by one.
[0019]
The present invention has been made in view of such problems of the related art, and an object of the present invention is to easily obtain automatic setting of appropriate observation conditions for obtaining an observation image having a required image quality. It is an object of the present invention to provide a charged particle beam device.
[0020]
[Means for Solving the Problems]
The object is to provide a charged particle source, a converging lens for converging a primary charged particle beam emitted from the charged particle source on a sample, a deflector for scanning the primary charged particle beam on the sample, and a primary deflector. A charged particle beam device, comprising: a detection hand beat for detecting a secondary signal generated from a sample by irradiation of a charged particle beam; and image display means for displaying a signal of the secondary signal detection means as an enlarged image of the sample. A storage means for storing a plurality of images obtained by acquiring images for each observation condition in advance together with each observation condition, as a combination of observation conditions each having a different control parameter condition affecting the next signal; and This is achieved by providing a display means for displaying a plurality of images stored in the storage means.
[0021]
Similarly, the object is to provide a charged particle source, a converging lens for converging a primary charged particle beam emitted from the charged particle source on a sample, a deflector for scanning the primary charged particle beam on the sample, and In a charged particle beam device having a detection hand beat detecting a secondary signal generated from a sample by irradiation of a primary charged particle beam and an image display unit displaying a signal of the secondary signal detection unit as an enlarged image of the sample, A storage unit that stores a plurality of images obtained by acquiring images for each observation condition in advance together with each observation condition, with each combination having a different control parameter condition affecting the secondary signal as an observation condition, Display means for displaying a plurality of images stored in the storage means together with the observation conditions, and selecting one of the images displayed on the display screen of the display means on the screen to display the image View of Conditions are achieved also be set to automatically device.
[0022]
According to the present invention, a plurality of observation images corresponding one-to-one to arbitrary observation conditions are displayed on the screen, and one image representing the image quality required by the operator is selected from the images. Thus, the conditions under which the selected image is observed can be automatically set in the apparatus.
[0023]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a charged particle beam device according to the present invention will be described in detail with reference to the illustrated embodiments.
[0024]
First, FIG. 1 shows an embodiment of the present invention when the present invention is applied to a scanning electron microscope equipped with a field emission electron gun. However, the effects of the present invention are not limited by the mounted electron gun.
[0025]
In FIG. 1, a voltage Vl is applied to a cathode 1 and a first anode 2, whereby a primary electron beam 3 is emitted from the cathode 1. Then, the primary electron beam 3 is accelerated by the voltage Vacc applied to the second cathode 4, and enters the subsequent electromagnetic lens system. The voltage V1 and the acceleration voltage Vacc at this time are supplied from the high voltage control circuit 21.
[0026]
The primary electron beam 3 that has entered the subsequent electromagnetic lens system is first converged by the first converging lens 5, the irradiation angle of the beam is limited by the objective lens aperture 6, converged again by the second converging lens 7, The sample 11 is narrowed down by the lens 10 and is irradiated on the sample 11 mounted on the sample fine movement device 12.
[0027]
At this time, the first convergent lens 5 is connected to the first convergent lens control circuit 22, and the second convergent lens 7 is connected to the second convergent lens control circuit 23. An objective lens control circuit 25 is connected to the objective lens 10, and the sample fine movement device 12 is connected to a sample fine movement control circuit 27.
[0028]
When the primary electron beam 3 irradiates the sample 11, it is deflected by the two-stage deflection coils 8 and 9, whereby the sample 11 is scanned two-dimensionally. Then, reflected electrons 13 and secondary electrons 14 are generated from points irradiated with the primary electron beam 3 on the surface of the sample 11. At this time, a magnification control circuit 24 is connected to the two-stage deflection coils 8 and 9.
[0029]
Here, the backscattered electrons 13 have high energy and are emitted from the surface of the sample 11 at a relatively shallow angle. Therefore, the backscattered electrons 13 are directly incident on the detector 16 and detected as a backscattered electron signal (a signal based on backscattered electrons) 13S. Is amplified.
