JP2014196950A - Laser measurement apparatus - Google Patents

Laser measurement apparatus Download PDF

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JP2014196950A
JP2014196950A JP2013072710A JP2013072710A JP2014196950A JP 2014196950 A JP2014196950 A JP 2014196950A JP 2013072710 A JP2013072710 A JP 2013072710A JP 2013072710 A JP2013072710 A JP 2013072710A JP 2014196950 A JP2014196950 A JP 2014196950A
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laser
laser beam
window
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JP6076800B2 (en
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土橋 晋作
Shinsaku Dobashi
晋作 土橋
塚原 千幸人
Chisato Tsukahara
千幸人 塚原
杉山 友章
Tomoaki Sugiyama
友章 杉山
翼 宮▲崎▼
Tsubasa Miyazaki
翼 宮▲崎▼
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Mitsubishi Heavy Industries Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a laser measurement apparatus capable of introducing and deriving a laser beam without using purge means.SOLUTION: The laser measurement apparatus comprises: laser introduction means 14 introducing a laser beam 12 from a laser emitting unit 11 into a gas duct 13 which is a measurement field; and laser derivation means 16 deriving the introduced laser beam 12 from the gas duct 13 toward a laser receiving unit 15. The gas duct 13 has a negative pressure therein, and the laser introduction means 14 and the laser derivation means 16 each include: a laser beam passing window 21 having a passage hole 21a through which the laser beam 12 passes; a window frame 22 supporting the laser beam passing window 21; and a fitting flange 24 attaching the window frame 22 onto a wall surface of the measurement field 13 using a bolt 25 which is fitting means.

Description

本発明は、レーザ計測装置に関するものである。   The present invention relates to a laser measuring device.

従来、例えばボイラプラント内のガス配管内のガス濃度を計測する方法として、半導体レーザ吸収法による方法が確立され、JIS化されている(JISB7993:非特許文献1)。   Conventionally, for example, as a method for measuring the gas concentration in a gas pipe in a boiler plant, a method based on a semiconductor laser absorption method has been established and JISized (JISB 7993: Non-Patent Document 1).

この半導体レーザ吸収法によるレーザ装置では、ガス配管(主煙道)からガスの一部を分岐したガスを導入するサンプル配管に対し、レーザ装置からレーザ光を照射し、被測定ガス(例えばアンモニア)の成分・濃度等を分析している。
例えば第1の検出器では、参照光(I0)を求め、第2の検出器ではサンプル配管内の透過した光の強度(I)を求め、透過率T=(I/I0)を求めており、この分析手法により、様々なガス成分濃度のオンライン分析が可能となってきている。
In this laser device using the semiconductor laser absorption method, a laser beam is irradiated from a laser device to a sample pipe that introduces a gas branched from a gas pipe (main flue), and a gas to be measured (for example, ammonia) The components / concentration etc. are analyzed.
For example, in the first detector, the reference light (I 0 ) is obtained, and in the second detector, the intensity (I) of the transmitted light in the sample pipe is obtained, and the transmittance T = (I / I 0 ) is obtained. This analysis method enables online analysis of various gas component concentrations.

JISB7993JISB7993

ところで、レーザ手段は、レーザ発振部とレーザ受光部とを用いているので、レーザ光を計測場に導入する場合、例えば石英等のレーザ導入及び導出用の石英窓を用いている。   By the way, since the laser means uses a laser oscillation unit and a laser light receiving unit, when introducing laser light into a measurement field, a quartz window for introducing and deriving a laser such as quartz is used.

また、計測対象であるボイラプラントのガス環境が煤塵等が存在して劣悪であるので、石英窓の内側から、例えば窒素ガス等を吹き付けるパージ手段が設置されている。しかしながら、このパージ手段は、煤塵が多く堆積する箇所では、大型のコンプレッサ等の設備がさらに必要となり、また計測箇所が多くなる場合には、計測に伴う副次的なコストが嵩む、という問題がある。   Moreover, since the gas environment of the boiler plant to be measured is inferior due to the presence of dust or the like, purge means for blowing, for example, nitrogen gas from the inside of the quartz window is installed. However, this purging means has a problem that a large-scale compressor or the like is further required in a place where a lot of soot accumulates, and if the number of measurement places increases, a secondary cost associated with the measurement increases. is there.

本発明は、前記問題に鑑み、パージ手段を用いることなくレーザの導入及び導出ができるレーザ計測装置を提供することを課題とする。   In view of the above problems, an object of the present invention is to provide a laser measuring apparatus capable of introducing and deriving a laser without using a purge means.

