JP2014212072A - Thin-film electrostatic coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin-film electrostatic coating device capable of safely performing thin-film electrostatic coating and simplifying a configuration thereof.SOLUTION: A thin film electrostatic coating device comprises: a belt conveyor device 10 which conveys a conveyor belt 11 which can hold a web-like base material 9 on a surface thereof from an upstream side to a downstream side; a base material supply device which supplies the base material 9 to the upstream side of the conveyor belt 11; a base material recovery device which recovers the base material 9 from the downstream side of the conveyor belt 11; a housing 40 surrounding an intermediate portion of the conveyor belt 11 and extending along the conveyor belt 11; a powder supply device 42 which supplies a powder 6 from one end part of the housing 40 to the other end part; and an electrode 44 which fixes the powder 6 installed in the housing 40 to the base material 9 held on a surface of the conveyor belt 11.

Description

  The present invention relates to a thin film electrostatic coating apparatus, and more particularly to an apparatus for electrostatically coating a powder serving as an electrode layer on a thin film serving as a base material such as an electrode for a lithium ion battery.

Conventionally, a battery such as a lithium ion battery is formed by laminating a sheet-like positive electrode and a negative electrode via a separator and winding the laminate into a cylindrical shape or the like.
A sheet-like electrode used as a positive electrode and a negative electrode is obtained by forming an active material layer as a positive electrode or a negative electrode on the surface of a foil (base) obtained by rolling aluminum or copper.

The active material layer is made by dispersing a powder material such as an active material or a conductive aid in a solution in which a binder (binder) or a thickener is dissolved in an organic solvent, and making this into a slurry. It was formed by applying to (wet coating method).
In such a wet coating method, the process of evaporating the solvent is indispensable, so local exhaust is required, and not only the equipment becomes large, but also because of the wet process, the viscosity adjustment at the time of blending of the powder material such as the active material Since the coating film was not sufficiently stable due to the influence of humidity and the like, a dry coating method in which an active material, a conductive additive and a binder are powder-coated on a base has been developed (Patent Document 1). reference).

In Patent Document 1, the average particle diameter of the active material is 1 to 50 μm (preferably 20 to 30 μm), the average particle diameter of the conductive additive (conductive material powder) is 0.01 to 5 μm (preferably 0.03 to 2 μm), The average particle size of the binder is 0.1 to 50 μm (preferably 1 to 10 μm).
These active materials, conductive additives and binder powders are vibrated with a vibrator during electrostatic coating, and are charged positively and negatively with respect to the base by the electrode for electrolysis, and are then applied to the base by electrostatic force. Adsorbed. And by heating in a drying furnace, a binder is fuse | melted and an active material and a conductive support material are fixed on a base.
Patent Document 1 also describes that a binder is melt-adhered to an active material in advance to form a composite powder, and this is powder-coated on a base.

In the electrostatic coating apparatus of Patent Document 1, a web-like (band-like or tape-like) aluminum foil is horizontally passed, and a charging electrode and a powder supply device including a vibrator are arranged in the middle. . These electrodes and powder supply devices are installed in three systems in order to ensure a coating region with a sufficient length in the middle of the aluminum foil.
On the other hand, there is also known an apparatus in which a sufficiently long coating region can be obtained with a single powder supply apparatus (see Patent Document 2).
In the electrostatic coating apparatus of Patent Document 2, a metal plate to be coated is arranged in a vertical direction in a long box-shaped housing, and the powder is blown from the powder supply device at the bottom of the housing. Electrostatic coating of powder can be performed on the surface of the metal plate exposed to.

JP 2001-351616 A JP 2012-217965 A

By the way, the aluminum foil or copper foil coated in Patent Document 1 is used for an electrode for a lithium ion battery, and is a thin film having a thickness of about 10 to 20 μm.
Such a thin film has a low strength itself, and even in Patent Document 1, there is a possibility that the thin film will break when the tension becomes excessive.
Furthermore, when it exposes in a housing over a long area | region like patent document 2, there exists a possibility of fracture | rupture by the airflow in a housing.
For this reason, even if it is going to introduce patent document 2 in order to simplify the powder supply apparatus in the electrostatic coating apparatus of patent document 1, it is the number like aluminum foil and copper foil used for the electrode for lithium ion batteries. It was difficult to apply to a thin film of 10 μm unit.

  An object of the present invention is to provide a thin film electrostatic coating apparatus that can safely perform electrostatic coating of a thin film and can simplify the configuration.

  The thin film electrostatic coating apparatus of the present invention supplies a conveyor belt capable of holding a web-like substrate on its surface from an upstream side to a downstream side, and supplies the substrate to the upstream side of the conveyor belt. A base material supply device; a base material recovery device for recovering the base material from a downstream side of the conveyor belt; a housing surrounding an intermediate portion of the conveyor belt and extending along the conveyor belt; and one of the housings A powder supply device that supplies powder from one end to the other end; an electrode that is installed inside the housing and fixes the powder to the substrate held on the surface of the conveyor belt; It is characterized by having.

In the present invention as described above, a web-like base material is supplied from the base material supply device to the upstream side of the conveyor belt, and the supplied base material is held on the surface of the conveyor belt and is downstream as the conveyor belt moves. It is conveyed to. And while passing through the inside of the housing, the powder from the powder supply device is fixed to the base material by the electrode, whereby electrostatic coating of the base material is performed. The base material on which the powder is electrostatically coated is collected by the base material collecting device from the downstream side of the conveyor belt.
At this time, even if the base material to be coated in the housing is a thin film having a thickness of about 10 to 20 μm and is low in strength, it is transported while being held on the surface of the conveyor belt, so that it is damaged by excessive tension. There is nothing. In the housing, since it is backed and reinforced by the conveyor belt, it is not damaged by the airflow in the housing.
Therefore, according to the present invention, the electrostatic coating of the thin film can be performed safely, and the configuration can be simplified without using a special configuration or the like as the thin film electrostatic coating apparatus.

In the present invention, as the belt conveyor device, an endless belt stretched between the upstream roller and the downstream roller can be used as the conveyor belt. Or it is good also as a structure which pulls out the conveyor belt which is not endless from an upstream roll, and winds it up to a downstream roll.
The conveying direction of the base material in the belt conveyor apparatus, that is, the direction of the surface of the conveyor belt on which the base material is held is preferably a horizontal direction. Thereby, a base material is pressed on the conveyor belt surface with gravity, and is hold | maintained safely.
The conveying direction of the belt conveyor device may be a vertical direction or another inclined direction. In such a case, a holding auxiliary means for sucking negative pressure from the opposite side of the conveyor belt may be provided as appropriate so that the substrate is securely held on the surface of the conveyor belt.

