JP2015050200A

JP2015050200A - Substrate positioning device

Info

Publication number: JP2015050200A
Application number: JP2013178507A
Authority: JP
Inventors: 英雄松林; Hideo Matsubayashi
Original assignee: Hioki EE Corp
Current assignee: Hioki EE Corp
Priority date: 2013-08-29
Filing date: 2013-08-29
Publication date: 2015-03-16
Anticipated expiration: 2033-08-29
Also published as: JP6166131B2

Abstract

PROBLEM TO BE SOLVED: To provide an accurate and inexpensive substrate positioning device capable of performing positioning of a substrate with a simple structure by reducing the number of constituent components in comparison with a conventional one.SOLUTION: A substrate positioning device includes a plurality of spring members 17 which are arranged in an outer periphery of a substrate 100 so as to sandwich the substrate 100 placed on a substrate stage 16 and extended vertically. A substrate carrying member 25 and the spring members 17 are relatively moved so that the substrate 100 on the substrate carrying member 25 moves toward upper free ends of the spring members 17 after the spring members 17 are moved to a closing position, thereby the substrate 100 on the substrate carrying member 25 is correctly moved to a specified position for positioning by elastic force of the spring members 17.

Description

本発明は、一般に、載置台に載置されている回路基板を予め規定された規定位置に位置決めする基板位置決め装置に関するものであり、特には、例えば、基板検査装置においては、基板搬送装置によって搬送された基板を検査部の基板保持台よって保持させる際に基板保持台に対して予め決められた位置関係となるように基板搬送装置に設けられた、基板の位置合わせを行うための位置決め装置に関するものである。更には、本発明は、回路基板の製造ラインにて、製造途中の回路基板の受け渡し時の基板の位置決め装置としても利用し得る。 The present invention generally relates to a substrate positioning device that positions a circuit board mounted on a mounting table at a predetermined position defined in advance. In particular, in a substrate inspection apparatus, for example, the substrate is transferred by a substrate transfer device. The present invention relates to a positioning device for aligning a substrate, which is provided in a substrate transport device so as to have a predetermined positional relationship with respect to the substrate holding table when the substrate is held by the substrate holding table of the inspection unit. Is. Furthermore, the present invention can also be used as a substrate positioning device when a circuit board is being transferred on a circuit board manufacturing line.

従来、図９に示すように、基板検査装置１は、基板搬送装置２及び検査部３を備え、基板１００に対する電気的検査を実行するように構成されている。この時、基板１００は、一例として電子部品が実装されていないベアボードとされ、矩形に形成されると共にその表面に導体パターンが形成されて構成されているものがある。 Conventionally, as shown in FIG. 9, the substrate inspection apparatus 1 includes a substrate transfer device 2 and an inspection unit 3 and is configured to perform an electrical inspection on the substrate 100. At this time, as an example, the substrate 100 is a bare board on which no electronic component is mounted, and is formed in a rectangular shape and has a conductor pattern formed on the surface thereof.

基板搬送装置２は、図示するように、基板位置決め装置１０及び移動機構２００を備え、検査部３における制御部４の制御に従い、検査部３にける基板保持台５の検知位置に基板１００を搬送可能に構成されている。 As shown in the figure, the substrate transport device 2 includes a substrate positioning device 10 and a moving mechanism 200, and transports the substrate 100 to a detection position of the substrate holder 5 in the inspection unit 3 according to the control of the control unit 4 in the inspection unit 3. It is configured to be possible.

移動機構２００は、基板１００が供給される供給位置から基板１００に対する検査が実行される検査位置に基板位置決め装置１０を移動させる。 The moving mechanism 200 moves the substrate positioning apparatus 10 from the supply position to which the substrate 100 is supplied to the inspection position where the inspection of the substrate 100 is performed.

検査部３は、基板搬送装置２によって検査位置に搬送された基板１００に対して検査を実行する。例えば、検査部３は、上記制御部４、基板保持台５の他に、プロービング機構６などを備えて構成されている。 The inspection unit 3 performs inspection on the substrate 100 transported to the inspection position by the substrate transport device 2. For example, the inspection unit 3 includes a probing mechanism 6 in addition to the control unit 4 and the substrate holder 5.

このような構成の回路基板検査装置１では、基板搬送装置２に設置された基板位置決め装置１０にて、載置台に載置されている回路基板１００を予め規定された規定位置に位置決めすることが重要である。 In the circuit board inspection apparatus 1 having such a configuration, the circuit board 100 mounted on the mounting table can be positioned at a predetermined position specified in advance by the board positioning device 10 installed in the board transfer device 2. is important.

特許文献１には、本願添付の図１０に示すように、回路基板１００を予め規定された位置（Ｐｒ）に位置決めする装置を開示している。この位置決め装置１０Ａは、載置台１１０を有し、載置台１１０には、Ｘ方向に沿ってスライド可能なスライダ１２１ａ、１２１ｂと、Ｙ方向に沿ってスライド可能なスライダ１２２と、スライダ１２１ａ、１２１ｂ及びスライダ１２２を連結するリンク部材１２４ａ、１２４ｂと、スライダ１２２をスライドさせる駆動部１２５とを備えて、スライダ１２１ａ、１２１ｂが規定位置Ｐｒを中心として対称にスライドする第１位置決め機構１１２ａを有している。また、Ｙ方向に沿ってスライド可能なスライダ１３１ａ、１３１ｂと、Ｘ方向に沿ってスライド可能なスライダ１３２と、スライダ１３１ａ、１３１ｂ及びスライダ１３２を連結するリンク部材１３４ａ、１３４ｂと、スライダ１３２をスライドさせる駆動部１３５とを備えて、スライダ１３１ａ、１３１ｂが規定位置Ｐｒを中心として対称にスライドする第２位置決め機構１１２ｂを有している。 Patent Document 1 discloses an apparatus for positioning a circuit board 100 at a predetermined position (Pr) as shown in FIG. 10 attached to the present application. The positioning device 10A includes a mounting table 110. The mounting table 110 includes sliders 121a and 121b that are slidable along the X direction, a slider 122 that is slidable along the Y direction, and sliders 121a and 121b. Link members 124a and 124b that couple the slider 122 and a drive unit 125 that slides the slider 122 are provided, and the sliders 121a and 121b have a first positioning mechanism 112a that slides symmetrically around the specified position Pr. . Also, sliders 131a and 131b slidable along the Y direction, slider 132 slidable along the X direction, link members 134a and 134b connecting the sliders 131a and 131b and the slider 132, and the slider 132 are slid. The slider 131a, 131b is provided with the drive part 135, and has the 2nd positioning mechanism 112b which slides symmetrically centering | focusing on the prescription | regulation position Pr.

特開２０１２−２４２１０５号公報JP 2012-242105 A

上述のように、特許文献１に記載する回路基板位置決め装置１０Ａによると、
（１）駆動部、即ち、シリンダ１２５、１３５のロッドが伸びることで基板位置決め用の爪１５１、１５１；１６１、１６１が開く。
（２）載置台１１０の載置領域Ｆに基板１００が置かれる。
（３）シリンダ１２５、１３５のロッドが縮むことで基板位置決め用の爪１５１、１５１；１６１、１６１が閉じる。
（４）両方のシリンダ１２５、１３５を閉じることで基板１００が、載置領域Ｆの規定位置Ｐｒに位置決めされる。
構成とされる。 As described above, according to the circuit board positioning device 10A described in Patent Document 1,
(1) The driving part, that is, the rods of the cylinders 125 and 135 are extended to open the claws 151 and 151; 161 and 161 for positioning the substrate.
(2) The substrate 100 is placed on the placement area F of the placement table 110.
(3) When the rods of the cylinders 125 and 135 are contracted, the claws 151 and 151; 161 and 161 for positioning the substrate are closed.
(4) By closing both cylinders 125 and 135, the substrate 100 is positioned at the specified position Pr of the placement region F.
It is supposed to be configured.

