JP2014192080A - Irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an irradiation device capable of easily and surely suppressing the illuminance at a local high illuminance location that occurs in an irradiation region.SOLUTION: An irradiation device 1 irradiates a workpiece 2 immediately below an ultraviolet lamp 10 as a linear light source with uniform illuminance using a direct light K0 of the ultraviolet lamp 10 and a light K3 reflected from a square cylindrical auxiliary reflector 14 surrounding the circumference of the ultraviolet lamp 10. An illuminance restriction opening 30 is disposed on the auxiliary reflector 14 so as to reduce the illuminance at a high illuminance location that locally occurs on the workpiece 2.

Description

  The present invention relates to a technique for uniformly irradiating an irradiation region using a linear light source.

  There is an ultraviolet irradiation device in which a rectangular cylindrical chamber inner wall surface is used as a reflection surface, and a linear light source lamp is housed in the chamber. In this ultraviolet irradiation device, the inner wall surface of the chamber is inclined to expand from the base portion to the tip, and by appropriately adjusting the inclination angle, the irradiation area with uniform illuminance is expanded (for example, , See Patent Document 1).

JP 2010-218775 A

  However, there is a limit to the uniformity of the irradiated area only by adjusting the tilt angle of the reflecting surface. In particular, when a long arc straight tube type lamp is used as a light source, there is a problem in that unevenness in luminance of the light source cannot be sufficiently canceled out and a local high illuminance spot is generated in the irradiated region.

  This invention is made | formed in view of the situation mentioned above, and it aims at providing the irradiator which can suppress the illumination intensity of the local high illumination intensity location which arises in an irradiation area | region easily and reliably.

  In order to achieve the above object, the present invention provides an irradiation area immediately below a linear light source by direct light from the linear light source and reflected light from a rectangular cylindrical reflecting surface surrounding the linear light source. In an irradiator that irradiates at a uniform illuminance, an opening, a light absorbing portion, a low-reflectivity portion, or a diffusion portion is provided on the reflection surface, and the illuminance at a high illuminance location that occurs locally in the irradiation region is reduced. Features.

  Further, the present invention is characterized in that the irradiator includes light guide means for guiding light emitted outside through an opening provided in the reflector to the irradiation region.

  In the irradiator according to the present invention, the light guiding unit includes an outer reflecting plate disposed at a position covering the opening of the reflecting plate, and the gap between the outer reflecting plate and the outer surface of the reflecting plate. The light passing through the opening is guided by the reflection of the light.

  According to the present invention, in the irradiator, the light guide means includes a support member that supports the outer reflection plate at a position spaced from the outer surface, and the support member extends to the outer surface of the reflection plate. It is characterized by that.

According to the present invention, the irradiation field immediately below the linear light source is irradiated with a uniform illuminance by the direct light of the linear light source and the reflected light of the rectangular cylindrical reflector surrounding the linear light source. In the irradiator, an opening portion, a light absorption portion, a low reflectivity portion, or a diffusion portion is provided in the reflection plate to reduce the illuminance at a high illuminance portion locally generated in the irradiation region.
According to this configuration, an illuminance at a high illuminance location locally generated in the irradiation area, which cannot be dealt with only by adjusting the reflection plate, is provided with an opening, a light absorption portion, a low reflection portion, or a diffusion portion in the reflection plate. Therefore, it can be easily and reliably suppressed.

It is an external appearance perspective view of the irradiator which concerns on embodiment of this invention. It is a figure which shows the structure of an irradiator, (A) is a top view, (B) is a front view, (C) is a side view. It is the figure which saw through the inside of the irradiator 1 in FIG. It is the illumination intensity distribution figure of a workpiece | work, (A) shows the illumination intensity distribution by irradiation of an irradiator. (B) shows the illuminance distribution by irradiation with only the ultraviolet lamp. (C) shows the illuminance distribution by irradiation of only the ultraviolet lamp and the main reflector. It is an illuminance distribution figure of a work when the opening part for illuminance restriction is not provided in an auxiliary reflector. It is an external appearance perspective view of the irradiator which concerns on 2nd Embodiment of this invention. It is sectional drawing of an irradiator.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiment, the irradiator used suitably for the weathering test of an outdoor building material is illustrated.

