JP2014225282A - Pressure valve, compression device, overlapping device, compression method and overlapping method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress an influence of a hysteresis component due to a residual magnetic field in an electromagnetic proportional pressure-reducing valve employing an electromagnetic solenoid, and to attain a precise control.SOLUTION: A pressure-reducing valve comprises: a valve part 302; a piston part 202 that imparts to the pressure valve a pressure force; a cylinder part 204 that is externally fitted into the piston part; and a partition curtain 208 that is anchored to the piston part and the cylinder part so that the piston part can move in a pressure direction for pressing the pressure valve, and forms an airtight space in a part of the cylinder part.

Description

  The present invention relates to a pressure reducing valve.

2. Description of the Related Art Conventionally, an electromagnetic proportional pressure reducing valve using a solenoid is known as a computer-controlled pressure reducing valve structure (see, for example, Patent Document 1). An electromagnetic proportional pressure reducing valve using a solenoid is configured to adjust a pressing force applied to the valve by a movable iron core by controlling a current applied to the solenoid and changing a magnetic field acting on the movable iron core.
[Prior art documents]
[Patent Literature]
[Patent Document 1] Japanese Patent Laid-Open No. 7-182051

  Here, the movable iron core has a so-called magnetic hysteresis property in which the thrust generated by the history of application of the magnetic field fluctuates even when the same current is applied because the applied magnetic field remains. Therefore, in the electromagnetic proportional pressure reducing valve using a solenoid, the pressing force applied to the valve fluctuates due to the influence of the magnetic hysteresis, and there is a problem that it is difficult to realize precise pressure control.

  In order to solve the above-described problem, a pressure reducing valve according to a first aspect of the present invention includes a valve portion, a piston portion that applies a pressing force to the valve portion, a cylinder portion that is fitted on the piston portion, and a piston portion that is a valve portion. And a partition curtain that is fixed to the piston portion and the cylinder portion so as to move in a pressing direction that presses and forms an airtight space in a part of the cylinder portion.

  In order to solve the above-described problem, the pressure reducing valve according to the second aspect of the present invention includes a valve part, a piston part that is configured separately from the valve part, and applies a pressing force to the valve part, and the valve part and the piston. And an elastic sheet that is interposed between the parts and transmits the pressing force of the piston part to the valve part.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

It is sectional drawing which shows roughly the whole structure of the pressure-reduction valve which concerns on this embodiment. It is sectional drawing which shows the structure and operation | movement of an air cylinder part roughly. It is sectional drawing which shows the structure and operation | movement of a relief valve part roughly. It is sectional drawing which shows roughly the structure of the raising / lowering module using the pressure-reduction valve which concerns on this embodiment. It is sectional drawing which shows a mode that the volume of the lower subroom of the raising / lowering module was increased and the main piston was raised. It is a front view which shows roughly the structure of the superimposition apparatus which superimposes a wafer.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 is a cross-sectional view schematically showing the overall structure of a pressure reducing valve 100 according to this embodiment. In the figure, the direction perpendicular to the mounting surface of the pressure reducing valve 100 is the Z-axis direction, the lateral direction is the X-axis direction, and the depth direction is the Y-axis direction. The description will be made with the + Z-axis direction as the upward direction and the −Z-axis direction as the downward direction. The pressure reducing valve 100 includes a control unit 101, an electropneumatic regulator 102, a compressor 103, an input unit 104, an air cylinder unit 200, a relief valve unit 300, and a pressure reducing valve unit 400.

  The electropneumatic regulator 102 receives a pressure control signal corresponding to the set pressure set in the control unit 101 from the control unit 101, and the pressure of the gas supplied from the compressor 103 to the air cylinder unit 200 becomes equal to the set pressure. So that the pressure control is performed. Specifically, the electropneumatic regulator 102 controls the pressure of the gas supplied from the compressor 103 to the air cylinder unit 200 by feedback control according to the output of a pressure sensor built in the electropneumatic regulator 102, for example.

  The set pressure is managed by the control unit 101, but can be set based on information received from another device. In that case, the control unit 101 has a function of receiving information from another device. In addition, the user can also set via the input unit 104.