従って、上記位置決め装置１０Ａは、大きさが異なる複数種類の回路基板１００の中心部が予め規定された位置Ｐｒに位置するように位置決めすることができ、また、位置決め機構を平面で構成することができ、装置全体としてより小型化できる、ことが理解される。 Therefore, the positioning device 10A can position the central portions of the plurality of types of circuit boards 100 having different sizes so as to be positioned at the predetermined position Pr, and the positioning mechanism can be configured by a plane. It is understood that the overall device can be made smaller.

しかしながら、上記位置決め装置１０Ａは、シリンダ１２５、１３５の動作のバラツキやリンク機構のガタなどの影響で、基板１００の形状によってはセンターがズレる場合がある。また、リンク部材、ガイド部材などの構成部品が多くなり、製造コストが高くなる。 However, the center of the positioning device 10 </ b> A may be shifted depending on the shape of the substrate 100 due to the variation in the operation of the cylinders 125 and 135, the backlash of the link mechanism, and the like. In addition, the number of components such as link members and guide members increases, and the manufacturing cost increases.

従って、本発明の目的は、従来に比して構成部品の点数を少なくし、且つ簡単な構造で基板の位置決めを行うことができ、精度の良い、且つ、安価な基板の位置決め装置を提供することである。 Accordingly, an object of the present invention is to provide a highly accurate and inexpensive substrate positioning apparatus that can reduce the number of components compared to the prior art and can perform substrate positioning with a simple structure. That is.

上記目的は本発明に係る基板位置決め装置にて達成される。要約すれば、第１の本発明によれば、
基板が載置される基板ステージと、
前記基板ステージの中央部にて前記基板ステージに対し相対的に上下方向に移動自在に嵌合し、前記基板ステージに載置された前記基板を担持するための基板担持部材と、
前記基板ステージに載置された前記基板を挟み込むようにして前記基板の外周囲に配置された複数個の上下方向に延在したバネ部材と、
前記バネ部材の上方自由端が互いの方へと接近した閉鎖位置と、上方自由端が互いに離間した開放位置との間で前記バネ部材を移動させるバネ部材駆動手段と、
を備え、
前記バネ部材を前記閉鎖位置に移動させた後、前記基板担持部材上の上記基板が前記バネ部材の上方自由端の方へと移動するように、前記基板担持部材と前記バネ部材とを相対的に移動させ、それによって、前記基板担持部材上の前記基板を前記バネ部材の弾性力で規定位置へと移動矯正して位置決めする、
ことを特徴とする基板位置決め装置が提供される。 The above object is achieved by a substrate positioning apparatus according to the present invention. In summary, according to the first invention,
A substrate stage on which the substrate is placed;
A substrate carrying member for fitting the substrate stage so as to be movable in a vertical direction relative to the substrate stage at a central portion of the substrate stage, and for carrying the substrate placed on the substrate stage;
A plurality of vertically extending spring members arranged around the substrate so as to sandwich the substrate placed on the substrate stage;
A spring member driving means for moving the spring member between a closed position in which the upper free ends of the spring members approach each other and an open position in which the upper free ends are separated from each other;
With
After the spring member is moved to the closed position, the substrate carrying member and the spring member are relatively moved so that the substrate on the substrate carrying member moves toward the upper free end of the spring member. And thereby, the substrate on the substrate carrying member is moved and corrected to a specified position by the elastic force of the spring member, and positioned.
A substrate positioning apparatus is provided.

第１の本発明にて、一実施態様によれば、
前記複数個のバネ部材を外周囲に取付け、前記バネ部材駆動手段を備えたバネ支持台と、
前記バネ支持台より上方に所定距離だけ離間して前記バネ支持台と一体的に設け、上面に前記基板ステージを備えた載置台と、
前記基板担持部材を上下動するための基板担持部材駆動手段と、
と備え、
前記バネ部材を前記閉鎖位置に移動させた後、前記基板担持部材駆動手段により前記基板担持部材を前記バネ部材に対して上昇させ、前記基板担持部材上の前記基板を前記バネ部材の弾性力で規定位置へと移動矯正して位置決めする。 In the first invention, according to one embodiment,
A plurality of spring members are attached to the outer periphery, and a spring support base provided with the spring member driving means,
Provided integrally with the spring support table at a predetermined distance above the spring support table, and a mounting table provided with the substrate stage on the upper surface;
Substrate carrier driving means for moving the substrate carrier up and down;
And with
After the spring member is moved to the closed position, the substrate carrying member is lifted with respect to the spring member by the substrate carrying member driving means, and the substrate on the substrate carrying member is moved by the elastic force of the spring member. Position and correct the movement to the specified position.

第１の本発明にて、他の実施態様によれば、
前記複数個のバネ部材を外周囲に取付け、前記バネ部材駆動手段を備えたバネ支持台と、
前記バネ支持台より上方に所定距離だけ離間して前記バネ支持台と一体的に設け、上面に前記基板ステージを備えた載置台と、
前記載置台を上下動するための載置台駆動手段と、
と備え、
前記バネ部材を前記閉鎖位置に移動させた後、前記載置台駆動手段により前記載置台及び前記バネ支持台を前記基板担持部材に対して下降させ、前記基板担持部材上の前記基板を前記バネ部材の弾性力で規定位置へと移動矯正して位置決めする。 In the first invention, according to another embodiment,
A plurality of spring members are attached to the outer periphery, and a spring support base provided with the spring member driving means,
Provided integrally with the spring support table at a predetermined distance above the spring support table, and a mounting table provided with the substrate stage on the upper surface;
Mounting table driving means for moving the mounting table up and down,
And with
After the spring member is moved to the closed position, the mounting table driving means lowers the mounting table and the spring support table with respect to the substrate supporting member, and the substrate on the substrate supporting member is moved to the spring member. The position is corrected and corrected to the specified position by the elastic force of.

第１の本発明にて、他の実施態様によれば、前記バネ支持台は矩形状とされ、前記各バネ部材は、下方一端が前記バネ支持台に固定され、上方自由端は、前記載置台に形成したスロットを介して、互いに接近するように上方へと湾曲して延在している。 In the first aspect of the present invention, according to another embodiment, the spring support base has a rectangular shape, each spring member has a lower end fixed to the spring support base, and an upper free end described above. The slots extend upwardly so as to approach each other through slots formed in the mounting table.

第２の本発明によれば、
基板が載置される基板ステージと、
前記基板ステージに載置された前記基板を挟み込むようにして前記基板の外周囲に配置された複数個の上下方向に延在したバネ部材と、
前記バネ部材の上方自由端が互いの方へと接近した閉鎖位置と、上方自由端が互いに離間した開放位置との間で前記バネ部材を移動させるバネ部材駆動手段と、
を備え、
前記バネ部材を前記閉鎖位置に移動させた後、前記基板ステージ上の上記基板が前記バネ部材の上方自由端の方へと移動するように、前記基板ステージと前記バネ部材とを相対的に移動させ、それによって、前記基板ステージ上の前記基板を前記バネ部材の弾性力で規定位置へと移動矯正して位置決めする、
ことを特徴とする基板位置決め装置が提供される。 According to the second invention,
A substrate stage on which the substrate is placed;
A plurality of vertically extending spring members arranged around the substrate so as to sandwich the substrate placed on the substrate stage;
A spring member driving means for moving the spring member between a closed position in which the upper free ends of the spring members approach each other and an open position in which the upper free ends are separated from each other;
With
After moving the spring member to the closed position, the substrate stage and the spring member are relatively moved so that the substrate on the substrate stage moves toward the upper free end of the spring member. Thereby, the substrate on the substrate stage is moved and corrected to a specified position by the elastic force of the spring member, and positioned.
A substrate positioning apparatus is provided.

