JP2015007528A - Fluid heating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the circuit power factor to improve the facility efficiency in a fluid heating device which heats a fluid pipeline, in which a fluid flows, through energization to heat the fluid.SOLUTION: A linear flow passage R, in which a heated fluid flows, is formed in a flow passage formation body 2, and the flow passage formation body 2 is made of a conductive material. A fluid heating device 100 heats the flow passage formation body 2 through energization to heat the heated fluid. The fluid heating device 100 applies an alternating current to an area between a first power supply member 3 that is connected with one end side 2a of the flow passage of the flow passage formation body 2 and a second power supply member 4 that is connected with the other end side 2b of the flow passage of the flow passage formation body 2. The second power supply member 4 includes a cover body 43 which covers substantially an entire periphery of an outer peripheral surface in an area ranging from the other end side to the one side of the flow passage in the flow passage formation body 2. An end part of the cover body, which is located at the other side of the flow passage, is electrically connected with the flow passage formation body 2.

Description

  The present invention relates to a fluid heating apparatus.

  As a fluid heating device, as shown in Patent Document 1, there is a device that energizes and heats a hollow conductor tube and heats a fluid flowing inside the conductor tube to generate a heated fluid. In this fluid heating apparatus, an AC voltage is applied from the electrodes provided at both ends of the conductor tube, and an AC current flows through the side wall of the conductor tube, so that the conductor tube self-acts due to Joule heat generated by the internal resistance of the conductor tube. Fever. The fluid flowing through the conductor tube is heated by the self-heating of the conductor tube.

  However, when the AC voltage is applied to both ends of the conductor tube, there is a problem that a voltage drop occurs due to the inductance of the conductor tube, and the power factor of the circuit that applies the AC voltage to the conductor tube is reduced.

JP 2011-86443 A

  Accordingly, the present invention has been made to solve the above-mentioned problems all at once, and in a fluid heating apparatus that energizes and heats a flow path forming body through which a fluid flows, the circuit power factor is improved and the equipment efficiency is improved. The main intended task is to make it happen.

  That is, the fluid heating device according to the present invention is a fluid that heats the heated fluid flowing through the flow path by energizing and heating the flow path forming body made of a conductive material in which the flow path through which the heated fluid flows is formed. A heating device between a first power supply member connected to one end side of the flow path forming body and a second power supply member connected to the other end side of the flow path forming body The second power supply member has a covering that covers substantially the entire circumference of the outer peripheral surface on the one end side of the flow path from the other end side of the flow path forming body, The other end of the flow path on the other side of the covering is electrically connected to the flow path forming body.

  In such a case, since the current flowing through the flow path forming body and the current flowing through the second power supply member, particularly the covering body, are in opposite directions, the magnetic fluxes generated by the respective currents cancel each other, thereby forming the flow path. The reactance generated in the body can be reduced and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device can be improved. In addition, since the covering body covers almost the entire circumference of the outer peripheral surface from the other end side of the flow path forming body to the one end side of the flow path, the covering body also functions as a heat retaining member. It is possible to prevent a temperature drop of the flow path forming body and the heated fluid flowing inside the flow path forming body.

  In order to eject the heated fluid from the flow path forming body at a higher temperature, a fluid jet is provided in the flow path forming body on the other end side of the flow path with respect to the connecting portion with the covering body. It is desirable that In this case, since it can be directly ejected from the fluid ejection port provided in the flow path forming body, it is ejected as it is without lowering the temperature of the heated fluid heated inside the flow path forming body. Can do.

  It is desirable that the fluid ejection port is provided on the outer peripheral surface of the flow path forming body. If it is this, since the fluid ejection port is provided in the outer peripheral surface of the said flow-path formation body, the fluid heated in the outer peripheral direction of the said flow-path formation body can be ejected. Therefore, for example, the fluid to be heated can be directly ejected to an inner peripheral surface such as a deep hole having a bottom or a deep hole penetrating, and the inner peripheral surface of the deep hole or the deep hole is efficiently surface-modified. be able to. Here, the deep hole or the opening shape of the deep hole to be processed may be a circular shape, an oval shape, a polygonal shape, or the like, and is not limited to a specific opening shape. The deep hole or deep hole satisfies a relationship of d <L, where d is the maximum dimension of the opening shape and L is the depth dimension of the deep hole or the length dimension of the deep hole. It is. Furthermore, if the fluid ejection port is provided along the circumferential direction of the flow path forming body, the fluid heated in the outer circumferential direction of the flow path forming body can be ejected more efficiently. As an aspect in the case where the fluid ejection port is provided along the circumferential direction, for example, one fluid ejection port may extend along the circumferential direction of the flow path forming body, or a plurality of the fluid ejection ports. May be arranged along the circumferential direction of the flow path forming body.

