JP2014232757A - Workpiece transfer method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide workpiece transfer method in which a plate-like workpiece is transferred having its center been the same as a rotation axis of a holding table when a circular recess is formed on the plate-like work, so that the circular recess formed on the plate-like workpiece has an identical center with the plate-like workpiece.SOLUTION: When a plate-like workpiece temporarily placed on a temporary placing table 131 is transferred to the holding table 152 and the holding table 152 holds the plate-like workpiece, a workpiece transfer method comprises the steps of: measuring difference between a center location of a circular recess formed by grinding the plate-like workpiece held by the holding table 152 and a center location of the plate-like workpiece on which the circular recess is formed thereon; correcting transferring amount for a next plate-like workpiece based on the measured difference in order to grind the next plate-like workpiece; and making the center of the plate-like workpiece be the same as a rotation axis of the holding table 152. Consequently, the center of the plate-like workpiece can be identical to the center of the circular recess.

Description

  The present invention relates to a workpiece transfer method for transferring a plate workpiece in a grinding apparatus that forms a circular recess by grinding the plate workpiece.

  By grinding and thinning the back surface of a disk-shaped plate-shaped workpiece such as a wafer with a device formed on the surface, the outer periphery of the plate-shaped workpiece is left and only the central portion is thinned to form a circular recess. There is a technology to maintain the strength of plate-like workpieces. For example, Patent Document 1 describes a technique for forming a circular recess by holding a plate-like workpiece with a holding table and grinding the plate-like workpiece while rotating the holding table.

  The center of the circular recess formed in this way is located on the rotation axis of the holding table. Therefore, when the holding table holds the plate-like workpiece in a state where the center of the plate-like workpiece and the rotation axis of the holding table are shifted, there is a problem that the center of the plate-like workpiece and the center of the circular recess are displaced. Therefore, in Patent Document 2, in order to perform normal processing even when the center of the plate-like workpiece and the center of the circular recess are displaced, the center position of the circular recess is measured in the process after the formation of the circular recess. It is described that it is aligned.

JP 2007-19461 A JP 2010-147134 A

  The processing method described in Patent Document 2 processes a plate-like workpiece in which a circular recess has already been formed. However, if the circular recess is formed so that the center position does not shift, it is not necessary to consider the case where the center position is shifted in the subsequent steps. Can be reduced.

  In the present invention, when the circular recess is formed in the plate-like workpiece, the center of the circular recess and the plate are conveyed by conveying the plate-like workpiece so that the center of the plate-like workpiece is held in alignment with the rotation axis of the holding table. The purpose is to match the center of the workpiece.

  A workpiece transfer method according to the present invention includes a first moving mechanism that moves a plate-like workpiece in a horizontal direction, a second movement mechanism that moves the plate-like workpiece in a horizontal direction that intersects the horizontal direction, and a plate-like workpiece. In the grinding apparatus comprising at least temporary placement means for temporarily placing, a holding table for holding the plate-like workpiece, and a grinding means for grinding the plate-like workpiece held on the holding table, the first moving mechanism And a workpiece transfer method for transferring a plate-like workpiece from the temporary placement table to the holding table using a second moving mechanism, wherein the temporary placement means sucks and holds the plate-like workpiece for temporary placement. A table, and a measurement unit that measures a predetermined position on the outer periphery of the plate-like workpiece sucked and held by the temporary placement table and detects a mark indicating a crystal orientation provided on the outer periphery of the plate-like workpiece. A grinding step of forming a concave portion by grinding a central portion of the plate-like workpiece held by the holding table using the grinding means, and forming a convex portion around the concave portion, and grinding in the grinding step. The temporary work table is sucked and held by the temporary placement table, the temporary placement table is rotated, the mark position detected by the measurement unit is set as the measurement start position, the temporary placement table is rotated, and the measurement unit is moved to the plate. A plate-like workpiece center calculation step for calculating the center of the plate-like workpiece from three positions on the outer circumference of the workpiece, and the position of the mark detected by the measurement unit by rotating the temporary placement table, A step of calculating the center of the concave portion by rotating the temporary table and calculating the center of the concave portion from three positions of the boundary between the concave portion and the convex portion of the plate-like workpiece; Plate-shaped wafer calculated in the process The first correction for the movement amount of the first movement mechanism is calculated by calculating the conveyance correction amount and the conveyance correction direction from the center of the groove and the depression center of the plate-like workpiece calculated in the depression center calculation step. A conveyance correction amount calculating step for calculating the amount and a second correction amount for the movement amount of the second movement mechanism; the first correction amount calculated by the conveyance correction amount calculation step; The amount of conveyance from the temporary placement table to the holding table by the first moving mechanism and the second moving mechanism is corrected according to the correction amount, and the center of the holding table and the center of the plate-like workpiece are matched. And a conveying step of conveying the plate-like workpiece.