In the present invention, as the base material supply device and the base material recovery device, a detachable coil support device used in a printing machine or a metal sheet manufacturing apparatus can be used.
Between the base material supply device, the base material recovery device, and the belt conveyor device, a driving device and an adjustment device for appropriately maintaining the tension of the web-like base material may be installed as appropriate. For example, in order to properly maintain the tension of the substrate drawn out from the belt conveyor device, a device that adjusts slackness is installed, or a control device that detects slackness and adjusts the driving state of the belt conveyor device. It may be installed.

In the present invention, any powder supply device may be used as long as the powder for electrostatic coating is supplied to the housing in an air current, and the powder supply portion of the existing electrostatic coating device can be used. Can do. At this time, it is desirable that the component adjustment of the powder or the shape processing of the powder can be performed together.
The powder supply device may supply powder from the downstream side of the housing and generate a flow of powder that moves in the direction opposite to the substrate on the surface of the conveyor belt, or the powder supply device from the upstream side of the housing. The body may be supplied to generate a flow of powder that moves in the same direction as the substrate on the conveyor belt surface.

In the present invention, it is desirable to install a powder recovery device for recovering excess powder at the end of the housing opposite to the side to which the powder is supplied from the powder supply device.
In the present invention, it is desirable to install a heating device or a pressing device for fixing the powder fixed on the base material on the downstream side of the housing.

In the present invention, it is desirable that a stirring means for stirring the gas inside the housing is installed inside the housing.
In the present invention, the powder is supplied from the powder supply device to one end portion of the housing, rides on the air flow toward the other end portion, and a part of the powder is applied to the base material supported on the conveyor belt surface. The body passes through the housing while contacting. At this time, the powder passing through the housing may gradually settle due to its own weight and may not reach the other end of the housing. On the other hand, by stirring the gas in the housing by the stirring means, the powder can be rolled up and settling can be prevented.

In the present invention, the stirring means includes a stirring duct extending in a longitudinal direction of the housing, a gas supply device that supplies pressurized gas to the inside of the stirring duct, and a gas inside the stirring duct to the housing. It is desirable to provide a large number of spray nozzles for spraying into the interior of the printer.
In the present invention, the pressurized gas supplied into the duct is jetted into the housing from the jet nozzle, whereby the gas in the housing is agitated to wind up the powder and prevent sedimentation. it can.
In addition, if the stirring means is configured to inject pressurized gas, there is no mechanical moving part, so that stable operation can be maintained even when the powder is in contact with it, and maintainability can be improved. The mechanism is simple and the equipment cost can be reduced.
In the present invention, in addition to the pressurized gas injection type stirring means described above, an impeller rotating in the housing, a swinging stirring plate, a vibrating stirring member, and the like may be used.

In the present invention, it is preferable that a plurality of the housings are installed in the middle of the series of the base materials, and the powder supply device and the electrodes are respectively installed in the plurality of housings.
In such this invention, a some electrostatic coating can be performed with respect to a series of base materials. For this reason, the coating film can be thickened by repeating electrostatic coating with the same powder a plurality of times. Moreover, a multilayer coating film can also be formed on a base material by sequentially performing electrostatic coating with different powders.
In addition, a belt conveyor apparatus may install a some housing in the middle of a series of belt conveyor apparatuses, and may install it for every housing. When using a plurality of belt conveyor devices, the base material taken out from the upstream belt conveyor device may be replaced with the downstream belt conveyor device.

In the present invention, a plurality of belt conveyor devices are installed in the middle of a series of the base materials, and the plurality of belt conveyor devices are provided with the housing, the powder supply device, and the electrodes, respectively. The belt conveyor devices are preferably arranged horizontally, and any one of the belt conveyor devices is preferably installed above the other belt conveyor device.
In such this invention, the occupation floor area as an installation can be suppressed by overlapping a belt conveyor apparatus in the up-down direction. In addition, since the belt conveyor device is disposed horizontally, the substrate can be safely held by the conveyor belt by its own weight.

In the present invention, a plurality of belt conveyor devices are installed in the middle of a series of the base materials, and the plurality of belt conveyor devices are provided with the housing, the powder supply device, and the electrodes, respectively. The belt conveyor devices are preferably arranged in the vertical direction, and are arranged adjacent to each other in parallel.
In such this invention, the occupation floor area as an installation can further be suppressed by arrange | positioning a belt conveyor apparatus to the vertical direction.

In the present invention, at least two of the belt conveyor devices are installed in the middle of the series of base materials, and the base material that has passed through the upstream belt conveyor device is reversed and introduced into the downstream belt conveyor device. It is desirable that they are arranged in such a manner.
In the present invention, the base material is electrostatically coated on the surface side with the housing of the upstream belt conveyor device. Then, by being pulled out from the upstream belt conveyor device and then reversed, the back side is electrostatically coated in the housing while being transported by the downstream belt conveyor device. Thereby, electrostatic coating of powder can be performed on the front and back of the base material that has passed through the two belt conveyor devices.
Such a structure in which the base material is reversed and sequentially electrostatically coated can be easily realized by using the above-described arrangement in which the two belt conveyor devices are vertically stacked or arranged in the vertical direction.

In the present invention, a masking device is installed in the housing, and the masking device has a masking belt for masking the surface of the base material, and the masking belt exposes the surface of the base material inside the housing. It is desirable that a coating pattern is formed, and the masking belt is stretched along the surface of the conveyor belt with the base material interposed therebetween and moved in synchronization with the conveyor belt.
In such this invention, a masking belt moves synchronously along the surface side of a base material and a conveyor belt, and only the specific area | region among base materials is made into the state exposed in the housing from the coating pattern. Therefore, electrostatic coating of the powder in the housing is performed only on the region of the substrate that is exposed from the coating pattern.
As a result, a powder coating corresponding to the coating pattern of the masking belt can be formed on the base material that has passed through the housing.

According to the present invention, even if the web-like base material is a thin film having a thickness of about 10 to 20 μm and is low in strength, the web-like base material is transported while being held on the surface of the conveyor belt. There is nothing. In the housing, since it is backed and reinforced by the conveyor belt, it is not damaged by the airflow in the housing.
Therefore, according to the present invention, the electrostatic coating of the thin film can be performed safely, and the configuration can be simplified without using a special configuration or the like as the thin film electrostatic coating apparatus.