[0030]
On the other hand, since the secondary electrons 14 have low energy, they are wound up by the magnetic field of the objective lens 10, and thereafter, are shifted to the primary electron beam 3 by the orthogonal electromagnetic field (EXB) device 15 disposed above the objective lens 10. Is incident on the detector 18 without the occurrence of the secondary electron signal, is detected as a secondary electron signal (signal by secondary electron) 14S, and is amplified by the amplifier 19.
[0031]
A signal control circuit 26 is connected to the amplifiers 17 and 19, and various control circuits 21 to 27 including the signal control circuit 26 are controlled by a computer 28 which controls the entire apparatus.
[0032]
Then, the reflected electron signal 13S and the secondary electron signal 14S output from the amplifiers 17 and 19 are taken into the computer 28 via the signal control circuit 26 and displayed on the screen of the display device 29 as an enlarged image of the sample.
[0033]
At this time, the signal control circuit 26 can combine the information based on the reflected electron signal 13S and the information based on the secondary electron signal 14S, thereby forming a composite image of the secondary electron information and the reflected electron information, and By changing the combination ratio of the two pieces of information, various observation images can be obtained from an image having a large amount of secondary electronic information to an image having a large amount of reflected electronic information.
[0034]
The computer 28 includes, in addition to the display device 29, an image selection unit 30 for selecting one image from a plurality of images displayed on the screen of the display device 29, and an observation condition and an observation image. A storage unit 31 for storing the set as a set, an internal memory 33 for storing the stored observation conditions and observation images, and an external storage device 32 for long-term storage are also connected.
[0035]
Next, automatic setting of observation conditions according to this embodiment will be described. Here, automatic setting of observation conditions can be obtained by selecting one image from a plurality of images. Image selection from a plurality of images required at this time is performed by, for example, a display device. A GUI (Graphical User Interface) window shown in FIG. FIG. 3 shows a window for setting the acceleration voltage (Vacc) and the WD, which are one of the observation conditions.
[0036]
The GUI window shown in FIG. 3 includes an area 201 for displaying the current observation image, an area 210 for displaying the acceleration voltage and WD when observing the observation image displayed in this area 201, and is registered in advance. Sample selection area 211 for selecting one of the representative samples, areas 202 to 205 for displaying images when the sample selected in sample selection area 211 is observed in advance, It is composed of areas 206 to 209 indicating observation conditions when observing images in the areas 202 to 205, and a button 212 for closing this GUI window.
[0037]
The arrow cursor 213 on the window can be moved by, for example, the image selection hand 30 such as a mouse, and can be selected on the GUI window.
[0038]
In the area 201 for displaying the current observation image, an enlarged image of the current sample displayed on the display device 29 is reduced and displayed by the computer 28, and the computer 28 performs high-voltage control as the acceleration voltage and WD at that time. A value (data) set in the circuit 21 and the sample fine movement control circuit 27 is displayed in the area 210.
[0039]
In the sample selection area 211, representative samples such as semiconductor samples and biological samples are displayed in a list, and the operator can select one of them. At this time, observation images taken with various accelerating voltages and WDs for the samples listed in the sample selection area 211 are stored in the storage unit 31 together with the observation conditions, and are stored in the internal memory 33 or the external memory. It is stored in the storage device 32.
[0040]
Therefore, for example, if the acceleration voltage can be changed in 10 steps and the WD can be changed in 5 steps, 10 × 5 = 50 images are stored for one sample. Then, the plurality of observation images respectively represent the accelerating voltage and the image quality due to WD at the time of observation.
[0041]
Next, processing by the GUI window shown in FIG. 3 will be described with reference to the flowchart of FIG.
[0042]
First, when the operator selects a sample whose properties are closest to the sample currently being observed from the sample selection area 211 (S1), an image stored in the internal memory 33 or the external storage device 32 is called through the computer 28, and the image is read. It is displayed on the display areas 202 to 205 (S2 to S4).