  The temporary placement means may be provided with either the first moving mechanism or the second moving mechanism. In this case as well, in the transporting process, the first moving mechanism and the second moving mechanism are used for the plate. The workpiece is conveyed.

  According to the present invention, since the deviation between the center position of the circular recess and the center position of the plate-like workpiece is measured and the conveyance amount of the plate-like workpiece is corrected based on the measured deviation, the center position of the plate-like workpiece is determined. Can be made to coincide with the rotation axis of the holding table. Thereby, the center position of the circular recessed part formed in a plate-shaped workpiece can be made to correspond with the center position of a plate-shaped workpiece. For this reason, it is not necessary to consider the case where the center position is shifted in the subsequent steps.

The perspective view which shows a grinding device. The top view which shows a conveyance means. The perspective view which shows the plate-shaped workpiece | work in which the circular recessed part was formed. The top view which shows the calculation method of a center position. The top view which shows the calculation method of a center position. The top view which shows the shift | offset | difference with the center of a plate-shaped workpiece | work and the center of a circular recessed part. The top view which shows another conveyance means. Furthermore, the top view which shows another conveyance means.

  The grinding apparatus 10 shown in FIG. 1 includes a main body 11, a loading / unloading means 12 for loading and unloading a plate-shaped workpiece with respect to the cassettes 30 a and 30 b placed in front of the main body 11, and the loading / unloading means 12 from the cassette 30 a. Temporary placement means 13 for temporarily placing the unloaded plate-like workpiece, conveyance means 14 for conveying the plate-like workpiece from the temporary placement means 13, holding means 15 for holding the plate-like workpiece conveyed by the conveyance means 14, Two grinding means 16a and 16b for grinding the plate-like work held by the holding means 15, a washing means 18 for washing the plate-like work, and the plate work after grinding are conveyed from the holding means 15 to the washing means 18. The conveyance means 17 and the control part 19 which controls the grinding device 10 whole are provided.

  A plate-shaped workpiece before processing is accommodated in the cassette 30a. On the other hand, a plate-like workpiece that has been processed and cleaned is accommodated in the cassette 30b.

  The carry-in / out means 12 includes a robot arm, holds a plate-like workpiece housed in the cassette 30 a, carries out the plate-like workpiece, and temporarily places it in the temporary placement means 13. Further, the carry-in / out means 12 conveys the plate-shaped workpiece after cleaning from the cleaning means 18 and stores it in the cassette 30b.

  The temporary placement means 13 supports the temporary placement table 131 that holds the placed plate-like workpiece, the measurement unit 132 that measures the outer peripheral position of the plate-like workpiece and the like held on the temporary placement table 131, and the measurement unit 132. And a measurement support part 133 to be used. The temporary placement table 131 holds the plate-like work by, for example, sucking the placed plate-like work with a suction source (not shown). Further, the temporary placement table 131 is rotatable around a rotation axis parallel to the ± Z direction (vertical direction). The measuring unit 132 is, for example, an imaging unit, and detects a mark indicating a crystal orientation provided on the outer periphery of the plate-like workpiece held by the temporary placement table 131 or the outer periphery of the plate-like workpiece, and measures the position thereof. The measurement support part 133 is movable in the ± Y direction, the measurement range of the measurement part 132 changes with the movement of the measurement support part 133, and the plate-like workpiece is rotated with the rotation of the temporary placement table 131. The measured range changes. Thereby, the measurement part 132 can measure the arbitrary positions on a plate-shaped workpiece.

