JP2015014753A5 - - Google Patents

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Publication number
JP2015014753A5
JP2015014753A5 JP2013142652A JP2013142652A JP2015014753A5 JP 2015014753 A5 JP2015014753 A5 JP 2015014753A5 JP 2013142652 A JP2013142652 A JP 2013142652A JP 2013142652 A JP2013142652 A JP 2013142652A JP 2015014753 A5 JP2015014753 A5 JP 2015014753A5
Authority
JP
Japan
Prior art keywords
torsion bar
rib
flat surface
plane
motomeko
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013142652A
Other languages
Japanese (ja)
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JP2015014753A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2013142652A priority Critical patent/JP2015014753A/en
Priority claimed from JP2013142652A external-priority patent/JP2015014753A/en
Publication of JP2015014753A publication Critical patent/JP2015014753A/en
Publication of JP2015014753A5 publication Critical patent/JP2015014753A5/ja
Pending legal-status Critical Current

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Description

本発明のアクチュエータは、上記課題を解決するために、一の平面上に反射部が形成された可動部と、前記可動部を、回転軸を中心として揺動可能に、支持部に接続するトーションバーと、前記一の平面とは反対側の他の平面に形成され、前記可動部の平坦性を維持する一以上のリブと、を備え、前記一以上のリブに含まれる第1リブは、前記他の面上の、前記反射部の外縁と前記トーションバーとの間に対応する領域に形成されており、前記第1リブの前記トーションバー側の側面は、前記他の面上で平面的に見て、前記反射部側に凸となるように湾曲している。 The actuator of the present invention, in order to solve the above problems, a movable portion reflecting portion is formed on one plane, the movable portion swingably about an axis of rotation, is connected to the support portion torsion A bar and one or more ribs formed on another plane opposite to the one plane and maintaining the flatness of the movable part, and the first rib included in the one or more ribs includes: on the other flat surface, the is formed in a corresponding region between the outer edge of the reflective portion and the torsion bar, the side surface of said torsion bar side of the first rib on the said other flat surface In plan view, it is curved so as to be convex toward the reflecting portion.

Claims (5)

一の平面上に反射部が形成された可動部と、
前記可動部を、回転軸を中心として揺動可能に、支持部に接続するトーションバーと、
前記一の平面とは反対側の他の平面に形成され、前記可動部の平坦性を維持する一以上のリブと、
を備え、
前記一以上のリブに含まれる第1リブは、前記他の面上の、前記反射部の外縁と前記トーションバーとの間に対応する領域に形成されており、
前記第1リブの前記トーションバー側の側面は、前記他の面上で平面的に見て、前記反射部側に凸となるように湾曲している
クチュエータ。
A movable part having a reflective part formed on one plane;
The movable portion swingably about an axis of rotation, and a torsion bar connected to the support part,
One or more ribs formed on another plane opposite to the one plane and maintaining the flatness of the movable part;
With
First rib included in the one or more ribs, on the other flat surface, it is formed in a corresponding region between the outer edge and the torsion bar of the reflective portion,
Side of the torsion bar side of the first rib, in plan view of the other flat surface is curved to be convex to the reflective portion
Actuators.
前記他の面上で平面的に見て、前記第1リブの前記トーションバー側の側面は、前記回転軸から離れた部分において凹である請求項1に記載のアクチュエータ。 The other when viewed in plan on the flat surface, the side surface of the torsion bar of the first rib, the actuator according to Motomeko 1 Ru concave der in portions remote from the axis of rotation. 前記他の面上で平面的に見て、前記第1リブの前記トーションバー側の側面は、前記回転軸近傍において前記トーションバー側に向かって凸である請求項1又は2に記載のアクチュエータ。 In plan view of the other flat surface, the side surface of the torsion bar of the first rib, according to Motomeko 1 or 2 Ru convex der toward the torsion bar side in the rotation axis near Actuator. 前記可動部は、前記トーションバーと前記可動部との接続部分の近傍において、周辺部分と比較して、前記他の面に沿って、当該可動部の外部に向かって突き出す突出部分を有し、
前記第1リブの一部は、前記突出部分上に延伸するように前記他の面上に形成されている
求項1乃至3のいずれか一項に記載のアクチュエータ。
Said movable part is in the vicinity of the connection portion between the torsion bar and the movable portion, as compared to the peripheral portion, along the other flat surface, it has a projecting portion projecting toward the outside of the movable portion ,
A portion of the first rib is the formed on the other flat surface on so as to extend over the protruding portion
The actuator according to any one of Motomeko 1 to 3.
前記他の平面上の、前記一の平面上の前記反射部が形成された領域に対応する領域に、前記一又は複数のリブに含まれる第2リブが形成されている請求項1乃至4のいずれか一項に記載のアクチュエータ。 Wherein on the other plane, a region corresponding to a region where the reflecting portion is formed on said one plane, Motomeko 1-4 second rib included in the one or more ribs that are formed The actuator according to any one of the above.
JP2013142652A 2013-07-08 2013-07-08 Actuator Pending JP2015014753A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013142652A JP2015014753A (en) 2013-07-08 2013-07-08 Actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013142652A JP2015014753A (en) 2013-07-08 2013-07-08 Actuator

Publications (2)

Publication Number Publication Date
JP2015014753A JP2015014753A (en) 2015-01-22
JP2015014753A5 true JP2015014753A5 (en) 2016-09-08

Family

ID=52436491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013142652A Pending JP2015014753A (en) 2013-07-08 2013-07-08 Actuator

Country Status (1)

Country Link
JP (1) JP2015014753A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3021155B1 (en) * 2013-07-08 2018-04-11 Pioneer Corporation Actuator
JP6966954B2 (en) * 2018-02-21 2021-11-17 スタンレー電気株式会社 Light deflector
JP7193719B2 (en) * 2018-12-21 2022-12-21 ミツミ電機株式会社 optical scanner

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090091610A (en) * 2008-02-25 2009-08-28 삼성전자주식회사 Mems mirror and scanning actuator employing the same
JP5842467B2 (en) * 2010-11-16 2016-01-13 株式会社リコー Actuator device, protective cover for the actuator device, method for manufacturing the actuator, light deflection device using the actuator device, two-dimensional optical scanning device, and image projection device using the same
JP5413442B2 (en) * 2011-12-09 2014-02-12 富士通株式会社 Micro oscillating device
JP6049364B2 (en) * 2012-09-11 2016-12-21 スタンレー電気株式会社 Optical deflector

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