第２の本発明にて、一実施態様によれば、
前記複数個のバネ部材を外周囲に取付け、前記バネ部材駆動手段を備えたバネ支持台と、
前記バネ支持台より上方に所定距離だけ離間して配置され、上面に前記基板ステージを備えた載置台と、
前記バネ支持台を上下動するためのバネ支持台駆動手段と、
と備え、
前記バネ部材を前記閉鎖位置に移動させた後、前記バネ支持台駆動手段により前記バネ支持台を前記載置台及び前記基板ステージに対して下降させ、前記基板ステージ上の前記基板を前記バネ部材の弾性力で規定位置へと移動矯正して位置決めする。 In the second invention, according to one embodiment,
A plurality of spring members are attached to the outer periphery, and a spring support base provided with the spring member driving means,
A mounting table disposed above the spring support table by a predetermined distance and having the substrate stage on the upper surface;
A spring support driving means for moving the spring support up and down;
And with
After the spring member is moved to the closed position, the spring support base is lowered by the spring support base driving means with respect to the mounting table and the substrate stage, and the substrate on the substrate stage is moved to the spring member. Position and correct the movement to the specified position by elastic force.

第２の本発明にて、他の実施態様によれば、前記バネ支持台は矩形状とされ、前記各バネ部材は、下方一端が前記バネ支持台に固定され、上方自由端は、前記載置台及び前記基板ステージに形成したスロットを介して、互いに接近するように上方へと湾曲して延在している。 In the second aspect of the present invention, according to another embodiment, the spring support base has a rectangular shape, each spring member has a lower end fixed to the spring support base, and an upper free end described above. Through the slots formed in the mounting table and the substrate stage, the curved portions extend upward so as to approach each other.

本発明の基板位置決め装置は、従来に比して構成部品の点数を少なくし、且つ簡単な構造で基板の位置決めを行うことができ、精度が良く、且つ、製造コストが安価である。 The substrate positioning apparatus according to the present invention can reduce the number of components compared to the prior art, can perform substrate positioning with a simple structure, has high accuracy, and is low in manufacturing cost.

図１（ａ）は、本発明に係る基板位置決め装置の一実施例の断面図であり、図１（ｂ）は、平面図である。FIG. 1A is a cross-sectional view of an embodiment of a substrate positioning apparatus according to the present invention, and FIG. 1B is a plan view. 図２（ａ）は、図１（ａ）の線Ａ−Ａに取った断面図であり、図２（ｂ）は、図１（ａ）の線Ｂ−Ｂに取った断面図である。2A is a cross-sectional view taken along line AA in FIG. 1A, and FIG. 2B is a cross-sectional view taken along line BB in FIG. 本発明に係る基板位置決め装置の他の実施例の断面図である。It is sectional drawing of the other Example of the board | substrate positioning device which concerns on this invention. 図４（ａ）、（ｂ）、（ｃ）は、本発明の基板位置決め装置の動作態様を説明するための図である。FIGS. 4A, 4B, and 4C are views for explaining an operation mode of the substrate positioning apparatus of the present invention. 図５（ａ）は、本発明に係る基板位置決め装置の他の実施例の断面図であり、図５（ｂ）は、平面図である。FIG. 5A is a cross-sectional view of another embodiment of the substrate positioning apparatus according to the present invention, and FIG. 5B is a plan view. 図５に示す基板位置決め装置の断面図であり、動作態様を説明するための図である。It is sectional drawing of the board | substrate positioning apparatus shown in FIG. 5, and is a figure for demonstrating an operation | movement aspect. 図７（ａ）は、本発明に係る基板位置決め装置の他の実施例の断面図であり、図７（ｂ）は、平面図である。FIG. 7A is a cross-sectional view of another embodiment of the substrate positioning apparatus according to the present invention, and FIG. 7B is a plan view. 図７に示す基板位置決め装置の断面図であり、動作態様を説明するための図である。It is sectional drawing of the board | substrate positioning apparatus shown in FIG. 7, and is a figure for demonstrating an operation | movement aspect. 従来の基板検査装置の概略構成を説明するための図である。It is a figure for demonstrating schematic structure of the conventional board | substrate inspection apparatus. 従来の基板位置決め装置の一例を説明するための図である。It is a figure for demonstrating an example of the conventional board | substrate positioning device.

以下、本発明に係る基板位置決め装置を図面に則して更に詳しく説明する。 Hereinafter, the substrate positioning apparatus according to the present invention will be described in more detail with reference to the drawings.

実施例１
（装置の全体構成）
図１（ａ）、（ｂ）に、本発明に係る基板位置決め装置１０の一実施例の概略構成を示す。本実施例にて、基板位置決め装置１０は、図９を参照して上述した基板検査装置１における基板搬送装置２に設置された基板位置決め装置であるとして説明するが、これに限定されるものではない。本発明の基板位置決め装置１０は、回路基板の製造ラインにて、製造途中の回路基板の受け渡し時の基板の位置決め装置などとしても利用し得る。 Example 1
(Overall configuration of the device)
1A and 1B show a schematic configuration of an embodiment of a substrate positioning apparatus 10 according to the present invention. In the present embodiment, the substrate positioning device 10 will be described as being a substrate positioning device installed in the substrate transfer device 2 in the substrate inspection apparatus 1 described above with reference to FIG. 9, but is not limited thereto. Absent. The board positioning device 10 of the present invention can also be used as a board positioning device or the like when a circuit board is being transferred on a circuit board manufacturing line.

図１（ａ）、（ｂ）を参照すると、本実施例にて、基板位置決め装置１０は、基台１１と、基台１１の上方に所定距離離間して位置して、下方固定部材１２にて一体に設けられたバネ支持台１３と、バネ支持台１３の上方に所定距離離間して位置して、上方固定部材１４にて一体に設けられた載置台１５とを有している。載置台１５の上面には、基板１００を載置するための基板ステージ１６が一体的に取付けられている。 Referring to FIGS. 1A and 1B, in this embodiment, the substrate positioning device 10 is positioned above the base 11 and a predetermined distance above the base 11, and is positioned on the lower fixing member 12. The spring support 13 is integrally provided, and the mounting base 15 is integrally provided by the upper fixing member 14 and is located above the spring support 13 by a predetermined distance. A substrate stage 16 for mounting the substrate 100 is integrally attached to the upper surface of the mounting table 15.

更に説明すると、基台１１は矩形状（本実施例では正方形）の板部材とされ、図９に示すように、本実施例では、基板搬送装置２の移動機構２００に取付けられている。バネ支持台１３は、互いに平行に配置され上方へと直立して設けられた厚板状の固定部材１２、１２を介して基台１１に固定されている。 More specifically, the base 11 is a rectangular (square in this embodiment) plate member, and is attached to the moving mechanism 200 of the substrate transport apparatus 2 in this embodiment as shown in FIG. The spring support base 13 is fixed to the base 11 via thick plate-like fixing members 12 and 12 which are arranged in parallel to each other and are provided upright upward.

バネ部材１７は、詳しくは後述するが、基板ステージ１６の上面に載置された基板１００を挟み込むようにして基板１００の外周囲に複数個設けられる。本実施例では、図２（ａ）、（ｂ）をも参照するとより良く理解されるように、バネ部材１７は、矩形状の基板１００を挟み込むために基板ステージ１６上の基板１００の前後左右に対称配置にて４個設けられる。そのために、バネ部材１７を取付けるためのバネ支持台１３は矩形状（本実施例では正方形）の板部材とされ、図２（ａ）に示すように、各辺の中央部に位置してバネ部材１７の取付溝１８が形成されている。 As will be described in detail later, a plurality of spring members 17 are provided on the outer periphery of the substrate 100 so as to sandwich the substrate 100 placed on the upper surface of the substrate stage 16. In this embodiment, as will be better understood with reference also to FIGS. 2A and 2B, the spring member 17 has front, rear, left and right sides of the substrate 100 on the substrate stage 16 in order to sandwich the rectangular substrate 100. Are provided in a symmetrical arrangement. For this purpose, the spring support 13 for mounting the spring member 17 is a rectangular (square in this embodiment) plate member, and is located at the center of each side as shown in FIG. A mounting groove 18 for the member 17 is formed.

