JP2015020116A - Vacuum cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress drop in a heating efficiency when a heat pump unit and a heating heater are activated.SOLUTION: A vacuum cleaning device includes: a steam chamber 200; a condensation chamber; a cleaning chamber; and a heat pump unit . The heat pump unit includes in a circulation passage in which a heat medium circulates: a compressor for adiabatically compressing and heating the heat medium; a first heat exchange part (a condenser 340) which exchanges heat between the heated heat medium and a hydrocarbon cleaning agent in the steam chamber, thereby gasifying the hydrocarbon cleaning agent to generate steam and cooling the heat medium; and a hydrocarbon cleaning agent in the steam chamber 200 to gasify the hydrocarbon cleaning agent, thereby generating steam and cooling the heat medium; a decompression part for decompressing and expanding the cooled heat medium thereby further cooling the heat medium; and a second heat exchange part (an evaporator) which exchanges heat between the cooled heat medium and the steam in the condensation chamber thereby condensing the steam to generate the hydrocarbon cleaning agent and heating the heat medium. The vacuum cleaning device further includes: a heating heater (202) for heating the hydrocarbon cleaning agent in the steam chamber together with the first heat exchange part by an electric power; and a partition plate 250 interposed between the first heat exchanger and the heating heater.

Description

  The present invention relates to a vacuum cleaning apparatus for cleaning a workpiece by supplying a vapor of a hydrocarbon-based cleaning agent to a cleaning chamber under reduced pressure.

  Conventionally, for example, a vacuum cleaning apparatus disclosed in Patent Document 1 is known. According to this vacuum cleaning apparatus, first, a depressurization process is performed in which the cleaning chamber into which the work is carried is decompressed by a vacuum pump, and then the steam cleaning is performed by supplying the hydrocarbon-based cleaning agent vapor to the cleaning chamber and cleaning the work. A process is performed. Next, spray the hydrocarbon-based cleaning agent on the workpiece, or immerse the workpiece in the hydrocarbon-based cleaning agent stored in the immersion chamber. A spray dip cleaning process is performed to clean the components. When cleaning of the workpiece is completed in this way, after the workpiece is transferred again to the cleaning chamber, a drying process is performed in which the cleaning chamber is further depressurized to evaporate the cleaning agent attached to the workpiece surface. When the drying process is completed, the workpiece is unloaded after the cleaning chamber is returned to atmospheric pressure, and the series of processes is completed.

  In such a vacuum cleaning device, used hydrocarbon cleaners (contaminants adhering to the workpiece and hydrocarbon cleaners, hereinafter referred to as “used cleaners”) are sent to the steam chamber for regeneration. Is done. More specifically, the used cleaning agent sent to the steam chamber is heated by an electric heater or the like to become substantially hydrocarbon-based cleaning vapor (distillation). And the vapor | steam of only the produced | generated hydrocarbon type cleaning agent is utilized again in a vapor | steam washing process, or after being condensed with the cooler using cooling water, it is utilized in a spray immersion washing process.

  However, in the technique of Patent Document 1, the heat used for generating the steam of the hydrocarbon-based cleaning agent in the steam chamber is recovered by the cooler and discarded. Further, in order to cool the steam, a large amount of cooling water such as about 200 L / min is required, and a water storage tank, a cooling tower, and the like are also required, so that the apparatus is enlarged.

  Therefore, a heat pump unit in which the heat medium circulates is provided in the vacuum cleaning device, the heat pump unit recovers the heat of the used cleaning agent in a vapor state in the cleaning chamber, and supplies the recovered heat to the steam chamber to form a hydrocarbon. A technique for vaporizing a system cleaner is disclosed (for example, Patent Document 2). In such a technique, in a portion of the heat pump unit that is disposed in the steam chamber, a gaseous heat medium is circulated in a pipe constituting the heat pump unit, and the gaseous heat medium and a hydrocarbon-based cleaning agent And heat exchange through the tube. If it does so, while a hydrocarbon type cleaning agent will be heated with a gaseous heat medium, a vapor | steam will be produced | generated, and a gaseous heat medium will be cooled, and a liquid heat medium will be produced | generated. Then, the generated heat medium in the liquid state is sent to the cleaning chamber, and the hydrocarbon-based cleaning agent in the vapor state is cooled and condensed in the cleaning chamber. The condensed hydrocarbon cleaning agent is used for cleaning the workpiece.

