JP6258133B2 - Thin film electrostatic coating equipment - Google Patents

Description

  The present invention relates to a thin film electrostatic coating apparatus, and more particularly to an apparatus for electrostatically coating a powder serving as an electrode layer on a thin film serving as a base material such as an electrode for a lithium ion battery.

Conventionally, a battery such as a lithium ion battery is formed by laminating a sheet-like positive electrode and a negative electrode via a separator and winding the laminate into a cylindrical shape or the like.
A sheet-like electrode used as a positive electrode and a negative electrode is obtained by forming an active material layer as a positive electrode or a negative electrode on the surface of a foil (base) obtained by rolling aluminum or copper.

The active material layer is made by dispersing a powder material such as an active material or a conductive aid in a solution in which a binder (binder) or a thickener is dissolved in an organic solvent, and making this into a slurry. It was formed by applying to (wet coating method).
In such a wet coating method, the process of evaporating the solvent is indispensable, so local exhaust is required, and not only the equipment becomes large, but also because of the wet process, the viscosity adjustment at the time of blending of the powder material such as the active material Since the coating film was not sufficiently stable due to the influence of humidity and the like, a dry coating method in which an active material, a conductive additive and a binder are powder-coated on a base has been developed (Patent Document 1). reference).

In Patent Document 1, the average particle diameter of the active material is 1 to 50 μm (preferably 20 to 30 μm), the average particle diameter of the conductive additive (conductive material powder) is 0.01 to 5 μm (preferably 0.03 to 2 μm), The average particle size of the binder is 0.1 to 50 μm (preferably 1 to 10 μm).
These active material, conductive additive and binder powders are vibrated with a vibrator during electrostatic coating, and are charged positively and negatively with respect to the base by the electric field application electrode. Adsorbed. And by heating in a drying furnace, a binder is fuse | melted and an active material and a conductive support material are fixed on a base.
Patent Document 1 also describes that a binder is melt-adhered to an active material in advance to form a composite powder, and this is powder-coated on a base.

In the electrostatic coating apparatus of Patent Document 1, a web-like (band-like or tape-like) aluminum foil is horizontally passed, and a charging electrode and a powder supply device including a vibrator are arranged in the middle. . These electrodes and powder supply devices are installed in three systems in order to ensure a coating region with a sufficient length in the middle of the aluminum foil.
On the other hand, there is also known an apparatus in which a sufficiently long coating region can be obtained with a single powder supply apparatus (see Patent Document 2).
In the electrostatic coating apparatus of Patent Document 2, a metal plate to be coated is arranged in a vertical direction in a long box-shaped housing, and the powder is blown from the powder supply device at the bottom of the housing. Electrostatic coating of powder can be performed on the surface of the metal plate exposed to.

JP 2001-351616 A JP 2012-217965 A

By the way, the aluminum foil or copper foil coated in Patent Document 1 is used for an electrode for a lithium ion battery, and is a thin film having a thickness of about 10 to 20 μm.
Such a thin film has a low strength itself, and even in Patent Document 1, there is a possibility that the thin film will break when the tension becomes excessive.
Furthermore, when it exposes in a housing over a long area | region like patent document 2, there exists a possibility of fracture | rupture by the airflow in a housing.
For this reason, even if it is going to introduce patent document 2 in order to simplify the powder supply apparatus in the electrostatic coating apparatus of patent document 1, it is the number like aluminum foil and copper foil used for the electrode for lithium ion batteries. It was difficult to apply to a thin film of 10 μm unit.

  An object of the present invention is to provide a thin film electrostatic coating apparatus that can safely perform electrostatic coating of a thin film and can simplify the configuration.

The thin film electrostatic coating apparatus of the present invention includes a conveyor device capable of holding a web-like substrate, a substrate supply device that supplies the substrate to the upstream side of the conveyor device, and the downstream side of the conveyor device. A base material recovery device that recovers a base material, a housing that surrounds an intermediate portion of the conveyor device and extends along the conveyor device, and supplies powder from one end of the housing to the other end A powder supply device, a fixing electrode that is installed inside the housing and fixes the powder to the base material held by the conveyor device, and a tension control device that controls the tension of the base material. Yes, and the between the conveyor device and the base material collecting device is installed base drawing device, the tension control device, the belt conveyor device, the substrate feeding device, the substrate recovering apparatus and the group Material pulling device While adjusting the operation speed to control the tension of the base material, the application section from the base material supply device to the base material drawing device, and the section from the base material drawing device to the base material recovery device, Each is individually controlled in tension .

  In such this invention, the web-shaped base material is supplied from the base material supply apparatus to the upstream side of the conveyor apparatus, and the supplied base material is hold | maintained at the conveyor apparatus and conveyed downstream. Then, while passing through the housing, the powder from the powder supply device is fixed to the base material by the fixing electrode, whereby electrostatic coating of the base material is performed. The substrate on which the powder has been electrostatically coated is collected by the substrate collecting device from the downstream side of the conveyor device.

At this time, even if the base material to be coated in the housing is a thin film having a thickness of about 10 to 20 μm and the strength is low, the base material transported while being held by the conveyor device is appropriately tensioned by the tension control device. Since it is controlled, it is not damaged by excessive tension. In the housing, since it is backed and reinforced by the conveyor device, it is not damaged by the airflow in the housing.
Therefore, according to the present invention, the electrostatic coating of the thin film can be performed safely, and the configuration can be simplified without using a special configuration or the like as the thin film electrostatic coating apparatus.

In the present invention, the conveyor device is preferably one of a belt conveyor device, a roller conveyor device, a roller conveyor device in which an auxiliary table is interposed between rollers, and a sliding table.
In such this invention, the back surface (surface on the opposite side to the surface to be coated) of the web-like substrate is held, the posture is stabilized, and reliable conveyance can be performed.

As the belt conveyor device, an endless belt stretched between an upstream roller and a downstream roller can be used as a conveyor belt. Or it is good also as a structure which pulls out the conveyor belt which is not endless from an upstream roll, and winds it up to a downstream roll.
If such a belt conveyor apparatus is used, a web-like base material will be supported by the continuous surface of a conveyor belt, and the most stable support can be performed. Further, since the conveyor belt places the base material and moves at a constant speed, it is possible to prevent any sliding between the base material and the conveyor belt.

As the roller conveyor device, a configuration in which a plurality of rollers extending in the width direction of the base material are arranged and rolled on the back surface of the base material can be used. A roller driven by an external driving source or a roller that rotates by rolling with a base material can be used, and these rollers may be used in combination. It is desirable that the distance between the rollers be a distance that does not cause slack in the substrate that is to be stretched between the rollers.
If such a roller conveyor device is used, a web-like base material is supported by each roller, and the peripheral surface of each roller and the base material are made to be at a constant speed, so that sliding between the base material and the roller is possible. It is possible to prevent any movement. In order to support such slack between the rollers, an auxiliary table may be provided between the rollers.

  As the sliding table, a table having a smooth surface over the entire length of the conveyor device can be used, and the substrate can be slid on the surface. However, in order to minimize the influence on the back surface of the base material, it is desirable to take measures to reduce friction such as smoothing the surface of the table and stretching a PTFE (tetrafluoroethylene resin) sheet or the like. A plurality of pores may be provided on the surface of the table to form a static pressure bearing or an air bearing to reduce friction.

The conveying direction of the substrate in the conveyor device, that is, the direction of the surface of the conveyor belt on which the substrate is held, the virtual support surface that envelops the upper end of the roller, the surface of the sliding table, etc. is preferably horizontal. . Thereby, the base material is pressed against the conveyor device by gravity and is safely held.
However, the conveying direction of the conveyor device may be a vertical direction or another inclined direction. In such a case, auxiliary holding means such as suction from the opposite side of the conveyor belt or the table may be appropriately provided so that the base material is securely held by the conveyor device.

  In the present invention, as the base material supply device and the base material recovery device, a detachable coil support device used in a printing machine or a metal sheet manufacturing apparatus can be used.

  In the present invention, the tension control device includes a driving device and an adjustment device for appropriately maintaining the tension of the web-like substrate fed through the conveyance path in the conveyance route from the substrate supply device to the substrate recovery device. Available. Or you may adjust the tension | tensile_strength of a base material by controlling operation | movement of each apparatus used for conveyance of a base material.

  In the present invention, the tension control device controls a slack detector that detects slackness of the base material, and a device that drives the base material based on the slackness of the base material detected by the slackness detector. And a control device.

In the present invention, as a device for driving the base material, a base material supply device, a base material recovery device, and a conveyor device (belt conveyor device and roller conveyor device) correspond, and by adjusting each operation speed, It is possible to adjust the tension of the substrate that is fed between the two. That is, if the feed speed on the downstream side is made faster than the feed speed on the upstream side in the conveyance direction of the base material, the tension of the base material becomes high, and conversely, if the speed is slowed, the tension becomes low.
In such this invention, by using a base material supply apparatus, a base material collection | recovery apparatus, and a conveyor apparatus, without installing the large apparatus for applying tension | tensile_strength to a base material, it is based on a slack detector and a control apparatus. The tension control device can be formed with a simple configuration.

In the present invention, the it is desirable that the pressing device is installed between the base material drawing device and said base material collecting device.

  In the present invention, the powder applied to the base material by the housing can be more stably fixed by the press device. At this time, although the press apparatus is largely related to the conveyance of the base material, the application section including the housing and the press section including the press apparatus can be separated and tension control can be executed in each. Therefore, even when a press device is used, the tension control of the base material can be reliably and easily performed.