[0043]
At this time, an image when the WD is the same as or closest to the current value and the acceleration voltage is lower than the present value is called and displayed in the area 202, and the area 203 is displayed when the WD is the same as the current value or the closest. Close and call up and display an image when the acceleration voltage is higher than the current one.
[0044]
Similarly, in the area 204 and the area 205, the images when the acceleration voltage is the same as or closest to the current value and the WD is shorter or longer than the current value are called and displayed. In the areas 206 to 209 indicating the observation conditions, the acceleration voltage and the WD at the time of acquiring the images displayed in the image display areas 202 to 205 are displayed.
[0045]
Therefore, the operator selects, from the images displayed in the image display areas 202 to 205, an image from which information such as the fine form and composition of the sample required by the operator is best obtained (S5).
[0046]
Then, it is assumed that the operator has selected, for example, an image (acceleration voltage “low”) displayed in the image area 202 (S5). Then, the acceleration voltage displayed in the condition display area 206 at this time is instructed by the computer 28 to the high voltage control circuit 21 and automatically set in the apparatus (S6).
[0047]
As a result, in the image area 201, an observation image obtained under the newly set observation conditions is displayed, and in the condition display area 210, the newly set observation conditions are displayed.
[0048]
At this time, an image observed at an acceleration voltage lower than the set acceleration voltage is called from the internal memory 33 or the external storage device 32 and displayed in the image area 202, and the acceleration voltage at that time is displayed in the condition display area 206. Is displayed.
[0049]
Similarly, if the operator now selects, for example, an image displayed in the image area 205 (WD “long”), an objective lens current that is focused on the WD shown in the condition display area 209 is output from the computer 28. Is set in the objective lens control circuit 21.
[0050]
Then, after that, the operator instructs the computer 28 to shift to the original operation of observing the image of the sample 11 by the charged particle beam, and to execute the material analysis of the sample 11 (S7).
[0051]
At this time, when the sample moving device 12 is controlled by the sample fine movement control circuit 27 in the height direction of the sample, the sample fine movement control circuit 27 is instructed so that the WD shown in the condition display area 209 is obtained. Then, the sample perturbation device 12 may be moved.
[0052]
Therefore, according to this embodiment, depending on the current sample, the operator only needs to select the registered sample list or select the image in which the information of the required sample is obtained. And the change in the observed image quality due to the change in the WD can be confirmed at a glance. As a result, the sample image can be easily observed under appropriate conditions without any skill.
[0053]
Next, another embodiment of the present invention will be described with reference to FIG. 5. This is an embodiment in which the present invention is applied to an in-lens type field emission scanning electron microscope. 1 are denoted by the same reference numerals as those in FIG. 1, and detailed description thereof will be omitted.
[0054]
Here, this in-lens type field emission scanning electron microscope uses an objective lens having a ball piece of a predetermined shape so that a sample can be arranged between its magnetic poles. On the other hand, the objective lens 10 of FIG. 1 is called a snorkel lens type.
[0055]
In FIG. 5, the objective lens 10 is an in-lens type, and therefore, the sample penetrating device 12 is disposed therein, and the sample 11 is placed thereon. An electrode 52 is disposed directly above the upper magnetic pole of the objective lens 10, and the voltage applied to the electrode 52 is controlled by the electrode voltage control circuit 57 over both positive and negative poles.
[0056]
The secondary electrons 14 generated from the primary electron beam irradiation point of the sample 11 are wound up by the magnetic field of the objective lens 10 and incident on the secondary electron detector 18, where the secondary electron signal 14S is detected. After being amplified by the amplifier 56, it is controlled by the signal control circuit 26, and is displayed on the screen of the display device 29 as an enlarged image of the sample 11.