  In addition, in the heat pump unit alone, if the heat exchange between the gaseous heat medium and the hydrocarbon-based cleaning agent is insufficient in the steam chamber, the amount of steam generated is reduced. In addition to the heat pump unit, a heater is provided in the steam chamber, and when the amount of steam generated decreases, the heat pump unit is driven and the heater is driven to prevent a decrease in the amount of steam generated. ing.

JP-A-7-166385 Japanese Patent No. 2551777

  However, when the heat pump unit and the heater are driven, they interfere with each other and the heating function is reduced. More specifically, when the heat pump unit and the heater are driven, vapor bubbles generated by being heated by the heater are attached to the heat pump unit. If it does so, the bubble which adhered will function as a heat insulating material, the contact area (heating area) of a heat pump unit and a hydrocarbon type cleaning agent will be reduced, heating efficiency will fall, and the production amount of steam will fall.

  It is an object of the present invention to avoid a situation where bubbles generated by a heater adhere to the heat pump unit when driving the heat pump unit and the heater, and vacuum cleaning that can prevent a decrease in heating efficiency Is to provide a device.

  In order to solve the above-described problems, the vacuum cleaning apparatus of the present invention generates a hydrocarbon-based cleaning agent by condensing a steam chamber in which a vapor of a hydrocarbon-based cleaning agent is generated, and steam introduced from the steam chamber. The heat medium is adiabatically compressed in a condensing chamber, a cleaning chamber in which the workpiece can be washed under reduced pressure by at least the condensed hydrocarbon-based cleaning agent supplied from the condensing chamber, and a circulation path through which the heat medium circulates. Heat-exchange the compressor heated by the compressor and the hydrocarbon-based cleaning agent in the steam chamber to heat the hydrocarbon-based cleaning agent to generate the steam and A first heat exchange section that cools the heat medium, a decompression section that further expands and cools the heat medium cooled by the first heat exchange section, and a cooling medium that is cooled by the decompression section and the condensation chamber. Heat exchange with the steam of the The hydrocarbon-based cleaning in the steam chamber together with the first heat exchanging unit by electric power, and a heat pump unit having a second heat exchanging unit for generating the hydrocarbon-based cleaning agent and heating the heat medium. A heater that heats the agent and vaporizes the hydrocarbon-based cleaning agent to generate the steam; and is provided between the first heat exchange unit and the heater, the heater being the hydrocarbon-based cleaning agent And a partition plate that suppresses adhesion of the vapor bubbles generated by heating to the first heat exchanging portion.

  Further, the heater may be provided above the first heat exchange unit.

  In order to solve the above-mentioned problems, another vacuum cleaning apparatus of the present invention includes a steam chamber in which a vapor of a hydrocarbon-based cleaning agent is generated, and a hydrocarbon-based cleaning agent that is condensed by the vapor introduced from the steam chamber. The heat medium is insulated in the generated condensing chamber, the cleaning chamber capable of cleaning the workpiece under reduced pressure by at least the condensed hydrocarbon-based cleaning agent supplied from the condensing chamber, and the circulation path through which the heat medium circulates. A compressor that compresses and heats, and a heat medium heated by the compressor and the hydrocarbon-based cleaning agent in the steam chamber exchange heat to vaporize the hydrocarbon-based cleaning agent to generate the steam. And a first heat exchange unit that cools the heat medium, a decompression unit that further cools the heat medium cooled by the first heat exchange unit by decompressing, and a heat medium cooled by the decompression unit and the condensation Heat exchange with the steam in the room A heat pump unit having a second heat exchange part that heats the heat medium and generates the hydrocarbon-based cleaning agent, and the first heat exchange part. And a heater for heating the hydrocarbon-based cleaning agent in the steam chamber together with the exchange unit to vaporize the hydrocarbon-based cleaning agent to generate the steam.

  ADVANTAGE OF THE INVENTION According to this invention, when driving a heat pump unit and a heater, the situation where the bubble which a heat heater produced adheres to a heat pump unit can be avoided, and it becomes possible to prevent the fall of heating efficiency.