The schematic front view which shows the whole structure of 1st Embodiment of this invention. The schematic front view which shows the principal part of the said 1st Embodiment. The schematic side view which shows the principal part of the said 1st Embodiment. The schematic diagram which shows the coated base material of the said 1st Embodiment. The schematic front view which shows the whole structure of 2nd Embodiment of this invention. The schematic front view which shows the whole structure of 3rd Embodiment of this invention. The schematic front view which shows the whole structure of 4th Embodiment of this invention. The schematic front view which shows the whole structure of 5th Embodiment of this invention. The schematic side view which shows the principal part of the said 5th Embodiment. The schematic diagram which shows the conveyor belt for masking of the said 5th Embodiment. The schematic diagram which shows the coated base material of the said 5th Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
1 to 4 show a first embodiment of the present invention.
The thin film electrostatic coating apparatus 1 of this embodiment shown in FIGS. 1 to 3 forms a coating film 8 by electrostatic coating on the surface of a web-like substrate 9 shown in FIG. To manufacture.

The base material 9 is a thin film that becomes a base material such as an electrode for a lithium ion battery, and is an aluminum foil or a copper foil having a thickness of about 10 to 20 μm.
The coating film 8 serves as an electrode layer of the above-described electrode for a lithium ion battery. The powder of the active material (including the conductive additive) and the binder powder are mixed, and the obtained mixed powder is powdered. The body 6 (see FIGS. 2 and 3) is electrostatically coated to be fixed on the surface of the base material 9, and is further fixed to the base material 9 by heating and pressing.

As shown in FIG. 1, the thin film electrostatic coating apparatus 1 has a belt conveyor device 10 extending in the horizontal direction.
The belt conveyor device 10 includes a conveyor belt 11 that holds the base material 9 described above on its upper surface.
The conveyor belt 11 is a stainless steel endless belt or the like, and is stretched between an upstream roller 13 (right side in the figure) and a downstream roller 14 (left side in the figure) supported by the frame 12. The upper surface holding the material 9 is horizontally arranged.

In the belt conveyor device 10, a drive motor 15 is connected to the downstream roller 14. By rotating the downstream roller 14 with this drive motor 15, the conveyor belt 11 is sent, and the upstream roller 13 also rotates integrally. . The drive by the drive motor 15 may be either the upstream roller 13 or the downstream roller 14 or both.
By feeding the conveyor belt 11 with the drive motor 15, the web-like base material 9 held on the upper surface thereof is sent from the upstream side (right side in the figure) to the downstream side (left side in the figure).

A base material supply device 20 (right end in FIG. 1) for supplying the base material 9 is installed on the upstream side of the belt conveyor device 10.
A base material recovery device 30 (the left end in FIG. 1) for recovering the base material 9 is installed on the downstream side of the belt conveyor device 10.
A housing 40 and a heating device 50 are installed in the middle of the belt conveyor device 10.
A slack detector 60 and a press device 70 are installed between the belt conveyor device 10 and the substrate recovery device 30.

The base material supply device 20 has a coil 21 around which a web-like base material 9 is wound, and supplies the base material 9 drawn from the coil 21 to the upstream side of the conveyor belt 11.
The coil 21 is detachable, and the supply of the base material 9 can be continued by removing the coil 21 from which the base material 9 has been pulled out and attaching the coil 21 wound with the base material 9.
A drive motor 22 is connected to the coil 21, and the rotation of the coil 21 can be controlled so that the rotation speed is suitable for feeding the base material 9.
Such a substrate supply device 20 may be appropriately configured with reference to a detachable coil support device used in a printing machine or a metal sheet manufacturing apparatus having a similar function.

The base material collection device 30 has a coil 31 around which a web-like base material 9 (a base material 7 with a coating film during operation) is wound, and winds and recovers the base material 9 drawn from the downstream side of the conveyor belt 11. To do.
The coil 31 is a detachable type, and the recovery of the base material 9 can be continued by removing the coil 31 on which the base material 9 has been wound up by a predetermined amount and mounting a new empty coil 31.
A drive motor 32 is connected to the coil 31, and the rotation of the coil 31 can be controlled so that the rotation speed is suitable for winding the base material 9.
Such a substrate recovery device 30 may be appropriately configured with reference to a detachable coil support device used in a printing machine or a thin metal plate manufacturing apparatus having a similar function.

The housing 40 has a housing main body 41 that surrounds an intermediate portion of the conveyor belt 11.
As shown in FIGS. 2 and 3, the housing main body 41 has a box shape extending along the conveyor belt 11, and one surface is opened, and the conveyor belt 11 is disposed so as to close the opening. Therefore, the base material 9 held on the upper surface of the conveyor belt 11 is exposed to the internal space from the opening of the housing body 41 when passing through the housing 40.

A powder supply device 42 is installed on the downstream side of the housing body 41.
A powder recovery device 43 is installed on the upstream side of the housing body 41.
A plurality of electrodes 44 for electrostatic coating are arranged inside the housing body 41.
Inside the housing main body 41, a stirring duct 45 extending in the longitudinal direction of the housing main body 41 along the aforementioned opening is installed.

The powder supply device 42 supplies powder from one end of the housing 40 to the other end, and in this embodiment, the downstream side of the housing main body 41 (the conveyor belt 11 holding the base material 9). Is installed on the exit side).
The powder supply device 42 includes a tank 421 for storing the powder 6 therein, a supply duct 422 continuous from the tank 421 to the downstream end of the housing body 41, and the powder 6 in the tank 421 using a carrier gas. A delivery pump (not shown) that rolls up and feeds it to the supply duct 422 is provided.

Thereby, the powder supply device 42 can send out the powder 6 together with the carrier gas and supply the powder 6 from the supply duct 422 to the downstream end of the housing body 41, and in the housing body 41 from the downstream side to the upstream side. An air current of carrier gas containing powder 6 for electrostatic coating is generated.
The powder supply device 42 can appropriately use the powder supply portion of the existing electrostatic coating device, and the powder 6 component adjustment or the shape processing of the powder 6 can be performed prior to the storage of the powder 6. You may enable it to be performed together.

The powder recovery device 43 is installed at the end of the housing 40 on the upstream side (the side where the conveyor belt 11 holding the base material 9 is introduced and the downstream side where the powder supply device 42 is installed). The excess powder 6 that has flowed through the housing body 41 to the upstream side is recovered.
The powder recovery device 43 includes a tank 431 that stores the powder 6 therein, and a recovery duct 432 that continues from the tank 431 to the upstream end of the housing body 41, and the tank 431 passes through the recovery duct 432. A suction pump (not shown) that sucks the carrier gas containing excess powder 6 from the upstream side of the housing body 41 is installed.