[0057]
On the other hand, the reflected electrons 52 similarly emitted at a high angle from the primary electron beam irradiation point of the sample 11 collide with the reflector 50 provided on the electron line, and generate secondary electrons 54 from the collided point. Then, the secondary electrons 54 are incident on the detector 55, detected as the reflected electron signal 54S of the sample 11, amplified by the amplifier 56, controlled by the signal control circuit 26, and displayed on the screen.
[0058]
At this time, the secondary electrons 14 generated from the sample 11 and the backscattered electrons 53 emitted from the sample 11 at a high angle are detected by separate detectors 18 and 55, respectively, and are output as secondary electron information and backscattered electron information. It is supplied to the control circuit 26.
[0059]
Therefore, the signal control circuit 26 can combine the secondary electron information and the reflected electron information, thereby forming a combined image of the secondary electron information SE and the reflected electron information BSE as shown in FIG. By changing the combination ratio of both information, various observation images can be obtained from an image with a large amount of secondary electron information SE to an image with a large amount of reflected electron information BSE as shown in the figure. Will be done.
[0060]
Therefore, in the embodiment of FIG. 5, similarly to the embodiment of FIG. 1 described with reference to FIG. 3, processing can be performed using the GUI window illustrated in FIG. 3 and similarly as described with reference to FIG.
[0061]
Thus, in the embodiment of FIG. 5 as well, the operator can simply select from the registered sample list or select an image in which the information of the required sample is obtained, according to the current sample. Thus, the change in the observed image quality due to the change in the acceleration voltage and the WD can be confirmed at a glance, and as a result, the sample image can be easily observed under appropriate conditions without any skill.
[0062]
In the embodiment of FIG. 5, as described above, the electrode 52 is disposed immediately above the upper magnetic pole of the objective lens 10, and the voltage applied thereto is controlled by the electrode voltage control circuit 57 over both the positive and negative poles. It has become.
[0063]
By controlling the voltage of the electrode 52, the detector 18 detects not only the secondary electrons 14 generated in the sample 11 but also the reflected electrons 58 emitted at a relatively shallow angle as shown in FIG. become able to.
[0064]
At this time, the detection ratio and the signal amount of the secondary electrons 14 and the reflected electrons 58 change according to the magnitude and polarity of the voltage applied to the electrode 52, and as shown in FIG. From the reflected electron information BSE.
[0065]
In this case, if the voltage applied to the electrode 52 is made positive, more secondary electron information SE of the sample 11 is detected, and if the voltage is made negative, more reflected electron information BSE is detected. By changing the voltage of the electrode 52, various observation images can be obtained.
[0066]
Here, in order to obtain necessary information from the secondary electrons 13 and the reflected electrons 58, it is necessary to set observation conditions so that appropriate control of the electrode voltage control circuit 57 and the signal control circuit 26 can be obtained. In this embodiment, the observation conditions at this time can be automatically set.
[0067]
In the embodiment of FIG. 5, the automatic setting of the observation condition is also obtained by selecting an image from a plurality of images. Therefore, for example, the GUI window shown in FIG. In the GUI window.
[0068]
Here, the example shown in FIG. 8 is used for setting the combination ratio of the signals obtained from the two detectors which are one of the observation conditions, that is, the detector 18 and the detector 55, and the voltage of the electrode 52. Windows, areas 801 to 805 for displaying images obtained by changing the electrode voltage, areas 806 to 810 for displaying images obtained by changing the combination ratio, and current viewing conditions, as shown in the figure. An automatic start button 811 for obtaining a plurality of images by changing the combination ratio of the detector and the electrode voltage is provided below, and a button 812 for closing the GUI window.
[0069]
The arrow cursor 813 on this window can be moved by the image selecting means 30 such as a mouse, for example, and can be selected on the GUI.
[0070]
Next, the processing by the GUI window will be described. When this GUI window is opened, the operator first presses a button 811 on this GUI window. Then, the computer 28 controls the electrodes 52 so that the voltages of the electrodes 52 are sequentially set to, for example, +200 V, +100, 0 V, -100 V, and -200 V in five predetermined voltage values. An instruction is given to the voltage control circuit 57.