It is a conceptual diagram for demonstrating a vacuum cleaning apparatus. It is a flowchart for demonstrating the process of a vacuum cleaning apparatus. It is a figure for demonstrating the heater and condenser concerning embodiment. It is a figure for demonstrating the heater, the condenser, and the partition plate concerning a modification.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(Vacuum cleaning device 100)
FIG. 1 is a conceptual diagram for explaining the vacuum cleaning apparatus 100. In FIG. 1, the flow of the hydrocarbon-based cleaning agent and the flow of the atmospheric gas in the cleaning chamber 102 are indicated by solid-line arrows, the flow of the heat medium is indicated by broken-line arrows, and the flow of signals is indicated by dashed-dotted arrows. As shown in FIG. 1, the vacuum cleaning apparatus 100 includes a vacuum container 104 in which a cleaning chamber 102 is provided. An opening 104 a is formed in the vacuum container 104, and the opening 104 a can be opened and closed by an opening / closing door 106. Therefore, when cleaning the workpiece W, the opening / closing door 106 is opened, the workpiece W is loaded into the cleaning chamber 102 from the opening 104a and placed on the mounting portion 108, and the opening / closing door 106 is closed to close the workpiece W. Then, the opening / closing door 106 is opened again, and the workpiece W is carried out from the opening 104a.

  In the cleaning chamber 102, a shower unit 110 is provided. The shower unit 110 is connected to the vapor chamber 200 through a condensed cleaning agent supply pipe 126, a cleaning agent storage unit 124, a condensed cleaning agent supply pipe 122, a condensation chamber 120, and a vapor supply pipe 114 in this order. The cleaning chamber 102 is provided with a steam supply unit 130. The steam supply unit 130 is communicated with the steam chamber 200 via the steam supply pipe 114.

  The steam chamber 200 includes a heater 202 and a condenser (first heat exchange unit) 340, and heats the hydrocarbon-based cleaning agent (solvent) to, for example, about 80 ° C to 140 ° C, preferably about 120 ° C. Thus, a hydrocarbon-based cleaning agent vapor (hereinafter simply referred to as “steam”) is generated. The steam generated in the steam chamber 200 is introduced into the condensation chamber 120 via the steam supply pipe 114 or supplied to the cleaning chamber 102 through the steam supply unit 130. The steam supplied by the steam supply unit 130 is condensed by adhering to the workpiece W. The heating mechanism by the condenser 340 will be described in detail later.

  The type of the hydrocarbon-based cleaning agent is not particularly limited, but it is desirable to use a third petroleum cleaning agent from the viewpoint of safety. For example, normal paraffinic, isoparaffinic, naphthenic, aromatic These hydrocarbon-based cleaning agents are listed. Specifically, Teclean N20, Clean Sol G, Daphne (registered trademark) solvent or the like called a cleaning solvent may be used as a cleaning agent for third petroleums.

  The condensing chamber 120 includes an evaporator (second heat exchanging unit) 320, and the vapor introduced into the condensing chamber 120 is cooled by the evaporator 320 to be a liquid hydrocarbon-based cleaning agent (hereinafter simply referred to as “ Condensed to a “condensed detergent”. The condensed cleaning agent is stored in the cleaning agent storage unit 124 through the condensed cleaning agent supply pipe 122 and then supplied to the cleaning chamber 102 through the condensed cleaning agent supply pipe 126 and the shower unit 110. It becomes. The cooling mechanism by the evaporator 320 will be described in detail later.

  Then, a condensed cleaning agent supplied from the shower unit 110 and cleaning the workpiece W, or a condensed cleaning agent supplied from the steam supply unit 130 and condensed in the workpiece W (hereinafter simply referred to as “used cleaning agent”). Is introduced again into the steam chamber 200 through the used cleaning agent introduction pipe 128 and is heated by the above-described heater 202 and condenser 340 to become steam. Thus, the hydrocarbon-based cleaning agent includes the steam chamber 200, the steam supply pipe 114, the condensation chamber 120, the condensed cleaning agent supply pipe 122, the cleaning agent storage section 124, the condensed cleaning agent supply pipe 126, the shower section 110, and the cleaning chamber. 102, the used cleaning agent introduction pipe 128 is circulated.