[First Embodiment]
FIG. 1 is an external perspective view of an irradiator 1 according to the present embodiment. 2 is a diagram showing the configuration of the irradiator 1, FIG. 2A is a plan view, FIG. 2B is a front view, and FIG. 2C is a side view. 3 is a perspective view of the inside of the irradiator 1 in FIG.
The irradiator 1 is an instrument that incorporates an ultraviolet lamp 10 and irradiates the entire area of the work 2 as an irradiation area with uniform illuminance (that is, good uniformity), and a main reflector 12 that controls the emitted light of the ultraviolet lamp 10. And a square cylindrical auxiliary reflector 14. Further, a glass plate 18 made of an ultraviolet resistant material is provided on the side of the distal end 14B of the square cylindrical auxiliary reflector 14.

  The irradiator 1 irradiates the workpiece 2 with a single linear light source. In the irradiator 1, the straight tube type high-output ultraviolet lamp 10 is used as an ultraviolet light source.

2 (B) and 2 (C), the workpiece 2 is set at a position where a gap δ is opened immediately below the glass plate 18, and as shown in FIG. This is an area having approximately the same size as the opening on the tip 14B side (hereinafter referred to as “irradiation opening” and denoted by reference numeral 16). In the irradiator 1, the workpiece 2 is set at a position relatively close to the irradiation opening 16.
As shown in FIG. 3, the ultraviolet lamp 10 extends right above the long axis C at the center of the work 2 in plan view. In addition, the long side La of the workpiece 2 is set to a length substantially equal to or less than the tube length M of the ultraviolet lamp 10, and a lamp arc lamp having a long tube length M is used for the ultraviolet lamp 10. The work 2 has a large area.

FIG. 4 is an illuminance distribution diagram of the work 2, and FIG. 4A shows an illuminance distribution by irradiation of the irradiator 1. FIG. 4B shows the illuminance distribution by irradiation of only the ultraviolet lamp 10, and FIG. 4C shows the illuminance distribution by irradiation of only the ultraviolet lamp 10 and the main reflector 12.
As described above, the irradiator 1 includes the main reflecting plate 12 and the auxiliary reflecting plate 14, and reflects the direct light K0 (FIG. 2B) of the ultraviolet lamp 10 and the main reflecting plate 12 and the auxiliary reflecting plate 14. The work 2 is irradiated with uniform illuminance with the light K1, K2, and K3 (FIG. 2B).
Here, when the workpiece 2 is irradiated only by the direct light K0 of the ultraviolet lamp 10, the illuminance distribution in the vicinity including the major axis C of the workpiece 2 has a tube axis N of the ultraviolet lamp 10 as shown in FIG. The luminance distribution in the direction is reflected almost directly.
Therefore, the light emitted from the ultraviolet lamp 10 and deviating from the work 2 is reflected by the main reflection plate 12 and the auxiliary reflection plate 14 and illuminated so as to compensate for the illuminance distribution of the direct light in the work 2, so that the uniformity of the work 2 is increased. Has been enhanced.

As shown in FIG. 4C, the main reflecting plate 12 spreads the light of the ultraviolet lamp 10 in the direction of the short side Lb of the work 2 and makes the illuminance uniform in this direction.
As shown in FIGS. 1 to 3, the main reflector 12 is formed in a bowl shape extending along the tube axis N of the ultraviolet lamp 10, and around the ultraviolet lamp 10 (more precisely, in the horizontal direction). The emitted light is reflected on the workpiece 2. Specifically, the main reflection plate 12 includes an upper surface reflection plate 12 </ b> A that extends above the ultraviolet lamp 10 and side surface reflection plates 12 </ b> B that extend on both sides of the ultraviolet lamp 10, and faces the respective ultraviolet lamps 10. The surface to be formed is formed on the reflective surface. The top reflector 12A reflects light K1 (FIG. 2 (B)) directed upward from the ultraviolet lamp 10 toward the workpiece 2 directly below and spreads in the direction of the short side Lb, thereby reflecting the direction of the short side Lb. Is irradiated relatively uniformly. The side reflector 12B reflects the light K2 (FIG. 2B) traveling in the horizontal direction from the ultraviolet lamp 10 toward the workpiece 2 below. As shown in FIG. 4 (C), the workpiece 2 is reflected by the reflection of the main reflecting plate 12 on both sides of the region Xa extending directly below the ultraviolet lamp 10 and extends together with the region Xa. A region Xb having illuminance appears. Thereby, the illuminance immediately below the ultraviolet lamp 10 is distributed and illuminated in the direction of the short side Lb of the workpiece 2.