  The holding means 15 includes a turntable 151 that rotates about a rotation axis parallel to the ± Z directions, and three holding tables 152 arranged on the turntable 151. The holding table 152 is, for example, a chuck table, and holds the plate-like work by sucking the placed plate-like work with a suction source (not shown). The holding table 152 is rotatable about a rotation axis parallel to the ± Z direction (vertical direction). The three holding tables 152 are arranged in a regular triangle shape at a position equidistant from the rotation axis of the turntable 151. When the turntable 151 rotates by 120 degrees, the holding table 152 receives a plate-shaped workpiece between the conveying means 14 and 17, and a first grinding position where the grinding means 16a grinds the plate-shaped workpiece. And the grinding means 16b moves between the second grinding positions for grinding the plate-like workpiece.

  As shown in FIG. 2, the transport unit 14 includes a transport pad 141 that holds the plate-shaped workpiece 20, a rotating arm 142 that supports the transport pad 141, a base 143 that supports the rotating arm 142, and a base 143. Moving means 144 for moving. The rotating arm 142 rotates about a rotation shaft 149 parallel to the ± Z direction and moves up and down in the ± Z direction to move the transport pad 141. The base 143 supports the rotating shaft 149 of the rotating arm 142. The moving means 144 has, for example, a ball screw mechanism, and moves the base 143 in the ± X directions. Thereby, the rotating shaft 149 of the rotating arm 142 moves on a straight line 148 parallel to the ± X directions. The rotating arm 142 functions as a first moving mechanism that rotates the plate-like work held by the transport pad 141 in the horizontal direction, and the moving means 144 is a linear direction that intersects the rotating arm 142 in the horizontal direction. It functions as a second moving mechanism that moves the plate-like workpiece 20 in the (± X direction). The distance in the ± Y direction between the rotating shaft 149 of the rotating arm 141 and the rotating shaft 139 of the temporary table 131 is Y1.

  The grinding means 16a shown in FIG. 1 includes a rotatable grinding wheel 160a for rough grinding, which is driven by the feeding means 161 and can be moved in the ± Z direction as a whole, and is held by one of the holding tables 152. Rough grinding is performed by pressing the grinding wheel 160a against the plate-shaped workpiece while rotating it. On the other hand, the grinding means 16b includes a rotatable grinding wheel 160b for finish grinding, and is driven by the feeding means 161 so that the whole can move in the ± Z direction. The plate is held on the holding table 152 and pressed against the roughly ground plate work to perform finish grinding. The diameters of the outermost circumferences of the rotation trajectories of the grinding wheels 160a and 160b are both slightly larger than the radius of the plate-like workpiece, and the vicinity of the outer circumference of the plate-like workpiece is not ground, but only the central portion is ground. As shown in FIG. 2, a circular recess 22 centering on the rotation axis of the holding table 152 is formed in the disc-shaped plate-like workpiece 20. A mark 21 made of a notch indicating a crystal orientation is formed on the plate-like workpiece 20. Note that an orientation flat may be formed as a mark instead of the notch.

  The conveyance means 17 conveys a plate-shaped workpiece between the holding table 152 in the delivery position and the cleaning means 18 by holding and turning the plate-shaped workpiece after finish grinding.

  The cleaning means 18 is, for example, a spinner cleaning device, and rotates the plate-shaped workpiece after grinding, and sprays cleaning liquid toward the rotating plate-shaped workpiece, thereby cleaning the plate-shaped workpiece and removing grinding debris and the like. Remove.

  The control unit 19 is, for example, a computer, stores programs and data, processes the data by executing the programs, inputs information such as measurement results of the measurement unit 132 from the outside, and performs various calculations. Or a control signal for controlling the conveying means 14 or the like is output to the outside to control the grinding apparatus 10. The control unit 19 may be configured to be built in the main body 11, or may be configured to be disposed outside the main body 11 and connected to the main body 11.

  Below, the method to convey a plate-shaped workpiece | work using the grinding apparatus 10 shown in FIG. 1 is demonstrated.

(1) Temporary Placement Step In the temporary placement step, the carry-in / out means 12 unloads the plate-like workpiece 20 from the cassette 30a and places it on the temporary placement table 131 (temporary placement). The temporary placement table 131 holds the placed plate-like work 20.