  A vacuum pump 150 is connected to the cleaning chamber 102. The vacuum pump 150 depressurizes the inside of the vacuum vessel 104 (cleaning chamber 102) to a predetermined pressure (for example, 6 kPa) by evacuation (initial vacuum) in a depressurization step before starting the cleaning of the workpiece W. Is. Further, a pipe (not shown) for opening the cleaning chamber 102 to the atmosphere is connected to the cleaning chamber 102. This piping is provided with an air release valve that shuts off the atmosphere and the cleaning chamber 102, and the cleaning chamber 102 is opened to the atmospheric pressure in the unloading process after the cleaning process and the drying process of the workpiece W are completed. It is to return to.

(Heat pump unit 300)
The heat pump unit 300 includes a circulation path 310 (indicated by 310a to 310f in FIG. 1), an evaporator 320, a compressor 330, a condenser 340, a liquid receiver 350, an intermediate heat exchanger 360, a reduced pressure Part 370. In the heat pump unit 300, the heat medium circulates in the circulation path 310, as shown by the dashed arrows in FIG. 1, and an evaporator 320, an intermediate heat exchanger 360, a compressor 330 provided in the circulation path 310, It is reintroduced into the evaporator 320 through the condenser 340, the liquid receiver 350, the intermediate heat exchanger 360, and the decompressor 370. The type of the heat medium is not particularly limited, but is a CFC-based heat medium (for example, R-245fa (1) that is liquid at normal temperature and atmospheric pressure and can use the latent heat of the heat medium in the evaporator 320. 1,1,3,3-pentafluoropropane)). Here, the normal temperature is, for example, 25 ° C.

  The evaporator (second heat exchange unit) 320 is disposed downstream of the decompression unit 370 in the circulation path 310, and in the condensation chamber 120, the heat medium and the hydrocarbon-based cleaning agent vapor introduced from the steam chamber 200. By performing heat exchange, the vapor is condensed (cooled) to form a condensed cleaning agent, and the heat medium is heated and vaporized. Here, when heated by the evaporator 320, the heat medium becomes a gas (indicated by G in FIG. 1). The heat medium heated by the evaporator 320 is further heated by the intermediate heat exchanger 360. The heating mechanism by the intermediate heat exchanger 360 will be described in detail later.

  The compressor 330 adiabatically compresses the heat medium heated by the intermediate heat exchanger 360 and further heats it.

  The condenser (first heat exchanging unit) 340 is disposed downstream of the compressor 330 in the circulation path 310, and includes a heat medium heated by the compressor 330 and a liquid hydrocarbon-based cleaning agent in the vapor chamber 200. By performing heat exchange, the hydrocarbon-based cleaning agent is heated to generate steam, and the heat medium is cooled and condensed. Here, by being cooled by the condenser 340, the heat medium becomes a liquid state (indicated by L in FIG. 1).

  The liquid receiving unit 350 is disposed between the condenser 340 and the decompression unit 370 (here, between the condenser 340 and the intermediate heat exchanger 360) in the circulation path 310, and is cooled by the condenser 340. A liquid heat medium is temporarily stored.

  The intermediate heat exchanger 360 circulates through a heat medium that circulates in the circulation paths 310a and 310b (between the evaporator 320 and the compressor 330) and in the circulation paths 310d and 310e (between the liquid receiving unit 350 and the decompression unit 370). Exchanges heat with the heat medium. The heat medium heated by the evaporator 320 and flowing through the circulation path 310a may not be completely vaporized but may be a gas-liquid mixed fluid. In this case, if the heat medium in the liquid state is introduced into the compressor 330, there is a possibility that a malfunction may occur in the compressor 330.

  Therefore, the configuration including the intermediate heat exchanger 360 heats the heat medium flowing through the circulation path 310a to a temperature higher than the saturation temperature, thereby circulating the heat medium introduced into the compressor 330 (circulating through the circulation path 310b). It is possible to ensure that the heat medium is only gas. Thereby, the situation where a malfunction arises in the compressor 330 can be avoided.

  The decompression unit 370 is constituted by, for example, an expansion valve that is a valve that causes a pressure drop of the fluid. The decompression unit 370 is provided downstream of the condenser 340 and decompresses and expands the heat medium condensed (cooled) by the condenser 340 for further cooling. To do. If it does so, the heat carrier which distribute | circulates the downstream of the pressure reduction part 370 will be in a gas-liquid mixing state (it shows with G and L in FIG. 1). Then, the heat medium cooled in the decompression unit 370 is again introduced into the evaporator 320 through the circulation path 310f.