As a result, the powder recovery device 43 can recover the carrier gas and excess powder 6 on the upstream side of the housing body 41 from the recovery duct 432, from the downstream side generated in the housing body 41 to the upstream side. It is possible to maintain an air flow of the carrier gas including the powder 6 that goes.
Note that the powder recovery device 43 can appropriately utilize the powder recovery portion of the existing electrostatic coating device, and reuse of the recovered powder 6 and the carrier gas, dust filtration processing when discharging, etc. You may be able to do it.

The electrode 44 is for charging the powder 6 and adsorbing it on the surface of the base material 9 held on the conveyor belt 11 and fixing it at a desired thickness.
For this purpose, a plurality of electrodes 44 are arranged vertically and horizontally along the opening of the housing body 41 from which the substrate 9 is exposed.
Each electrode 44 is connected to a power supply device 441 so that the powder 6 is charged.

The stirring duct 45 stirs the carrier gas containing the powder 6 flowing in the housing main body 41 from the downstream side to the upstream side, thereby winding the powder 6 and preventing its settling.
The stirring ducts 45 are arranged in a pair on both sides along the longitudinal direction of the housing body 41 among the edges of the opening of the housing body 41.
A gas supply device 451 for supplying an external pressurized gas is connected to the stirring duct 45, and a number of injection nozzles 452 for injecting the gas in the stirring duct 45 into the housing body 41 are installed. Yes.

The stirring duct 45 is formed in a tubular shape having a rectangular cross section, and both ends thereof are closed. Of the edges in the longitudinal direction of the stirring duct 45, the edges close to the longitudinal central axis of the housing body 41 are cut away, and this opening is closed by a plate material in which a number of injection nozzles 452 are opened. Yes. Accordingly, when pressurized gas is supplied from the gas supply device 451 to the inside of the stirring duct 45, this gas is injected into the housing body 41 from a number of injection nozzles 452, and the inside of the housing body 41 from each injection nozzle 452 A jet 453 is formed.
The carrier gas flowing in the housing main body 41 is agitated by the jet 453, and the powder 6 contained therein is rolled up to prevent its sedimentation.

The heating device 50 is for fixing the powder 6 to the base material 9 in the housing 40 and then fixing the powder 6 together with the base material 9 as the coating film 8. is set up.
The heating device 50 includes a heating device body 51 that surrounds the conveyor belt 11 on the downstream side of the housing 40. Inside the heating device main body 51, a heater (not shown) is installed on the upper surface side of the conveyor belt 11 along the conveying direction of the base material 9, and is fixed to the base material 9 held on the conveyor belt 11 and the surface thereof. The layer of the powder 6 is heated. By this heating, the binder components of the powder 6 are bonded to each other, and are fixed to the surface of the base material 9 as the coating film 8 to form the base material 7 with a coating film.

The base material 7 with a coating film (the base material 9 on which the surface of the powder 6 is fixed as the coating film 8) formed by the heating device 50 is held on the surface of the conveyor belt 11. , The belt is separated from the conveyor belt 11 on the downstream side of the belt conveyor device 10 and pulled out from the belt conveyor device 10 alone.
The base material 7 drawn out from the belt conveyor device 10 is recovered by the base material recovery device 30 via the slack detector 60 and the press device 70 in order.

The slack detector 60 adjusts slack in the section where the coated substrate 7 between the downstream side of the belt conveyor device 10 and the substrate recovery device 30 is sent alone.
For this purpose, the slack detector 60 has two rollers 61 and 62 arranged in the conveyance direction of the base material 7, and a roller 63 deviated from the conveyance direction of the base material 7 between them.
Each of the rollers 61 and 62 is disposed at the same level as the surface of the conveyor belt 11 of the belt conveyor device 10 at the highest circumferential position.

  In the present embodiment, the roller 63 is displaced downward from the rollers 61 and 62, and the shaft is supported via a swinging arm 64. The roller 63 moves up and down by the swinging of the arm 64. However, the distance to the rollers 61 and 62 varies. The arm 64 is provided with a displacement detector 65 that detects the swing of the arm 64.

  After leaving the belt conveyor device 10, the base material 7 is received by the roller 61 and sent to the lower roller 63, reversed by the roller 63, returned to the upper roller 62, and sent downstream. With such an arrangement, the roller 63 moves downward when the slackness of the substrate 7 increases, and the roller 63 moves upward when the slackness decreases. The vertical displacement of the roller 63 at this time can be detected by the displacement detector 65 as the swing of the arm 64.

  Accordingly, the slackness detector 60 can detect the increase or decrease of the slackness of the base material 7 from the vertical displacement of the roller 63 detected by the displacement detector 65, and the belt conveyor device 10 and the downstream side via the control device (not shown). By adjusting the rotational drive of the pressing device 70 or the substrate recovery device 30 on the side, the slackness or tension of the substrate 7 can be maintained in an optimum state.

The press device 70 performs roll press processing on the surface of the base material 7 in order to further strengthen the fixing of the coating film 8 of the base material 7.
For this purpose, the press device 70 includes a pair of pressure rolls 71 and 72 that sandwich the base material 7 fed from the looseness detector 60 from above and below, and a drive motor 73 that rotationally drives the lower pressure roll 72. Have
The pair of pressure rolls 71 and 72 are supported so that the distance between them can be finely adjusted, and the pressure state on the substrate 7 can be adjusted by adjusting the distance. And the press roll 72 is rotated with the drive motor 73, and the base material 7 which rolls to this can be sent appropriately.

  The base material 7 sent out from the press device 70 is sent to the base material recovery device 30, wound around the coil 31 and recovered.

In this embodiment, the web-like base material 9 is supplied from the base material supply device 20 to the upstream side of the conveyor belt 11, and the supplied base material 9 is held on the surface of the conveyor belt 11 to be conveyed to the conveyor belt 11. Is transported to the downstream side along with the movement.
And while passing through the inside of the housing 40, the powder 6 from the powder supply device 42 is fixed to the base material 9 by the electrodes, whereby electrostatic coating of the base material 9 is performed. The base material 7 on which the coating film 8 is formed is sent out from the downstream side of the conveyor belt 11 and recovered by the base material recovery device 30.

