JP2014228390A - Punching device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To finely adjust the interval between a plurality of needles by a simple constitution and an easy operation.SOLUTION: A punching device includes: a plurality of needles 2 arranged approximately in parallel at an interval in the radial direction; a deformable body 3 holding each part in the longitudinal direction of the plurality of needles 2, and contractible in the arrangement direction of the plurality of needles 2 according to an external force; and a pressing mechanism 4 capable of applying a pressing force in the arrangement direction to the deformable body 3, and changing the intensity of the pressing force.

Description

  The present invention relates to a punching device that peels a substrate from an adhesive sheet by sticking the adhesive surface of the substrate attached to the adhesive sheet with a needle.

  2. Description of the Related Art Conventionally, a technique for selectively collecting a specific region including a desired cell from a section by dividing a section of biological tissue is known (see, for example, Patent Document 1). According to Patent Document 1, the substrate is divided into a plurality of chips along the cut line by forming a cut in the substrate attached on the adhesive sheet, pasting a section on the substrate, and extending the adhesive sheet. At this time, the slice can also be divided at the same time along the cut line. Thereafter, the adhesive sheet is maintained in the stretched state by the grip ring, and the desired cell is contained by peeling off the adhesive surface of the chip to which the tissue fragment containing the desired cell is attached with a needle. Section fragments can be collected.

  On the other hand, in the semiconductor field, a defect inspection apparatus is known in which a probe is brought into contact with a semiconductor chip on which an element is mounted, and a semiconductor chip is electrically inspected for defects (see, for example, Patent Document 2). Whether or not sufficient electrical contact is obtained between the semiconductor chip and the probe depends on the contact angle of the probe with respect to the semiconductor chip. Therefore, the apparatus described in Patent Document 2 includes a mechanism for finely adjusting the angle of each probe with respect to the tip.

International Publication No. 2011/149909 JP-A-6-27144

  However, in the apparatus of Patent Document 1, when the fixing ring is attached to the extended adhesive sheet, the adhesive sheet is distorted, so that the extension rate of the adhesive sheet fixed in the extended state may vary depending on the location. Therefore, when a plurality of tips are simultaneously struck using a plurality of needles, it is necessary to finely adjust the interval between the needles according to the interval between the tips. If the tip is struck with an inappropriate spacing between the needles, the center of the adhesive surface of the tip cannot be struck and the tip may not peel from the adhesive sheet.

  On the other hand, in the case of the semiconductor device of Patent Document 2, since the semiconductor chip is formed with a predetermined designed pattern, the contact position between the probe and the semiconductor chip is always constant, and the interval between the probes is finely adjusted. Is not assumed. It is possible to finely adjust the distance between the needles by adjusting the angle of the needles. However, since the angles of a plurality of needles must be adjusted one by one, the configuration and operation become complicated and practical. Is unsuitable.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to provide a punching device capable of finely adjusting the interval between a plurality of needles with a simple configuration and easy operation.

In order to achieve the above object, the present invention provides the following means.
The present invention holds a plurality of needles arranged substantially in parallel with each other at an interval in the radial direction, a part of the plurality of needles in the longitudinal direction, and in the arrangement direction of the plurality of needles according to an external force. A punching device is provided that includes a contractible deformable body and a pressing mechanism that applies a pressing force in the arrangement direction to the deformable body and can change the magnitude of the pressing force.

  According to this invention, a chip | tip can be peeled and collect | recovered from an adhesive sheet by sticking the adhesive surface with the said adhesive sheet of the chip | tip stuck on the adhesive sheet with a needle | hook. At this time, a plurality of chips can be collected simultaneously by poking the adhesive surfaces of the plurality of chips with a plurality of needles.

  In this case, by applying a pressing force to the deformable body by the pressing mechanism, the deformable body contracts in the direction of the pressing force, and the interval between the needles in the direction of the pressing force becomes narrow. Therefore, by finely adjusting the distance between the needles according to the distance between the chips, even if the distance between the chips varies depending on the position, an appropriate position of the adhesive surface of each chip can be picked up by the needle. As described above, according to the present invention, the distance between the needles can be finely adjusted with a simple configuration in which the deformable body is pressed and deformed and an easy operation.

In the above invention, comprising a plurality of the deformable bodies arranged in the longitudinal direction of the needle, the plurality of needles are two-dimensionally arranged in first and second directions perpendicular to the longitudinal direction of the needle, The pressing mechanism may apply the pressing force in the first or second direction to each of the plurality of deformable bodies.
By doing in this way, by providing a separate deformation body for every contraction direction of a deformation body, the space | interval of the needles of a plurality of directions can be finely adjusted more accurately independently of each other.