(Vacuum cleaning method)
Next, a vacuum cleaning method for the workpiece W in the vacuum cleaning apparatus 100 will be described with reference to FIGS. 1 and 2. FIG. 2 is a flowchart for explaining the processing steps of the vacuum cleaning apparatus 100.

  In using the vacuum cleaning apparatus 100, first, the preparation process (step S110) is performed once, and then, for one workpiece W, a carry-in process (step S120), a decompression process (step S130), and a steam cleaning process. (Step S140), a shower cleaning process (Step S150), a drying process (Step S160), and an unloading process (Step S170) are performed. Thereafter, steps S120 to S170 are performed on the workpieces W that are sequentially loaded. Hereinafter, the respective steps will be described with reference to FIG.

(Preparation step S110)
First, when the vacuum cleaning apparatus 100 is operated, the open / close door 106 is closed to shut off the inside of the vacuum vessel 104 from the outside. Next, the vacuum pump 150 is driven, and the cleaning chamber 102 is decompressed to, for example, 10 kPa or less by evacuation. When the cleaning chamber 102 is depressurized to a desired pressure in this way, the atmosphere release valve is opened to open the cleaning chamber 102 to the atmosphere. Subsequently, the heater 202 and the heat pump unit 300 are driven, and the hydrocarbon-based cleaning agent stored in the steam chamber 200 is heated to generate steam. Then, the steam generated in the steam chamber 200 is introduced into the condensation chamber 120, cooled by the evaporator 320, condensed into the condensed cleaning agent, and stored in the cleaning agent storage unit 124. The heat recovered by the evaporator 320 in the condensing chamber 120 is used in the condenser 340, and the hydrocarbon-based cleaning agent is heated in the steam chamber 200 to generate steam. Thus, the preparation step S110 of the vacuum cleaning apparatus 100 is completed, and the workpiece W can be cleaned by the vacuum cleaning apparatus 100.

(Import process S120)
When the workpiece W is cleaned by the vacuum cleaning apparatus 100, first, the open / close door 106 is opened, and the workpiece W is loaded into the cleaning chamber 102 through the opening 104a and placed on the placement unit 108. When the loading of the workpiece W is completed, the opening / closing door 106 is closed and the cleaning chamber 102 is sealed. In addition, the temperature of the workpiece | work W is normal temperature (about 15 to 40 degreeC) at this time.

(Decompression step S130)
Next, the vacuum pump 150 is driven to depressurize the cleaning chamber 102 to 10 kPa or less by evacuation.

(Steam cleaning step S140)
Next, the steam supply unit 130 supplies the steam generated in the steam chamber 200 to the cleaning chamber 102. At this time, the temperature of the steam is controlled to 80 ° C. to 140 ° C., and the high temperature steam fills the cleaning chamber 102.

  When the vapor supplied to the cleaning chamber 102 adheres to the surface of the workpiece W, the temperature of the workpiece W is lower than the temperature of the vapor, so that the vapor is condensed on the surface of the workpiece W and adheres to the surface of the workpiece W. The oils and fats are dissolved and flowed down by the condensed hydrocarbon cleaning agent, and the workpiece W is cleaned. This steam cleaning step S140 is performed until the temperature of the work W reaches 80 ° C. to 140 ° C., which is the temperature of the steam (boiling point of the hydrocarbon-based cleaning agent), and the temperature of the work W reaches the temperature of the steam. Then, the steam cleaning step S140 is completed.

(Shower cleaning step S150)
When the steam cleaning step S140 is completed, the shower unit 110 injects the condensed cleaning agent stored in the cleaning agent storage unit 124 onto the workpiece W. In this way, oils and fats and the like adhering to the details of the workpiece W that could not be cleaned in the steam cleaning step S140 are cleaned.

(Drying step S160)
When the shower cleaning step S150 is completed, a drying step S160 for drying the hydrocarbon-based cleaning agent adhering to the workpiece W at the time of cleaning is then performed. This drying step S160 is performed by driving the vacuum pump 150.

(Unloading step S170)
As described above, when the drying of the cleaning chamber 102 and the workpiece W is completed, the atmosphere release valve is opened to release the cleaning chamber 102 to the atmosphere. Then, the workpiece W is unloaded from the opening 104a, and all the processes for the workpiece W are completed.