  Since the main reflector 12 has a relatively long overall length in accordance with the ultraviolet lamp 10, a rod-shaped guide member 13A for maintaining the shape is provided at the approximate center of the overall length. Similarly, planar guide members 13B are provided at both ends of the main reflector 12, and the end portions of the ultraviolet lamps 10 are held by U-shaped notches 17 provided in the planar guide member 13B. Has been. In FIG. 3, the rod-shaped guide member 13A and the planar guide member 13B are not shown.

The auxiliary reflecting plate 14 is provided between the main reflecting plate 12 and the work 2, and reflects the light K 3 (FIG. 2B) leaking out of the work 2 toward the work 2. The illumination distribution by the irradiation of the main reflector 12 is compensated.
More specifically, in the irradiator 1, as shown in FIG. 4C, when the irradiation is performed only with the ultraviolet lamp 10 and the main reflector 12, the illuminance is insufficient in the region Xc and the region Xd. The region Xc is a region corresponding to both ends of the ultraviolet lamp 10, and the region Xd is a region Xd sandwiched between the region Xa immediately below the ultraviolet lamp 10 and the region Xb on both sides. In the irradiator 1, the auxiliary reflector 14 is configured to compensate for the insufficient illuminance in the regions Xc and Xd with reflected light.

  Specifically, the auxiliary reflector 14 has a pair of end plates 20 facing both ends of the ultraviolet lamp 10 and a pair of side plates 21 facing both sides of the ultraviolet lamp 10, and these are the four sides of the ultraviolet lamp 10. The inner wall surface is configured as a reflective surface. The main reflector 12 is provided on the base end portion 14 </ b> A side of the auxiliary reflector 14, and the tip 14 </ b> B side opens in a rectangular shape in plan view, and this opening is configured as the irradiation opening 16. In the auxiliary reflecting plate 14, a light-shielding upper plate 15 that closes the gap between the main reflecting plate 12 and the base end portion 14A is provided, and the ultraviolet transmissive glass plate is provided in the irradiation opening 16. 18 is provided.

Under such a configuration, the pair of end plates 20 reflects light toward the region Xc, and the pair of side plates 21 reflects light toward the region Xd, and these reflected lights cause the regions Xc and Xd to be reflected in the region Xc. Illuminance is compensated.
Further, the auxiliary reflecting plate 14 is inclined so that the end plate 20 and the side plate 21 are expanded so as to expand from the base end portion 14A side to the tip end 14B side, so that the main reflecting plate 12 faces the base end portion 14A side. Irradiate a wider area than the opening.
Further, the inclination angles of the end plate 20 and the side plate 21 are adjusted so as to irradiate the reflected light to the regions Xc and Xd that should compensate for the illuminance, thereby improving the uniformity.

  Here, the auxiliary reflecting plate 14 is assembled by inserting the end 21 </ b> A of the side plate 21 into the insertion slit 20 </ b> A provided in the end plate 20. According to such an assembly structure by insertion, since the inclination angle of the side plate 21 is determined by the extending direction of the insertion slit 20A, an error is hardly generated in the inclination angle of the side plate 21 during assembly.

  However, the illuminance of the work 2 cannot be made sufficiently uniform only by adjusting the angles of the end plate 20 and the side plate 21, and a high illuminance portion where the illuminance is locally increased occurs. That is, as shown in FIG. 5, at the corners Ya that are the four corners of the workpiece 2, the reflected light from both the end plate 20 and the side plate 21 is irradiated, so that the illuminance increases. Further, in the central portion Yb of the work 2, a high illuminance spot appears due to the luminance distribution of the ultraviolet lamp 10. Further, since the main reflector 12 distributes the light of the ultraviolet lamp 10 to both sides of the work 2, a high illuminance spot appears also at the edge center Yc on both sides of the work 2 due to the luminance distribution of the ultraviolet lamp 10. .