In this embodiment, even if the base material 9 to be coated in the housing 40 is a thin film having a thickness of about 10 to 20 μm and is low in strength, it is transported while being held on the surface of the conveyor belt 11, so excessive tension Will not be damaged. In addition, the housing 40 is also reinforced by being lined with the conveyor belt 11, so that it is not damaged by the airflow in the housing 40.
Therefore, according to the present invention, the electrostatic coating of the thin film can be performed safely, and the configuration can be simplified without using a special configuration or the like as the thin film electrostatic coating apparatus.

  In the present embodiment, the conveying direction of the base material 9 in the belt conveyor device 10, that is, the direction of the surface of the conveyor belt 11 on which the base material 9 is held is the horizontal direction. For this reason, the base material 9 can be pressed against the surface of the conveyor belt 11 by gravity, can be stably held by itself, and can be held safely while being mechanically simple.

In this embodiment, since the detachable coil support device used in the printing machine or the thin metal plate manufacturing apparatus is used as the base material supply device 20 and the base material recovery device 30, the coil or the coating around the base material 9 before coating is applied. The work of carrying in / out can be facilitated as a coil in which the base material 7 is wound.
Further, a slack detector 60 is installed between the belt conveyor device 10 and the base material recovery device 30, and the belt conveyor device 10, the press device 70, and the base material recovery device 30 are set according to the detected slackness of the base material 7. Since the rotation drive is controlled, the slack of the base material 7 can be brought into an appropriate state even if the distance between the belt conveyor device 10 and the press device 70 is long.

In the present embodiment, in the housing 40, the powder 6 can be fixed on the surface of the substrate 9 by electrostatic coating.
At this time, since the powder 6 is supplied from the downstream end portion of the housing 40 into the housing body 41 by the powder supply device 42, the powder placed in the airflow over a long distance to the upstream end portion. 6 and the substrate 9 on the surface of the conveyor belt 11 can be brought into contact with each other. Therefore, since the entire length of the housing 40 can be used effectively, the entire length of the housing 40 can be minimized, and the device can be miniaturized.

In this embodiment, since the powder recovery device 43 that recovers excess powder is installed on the opposite side of the housing 40 from the powder supply device 42, the powder 6 previously supplied into the housing 40 is appropriately recovered. By doing so, supply of fresh powder 6 into the housing 40 is not hindered, and leakage to the outside of the housing 40 can be prevented in advance.
Furthermore, in this embodiment, since the heating device 50 and the pressing device 70 for fixing the coating film 8 of the powder 6 fixed to the base material 9 are installed on the downstream side of the housing 40, the coating film 8 is made strong. It is possible to make the substrate 7 stable and robust.

In this embodiment, the stirring duct 45 extending in the longitudinal direction of the housing 40 is provided as the stirring means, the pressurized gas is supplied from the gas supply device 451, and the gas is injected from the multiple injection nozzles 452. By stirring the carrier gas in 40, the powder 6 can be rolled up and settling can be prevented.
The agitation means of the present embodiment agitates the airflow in the housing 40 by injecting pressurized gas from the agitation duct 45 and the injection nozzle 452, and has no mechanical moving parts. Stable operation can be maintained even when 6 is in contact, so that maintainability can be improved, and the mechanism can be simplified and the equipment cost can be reduced.

[Second Embodiment]
FIG. 5 shows a second embodiment of the present invention.
The thin film electrostatic coating apparatus 2 of the present embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, one housing 40 that performs electrostatic coating is installed in the middle of the belt conveyor apparatus 10. On the other hand, in the thin film electrostatic coating apparatus 2 of this embodiment, two housings 40 are installed in series in the middle of the belt conveyor apparatus 10.

The two housings 40 are respectively the same as the housing 40 (see FIG. 2) in the first embodiment described above.
In addition, the belt conveyor device 10, the substrate supply device 20, the substrate recovery device 30, the heating device 50, the slackness detector 60, and the press device 70, which are other configurations of the thin film electrostatic coating device 2, are described above. It is the same as each in the thin film electrostatic coating apparatus 1 of embodiment.
Note that the belt conveyor device 10 is formed to have a longer overall length than the first embodiment described above, because the two housings 40 are installed.

In this embodiment, the electrostatic coating can be performed twice on the series of base materials 9 conveyed by the belt conveyor device 10 in order by the upstream housing 40 and the downstream housing 40.
For this reason, the coating film 8 formed on the base material 9 can be thickened by repeating electrostatic coating with the same powder 6 twice.
Moreover, a multilayer coating film can also be formed on the base material 9 by sequentially performing electrostatic coating with different powders 6.

In the present embodiment, the plurality of housings 40 are installed in the middle of the series of belt conveyor devices 10. However, the plurality of belt conveyor devices 10 are continuously installed, and the plurality of housings 40 are attached to the series of base materials 9. Even if installed, the same effect can be obtained.
For example, using the two belt conveyor devices 10, the second belt conveyor device 10 is installed so that the base material 9 is in a series on the downstream side of the first belt conveyor device 10, and the first belt on the upstream side is installed. The first housing 40 may be installed on the conveyor device 10, and the second housing 40 and the heating device 50 may be installed on the second belt conveyor device 10 on the downstream side. Also, the first housing 40 and the first heating device 50 are installed on the first belt conveyor device 10, and the second housing 40 and the second heating device 50 are installed on the second belt conveyor device 10. Also good.

[Third Embodiment]
FIG. 6 shows a third embodiment of the present invention.
The thin film electrostatic coating apparatus 3 of this embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, one housing 40 and one belt conveyor apparatus 10 for performing electrostatic coating are installed. In contrast, in the thin film electrostatic coating apparatus 3 of the present embodiment, two sets of the belt conveyor device 10, the housing 40, and the heating device 50 are installed in series so as to be on the upstream side and the downstream side of the conveyance path. In addition, in terms of structure, each set has a two-stage configuration with a lower stage and an upper stage.

The two housings 40 are respectively the same as the housing 40 (see FIG. 2) in the first embodiment described above.
In addition, the belt conveyor device 10, the substrate supply device 20, the substrate recovery device 30, the heating device 50, the slackness detector 60, and the press device 70, which are other configurations of the thin film electrostatic coating device 3, are described above. It is the same as each in the thin film electrostatic coating apparatus 1 of embodiment.
In addition, the slack detector 60 is configured to change the arrangement of the rollers 61 and 62 so as to make a difference in height in order to have the two-stage configuration described above.

In the present embodiment, the first set of belt conveyor device 10, the housing 40, and the heating device 50 are supported by the lower frame 12.
The belt conveyor device 10, the housing 40, and the heating device 50 of the second set are supported by an upper frame 16 that extends over the frame 12.