  The air cylinder part 200 includes a piston part 202, a cylinder part 204 that fits around the piston part 202, and a partition part 208 that is fixed to the piston part 202 and the cylinder part 204 and forms an airtight space in a part of the cylinder part 204. The gas whose pressure is controlled by the electropneumatic regulator 102 is introduced into an airtight space 206 formed in a part of the cylinder portion 204, so that the cylinder portion 204 moves downward and a pressing force is applied to a valve portion 302 described later. It is the composition which gives. A more specific configuration of the air cylinder unit 200 will be described later.

  The relief valve unit 300 includes a valve unit 302, a valve seat unit 304, and a drain port 306. The valve portion 302 is accommodated in an accommodation space 308 filled with hydraulic oil. The accommodating space 308 and the air cylinder part 200 are separated by an elastic sheet 310, and the hydraulic oil in the accommodating space 308 is prevented from leaking to the air cylinder part 200 side. Further, a downward pressing force generated in the piston part 202 of the air cylinder part 200 is applied to the valve part 302 via the elastic sheet 310.

  The valve portion 302 that has received the downward pressing force by the piston portion 202 is pressed against the valve seat portion 304. Since the piston part 202 is pressed by the electropneumatic regulator 102 at the set pressure set in the control part 101, the pressing force applied to the valve part 302 becomes equal to this set pressure.

  The valve seat 304 includes an orifice 312 that forms a part of the accommodation space 308 and communicates with the pressure reducing valve 400 described later. When the pressure of the hydraulic oil which is going to flow from the pressure reducing valve part 400 through the orifice 312 exceeds the pressing force by which the valve part 302 closes the valve seat part 304, the valve part 302 is retracted from the valve seat part 304. The hydraulic oil flows into the storage space 308, and the hydraulic oil that exceeds the volume of the storage space 308 is discharged from the drain port 306. A tank 314 is connected to the drain port 306, and hydraulic oil discharged from the drain port 306 is stored in the tank 314. A more specific configuration of the relief valve unit 300 will be described later.

  The pressure reducing valve portion 400 includes a primary side port 402, a balance piston 404, a secondary side port 406, and a spring 408. A constant capacity pump 410 is connected to the primary port 402, and hydraulic oil is supplied from the constant capacity pump 410 at a constant pressure.

  The balance piston 404 is accommodated in the accommodation space 412 and is provided on the hydraulic oil flow path from the primary side port 402 to the secondary side port 406. When the balance piston 404 is positioned on the lower side in the accommodation space 412, the primary side port 402 and the secondary side port 406 communicate with each other. As the balance piston 404 moves upward, the flow path between the primary port 402 and the secondary port 406 is narrowed and finally shut off. The spring 408 is provided between the relief valve unit 300 and the balance piston 404 and applies a downward force to the balance piston 404.

  A secondary pressure, which is a pressure applied to the secondary port 406 by the hydraulic oil supplied from the primary port 402, is guided to the lower side of the balance piston 404. The balance piston 404 includes a center choke 414 that passes through the center of the balance piston 404, and the secondary pressure acts on the valve portion 302 through the center choke 414.

  The pressure receiving areas of the upper and lower surfaces of the balance piston 404 are the same. When the valve seat 304 is closed by the valve portion 302 and no hydraulic fluid is flowing, the pressure applied to the balance piston 404 is equal on the upper and lower surfaces. . When the secondary pressure is lower than the set pressure applied to the valve portion 302, the balance piston 404 is strongly pressed downward by the amount of the spring 408, and the balance piston 404 is pressed downward. As a result, the flow path between the primary side port 402 and the secondary side port 406 is opened, and pressure oil flows directly from the primary side port 402 to the secondary side port 406.

  When the secondary pressure rises and exceeds the set pressure applied to the valve portion 302, the valve portion 302 is retracted from the valve seat portion 304 and hydraulic oil flows out to the tank 314 through the drain port 306. On the other hand, since the pressure oil flowing through the balance piston 404 passes through the center choke 414, the flow is restricted and a pressure difference is generated between the front and rear of the center choke 414, and the pressure on the upper surface side of the balance piston 404 is directly connected to the drain port 306. Thus, the balance piston 404 is pushed upward. As a result, the flow path between the primary side port 402 and the secondary side port 406 is blocked, and the secondary side pressure is maintained at the pressure at that time.

