JP2015014753A5 - - Google Patents
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- JP2015014753A5 JP2015014753A5 JP2013142652A JP2013142652A JP2015014753A5 JP 2015014753 A5 JP2015014753 A5 JP 2015014753A5 JP 2013142652 A JP2013142652 A JP 2013142652A JP 2013142652 A JP2013142652 A JP 2013142652A JP 2015014753 A5 JP2015014753 A5 JP 2015014753A5
- Authority
- JP
- Japan
- Prior art keywords
- torsion bar
- rib
- flat surface
- plane
- motomeko
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000614 Ribs Anatomy 0.000 claims description 13
- 230000000875 corresponding Effects 0.000 claims description 3
- 230000002093 peripheral Effects 0.000 claims 1
Description
本発明のアクチュエータは、上記課題を解決するために、一の平面上に反射部が形成された可動部と、前記可動部を、回転軸を中心として揺動可能に、支持部に接続するトーションバーと、前記一の平面とは反対側の他の平面に形成され、前記可動部の平坦性を維持する一以上のリブと、を備え、前記一以上のリブに含まれる第1リブは、前記他の平面上の、前記反射部の外縁と前記トーションバーとの間に対応する領域に形成されており、前記第1リブの前記トーションバー側の側面は、前記他の平面上で平面的に見て、前記反射部側に凸となるように湾曲している。 The actuator of the present invention, in order to solve the above problems, a movable portion reflecting portion is formed on one plane, the movable portion swingably about an axis of rotation, is connected to the support portion torsion A bar and one or more ribs formed on another plane opposite to the one plane and maintaining the flatness of the movable part, and the first rib included in the one or more ribs includes: on the other flat surface, the is formed in a corresponding region between the outer edge of the reflective portion and the torsion bar, the side surface of said torsion bar side of the first rib on the said other flat surface In plan view, it is curved so as to be convex toward the reflecting portion.
Claims (5)
前記可動部を、回転軸を中心として揺動可能に、支持部に接続するトーションバーと、
前記一の平面とは反対側の他の平面に形成され、前記可動部の平坦性を維持する一以上のリブと、
を備え、
前記一以上のリブに含まれる第1リブは、前記他の平面上の、前記反射部の外縁と前記トーションバーとの間に対応する領域に形成されており、
前記第1リブの前記トーションバー側の側面は、前記他の平面上で平面的に見て、前記反射部側に凸となるように湾曲している
アクチュエータ。 A movable part having a reflective part formed on one plane;
The movable portion swingably about an axis of rotation, and a torsion bar connected to the support part,
One or more ribs formed on another plane opposite to the one plane and maintaining the flatness of the movable part;
With
First rib included in the one or more ribs, on the other flat surface, it is formed in a corresponding region between the outer edge and the torsion bar of the reflective portion,
Side of the torsion bar side of the first rib, in plan view of the other flat surface is curved to be convex to the reflective portion
Actuators.
前記第1リブの一部は、前記突出部分上に延伸するように前記他の平面上に形成されている
請求項1乃至3のいずれか一項に記載のアクチュエータ。 Said movable part is in the vicinity of the connection portion between the torsion bar and the movable portion, as compared to the peripheral portion, along the other flat surface, it has a projecting portion projecting toward the outside of the movable portion ,
A portion of the first rib is the formed on the other flat surface on so as to extend over the protruding portion
The actuator according to any one of 請 Motomeko 1 to 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013142652A JP2015014753A (en) | 2013-07-08 | 2013-07-08 | Actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013142652A JP2015014753A (en) | 2013-07-08 | 2013-07-08 | Actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015014753A JP2015014753A (en) | 2015-01-22 |
JP2015014753A5 true JP2015014753A5 (en) | 2016-09-08 |
Family
ID=52436491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013142652A Pending JP2015014753A (en) | 2013-07-08 | 2013-07-08 | Actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2015014753A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3021155B1 (en) * | 2013-07-08 | 2018-04-11 | Pioneer Corporation | Actuator |
JP6966954B2 (en) * | 2018-02-21 | 2021-11-17 | スタンレー電気株式会社 | Light deflector |
JP7193719B2 (en) * | 2018-12-21 | 2022-12-21 | ミツミ電機株式会社 | optical scanner |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090091610A (en) * | 2008-02-25 | 2009-08-28 | 삼성전자주식회사 | Mems mirror and scanning actuator employing the same |
JP5842467B2 (en) * | 2010-11-16 | 2016-01-13 | 株式会社リコー | Actuator device, protective cover for the actuator device, method for manufacturing the actuator, light deflection device using the actuator device, two-dimensional optical scanning device, and image projection device using the same |
JP5413442B2 (en) * | 2011-12-09 | 2014-02-12 | 富士通株式会社 | Micro oscillating device |
JP6049364B2 (en) * | 2012-09-11 | 2016-12-21 | スタンレー電気株式会社 | Optical deflector |
-
2013
- 2013-07-08 JP JP2013142652A patent/JP2015014753A/en active Pending
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