The frame 12 supports the first set (the lower belt conveyor device 10, the housing 40, and the heating device 50), and the base material supply device 20 is installed on the upstream side of the belt conveyor device 10. A first slack detector 60 is installed on the downstream side of the conveyor device 10.
In the first slack detector 60, an inlet-side roller 61, a displacing roller 63, an arm 64, and a displacement detector 65 are supported by the frame 12, but an outlet-side roller 62 is supported by the upper frame 16. ing.

In the first slack detector 60, the roller 62 on the outlet side is disposed so as to roll on the surface side of the substrate 9 (the surface to be electrostatically coated by the first housing 40).
With such an arrangement, the base material 9 sent out from the first set (the lower belt conveyor device 10, the housing 40, and the heating device 50) is folded back by the first slack detector 60, and the second set ( The upper belt conveyor device 10, the housing 40, and the heating device 50) are introduced with their front and back reversed.

The frame 16 supports the second set (upper belt conveyor device 10, housing 40 and heating device 50) described above, and a second slackness detector 60 is installed on the downstream side of the belt conveyor device 10. Has been.
In the second slack detector 60, the roller 61 on the entrance side is supported by the frame 16, but the roller 63, the arm 64, and the displacement detector 65 that are displaced are supported by the lower frame 12.
The second slack detector 60 is also configured so that the front and back surfaces of the base material 9 passing through are reversed by the arrangement of the rollers 61 and 62.

On the downstream side of the second slack detector 60, a press device 70 and a substrate recovery device 30 are installed.
The press device 70 and the substrate recovery device 30 are the same as those in the first embodiment described above. At this time, the substrate recovery device 30 is disposed adjacent to the substrate supply device 20 described above. With such an arrangement, the base material 9 (or the base material 7 on which the coating film 8 is formed) is configured so as to return to the loop shape from the lower first set through the upper second set. Yes.

In this embodiment, electrostatic coating is applied to the front surface and the back surface of the base material 7 by the first housing 40 and the second housing 40 with respect to the series of base materials 9 conveyed by the belt conveyor device 10. Can be done sequentially.
For this reason, according to this embodiment, the base material 9 in which the coating film 8 is formed on both the front and back sides can be formed.

Furthermore, since the first set and the second set have the belt conveyor device 10, the housing 40, and the heating device 50, respectively, heating by the heating device 50 can be performed immediately after electrostatic coating by the housing 40, respectively. Fixing of the coating film 8 can be performed reliably.
In addition, since the first set and the second set have a two-stage configuration of an upper stage and a lower stage, even if the belt conveyor device 10, the housing 40, and the heating device 50 are provided, the occupied floor area as equipment is suppressed. can do.
And in any of a 1st set and a 2nd set, the belt conveyor apparatus 10 is arrange | positioned horizontally, Therefore The holding | maintenance of the base material 9 by the conveyor belt 11 can be performed safely with dead weight.

In this embodiment, since the base material 9 that has passed through the first set is disposed so as to be reversed and introduced into the second set, electrostatic coating of the powder 6 can be sequentially performed on the front and back of the base material 9. The base material 7 in which the coating film 8 is formed on the front and back sides can be formed.
Further, since the rollers 61 and 62 of the first and second slack detectors 60 are used for reversing the base material 9, no additional mechanism is required, and the apparatus can be simplified.

[Fourth Embodiment]
FIG. 7 shows a fourth embodiment of the present invention.
The thin film electrostatic coating apparatus 4 of this embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, one housing 40 and one belt conveyor apparatus 10 for performing electrostatic coating are installed. On the other hand, in the thin film electrostatic coating apparatus 4 of the present embodiment, two sets of the belt conveyor device 10, the housing 40, and the heating device 50 are installed in series so as to be on the upstream side and the downstream side of the conveyance path. In addition, structurally, each set is arranged in the vertical direction, and each set is adjacent to and parallel to each other.

In the present embodiment, a bowl-shaped frame 17 is installed to support the set of the two belt conveyor devices 10, the housing 40, and the heating device 50 in the vertical direction.
The first and second sets of the belt conveyor device 10, the housing 40, and the heating device 50 supported by the frame 17 are partially configured differently from the first embodiment as they are installed in the vertical direction. Yes.

The belt conveyor device 10 of the first set is supported on the left side of the frame 17 in the figure, and the lower end is the upstream side. The first set of housings 40 is installed from the middle to the lower side of the belt conveyor device 10. The heating device 50 of the first set is installed near the upper end of the belt conveyor device 10 on the downstream side of the housing 40.
The second set of belt conveyor devices 10 is supported to the right in the drawing from the center of the frame 17 and has an upper end on the upstream side. The second set of housings 40 is installed from the top to the middle of the belt conveyor device 10, and the second set of heating devices 50 is installed near the lower end of the belt conveyor device 10 on the downstream side of the housing 40.

  In the first set of belt conveyor devices 10, the downstream roller 14 is rotationally driven by a drive motor 15 as in the first embodiment, but in the second set of belt conveyor devices 10, the upstream roller 13 is driven. The motor 15 is rotationally driven. However, there is no functional difference.

In the present embodiment, the two housings 40 in the first and second sets are similar to the housing 40 in the first embodiment described above, respectively, a housing body 41, a powder supply device 42, a powder recovery device 43, and an electrode. 44 and a power supply device 441.
However, since the housing 40 of the present embodiment is installed in the vertical direction and the sedimentation of the powder 6 is in the longitudinal direction of the housing 40, the stirring duct 45 (see FIG. 2) as stirring means is not installed. .
Further, in the first set of housings 40, the airflow including the powder 6 flowing in the interior is opposite to the base material 9 conveyed by the belt conveyor device 10 (similar to the first embodiment). In the housing 40 of the set, the powder 6 is supplied from the upper part and flows downward along the air current, and is in the same direction as the base material 9 conveyed by the belt conveyor device 10, and is opposite to the first embodiment. The orientation is set.

In the present embodiment, the base material 9 is passed through the first and second sets of the belt conveyor device 10, the housing 40, and the heating device 50 in the same manner as in the first embodiment described above, and the powder 6 Electrostatic coating is performed sequentially.
The base material supply device 20 is supported by a frame 17 in the vicinity of the lower end of the first set of belt conveyor devices 10.
The base material 9 drawn out from the coil 21 of the base material supply device 20 is supplied to the upstream side of the conveyor belt 11 of the first set of belt conveyor devices 10, and is held by the conveyor belt 11 so as to hold the first housing 40 and It passes through the first heating device 50 and reaches the upper end of the first belt conveyor device 10.