  Further, when the secondary pressure falls below the set pressure, the valve portion 302 closes the valve seat portion 304, the pressure on the upper and lower surfaces of the balance piston 404 becomes the same, and the balance piston 404 is pushed down by the spring 408. . As a result, the flow paths of the primary side port 402 and the secondary side port 406 are opened and pressure oil starts to flow. Thus, the pressure reducing valve 100 according to the present embodiment can keep the pressure of the hydraulic oil output from the secondary side port constant by moving the balance piston 404 up and down with respect to the fluctuation of the secondary side pressure. .

  FIG. 2 is a cross-sectional view schematically showing the structure and operation of the air cylinder unit 200. The upper figure shows a state before the piston part 202 moves downward, which is a pressing direction for pressing the valve part 302, and the lower figure shows a state after the piston part 202 moves downward. A partition curtain 208 is fixed to the piston portion 202 and the cylinder portion 204, and an airtight space 206 is formed in a part of the cylinder portion by the partition curtain 208. When gas is introduced into the airtight space 206 by the electropneumatic regulator 102, the piston portion 202 moves downward and presses the elastic sheet 310 as shown in the following figure.

  The space on the piston part 202 side divided by the elastic sheet 310 is an open space, and the linear motion bearing 210 supports the piston part 202 so as to be slidable in the pressing direction. When sliding resistance is generated between the piston part 202 and the cylinder part 204, the sliding resistance is not constant, and the resistance applied to the piston part 202 varies, so the pressing force applied to the valve part 302 by the piston part 202 varies. Will end up. In the present embodiment, the sliding resistance is suppressed by supporting the piston portion 202 with the linear motion bearing 210, and the fluctuation of the pressing force applied to the valve portion 302 by the piston portion 202 is reduced.

  As described above, the pressure reducing valve 100 according to the present embodiment generates a pressing force of the piston portion 202 by introducing the gas into the airtight space formed in a part of the cylinder portion 204, and the valve via the elastic sheet 310. The part 302 is pressed. Here, the configuration of the pressure reducing valve 100 according to this embodiment is compared with the configuration in which a pressing force is applied to the valve portion 302 using a solenoid.

  When a pressing force is supplied to the valve unit 302 using a solenoid, the movable iron core and the valve unit 302 are connected or the valve unit 302 is pressed by the movable iron core. And by adjusting the magnetic field which acts on a movable iron core by changing the electric current applied to a solenoid, the linear motion of a movable iron core is controlled and the pressing force is supplied to the valve part 302. FIG. Here, the movable iron core has a so-called magnetic hysteresis property in which the thrust generated by the history of application of the magnetic field fluctuates even when the same current is applied because the applied magnetic field remains. Therefore, the pressing force supplied to the valve portion 302 varies due to the influence of the magnetic hysteresis, and it is difficult to precisely control the pressing force.

  On the other hand, the pressure reducing valve 100 according to the present embodiment is configured to generate a pressing force on the piston portion 202 by the pressure of the gas introduced into the airtight space formed in a part of the cylinder portion 204 by the electropneumatic regulator 102, The structure is not affected by magnetic hysteresis. Further, compared with the case where the pressing force is supplied to the valve unit 302 using a solenoid, the air cylinder unit 200 and the air cylinder unit 200 are pressed to press the valve unit 302 housed in the housing space 412 filled with hydraulic oil by the gas pressure. Although the structure which divides the relief valve part 300 is needed, the fluctuation | variation of pressing force can be suppressed compared with the magnetic hysteresis of a solenoid by using the elastic sheet 310 there.

  Furthermore, in the present embodiment, by forming the partition curtain 208 with an elastic material, it is possible to suppress fluctuations in the pressing force even in a portion that generates a gas pressure. Therefore, it is possible to realize control of the pressing force with higher accuracy than when the pressing force is supplied to the valve unit 302 using a solenoid. The partition 208 is not limited to an elastic material, and may be formed of, for example, a bellows.

  Further, in the case of a configuration in which a pressing force is supplied to the valve portion 302 using a solenoid, generally, a movable iron core connected to the valve portion 302 is housed in a non-magnetic case filled with hydraulic oil, A structure is adopted in which a solenoid is installed around the non-magnetic case. In such a structure, the contamination of the hydraulic oil prevents the solenoid from moving smoothly. Therefore, it is important to manage the cleanliness of the hydraulic oil, and measures such as providing a dedicated management mechanism and frequent maintenance are required. Become.