(2) Grinding process Next, the conveying means 14 conveys the plate-like workpiece 20 from the temporary placement table 131 to any holding table 152 located at the delivery position, and the turntable 151 rotates to grind the plate-like workpiece 20. It moves below the means 16a. Then, the grinding wheel 160a, which is rotated by the lowering of the grinding means 16a, comes into contact with the central portion of the upper surface of the plate-like workpiece 20, and rough grinding is performed. As shown in FIG. A circular recess 22 is formed. A convex portion 23 is formed around the circular concave portion 22.

  Further, the turntable 151 rotates and the plate-like workpiece 20 after rough grinding moves below the grinding means 16b, and the grinding wheel 160b that rotates when the grinding means 16b descends contacts the upper surface of the plate-like workpiece 20. Finish grinding is performed, and the circular recess 22 is finish ground.

  The finish-ground plate-like workpiece 20 moves to the delivery position as the turntable 151 rotates. Then, after the plate-like workpiece 20 is transferred to the cleaning unit 18 and cleaned by the transfer unit 17, it is accommodated in the cassette 30 a or 30 b by the carry-in / out unit 12.

(3) Plate-shaped workpiece center calculating step The plate-shaped workpiece 20 in which the circular recess 22 is formed by the grinding step is unloaded from the cassette 30a or 30b by the loading / unloading means 12, and is again transported to the temporary placing means 13 and temporarily placed on the temporary placing table 131. Is sucked in. Then, the measurement support unit 133 moves the measurement unit 132 so that the outer periphery of the plate-shaped workpiece 20 falls within the measurement range 138 of the measurement unit 132, and the temporary placement table 131 is rotated to mark the plate-shaped workpiece 20. 21 is detected by the measurement unit 132. The mark 21 can be detected by projecting measurement light from the measurement unit 132 toward the outer periphery of the plate-like workpiece 20 while receiving the reflected light while rotating the temporary placement table 131.

  Next, while rotating the temporary placement table 131 using the mark 21 as a measurement start position, three positions on the outer periphery of the plate-like workpiece 20 are obtained, and the center position of the plate-like workpiece 20 is calculated from the position information of the three locations. . Specifically, as shown in FIG. 4, the positions of three points d, e, and f on the outer periphery of the plate-like workpiece 20 are measured, and the outer periphery of a triangle having the three points d, e, and f as vertices is calculated. By doing this, the position of the center 29 of the plate-like workpiece 20 is calculated. This calculation is performed by the control unit 19.

(4) Recess Center Calculation Step Similarly, as shown in FIG. 4, three positions on the boundary between the circular recess 22 and the protrusion 23 are obtained while rotating the temporary placement table 131 with the mark 21 as the measurement start position. Then, the center position of the plate-like workpiece 20 is calculated from the position information of the three locations. Specifically, the positions of the three points a, b, and c at the boundary between the circular concave portion 22 and the convex portion 23 are measured, and a triangular outer center (vertical of the three sides) having the three points a, b, and c as vertices. (Intersection of bisectors) is calculated. Since the outer periphery of the triangle is the center of the circumscribed circle, the position of the center 28 of the circular recess 22 can be calculated thereby. This calculation is performed by the control unit 19.

  Note that the three points measured in the plate-like workpiece center calculating step and the recess center calculating step may be other than the position of the mark 21, but as shown in FIG. 5, the triangles abc and def formed by the three points to be measured are If it is an obtuse triangle, the angle formed by the perpendicular bisector of each side becomes small, and the influence of measurement errors is likely to occur. For this reason, for example, it is better to measure the temporary placement table 131 every time it is rotated 120 degrees so that the three points are dispersed as evenly as possible.

(5) Transport Correction Amount Calculation Step Next, from the center of the plate workpiece 20 calculated in the plate workpiece center calculation step and the center of the recess 22 of the plate workpiece 20 calculated in the recess center calculation step, the plate The conveyance correction amount when conveying the workpiece is transferred from the temporary placement table 131 to the holding table 152 is calculated.