[0071]
Then, each time the voltage of the electrode 52 is set in each of the five stages, an observation image with each voltage is captured, and these voltages are stored together in the storage means 31 as the observation conditions and stored in the internal memory 33. Then, a total of five observation images obtained at this time are sequentially displayed in the image areas 801 to 805.
[0072]
On the other hand, the composition ratio of the detector 18 and the detector 55 is also set so that the signal amount obtained by the detector 18 changes to five values of 100%, 75%, 50%, 25%, and 0%. , The computer 28 sets the signal control circuit 26. Then, each time the signal ratio is set in each of the five stages, each observation condition and each observation image are stored in the memory 31 and stored in the internal memory 33.
[0073]
Here, when the voltage of the electrode 52 changes to five projections, the combination ratio of the detectors can be changed in five steps for each, so that the image to be displayed in the image areas 806 to 810 is 5 × 5 = 25 sheets are stored.
[0074]
The images actually displayed in the image areas 806 to 810 are the same as the images when the operator changes the combination ratio of the detector by five steps with respect to the electrode voltage conditions selected from the images in the image areas 801 to 805. Become.
[0075]
Thus, when the ten images obtained by the above processing are displayed in the image areas 801 to 805 and the image areas 806 to 810 on the GUI window, the operator directly looks at these images and compares them. From these, the one from which information such as the required fine morphology and composition of the sample is best obtained is selected.
[0076]
At this time, there are two methods for selecting an image, and there are a method of moving the arrow cursor 813 on the image with a mouse and clicking the image, and a method of double-clicking.
[0077]
When the image is clicked once, a marker M is displayed around the selected image, indicating that the image is a candidate for setting conditions. Then, in a default state before the operator selects an image, a marker M is displayed on the images of the areas 801 and 806, for example.
[0078]
One marker M is displayed for the images in the areas 801 to 805 and only one for the images in the areas 806 to 810. Therefore, in FIG. 8, the image area 801 and the image area 807 are selected. The case is shown.
[0079]
Here, as described above, the image areas 806 to 810 are obtained from the two detectors 18 and 55 corresponding to the image selected (marked with M) from the image areas 801 to 805. Five images are displayed when the synthesis ratio of the combined signals is changed.
[0080]
Therefore, when the operator double-clicks on one of the image areas 801 to 805, the voltage of the electrode 52 when the image is obtained is called from the internal memory 33 by the computer 28 and set in the electrode voltage control circuit 57. Is done.
[0081]
At the same time, of the images in the areas 806 to 810, the synthesis ratio of the signal when the image with the marker M is acquired is called from the internal memory 33 by the computer 28 and set in the signal control circuit 26.
[0082]
Similarly, when the operator double-clicks one of the image areas 806 to 810, the synthesis ratio of the signal when the image is obtained is set in the signal control circuit 26, and at the same time, the image of the areas 801 to 805 is displayed. The electrode voltage when the image with the marker M is acquired is set in the electrode voltage control circuit 57.
[0083]
Therefore, according to this embodiment, the operator can see at a glance what change appears in the image quality when the electrode voltage or the signal ratio changes with respect to the current sample 11. As a result, by selecting an image in which the required secondary electron information and reflected electron information of the sample are best obtained, the sample image can be easily observed under appropriate conditions.
[0084]
【The invention's effect】
According to the present invention, appropriate observation conditions can be automatically set quickly and easily automatically by simply selecting an observation image having a required image quality from a plurality of observation images, regardless of the skill of the operator. Even a beginner can always easily obtain an observation image with excellent image quality.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing an embodiment of a charged particle beam device according to the present invention.
FIG. 2 is a flowchart showing a general procedure until a beginner determines an observation condition in the related art.