  On the other hand, a reflection surface for distributing the light toward the high illuminance places at the corners Ya, the center part Yb, and the edge center Yc to another part is added in the reflection surfaces of the end plate 20 and the side plate 21. Thus, the uniformity of the work 2 can be increased. However, since the reflecting surface is separately configured, the number of parts is increased and the cost is increased. Further, if the assembly accuracy is low, the uniformity is deteriorated, so that high assembly accuracy is required.

Therefore, in this irradiator 1, the illuminance limiting opening 30 is provided on the side plate 21 of the auxiliary reflection plate 14 at the corner Ya, the center Yb, and the edge center Yc where reflected light directed to the high illuminance location is generated. Yes.
Specifically, in the irradiator 1, the side plate 21 includes a plurality of illuminance limiting openings 30 at the substantially central portion in the height direction of the side plate 21 and the edge portion on the side of the tip 14 </ b> B. It is provided side by side in the N direction. The former illuminance restriction opening 30 suppresses the illuminance at the center Yb, and the latter illuminance restriction opening 30 suppresses the illuminance at the corner Ya and the edge center Yc. Since the light passes through these illuminance limiting openings 30 and no reflected light is generated, the illuminance of the high illuminance portion locally generated on the work 2 is reduced. As shown in FIG. The entire area is irradiated with uniform illuminance.

Furthermore, by providing a plurality of illuminance restriction openings 30, these function as vents for releasing the hot air trapped in the irradiator 1 and contribute to stabilizing the lighting of the ultraviolet lamp 10.
In particular, in the irradiator 1, an illuminance limiting opening 30 is formed in the edge on the side of the tip 14 </ b> B of the side plate 21 of the auxiliary reflecting plate 14, that is, the opening end of the irradiation opening 16 and the surface located above it. Yes. Accordingly, a discharge path is formed in which cool air is introduced into the irradiator 1 from the illuminance restriction opening 30 of the irradiation opening 16, the inside is cooled and discharged from the upper illuminance restriction opening 30, and the auxiliary reflector 14. And the inside surrounded by the glass plate 18 is efficiently cooled.

  As described above, according to the present embodiment, the illuminance limiting opening 30 is provided in the auxiliary reflector 14 to reduce the illuminance at the corners Ya, the center Yb, and the edge center Yc of the high illuminance portions locally generated on the work 2. It was. With this configuration, it is possible to easily and reliably suppress the illuminance at a high illuminance location locally generated in the irradiation area, which cannot be dealt with only by adjusting the auxiliary reflector 14, by simply providing the illuminance limiting opening 30 in the auxiliary reflector 14. be able to.

  In the present embodiment, the illuminance limiting opening 30 is provided by processing the auxiliary reflector 14 for the purpose of suppressing the reflected light to the high illuminance location. However, instead of the illuminance limiting opening 30, the reflection light is suppressed, for example, a diffusion portion including a diffusion material such as a diffusion plate or a diffusion sheet, a low reflection portion including a low reflection material having a low reflectance with respect to ultraviolet rays, or ultraviolet light An ultraviolet absorbing part having an ultraviolet absorbing material that absorbs light may be provided at the position of the illuminance limiting opening 30.

[Second Embodiment]
In this embodiment, an irradiator 100 is described in which high efficiency is achieved by using light emitted outside through the illuminance limiting opening 30 for irradiation of the workpiece 2.
FIG. 6 is an external perspective view of the irradiator 100 according to the present embodiment, and FIG. 7 is a cross-sectional view.
As shown in these drawings, the irradiator 100 includes the light guide unit 50 that guides the light that passes through the illuminance limiting opening 30 to the outside to the work 2, and the irradiator 1 of the first embodiment. The configuration is greatly different.
The light guide unit 50 of the irradiator 100 includes a plate-shaped light guide reflection plate 51 disposed facing the outer surface 21G of the side plate 21, and a predetermined gap between the light guide reflection plate 51 and the outer surface 21G. And a side wall 52 as support means for supporting with a gap.