The base material 9 drawn out from the first belt conveyor device 10 is transported horizontally and sent to the upper end of the second belt conveyor device 10, and is held by the conveyor belt 11 so as to hold the second housing 40 and the second housing 9. It passes through the heating device 50 and reaches the lower end of the second belt conveyor device 10.
The base material 9 (electrostatically coated base material 7) drawn out from the second belt conveyor device 10 is again sent horizontally, drawn out of the frame 17 and passed through the slack detector 60 and the press device 70. It is recovered by the substrate recovery device 30.

  In this embodiment, the base material supply device 20, the base material recovery device 30, the heating device 50, the slackness detector 60, and the press device 70, which are other configurations of the thin film electrostatic coating device 4, are respectively described in the first embodiment. It is the same as that in each of the thin film electrostatic coating apparatus 1.

In this embodiment, electrostatic coating is applied to the front surface and the back surface of the base material 7 by the first housing 40 and the second housing 40 with respect to the series of base materials 9 conveyed by the belt conveyor device 10. Can be done sequentially.
For this reason, according to this embodiment, the base material 9 in which the coating film 8 is formed on both the front and back sides can be formed.

Furthermore, since the first set and the second set have the belt conveyor device 10, the housing 40, and the heating device 50, respectively, heating by the heating device 50 can be performed immediately after electrostatic coating by the housing 40, respectively. Fixing of the coating film 8 can be performed reliably.
In addition, since the first set and the second set are respectively installed in the vertical direction and are standing in parallel with each other, each having the belt conveyor device 10, the housing 40, and the heating device 50, respectively, Since the set may have an occupied floor area smaller than its length, the entire facility can be further miniaturized.

  In this embodiment, since the base material 9 that has passed through the first set is disposed so as to be reversed and introduced into the second set, electrostatic coating of the powder 6 can be sequentially performed on the front and back of the base material 9. The base material 7 in which the coating film 8 is formed on the front and back sides can be formed.

  In the present embodiment, since the first and second belt conveyor devices 10 are arranged in the vertical direction, gravity cannot be used to hold the base material 9 on the conveyor belt 11. For this reason, you may make it make the conveyor belt 11 air-permeable and install a negative-pressure suction device on the opposite side to the base material 9 of the conveyor belt 11. FIG.

[Fifth Embodiment]
8 to 11 show the fifth embodiment of the present invention.
The thin film electrostatic coating apparatus 5 of the present embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 according to the first embodiment described above, the coating film 8 is formed on the entire surface of the base material 9 except for the marginal margin by the housing 40 installed in the middle of the belt conveyor apparatus 10. (See FIG. 4).
On the other hand, in the thin film electrostatic coating apparatus 5 of this embodiment, the base material 7 in which the coating film 8 is formed in a rectangular section as shown in FIG. 11 is formed. For this reason, in the thin film electrostatic coating apparatus 5 of this embodiment, when the powder 6 is electrostatically coated on the substrate 9, a masking belt 81 having a mask pattern 811 as shown in FIG. 10 is used.

In the present embodiment, the thin film electrostatic coating apparatus 5 includes a belt conveyor device 10, a base material supply device 20, a base material recovery device 30, a housing 40, a heating device 50, and a looseness detector 60 similar to those of the first embodiment described above. And a pressing device 70.
Furthermore, the thin film electrostatic coating apparatus 5 of this embodiment includes a belt conveyor device 80 including the masking belt 81 described above on the upper surface side of the belt conveyor device 10.

In addition, each part of the base material supply apparatus 20, the base material collection | recovery apparatus 30, the heating apparatus 50, the slack detector 60, and the press apparatus 70 is each comprised similarly to the thin film electrostatic coating apparatus 1 of 1st Embodiment mentioned above. Yes.
The belt conveyor device 10 is basically configured in the same manner as in the first embodiment, but the downstream half is inclined so that the upper part of the heating device 50 does not interfere with the belt conveyor device 80.
Further, as shown in FIG. 9, the housing 40 is basically configured in the same manner as in the first embodiment (see FIGS. 2 and 3), but is masked between the housing body 41 and the base material 9. The belt 81 is configured to be introduced.

As shown in FIG. 8, the belt conveyor device 80 is provided above the belt conveyor device 10 and includes four rollers 82 to 85 on which the above-described masking belt 81 is stretched.
Among them, the rollers 82 and 83 are arranged such that the lower ends of the peripheral surfaces thereof are on the extension line of the horizontal surface of the conveyor belt 11 of the belt conveyor device 10, and the masking belt 81 is between the rollers 82 and 83 and the surface of the conveyor belt 11. It is arranged along so as to be in close contact with.
A driving motor (not shown) is connected to any of the rollers 82 to 85, and the masking belt 81 is driven so as to be fed at a constant speed with the conveyor belt 11 in close contact.

  In such a belt conveyor device 80, by operating in synchronization with the belt conveyor device 10, the conveyor belt 11 and the masking belt 81 are in close contact with each other on the upstream side (upstream roller 13 portion of the belt conveyor device 10). After passing through the housing 40 in the state, it is separated again on the downstream side (a bent portion in the middle of the belt conveyor device 10 and before the heating device 50).

Therefore, if the base material 9 is supplied to the upstream side of the conveyor belt 11, the base material 9 is held on the surface of the conveyor belt 11, and the surface is covered with the masking belt 81 (FIGS. 8 and 8). 9).
For this reason, exposure to the space in the housing body 41 is limited to the portion of the surface of the base material 9 exposed from the mask pattern 811 (see FIG. 10), and the powder 6 is electrostatically coated only on that portion. A rectangular coating film 8 having the same pattern is formed on the surface of the substrate 9, thereby forming the substrate 7 (see FIG. 11).

In this embodiment, electrostatic coating can be sequentially performed on the series of base materials 9 conveyed by the belt conveyor device 10 by the housing 40.
At this time, in the housing 40, the powder 6 fixed on the surface of the base material 9 is limited by the masking belt 81, and the base material 7 having the coating film 8 having a shape corresponding to the mask pattern 811 can be formed.

[Modification]
The present invention is not limited to the above-described embodiments, and modifications and the like within a scope where the object of the present invention can be achieved are included in the present invention.
In the above-described embodiment, an endless belt stretched between the upstream roller 13 and the downstream roller 14 is used as the conveyor belt 11 of the belt conveyor device 10, but a non-endless conveyor belt is pulled out from the upstream roll. It is good also as a structure wound up on a downstream roll.