  On the other hand, in the pressure reducing valve 100 according to the present embodiment, gas is introduced into an airtight space formed in a part of the cylinder portion 204 to generate a pressing force of the piston portion 202, and the valve portion is interposed via the elastic sheet 310. Since 302 is pressed, the generation of the pressing force is not affected by the contamination of the hydraulic oil. Therefore, the load concerning cleanliness management and maintenance can be reduced compared with the case where a solenoid is used.

  Further, it is desirable that the pressure applied to the valve portion 302 is always kept equal to the set pressure. However, in the case of a solenoid, generally, the pressing force varies depending on the distance between the solenoid and the movable iron core. That is, the pressing force changes between the state in which the valve portion 302 closes the valve seat portion 304 and the state in which the valve portion 302 is retracted from the valve seat portion 304. It is difficult to keep accurate. On the other hand, in the pressure reducing valve 100 according to the present embodiment, since the air cylinder unit 200 generates a pressing force with a gas pressure, a constant pressure can be applied regardless of the position of the valve unit 302.

  FIG. 3 is a cross-sectional view schematically showing the structure and operation of the relief valve unit 300. The upper diagram shows a state where the valve portion 302 is retracted from the valve seat portion 304, and the lower diagram shows a state where the valve portion 302 closes the valve seat portion 304. The valve part 302 receives the pressing force of the piston part 202 via the elastic sheet 310.

  The elastic sheet 310 is pressure-bonded and fixed between the air cylinder part 200 and the relief valve part 300, and partitions the gas on the air cylinder part 200 side and the hydraulic oil filled in the accommodation space 308 of the relief valve part 300. . Further, by installing an O-ring 212 in contact with the elastic sheet 310 on the air cylinder part 200 side, the inflow of hydraulic oil to the air cylinder part 200 side and the inflow of gas to the accommodation space 308 side are supplementarily performed. It is preventing.

  In the pressure reducing valve 100 according to the present embodiment, the air cylinder part 200, the relief valve part 300, and the pressure reducing valve part 400 are configured separately, and can be easily separated by separating the relief valve part 300 and the pressure reducing valve part 400. The valve seat 304 can be removed. Specifically, first, the air cylinder part 200 screwed to the relief valve part 300 is removed, the elastic seat 310 is peeled off, and the valve part 302 is taken out. Moreover, the relief valve part 300 and the pressure-reducing valve part 400 which were screwed are detached, and the O-ring 316 is removed to take out the valve seat part 304.

  Instead of the valve seat portion 304 thus taken out, a valve seat portion in which at least one of the diameter of the valve seat portion 304 or the diameter of the orifice 312 is replaced is installed instead, so that the characteristics of the relief valve portion 300 can be easily achieved. Can be changed. For example, by replacing the valve seat portion 304 that is in contact with the valve portion 302 with a valve seat portion having a large diameter, the pressure required to retract the valve portion 302 from the valve seat portion 304 can be reduced. By changing the characteristics by exchanging the valve seat 304, for example, it can be adapted to the difference in the volume of the accommodating space of the pressure reducing valve to be connected, the difference in the viscosity of the hydraulic oil to be used, etc. Can be easily performed.

  In the present embodiment, an example in which a needle valve is used as the valve portion 302 has been described. However, the present invention is not limited thereto, and a spherical or cylindrical valve can be used. By using a spherical shape or a cylindrical shape with respect to the needle shape, the flow rate of the hydraulic oil when the valve portion 302 is retracted from the valve seat portion 304 can be increased, and the responsiveness can be enhanced. In the present embodiment, the valve portion 302 can be easily replaced in the same manner as the valve seat portion 304. For example, by replacing the valve portion 302 in accordance with a device to which the pressure reducing valve 100 according to the present embodiment is connected, The characteristics can be easily changed according to the apparatus.

  FIG. 4 is a cross-sectional view schematically showing the structure of the elevating module 600 using the pressure reducing valve 100 according to the present embodiment. In the figure, the vertical direction is the Z-axis direction, the horizontal direction is the X-axis direction, and the depth direction is the Y-axis direction. The elevating module 600 has a two-stage structure up and down. The upper side is the main EV unit 610, and the lower side is the sub EV unit 620. Here, an example in which the pressure reducing valve 110 according to the present embodiment is applied to the main EV unit 610 and the pressure reducing valves 120 and 130 according to the present embodiment are applied to the sub EV unit 620 will be described. The pressure reducing valves 110, 120, and 130 have the same configuration as that of the pressure reducing valve 100, and corresponding components will be described with the same reference numerals.