  In the above invention, each of the plurality of deformable bodies is composed of a plurality of members formed by being divided in a direction different from the direction of the pressing force among the first and second directions. Each of the plurality of members holds the needles in a single row in the same direction as the direction of the pressing force among the first and second directions, and the plurality of members constituting the respective deformable bodies , And may be arranged at intervals in a direction different from the direction of the pressing force. Alternatively, in the above invention, each of the plurality of deformable bodies has a cavity formed between the needles adjacent to each other in a direction different from the direction of the pressing force in the first and second directions. You may do it.

  By doing in this way, depending on the material constituting the deformable body, when the deformable body is contracted by being pressed by the pressing mechanism, the deformable body may expand in a direction crossing the contraction direction. Even if such deformation of the deformation occurs, the expansion of the deformation is absorbed by the spaces between the members or the cavities formed in the deformation. Therefore, it is possible to prevent the expansion of the deformable body in an unintended direction from affecting the fine adjustment of the position of the adjacent needle.

In the above invention, the deformable body has a hole into which a part of the needle in the longitudinal direction is press-fitted, and the frictional force generated between the inner peripheral surface of the hole and the outer peripheral surface of the needle A needle may be held.
By doing in this way, a needle | hook can be easily attached or detached with respect to a deformation | transformation body.

Moreover, in the said invention, it is preferable that the said deformation body consists of silicone rubber.
By doing so, the amount of contraction of the deformable body appropriate to the magnitude of the pressing force can be obtained, and accurate fine adjustment of the interval between the needles can be performed more easily.

  According to the present invention, there is an effect that the interval between a plurality of needles can be finely adjusted with a simple configuration and an easy operation.

It is a figure explaining the outline | summary of the punching apparatus which concerns on one Embodiment of this invention. It is a top view which shows the chip | tip applied to the chip | tip collection | recovery apparatus of FIG. It is sectional drawing which shows the structure of the punching apparatus which concerns on one Embodiment of this invention. It is a figure which shows the deformation body in the state which the punching apparatus of FIG. 3 was equipped with (a) free state, (b) the state shrunk in the X direction, and (c) the state shrunk in the Y direction. It is a figure which shows the modification of the deformation body with which the punching apparatus of FIG. 3 is provided. It is a figure which shows the modification of the deformation | transformation body of FIG. It is a figure which shows another modification of the deformation | transformation body of FIG. It is a figure which shows another modification of the deformation body with which the punching apparatus of FIG. 3 is provided.

Hereinafter, a punching device 1 according to an embodiment of the present invention will be described with reference to the drawings.
First, the outline | summary of the punching apparatus 1 which concerns on this embodiment is demonstrated.
As shown in FIG. 1, the punching device 1 according to the present embodiment is used as a part of a chip collection device 100 that peels and collects the chip 20 adhered to the adhesive sheet 40 from the adhesive sheet 40.

  As shown in FIG. 2, a part of the slice A cut out from the living tissue is attached to each chip 20. Such a chip 20 is produced by the following method as an example. First, a single substrate such as a cover glass is pasted on the adhesive sheet 40, and the substrate is cut into a lattice pattern on the adhesive sheet 40 to form cuts. Next, the slice A is pasted on the substrate, and the adhesive sheet 40 is extended in the surface direction. Thereby, the substrate is divided into a plurality of chips 20 along the cut line, and at this time, the section A on the substrate is also divided into a plurality of pieces A ′ along the cut line of the substrate.

  After dividing the substrate, the adhesive sheet 40 is maintained in an extended state using a grip ring or the like. When fixing with this ring, the adhesive sheet 40 is distorted, and the width dimension of the gap between the chips 20 varies depending on the position.

The chip collection device 100 includes a stage 60 that horizontally supports the above-described adhesive sheet 40 maintained in an extended state, and a punching device 1 and a moving mechanism 80 disposed above the stage 60.
The punching device 1 includes a plurality of needles 2 as will be described later, and holds the plurality of needles 2 with their tips directed substantially vertically downward. The punching device 1 is provided so as to be movable in the horizontal direction and the vertical direction by the moving mechanism 80.

  The operation of the chip collecting apparatus 100 configured as described above will be described. First, the adhesive sheet 40 is placed on the stage 60 with the chip 20 facing downward. Next, by moving the punching device 1 in the horizontal direction by the moving mechanism 80, the needle 2 is positioned substantially vertically above each of the plurality of chips 20 to which the desired fragment A 'is attached. Next, the punching device 1 is moved vertically downward by the moving mechanism 80. As a result, the adhesive surfaces of the plurality of chips 20 are projected substantially simultaneously with the plurality of needles 2, and the chips 20 are peeled off and dropped from the adhesive sheet 40, and collected into the container 10 disposed below the stage 60. can do.

