JP2014522118A - 半導体検出装置 - Google Patents
半導体検出装置 Download PDFInfo
- Publication number
- JP2014522118A JP2014522118A JP2014523379A JP2014523379A JP2014522118A JP 2014522118 A JP2014522118 A JP 2014522118A JP 2014523379 A JP2014523379 A JP 2014523379A JP 2014523379 A JP2014523379 A JP 2014523379A JP 2014522118 A JP2014522118 A JP 2014522118A
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- JP
- Japan
- Prior art keywords
- pixels
- pixel
- detection device
- array
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 76
- 238000001514 detection method Methods 0.000 claims abstract description 99
- 239000000463 material Substances 0.000 claims abstract description 26
- 230000004044 response Effects 0.000 claims abstract description 5
- 238000003491 array Methods 0.000 claims description 16
- 239000000872 buffer Substances 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 11
- 238000009941 weaving Methods 0.000 description 13
- 238000011896 sensitive detection Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 8
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- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
- H10F39/8023—Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/107—Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/811—Interconnections
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Measurement Of Radiation (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1113436.8 | 2011-08-03 | ||
| GB201113436A GB201113436D0 (en) | 2011-08-03 | 2011-08-03 | Semiconductor detector device |
| PCT/GB2012/051679 WO2013017828A1 (en) | 2011-08-03 | 2012-07-13 | Semiconductor detector device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014522118A true JP2014522118A (ja) | 2014-08-28 |
| JP2014522118A5 JP2014522118A5 (enExample) | 2015-08-27 |
Family
ID=44735427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014523379A Pending JP2014522118A (ja) | 2011-08-03 | 2012-07-13 | 半導体検出装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9698181B2 (enExample) |
| EP (1) | EP2740154A1 (enExample) |
| JP (1) | JP2014522118A (enExample) |
| GB (1) | GB201113436D0 (enExample) |
| WO (1) | WO2013017828A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021145121A (ja) * | 2020-03-10 | 2021-09-24 | 采▲ぎょく▼科技股▲ふん▼有限公司VisEra Technologies Company Limited | 固体撮像素子 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107219168B (zh) * | 2017-08-02 | 2024-03-29 | 贵州工程应用技术学院 | 一种预损伤智能损伤探测器 |
| WO2019233751A1 (en) * | 2018-06-04 | 2019-12-12 | Paul Scherrer Institut | Pixel detector system optimized for pencil beam scanning proton therapy |
| US11264422B2 (en) | 2019-08-30 | 2022-03-01 | LightSpin Technologies Inc. | Scalable position-sensitive photodetector device |
| US11762108B2 (en) | 2020-01-21 | 2023-09-19 | LightSpin Technologies Inc. | Modular pet detector comprising a plurality of modular one-dimensional arrays of monolithic detector sub-modules |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61275683A (ja) * | 1985-05-31 | 1986-12-05 | Shimadzu Corp | 半導体放射線位置検出装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4392057A (en) | 1980-02-22 | 1983-07-05 | National Research Development Corporation | Position-sensitive radiation detector |
| US5117114A (en) * | 1989-12-11 | 1992-05-26 | The Regents Of The University Of California | High resolution amorphous silicon radiation detectors |
| US6218668B1 (en) | 1997-07-08 | 2001-04-17 | The Regents Of The University Of California | Coplanar interdigitated grid detector with single electrode readout |
| US6831263B2 (en) | 2002-06-04 | 2004-12-14 | Intel Corporation | Very high speed photodetector system using a PIN photodiode array for position sensing |
| JP5027832B2 (ja) | 2009-02-17 | 2012-09-19 | 株式会社日立製作所 | 放射線検出モジュール及び放射線撮像装置 |
| US8723093B2 (en) * | 2011-01-10 | 2014-05-13 | Alexander Krymski | Image sensors and methods with shared control lines |
-
2011
- 2011-08-03 GB GB201113436A patent/GB201113436D0/en not_active Ceased
-
2012
- 2012-07-13 JP JP2014523379A patent/JP2014522118A/ja active Pending
- 2012-07-13 EP EP12737866.9A patent/EP2740154A1/en not_active Withdrawn
- 2012-07-13 WO PCT/GB2012/051679 patent/WO2013017828A1/en not_active Ceased
- 2012-07-13 US US14/236,533 patent/US9698181B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61275683A (ja) * | 1985-05-31 | 1986-12-05 | Shimadzu Corp | 半導体放射線位置検出装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021145121A (ja) * | 2020-03-10 | 2021-09-24 | 采▲ぎょく▼科技股▲ふん▼有限公司VisEra Technologies Company Limited | 固体撮像素子 |
| US11631709B2 (en) | 2020-03-10 | 2023-04-18 | Visera Technologies Company Limited | Solid-state image sensor |
| JP7313318B2 (ja) | 2020-03-10 | 2023-07-24 | 采▲ぎょく▼科技股▲ふん▼有限公司 | 固体撮像素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2013017828A1 (en) | 2013-02-07 |
| GB201113436D0 (en) | 2011-09-21 |
| US9698181B2 (en) | 2017-07-04 |
| EP2740154A1 (en) | 2014-06-11 |
| US20140159189A1 (en) | 2014-06-12 |
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