なお、本実施例では、位置決めされる基板１００は、一例として電子部品が実装されていないベアボードとされ、矩形に形成されると共にその表面に導体パターンが形成されて構成され、幅が１５〜５０ｍｍ、長さが１５〜５０ｍｍ、厚さが０．１〜３．２ｍｍとされるので、バネ部材１７は、薄板状のばね部材とされ、例えば厚さ０．１〜１．０ｍｍ、幅１０〜１２ｍｍ、長さ１００〜１５０ｍｍのリン青銅板又はステンレス鋼板などが好適に使用される。バネ部材１７は、上下方向に延在し、その下方端が取付溝１８内にネジ等の固定具にて、或いは、溶接（ろう付け）などにて固定される。また、バネ部材１７の上方端は自由端とされ、互いに接近するように、上方へと弓なり状に湾曲して延在している。 In this embodiment, the substrate 100 to be positioned is, for example, a bare board on which no electronic component is mounted, and is formed in a rectangular shape with a conductor pattern formed on the surface thereof, and has a width of 15 to 50 mm. Since the length is 15 to 50 mm and the thickness is 0.1 to 3.2 mm, the spring member 17 is a thin plate-like spring member. For example, the thickness is 0.1 to 1.0 mm and the width is 10 to 10 mm. A phosphor bronze plate or a stainless steel plate having a length of 12 mm and a length of 100 to 150 mm is preferably used. The spring member 17 extends in the vertical direction, and the lower end thereof is fixed in the mounting groove 18 by a fixing tool such as a screw or by welding (brazing). Further, the upper end of the spring member 17 is a free end, and extends in a bow shape upward so as to approach each other.

本実施例では、上述のようにバネ部材１７としては、薄板状のバネ部材として説明するが、これに限定されるものではなく、矩形断面以外の断面形状をした、例えば、円形、楕円形、或いは、その他の形状の帯状又は線状のばね部材とすることができる。 In the present embodiment, as described above, the spring member 17 is described as a thin plate-like spring member, but is not limited thereto, and has a cross-sectional shape other than a rectangular cross-section, for example, a circle, an ellipse, Or it can be set as the strip | belt-shaped or linear spring member of another shape.

また、バネ支持台１３の中心部には、詳しくは後述するが、基板担持部材駆動手段としてのシリンダ２０の駆動ロッド２１が貫通する中心穴１９が穿設されている。バネ支持台１３の下面には、シリンダ２０が取付けられている。または、支持台１３の上面には、バネ部材１７に対向してバネ部材駆動手段としてのシリンダ２２が設置されている。 In addition, a center hole 19 through which the drive rod 21 of the cylinder 20 as a substrate carrying member driving means passes is drilled in the center of the spring support 13 as will be described in detail later. A cylinder 20 is attached to the lower surface of the spring support 13. Alternatively, a cylinder 22 as a spring member driving unit is installed on the upper surface of the support base 13 so as to face the spring member 17.

バネ部材駆動シリンダ２２を駆動することにより、シリンダ２２から水平方向に伸長、後退を行う駆動ロッド２３がバネ部材１７に作用し、バネ部材１７は、図１（ａ）に示すように、バネ部材１７の上方自由端が互いの方へと接近した閉鎖位置（実線）と、上方自由端が互いに大きく離間した開放位置（一点鎖線）との間で移動可能とされる。 By driving the spring member drive cylinder 22, a drive rod 23 that extends and retracts in the horizontal direction from the cylinder 22 acts on the spring member 17, and the spring member 17, as shown in FIG. The upper free ends of 17 are movable between a closed position (solid line) approaching each other and an open position (dashed line) where the upper free ends are largely separated from each other.

また、基板担持部材駆動シリンダ２０の駆動ロッド２１に一体に取付けられた基板担持部材２５は、シリンダ２０を駆動することにより、上下方向に移動自在とされる。 Further, the substrate carrying member 25 integrally attached to the drive rod 21 of the substrate carrying member drive cylinder 20 is movable in the vertical direction by driving the cylinder 20.

載置台１５は、図２（ｂ）をも参照すると、外形状が矩形状（本実施例では正方形）の板部材とされ、中心部には、上記基板担持部材駆動シリンダ２０の駆動ロッド２１が貫通する多角形状の中心穴２６が穿設されている。また、載置台１５の各辺の中央部に位置して、外周辺から上記中心穴２６へと延在して、上記バネ部材１７を案内するガイドスロット２７が形成されている。即ち、各バネ部材１７は、載置台１５のスロット２７を介して上方へと延在している。 As shown in FIG. 2B, the mounting table 15 is a plate member having a rectangular outer shape (square in this embodiment), and a driving rod 21 of the substrate carrying member driving cylinder 20 is provided at the center. A polygonal central hole 26 is formed therethrough. A guide slot 27 is formed at the center of each side of the mounting table 15 and extends from the outer periphery to the center hole 26 to guide the spring member 17. That is, each spring member 17 extends upward through the slot 27 of the mounting table 15.

更に、図１（ａ）、（ｂ）に示すように、載置台１５の上面に配置された基板ステージ１６は、本実施例では、載置台１５の各ガイドスロット２７、２７間の空間部に位置して、同じ寸法形状の、本実施例では略正方形状をした４つの板部材とされる。各板部材１６の中心方向角部２８は、図１（ｂ）及び図２（ｂ）を参照すると理解されるように、上記基板担持部材２５が嵌合し得るように、切欠かれている。つまり、本実施例では、４つの板部材、即ち、基板ステージ１６は、載置台１５の基板担持部材２５が移動自在に嵌合される中心穴部２６の周りに配置される。従って、互いに隣接する基板ステージ１６、１６の間には、載置台１５に形成したスロット２７に対応した間隙が生じており、スロット２７を上方へと延在したバネ部材１７は、この間隙をも介して更に上方へと延在している。また、基板ステージ１６の上面と、基板ステージ１６の中心部に嵌合配置された基板担持部材２５の上面とは同一平面とされる。 Further, as shown in FIGS. 1A and 1B, the substrate stage 16 disposed on the upper surface of the mounting table 15 is disposed in the space between the guide slots 27 and 27 of the mounting table 15 in this embodiment. The four plate members are positioned and have the same size and shape, and in this embodiment are substantially square. As is understood with reference to FIGS. 1B and 2B, the central corner portion 28 of each plate member 16 is cut out so that the substrate holding member 25 can be fitted therein. That is, in this embodiment, the four plate members, that is, the substrate stage 16, are arranged around the central hole portion 26 into which the substrate holding member 25 of the mounting table 15 is movably fitted. Therefore, a gap corresponding to the slot 27 formed in the mounting table 15 is formed between the substrate stages 16 and 16 adjacent to each other, and the spring member 17 extending upward from the slot 27 has this gap. It extends further upwards. Further, the upper surface of the substrate stage 16 and the upper surface of the substrate carrying member 25 fitted and arranged at the center of the substrate stage 16 are flush with each other.

図３に、本実施例の変更実施例を示す。上記実施例では、基板位置決め装置１０の、バネ支持台１３と載置台１５とは、上方固定部材１４にて一体に固定され、バネ支持台１３に基板担持部材駆動手段としてのシリンダ２０を取付けるものとして説明した。本発明の装置は、この構造に限定されるものではない。 FIG. 3 shows a modified embodiment of this embodiment. In the above-described embodiment, the spring support base 13 and the mounting base 15 of the substrate positioning device 10 are integrally fixed by the upper fixing member 14, and the cylinder 20 as the substrate support member driving means is attached to the spring support base 13. As explained. The apparatus of the present invention is not limited to this structure.