  In the present invention, any powder supply device may be used as long as the powder for electrostatic coating is supplied to the housing in an air current, and the powder supply portion of the existing electrostatic coating device can be used. Can do. At this time, it is desirable that the component adjustment of the powder or the shape processing of the powder can be performed together.

  The powder supply device may supply powder from the downstream side of the housing and generate a flow of powder that moves in a direction opposite to the base material conveyed by the conveyor device, from the upstream side of the housing. You may supply the powder and produce | generate the flow of the powder which moves to the same direction as the base material conveyed with a conveyor apparatus.

  In the present invention, it is desirable to install a powder recovery device for recovering excess powder at the end of the housing opposite to the side to which the powder is supplied from the powder supply device.

In the present invention, it is desirable to have a heating device for heating the base material fed from the downstream side of the housing.
In the present invention, the base material fed from the downstream side of the housing is heated by the heating device, so that the powder fixed on the base material in the housing is solidified and fixed in a stable state. Can do.

In the present invention, it is desirable to have a powder neutralizing device that neutralizes the powder fixed to the substrate.
In the present invention, the charge removal of the powder by the powder charge removal apparatus is to charge the powder to the same polarity as the fixing electrode installed in the housing (opposite the polarity of the base material in the housing).
In the present invention as described above, the powder fixed on the substrate is neutralized by the powder neutralizing device. As a result, the powder fixed on the base material in the housing can be made to have the desired polarity, fixing failure due to mixing of the reverse polarity powder can be avoided, and stable electrostatic coating can be performed.

  In the present invention, the powder static elimination device is installed in a supply duct extending from the powder supply device to the housing and neutralizes the powder passing through the supply duct. It is desirable that a static elimination air generator for merging them in the supply duct, a static elimination electrode panel placed opposite to the surface of the base material on the downstream side of the housing, or a combination thereof.

Among the present inventions, according to the static elimination electrode in the supply duct, the powder supplied from the supply duct into the housing can be neutralized. In addition, by removing the static electricity from the supply duct, the powder supplied from the supply duct into the housing can be eliminated.
On the other hand, according to the electrode panel for static elimination, static elimination is performed with respect to the surface of the base material sent to the downstream side of the housing. Although the powder is already fixed in the housing on the surface of the base material, some reverse polarity powder may be in an unstable state that is not sufficiently close to the surface of the base material. . On the other hand, all the powder can be brought close to the base material by performing static elimination later, and a stable state can be obtained.

In the present invention, it is desirable that a stirring means for stirring the gas inside the housing is installed inside the housing.
In the present invention, by stirring the gas inside the housing with the stirring means, the powder can be rolled up together with the gas and sufficiently charged.

The powder supplied from the powder supply device is blown from the end of the housing on the carrier gas, and moves to the end on the downstream side (opposite to the supply side) along the airflow in the housing. In the middle of movement, the powder is charged by the fixing electrode and electrostatically adsorbed to the substrate. However, some of the insufficiently charged powder is not electrostatically attracted but travels to the downstream side in the air stream and is collected by a powder recovery device, etc. It falls on the substrate in the middle of the housing. Since the powder that is insufficiently charged and dropped onto the substrate is not electrostatically adsorbed to the base material, it floats up or drops off due to vibration during transportation, forming a uniform film on the top surface of the substrate. It becomes an obstacle to doing.
On the other hand, by stirring the gas inside the housing with the stirring means, powder that is insufficiently charged is wound up and sufficiently charged by the fixing electrode, so that it can be electrostatically attracted onto the substrate.

  In the present invention, the stirring means includes a stirring duct extending in a longitudinal direction of the housing, a gas supply device that supplies pressurized gas to the inside of the stirring duct, and a gas inside the stirring duct to the housing. It is desirable to provide a large number of spray nozzles for spraying into the interior of the printer.

In the present invention, the pressurized gas supplied into the duct is jetted into the housing from the jet nozzle, whereby the gas in the housing is agitated to wind up the powder and prevent sedimentation. it can.
In addition, if the stirring means is configured to inject pressurized gas, there is no mechanical moving part, so that stable operation can be maintained even when the powder is in contact with it, and maintainability can be improved. The mechanism is simple and the equipment cost can be reduced.
In the present invention, in addition to the pressurized gas injection type stirring means described above, an impeller rotating in the housing, a swinging stirring plate, a vibrating stirring member, and the like may be used.

In the present invention, it is preferable that a plurality of the housings are installed in the middle of the series of the base materials, and the powder supply device and the fixing electrode are respectively installed in the plurality of housings.
In such this invention, a some electrostatic coating can be performed with respect to a series of base materials. For this reason, the coating film can be thickened by repeating electrostatic coating with the same powder a plurality of times. Moreover, a multilayer coating film can also be formed on a base material by sequentially performing electrostatic coating with different powders.

  In addition, a conveyor apparatus may install a some housing in the middle of a series of conveyor apparatuses, and may be installed for every housing. In the case of using a plurality of conveyor devices, the substrate taken out from the upstream conveyor device may be replaced with the downstream conveyor device.

In the present invention, a plurality of the conveyor devices are installed in the middle of the series of the base materials, and the plurality of conveyor devices are provided with the housing, the powder supply device, and the fixing electrode, respectively. It is desirable that each of the conveyor devices is horizontally arranged, and any one of the conveyor devices is installed above the other conveyor device.
In such this invention, the occupation floor area as an installation can be suppressed by overlapping a conveyor apparatus in an up-down direction. Further, since the conveyor device is arranged horizontally, the substrate can be safely held by the conveyor device by its own weight.

In the present invention, a plurality of the conveyor devices are installed in the middle of the series of the base materials, and the plurality of conveyor devices are provided with the housing, the powder supply device, and the fixing electrode, respectively. It is desirable that the conveyor devices are arranged in the vertical direction, and are arranged adjacent to each other in parallel.
In such this invention, the occupation floor area as an installation can further be suppressed by arrange | positioning a conveyor apparatus to the vertical direction.

  In the present invention, at least two of the conveyor devices are installed in the middle of a series of the base materials so that the base material that has passed through the upstream conveyor device is reversed and introduced into the downstream conveyor device. It is desirable that they are arranged.

In the present invention, the substrate is electrostatically coated on the surface side with the housing of the upstream conveyor device. Then, by being pulled out from the upstream conveyor device and then reversed, the back side is electrostatically coated in the housing while being transported by the downstream conveyor device. Thereby, electrostatic coating of powder can be performed on the front and back of the base material that has passed through the two conveyor devices.
Such a structure in which the base material is reversed and sequentially electrostatically coated can be easily realized by using the above-described arrangement in which the two conveyor devices are stacked one above the other or in the vertical direction.

  In the present invention, a masking device is installed in the housing, and the masking device has a masking belt for masking the surface of the base material, and the masking belt exposes the surface of the base material inside the housing. A coating pattern is formed, and the masking belt is stretched along the surface of the base material conveyed by the conveyor device with the base material interposed therebetween, and is moved in synchronization with the base material. desirable.

In the present invention, the masking belt is synchronously moved along the surface of the base material conveyed by the conveyor device, so that only a specific region of the base material is exposed from the coating pattern in the housing. The Therefore, electrostatic coating of the powder in the housing is performed only on the region of the substrate that is exposed from the coating pattern.
As a result, a powder coating corresponding to the coating pattern of the masking belt can be formed on the base material that has passed through the housing.

According to the present invention, even if the web-like base material is a thin film having a thickness of about 10 to 20 μm and is low in strength, it is conveyed while being held on the conveyor device, and the tension is properly maintained by the tension control device. Therefore, it is not damaged by excessive tension. In the housing, since it is held and reinforced by the conveyor device, it is not damaged by the airflow in the housing.
Therefore, according to the present invention, the electrostatic coating of the thin film can be performed safely, and the configuration can be simplified without using a special configuration or the like as the thin film electrostatic coating apparatus.

The schematic front view which shows the whole structure of 1st Embodiment of this invention. The schematic front view which shows the principal part of the said 1st Embodiment. The schematic side view which shows the principal part of the said 1st Embodiment. The schematic diagram which shows the coated base material of the said 1st Embodiment. The schematic diagram which shows the state which does not neutralize the powder in the said 1st Embodiment. The schematic diagram which shows the state which performed static elimination of the powder in the said 1st Embodiment. The schematic front view which shows the whole structure of 2nd Embodiment of this invention. The schematic front view which shows the whole structure of 3rd Embodiment of this invention. The schematic front view which shows the whole structure of 4th Embodiment of this invention. The schematic front view which shows the principal part of 5th Embodiment of this invention. The schematic front view which shows the principal part of 6th Embodiment of this invention. The schematic front view which shows the principal part of 7th Embodiment of this invention. The schematic front view which shows the whole structure of 8th Embodiment of this invention. The schematic front view which shows the whole structure of 9th Embodiment of this invention. The schematic front view which shows the whole structure of 10th Embodiment of this invention. The schematic front view which shows the whole structure of 11th Embodiment of this invention. The schematic side view which shows the principal part of the said 11th Embodiment. The schematic diagram which shows the conveyor belt for masking of the said 11th Embodiment. The schematic diagram which shows the coated base material of the said 11th Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
1 to 4 show a first embodiment of the present invention.
The thin film electrostatic coating apparatus 1 of this embodiment shown in FIGS. 1 to 3 forms a coating film 8 by electrostatic coating on the surface of a web-like substrate 9 shown in FIG. To manufacture.