In the light guide 50, a light guide reflector 51 is provided to cover the illuminance limiting opening 30, and as shown in FIG. 6, the light K4 that has passed through the illuminance restriction opening 30 is reflected by the light guide reflector. 51 and the outer surface 21G of the side plate 21 are repeatedly reflected and guided to the tip 14B side of the side plate 21. In the irradiator 100, the light K <b> 4 guided by the light guide unit 50 is introduced into the irradiator 1 from the illuminance limiting opening 30 on the side of the tip 14 </ b> B of the side plate 21 to irradiate the work 2.
As a result, the light K4 that has passed through the illuminance limiting opening 30 to the outside is used for the irradiation of the workpiece 2, so that high efficiency can be achieved. At this time, the light K4 is sufficiently expanded by a plurality of reflections between the light guide reflection plate 51 and the outer surface 21G of the side plate 21, so that a local high illuminance spot is generated in the work 2 by the light K4. There is nothing.

Further, in this light guide section 50, the side wall 52 that supports the light guide reflection plate 51 functions as a rib that extends in the vertical direction on the side plate 21 of the auxiliary reflection plate 14 and increases the rigidity of the side plate 21. To do. Thereby, the distortion by the dead weight etc. of the side plate 21 is also suppressed, and the fall of the uniformity by the said distortion can be prevented.
In particular, by providing the illuminance limiting opening 30 on the side plate 21 having the largest area among the surfaces of the auxiliary reflecting plate 14 having a square cylindrical shape, a decrease in rigidity can be suppressed as compared with the case where the end plate 20 is provided. The distortion of the reflecting surface is also suppressed by the side wall 52 of the light guide 50.

In this irradiator 100, the light K4 guided by the light guide 50 is made incident into the auxiliary reflector 14 from the illuminance limiting opening 30 of the side plate 21, but the incident opening is separately provided in the side plate 21. May be provided.
In addition, any light guide means can be used for the light guide section 50 as long as the light K4 emitted from the illuminance limiting opening 30 can be guided. For example, an optical fiber or the like can be used. .

The above-described embodiments are merely illustrative of one embodiment of the present invention, and can be arbitrarily modified and applied without departing from the spirit of the present invention.
For example, as the linear light source of the irradiators 1 and 100, two or more straight tube type ultraviolet lamps 10 in which the tube axes N are coaxially arranged in series can be used. Instead of the ultraviolet lamp 10, a linear light source in which light emitting elements such as ultraviolet LEDs are linearly arranged can be used.

  Moreover, the irradiators 1 and 100 of this invention can be used suitably for the use as which the uniform irradiation of an ultraviolet-ray is requested | required besides the weathering test of an outdoor building material. Examples of this application include photo-alignment processing of liquid crystal panels and exposure processing in semiconductor manufacturing processes.

1, 100 Irradiator 2 Workpiece (irradiation area)
10 UV lamp (linear light source)
DESCRIPTION OF SYMBOLS 12 Main reflector 14 Auxiliary reflector 14A Base end part 14B Front end 16 Irradiation opening 18 Glass plate 20 End plate 20A Insertion slit 21 Side plate 21A End part 21G Outer surface 30 Illuminance restriction opening part (opening part)
50 Light guide part (light guide means)
51 Reflecting plate for light guide 52 Side wall (supporting means)
Ya Work corner (high illuminance location)
Yb Center of work (high illuminance location)
Yc Center of work edge (high illuminance location)
K0 Direct light K1, K2 Reflected light by main reflector K3 Reflected by auxiliary reflector K4 Light guided by light guide

Claims (4)

In the irradiator that irradiates the irradiation region immediately below the linear light source with a uniform illuminance with the direct light of the linear light source and the reflected light of the rectangular cylindrical reflection surface surrounding the linear light source,
An irradiator characterized in that an opening, a light absorption part, a low reflectivity part, or a diffusion part is provided on the reflection surface, and the illuminance at a high illuminance place locally generated in the irradiation region is lowered.   The irradiator according to claim 1, further comprising a light guide unit that guides light emitted outside through an opening provided in the reflection surface to the irradiation region. The light guiding means includes
An outer reflective surface disposed at a position covering the opening of the reflective surface;
The irradiator according to claim 2, wherein light that has passed through the opening is guided by reflection between the outer reflective surface and the outer surface of the reflective surface. The light guiding means includes
The irradiator according to claim 3, further comprising a support member that supports the outer reflective surface at a position spaced from the outer surface, wherein the support member extends to the outer surface of the reflective surface.