例えば、図３に示すように、基板担持部材駆動手段としてのシリンダ２０の外筒に固定用のフランジ２０Ａ、２０Ｂを設け、下方のフランジ２０Ａにてバネ支持台１３をシリンダ２０に固定し、又、上方のフランジ２０Ｂにて載置台１５をシリンダ２０に固定する構造とすることもできる。 For example, as shown in FIG. 3, fixing flanges 20A and 20B are provided on the outer cylinder of the cylinder 20 as the substrate carrying member driving means, and the spring support 13 is fixed to the cylinder 20 with the lower flange 20A. The mounting table 15 may be fixed to the cylinder 20 with the upper flange 20B.

本変更実施例における基板位置決め装置１０のその他の構成は、上記実施例と同様の構成とされる。従って、同じ機能、構成をなす部材には上記実施例と同じ参照番号を付し、詳しい説明は省略する。 Other configurations of the substrate positioning apparatus 10 in the present modified example are the same as those in the above example. Accordingly, members having the same functions and configurations are denoted by the same reference numerals as those in the above embodiment, and detailed description thereof is omitted.

（装置の動作態様）
次に、上述した本発明の基板位置決め装置１０の構成を模式的に上面図及び断面図にて示す図４（ａ）、（ｂ）、（ｃ）を参照して、回路基板１００の位置決めを行う際の本発明に従って構成される基板位置決め装置１０の動作態様について説明する。 (Operational mode of the device)
Next, the circuit board 100 is positioned with reference to FIGS. 4A, 4B, and 4C schematically showing the configuration of the substrate positioning apparatus 10 of the present invention described above in a top view and a cross-sectional view. An operation mode of the substrate positioning apparatus 10 configured according to the present invention when performed will be described.

先ず、図４（ａ）に示すように、バネ部材駆動手段としてのシリンダ２２を作動させて、ロッド２３を外方へと伸長させる。これにより、バネ部材１７は、載置台１５のスロット２７に沿って半径方向外方向へと押圧され、各バネ部材１７はそれぞれ、基板ステージ１６の中心部より外方へと移動配置される。これにより、４つの基板ステージ１６により形成されるほぼ中央部の表面に載置領域Ｆが画成される。 First, as shown in FIG. 4A, the cylinder 22 as the spring member driving means is operated to extend the rod 23 outward. Accordingly, the spring member 17 is pressed radially outward along the slot 27 of the mounting table 15, and each spring member 17 is moved and arranged outward from the center of the substrate stage 16. As a result, the placement region F is defined on the surface of the substantially central portion formed by the four substrate stages 16.

この状態で、４つの基板ステージ１６により形成されるほぼ中央部の表面の載置領域Ｆに基板１００が供給される。基板１００は、この状態では、予め規定された位置からズレた状態とされる（図４（ａ））。 In this state, the substrate 100 is supplied to the mounting region F on the surface of the substantially central portion formed by the four substrate stages 16. In this state, the substrate 100 is shifted from a predetermined position (FIG. 4A).

次に、図４（ｂ）に示すように、バネ駆動手段としてのシリンダ２２を作動させて、ロッド２３を内方へと後退させる。これにより、バネ部材１７は、スロット２７に沿って半径方向内方向へとバネ部材１７の弾性力にて初期位置へと変形し、バネ部材１７の上下方向略中央部領域が基板ステージ１６に載置された基板１００の外周部に当接する。 Next, as shown in FIG. 4B, the cylinder 22 as a spring driving means is operated to retract the rod 23 inward. As a result, the spring member 17 is deformed radially inward along the slot 27 to the initial position by the elastic force of the spring member 17, and the substantially central region in the vertical direction of the spring member 17 is placed on the substrate stage 16. It contacts the outer peripheral portion of the placed substrate 100.

基板ステージ１６に載置された基板１００は、その外周部の各辺がバネ部材１７によって中心方向へと弾性的に押圧される。従って、基板１００は、各バネ部材１７の弾性力により押圧されてその配置状態が矯正され、各バネ部材１７の弾性力が釣り合った状態の或る位置に位置決めされる。通常、この状態にて基板１００は、図４（ｂ）に示すように、僅かに規定位置からズレた状態とされる。 The substrate 100 placed on the substrate stage 16 is elastically pressed toward the center by the spring member 17 at each side of the outer periphery. Accordingly, the substrate 100 is pressed by the elastic force of each spring member 17 to correct the arrangement state, and is positioned at a certain position where the elastic force of each spring member 17 is balanced. Normally, in this state, the substrate 100 is slightly displaced from the specified position as shown in FIG.

次に、図４（ｃ）に示すように、基板担持部材駆動手段としてのシリンダ２０を作動させて、ロッド２１を上方へと伸長させる。これにより、基板担持部材２５は、その上面に基板１００を載置した状態にて、各バネ部材１７の上方先端部の方へと押し上げる。基板１００は、その各辺をバネ部材１７の上方領域に摺擦されながら上方へと移動される。その過程にて、基板担持部材２５上の基板１００は、バネ部材１７の弾性力で基板１００の配置状態が矯正されながら予め規定された規定位置へと移動して位置決めされる（図４（ｃ））。 Next, as shown in FIG. 4C, the cylinder 20 as the substrate carrying member driving means is operated to extend the rod 21 upward. Thereby, the substrate holding member 25 is pushed up toward the upper tip of each spring member 17 in a state where the substrate 100 is placed on the upper surface thereof. The substrate 100 is moved upward while its sides are rubbed against the upper region of the spring member 17. In the process, the substrate 100 on the substrate holding member 25 is moved and positioned to a prescribed position defined in advance while the arrangement state of the substrate 100 is corrected by the elastic force of the spring member 17 (FIG. 4C). )).

上述のようにして基板１００を規定位置に位置決めした基板位置決め装置１０は、図９を参照して説明したように、基板搬送装置２の移動機構２００により基板１００に対する検査が実行される検査位置に移動される。 As described above with reference to FIG. 9, the substrate positioning apparatus 10 that has positioned the substrate 100 at the specified position as described above is in the inspection position where the inspection of the substrate 100 is performed by the moving mechanism 200 of the substrate transport apparatus 2. Moved.

検査部３は、基板搬送装置２によって検査位置に搬送された基板１００に対して、例えば、制御部４によりプロービング機構６を制御してプロービングを行わせる。 The inspection unit 3 causes the control unit 4 to control the probing mechanism 6 to perform probing on the substrate 100 transported to the inspection position by the substrate transport device 2.

つまり、上記構成の基板位置決め装置１０は、
（１）シリンダ２２のロッド２３を伸長し、複数個（本実施例では４個）のバネ部材１７を互いに離れる方向に広げる。
（２）基板１００を基板ステージ１６に載置する。
（３）シリンダ２２のロッド２３をシリンダ内へと後退させ、４個のバネ部材１７を互いの方へと近接するように狭める。
（４）シリンダ２０を上昇させ、４個のバネ部材の弾性力で基板１００を基板ステージ１６の中央規定位置に位置決めする。 That is, the substrate positioning apparatus 10 having the above-described configuration is
(1) The rod 23 of the cylinder 22 is extended, and a plurality of (four in this embodiment) spring members 17 are spread away from each other.
(2) The substrate 100 is placed on the substrate stage 16.
(3) The rod 23 of the cylinder 22 is retracted into the cylinder, and the four spring members 17 are narrowed so as to approach each other.
(4) The cylinder 20 is raised and the substrate 100 is positioned at the center specified position of the substrate stage 16 by the elastic force of the four spring members.

このように、本発明に従って構成される基板位置決め装置１０は、複数個のバネ部材１７とシリンダ２０、２２を組み合わせた簡単且つ安価な構造で、基板１００の位置決めが可能とされる。また、複数個のバネ部材１７の特性を合わせることで、精度良く基板１００のセンタリング（位置決め）が達成される。 Thus, the substrate positioning apparatus 10 configured according to the present invention can position the substrate 100 with a simple and inexpensive structure in which a plurality of spring members 17 and cylinders 20 and 22 are combined. In addition, by matching the characteristics of the plurality of spring members 17, centering (positioning) of the substrate 100 can be achieved with high accuracy.