  The main EV unit 610 is composed of one cylinder-piston mechanism having a large diameter. The sub EV section 620 includes three cylinder-piston mechanisms having small diameters arranged at 120 ° intervals in the circumferential direction when viewed from above. However, the main EV section 610 and the sub EV section 620 are not stacked one above the other independently, but are devised to raise and lower the stage 611 while acting on each other. Each structure will be described below.

  The main EV unit 610 includes a main piston 612 having a stage 611 as an upper surface thereof, a main cylinder 613 that is externally fitted to the main piston 612, and a bellows 614 that is connected to the main cylinder 613 and follows the elevation of the main piston 612. The main room 615 that is a space formed between the main cylinder 613 and the main piston 612 is kept airtight even when the main piston 612 is moved up and down.

  The main room 615 is connected to the secondary port 406 of the pressure reducing valve 110 and the tank 141 via the main room supply port 616 and the electromagnetic valve 111. The main room 615 is filled with hydraulic oil, and the main piston 612 can be moved up and down by controlling the inflow and outflow of the hydraulic oil with the electromagnetic valve 111 and the pressure reducing valve 110.

  The sub EV unit 620 includes three sub EV parts 620 as described above, but includes a sub piston 621 and a sub cylinder 624 that fits around the sub piston 621. The sub piston 621 is inserted from the outside of the main cylinder 613 into the piston guide 617 provided in the main cylinder 613 and reaches the main room 615. A fixing portion 622 for fixing the main piston 612 is provided at the tip of the sub-piston 621 located inside the main room 615. The sub piston 621 is fastened to the main piston 612 by the fixing portion 622.

  The sub-piston 621 includes a piston disk 623 that is fitted to the sub-cylinder 624 at the end opposite to the end where the fixing portion 622 is provided. The space in the sub cylinder 624 is divided by the piston disk 623 into an upper sub room 625 located on the main cylinder 613 side and a lower sub room 626 located on the floor surface side.

  Both the upper subroom 625 and the lower subroom 626 are kept airtight. The secondary port 406 of the pressure reducing valve 120 is connected to the upper subroom 625, and hydraulic oil flows in and out from the pressure reducing valve 120. Further, the secondary port 406 of the pressure reducing valve 130 is connected to the lower subroom 626, and hydraulic oil flows in and out from the pressure reducing valve 130.

  The upper subroom 625 and the lower subroom 626 are filled with hydraulic oil. In addition, since the total volume of the upper subroom 625 and the lower subroom 626 is always constant, the volume ratio of the upper subroom 625 and the lower subroom 626 is changed by cooperatively controlling the pressure reducing valve 120 and the pressure reducing valve 130. Coordinated control of the pressure reducing valve 120 and the pressure reducing valve 130 is executed by communication between the control unit of the lifting module 600, the control unit 101 of the pressure reducing valve 120, and the control unit 101 of the pressure reducing valve 130.

  The pressure reducing valve 120 that has received the control signal from the elevating module 600 first adjusts the set pressure according to the control signal. Then, a pressure control signal corresponding to the set pressure is transmitted to the electropneumatic regulator 102. The electropneumatic regulator 102 that has received the pressure control signal from the control unit 101 adjusts the pressure of the gas supplied from the compressor 103 to the air cylinder unit 200 to be equal to the set pressure.

  The electropneumatic regulator 102 applies a pressing force equal to the set pressure to the valve portion 302 and adjusts the secondary pressure to be equal to the set pressure. In this way, the pressure reducing valve 120 outputs hydraulic oil corresponding to the control signal received from the lifting module 600 from the secondary port 406. With the same control for the pressure reducing valve 130, hydraulic oil is output at a pressure according to an instruction from the lifting module 600.