  As described above, according to the vacuum cleaning apparatus 100 and the vacuum cleaning method using the same according to the present embodiment, the configuration including the heat pump unit 300 can improve the thermal efficiency and clean the workpiece W. .

  Further, in the heat pump unit 300 constituting the vacuum cleaning apparatus 100, the heat medium circulates through the evaporator 320, the compressor 330, the condenser 340, the liquid receiving unit 350, and the decompression unit 370 and is vaporized in the evaporator 320. It will be condensed in the condenser 340. That is, a liquid heat medium is introduced into the evaporator 320, and the liquid heat medium is vaporized by exchanging heat with the vapor in the evaporator 320. In addition, a gaseous heat medium is introduced into the condenser 340, and the heat medium in the gaseous state is condensed by exchanging heat with a used cleaning agent (hydrocarbon cleaning agent) in the condenser 340.

  Here, when increasing the production amount of steam, it is dealt with by increasing the circulation amount of the heat medium circulating in the circulation path 310. However, since the upper limit value of the heating capacity of the condenser 340 is physically determined by the heat transfer area of the condenser 340 (area where heat is exchanged between the heated heat medium and the used cleaning agent), generation of steam There is a limit to the amount. Specifically, in the steam chamber 200, when the amount of steam generated that is equal to or higher than the upper limit value of the heating capacity of the condenser 340 is required, even if the amount of circulation of the heat medium is increased, The heat exchange between the heat medium and the used cleaning agent cannot catch up, and steam cannot be generated beyond the upper limit of the heating capacity of the condenser 340.

  Therefore, the vacuum cleaning apparatus 100 according to the present embodiment includes the heater 202, and in addition to the heat pump unit 300, when the generation of steam is required to exceed the upper limit value of the heating capacity of the condenser 340, the heating is performed. A large amount of steam is generated by driving the heater 202.

  3A and 3B are diagrams for explaining the heater 202 and the condenser 340 according to the present embodiment. FIG. 3A is a perspective view of the steam chamber 200, and FIG. 3B is FIG. ) Is an XZ sectional view taken along line IIIb-IIIb, and FIG. 3C is a view for explaining the heater 202 and the condenser 340 when the partition plate 250 is not provided. In FIG. 3 of the present embodiment, the X axis (horizontal direction), the Y axis (horizontal direction), and the Z axis (vertical direction) that intersect perpendicularly are defined as illustrated.

  As shown in FIG. 3A, for the purpose of reducing the size of the vacuum cleaning apparatus 100, the heater 202 and the condenser 340 are disposed in the vicinity of the vapor chamber 200. However, here, a case where the vertical positions of the heater 202 and the condenser 340 are substantially equal is taken as an example. Therefore, when the heater 202 and the condenser 340 are driven, vapor bubbles (shown by black circles in FIG. 3) generated by heating by the heater 202 are generated in the condenser 340 as shown in FIG. Vapor bubbles (shown by white circles in FIG. 3) attached and heated by the condenser 340 adhere to the heater 202.

  Then, the attached bubbles function as a heat insulating material, the contact area (heat transfer area) between the heater 202 and the used cleaning agent (hydrocarbon cleaning agent), and the contact area between the condenser 340 and the used cleaning agent. (Heat transfer area) is reduced.

  Here, even if the heat transfer area of the heater 202 is reduced, there is no problem because the heating capacity is determined by the power supplied to the heater 202.

  On the other hand, as described above, the upper limit value of the heating capacity of the condenser 340 is physically determined by the heat transfer area of the condenser 340 (area where heat is exchanged between the heated heat medium and the used cleaning agent). Therefore, when the heat transfer area of the condenser 340 is reduced, the heating capacity (heat exchange capacity) cannot be further improved. Further, when the heat transfer area of the condenser 340 is reduced, the cooling capacity of the heat medium is also reduced, so that the evaporator 320 cannot sufficiently exhibit the steam cooling capacity, and the condensation cleaning generated in the condensation chamber 120 is performed. The production amount of the agent is reduced.

  Therefore, as shown in FIGS. 3A and 3B, in this embodiment, a partition plate 250 is provided between the heater 202 and the condenser 340.