実施例２
図５及び図６に、本発明に係る基板位置決め装置１０の第二の実施例を示す。実施例１で説明した基板位置決め装置１０は、基板担持部材駆動シリンダ２０を駆動して基板担持部材２５を上昇させることによって、基板担持部材２５上に載置された基板１００の位置ずれを矯正し、規定位置に配置するように構成された。 Example 2
5 and 6 show a second embodiment of the substrate positioning apparatus 10 according to the present invention. The substrate positioning apparatus 10 described in the first embodiment corrects the positional deviation of the substrate 100 placed on the substrate carrying member 25 by driving the substrate carrying member drive cylinder 20 to raise the substrate carrying member 25. , Arranged to be placed in a prescribed position.

これに対して、本実施例２では、基板担持部材２５は支持軸２５Ａにて基台１１に固定されており、載置台１５及び基板ステージ１６、並びに、バネ支持台１３及びバネ部材１７を下方へと移動させることにより、基板担持部材２５上に載置された基板１００の位置ずれを矯正し、規定位置に配置するように構成されている。その他の構成は、実施例１で説明した基板位置決め装置と同じ構成とされる。従って、以下には、実施例１と異なる構成について説明し、同じ機能、構成をなす部材には同じ参照番号を付し、詳しい説明は省略する。 On the other hand, in the second embodiment, the substrate carrying member 25 is fixed to the base 11 by the support shaft 25A, and the mounting table 15, the substrate stage 16, the spring support table 13, and the spring member 17 are moved downward. By moving to the position, the positional deviation of the substrate 100 placed on the substrate carrying member 25 is corrected and arranged at a specified position. Other configurations are the same as those of the substrate positioning apparatus described in the first embodiment. Therefore, below, a different structure from Example 1 is demonstrated, the same reference number is attached | subjected to the member which makes the same function and structure, and detailed description is abbreviate | omitted.

図５（ａ）、（ｂ）を参照すると、基台１１には、基台１１より外方に左右方向に突出して対称配置にてシリンダ取付部１１Ａが付設され、載置台駆動手段としてのシリンダ３０が取付けられる。一方、同様に、載置台１５には、載置台１５より外方に左右方向に突出して対称配置にてロッド取付部１５Ａが付設され、載置台駆動シリンダ３０のロッド３１の先端部が取付けられる。従って、載置台駆動シリンダ３０を駆動することにより、載置台１５及び載置台１５に一体に固定取付けられているバネ支持台１３が、一体として上下動自在に駆動される。 Referring to FIGS. 5A and 5B, the base 11 is provided with a cylinder mounting portion 11A protruding in the left-right direction outward from the base 11 in a symmetrical arrangement, and serving as a mounting table driving means. 30 is attached. On the other hand, similarly, a rod mounting portion 15A is attached to the mounting table 15 in a symmetrical arrangement so as to protrude outward from the mounting table 15 in the left-right direction, and the tip of the rod 31 of the mounting table drive cylinder 30 is mounted. Therefore, by driving the mounting table drive cylinder 30, the mounting table 15 and the spring support table 13 fixedly attached integrally to the mounting table 15 are driven to move up and down as a unit.

図６は、載置台駆動シリンダ３０が駆動され、載置台１５及びバネ支持台１３が、一体として下方へと移動した状態を示す。つまり、上述した実施例１における図４（ｃ）の状態と同じである。 FIG. 6 shows a state where the mounting table drive cylinder 30 is driven and the mounting table 15 and the spring support table 13 are moved downward as a unit. That is, it is the same as the state of FIG.

つまり、実施例２においては、図５（ａ）に示す状態にて、バネ部材駆動手段としてのシリンダ２２を作動させて、ロッド２３を外方へと伸長させる。これにより、図４（ａ）に示すと同様に、バネ部材１７は、載置台１５のスロット２７に沿って半径方向外方向へと押圧され、各バネ部材１７はそれぞれ、基板ステージ１６の中心部より外方へと移動配置される。これにより、４つの基板ステージ１６により形成されるほぼ中央部の表面に載置領域Ｆが画成される。 That is, in the second embodiment, in the state shown in FIG. 5A, the cylinder 22 as the spring member driving means is operated to extend the rod 23 outward. As a result, as shown in FIG. 4A, the spring member 17 is pressed radially outward along the slot 27 of the mounting table 15, and each spring member 17 is centered on the substrate stage 16. It is arranged to move outward. As a result, the placement region F is defined on the surface of the substantially central portion formed by the four substrate stages 16.

この状態で、４つの基板ステージ１６により形成されるほぼ中央部の表面の載置領域Ｆに基板１００が供給される。 In this state, the substrate 100 is supplied to the mounting region F on the surface of the substantially central portion formed by the four substrate stages 16.

次に、図４（ｂ）に示すと同様に、バネ部材駆動シリンダ２２を作動させて、ロッド２３を内方へと後退させる。これにより、バネ部材１７は、スロット２７に沿って半径方向内方向へとバネ部材１７の弾性力にて初期位置へと変形し、バネ部材１７の上下方向中央部領域が基板ステージ１６に載置された基板１００の外周部に当接する。 Next, as shown in FIG. 4B, the spring member drive cylinder 22 is operated to retract the rod 23 inward. As a result, the spring member 17 is deformed radially inward along the slot 27 to the initial position by the elastic force of the spring member 17, and the vertical center region of the spring member 17 is placed on the substrate stage 16. The outer peripheral portion of the substrate 100 is contacted.

基板ステージ１６に載置された基板１００は、その外周部の各辺がバネ部材１７によって中心方向へと弾性的に押圧される。従って、基板１００は、各バネ部材１７の弾性力により押圧されてその配置状態が矯正され、各バネ部材１７の弾性力が釣り合った状態の或る位置に位置決めされる。 The substrate 100 placed on the substrate stage 16 is elastically pressed toward the center by the spring member 17 at each side of the outer periphery. Accordingly, the substrate 100 is pressed by the elastic force of each spring member 17 to correct the arrangement state, and is positioned at a certain position where the elastic force of each spring member 17 is balanced.

引き続いて、図６に示すように、載置台駆動シリンダ３０を作動させて、ロッド３１を下方へと後退させる。これにより、一体に組み立てられている載置台１５及びバネ支持台１３は、下方へと移動される。基板担持部材２５の上面に載置された基板１００は、相対的に各バネ部材１７の上方自由先端部の方へと押し上げられる。基板１００は、その各辺をバネ部材１７に摺擦されながら、バネ部材１７に対して相対的に上方へと移動され、その過程にて、バネ部材１７の弾性力で基板１００の配置状態が矯正されながら予め規定された規定位置へと移動して位置決めされる。この状態は、上述したように実施例１の図４（ｃ）に示す状態と同じである。 Subsequently, as shown in FIG. 6, the mounting table drive cylinder 30 is operated to retract the rod 31 downward. As a result, the mounting table 15 and the spring support table 13 that are assembled together are moved downward. The substrate 100 placed on the upper surface of the substrate carrying member 25 is relatively pushed up toward the upper free tip of each spring member 17. The substrate 100 is moved upward relative to the spring member 17 while the sides of the substrate 100 are rubbed against the spring member 17. In this process, the arrangement state of the substrate 100 is changed by the elastic force of the spring member 17. While being corrected, it is moved and positioned to a predetermined position. This state is the same as the state shown in FIG.

その後、上述したように、基板１００を規定位置に位置決めした基板位置決め装置１０は、基板搬送装置２の移動機構２００により基板１００に対する検査が実行される検査位置に移動される。 Thereafter, as described above, the substrate positioning apparatus 10 that has positioned the substrate 100 at the specified position is moved to the inspection position where the inspection of the substrate 100 is performed by the moving mechanism 200 of the substrate transport apparatus 2.