  The control unit 19 calculates a shift between the center position of the plate-like workpiece 20 and the center position of the circular recess based on the measured center position. As shown in FIG. 6, Δx represents the center 28 of the circular recess and the center 29 of the plate workpiece 20 in a state where the mark 21 is directed in a predetermined direction (for example, the + Y direction with respect to the center 29 of the plate workpiece 20). The deviation in the ± X direction, Δy, represents the deviation in the ± Y direction between the center 28 of the circular recess and the center 29 of the plate-like workpiece 20 at that time. If the conveyance amount of the plate-like workpiece 20 is adjusted by the amount of this error, the center 29 of the plate-like workpiece 20 can be matched with the rotation shaft 159 of the holding table 152. The values of Δx and Δy are the values of the X and Y coordinates of the center 29 of the plate-like workpiece 20 obtained in the plate-like workpiece center calculation step, the X-coordinate of the center 28 of the circular depression 22 obtained in the recess center calculation step, and It is obtained by taking the difference from the value of the Y coordinate.

  One value of Δx and Δy is the amount of movement (the amount of movement of the second moving mechanism) for moving the base 143 when the transport pad 141 holds the plate-like workpiece W held on the temporary placement table 131. The correction amount. As this value, the control unit 19 stores Δx. The other value is the amount of movement (the amount of movement of the first moving mechanism) by which the moving means 144 moves the base 143 when the plate-like workpiece W held on the transport pad 141 is placed on and held on the holding table 152. Correction amount. As this value, the control unit 19 stores Δy.

(6) Conveying Step Next, the conveying means 14 conveys the plate-like workpiece 20 from the temporary placement table 131 to the holding table 152 that stands by at the delivery position. The transport process is divided into a receiving stage in which the transport pad 141 shown in FIG. 2 receives a plate-shaped work from the temporary placement table 131 and a delivery stage in which the plate-shaped work held by the transport pad 141 is delivered to the holding table 152.

  In the receiving stage, the moving means 144 shown in FIG. 2 moves the base 143, and the rotating shaft 149 of the rotating arm 142 is moved from the center 29 of the plate-like workpiece 20 to a position shifted by Δx shown in FIG. Let Thereby, the X coordinate of the rotating shaft 149 and the X coordinate of the center 29 of the plate-like workpiece 20 become equal.

  Then, the conveying means 14 holds the plate-like workpiece 20 by rotating the rotating arm 142 so that the tip of the rotating arm 142 is directed in the Y direction and the conveying pad 141 is lowered.

  Next, in the delivery stage, the moving means 144 moves the base portion 143 to rotate the rotating arm 142 so that its tip is directed in the + X direction. Then, the rotating shaft 149 of the rotating arm 142 is moved to a position away from the rotating shaft 159 of the holding table 152 at the delivery position by the amount Y1 shown in FIG. 2 plus Δy shown in FIG. Then, since the center 29 of the plate-like workpiece 20 held by the conveyance pad 141 and the rotation shaft 159 of the holding table 152 coincide with each other, the conveyance pad 141 is lowered at that position, and the plate-like workpiece 20 is moved to the holding table 152. hand over. The holding table 152 holds the placed plate-like workpiece 20.

  Thereafter, when the grinding step is performed, the rotation shaft 159 of the holding table 152 and the center 29 of the plate-like workpiece 20 are matched, so that the center of the plate-like workpiece 20 and the circular recess 22 formed in the grinding step are Center 28 matches.

(7) Cleaning Step In the cleaning step, the conveyance means 17 holds and conveys the plate-like workpiece 20 placed on the holding table 152 at the delivery position, and places it on the washing means 18. The cleaning means 18 holds the placed plate-like workpiece 20, rotates the plate-like workpiece 20, and jets a cleaning liquid to wash the plate-like workpiece.

(8) Storage step In the storage step, the carry-in / out means 12 conveys the plate-like workpiece 20 that has been cleaned from the cleaning means 18 and stores it in the cassette 30b.

