JP2014513208A - 熱ワイヤを使用して被覆を行うための装置および方法 - Google Patents
熱ワイヤを使用して被覆を行うための装置および方法 Download PDFInfo
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Abstract
【選択図】図7
Description
Claims (15)
- 基板(12)を被覆するための真空チャンバ(16)と、
前記基板(12)上に堆積されることとなる材料を加熱するために少なくともワイヤ部分(14a)を受けるように適合されたリアクタ(22)と、
少なくとも1つの電気モータ(1020)を含む電動式ドライバ(20)と、
前記リアクタ(22)内に少なくとも前記ワイヤ部分を送るおよび位置決めするように構成されたワイヤローラシステム(324a、324b)と
を備え、
前記電動式ドライバ(20)は、使用時に、前記リアクタ内に位置決めされた少なくとも前記ワイヤ部分が前記電動式ドライバにより調節可能な態様で張力印加され得るように、前記ワイヤローラシステム(324a、324b)に対して動作可能なように結合される、被覆装置(10)。 - 前記被覆装置(10)は、熱ワイヤ化学気相成長被覆装置である、請求項1に記載の被覆装置。
- ワイヤ(14)により加熱された被覆材料で基板(12)を被覆するための真空チャンバ(16)と、
前記被覆中に前記ワイヤ(14)に対して張力印加を行うように構成された、電動式ドライバ(20)を含むアクチュエータシステム(18)と
を備える、被覆装置(10)。 - 前記アクチュエータシステム(18)は、前記電動式ドライバにより生成されたトルクを前記ワイヤに対して結合することにより前記ワイヤ(14)に対して張力印加を行うように構成される、請求項3に記載の被覆装置。
- 前記電動式ドライバ(20)は、サーボモータおよびステッパモータからなる群より選択される少なくとも1つの電気モータを含む、請求項3または4に記載の被覆装置。
- 前記電動式ドライバにより生成されたトルクを制御するように構成され、前記被覆装置の作動中に前記ワイヤ(14)の張力が調節可能になるように、前記ワイヤ(14)に対して張力印加を行うために前記ワイヤ(14)に対して結合された、張力制御システム(1002)をさらに備える、請求項3ないし5のいずれか一項に記載の被覆装置。
- 前記アクチュエータシステムが送出することのために構成されており、特に、リアクタ(22)内の被覆材料(28)が前記基板(12)上に前記被覆材料を堆積する前に新規のワイヤ部分(14b)で加熱され得るように、前記被覆装置の前記リアクタ(22)内にワイヤの前記新規部分(14b)を送出するために、前記システムが、前記電動式ドライバ(20)によって作動されるワイヤ送りシステム、いくつかの実施形態においてはワイヤローラシステム(324a、324b)をさらに含む、請求項3ないし6のいずれか一項に記載の被覆装置。
- 前記アクチュエータシステム(18)に対して動作可能なように結合され、使用時に、
前記新規のワイヤ部分が、被覆中に自動的に供給される、および/または
前記新規のワイヤ部分が、所定の時間間隔で自動的に供給される
ように構成された、送り制御システムをさらに備える、請求項7に記載の被覆装置。 - 少なくとも1400℃の温度まで少なくともワイヤ部分を加熱するように構成されたヒータをさらに備える、請求項3ないし8のいずれか一項に記載の被覆装置。
- 前記被覆装置は、熱ワイヤ化学気相成長被覆装置である、請求項3ないし9のいずれか一項に記載の被覆装置。
- 被覆基板(12)を製造する方法であって、前記方法は、
電動式ドライバを含むアクチュエータシステム(18)によりワイヤ(14)に対して張力印加を行うことと、
真空条件下において被覆材料(28)で前記基板(12)を被覆することと
を含み、
前記被覆することは、前記被覆材料が基板(12)上に堆積される前に前記被覆材料中の温度上昇を誘発するために、動作温度にまで前記ワイヤ(14)の少なくとも一部分(14b)を加熱することを含む、方法。 - 非弾性結合システムを介して前記ワイヤに対して前記電動式ドライバにより生成されたトルクを結合することと、
前記トルクにより前記ワイヤの少なくとも前記加熱された部分(14a)の張力を調節することと
をさらに含む、請求項11に記載の方法。 - 前記被覆材料(28)が、前記基板(12)上に前記被覆材料を堆積する前に新規のワイヤ部分(14b)で加熱され得るように、前記ワイヤ(14)の新規部分(14b)を送出するために前記アクチュエータシステム(18)を作動させること
をさらに含む、請求項11または12に記載の方法。 - 前記新規のワイヤ部分(14b)は、被覆材料(28)が基板(12)上に堆積されつつある間に、送出される、および/または
前記新規のワイヤ部分(14b)は、所定の時間間隔で送出される、請求項13に記載の方法。 - 少なくとも1400℃の温度にまで少なくとも前記ワイヤ部分を加熱することをさらに含む、請求項10ないし14のいずれか一項に記載の方法。
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2011
- 2011-03-22 SG SG2013059779A patent/SG192644A1/en unknown
- 2011-03-22 KR KR1020137027640A patent/KR20140023325A/ko not_active Application Discontinuation
- 2011-03-22 CN CN2011800690016A patent/CN103429786A/zh active Pending
- 2011-03-22 JP JP2014500262A patent/JP5903155B2/ja not_active Expired - Fee Related
- 2011-03-22 WO PCT/EP2011/054365 patent/WO2012126520A1/en active Application Filing
- 2011-03-22 US US14/005,115 patent/US20140050865A1/en not_active Abandoned
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2012
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Publication number | Publication date |
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CN103429786A (zh) | 2013-12-04 |
WO2012126520A1 (en) | 2012-09-27 |
TW201244834A (en) | 2012-11-16 |
US20140050865A1 (en) | 2014-02-20 |
SG192644A1 (en) | 2013-09-30 |
TWI580480B (zh) | 2017-05-01 |
KR20140023325A (ko) | 2014-02-26 |
JP5903155B2 (ja) | 2016-04-13 |
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