  Thereby, it is possible to suppress the vapor bubbles generated when the heater 202 heats the used cleaning agent (hydrocarbon cleaning agent) from adhering to the condenser 340. Therefore, even if the condenser 340 and the heater 202 are driven in parallel, a situation in which the heating efficiency of the condenser 340 is reduced can be avoided, and a reduction in the amount of generated steam can be prevented. It becomes possible.

  Here, the upper end 250 a of the partition plate 250 is disposed above the upper end 340 a of the condenser 340, and the lower end 250 b of the partition plate 250 may extend to the lower end 202 b of the heater 202. Since the bubbles move upward, the partition plate 250 is configured in this manner, so that the vapor bubbles generated by the heater 202 are surely prevented from adhering to the condenser 340 even if the vapor plates get over the partition plate 250. It becomes possible to do.

  Further, the lower end 250b of the partition plate 250 may not be extended below the lower end 202b of the heater 202. This is also because the bubbles move upward. Further, when the lower end 250b of the partition plate 250 is extended below the lower end 202b of the heater 202, the convection of the heated used cleaning agent in the steam chamber 200 is hindered and affects the vaporization efficiency of the used cleaning agent. It is because there is a possibility of giving.

  As described above, according to the vacuum cleaning apparatus 100 according to the present embodiment, when the condenser 340 (heat pump unit 300) and the heater 202 are driven, bubbles generated in the heater 202 adhere to the condenser 340. It is possible to avoid such a situation, and it is possible to prevent a decrease in heating efficiency.

(Modification 1)
FIG. 4 is a diagram for explaining a heater 202, a condenser 340, and a partition plate 250 according to a modification. In the above embodiment, the case where the heater 202 and the condenser 340 are substantially equal in position in the vertical direction has been described as an example. However, the heater 202 and the condenser 340 have different vertical positions. Also good. For example, as shown in FIG. 4A, even if the condenser 340 is disposed above the heater 202, the partition plate 250 is disposed between the heater 202 and the condenser 340. In addition, it is possible to avoid a situation in which bubbles generated in the heater 202 adhere to the condenser 340, and it is possible to prevent a decrease in heating efficiency.

  Further, as shown in FIG. 4B, even when the condenser 340 is below the heater 202, the partition plate 250 is arranged between the heater 202 and the condenser 340, It is possible to avoid a situation in which the bubbles generated in step 1 adhere to the other, and it is possible to prevent a decrease in heating efficiency. In this case, the upper end 250a of the partition plate 250 is preferably disposed above the upper end 202a of the heater 202. Further, the lower end 250b of the partition plate 250 may not be extended below the lower end 340b of the condenser 340.

  Further, when the condenser 340 is located below the heater 202, the lower end 250 b of the partition plate 250 may not be extended below the lower end 202 b of the heater 202. As a result, it is possible to avoid a situation where at least bubbles generated in the heater 202 adhere to the condenser 340.

(Modification 2)
Further, without providing the partition plate 250, it is possible to avoid a situation in which bubbles generated in the heater 202 adhere to the condenser 340 only by devising the layout of the heater 202 and the condenser 340. It becomes. Specifically, as shown in FIG. 4C, by providing the heater 202 above the condenser 340, specifically, the lower end 202b of the heater 202 is higher than the upper end 340a of the condenser 340. Provide to be.

  As described above, when bubbles are attached to the condenser 340 and the heat transfer area is reduced, there is no way to improve the heating capacity. Therefore, by providing the heater 202 above the condenser 340, it is possible to avoid a situation where bubbles generated in the heater 202 adhere to the condenser 340.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  For example, in the above-described embodiment, the vacuum cleaning apparatus 100 in which the cleaning with the condensed cleaning agent supplied from the shower unit 110 and the cleaning with the vapor supplied from the vapor supply unit 130 are performed in the cleaning chamber 102 has been described. However, for example, an immersion chamber may be provided in the vacuum container 104 below the cleaning chamber 102, and the workpiece W may be cleaned by immersing the workpiece W in the immersion chamber.