  It is desirable that the flow path forming body is made of a conductive material having a higher electric resistance than the covering body. If it is this, since the said flow-path formation body can be heated more efficiently at the time of energizing heating, a to-be-heated fluid can be efficiently made into a high temperature state.

  The covering is preferably made of copper or brass. If it is this, by forming the said covering body with copper or brass with low electric resistance, it can prevent that the said covering body is heated by electricity supply, and can heat the said flow path formation body efficiently.

  It is desirable that the flow path forming body and the covering body each have a straight pipe shape, and the flow path forming body and the covering body are electrically connected by welding. If it is this, the structure of a flow-path formation body can be simplified. Further, the covering body can be easily disposed along the flow path direction of the flow path forming body, and the configuration of the covering body can be simplified.

  A plurality of fluid ejection nozzles are provided on the outer surface of the flow path forming body along the flow path direction, and the plurality of fluid ejection nozzles are externally attached to the covering body in correspondence with the plurality of fluid ejection nozzles. It is desirable that one or a plurality of through holes to be exposed to be formed. If this is the case, by providing a fluid ejection nozzle in the conductor tube, the heated fluid can be ejected into a predetermined ejection range defined by the fluid ejection nozzle. Here, the fluid ejection nozzle provided in the conductor tube is selected according to the application.

  Further, the flow path forming body and the covering body are a storage chamber such as a storage container for storing a heated fluid, or a processing chamber such as a processing container for processing an object to be processed by the heated fluid. It is desirable to be provided by being inserted into. If it is this, it can heat-retain or heat by accommodating the heated fluid in a storage chamber. In addition, an object to be processed can be processed in the processing chamber. At this time, it is desirable that a single-phase AC power source or a three-phase AC power source connected to the flow path forming body and the covering body is provided in a space different from the storage chamber or the processing chamber. In the present invention, since the flow path forming body functions as a superheated steam generation unit, the flow path forming body and the covering are provided by being inserted into a warming room or a processing room, and a single phase provided outside the warming room or the processing room. Power may be supplied from an AC power source or a three-phase AC power source, the piping configuration can be simplified, the thermal efficiency can be improved, and energy saving can be greatly contributed. Moreover, what is necessary is just to connect a thermal storage room or a processing room, and the space (for example, power supply room) in which the single-phase alternating current power supply or the three-phase alternating current power supply was installed, and can simplify the whole structure of a fluid heating apparatus. At the same time, the single-phase AC power source or the three-phase AC power source is not affected by the heat from the flow path forming body.

  It is desirable that an insulating member is provided between the flow path forming body and the covering body. If it is this, the said flow-path formation body and the said covering body can be insulated reliably, and the short circuit in parts other than a connection part can be prevented.

  An insulating member made of a ceramic material that covers an outer peripheral surface on the other end side of the flow path from the one end side of the flow path forming body to the other end side of the flow path is provided. It is desirable that the covering is formed by winding a metal foil from the outer peripheral surface to the outer peripheral surface of the insulating member. If it is this, since the said covering body can be comprised with thin metal foil, the whole fluid heating apparatus can be made into a small dimension. Further, since the insulating member is made of a heat-resistant ceramic material, the insulating property can be ensured even under high temperature conditions such as when high-temperature superheated steam is generated.

  It is desirable that an outer insulating member made of a ceramic material that covers substantially the entire circumference of the outer peripheral surface of the covering is provided. If this is the case, it is possible to prevent the leakage from the covering to the outside even when the installation object for installing the fluid heating device is made of a conductive member or becomes conductive by the jetted heated fluid. Can do. Further, since the insulating member is made of a heat-resistant ceramic material, the insulating property can be ensured even under high temperature conditions such as when high-temperature superheated steam is generated.

  It is desirable that the fluid to be heated flowing into the flow path forming body is saturated steam or superheated steam, and the fluid flowing out from the flow path forming body is superheated steam.

  According to the present invention configured as described above, in the fluid heating apparatus that energizes and heats the flow path forming body through which the fluid flows, the circuit power factor can be improved and the equipment efficiency can be improved.