Next, details of the punching device 1 according to the present embodiment will be described.
As shown in FIG. 3, the punching device 1 includes a plurality of needles 2 arranged substantially in parallel with an interval in the radial direction, and a deformable body that holds a part of the proximal end side of the plurality of needles 2. 3 and a pressing mechanism 4 that applies pressing forces Fx and Fy that cause contraction deformation to the deformable body 3 and that can adjust the magnitudes of the pressing forces Fx and Fy.

  As shown in FIG. 4A, the plurality of needles 2 are arranged in two axial directions (X direction and Y direction, first direction and second direction) orthogonal to each other. The tips of the plurality of needles 2 are arranged on substantially the same plane orthogonal to the longitudinal direction of the needles 2, and the tips of the plurality of needles 2 are brought into contact with the adhesive surfaces of the plurality of chips 20 when they stick to the adhesive surfaces of the tips 20. It comes to contact almost simultaneously.

  In addition, in order to simplify the drawing, the drawing to be referred to shows a configuration in which two needles 2 are arranged in the X and Y directions, but three or more needles 2 in the X and Y directions are shown. May be arranged. In addition, each needle 2 may have a single needle tip as shown, but the tip portion has a plurality of needle tips that are branched into a plurality and processed into a crown shape. Also good.

  The diameter of the needle 2 is appropriately set according to the size of the chip 20. In the present embodiment, the tip 20 having a side dimension of about 0.3 mm to 1.0 mm is assumed, and the diameter of the main portion excluding the tip of the needle 2 is about 0.2 mm to 2.0 mm. Is preferred.

  The deformable body 3 is a rectangular parallelepiped made of an elastic material, and four holes 3a into which the needle 2 is press-fitted are formed substantially parallel to the side surface. The deformable body 3 holds the needle 2 by a frictional force generated between the inner peripheral surface of the hole 3 a and the outer peripheral surface of the needle 2. That is, the needle 2 can be removed from the deformable body 3 by pulling out the needle 2 from the hole 3a against this frictional force, and the needle 2 can be removed from the deformable body 3 by press-fitting the needle 2 into the hole 3a. Can be attached to. Therefore, when a part of the plurality of needles 2 is broken, only the broken needle 2 can be replaced.

  In the drawing to be referred to, a configuration in which the needle 2 passes through the deformable body 3 is shown, but the proximal end of the needle 2 may be inserted up to a midway position of the deformable body 3.

  The elastic material constituting the deformable body 3 may be any material that can obtain an appropriate amount of deformation with respect to the pressing forces Fx and Fy applied by the pressing mechanism 4, and is preferably silicone rubber. Besides silicone rubber, urethane resin, foamed urethane resin, butyl rubber, natural rubber, or the like may be used.

The pressing mechanism 4 includes a holder 5 that holds the deformable body 3 therein, and two sets of leaf springs 6A and 6B and screws 7A and 7B provided on the side surface of the holder 5.
The holder 5 has a hole 5a in which the deformable body 3 in a free state to which the pressing forces Fx and Fy by the pressing mechanism 4 are not applied is fitted, and between the inner surface of the hole 5a and the side surface of the deformable body 3. The deformable body 3 is held by the frictional force generated in. One end of the hole 5 a is open, and the tip side of the needle 2 protrudes from the holder 5.

  The first set of leaf springs 6A and screws 7A contract the deformable body 3 in the X direction, and the second set of leaf springs 6B and screws 7B contract the deformable body 3 in the Y direction. FIG. 3 shows a first set of leaf springs 6A and screws 7A, and a second set of leaf springs 6B and screws 7B (not shown) are provided on the front side or the back side in FIG. ing.

  The holder 5 has a window 5b that exposes one side surface of the deformable body 3 at a position facing the one side surface perpendicular to the X axis. A part of the leaf spring 6A is in contact with the side surface of the deformable body 3 through the window 5b, and the end is connected to the screw 7A. The screw 7A is inserted into a screw hole 8A formed in the holder 5 in the X direction. By tightening the screw 7A, the leaf spring 6A is normal to the side surface of the deformable body 3 (X direction). ) Is applied. Further, by changing the tightening amount of the screw 7A at this time, the magnitude of the pressing force Fx applied to the deformable body 3 by the leaf spring 6A is adjusted.

  Here, when the deformable body 3 contracts in the X direction by applying a pressing force Fx from the leaf spring 6A, the plurality of needles 2 arranged in the X direction are moved in the X direction as shown in FIG. 4B. The distance ΔX in the X direction between the plurality of needles 2 is reduced by translation. At this time, the change amount of the interval ΔX is determined by the pressing force Fx.