FIG. 3 is an explanatory diagram illustrating an example of a display screen according to an embodiment of the present invention.
FIG. 4 is a flowchart illustrating a process according to an embodiment of the present invention.
FIG. 5 is a schematic configuration diagram showing another embodiment of the charged particle beam device according to the present invention.
FIG. 6 is an operation explanatory diagram when a signal ratio is changed in one embodiment of the present invention.
FIG. 7 is an operation explanatory diagram when an electrode voltage is changed in one embodiment of the present invention.
FIG. 8 is an explanatory diagram showing an example of a display screen according to another embodiment of the present invention.
[Explanation of symbols]
1 cathode
2 First anode
3 Primary electron beam
4 Second cathode
5 First convergent lens
6. Objective lens aperture
7 Second convergent lens
8 Deflection coil (top)
9 Deflection coil (top)
10 Objective lens
11 samples
12 Sample fine movement device
13 backscattered electrons
14 Secondary electrons
15 Orthogonal electromagnetic field (EXB) device
16 detector
17 Amplifier
18 Detector
19 Amplifier
21 High voltage control circuit
22 First Convergent Lens Control Circuit
23 Second Convergent Lens Control Circuit
24 Magnification control circuit
25 Objective lens control circuit
26 signal control circuit
27 Sample fine movement control circuit
28 Computer
29 Display device
30 Image selection means
31 storage means
32 External storage device
33 Internal memory
51 Reflector
52 electrodes
53 High-angle emission backscattered electrons
54 Secondary electron
55 detector
56 amplifier
57 Electrode voltage control circuit
58 Low-angle emission backscattered electrons
201 Area for displaying the current image
202-205 Image display area
206-209 Observation condition display area
210 Area for displaying current observation conditions
211 Registered sample selection area
212 Close button
212 arrow cursor
801 to 805 Images obtained by changing the electrode voltage
806 to 810 Images obtained by changing the synthesis ratio of signals
811 Automatic start button
812 Close button

Claims (5)

A charged particle source, a converging lens for converging a primary charged particle beam emitted from the charged particle source on the sample, a deflector for scanning the primary charged particle beam on the sample, and a deflector for the primary charged particle beam. In a charged particle beam device having an image display means for detecting a secondary signal generated from a sample by irradiation and detecting the signal of the secondary signal detection means as an enlarged image of the sample,
A storage unit that stores a plurality of images obtained by acquiring images in advance for each observation condition together with each observation condition, with each combination having a different condition of the control parameter affecting the secondary signal as an observation condition; ,
Display means for displaying a plurality of images stored in the storage means. A charged particle source, a converging lens for converging a primary charged particle beam emitted from the charged particle source on the sample, a deflector for scanning the primary charged particle beam on the sample, and a deflector for the primary charged particle beam. In a charged particle beam device having an image display means for detecting a secondary signal generated from a sample by irradiation and detecting the signal of the secondary signal detection means as an enlarged image of the sample,
A storage unit that stores a plurality of images obtained by acquiring images in advance for each observation condition together with each observation condition, with each combination having a different condition of the control parameter affecting the secondary signal as an observation condition; ,
Display means for displaying a plurality of images stored in the storage means together with the observation conditions,
The apparatus is configured such that by selecting one of the images displayed on the display screen of the display means on the screen, the observation conditions of the image are automatically set in the apparatus. Particle beam device. In the charged particle beam device according to claim 1 or 2,
The charged particle beam apparatus, wherein the control parameter has a function of controlling a characteristic or a combination of signals of one or two or more secondary signal detecting units. In the charged particle beam device according to claim 1 or 2,
The charged particle beam device, wherein the control parameter includes at least one of an acceleration voltage and an emission current of an electron gun, and has a function of controlling characteristics of a primary charged particle beam. In the charged particle beam device according to claim 1 or 2,
The said control parameter is the distance between an objective lens and a sample, The charged particle beam apparatus characterized by the above-mentioned.

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