本実施例２の基板位置決め装置１０は、実施例１の基板位置決め装置１０と同様に、複数個のバネ部材１７とシリンダ２２、３０を組み合わせた簡単且つ安価な構造で、基板の位置決めが可能とされる。また、４方向のバネ部材１７の特性を合わせることで、精度良く基板のセンタリング（位置決め）が達成される。 Similar to the substrate positioning device 10 of the first embodiment, the substrate positioning device 10 of the second embodiment has a simple and inexpensive structure in which a plurality of spring members 17 and cylinders 22 and 30 are combined. Is done. Further, by combining the characteristics of the spring members 17 in the four directions, the centering (positioning) of the substrate can be achieved with high accuracy.

実施例３
図７及び図８に、本発明に係る基板位置決め装置１０の第三の実施例を示す。実施例１で説明した基板位置決め装置１０は、基板担持部材駆動シリンダ２０を駆動して基板担持部材２５を上昇させることによって、基板担持部材２５上に載置された基板１００の位置ずれを矯正し、規定位置に配置するように構成された。 Example 3
7 and 8 show a third embodiment of the substrate positioning apparatus 10 according to the present invention. The substrate positioning apparatus 10 described in the first embodiment corrects the positional deviation of the substrate 100 placed on the substrate carrying member 25 by driving the substrate carrying member drive cylinder 20 to raise the substrate carrying member 25. , Arranged to be placed in a prescribed position.

これに対して、本実施例３では、基板担持部材２５を有しておらず、バネ支持台１３及びバネ部材１７を下方へと移動させることにより、基板ステージ１６上に載置された基板１００の位置ずれを矯正し、規定位置に配置するように構成されている。その他の構成は、実施例１で説明した基板位置決め装置と同じ構成とされる。従って、以下には、実施例１と異なる構成について説明し、同じ機能、構成をなす部材には同じ参照番号を付し、詳しい説明は省略する。 In contrast, in the third embodiment, the substrate holding member 25 is not provided, and the substrate 100 placed on the substrate stage 16 is moved by moving the spring support 13 and the spring member 17 downward. It is configured to correct the misalignment and arrange it at a specified position. Other configurations are the same as those of the substrate positioning apparatus described in the first embodiment. Therefore, below, a different structure from Example 1 is demonstrated, the same reference number is attached | subjected to the member which makes the same function and structure, and detailed description is abbreviate | omitted.

図７（ａ）、（ｂ）を参照すると、本実施例によると、載置台１５はバネ支持台１３より上方に所定距離離間して配置されており、載置台１５は、載置台固定部材４０により、基台１１に一体的に固定される。つまり、本実施例では、基台１１には、基台１１より外方に左右方向に突出して対称配置にて載置台固定部材取付部１１Ａが付設され、載置台固定部材４０の下端部が取付けられる。一方、載置台１５には、載置台１５より外方に左右方向に突出して対称配置にて載置台固定部材取付部１５Ａが付設され、載置台固定部材４０の上端部が取付けられる。 Referring to FIGS. 7A and 7B, according to the present embodiment, the mounting table 15 is disposed above the spring support table 13 by a predetermined distance, and the mounting table 15 is mounted on the mounting table fixing member 40. Thus, the base 11 is integrally fixed. That is, in this embodiment, the base 11 is provided with the mounting base fixing member mounting portion 11A in a symmetrical arrangement protruding outward from the base 11 in the left-right direction, and the lower end of the mounting base fixing member 40 is attached. It is done. On the other hand, the mounting table 15 is provided with a mounting table fixing member mounting portion 15 </ b> A protruding in the left-right direction outward from the mounting table 15 in a symmetrical arrangement, and the upper end portion of the mounting table fixing member 40 is mounted.

また、本実施例では、基台１１にバネ支持台駆動手段としてのシリンダ４１が取付けられ、バネ支持台１３は、基台１１に固定されたバネ支持台駆動シリンダ４１のロッド４２に固定されている。従って、シリンダ４１を駆動することにより、ロッド４２に一体に固定取付けられているバネ支持台１３は、バネ部材１７と共に、一体として上下動自在に駆動される。 In this embodiment, a cylinder 41 as a spring support base driving means is attached to the base 11, and the spring support base 13 is fixed to a rod 42 of a spring support base drive cylinder 41 fixed to the base 11. Yes. Therefore, by driving the cylinder 41, the spring support 13 fixedly attached integrally to the rod 42 is driven together with the spring member 17 so as to move up and down as a unit.

なお、本実施例では、実施例１と同様に、載置台１５にはその上面に基板ステージ１６が取付けられているが、基板担持部材２５は設けられておらず、従って、載置台１５の中心部には、実施例１と異なり、基板担持部材２５のための嵌合穴部２６（図１（ａ）、図２（ｂ）参照）は形成されていない。また、本実施例では、基板ステージ１６は、矩形状の（本実施例では正方形状の）板部材とされ、載置台１５に形成されているガイドスロット２７と上下方向に整列してガイドスロット４３が形成されているだけである。 In this embodiment, the substrate stage 16 is attached to the upper surface of the mounting table 15 as in the first embodiment, but the substrate holding member 25 is not provided, and therefore the center of the mounting table 15 is not provided. Unlike the first embodiment, the fitting hole portion 26 (see FIGS. 1A and 2B) for the substrate carrying member 25 is not formed in the portion. In this embodiment, the substrate stage 16 is a rectangular (square in this embodiment) plate member, and is aligned with the guide slot 27 formed on the mounting table 15 in the vertical direction. Is only formed.

図８は、バネ支持台駆動手段であるシリンダ４１が駆動され、バネ支持台１３及びバネ部材１７が、一体として下方へと移動した状態を示す。つまり、本実施例によると、基板１００は、常に基板ステージ１６の上面に担持された状態で、バネ部材１７の弾性力で基板１００の配置状態が矯正されながら予め規定された規定位置へと移動して位置決めされる。即ち、上述した実施例１における図４（ｃ）の状態と同様の状態とされる。 FIG. 8 shows a state where the cylinder 41 which is a spring support base driving means is driven, and the spring support base 13 and the spring member 17 are moved downward as a unit. That is, according to the present embodiment, the substrate 100 is always carried on the upper surface of the substrate stage 16 and moves to a predetermined position while the arrangement state of the substrate 100 is corrected by the elastic force of the spring member 17. Is positioned. That is, the state is the same as the state of FIG.

図７（ａ）、（ｂ）及び図８を参照して本実施例における装置の動作態様について説明すると、先ず、図７（ａ）、（ｂ）に示す状態にて、実施例における図４（ａ）に示すと同様に、バネ部材駆動手段としてのシリンダ２２を作動させて、ロッド２３を外方へと伸長させる。これにより、図７（ａ）に一点鎖線にて示すように、バネ部材１７は、載置台１５のスロット２７及び基板ステージ１６のスロット４３に沿って半径方向外方向へと押圧され、各バネ部材１７はそれぞれ、基板ステージ１６の中心部より外方へと移動配置される。これにより、基板ステージ１６により形成されるほぼ中央部の表面に載置領域Ｆが画成される。 The operation mode of the apparatus in this embodiment will be described with reference to FIGS. 7A, 7B, and 8. First, in the state shown in FIGS. 7A and 7B, FIG. Similarly to (a), the cylinder 22 as the spring member driving means is operated to extend the rod 23 outward. 7A, the spring member 17 is pressed radially outward along the slot 27 of the mounting table 15 and the slot 43 of the substrate stage 16 to each spring member. Each 17 is moved and arranged outward from the center of the substrate stage 16. As a result, a placement region F is defined on the surface of the substantially central portion formed by the substrate stage 16.

この状態で、基板ステージ１６により形成されるほぼ中央部の表面の載置領域Ｆに基板１００が供給される。 In this state, the substrate 100 is supplied to the mounting region F on the surface of the substantially central portion formed by the substrate stage 16.