The base material 9 is a thin film that becomes a base material such as an electrode for a lithium ion battery, and is an aluminum foil or a copper foil having a thickness of about 10 to 20 μm.
The coating film 8 serves as an electrode layer of the above-described electrode for a lithium ion battery. The powder of the active material (including the conductive additive) and the binder powder are mixed, and the obtained mixed powder is powdered. The body 6 (see FIGS. 2 and 3) is electrostatically coated to be fixed on the surface of the base material 9, and is further fixed to the base material 9 by heating and pressing.

As shown in FIG. 1, the thin film electrostatic coating apparatus 1 has a belt conveyor device 10 extending in the horizontal direction.
The belt conveyor device 10 includes a conveyor belt 11 that holds the base material 9 described above on its upper surface.
The conveyor belt 11 is a stainless steel endless belt or the like, and is stretched between an upstream roller 13 (right side in the figure) and a downstream roller 14 (left side in the figure) supported by the frame 12. The upper surface holding the material 9 is horizontally arranged.

In the belt conveyor device 10, a drive motor 15 is connected to the downstream roller 14. By rotating the downstream roller 14 with this drive motor 15, the conveyor belt 11 is sent, and the upstream roller 13 also rotates integrally. . The drive by the drive motor 15 may be either the upstream roller 13 or the downstream roller 14 or both.
By feeding the conveyor belt 11 with the drive motor 15, the web-like base material 9 held on the upper surface thereof is sent from the upstream side (right side in the figure) to the downstream side (left side in the figure).

On the upstream side of the belt conveyor device 10, a base material supply device 20 (right end in FIG. 1) for supplying the base material 9 and a slack detector 60A are installed.
A base material recovery device 30 (the left end in FIG. 1) for recovering the base material 9 is installed on the downstream side of the belt conveyor device 10.
A housing 40 and a heating device 50 are installed in the middle of the belt conveyor device 10.
Between the belt conveyor device 10 and the base material recovery device 30, a base material drawing device 90, a slack detector 60B, and a press device 70 are installed.

  In the thin film electrostatic coating apparatus 1 of the present embodiment, the base material supply device 20 to the base material drawing device 90 are the application section Rc, and the looseness detector 60A, the belt conveyor device 10, the housing 40, and the heating device 50 are the same. It is installed in the application section Rc. The looseness detector 60A detects the looseness of the base material 9 in the application section Rc. Further, the substrate drawing device 90 to the substrate collecting device 30 are set as a press section Rp, and the slack detector 60B and the press device 70 are installed in the press section Rp. The looseness detector 60B detects the looseness of the base material 9 (the base material 7 on which the powder 6 is applied as the coating film 8) in the press section Rp.

A control device 99 is installed in order to control the operation of each unit described above.
The control device 99 is composed of a general personal computer device, operates based on a preset program, and controls the operation of each part of the thin film electrostatic coating device 1. The contents of the operation control include the electrostatic coating operation control in the housing 40 and the heating control in the heating device 50, as well as the belt conveyor device 10, the base material supply device 20, the base material recovery device 30, the press device 70, and the base material drawing device. Control of the conveyance of the substrate 9 by 90 is included.

In particular, as a tension control device of the present invention, the control device 99 controls each part so that the base material 9 is not slack and excessive tension is not generated in each of the coating section Rc and the press section Rp.
Specifically, based on the looseness of the base material 9 detected by the looseness detectors 60A and 60B installed in the sections Rc and Rp, the corresponding belt conveyor device 10, the base material supply device 20, and the base material recovery device. 30, the operating speed of the pressing device 70 and the base material drawing device 90 is adjusted, and thereby the slackness or tension of the base material 9 (or the base material 7) in each section Rc, Rp is maintained in an optimum state.

  Hereinafter, each part of the thin film electrostatic coating apparatus 1 is demonstrated. Below, the base material supply apparatus 20, the base material collection | recovery apparatus 30, the base material drawing-in apparatus 90, and the slack detectors 60A and 60B regarding conveyance of the base material 9 are demonstrated first, Then, the housing 40 regarding coating, the heating apparatus 50, The press device 70 will be described.

The base material supply device 20 has a coil 21 around which a web-like base material 9 is wound, and supplies the base material 9 drawn from the coil 21 to the upstream side of the conveyor belt 11.
The coil 21 is detachable, and the supply of the base material 9 can be continued by removing the coil 21 from which the base material 9 has been pulled out and attaching the coil 21 wound with the base material 9.
A drive motor 22 is connected to the coil 21, and the rotation of the coil 21 can be controlled so that the rotation speed is suitable for feeding the base material 9.
Such a substrate supply device 20 may be appropriately configured with reference to a detachable coil support device used in a printing machine or a metal sheet manufacturing apparatus having a similar function.

The base material collection device 30 has a coil 31 around which a web-like base material 9 (a base material 7 with a coating film during operation) is wound, and winds and recovers the base material 9 drawn from the downstream side of the conveyor belt 11. To do.
The coil 31 is a detachable type, and the recovery of the base material 9 can be continued by removing the coil 31 on which the base material 9 has been wound up by a predetermined amount and mounting a new empty coil 31.
A drive motor 32 is connected to the coil 31, and the rotation of the coil 31 can be controlled so that the rotation speed is suitable for winding the base material 9.
Such a substrate recovery device 30 may be appropriately configured with reference to a detachable coil support device used in a printing machine or a thin metal plate manufacturing apparatus having a similar function.

The slack detectors 60 </ b> A and 60 </ b> B have two rollers 61 and 62 arranged in the transport direction of the base material 7, respectively, and a roller 63 deviated from the transport direction of the base material 7 between them.
Each of the rollers 61 and 62 is disposed at the same level as the conveyance path of the base material 9 at the highest position on the peripheral surface. In the present embodiment, the roller 63 is displaced downward from the rollers 61 and 62, and the shaft is supported via a swinging arm 64. The roller 63 moves up and down by the swinging of the arm 64. However, the distance to the rollers 61 and 62 varies. The arm 64 is provided with a displacement detector 65 that detects the swing of the arm 64.

The base material 7 introduced into the slack detectors 60A and 60B is received by the roller 61 and sent to the lower roller 63, reversed by the roller 63, returned to the upper roller 62, and sent downstream. With such an arrangement, the roller 63 moves downward when the slackness of the substrate 7 increases, and the roller 63 moves upward when the slackness decreases. The vertical displacement of the roller 63 at this time can be detected by the displacement detector 65 as the swing of the arm 64.
Therefore, the slack detectors 60A and 60B can detect the increase or decrease of the slack of the base material 7 based on the vertical displacement of the roller 63 detected by the displacement detector 65. The detected looseness of the base material 7 is transmitted to the control device 99.

The base material drawing device 90 includes two rollers 91 and 92 arranged in the transport direction of the base material 7, and includes a roller 93 that deviates from the transport direction of the base material 7 between them.
The rollers 91 and 92 are arranged such that the highest positions on the peripheral surfaces are at the same level as the transport path of the base material 9. In the present embodiment, the roller 93 is configured by a suction roll or the like that is disposed by being displaced downward from the rollers 91 and 92, and the height can be adjusted by the expansion / contraction mechanism 94.
A driving motor 95 is connected to the roller 93, and the roller 93 can be rotationally driven at a rotational speed based on a command from the control device 99.

In the thin film electrostatic coating apparatus 1 of the present embodiment, the base material 9 supplied from the base material supply apparatus 20 is conveyed by the belt conveyor device 10 via the slackness detector 60A, passed through the housing 40 and the heating device 50, and then the base material 9 is supplied. The material is drawn by the material drawing device 90 (application section Rc).
Subsequently, the base material 9 sent out from the base material drawing device 90 is transported to the press device 70 via the slackness detector 60B, and recovered by the base material recovery device 30 (press section Rp).
Hereinafter, the housing 40, the heating device 50, and the pressing device 70 arranged in each section Rc, Rp will be described.

The housing 40 has a housing main body 41 that surrounds an intermediate portion of the conveyor belt 11.
As shown in FIGS. 2 and 3, the housing main body 41 has a box shape extending along the conveyor belt 11, and one surface is opened, and the conveyor belt 11 is disposed so as to close the opening. Therefore, the base material 9 held on the upper surface of the conveyor belt 11 is exposed to the internal space from the opening of the housing body 41 when passing through the housing 40.

A powder supply device 42 and a powder charge removal device 46 are installed on the downstream side of the housing body 41.
A powder recovery device 43 is installed on the upstream side of the housing body 41.
A plurality of fixing electrodes 44 for electrostatic coating are arranged inside the housing body 41.
Inside the housing main body 41, a stirring duct 45 extending in the longitudinal direction of the housing main body 41 along the aforementioned opening is installed.

The powder supply device 42 supplies powder from one end of the housing 40 to the other end, and in this embodiment, the downstream side of the housing main body 41 (the conveyor belt 11 holding the base material 9). Is installed on the exit side).
The powder supply device 42 stores the powder 6 inside and has a tank 421 having a powder quantitative cutting device, a supply duct 422 continuous from the tank 421 to the downstream end of the housing body 41, and the inside of the tank 421. And a feed pump (not shown) for winding the powder 6 with a carrier gas and feeding it to the supply duct 422.