The figure which shows typically the structure of the fluid heating apparatus which concerns on this embodiment. The 6th page figure and enlarged view which show the example of a design of the flow-path formation body of the embodiment. The figure which shows typically the structure of the fluid heating apparatus which concerns on deformation | transformation embodiment. The figure which shows typically the structure of the fluid heating apparatus which concerns on deformation | transformation embodiment. The figure which shows typically the structure of the fluid heating apparatus which concerns on deformation | transformation embodiment. The figure which shows typically the structure of the fluid heating apparatus which concerns on deformation | transformation embodiment. The figure which shows typically the structure of the fluid heating apparatus which concerns on deformation | transformation embodiment. The 6th page figure which shows the example of a design of the flow-path formation body which concerns on deformation | transformation embodiment.

  Hereinafter, an embodiment of a fluid heating device according to the present invention will be described with reference to the drawings.

  As shown in FIG. 1, the fluid heating apparatus 100 according to the present embodiment directly applies an AC voltage to a flow path forming body 2 made of a conductive material in which a flow path R through which a fluid to be heated flows is formed. The heated fluid flowing through the flow path R is heated by energizing and heating the flow path forming body 2 by Joule heat generated by the internal resistance of the flow path forming body 2.

  The flow path forming body 2 of the present embodiment is formed of a substantially cylindrical straight tubular pipe made of a conductive material such as stainless steel. Thereby, the flow path R becomes a linear flow path.

  And the 1st electric power feeding member 3 made from, for example, copper is connected to the flow path one end 2a which is the flow path one end side of the flow path forming body 2, and from the first power feeding member 3 in the flow path forming body 2. Also, the second power supply member 4 made of, for example, copper is connected to the other end of the flow path. Then, by connecting an output terminal of the single-phase AC power supply 5 to the first power supply member 3 and the second power supply member 4, a flow path is formed via the first power supply member 3 and the second power supply member 4. A single-phase AC voltage is applied to the body 2.

  The first power supply member 3 includes a first electrode 31 connected to the flow path one end 2a of the flow path forming body 2, and one output terminal of the single-phase AC power supply 5 connected to the first electrode 31. And a first electric wire 32 connected to the. The first electrode 31 is wound around the outer peripheral surface of the flow path forming body 2 and connected by welding or the like.

  The second power supply member 4 includes a covering body 43 connected to the other end side of the flow path with respect to the first power supply member 3 in the flow path forming body 2 and a flow path on one end side of the flow path of the covering body 43. It consists of a second electrode 41 connected to one end 43a and a second electric wire 42 connected to the second electrode 41 and connected to the other output terminal of the single-phase AC power supply 5. The second electrode 41 is wound around the outer peripheral surface of the covering 43 and connected by welding or the like.

  Specifically, the covering 43 is formed of a substantially cylindrical straight tubular pipe made of a conductive material. Further, the covering body 43 covers substantially the entire circumference of the outer peripheral surface on the one end side of the flow path from the other end side of the flow path forming body 2 along the outer peripheral face of the flow path forming body 2. Here, the covering body 43 is larger in diameter than the flow path forming body 2 and is disposed coaxially with the flow path forming body 2. That is, the covering body 43 forms a so-called double tube structure together with the flow path forming body 2. Further, as shown in FIG. 1, the covering body 43 is electrically connected by welding to the outer peripheral surface of the flow path forming body 2 at the flow path other end side end portion 43 b.

  Here, the flow path forming body 2 of the present embodiment is formed of a conductive material having a higher electrical resistance than the first power supply member 3 and the second power supply member 4. Specifically, when the first power supply member 3 and the second power supply member 4 are made of copper or brass, the flow path forming body 2 has a higher electrical resistance than copper or brass. What is necessary is just to be formed with the material, for example, should just be formed with stainless steel, titanium, etc.

  In the present embodiment, the other end opening 2 z of the flow path forming body 2 communicating with the flow path R is closed by the closing member 23. And the flow-path formation body 2 of this embodiment is provided with the fluid ejection port 22 in the flow-path other-end part 2b which is a flow-path other end side rather than the connection part with the coating | coated body 43. FIG. The fluid ejection port 22 of the present embodiment is configured by one or a plurality of slits 22 extending in a direction orthogonal to the axial direction on the outer peripheral surface of the flow path forming body 2.

  Further, an insulating member 6 made of a ceramic material is provided between the flow path forming body 2 and the covering body 43. Specifically, the insulating member 6 is provided on the outer peripheral surface of the flow path forming body 2 facing the covering body 43. Here, the insulating member 6 may be in contact with the inner peripheral surface of the cover 43 or may not be in contact. The insulating member 6 may be provided on the inner peripheral surface of the covering body 43. By this insulating member 6, the flow path forming body 2 and the covering body 43 can be reliably insulated, and a short circuit in a portion other than the connection portion can be prevented.