上述した課題を解決するための本発明の第1の発明は、レーザ走光部からのレーザ光を測定場に導入するレーザ導入手段と、導入された前記レーザ光を前記測定場より、レーザ受光部側へ導出するレーザ導出手段とを具備してなり、前記測定場内が負圧であると共に、前記レーザ導入手段及び前記レーザ導出手段が、前記レーザ光を通過する通過孔を有するレーザ光通過窓と、前記レーザ光通過窓を支持する窓枠と、前記窓枠を前記測定場の壁面に取付手段を用いて取付ける取付フランジとを有することを特徴とするレーザ計測装置にある。   A first invention of the present invention for solving the above-described problem is a laser introducing means for introducing laser light from a laser beam running section into a measurement field, and a laser receiving section for introducing the introduced laser light from the measurement field. A laser beam passing window having a passage hole through which the laser beam is passed, and the laser field is a negative pressure. A laser measuring device comprising: a window frame that supports the laser beam passage window; and an attachment flange that attaches the window frame to a wall surface of the measurement field using attachment means.

第2の発明は、第1の発明において、前記レーザ導入手段及びレーザ導出手段を各々覆うと共に、一部にフィルタを有するカバーを有することを特徴とするレーザ計測装置にある。   According to a second aspect of the present invention, there is provided the laser measurement apparatus according to the first aspect, wherein the laser introduction unit and the laser extraction unit are each covered with a cover having a filter.

本発明によれば、レーザ光を通過する通過孔を有するレーザ光通過窓を設けることにより、負圧状態の測定場内に、通過孔を介して外部から外気が流入する。この結果、外気が通過孔を通過する流入流れを形成し、この流入流れにより、排ガスが石英窓の内面側へ流入することが妨げられ、この結果石英窓の内面汚れが発生することが解消される。   According to the present invention, by providing a laser beam passage window having a passage hole through which laser light passes, outside air flows into the negative pressure measurement field from the outside through the passage hole. As a result, external air forms an inflow flow that passes through the passage hole, and this inflow prevents the exhaust gas from flowing into the inner surface side of the quartz window, and as a result, the contamination of the inner surface of the quartz window is eliminated. The

図1は、実施例1に係るレーザ計測装置の概略図である。FIG. 1 is a schematic diagram of a laser measurement apparatus according to the first embodiment. 図2は、実施例2に係るレーザ計測装置の概略図である。FIG. 2 is a schematic diagram of a laser measurement apparatus according to the second embodiment.

以下に添付図面を参照して、本発明の好適な実施例を詳細に説明する。なお、この実施例により本発明が限定されるものではなく、また、実施例が複数ある場合には、各実施例を組み合わせて構成するものも含むものである。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by this Example, Moreover, when there exists multiple Example, what comprises combining each Example is also included.

図1は、実施例1に係るレーザ計測装置の概略図である。
図1に示すように、本実施例に係るレーザ計測装置10Aは、レーザ走光部11からのレーザ光12を測定場である煙道13に導入するレーザ導入手段14と、導入されたレーザ光12を煙道13より、レーザ受光部15側へ導出するレーザ導出手段16とを具備してなり、煙道13内が負圧であると共に、レーザ導入手段14及びレーザ導出手段16が、レーザ光12を通過する通過孔21aを有するレーザ光通過窓21と、前記レーザ光通過窓21を支持する窓枠22と、窓枠22を測定場である煙道13の壁面に取付手段であるボルト25を用いて取付ける取付フランジ24とを有するものである。
FIG. 1 is a schematic diagram of a laser measurement apparatus according to the first embodiment.
As shown in FIG. 1, a laser measuring apparatus 10A according to the present embodiment includes a laser introducing means 14 for introducing a laser beam 12 from a laser traveling light section 11 into a flue 13 as a measurement field, and an introduced laser beam 12 And a laser deriving means 16 for deriving the light from the flue 13 to the laser light receiving unit 15 side. The inside of the flue 13 has a negative pressure, and the laser introducing means 14 and the laser deriving means 16 are provided with the laser beam 12. A laser beam passage window 21 having a passage hole 21a that passes through the window, a window frame 22 that supports the laser beam passage window 21, and a bolt 25 that is a means for attaching the window frame 22 to the wall surface of the flue 13 as a measurement site. And a mounting flange 24 to be mounted.

窓枠22内にレーザ光12を通過する通過孔21aを有するレーザ光通過窓21を設けることにより、通過孔21aを介して煙道内部が負圧状態であるので、外気26は外部から煙道13内に流入する。この結果、外気26が通過孔21aを通過する流入流れを形成する。この流入流れにより、排ガス19がレーザ光通過窓21の内面側への流入が妨げられ、この結果レーザ光通過窓21の内面汚れが発生することが解消される。   By providing the laser beam passage window 21 having the passage hole 21a for passing the laser beam 12 in the window frame 22, the inside of the flue is in a negative pressure state through the passage hole 21a. 13 flows in. As a result, the outside air 26 forms an inflow flow that passes through the passage hole 21a. Due to this inflow, the exhaust gas 19 is prevented from flowing into the inner surface side of the laser beam passage window 21, and as a result, the occurrence of contamination on the inner surface of the laser beam passage window 21 is eliminated.