  When raising / lowering the sub-piston 621, the control unit of the raising / lowering module 600 first switches the electromagnetic valve 111 to the drain line 112, and allows the hydraulic oil to enter and exit the tank 141 and the main room 615 freely. And when raising it, first, the solenoid valve 121 is switched to the drain line 122 to allow the hydraulic oil to enter and exit the tank 142 and the upper subroom 625 freely. Then, with a certain pressure applied by the pressure reducing valve 130, the electromagnetic valve 131 is switched from the drain line 132 to the pressure reducing valve 130 side, and the pressure generated by the pressure reducing valve 130 is supplied into the lower subroom 626.

  Further, when lowering, the electromagnetic valve 131 is switched to the drain line 132 so that the hydraulic oil can enter and leave the tank 142 and the lower subroom 626 freely. Then, with a constant pressure applied by the pressure reducing valve 120, the electromagnetic valve 121 is switched from the drain line 122 to the pressure reducing valve 120 side, and the pressure generated by the pressure reducing valve 120 is supplied to the upper subroom 625. As the sub-piston 621 moves up and down, the main piston 612 fastened to the sub-piston 621 moves up and down.

  In the present embodiment, the three sub EV portions 620 are provided as described above, but the total volume of these three upper subrooms 625 and lower subrooms 626 is the main even when the main piston 612 is located at the lowermost end. The volume of the room 615 is smaller. By configuring such a spatial relationship, a large change can be brought about in the main piston 612 by allowing a smaller volume of hydraulic oil to flow into and out of the sub-EV unit 620.

  When the main piston 612 is moved up and down by the pressure reducing valve 110, the controller of the lifting module 600 first switches the electromagnetic valves 121 and 131 to the drain lines 122 and 132 to operate the tank 142, the upper subroom 625, and the lower subroom 626. Free access to oil. Then, the solenoid valve 111 is switched from the drain line 112 side to the pressure reducing valve 110 side with a constant pressure applied by the pressure reducing valve 110, and the pressure generated by the pressure reducing valve 110 is supplied to the entire main room 615. The piston 612 is raised.

  FIG. 5 is a cross-sectional view showing a state of the elevating module 600 in a state where the main piston 612 and the sub piston 621 are raised. The elevating module 600 can raise and lower the stage 611 at a high speed by raising the sub-piston 621. Further, by raising and lowering the main piston 612, the object to be pressurized placed on the stage 611 can be pressurized with a high pressure.

  As described above, the operation oil is supplied from the pressure reducing valves 120 and 130 to the pressure reducing valve 110 and the sub EV portion 620 to the main EV portion 610 included in the lifting module 600, so that Hydraulic oil can be supplied at a stable pressure. As a result, the stage 611 can be moved up and down stably.

  FIG. 6 is a front view schematically showing the structure of an overlay apparatus 700 that superimposes a plurality of wafers placed on the stage of the lift module 600 by the lift module 600 including the pressure reducing valves 120 and 130 according to the present embodiment. It is. The superimposing apparatus 700 includes an upper top plate 731, an upper heat module 741, and an upper pressure control module 751 installed on the ceiling side, a lower top plate 732, a lower heat module 742, and a lower pressure control module installed on the floor surface side. 752 and the lifting module 600.

  The upper top plate 731, the upper heat module 741, and the upper pressure control module 751 form an upper pressure module, and the lower top plate 732, the lower heat module 742, and the lower pressure control module 752 form a lower pressure module. . In this embodiment, since the upper top plate 731 and the lower top plate 732 are heated by the upper heat module 741 and the lower heat module 742, the upper pressure module and the lower pressure module are respectively heating modules. Can also play a role as

  A pair of substrate holders in which the two substrate holders 190 are integrated by sandwiching the two substrates 180 are carried into and placed on the lower top plate 732 by the transport device. The substrate holder pair is brought into contact with the upper top plate 731 as the elevating module 600 is raised, and is pressed and heated between the upper pressurizing module and the lower pressurizing module.

  As described above, the plurality of wafers placed on the stage of the lifting module 600 are overlapped by the lifting module 600 including the pressure reducing valves 120 and 130 according to the present embodiment, thereby stabilizing the plurality of wafers. It can be pressurized with pressure. As a result, a plurality of wafers can be bonded precisely.