  In addition, an outer insulating member 7 made of a ceramic material covering substantially the entire circumference of the outer peripheral surface of the covering body 43 is provided on the outer peripheral surface of the covering body 43. Even if the installation object on which the fluid heating apparatus 100 is installed is made of a conductive member or becomes conductive by the jetted heated fluid, the outer insulating member 7 leaks electricity from the covering 43 to the outside. This can be prevented.

  Thus, the first power supply member 3 and the second power supply member 4 are drawn out from the flow path one end 2a of the flow path forming body 2 to the power source 5 side. Specifically, the direction in which the first electrode 31 is orthogonal to the channel direction from the channel one end 2a of the channel forming body 2 and the second electrode 41 is from the channel one end 43a of the covering 43. It is provided to extend to. Note that the extending direction of the first electrode 31 and the extending direction of the second electrode 41 do not have to be the same direction, and may be different directions in the circumferential direction at, for example, the flow path one end portion 2a.

  The flow path forming body 2 configured as described above is provided by being inserted into a storage chamber for storing a heated fluid or a processing chamber for processing an object to be processed by the heated fluid. Specifically, a portion of the flow path forming body 2 excluding the flow path one end portion 2a is provided by being inserted into the storage chamber or the processing chamber. And the single phase alternating current power supply 5 connected to this flow-path formation body 2 is provided in the space (for example, power supply chamber) different from the said storage chamber or the said process chamber.

  Here, the flow of the fluid to be heated in the fluid heating apparatus 100 configured as described above will be described. The fluid to be heated flows from one end opening 2y (one end side of the flow path) of the flow path forming body 2 communicating with the flow path R, and flows through the flow path R inside the flow path forming body 2 while being heated. It reaches the other end opening 2z of the flow path forming body 2 in communication. Here, in the present embodiment, the other end opening 2z is closed by the closing member 23, and the slit 22 is provided in the other end 2b of the flow path. It flows out of the formed body 2, that is, out of the fluid heating apparatus 100. In addition, the 6th surface figure and partial enlarged view which show the design example of the flow-path formation body 2 of this embodiment are shown in FIG. Here, in FIG. 2, the outer insulating member 7 is omitted. Further, as an example of the fluid to be heated, it is conceivable that the fluid to be heated flowing into the flow path forming body 2 is saturated steam or superheated steam, and the fluid flowing out from the flow path forming body 2 is superheated steam. . However, the fluid to be heated is not limited to a specific fluid, and may be any one that is appropriately selected according to the application of the fluid heating apparatus 100.

  In the fluid heating apparatus 100 configured as described above, when a single-phase AC voltage is applied from the single-phase AC power source 5 to the flow path forming body 2 via the first power supply member 3 and the second power supply member 4, the flow path is formed. In the body 2, the direction of the current flowing through the flow path forming body 2 is opposite to the direction of the current flowing through the covering body 43 in the second power supply member 4. If it does so, the magnetic flux which generate | occur | produces by each electric current will mutually cancel, the reactance which generate | occur | produces in the flow-path formation body 2 is reduced, and a circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating apparatus 100 can be improved.

  Moreover, since it can eject directly from the fluid ejection port 22 provided in the flow path forming body 2, it can be ejected without lowering the temperature of the heated fluid heated inside the flow path forming body 2. . Furthermore, since the covering body 43 is made of copper or brass and the flow path forming body 2 is formed of a conductive material having a higher electric resistance than the covering body 43, the covering body 43 is heated by energization. Since the flow path forming body 2 through which the fluid to be heated flows is heated more efficiently, the fluid to be heated can be efficiently brought into a high temperature state.

  Furthermore, since the fluid ejection port 22 is provided along the circumferential direction on the outer peripheral surface of the flow path forming body 2, for example, a fluid heating device is provided in a deep hole or a deep hole formed in a workpiece made of iron, for example. In a state where 100 is inserted, the heated fluid is ejected from the fluid ejection port 22, whereby a film of ferric tetroxide can be easily formed on the inner peripheral surface of the workpiece.

The present invention is not limited to the above embodiment.
For example, as shown in FIG. 3, an insulating member 6 that covers the outer peripheral surface from the one end side of the flow path forming body 2 to the other end side of the flow path is provided. Alternatively, the covering 43 may be formed by winding the tape-shaped metal foil 401 from the outer peripheral surface on the other end side of the flow channel to the outer peripheral surface of the insulating member 6. If this is the case, the covering 43 can be made of a thin tape-shaped metal foil 401, so that the fluid heating device 100 as a whole can be made small.