  Specifically, in the immersion chamber, an amount of hydrocarbon-based cleaning agent (liquid) that can completely immerse the workpiece W is stored, and a heater for heating the hydrocarbon-based cleaning agent is provided. ing. Further, an intermediate door is provided between the cleaning chamber 102 and the immersion chamber, and the intermediate door allows the cleaning chamber 102 and the immersion chamber to communicate with each other or the communication to be interrupted. . Note that the hydrocarbon-based cleaning agent stored in the immersion chamber includes the condensed cleaning agent supplied from the shower unit 110 and the condensed cleaning agent supplied from the cleaning agent storage unit 124 via the condensed cleaning agent supply pipe 126. Either one or both. Further, in this case, an elevating device is provided in the placement unit 108, and the placement unit 108 is configured to be movable in the vertical direction. Therefore, the workpiece W is moved from the cleaning chamber 102 to the immersion chamber by driving the lifting device in a state where the intermediate door is opened and the cleaning chamber 102 and the immersion chamber are communicated, or the workpiece W is moved to the immersion chamber. The workpiece W is cleaned by moving it to the cleaning chamber 102.

  In addition, each process of the vacuum cleaning method of this specification does not necessarily need to process in time series along the order described as a flowchart.

  INDUSTRIAL APPLICABILITY The present invention can be used for a vacuum cleaning apparatus that supplies a hydrocarbon-based cleaning agent vapor to a cleaning chamber under reduced pressure to clean a workpiece.

DESCRIPTION OF SYMBOLS 100 Vacuum cleaning apparatus 102 Cleaning chamber 120 Condensing chamber 200 Steam chamber 202 Heater 300 Heat pump unit 310 Circulation path 320 Evaporator (2nd heat exchange part)
330 Compressor 340 Condenser (first heat exchange part)
370 Decompression unit 250 Partition plate

Claims (3)

A steam chamber in which a hydrocarbon-based cleaning agent steam is generated;
A condensing chamber in which steam introduced from the steam chamber is condensed to produce a hydrocarbon-based cleaning agent;
A cleaning chamber capable of cleaning a workpiece under reduced pressure by a condensed hydrocarbon-based cleaning agent supplied from at least the condensation chamber;
In the circulation path through which the heat medium circulates, the heat medium is adiabatically compressed and heated, and the heat medium heated by the compressor and the hydrocarbon-based cleaning agent in the steam chamber are subjected to heat exchange. A first heat exchanging unit that vaporizes the hydrocarbon-based cleaning agent to generate the steam and cools the heat medium, and a decompression unit that further cools the heat medium cooled by the first heat exchanging unit by decompressing and expanding the heat medium Heat exchange between the heat medium cooled by the decompression unit and the steam in the condensation chamber to condense the steam to produce the hydrocarbon-based cleaning agent and to heat the heat medium. A heat pump unit having a portion;
A heater that heats the hydrocarbon-based cleaning agent in the steam chamber together with the first heat exchange unit by electric power, vaporizes the hydrocarbon-based cleaning agent, and generates the steam;
Provided between the first heat exchanging portion and the heater, the vapor bubbles generated by heating the hydrocarbon-based cleaning agent by the heater are attached to the first heat exchanging portion. A partition plate to suppress,
A vacuum cleaning apparatus comprising:   The vacuum cleaning apparatus according to claim 1, wherein the heater is provided above the first heat exchange unit. A steam chamber in which a hydrocarbon-based cleaning agent steam is generated;
A condensing chamber in which steam introduced from the steam chamber is condensed to produce a hydrocarbon-based cleaning agent;
A cleaning chamber capable of cleaning a workpiece under reduced pressure by a condensed hydrocarbon-based cleaning agent supplied from at least the condensation chamber;
In the circulation path through which the heat medium circulates, the heat medium is adiabatically compressed and heated, and the heat medium heated by the compressor and the hydrocarbon-based cleaning agent in the steam chamber are subjected to heat exchange. A first heat exchanging unit that vaporizes the hydrocarbon-based cleaning agent to generate the steam and cools the heat medium, and a decompression unit that further cools the heat medium cooled by the first heat exchanging unit by decompressing and expanding the heat medium Heat exchange between the heat medium cooled by the decompression unit and the steam in the condensation chamber to condense the steam to produce the hydrocarbon-based cleaning agent and to heat the heat medium. A heat pump unit having a portion;
The hydrocarbon-based cleaning agent in the steam chamber is heated together with the first heat-exchange unit by means of electric power, provided above the first heat-exchange unit, and the steam is generated by vaporizing the hydrocarbon-based cleaning agent. Heating heaters,
A vacuum cleaning apparatus comprising:

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