レーザ光通過窓21は、従来のようにレーザ光12を通過する部分を通過孔21aとしているので、その材質は石英ガラスに限定されず、ステンレス等であってもよい。   Since the laser beam passage window 21 has a passage hole 21a at a portion through which the laser beam 12 passes as in the prior art, the material thereof is not limited to quartz glass but may be stainless steel or the like.

ここで、レーザ光通過窓21に形成される通過孔21aの孔径は、20mm〜50mm程度の径とすることが望ましい。   Here, it is desirable that the diameter of the passage hole 21a formed in the laser beam passage window 21 is about 20 mm to 50 mm.

ここで、煙道13内の内圧が負圧(例えば200mmAq)の場合における、外気が隙間23を通過する流速は、5〜30m/s程度(好適には10〜15m/s)となる。また、計測場である煙道13内の負圧の範囲として、50〜500mmAq程度とするのが好ましい。   Here, when the internal pressure in the flue 13 is a negative pressure (for example, 200 mmAq), the flow rate of the outside air passing through the gap 23 is about 5 to 30 m / s (preferably 10 to 15 m / s). Moreover, it is preferable to set it as about 50-500 mmAq as a range of the negative pressure in the flue 13 which is a measurement field.

この結果、本発明によれば、これによりレーザ光通過窓21の窓汚れが防止される。従来は、窓汚れ防止のために、大量の窒素パージを行うために大型のコンプレッサ等を有するガスパージ手段の設置が必要であったが、この設置を省略することができ、計測コストの低減を図ることができる。   As a result, according to the present invention, this prevents window contamination of the laser beam passage window 21. Conventionally, it has been necessary to install a gas purging means having a large compressor or the like in order to perform a large amount of nitrogen purging in order to prevent window contamination, but this installation can be omitted and the measurement cost can be reduced. be able to.

また、長期間に亙る計測では、パージ手段による窒素パージを行っても、微細な粉塵の付着により窓の透過率の低下があったが、本発明によれば、この透過率の低下も防止することができる。   In addition, in the measurement over a long period of time, even if nitrogen purging by the purging means is performed, the transmittance of the window is reduced due to the adhesion of fine dust. be able to.

ここで、外気26の流入量の調整は、通過孔21aの間隔を調整することで適宜変更することができる。この調整は、光学部品のアイリスのように、金属の羽根で出来た絞り機構を開閉して調節するようにすればよい。   Here, the adjustment of the inflow amount of the outside air 26 can be appropriately changed by adjusting the interval between the passage holes 21a. This adjustment may be performed by opening and closing a diaphragm mechanism made of metal blades such as an iris of an optical component.

例えば通過孔21aの間隔を大きくすると、外気26の流入量が大となる。これに対し、通過孔21aの間隔を小さくすると、外気26の流入量が小となる。
特に、レーザ光通過窓21の内側の窓枠のコーナ部22aに、煤塵が堆積した場合には、通過孔21aの間隔を大きくして、外気26の流入量を大として、堆積した煤塵を除去するようにしてもよい。
For example, when the interval between the passage holes 21a is increased, the inflow amount of the outside air 26 is increased. On the other hand, when the interval between the passage holes 21a is reduced, the inflow amount of the outside air 26 is reduced.
In particular, when dust accumulates on the corner 22a of the window frame inside the laser beam passage window 21, the interval between the passage holes 21a is increased to increase the inflow amount of the outside air 26 to remove the accumulated dust. You may make it do.

本発明のレーザ計測装置10Aの設置は、例えば脱硝装置の煙道の後流側において、リークアンモニアを計測する際のレーザ計測に適用することができるが、脱硝装置のみならず、負圧環境下のガス成分のレーザ計測一般に適用することができる。   The installation of the laser measuring device 10A of the present invention can be applied to laser measurement when measuring leaked ammonia, for example, on the downstream side of the flue of the denitration device. It can be applied to general laser measurement of gas components.

ここで、レーザ計測において、例えばアンモニア(NH3)濃度を計測するには、半導体レーザ(半導体素子:InGaAsを例示することができる。波長:1.5μm、出力:1mW程度のものを例示することができる。)を用いることができる。
また、窒素酸化物(NOx)を計測する場合には、量子カスケードレーザ(半導体素子:InGaAs/InAlAsを例示することができる。波長:5〜6μm、出力:1mW程度のものを例示することができる。)を用いることができる。
Here, in laser measurement, for example, in order to measure ammonia (NH 3 ) concentration, a semiconductor laser (semiconductor element: InGaAs can be exemplified. Wavelength: 1.5 μm, output: about 1 mW is exemplified. Can be used).
Further, when measuring nitrogen oxide (NOx), a quantum cascade laser (semiconductor element: InGaAs / InAlAs can be exemplified. Wavelength: 5 to 6 μm, output: about 1 mW can be exemplified. .) Can be used.