  In addition, although the example which uses the pressure-reduction valve 100 which concerns on this embodiment for the superposition | stacking apparatus which superimposes a several wafer was given and demonstrated here, not only it but a non-pressurized material, such as a small forming press, is pressurized. You may comprise so that it may be used for another apparatus. By using the pressure reducing valve 100 according to the present embodiment, an object to be pressurized can be accurately pressurized with a constant pressure.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 100 Pressure reducing valve, 101 Control part, 102 Electropneumatic regulator, 103 Compressor, 104 Input part, 110 Pressure reducing valve, 111 Solenoid valve, 112 Drain line, 120 Pressure reducing valve, 121 Solenoid valve, 122 Drain line, 130 Pressure reducing valve, 131 Electromagnetic Valve, 132 Drain line, 141 tank, 142 tank, 180 substrate, 190 substrate holder, 200 Air cylinder part, 202 Piston part, 204 cylinder part, 206 Airtight space, 208 Partition curtain, 210 Linear motion bearing, 212 O-ring, 300 Relief valve section, 302 valve section, 304 valve seat section, 306 drain port, 308 storage space, 310 elastic seat, 312 orifice, 314 tank, 316 O-ring, 400 pressure reducing valve section, 402 primary side port, 404 balance Stone, 406 Secondary port, 408 Spring, 410 Constant capacity pump, 412 Storage space, 414 Center choke, 600 Lifting module, 610 Main EV section, 611 Stage, 612 Main piston, 613 Main cylinder, 614 Bellows, 615 Main room , 616 Main room supply port, 617 Piston guide, 620 Sub EV part, 621 Sub piston, 622 Fixed part, 623 Piston disk, 624 Sub cylinder, 625 Upper sub room, 626 Lower sub room, 700 Overlay device, 731 Upper top plate, 732 Lower top plate, 741 Upper heat module, 742 Lower heat module, 751 Upper pressure control module, 752 Lower pressure control module

Claims (12)

A pressure reducing valve that controls the pressure of a fluid flowing out from a second port communicating with the first port via the first flow path;
A discharge port communicating with a second flow path having one end open to the second port;
A valve portion that moves inside the second flow path when receiving the pressure of the fluid in the second port;
A cylinder portion into which a gas having a predetermined set pressure is introduced; a piston portion that receives the set pressure in the cylinder portion; and an air cylinder portion that presses the valve portion with the piston portion;
A valve seat that closes the second flow path when the valve is pressed by the piston;
A partition that is fixed to the piston part and the cylinder part and forms an airtight space into which the gas is introduced into a part of the cylinder part;
When the valve portion receives a pressure larger than the set pressure from the fluid in the second port, the valve portion moves away from the valve seat portion by moving against the pressing force of the piston, A pressure reducing valve through which the fluid is discharged from the discharge port.   The pressure reducing valve according to claim 1, further comprising a balance piston that blocks the first flow path when the valve portion moves against a pressing force of the piston.   The pressure reducing valve according to claim 1 or 2, wherein the partition curtain is formed of an elastic material.   The pressure reducing valve according to any one of claims 1 to 3, wherein the valve portion and the piston portion are configured separately, and further include an elastic sheet that transmits a pressing force of the piston portion to the valve portion.   The pressure reducing valve according to claim 4, wherein the valve portion is partitioned by the elastic sheet and accommodates an accommodation space filled with the fluid. The piston part is arranged in an open space partitioned by the elastic sheet,
The pressure reducing valve according to claim 5, further comprising a linear motion bearing that suppresses sliding resistance of the piston portion with respect to the cylinder portion. An orifice for communicating the inside of the valve seat with the fluid of the second port;
When the pressure of the fluid applied to the valve portion through the orifice exceeds the force by which the piston portion presses the valve portion against the valve seat portion, the valve portion moves away from the valve seat portion, and the orifice The pressure reducing valve according to claim 5 or 6, wherein the pressure reducing valve communicates with the discharge port.   The pressure reducing valve according to any one of claims 1 to 7, wherein the fluid is a liquid.   The pressure reducing valve according to any one of claims 1 to 8, wherein the valve seat portion is replaceable.   The pressure reducing valve according to any one of claims 1 to 9, wherein the valve portion is replaceable.   A pressurizing apparatus comprising the pressure reducing valve according to any one of claims 1 to 10, and pressurizing an object to be pressurized with a pressure controlled by the pressure reducing valve.   An overlaying apparatus comprising the pressurizing apparatus according to claim 11, wherein the pressurizing apparatus pressurizes and superimposes a plurality of wafers.

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