  In this way, the plate-shaped workpiece 20 is ground to form the circular concave portion 22, and the deviation between the position of the center 28 of the actually formed circular concave portion 22 and the position of the center 29 of the plate-shaped workpiece 20 is measured. Then, the position of the center 29 of the plate-like workpiece 20 coincides with the rotation axis 159 of the holding table 152 by correcting the conveyance amount of the conveyance means 14 based on the correction amount calculated based on the measured deviation. Thereby, the position of the center 28 of the circular recessed part 22 formed in a grinding process can be made to correspond with the position of the center 29 of the plate-shaped workpiece 20.

  Note that the conveying means is not limited to the configuration of the conveying means 14 shown in FIG. Since the conveyance correction amount obtained in the conveyance correction amount calculation step varies depending on the configuration of the conveyance means 14, some other examples will be described.

  The conveying means 14A shown in FIG. 7 does not have the equivalent of the moving means 144 shown in FIG. 2, and the base 143 is fixed to the main body 11 shown in FIG. Instead, the rotation arm 142 includes expansion / contraction means 145 that varies the distance between the transport pad 141 and the rotation shaft 149 within a predetermined range. The rotating shaft 149 of the rotating arm 142 is disposed at a distance R in the + Y direction when viewed from the rotating shaft 139 of the temporary table 131 and is −X when viewed from the rotating shaft 159 of the holding table 152 in the delivery position. Similarly, they are spaced apart by a distance R in the direction. Below, as shown in FIG. 6, the case where the center 29 of the plate-shaped workpiece 20 and the center 28 of the circular recessed part 22 have shifted | deviated only (DELTA) x and (DELTA) y is demonstrated.

In the receiving stage of the transporting process, the transporting unit 14A rotates the rotating arm 142 and directs the rotating arm 142 in a direction shifted by tan ⁻¹ (Δx / R) from the −Y direction. Then, the expansion / contraction means 145 expands / contracts the rotating arm 142 to set the distance between the center of the transport pad 141 and the rotation shaft 149 to R + Δy.

  Next, in the delivery stage, the transport unit 14A rotates the rotation arm 142 in the + X direction, and the expansion / contraction unit 145 expands / contracts the rotation arm 142, so that the center of the transport pad 141 and the rotation shaft 149 are aligned. Let R be the distance between. As a result, the center of the transport pad 141 is aligned with the rotation shaft 159 of the holding table 152 at the delivery position, and the center 29 of the plate-like workpiece 20 coincides with the rotation shaft 159 of the holding table 152.

  The conveying means 14B shown in FIG. 8 does not have the equivalent of the moving means 144 shown in FIG. 2, and the base 143 is fixed to the main body 11 shown in FIG. Further, the rotating arm 142 does not have the one corresponding to the expansion / contraction means 145 shown in FIG. Instead, the temporary placement means 13B has a moving means 134 that moves the temporary placement table 131 in the ± Y direction. That is, the temporary placing means 13B includes either the first moving mechanism or the second moving mechanism. The rotating shaft 149 of the rotating arm 142 is arranged in the + Y direction when viewed from the rotating shaft 139 of the temporary table 131 and is a distance X2 in the −X direction when viewed from the rotating shaft 159 of the holding table 152 at the delivery position. Are located apart.

In the receiving stage of the transport process, the moving means 134 moves the temporary table 131 to move the rotary shaft 139 of the temporary table 131 to a position away from the rotary shaft 149 of the rotary arm 142 by X2-Δx. . The conveyance means 14B rotates the rotation arm 142 so that the rotation arm 142 is shifted from the −Y direction by tan ⁻¹ (Δx / X2) and holds the plate-like workpiece 20 by the conveyance pad 141. .

  Next, in the delivery stage, the conveying means 14B rotates the rotating arm 142 and directs it in the + X direction. As a result, the rotation shaft 159 of the holding table 152 at the delivery position and the center 29 of the plate-like workpiece 20 coincide with each other, and in this state, the transport pad 141 is lowered to hold the plate-like workpiece W on the holding table 152.

  Note that the above-described configuration of the transport unit and the positional relationship with the temporary placement unit and the holding table 152 at the delivery position are examples, and are not limited thereto. For example, the temporary placing means 13 has a moving means for moving the temporary placement table 131 in the ± X direction in addition to the moving means 134 for moving the temporary placement table 131 in the ± Y direction. It may be configured to move freely within.