  Further, the covering body 43 may not necessarily cover the entire circumference on the outer peripheral surface from the other end side of the flow path forming body 2 to the one end side of the flow path. For example, a part of the cover 43 having a notch shape or a hole, or the end face of the flow path one end 43a or the other end 43b in the cover 43 in the flow direction It may be non-vertical.

  The flow path forming body 2 and the covering body 43 are not limited to a cylindrical straight tube, and may be a polygonal cross section, an oval cross section, a free curved line, or the like. Further, the flow path forming body 2 and the covering body 43 may not have the same cross section. For example, the flow path forming body 2 may have a rectangular cross section and the covering body 43 may have an elliptical shape.

  Further, the flow path forming body 2 and the covering body 43 are not limited to linear ones but may be bent. For example, when the flow path forming body 2 is bent, the covering body 43 may be formed along the outer peripheral surface where the flow path forming body 2 is bent.

  Further, as shown in FIGS. 4 to 6, the two flow path forming bodies 2 are communicated with the flow paths R, and the first power supply member 3 provided in the two flow path forming bodies 2 is disposed on the inner side. The fluid heating device 100 may be configured by connecting with the flange 21 so as to be positioned in a unit. 4 to 6 show an example in which the fluid heating apparatus 100 is configured by using one fluid heating unit 10. However, the flow paths R communicate with a plurality of fluid heating units 10. The fluid heating apparatus 100 may be configured by being connected to the above.

  In the fluid heating unit 10 of FIG. 4, the first power supply output (V phase) of the three-phase AC power supply 5 is applied to the two first power supply members 3. The second power output (U phase) of the three-phase AC power source 5 is applied to one side, and the third power output (W phase) of the three-phase AC power source 5 is connected to the other of the two second power supply members 4. ) Is applied.

  In the fluid heating unit 10 of FIG. 5, one power output of the single-phase AC power supply 5 is applied to the two first power supply members 3, and the single-phase AC power supply 5 is applied to both of the two second power supply members 4. The case where the other power supply output of the alternating current power supply 5 is applied is shown. Further, the fluid heating unit 10 is provided with a current control circuit 7 using, for example, a thyristor on a circuit for inputting a power output to the two second power feeding members 4.

  In the fluid heating unit 10 of FIG. 6, an o terminal of the Scott connection transformer 51 is connected to the two first power supply members 3 and an output of the same polarity is applied to one of the two second power supply members 4. Further, the u terminal of the Scott connection transformer 51 is connected and the u phase is applied, and the v terminal of the Scott connection transformer 51 is connected to the other of the two second power supply members 4 and the v phase is applied. Shows the case.

  In addition, as shown in FIG. 7, the three flow path forming bodies 2 are communicated with the flow paths R, and the first power supply member 3 and the second flow paths 2 provided in the three flow path forming bodies 2 are connected. The fluid heating device 100 may be configured by connecting by the flange 21 so that the power supply member 4 faces in the same direction. FIG. 7 shows an example in which the fluid heating apparatus 100 is configured by using three fluid heating units 10. However, a plurality of fluid heating units 10 are connected so that their flow paths R communicate with each other. The fluid heating device 100 may be configured. In FIG. 7, from the left, the first flow path forming body, the second flow path forming body, and the third flow path forming body.

  In the fluid heating unit 10, the first power supply member 3 of the first flow path forming body 2 and the second power supply member 4 of the second flow path forming body 2 are connected to the V phase of the three-phase AC power supply 5. Are connected to the first power supply member 3 of the second flow path forming body 2 and the second power supply member 4 of the third flow path forming body 2. The U-phase of the three-phase AC power supply 5 is connected to the first power supply member 3 of the third flow path forming body 2 and the second power supply member 4 of the first flow path forming body 2. Has been. By comprising in this way, it becomes possible to connect the three-phase alternating current power supply 5 as it is.

  Further, the closing member 23 may not be provided in the other end opening 2z of the flow path forming body 2 communicating with the flow path R, and the other end opening 2z of the flow path forming body 2 may be opened. In this case, the other end opening 2z of the flow path forming body 2 may be used as the fluid ejection port 22. Further, when the other end opening 2z of the flow path forming body 2 is used as the fluid ejection port 22, a fluid ejection nozzle may be attached to the fluid ejection port 22 (the other end opening 2z). In this case, by selecting the fluid ejection nozzle according to the application, the heated fluid can be ejected into a predetermined ejection range determined by the fluid ejection nozzle.

