JP2015014753A5 - - Google Patents

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Publication number
JP2015014753A5
JP2015014753A5 JP2013142652A JP2013142652A JP2015014753A5 JP 2015014753 A5 JP2015014753 A5 JP 2015014753A5 JP 2013142652 A JP2013142652 A JP 2013142652A JP 2013142652 A JP2013142652 A JP 2013142652A JP 2015014753 A5 JP2015014753 A5 JP 2015014753A5
Authority
JP
Japan
Prior art keywords
torsion bar
rib
flat surface
plane
motomeko
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013142652A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015014753A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013142652A priority Critical patent/JP2015014753A/ja
Priority claimed from JP2013142652A external-priority patent/JP2015014753A/ja
Publication of JP2015014753A publication Critical patent/JP2015014753A/ja
Publication of JP2015014753A5 publication Critical patent/JP2015014753A5/ja
Pending legal-status Critical Current

Links

JP2013142652A 2013-07-08 2013-07-08 アクチュエータ Pending JP2015014753A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013142652A JP2015014753A (ja) 2013-07-08 2013-07-08 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013142652A JP2015014753A (ja) 2013-07-08 2013-07-08 アクチュエータ

Publications (2)

Publication Number Publication Date
JP2015014753A JP2015014753A (ja) 2015-01-22
JP2015014753A5 true JP2015014753A5 (cg-RX-API-DMAC10.html) 2016-09-08

Family

ID=52436491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013142652A Pending JP2015014753A (ja) 2013-07-08 2013-07-08 アクチュエータ

Country Status (1)

Country Link
JP (1) JP2015014753A (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015004710A1 (ja) * 2013-07-08 2015-01-15 パイオニア株式会社 アクチュエータ
US11906727B2 (en) * 2017-11-15 2024-02-20 Hamamatsu Photonics K.K. Optical device production method
JP6966954B2 (ja) * 2018-02-21 2021-11-17 スタンレー電気株式会社 光偏向器
JP7193719B2 (ja) * 2018-12-21 2022-12-21 ミツミ電機株式会社 光走査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090091610A (ko) * 2008-02-25 2009-08-28 삼성전자주식회사 멤스 미러 및 이를 채용한 스캐닝 액츄에이터
JP5842467B2 (ja) * 2010-11-16 2016-01-13 株式会社リコー アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置
JP5413442B2 (ja) * 2011-12-09 2014-02-12 富士通株式会社 マイクロ揺動素子
JP6049364B2 (ja) * 2012-09-11 2016-12-21 スタンレー電気株式会社 光偏向器

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