Thereby, the powder supply device 42 can send out the powder 6 together with the carrier gas and supply the powder 6 from the supply duct 422 to the downstream end of the housing body 41, and in the housing body 41 from the downstream side to the upstream side. An air current of carrier gas containing powder 6 for electrostatic coating is generated.
The powder supply device 42 can appropriately use the powder supply portion of the existing electrostatic coating device, and the powder 6 component adjustment or the shape processing of the powder 6 can be performed prior to the storage of the powder 6. You may enable it to be performed together.

The powder recovery device 43 is installed at the end of the housing 40 on the upstream side (the side where the conveyor belt 11 holding the base material 9 is introduced and the downstream side where the powder supply device 42 is installed). The excess powder 6 that has flowed through the housing body 41 to the upstream side is recovered.
The powder recovery device 43 includes a tank 431 that stores the powder 6 therein, and a recovery duct 432 that continues from the tank 431 to the upstream end of the housing body 41, and the tank 431 passes through the recovery duct 432. A suction pump (not shown) that sucks the carrier gas containing excess powder 6 from the upstream side of the housing body 41 is installed.

As a result, the powder recovery device 43 can recover the carrier gas and excess powder 6 on the upstream side of the housing body 41 from the recovery duct 432, from the downstream side generated in the housing body 41 to the upstream side. It is possible to maintain an air flow of the carrier gas including the powder 6 that goes.
Note that the powder recovery device 43 can appropriately utilize the powder recovery portion of the existing electrostatic coating device, and reuse of the recovered powder 6 and the carrier gas, dust filtration processing when discharging, etc. You may be able to do it.

The fixing electrode 44 charges the powder 6 and adsorbs the powder 6 on the surface of the base material 9 held on the conveyor belt 11 to fix the powder 6 with a desired thickness.
For this purpose, a plurality of fixing electrodes 44 are arranged vertically and horizontally along the opening of the housing body 41 from which the base material 9 is exposed.
Each fixing electrode 44 is connected to a power supply device 441 so that the powder 6 is charged.

The stirring duct 45 stirs the carrier gas containing the powder 6 flowing in the housing main body 41 from the downstream side to the upstream side, thereby winding the powder 6 and preventing its settling.
The stirring ducts 45 are arranged in a pair on both sides along the longitudinal direction of the housing body 41 among the edges of the opening of the housing body 41.
A gas supply device 451 for supplying an external pressurized gas is connected to the stirring duct 45, and a number of injection nozzles 452 for injecting the gas in the stirring duct 45 into the housing body 41 are installed. Yes.

The stirring duct 45 is formed in a tubular shape having a rectangular cross section, and both ends thereof are closed. Of the edges in the longitudinal direction of the stirring duct 45, the edges close to the longitudinal central axis of the housing body 41 are cut away, and this opening is closed by a plate material in which a number of injection nozzles 452 are opened. Yes. Accordingly, when pressurized gas is supplied from the gas supply device 451 to the inside of the stirring duct 45, this gas is injected into the housing body 41 from a number of injection nozzles 452, and the inside of the housing body 41 from each of the injection nozzles 452. A jet 453 is formed.
The carrier gas flowing in the housing main body 41 is agitated by the jet 453, and the powder 6 contained therein is rolled up to prevent its sedimentation.

The powder charge removal device 46 includes a charge removal electrode 461 installed at the end of the housing body 41 inside the supply duct 422 of the powder supply device 42, and a power supply device 462 that applies a high voltage to the charge removal electrode 461. . The power supply device 462 is grounded to the frame 12 of the belt conveyor device 10, and the polarity of the static elimination electrode 461 is opposite to that of the base material 9 side conveyed by the belt conveyor device 10.
When the powder 6 supplied from the supply duct 422 of the powder supply device 42 to the housing main body 41 passes through the vicinity of the charge removal electrode 461 by such a powder charge removal device 46, the substrate 9 is uniformly formed. Is neutralized so as to have a reverse polarity.

The heating device 50 is for fixing the powder 6 to the base material 9 in the housing 40 and then fixing the powder 6 together with the base material 9 as the coating film 8. is set up.
The heating device 50 includes a heating device body 51 that surrounds the conveyor belt 11 on the downstream side of the housing 40. Inside the heating device main body 51, a heater (not shown) is installed on the upper surface side of the conveyor belt 11 along the conveying direction of the base material 9, and is fixed to the base material 9 held on the conveyor belt 11 and the surface thereof. The layer of the powder 6 is heated. By this heating, the binder components of the powder 6 are bonded to each other, and are fixed to the surface of the base material 9 as the coating film 8 to form the base material 7 with a coating film.

Although the base material 7 with a coating film formed by the heating device 50 (the base material 9 on which the powder 6 is fixed as a coating film 8, see FIG. 4) is held on the surface of the conveyor belt 11. After passing through the heating device 50, the belt is separated from the conveyor belt 11 on the downstream side of the belt conveyor device 10, and pulled out from the belt conveyor device 10 alone.
The base material 7 drawn out from the belt conveyor device 10 is recovered by the base material recovery device 30 via the base material drawing device 90, the slackness detector 60B, and the press device 70 in order.

The press device 70 performs roll press processing on the surface of the base material 7 in order to further strengthen the fixing of the coating film 8 of the base material 7.
For this purpose, the press device 70 has a pair of pressure rolls 71 and 72 that sandwich the base material 7 fed from the slack detector 60B from above and below, and a drive motor 73 that rotationally drives the lower pressure roll 72. Have
The pair of pressure rolls 71 and 72 are supported so that the distance between them can be finely adjusted, and the pressure state on the substrate 7 can be adjusted by adjusting the distance. And the press roll 72 is rotated with the drive motor 73, and the base material 7 which rolls to this can be sent appropriately.
The base material 7 sent out from the press device 70 is sent to the base material collection device 30 via the roller 74 and is wound around the coil 31 and collected.

In this embodiment, the following effects can be obtained.
In the thin film electrostatic coating apparatus 1 of the present embodiment, the web-like base material 9 is supplied from the base material supply device 20 to the upstream side of the conveyor belt 11, and the supplied base material 9 is conveyed by the belt conveyor device 10. .
Then, the powder 6 from the powder supply device 42 is fixed to the base material 9 conveyed by the belt conveyor device 10 by the fixing electrode 44 while passing through the housing 40, thereby electrostatic coating. Is done. The base material 7 on which the coating film 8 is formed by electrostatic coating is sent out from the downstream side of the belt conveyor device 10, passes through heating by the heating device 50 and press processing by the press device 70, and then enters the base material collection device 30. To be recovered.
Thereby, the base material 7 in which the coating film 8 of the powder 6 is formed on the surface of the base material 9 as shown in FIG.

In this embodiment, since the belt conveyor apparatus 10 is used, even if the base material 9 coated in the housing 40 is a thin film having a thickness of about 10 to 20 μm and has a low strength, it is held on the surface of the conveyor belt 11. Since it is transported, it is not damaged by excessive tension. In addition, the housing 40 is also reinforced by being lined with the conveyor belt 11, so that it is not damaged by the airflow in the housing 40.
Therefore, according to the present invention, the electrostatic coating of the thin film can be performed safely, and the configuration can be simplified without using a special configuration or the like as the thin film electrostatic coating apparatus.

  In the present embodiment, the conveying direction of the base material 9 in the belt conveyor device 10, that is, the direction of the surface of the conveyor belt 11 on which the base material 9 is held is the horizontal direction. For this reason, the base material 9 can be pressed against the surface of the conveyor belt 11 by gravity, can be stably held by itself, and can be held safely while being mechanically simple.

In this embodiment, since the detachable coil support device used in the printing machine or the thin metal plate manufacturing apparatus is used as the base material supply device 20 and the base material recovery device 30, the coil or the coating around the base material 9 before coating is applied. The work of carrying in / out can be facilitated as a coil in which the base material 7 is wound.
Further, a slack detector 60B is installed between the belt conveyor device 10 and the substrate recovery device 30, and the belt conveyor device 10, the press device 70, and the substrate recovery device 30 according to the detected slackness of the substrate 7. Since the rotation drive is controlled, the slack of the base material 7 can be brought into an appropriate state even if the distance between the belt conveyor device 10 and the press device 70 is long.

  In this embodiment, slack detectors 60A and 60B that detect slack of the base material 9 and a control device 99 that controls each device that drives the base material 9 are installed as tension control devices. The control device 99 drives the base material 9 based on the looseness of the base material 9 detected by the slackness detectors 60A and 60B (base material supply device 20, belt conveyor device 10, base material drawing device 90). Since the operation speeds of the press device 70 and the base material recovery device 30) are adjusted, the tension of the base material fed between them can be adjusted appropriately.

  Thereby, in this embodiment, by using each device that drives the base material 9 as a part of the tension control device, it is possible to detect looseness without installing a large-scale device for applying tension to the base material 9. The tension control device can be formed with a simple configuration by the devices 60A and 60B and the control device 99.

Furthermore, in this embodiment, the press apparatus 70 can be installed and the coating film 8 of the powder 6 applied to the base material 9 by the housing 40 can be more stably fixed.
At this time, since the base material drawing device 90 is installed between the press device 70 and the belt conveyor device 10, the tension control described above is applied to the coating section Rc from the base material feeding device 20 to the base material drawing device 90, and the base section. The press section Rp from the material drawing device 90 to the base material collecting device 30 can be separated. In each of the sections Rc and Rp, slack detectors 60A and 60B for detecting slack of the base material 9 are provided.