  In addition, as shown in FIG. 8, a plurality of fluid ejection nozzles 24 may be provided along the flow path direction (tube axis direction) on the outer peripheral surface of the flow path forming body 2 having a straight pipe shape. The plurality of fluid ejection nozzles 24 may be formed in the entire circumferential direction on the side wall of the flow path forming body 2, or may be formed on one side of the side wall of the flow path forming body 2. May be. In FIG. 8, the fluid ejection nozzles 24 are configured to be attached to a plurality of nozzle mounting portions 25 formed on one side of the side wall of the flow path forming body 2. In FIG. 8, the plurality of fluid ejection nozzles 24 are provided at equal intervals from one end to the other end on the side wall, but are not limited thereto. In this case, a through hole 43h is formed in the cover 43 of the second power supply member 4 corresponding to the plurality of fluid ejection nozzles 24, and the fluid ejection nozzle 24 or the nozzle mounting portion is formed through the through holes 43h. 25 is configured to be exposed to the outside. If the fluid ejection nozzle 24 is provided as described above, the heated fluid can be ejected to a predetermined ejection range determined by the fluid ejection nozzle 24 by selecting the fluid ejection nozzle 24 according to the application. it can.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Fluid heating apparatus 2 ... Flow path formation body (pipe)
R ... Channel 3 ... First power supply member 31 ... First electrode 32 ... First electric wire 4 ... Second power supply member 41 ... Second electrode 42 .... Second electric wire 43 ... Cover 5 ... Power source 6 ... Insulating member 7 ... Outer insulating member 10 ... Fluid heating unit

Claims (13)

A fluid heating device that heats a heated fluid flowing through the flow path by energizing and heating a flow path forming body made of a conductive material in which a flow path through which the heated fluid flows is formed,
An AC voltage is applied between the first power supply member connected to one end of the flow path forming body and the second power supply member connected to the other end of the flow path forming body. Is,
The second power supply member has a covering that covers substantially the entire circumference of the outer peripheral surface on the one end side of the flow path from the other end side of the flow path forming body,
A fluid heating apparatus in which a flow path other end side end portion of the covering body is electrically connected to the flow path forming body.   The fluid heating apparatus according to claim 1, wherein a fluid ejection port is provided on the other end side of the flow channel with respect to the connecting portion with the covering body in the flow channel forming body.   The fluid heating apparatus according to claim 2, wherein the fluid ejection port is provided on an outer peripheral surface of the flow path forming body.   The fluid heating device according to claim 1, wherein the flow path forming body is made of a conductive material having a higher electric resistance than the covering body.   The fluid heating apparatus according to claim 1, wherein the covering is made of copper or brass. The flow path forming body and the covering body each have a straight pipe shape,
The fluid heating apparatus according to claim 1, wherein the flow path forming body and the covering body are electrically connected by welding. A plurality of fluid ejection nozzles are provided along the flow path direction on the outer surface of the flow path forming body,
7. The cover according to claim 1, wherein one or a plurality of through holes for exposing the plurality of fluid ejection nozzles to the outside are formed corresponding to the plurality of fluid ejection nozzles. The fluid heating apparatus as described.   The flow path forming body and the covering body are provided in a storage chamber for storing a heated fluid or a processing chamber for processing an object to be processed by the heated fluid. Any one of the fluid heating apparatuses.   The fluid heating apparatus according to claim 8, wherein a single-phase AC power source connected to the flow path forming body and the covering body is provided in a space different from the storage chamber or the processing chamber.   The fluid heating apparatus according to claim 1, wherein an insulating member made of a ceramic material is provided between the flow path forming body and the covering body. An insulating member made of a ceramic material that covers the outer peripheral surface on the other end side of the channel from the one end side of the channel forming body is provided,
The covering is formed by winding a metal foil from the outer peripheral surface on the other end side of the flow channel to the outer peripheral surface of the insulating member with respect to the insulating member in the flow channel forming body. The fluid heating apparatus according to any one of claims 1 to 5.   The fluid heating apparatus according to claim 1, wherein an outer insulating member that covers substantially the entire circumference of the outer peripheral surface of the covering is provided.   The fluid heating according to any one of claims 1 to 12, wherein the heated fluid flowing into the flow path forming body is saturated steam or superheated steam, and the fluid flowing out from the flow path forming body is superheated steam. apparatus.