  The conveying direction of the base material 9 in the belt conveyor device 10, that is, the direction of the surface of the conveyor belt 11 on which the base material 9 is held is the horizontal direction as in the first embodiment described above or the direction of the fourth embodiment described above. In addition to the vertical direction, other tilt directions may be used. In particular, except for the horizontal arrangement where gravity can be used, a holding auxiliary means for sucking negative pressure from the opposite side of the conveyor belt 11 is appropriately provided so that the substrate 9 is securely held on the surface of the conveyor belt 11. Also good.

In each of the above-described embodiments, the slack detector 60 for appropriately maintaining the tension of the web-like base material is installed between the belt conveyor device 10 and the base material recovery device 30, but the base material supply device 20 and You may install suitably in the said part, such as when the distance between the belt conveyor apparatuses 10 is long.
In the above-described embodiment, the slack detector 60 simply detects the slack of the base material 7, and the slack adjustment is performed by controlling the rotational driving of the belt conveyor device 10, the press device 70, and the base material recovery device 30. However, other arms and rollers may be provided in the slack detector 60, and the tension of the base material 7 may be adjusted by these according to the slack.

In each of the embodiments described above, the powder supply device 42 is installed on the downstream side of the housing 40 to generate the flow of the powder 6 that moves in the opposite direction to the base material 9 on the surface of the conveyor belt 11. It is good also as what produces | generates the flow of the powder 6 which supplies the powder 6 from the upstream of 40, and moves to the same direction as the base material 9 of the conveyor belt 11 surface.
In each of the above-described embodiments, the heating device 50 and the press device 70 for fixing the powder 6 fixed to the base material 9 are installed on the downstream side of the housing 40, but these may be changed or omitted as appropriate. Good.

In each of the above-described embodiments, the pair of stirring ducts 45 on both sides are installed along the housing body 41. However, this may be one or four or more. As the stirring duct 45, a circular pipe may be used, and an injection nozzle 452 may be formed on the peripheral surface thereof.
Furthermore, the stirring duct 45 is not essential, and a large number of injection nozzles 452 may be directly formed on the side wall of the housing body 41, and pressurized gas may be supplied to each of the injection nozzles 452 for injection.
In each of the embodiments described above, the configuration in which the pressurized gas is injected as the agitation means is adopted, but an impeller rotating in the housing 40, an oscillating agitation plate, an oscillating agitation member, or the like may be used.

  The present invention relates to a thin film electrostatic coating apparatus, and can be used as an apparatus for electrostatically coating a powder serving as an electrode layer on a thin film serving as a base material such as an electrode for a lithium ion battery.

1, 2, 3, 4, 5 ... thin film electrostatic coating device 6 ... powder 7, 9 ... base material 8 ... coating film 10 ... belt conveyor device 11 ... conveyor belt 12, 16, 17 ... frame 13 ... upstream roller 14 ... downstream roller 20 ... substrate supply device 21 ... coil 30 ... substrate recovery device 31 ... coil 40 ... housing 41 ... housing body 42 ... powder supply device 421 ... tank 422 ... supply duct 43 ... powder recovery device 431 ... tank 432 ... recovery duct 44 ... electrode 441 ... power supply 45 ... stirring duct 451 ... gas supply device 452 ... jet nozzle 453 ... jet 50 ... heating device 51 ... heating device body 60 ... detectors 61, 62, 63 ... rollers 64 ... Arm 65 ... Displacement detector 70 ... Press devices 71, 72 ... Pressure roll 80 ... Belt conveyor device 81 ... Masking belt 811 ... Mask pattern 2,83,84,85 ... roller

Claims (8)

A belt conveyor device for sending a conveyor belt capable of holding a web-like substrate on the surface from the upstream side to the downstream side;
A substrate supply device for supplying the substrate to the upstream side of the conveyor belt;
A base material recovery device for recovering the base material from the downstream side of the conveyor belt;
A housing that surrounds an intermediate portion of the conveyor belt and extends along the conveyor belt;
A powder supply device for supplying powder from one end of the housing to the other end;
A thin film electrostatic coating apparatus, comprising: an electrode installed inside the housing and fixing the powder onto the base material held on the surface of the conveyor belt. In the thin film electrostatic coating apparatus according to claim 1,
A thin-film electrostatic coating apparatus, wherein a stirring means for stirring the gas inside the housing is installed inside the housing. In the thin film electrostatic coating apparatus according to claim 2,
The stirring means includes a stirring duct extending in a longitudinal direction of the housing, a gas supply device that supplies pressurized gas to the inside of the stirring duct, and a gas inside the stirring duct is injected into the housing. A thin film electrostatic coating apparatus comprising a plurality of spray nozzles. In the thin film electrostatic coating apparatus according to any one of claims 1 to 3,
A plurality of the housings are installed in the middle of the series of the base materials,
A thin film electrostatic coating apparatus, wherein the powder supply device and the electrode are respectively installed in a plurality of the housings. In the thin film electrostatic coating apparatus according to any one of claims 1 to 3,
A plurality of the belt conveyor devices are installed in the middle of the series of the base materials,
Each of the plurality of belt conveyor devices is provided with the housing, the powder supply device, and the electrode,
The plurality of belt conveyor devices are horizontally arranged, and any one of the belt conveyor devices is installed above the other belt conveyor device. In the thin film electrostatic coating apparatus according to any one of claims 1 to 3,
A plurality of the belt conveyor devices are installed in the middle of the series of the base materials,
Each of the plurality of belt conveyor devices is provided with the housing, the powder supply device, and the electrode,
A plurality of the belt conveyor devices are respectively arranged in the vertical direction, and each of them is installed adjacent to and parallel to each other, and is a thin film electrostatic coating device. In the thin film electrostatic coating apparatus according to any one of claims 1 to 6,
At least two of the belt conveyor devices are installed in the middle of the series of the base materials,
A thin film electrostatic coating apparatus, wherein the base material that has passed through the belt conveyor device on the upstream side is disposed so as to be reversed and introduced into the belt conveyor device on the downstream side. In the thin film electrostatic coating apparatus according to any one of claims 1 to 7,
A masking device is installed in the housing,
The masking device has a masking belt for masking the surface of the substrate,
The masking belt is formed with a coating pattern that exposes the surface of the base material inside the housing,
The thin film electrostatic coating apparatus, wherein the masking belt is stretched along the surface of the conveyor belt with the base material interposed therebetween and is moved in synchronization with the conveyor belt.

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