  Accordingly, the control device 99 can execute appropriate tension control in the coating section Rc including the housing 40 and the heating device 50 and the press section Rp including the press device 70, respectively. When the press device 70 is used to strengthen the fixation of the powder 6, the press device 70 is largely related to the conveyance of the base material 9, but by performing tension control individually in each of the sections Rc and Rp as described above. In addition, the substrate 9 can be conveyed appropriately and reliably.

In this embodiment, in the housing 40, the powder 6 can be fixed as the coating film 8 on the surface of the base material 9 by electrostatic coating.
At this time, since the powder 6 is supplied from the downstream end portion of the housing 40 into the housing body 41 by the powder supply device 42, the powder placed in the airflow over a long distance to the upstream end portion. 6 and the substrate 9 on the surface of the conveyor belt 11 can be brought into contact with each other. Therefore, since the entire length of the housing 40 can be used effectively, the entire length of the housing 40 can be minimized, and the device can be miniaturized.

  In the present embodiment, the powder discharging device 46 can discharge the powder 6 supplied from the powder supply device 42 into the housing 40 so as to have a polarity opposite to that of the base material 9. As a result, the powder 6 fixed to the base material 9 in the housing 40 can be aligned with the intended polarity, and fixing failure due to mixing of reverse polarity powder can be avoided and stable electrostatic coating can be performed. Can do.

  In FIG. 5, in the electrostatic coating in the housing 40, the base material 9 has, for example, “+” polarity. If the powder 6 has “−” polarity, the powder 6 moves to the surface of the base material 9. And is electrostatically adsorbed smoothly. For this purpose, “−” charge is applied to the powder 6 by the fixing electrode 44 (see FIGS. 2 and 3) in the housing 40.

  However, if “−” charge is not sufficiently applied to the powder 6 and a part of the powder 6A is charged with “+” polarity, is it fixed by receiving repulsive force from the substrate 9 of the same polarity? Alternatively, even if it is fixed on the surface of the base material 9 together with other powders 6, the base material 7 is formed with an unstable coating film 8 that is separated from the base material 9, that is, having a protruding portion.

On the other hand, the generation of the “+” polarity powder 6A can be suppressed by charging the powder 6 supplied into the housing 40 with the “−” polarity in advance by the electrode 461 for static elimination. .
In FIG. 6, if the powder 6 is unified with “−” polarity, all the “−” polarity powder 6 is electrostatically adsorbed to the base material 9, and a flat and uniform coating film 8 is formed. The obtained base material 7 can be obtained.

  Furthermore, the powder charge removal device 46 of the present embodiment is configured by a charge removal electrode 461 installed in the supply duct 422 of the powder supply device 42 and a power supply device 462 that applies a high voltage, so the structure is simple. Can be.

In this embodiment, since the powder recovery device 43 that recovers excess powder is installed on the opposite side of the housing 40 from the powder supply device 42, the powder 6 previously supplied into the housing 40 is appropriately recovered. By doing so, supply of fresh powder 6 into the housing 40 is not hindered, and leakage to the outside of the housing 40 can be prevented in advance.
Furthermore, in this embodiment, since the heating device 50 and the pressing device 70 for fixing the coating film 8 of the powder 6 fixed to the base material 9 are installed on the downstream side of the housing 40, the coating film 8 is made strong. It is possible to make the substrate 7 stable and robust.

  In this embodiment, the stirring duct 45 extending in the longitudinal direction of the housing 40 is provided as the stirring means, the pressurized gas is supplied from the gas supply device 451, and the gas is injected from the multiple injection nozzles 452. By stirring the carrier gas in 40, the powder 6 can be rolled up and settling can be prevented.

  The agitation means of the present embodiment agitates the airflow in the housing 40 by injecting pressurized gas from the agitation duct 45 and the injection nozzle 452, and has no mechanical moving parts. Stable operation can be maintained even when 6 is in contact, so that maintainability can be improved, and the mechanism can be simplified and the equipment cost can be reduced.

[Second Embodiment]
FIG. 7 shows a second embodiment of the present invention.
1 A of thin film electrostatic coating apparatuses of this embodiment contain the structure similar to the thin film electrostatic coating apparatus 1 of 1st Embodiment mentioned above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, the belt conveyor apparatus 10 having the conveyor belt 11 is used. On the other hand, in the thin film electrostatic coating apparatus 1A of this embodiment, a roller conveyor apparatus 10A in which a plurality of rollers 11A are arranged is used.

Even with the thin film electrostatic coating apparatus 1A using such a roller conveyor apparatus 10A, the same effects as those of the first embodiment described above can be obtained.
In the roller conveyor device 10A, the base material 9 is supported at the highest position of the roller 11A. However, the support in between is not obtained, and the substrate 9 sinks due to gravity and causes slack. For this reason, it is desirable to make the roller 11A have a small diameter and to make the mutual distance as small as possible.

  In the roller conveyor device 10 </ b> A, it is desirable to drive all the rollers 11 </ b> A and control the peripheral speed to be the same as the feed speed of the base material 9. Thereby, sliding with the base material 9 and the roller 11A can be eliminated. On the other hand, a part of the rollers 11 </ b> A may be rolled on the base material 9 without being driven. Even in this case, by supporting the roller 11A with a bearing having a small rotational resistance, sliding between the base material 9 and the roller 11A can be minimized. Although all the rollers 11 </ b> A may be non-driven, in order to minimize sliding with the base material 9, it is desirable that a part or all of them be rotationally driven.

[Third Embodiment]
FIG. 8 shows a third embodiment of the present invention.
The thin film electrostatic coating apparatus 1B of this embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, the belt conveyor apparatus 10 having the conveyor belt 11 is used. On the other hand, in the thin film electrostatic coating apparatus 1B of this embodiment, a roller conveyor apparatus 10B having a plurality of rollers 11A and an auxiliary table 11B between the rollers 11A is used.

In the roller conveyor device 10B, the rollers 11A are the same as those in the second embodiment described above.
In the roller conveyor apparatus 10B of the present embodiment, the auxiliary table 11B is installed between the rollers 11A, and the height of the front surface is fixed in accordance with the highest position of the roller 11A, that is, the back surface height of the base material 9. ing.
In addition, the entire surface of the auxiliary table 11B is coated with PTFE (tetrafluoroethylene resin) or attached with a sheet.

By such an auxiliary table 11B, the base material 9 which is about to hang down by gravity between the rollers 11A can be supported and maintained at a desired height. At this time, the surface of the auxiliary table 11B is reduced in friction by a PTFE sheet or the like, and even if it slides on the back surface of the base material 9, it does not affect the back surface of the base material 9.
The thin film electrostatic coating apparatus 1B using such a roller conveyor apparatus 10B can obtain the same effects as those of the first embodiment described above.

[Fourth Embodiment]
FIG. 9 shows a fourth embodiment of the present invention.
The thin film electrostatic coating apparatus 1C of the present embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, the belt conveyor apparatus 10 having the conveyor belt 11 is used. On the other hand, in the thin film electrostatic coating apparatus 1C of the present embodiment, a sliding conveyor apparatus 10C having a table 11C extending over the entire length of the sliding conveyor apparatus 10C is used.

The table 11C is continuous over the entire length of the sliding conveyor device 10C, the surface thereof is smooth, and the entire surface is coated with PTFE (tetrafluoroethylene resin) or attached with a sheet. Accordingly, the surface of the table 11C is reduced in friction, and even if it slides on the back surface of the base material 9, it does not affect the back surface of the base material 9.
The same effect as that of the first embodiment described above can be obtained also by the thin film electrostatic coating apparatus 1C using such a sliding conveyor apparatus 10C.

[Fifth Embodiment]
FIG. 10 shows a fifth embodiment of the present invention.
This embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the above-described thin film electrostatic coating apparatus 1 of the first embodiment, as the powder charge eliminating device 46, the charge eliminating electrode 461 installed in the supply duct 422, and the power supply device 462 for applying a high voltage to the charge eliminating electrode 461, It was set as the structure which has. On the other hand, in this embodiment, as the powder charge removal device 46, a charge removal air generation device 463 and a charge removal air supply duct 464 are used.

The static elimination air generation device 463 generates static elimination air charged to a predetermined polarity by applying a high voltage to the air sucked from the outside. For applying the high voltage and charging the air, a configuration according to the above-described static elimination electrode 461 and power supply device 462 can be used.
The static elimination air supply duct 464 connects the static elimination air generator 463 and the vicinity of the end of the supply duct 422 on the housing 40 side, and supplies static elimination air into the supply duct 422.

In such a powder static elimination device 46, the powder 6 supplied from the powder supply device 42 is supplied into the housing 40 through the supply duct 422. At this time, since the static elimination air is supplied in the middle of the supply duct 422, the static elimination air is merged with the powder 6 passing through the supply duct 422, and by this static elimination air, the powder 6 is charged with the same polarity as the static elimination air. As a result, the desired charge removal is performed.
Also according to this embodiment, the same effect as that of the first embodiment described above can be obtained.

[Sixth Embodiment]
FIG. 11 shows a sixth embodiment of the present invention.
This embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the above-described thin film electrostatic coating apparatus 1 of the first embodiment, as the powder charge eliminating device 46, the charge eliminating electrode 461 installed in the supply duct 422, and the power supply device 462 for applying a high voltage to the charge eliminating electrode 461, It was set as the structure which has. In the present embodiment, a static elimination air generator 463 and a static elimination air supply duct 464 similar to those in the fifth embodiment described above are further added.