  Similarly, the second set of leaf springs 6B also has a pressing force Fy in the normal direction (Y direction) of the side surface with respect to one side surface perpendicular to the Y axis of the deformable body 3 by tightening the screw 7B. Is supposed to be added. When the deformable body 3 contracts in the Y direction by applying a pressing force Fy from the leaf spring 6B, as shown in FIG. 4C, the plurality of needles 2 arranged in the Y direction are parallel to the Y direction. By moving, the interval ΔY in the Y direction between the plurality of needles 2 is reduced. The amount of change in the interval ΔY at this time is determined by the pressing force Fy adjusted according to the tightening amount of the screw 7B.

  Here, by using a mechanism that converts a relatively large rotational movement of the screws 7A and 7B into a relatively small contraction deformation of the deformable body 3 as the pressing mechanism 4, the contraction width of the deformable body 3 is adjusted with high accuracy. The distances ΔX and ΔY between the needles 2 can be finely adjusted accurately and easily.

  As described above, the adjustment range of the distances ΔX and ΔY between the needles 2 is the case where the tip 20 having a side of about 0.3 mm to 1 mm is pierced by the needle 2 having a diameter of the main portion excluding the tip of about 0.2 mm to 2.0 mm. About 0.3 mm to 2.0 mm is preferable. That is, the deformable body 3 holds the plurality of needles 2 so that the distances ΔX and ΔY between the needles 2 are about 2.0 mm in a state where the pressing forces Fx and Fy are not applied by the pressing mechanism 4. Yes.

  In the drawing to be referred to, a configuration in which the side surface of the deformable body 3 is pressed by the leaf springs 6A and 6B is shown. For example, the needle 2 is fixed to the side surface of the deformable body 3, and the side surface of the needle 2 is You may press by spring 6A, 6B.

Next, the operation of the punching device 1 configured as described above will be described.
In order to collect the chip 20 attached to the adhesive sheet 40 using the punching apparatus 1 according to the present embodiment, as described above, when positioning the punching apparatus 1 in the horizontal direction with respect to the chip 20, It is confirmed whether or not each of the plurality of needles 2 is positioned substantially vertically above the center of the adhesive surface of the chip 20.

  At this time, the width dimension of the gap between the adjacent chips 20 differs depending on the position, and the distance between the centers of the chips 20 in the X and Y directions does not match the distance between the centers of the needles 2 in the X and Y directions. In this case, each of the plurality of needles 2 cannot be disposed substantially vertically above the center of the adhesive surface of the chip 20. In such a case, by tightening the screws 7A and 7B, the distance between the centers of the tips 20 in the X and Y directions and the distance between the centers of the needles 2 in the X and Y directions coincide with each other. The intervals ΔX and ΔY are finely adjusted.

Thereafter, by moving the punching device 1 vertically downward by the moving mechanism 80, it is possible to reliably collect a desired plurality of chips 20 by hitting them with the needle 2 under appropriate conditions.
Thus, according to the present embodiment, by utilizing the deformation of the deformable body 3, there is an advantage that the distances ΔX and ΔY between the needles 2 can be finely adjusted with a simple configuration and an easy operation.

  In the present embodiment, the distances ΔX and ΔY between the needles 2 in both the X direction and the Y direction are finely adjusted using one deformable body 3, but instead, this is shown in FIG. As shown in the figure, two deformable bodies 3A and 3B arranged in the longitudinal direction of the needle 2 are provided, and one leaf spring 6A applies a pressing force Fx in the X direction to one deformable body 3A, and the other leaf spring 6B A pressing force Fy in the Y direction may be applied to the other deformable body 3B.

  In this way, particularly when the deformable bodies 3A and 3B are made of a material that deforms while keeping the volume constant, the deformable bodies 3A and 3B are pressed and contracted in one direction. In addition, when the deformable bodies 3A and 3B expand in the direction intersecting the contraction direction, the displacement of the needle 2 may be smaller than intended. Therefore, by providing separate deformable bodies 3A and 3B for each direction to be finely adjusted, the distances ΔX and ΔY between the needles 2 in each direction can be finely adjusted more accurately. However, in the X direction, the tip of the needle 2 is displaced in the direction in which the interval is widened simply by pressing the deformable body 3A. For this reason, if the end of the needle 2 that is not sharp is fixed, the distance between the tips of the needle 2 can be reduced when the deformable body 3A is pressed.