  As described above, the deviation between the position of the center 28 of the circular recess 22 and the position of the center 29 of the plate-like workpiece 20 is measured, and the conveyance amount of the plate-like workpiece 20 is corrected based on the measured deviation. The position of the center 29 of the plate-like workpiece 20 can be made coincident with the rotation shaft 159 of the holding table 152 at the delivery position. Thereby, the position of the center 28 of the circular recessed part 22 formed in the plate-shaped workpiece 20 can be matched with the position of the center 29 of the plate-shaped workpiece 20. For this reason, it is not necessary to consider the case where the center position is shifted in the subsequent steps.

  The embodiment described above is an example, and the present invention is not limited to this. For example, the plate-like workpiece center calculation step and the recess center calculation step need not be executed by the temporary placement means 13 and may be executed at different positions. By doing so, it is not necessary to return the plate-like workpiece 20 in which the circular recess 22 is formed in the grinding process to the temporary placement means 13, and the next plate-like workpiece 20 can be kept on standby on the temporary placement means 13. , The flow becomes smooth and productivity can be increased.

10 grinding device, 11 main body, 12 carry-in / out means,
13 Temporary placement means, 131 Temporary placement table, 132 Measuring unit, 133 Measuring support unit,
134 moving means, 139, 149, 159 rotating shaft,
14, 17 transport means, 141 transport pad,
142 rotating arm (first moving mechanism), 143 base,
144 moving means (second moving mechanism), 145 expansion / contraction means, 148 straight line,
15 holding means, 151 turntable, 152 holding table,
16 grinding means, 18 cleaning means, 19 control unit,
20 plate workpiece, 21 mark, 22 circular recess, 28, 29 center,
30 cassettes,

Claims (2)

A first moving mechanism for moving the plate-like workpiece in the horizontal direction; a second moving mechanism for moving the plate-like workpiece in the horizontal direction intersecting the horizontal direction; a temporary placing means for temporarily placing the plate-like workpiece; In a grinding apparatus comprising at least a holding table for holding a workpiece and a grinding means for grinding a plate-like workpiece held on the holding table, the first moving mechanism and the second moving mechanism are used. A workpiece transfer method for transferring a plate-like workpiece from the temporary table to the holding table,
The temporary placing means measures a predetermined position of the outer periphery of the plate-like workpiece that is sucked and held by the plate-like workpiece and rotates, and the outer circumference of the plate-like workpiece. And a measurement unit that detects a mark indicating a crystal orientation provided in the unit,
Grinding the central portion of the plate-like workpiece held by the holding table using the grinding means to form a concave portion, and forming a convex portion around the concave portion;
The temporary placement table sucks and holds the plate-like workpiece ground in the grinding process, rotates the temporary placement table, sets the mark position detected by the measurement unit as a measurement start position, and rotates the temporary placement table. A plate-like workpiece center calculating step in which the measuring unit calculates the center of the plate-like workpiece from three positions on the outer periphery of the plate-like workpiece;
The temporary placement table is rotated, and the position of the mark detected by the measurement unit is set as a measurement start position. The temporary placement table is rotated, and the measurement unit is set to 3 of the boundary between the concave portion and the convex portion of the plate-like workpiece. A recess center calculating step for calculating the center of the recess from the position of the place;
A conveyance correction amount and a conveyance correction direction are calculated from the center of the plate workpiece calculated in the plate workpiece center calculation step and the recess center of the plate workpiece calculated in the recess center calculation step. A conveyance correction amount calculating step for calculating a first correction amount for the movement amount of one movement mechanism and a second correction amount for the movement amount of the second movement mechanism;
Based on the first correction amount and the second correction amount calculated in the transport correction amount calculation step, transport from the temporary placement table to the holding table by the first movement mechanism and the second movement mechanism. A transporting step for transporting the plate-shaped workpiece by correcting the amount and matching the center of the holding table with the center of the plate-shaped workpiece;
A workpiece transfer method comprising: The temporary placement means includes either the first moving mechanism or the second moving mechanism, and in the transporting step, the plate-shaped workpiece is transported by the first moving mechanism and the second moving mechanism. Item 2. The work conveying method according to Item 1.

Images