In the powder charge removal apparatus 46 of the present embodiment, the charge removal electrode 461 and the power supply apparatus 462 of the first embodiment, and the charge removal air generator 463 and the charge removal air supply duct 464 of the fifth embodiment are installed. The static elimination performance of the powder 6 passing through the supply duct 422 can be further enhanced.
Further, the power supply device 462 can be used as a high voltage source of the static elimination air generator 463.

[Seventh Embodiment]
FIG. 12 shows a seventh embodiment of the present invention.
This embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the above-described thin film electrostatic coating apparatus 1 of the first embodiment, as the powder charge eliminating device 46, the charge eliminating electrode 461 installed in the supply duct 422, and the power supply device 462 for applying a high voltage to the charge eliminating electrode 461, It was set as the structure which has. On the other hand, in this embodiment, the electrode panel 465 for static elimination provided opposite to the surface of the base material 9 sent out from the downstream side of the housing 40 is provided.

The neutralizing electrode panel 465 is a plate-like electrode disposed opposite to the downstream side portion of the housing 40 on the surface of the conveyor belt 11 of the belt conveyor device 10. A power supply device 462 similar to that of the first embodiment described above is connected to the electrode panel 465 for charge removal, and a high voltage is applied thereto.
With such a neutralizing electrode panel 465, it is possible to neutralize the powder 6 fixed on the surface of the base material 9 fed from the downstream side of the housing 40.

That is, the powder is already fixed in the housing 40 on the surface of the base material 9 sent to the downstream side of the housing 40. Here, when a part of the fixed powder 6 includes a powder 6A charged to a reverse polarity (see FIG. 5), the powder 6A is in an unstable state that is not sufficiently close to the surface of the substrate 9. Sometimes.
On the other hand, by removing electricity later by the electrode panel for removing electricity 465, all the powders 6 are removed so as to have the desired polarity and can be brought close to the base material 9 (see FIG. 6). And the coating film 8 can be made into the stable state.

[Eighth Embodiment]
FIG. 13 shows an eighth embodiment of the present invention.
The thin film electrostatic coating apparatus 2 of the present embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, one housing 40 that performs electrostatic coating is installed in the middle of the belt conveyor apparatus 10. On the other hand, in the thin film electrostatic coating apparatus 2 of this embodiment, two housings 40 are installed in series in the middle of the belt conveyor apparatus 10.

The two housings 40 are respectively the same as the housing 40 (see FIG. 2) in the first embodiment described above.
In addition, the belt conveyor device 10, the base material supply device 20, the base material recovery device 30, the heating device 50, the slack detectors 60A and 60B, and the press device 70, which are other configurations of the thin film electrostatic coating device 2, are described above. It is the same as each in the thin film electrostatic coating apparatus 1 of 1st Embodiment.
Note that the belt conveyor device 10 is formed to have a longer overall length than the first embodiment described above, because the two housings 40 are installed.

In this embodiment, the electrostatic coating can be performed twice on the series of base materials 9 conveyed by the belt conveyor device 10 in order by the upstream housing 40 and the downstream housing 40.
For this reason, the coating film 8 formed on the base material 9 can be thickened by repeating electrostatic coating with the same powder 6 twice.
Moreover, a multilayer coating film can also be formed on the base material 9 by sequentially performing electrostatic coating with different powders 6.
In the present embodiment, similarly to the first embodiment described above, tension control can be performed in the application section Rc and the press section Rp.

In the present embodiment, the plurality of housings 40 are installed in the middle of the series of belt conveyor devices 10. However, the plurality of belt conveyor devices 10 are continuously installed, and the plurality of housings 40 are attached to the series of base materials 9. Even if installed, the same effect can be obtained.
For example, using the two belt conveyor devices 10, the second belt conveyor device 10 is installed so that the base material 9 is in a series on the downstream side of the first belt conveyor device 10, and the first belt on the upstream side is installed. The first housing 40 may be installed on the conveyor device 10, and the second housing 40 and the heating device 50 may be installed on the second belt conveyor device 10 on the downstream side.

Also, the first housing 40 and the first heating device 50 are installed on the first belt conveyor device 10, and the second housing 40 and the second heating device 50 are installed on the second belt conveyor device 10. Also good.
Thus, when using the 1st and 2nd belt conveyor apparatus 10, it is desirable to divide each into an individual application area (1st and 2nd application area), and to perform tension control separately in each.
In this case, a base material drawing device 90 is added between the first and second coating sections, and one of each section is provided with the slack detectors 60A, 60B, etc. Make control.

[Ninth Embodiment]
FIG. 14 shows a ninth embodiment of the present invention.
The thin film electrostatic coating apparatus 3 of this embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, one housing 40 and one belt conveyor apparatus 10 for performing electrostatic coating are installed. In contrast, in the thin film electrostatic coating apparatus 3 of the present embodiment, two sets of the belt conveyor device 10, the housing 40, and the heating device 50 are installed in series so as to be on the upstream side and the downstream side of the conveyance path. In addition, in terms of structure, each set has a two-stage configuration with a lower stage and an upper stage.

In the present embodiment, the base material 9 supplied from the base material supply device 20 is a first set (first slack detector 60A, first belt conveyor device 10, first housing 40, and first heating). It passes through the device 50) and is taken up by the first substrate drawing device 90A.
The base material 9 drawn out from the first base material drawing device 90A has a second set (second slackness detector 60B, second belt conveyor device 10, second housing 40, and second heating device 50). ) Through the second base material drawing device 90B.
The base material 9 drawn out from the second base material drawing device 90B passes through the third slackness detector 60C, passes through the press device 70, and is recovered by the base material recovery device 30.

In the present embodiment, the first application section Rc1 is from the substrate supply device 20 to the first substrate drawing device 90A, and the second is from the first substrate drawing device 90A to the second substrate drawing device 90B. The coating section Rc2 and the second base material drawing device 90B to the base material collecting device 30 are set as the press section Rp.
Based on the slackness of the base material 9 detected by the first slackness detector 60A, the control device 99 is configured to install each part (base material supply device 20, first belt conveyor device) in the first application section Rc1. 10. Control the drive speed of the first substrate retractor 90A).

Similarly, the control device 99 determines each part (the first base material drawing device 90A, the first base material retracting device 90A) based on the slackness of the base material 9 detected by the second slackness detector 60B. The driving speed of the second belt conveyor device 10 and the second base material drawing device 90B) is controlled.
Furthermore, the control device 99 determines each part (second base material drawing device 90B, press device 70, and the like) installed in the press section Rp based on the slackness of the base material 9 detected by the third slackness detector 60C. The drive speed of the substrate recovery device 30) is controlled.

In the present embodiment, the two housings 40 are the same as the housing 40 (see FIG. 2) in the first embodiment described above.
In addition, the belt conveyor device 10, the substrate supply device 20, the substrate recovery device 30, the heating device 50, the press device 70, the slack detectors 60 </ b> A and 60 </ b> B, and the substrate pull-in device, which are other configurations of the thin film electrostatic coating device 3. 90 is the same as that in the thin film electrostatic coating apparatus 1 of the first embodiment described above.
The slack detector 60C is added to use the two sets of belt conveyor devices 10, and the heights of the rollers 61 and 62 are changed by changing the arrangement of the rollers 61 and 62 in order to obtain the above-described two-stage configuration. It is configured to make a difference.

In the present embodiment, the first set of belt conveyor device 10, the housing 40, and the heating device 50 are supported by the lower frame 12.
Further, the first and second base material drawing devices 90A and 90B, the second slackness detector 60B, the second set of belt conveyor devices 10, the housing 40 and the heating device 50 are stretched over the frame 12. Further supported by the upper frame 16.
In this embodiment, the base material 9 sent out from the first set (the lower belt conveyor device 10, the housing 40, and the heating device 50) is folded back when sent to the upper stage, and the second set ( The upper belt conveyor device 10, the housing 40, and the heating device 50) are introduced with their front and back reversed.

In this embodiment, the same effect as that of the first embodiment described above can be obtained.
In particular, the two belt conveyor devices 10 and the housing 40 are installed in two upper and lower stages, and tension control can be performed individually as the first application section Rc1 and the second application section Rc2.
Furthermore, electrostatic coating can be sequentially performed on the front surface and the back surface of the base material 7 by the first housing 40 and the second housing 40 with respect to the series of base materials 9 conveyed by the belt conveyor device 10. .
For this reason, according to this embodiment, the base material 7 in which the coating film 8 is formed on both the front and back sides of the base material 9 can be formed.

Furthermore, since the first set and the second set have the belt conveyor device 10, the housing 40, and the heating device 50, respectively, heating by the heating device 50 can be performed immediately after electrostatic coating by the housing 40, respectively. Fixing of the coating film 8 can be performed reliably.
In addition, since the first set and the second set have a two-stage configuration of an upper stage and a lower stage, even if the belt conveyor device 10, the housing 40, and the heating device 50 are provided, the occupied floor area as equipment is suppressed. can do.

And in any of a 1st set and a 2nd set, the belt conveyor apparatus 10 is arrange | positioned horizontally, Therefore The holding | maintenance of the base material 9 by the conveyor belt 11 can be performed safely with dead weight.
In this embodiment, since the base material 9 that has passed through the first set is disposed so as to be reversed and introduced into the second set, electrostatic coating of the powder 6 can be sequentially performed on the front and back of the base material 9. The base material 7 in which the coating film 8 is formed on the front and back sides can be formed.