また、アンモニア以外のガス成分として、SO2(酸化硫黄)を計測する場合には、量子カスケードレーザ(波長:7.0〜7.5μmを例示することができる。)を用いることができる。さらに、ガス成分として、メタン(CH4)を計測する場合には、半導体レーザ(半導体素子:InGaAsを例示することができる。波長:1.6μm、出力:1mW程度のものを例示することができる。)を用いることができる。 Moreover, as a gas component other than ammonia, when measuring the SO 2 (sulfur dioxide) is a quantum cascade laser: can be used (wavelength 7.0~7.5μm can be exemplified.). Further, when methane (CH 4 ) is measured as a gas component, a semiconductor laser (semiconductor element: InGaAs can be exemplified. Wavelength: 1.6 μm, output: about 1 mW can be exemplified. .) Can be used.

また、赤外分光領域で計測しているが、本発明はこれに限定されず、可視・紫外領域での分光計測にも適用できる。   Further, although the measurement is performed in the infrared spectral region, the present invention is not limited to this, and can be applied to the spectral measurement in the visible / ultraviolet region.

図2は、実施例2に係るレーザ計測装置の概略図である。なお、実施例1のレーザ計測装置の構成と同一部材については、同一符号を付してその説明は省略する。
図2に示すように、本実施例に係るレーザ計測装置10Bは、図1に示す実施例1のレーザ計測装置10Aにおいて、さらにレーザ導入手段14と、レーザ導出手段16とを、各々覆うと共に、一部にフィルタ31を有するカバー32を設置するようにしている。なお、図中、符号33はカバー32を固定する固定ボルトを図示する。
FIG. 2 is a schematic diagram of a laser measurement apparatus according to the second embodiment. The same members as those of the laser measuring apparatus according to the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
As shown in FIG. 2, the laser measurement apparatus 10B according to the present embodiment further covers the laser introduction means 14 and the laser lead-out means 16 in the laser measurement apparatus 10A according to the first embodiment shown in FIG. A cover 32 having a filter 31 is partially installed. In the figure, reference numeral 33 denotes a fixing bolt for fixing the cover 32.

このカバー32を設置し、カバー32の一部に設けたフィルタ31を介して外気26を導入するので、外気26の汚れを除去し、清浄な外気26を煙道13内に導入することができる。   Since the cover 32 is installed and the outside air 26 is introduced through the filter 31 provided in a part of the cover 32, the dirt of the outside air 26 can be removed and the clean outside air 26 can be introduced into the flue 13. .

また、複数のレーザ導入手段14を一つのカバー32で覆うようにしてもよい。   Further, a plurality of laser introducing means 14 may be covered with one cover 32.

10A、10B レーザ計測装置
11 レーザ走光部
12 レーザ光
13 煙道
14 レーザ導入手段
15 レーザ受光部
16 レーザ導出手段
21 レーザ光通過窓
21a 通過孔
22 窓枠
24 取付フランジ


DESCRIPTION OF SYMBOLS 10A, 10B Laser measuring apparatus 11 Laser running part 12 Laser light 13 Flue 14 Laser introduction means 15 Laser light receiving part 16 Laser extraction means 21 Laser light passage window 21a Passing hole 22 Window frame 24 Mounting flange


Claims (2)

レーザ走光部からのレーザ光を測定場に導入するレーザ導入手段と、
導入された前記レーザ光を前記測定場より、レーザ受光部側へ導出するレーザ導出手段とを具備してなり、
前記測定場内が負圧であると共に、
前記レーザ導入手段及び前記レーザ導出手段が、
前記レーザ光を通過する通過孔を有するレーザ光通過窓と、
前記レーザ光通過窓を支持する窓枠と、
前記窓枠を前記測定場の壁面に取付手段を用いて取付ける取付フランジとを有することを特徴とするレーザ計測装置。
A laser introduction means for introducing laser light from the laser traveling light section into the measurement field;
A laser deriving unit for deriving the introduced laser beam from the measurement field to the laser light receiving unit side;
The inside of the measurement field is negative pressure,
The laser introducing means and the laser derivation means are
A laser beam passage window having a passage hole through which the laser beam passes;
A window frame that supports the laser beam passage window;
A laser measuring apparatus comprising: an attachment flange for attaching the window frame to a wall surface of the measurement field using an attachment means.
請求項1において、
前記レーザ導入手段及びレーザ導出手段を各々覆うと共に、一部にフィルタを有するカバーを有することを特徴とするレーザ計測装置。
In claim 1,
A laser measuring apparatus characterized by comprising a cover having a filter in part while covering each of said laser introducing means and laser emitting means.
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