  FIG. 6 shows a modification of the deformable bodies 3A and 3B shown in FIG. As shown in FIG. 6, when two deformable bodies 3A and 3B are provided, each deformable body 3A and 3B expands when contracted by a direction perpendicular to the contraction direction (that is, by pressing forces Fx and Fy). The plurality of members 3A ′ and 3B ′ may be arranged in the perpendicular direction with a gap therebetween. Therefore, each member 3A ', 3B' holds a plurality of needles 2 in each contraction direction and a single needle 2 in a direction perpendicular to the contraction direction.

  By doing in this way, when each member 3A ', 3B' which comprises deformation | transformation body 3A, 3B expand | swells in the direction perpendicular | vertical to the direction of pressing force Fx, Fy, this expansion | swelling is member 3A ', 3B'. It is absorbed by the gap between them. Thereby, it is possible to prevent the expansion of the deformable bodies 3 </ b> A and 3 </ b> B in the unintended direction from affecting the position of the adjacent needle 2. The plurality of members 3A ′ and 3B ′ may be pressed by a common leaf spring or may be pressed by separate leaf springs.

  FIG. 7 shows another modification of the deformable bodies 3A and 3B shown in FIG. As shown in FIG. 7, when four deformable bodies 3A, 3B, 3C, and 3D are provided, each deformable body 3A, 3B, 3C, and 3D absorbs expansion in a direction perpendicular to the contraction direction by itself. You may have such a shape. For example, each of the deformable bodies 3A, 3B, 3C, and 3D may have a cavity 3a formed between adjacent needles 2 in a direction parallel to the contraction direction. Here, by pressing at two locations in the same direction, the distance between the tips of the needles 2 corresponding to the contraction of the deformable bodies 3A, 3B, 3C, 3D can be obtained without fixing the non-sharp end of the needle 2. Narrowing and operability are improved.

  By doing in this way, when each deformation body 3A, 3B, 3C, 3D expand | swells in the direction perpendicular | vertical to the direction of pressing force Fx, Fy, this expansion | swelling is absorbed by the cavity 3a. Thereby, it is possible to prevent the expansion of the deformable bodies 3A, 3B, 3C, 3D in the unintended direction from affecting the position of the adjacent needle 2.

In the present embodiment, the configuration for finely adjusting the two-axis spacings ΔX and ΔY between the two-dimensionally arranged needles 2 has been described. However, as shown in FIG. It is also possible to finely adjust the interval ΔX between the needles 2 in the uniaxial direction.
Even in this case, the interval ΔX between the plurality of needles 2 can be finely adjusted only with a simple configuration and easy operation, and the plurality of tips 20 can be reliably recovered simultaneously using the plurality of needles 2.

DESCRIPTION OF SYMBOLS 1 Punching device 2 Needle 3, 3A, 3B Deformation body 3A ', 3B' Member 3a Cavity 4 Pressing mechanism 5 Holder 5a Hole 5b Window 6A, 6B Leaf spring 7A, 7B Screw 8A Screw hole 10 Container 20 Tip 40 Adhesive sheet 60 Stage 80 Moving mechanism 100 Chip collection device

Claims (6)

A plurality of needles arranged on substantially the same plane with the tips intersecting in the longitudinal direction and spaced substantially parallel to each other in the radial direction;
A deformable body that holds a part of the plurality of needles in the longitudinal direction and can contract in the arrangement direction of the plurality of needles according to an external force
A punching device comprising: a pressing mechanism that applies a pressing force in the arrangement direction to the deformable body and can change the magnitude of the pressing force. A plurality of the deformable bodies arranged in the longitudinal direction of the needle,
The plurality of needles are two-dimensionally arranged in first and second directions perpendicular to the longitudinal direction of the needles;
The punching device according to claim 1, wherein the pressing mechanism applies the pressing force in the first or second direction to each of the plurality of deformable bodies. Each of the plurality of deformable bodies includes a plurality of members formed by being divided in a direction different from the direction of the pressing force among the first and second directions, and each of the plurality of members Holds the needles in a single row in the same direction as the direction of the pressing force among the first and second directions,
The punching device according to claim 2, wherein the plurality of members constituting each of the deformable bodies are arranged at intervals in a direction different from the direction of the pressing force.   3. The punching according to claim 2, wherein each of the plurality of deformation bodies has a cavity formed between the needles adjacent to each other in a direction different from the direction of the pressing force in the first and second directions. apparatus.   The deformable body has a hole into which a part of the needle in the longitudinal direction is press-fitted, and holds the needle by a frictional force generated between an inner peripheral surface of the hole and an outer peripheral surface of the needle. The punching device according to claim 4.   The punching device according to any one of claims 1 to 5, wherein the deformable body is made of silicone rubber.

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