[Tenth embodiment]
FIG. 15 shows a tenth embodiment of the present invention.
The thin film electrostatic coating apparatus 4 of this embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 of the first embodiment described above, one housing 40 and one belt conveyor apparatus 10 for performing electrostatic coating are installed. On the other hand, in the thin film electrostatic coating apparatus 4 of this embodiment, two sets of the slack detectors 60A and 60B, the belt conveyor apparatus 10, the housing 40, the heating apparatus 50, and the base material drawing apparatuses 90A and 90B are provided, and the conveying path. Are set in series so as to be on the upstream side and the downstream side, and structurally, each set is arranged in the vertical direction, and each set is adjacent to and parallel to each other.

In the present embodiment, the saddle-shaped frame 17 is used to support the set of two sets of the slack detectors 60A and 60B, the belt conveyor device 10, the housing 40, the heating device 50, and the base material drawing devices 90A and 90B in the vertical direction. Is installed.
The first and second sets of the belt conveyor device 10, the housing 40, and the heating device 50 supported by the frame 17 are partially configured differently from the first embodiment as they are installed in the vertical direction. Yes. The first and second slack detectors 60A and 60B and the first and second base material drawing devices 90A and 90B are the same as those in the first embodiment or the ninth embodiment described above.

  In the present embodiment, a third slack detector 60C is installed on the upstream side of the press device 70. In the present embodiment, a first application section Rc1 including the first set, a second application section Rc2 including the second set, and a press section Rp including the press device 70 are set, and each is individually controlled by the control device 99. Tension control is performed. This is the same as in the ninth embodiment described above.

The belt conveyor device 10 of the first set is supported on the left side of the frame 17 in the figure, and the lower end is the upstream side. The first set of housings 40 is installed from the middle to the lower side of the belt conveyor device 10. The heating device 50 of the first set is installed near the upper end of the belt conveyor device 10 on the downstream side of the housing 40.
The second set of belt conveyor devices 10 is supported to the right in the drawing from the center of the frame 17 and has an upper end on the upstream side. The second set of housings 40 is installed from the top to the middle of the belt conveyor device 10, and the second set of heating devices 50 is installed near the lower end of the belt conveyor device 10 on the downstream side of the housing 40.

  In the first set of belt conveyor devices 10, the downstream roller 14 is rotationally driven by a drive motor 15 as in the first embodiment, but in the second set of belt conveyor devices 10, the upstream roller 13 is driven. The motor 15 is rotationally driven. However, there is no functional difference.

In the present embodiment, the two housings 40 in the first and second sets are respectively similar to the housing 40 in the first embodiment described above, the housing body 41, the powder supply device 42, the powder recovery device 43, and the fixing. Electrode 44 and powder neutralizing device 46.
However, since the housing 40 of the present embodiment is installed in the vertical direction and the sedimentation of the powder 6 is in the longitudinal direction of the housing 40, the stirring duct 45 (see FIG. 2) as stirring means is not installed. .
Further, in the first set of housings 40, the airflow including the powder 6 flowing in the interior is opposite to the base material 9 conveyed by the belt conveyor device 10 (similar to the first embodiment). In the housing 40 of the set, the powder 6 is supplied from the upper part and flows downward along the air current, and is in the same direction as the base material 9 conveyed by the belt conveyor device 10, and is opposite to the first embodiment. The orientation is set.

In the present embodiment, the base material 9 is passed through the first and second sets of the belt conveyor device 10, the housing 40, and the heating device 50 in the same manner as in the first embodiment described above, and the powder 6 Electrostatic coating is performed sequentially.
The base material supply device 20 is supported by a frame 17 in the vicinity of the lower end of the first set of belt conveyor devices 10.
The base material 9 drawn out from the coil 21 of the base material supply device 20 is supplied to the upstream side of the conveyor belt 11 of the first set of belt conveyor devices 10, and is held by the conveyor belt 11 so as to hold the first housing 40 and It passes through the first heating device 50 and reaches the upper end of the first belt conveyor device 10.

The base material 9 drawn out from the first belt conveyor device 10 is transported horizontally and sent to the upper end of the second belt conveyor device 10, and is held by the conveyor belt 11 so as to hold the second housing 40 and the second housing 9. It passes through the heating device 50 and reaches the lower end of the second belt conveyor device 10.
The base material 9 (electrostatically coated base material 7) drawn out from the second belt conveyor device 10 is again sent horizontally, drawn out of the frame 17 and passed through the slack detector 60 and the press device 70. It is recovered by the substrate recovery device 30.

  In this embodiment, the base material supply device 20, the base material recovery device 30, the heating device 50, the slackness detector 60, and the press device 70, which are other configurations of the thin film electrostatic coating device 4, are respectively described in the first embodiment. It is the same as that in each of the thin film electrostatic coating apparatus 1.

In this embodiment, electrostatic coating is applied to the front surface and the back surface of the base material 7 by the first housing 40 and the second housing 40 with respect to the series of base materials 9 conveyed by the belt conveyor device 10. Can be done sequentially.
For this reason, according to this embodiment, the base material 9 in which the coating film 8 is formed on both the front and back sides can be formed.

Furthermore, since the first set and the second set have the belt conveyor device 10, the housing 40, and the heating device 50, respectively, heating by the heating device 50 can be performed immediately after electrostatic coating by the housing 40, respectively. Fixing of the coating film 8 can be performed reliably.
In addition, since the first set and the second set are respectively installed in the vertical direction and are standing in parallel with each other, each having the belt conveyor device 10, the housing 40, and the heating device 50, respectively, Since the set may have an occupied floor area smaller than its length, the entire facility can be further miniaturized.

  In this embodiment, since the base material 9 that has passed through the first set is disposed so as to be reversed and introduced into the second set, electrostatic coating of the powder 6 can be sequentially performed on the front and back of the base material 9. The base material 7 in which the coating film 8 is formed on the front and back sides can be formed.

  In the present embodiment, since the first and second belt conveyor devices 10 are arranged in the vertical direction, gravity cannot be used to hold the base material 9 on the conveyor belt 11. For this reason, you may make it make the conveyor belt 11 air-permeable and install a negative-pressure suction device on the opposite side to the base material 9 of the conveyor belt 11. FIG.

[Eleventh embodiment]
16 to 19 show an eleventh embodiment of the present invention.
The thin film electrostatic coating apparatus 5 of the present embodiment includes the same configuration as the thin film electrostatic coating apparatus 1 of the first embodiment described above. For this reason, the same structure is shown with the same code | symbol, and the overlapping description is abbreviate | omitted.
In the thin film electrostatic coating apparatus 1 according to the first embodiment described above, the coating film 8 is formed on the entire surface of the base material 9 except for the marginal margin by the housing 40 installed in the middle of the belt conveyor apparatus 10. (See FIG. 4).
On the other hand, in the thin film electrostatic coating apparatus 5 of this embodiment, the base material 7 in which the coating film 8 is formed in a rectangular section as shown in FIG. 19 is formed. For this purpose, in the thin film electrostatic coating apparatus 5 of the present embodiment, a masking belt 81 having a mask pattern 811 as shown in FIG.

In the present embodiment, the thin film electrostatic coating device 5 includes the belt conveyor device 10, the base material supply device 20, the base material collection device 30, the housing 40, the heating device 50, the first and the first ones similar to those in the first embodiment described above. Two slack detectors 60A and 60B, a base material drawing device 90, and a press device 70 are provided.
Furthermore, the thin film electrostatic coating apparatus 5 of this embodiment includes a belt conveyor device 80 including the masking belt 81 described above on the upper surface side of the belt conveyor device 10.

In addition, each part of the base material supply apparatus 20, the base material collection | recovery apparatus 30, the heating apparatus 50, the 1st and 2nd slack detectors 60A and 60B, the base material drawing-in apparatus 90, and the press apparatus 70 is 1st implementation mentioned above, respectively. It is comprised similarly to the thin film electrostatic coating apparatus 1 of a form.
The belt conveyor device 10 is basically configured in the same manner as in the first embodiment, but the downstream half is inclined so that the upper part of the heating device 50 does not interfere with the belt conveyor device 80.
As shown in FIG. 17, the housing 40 is basically configured in the same manner as in the first embodiment (see FIGS. 2 and 3), but is masked between the housing body 41 and the base material 9. The belt 81 is configured to be introduced.

As shown in FIG. 16, the belt conveyor device 80 is provided above the belt conveyor device 10 and includes four rollers 82 to 85 on which the above-described masking belt 81 is stretched.
Among them, the rollers 82 and 83 are arranged such that the lower ends of the peripheral surfaces thereof are on the extension line of the horizontal surface of the conveyor belt 11 of the belt conveyor device 10, and the masking belt 81 is between the rollers 82 and 83 and the surface of the conveyor belt 11. It is arranged along so as to be in close contact with.
A driving motor (not shown) is connected to any of the rollers 82 to 85, and the masking belt 81 is driven so as to be fed at a constant speed with the conveyor belt 11 in close contact.

  In such a belt conveyor device 80, by operating in synchronization with the belt conveyor device 10, the conveyor belt 11 and the masking belt 81 are in close contact with each other on the upstream side (upstream roller 13 portion of the belt conveyor device 10). After passing through the housing 40 in the state, it is separated again on the downstream side (a bent portion in the middle of the belt conveyor device 10 and before the heating device 50).