次に、実施例１における図４（ｂ）と同様に、バネ部材駆動シリンダ２２を作動させて、ロッド２３を内方へと後退させ、これにより、バネ部材１７を、図７（ａ）に実線で示すように、スロット２７、４３に沿って半径方向内方向へとバネ部材１７の弾性力にて初期位置へと変形し、バネ部材１７の上下方向中央部領域が基板ステージ１６に載置された基板１００の外周部に当接する。 Next, as in FIG. 4B in the first embodiment, the spring member drive cylinder 22 is operated to retract the rod 23 inward, whereby the spring member 17 is moved to FIG. 7A. As indicated by the solid line, it is deformed radially inward along the slots 27 and 43 to the initial position by the elastic force of the spring member 17, and the vertical center region of the spring member 17 is placed on the substrate stage 16. The outer peripheral portion of the substrate 100 is contacted.

引き続いて、図８に示すように、バネ支持台駆動手段としてのシリンダ４１を作動させて、ロッド４２を下方へと後退させる。これにより、一体に組み立てられているバネ支持台１３及びバネ部材１７は、下方へと移動される。つまり、基板ステージ１６の上面に載置された基板１００は、図４（ｃ）に示すと同様に、相対的に各バネ部材１７の上方自由先端部の方へと押し上げられる。基板１００は、その各辺をバネ部材１７に摺擦されながら、バネ部材１７に対して相対的に上方へと移動され、その過程にて、バネ部材１７の弾性力で基板１００の配置状態が矯正されながら予め規定された規定位置へと移動して位置決めされる。 Subsequently, as shown in FIG. 8, the cylinder 41 as the spring support driving means is operated to retract the rod 42 downward. As a result, the spring support 13 and the spring member 17 that are assembled together are moved downward. That is, the substrate 100 placed on the upper surface of the substrate stage 16 is relatively pushed up toward the upper free tip of each spring member 17 as shown in FIG. The substrate 100 is moved upward relative to the spring member 17 while the sides of the substrate 100 are rubbed against the spring member 17. In this process, the arrangement state of the substrate 100 is changed by the elastic force of the spring member 17. While being corrected, it is moved and positioned to a predetermined position.

本実施例３の基板位置決め装置１０は、実施例１の基板位置決め装置１０と同様に、複数個のバネ部材１７とシリンダ２２、４０を組み合わせた簡単且つ安価な構造で、基板の位置決めが可能とされる。また、４方向のバネ部材１７の特性を合わせることで、精度良く基板のセンタリング（位置決め）が達成される。 Similar to the substrate positioning device 10 of the first embodiment, the substrate positioning device 10 of the third embodiment has a simple and inexpensive structure in which a plurality of spring members 17 and cylinders 22 and 40 are combined. Is done. Further, by combining the characteristics of the spring members 17 in the four directions, the centering (positioning) of the substrate can be achieved with high accuracy.

本発明の基板位置決め装置は、載置台に載置されている回路基板を予め規定された規定位置に位置決めする基板位置決め装置であって、例えば、基板検査装置においては、基板搬送装置によって搬送された基板を、検査部の基板保持台よって保持させる際に基板保持台に対して予め決められた位置関係となるように基板の位置合わせを行うための基板搬送装置に設けられた位置決め装置とすることができる。更には、本発明の基板位置決め装置は、回路基板の製造ラインにて、製造途中の回路基板の受け渡し時の基板の位置決め装置としても利用し得る。 The substrate positioning device of the present invention is a substrate positioning device that positions a circuit board mounted on a mounting table at a predetermined specified position. For example, in a substrate inspection device, the substrate positioning device is transferred by a substrate transfer device. When the substrate is held by the substrate holding table of the inspection unit, the positioning device is provided in the substrate transfer device for aligning the substrate so as to have a predetermined positional relationship with respect to the substrate holding table. Can do. Furthermore, the board positioning device of the present invention can also be used as a board positioning device at the time of delivery of a circuit board being manufactured on a circuit board manufacturing line.

１１基台
１２下方固定部材
１３バネ支持台
１４上方固定部材
１５載置台
１６基板ステージ
１７バネ部材
２０シリンダ（基板担持部材駆動手段）
２２シリンダ（バネ部材駆動手段）
２５基板担持部材
３０シリンダ（載置台駆動手段）
４１シリンダ（バネ支持台駆動手段） DESCRIPTION OF SYMBOLS 11 Base 12 Lower fixing member 13 Spring support base 14 Upper fixing member 15 Mounting base 16 Substrate stage 17 Spring member 20 Cylinder (Substrate carrying member drive means)
22 Cylinder (spring member drive means)
25 Substrate carrying member 30 Cylinder (mounting table driving means)
41 Cylinder (spring support stand drive means)

Claims

A substrate stage on which the substrate is placed;
A substrate carrying member for fitting the substrate stage so as to be movable in a vertical direction relative to the substrate stage at a central portion of the substrate stage, and for carrying the substrate placed on the substrate stage;
A plurality of vertically extending spring members arranged around the substrate so as to sandwich the substrate placed on the substrate stage;
A spring member driving means for moving the spring member between a closed position in which the upper free ends of the spring members approach each other and an open position in which the upper free ends are separated from each other;
With
After the spring member is moved to the closed position, the substrate carrying member and the spring member are relatively moved so that the substrate on the substrate carrying member moves toward the upper free end of the spring member. And thereby, the substrate on the substrate carrying member is moved and corrected to a specified position by the elastic force of the spring member, and positioned.
A substrate positioning apparatus.

A plurality of spring members are attached to the outer periphery, and a spring support base provided with the spring member driving means,
Provided integrally with the spring support table at a predetermined distance above the spring support table, and a mounting table provided with the substrate stage on the upper surface;
Substrate carrier driving means for moving the substrate carrier up and down;
And with
After the spring member is moved to the closed position, the substrate carrying member is lifted with respect to the spring member by the substrate carrying member driving means, and the substrate on the substrate carrying member is moved by the elastic force of the spring member. Position and correct the movement to the specified position,
The substrate positioning apparatus according to claim 1.

A plurality of spring members are attached to the outer periphery, and a spring support base provided with the spring member driving means,
Provided integrally with the spring support table at a predetermined distance above the spring support table, and a mounting table provided with the substrate stage on the upper surface;
Mounting table driving means for moving the mounting table up and down,
And with
After the spring member is moved to the closed position, the mounting table driving means lowers the mounting table and the spring support table with respect to the substrate supporting member, and the substrate on the substrate supporting member is moved to the spring member. Positioning by correcting the movement to the specified position with the elastic force of
The substrate positioning apparatus according to claim 1.

The spring support is rectangular,
The lower end of each spring member is fixed to the spring support base, and the upper free end extends and curves upward so as to approach each other through a slot formed in the mounting table.
The substrate positioning apparatus according to claim 2 or 3, wherein

A substrate stage on which the substrate is placed;
A plurality of vertically extending spring members arranged around the substrate so as to sandwich the substrate placed on the substrate stage;
A spring member driving means for moving the spring member between a closed position in which the upper free ends of the spring members approach each other and an open position in which the upper free ends are separated from each other;
With
After moving the spring member to the closed position, the substrate stage and the spring member are relatively moved so that the substrate on the substrate stage moves toward the upper free end of the spring member. Thereby, the substrate on the substrate stage is moved and corrected to a specified position by the elastic force of the spring member, and positioned.
A substrate positioning apparatus.

A plurality of spring members are attached to the outer periphery, and a spring support base provided with the spring member driving means,
A mounting table disposed above the spring support table by a predetermined distance and having the substrate stage on the upper surface;
A spring support driving means for moving the spring support up and down;
And with
After the spring member is moved to the closed position, the spring support base is lowered by the spring support base driving means with respect to the mounting table and the substrate stage, and the substrate on the substrate stage is moved to the spring member. Position by correcting and moving to the specified position with elastic force,
The substrate positioning apparatus according to claim 5.

The spring support is rectangular,
Each of the spring members has a lower end fixed to the spring support base, and an upper free end extending upwardly so as to approach each other via a slot formed in the mounting table and the substrate stage. doing,
The substrate positioning apparatus according to claim 6.