Therefore, if the base material 9 is supplied to the upstream side of the conveyor belt 11, the base material 9 is held on the surface of the conveyor belt 11 and the surface thereof is covered with the masking belt 81 (see FIGS. 16 and 16). 17).
For this reason, exposure to the space in the housing body 41 is limited to the portion of the surface of the base material 9 exposed from the mask pattern 811 (see FIG. 18), and the powder 6 is electrostatically coated only on that portion. A rectangular coating film 8 having the same pattern is formed on the surface of the substrate 9, thereby forming the substrate 7 (see FIG. 19).

In this embodiment, electrostatic coating can be sequentially performed on the series of base materials 9 conveyed by the belt conveyor device 10 by the housing 40.
At this time, in the housing 40, the powder 6 fixed on the surface of the base material 9 is limited by the masking belt 81, and the base material 7 having the coating film 8 having a shape corresponding to the mask pattern 811 can be formed.

[Modification]
The present invention is not limited to the above-described embodiments, and modifications and the like within a scope where the object of the present invention can be achieved are included in the present invention.
In the above-described embodiment, an endless belt stretched between the upstream roller 13 and the downstream roller 14 is used as the conveyor belt 11 of the belt conveyor device 10, but a non-endless conveyor belt is pulled out from the upstream roll. It is good also as a structure wound up on a downstream roll.

  The conveying direction of the base material 9 in the belt conveyor device 10, that is, the direction of the surface of the conveyor belt 11 on which the base material 9 is held is the horizontal direction as in the first embodiment described above or the direction of the tenth embodiment described above. In addition to the vertical direction, other tilt directions may be used. In particular, except for the horizontal arrangement where gravity can be used, a holding auxiliary means for sucking negative pressure from the opposite side of the conveyor belt 11 is appropriately provided so that the substrate 9 is securely held on the surface of the conveyor belt 11. Also good.

In each of the embodiments described above, the powder supply device 42 is installed on the downstream side of the housing 40 to generate the flow of the powder 6 that moves in the opposite direction to the base material 9 on the surface of the conveyor belt 11. It is good also as what produces | generates the flow of the powder 6 which supplies the powder 6 from the upstream of 40, and moves to the same direction as the base material 9 of the conveyor belt 11 surface.
In each of the above-described embodiments, the heating device 50 and the press device 70 for fixing the powder 6 fixed to the base material 9 are installed on the downstream side of the housing 40, but these may be changed or omitted as appropriate. Good.

In each of the above-described embodiments, the pair of stirring ducts 45 on both sides are installed along the housing body 41. However, this may be one or four or more. As the stirring duct 45, a circular pipe may be used, and an injection nozzle 452 may be formed on the peripheral surface thereof.
Furthermore, the stirring duct 45 is not essential, and a large number of injection nozzles 452 may be directly formed on the side wall of the housing body 41, and pressurized gas may be supplied to each of the injection nozzles 452 for injection.
In each of the embodiments described above, the configuration in which the pressurized gas is injected as the agitation means is adopted, but an impeller rotating in the housing 40, an oscillating agitation plate, an oscillating agitation member, or the like may be used.

  The present invention relates to a thin film electrostatic coating apparatus, and can be used as an apparatus for electrostatically coating a powder serving as an electrode layer on a thin film serving as a base material such as an electrode for a lithium ion battery.

1, 2, 3, 4, 5 ... thin film electrostatic coating device 6, 6A ... powder 7, 9 ... base material 8 ... coating film 10 ... belt conveyor device 11 ... conveyor belt 12, 16, 17 ... frame 13 ... upstream Side roller 14: Downstream rollers 10A, 10B ... Roller conveyor device 11A ... Roller 11B ... Auxiliary table 10C ... Conveyor device 11C ... Table 20 ... Substrate supply device 21 ... Coil 22 ... Drive motor 30 ... Substrate recovery device 31 ... Coil 32 ... Drive motor 40 ... Housing 41 ... Housing body 42 ... Powder supply device 421 ... Tank 422 ... Supply duct 43 ... Powder recovery device 431 ... Tank 432 ... Recovery duct 44 ... Fixing electrode 441 ... Power supply device 45 ... For stirring Duct 451 ... Gas supply device 452 ... Injection nozzle 453 ... Jet 46 ... Powder neutralization device 461 ... Electrostatic removal electrode 462 ... Power supply device 4 3 ... Static elimination air generating device 464 ... Static elimination air supply duct 465 ... Static elimination electrode panel 50 ... Heating device 51 ... Heating device body 60A, 60B ... Detectors 61, 62, 63 ... Roller 64 ... Arm 65 ... Displacement detector 70 ... Press devices 71, 72 ... pressure roll 73 ... drive motor 80 ... belt conveyor device 81 ... masking belt 811 ... mask pattern 82, 83, 84, 85 ... rollers 90, 90A, 90B ... base material drawing devices 91, 92, 93 ... Roller 94 ... Expandable mechanism 95 ... Drive motor 99 ... Control device also serving as tension control device

Claims (14)

A conveyor device capable of holding a web-like substrate;
A substrate supply device for supplying the substrate to the upstream side of the conveyor device;
A base material recovery device for recovering the base material from the downstream side of the conveyor device;
A housing surrounding an intermediate portion of the conveyor device and extending along the conveyor device;
A powder supply device for supplying powder from one end of the housing to the other end;
A fixing electrode installed inside the housing and fixing the powder to the base material held by the conveyor device;
Have a, a tension control device for controlling the tension of the substrate,
A substrate drawing device is installed between the conveyor device and the substrate collecting device,
The tension control device adjusts the operation speed of the belt conveyor device, the base material supply device, the base material recovery device, and the base material drawing device to control the tension of the base material,
Thin film electrostatics , wherein tension is individually controlled in each of an application section from the base material supply device to the base material drawing device and a section from the base material drawing device to the base material recovery device. Painting equipment. In the thin film electrostatic coating apparatus according to claim 1,
The conveyor device is any one of a belt conveyor device, a roller conveyor device, a roller conveyor device in which an auxiliary table is interposed between rollers, and a sliding table. . In the thin film electrostatic coating apparatus according to claim 1 or 2,
The tension control device includes a slack detector that detects slackness of the base material, and a control device that controls a device that drives the base material based on the slackness of the base material detected by the slackness detector; A thin film electrostatic coating apparatus characterized by comprising: In the thin film electrostatic coating apparatus according to any one of claims 1 to 3,
The thin film electrostatic coating apparatus, wherein the press device is installed between the base material drawing device and said base material collecting device. In the thin film electrostatic coating apparatus according to any one of claims 1 to 4,
A thin film electrostatic coating apparatus comprising a heating device for heating the base material fed from the downstream side of the housing. In the thin film electrostatic coating apparatus according to any one of claims 1 to 5,
A thin film electrostatic coating apparatus, comprising: a powder neutralizing device that neutralizes the powder fixed to the substrate. In the thin film electrostatic coating apparatus according to claim 6,
The powder charge eliminating device is installed in a supply duct extending from the powder supply device to the housing and is used for discharging electricity of the powder passing through the supply duct. A thin-film electrostatic coating apparatus, comprising: a static-eliminating air generator to be merged therein; a neutralizing electrode panel disposed opposite to the surface of the base material on the downstream side of the housing; or a combination thereof. In the thin film electrostatic coating apparatus according to any one of claims 1 to 7,
A thin-film electrostatic coating apparatus, wherein a stirring means for stirring the gas inside the housing is installed inside the housing. In the thin film electrostatic coating apparatus according to claim 8,
The stirring means includes a stirring duct extending in a longitudinal direction of the housing, a gas supply device that supplies pressurized gas to the inside of the stirring duct, and a gas inside the stirring duct is injected into the housing. A thin film electrostatic coating apparatus comprising a plurality of spray nozzles. In the thin film electrostatic coating apparatus according to any one of claims 1 to 9,
A plurality of the housings are installed in the middle of the series of the base materials,
A thin film electrostatic coating apparatus, wherein the powder supply device and the fixing electrode are respectively installed in the plurality of housings. In the thin film electrostatic coating apparatus according to any one of claims 1 to 9,
A plurality of the conveyor devices are installed in the middle of the series of the base materials,
Each of the plurality of conveyor devices is provided with the housing, the powder supply device, and the fixing electrode,
The plurality of conveyor devices are respectively arranged horizontally, and any one of the conveyor devices is installed above the other conveyor device. In the thin film electrostatic coating apparatus according to any one of claims 1 to 9,
A plurality of the conveyor devices are installed in the middle of the series of the base materials,
Each of the plurality of conveyor devices is provided with the housing, the powder supply device, and the fixing electrode,
A plurality of the conveyor devices are respectively arranged in the vertical direction, and each of them is installed in parallel adjacent to each other. In the thin film electrostatic coating apparatus according to any one of claims 1 to 12,
At least two of the conveyor devices are installed in the middle of the series of the base materials,
A thin film electrostatic coating apparatus, wherein the base material that has passed through the upstream conveyor apparatus is disposed so as to be reversed and introduced into the downstream conveyor apparatus. In the thin film electrostatic coating apparatus according to any one of claims 1 to 13,
A masking device is installed in the housing,
The masking device has a masking belt for masking the surface of the substrate,
The masking belt is formed with a coating pattern that exposes the surface of the base material inside the housing,
The thin film electrostatic coating apparatus, wherein the masking belt is stretched along a surface of the base material conveyed by the conveyor device with the base material interposed therebetween, and is moved in synchronization with the base material.

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