JP2014190807A5 - - Google Patents

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Publication number
JP2014190807A5
JP2014190807A5 JP2013066063A JP2013066063A JP2014190807A5 JP 2014190807 A5 JP2014190807 A5 JP 2014190807A5 JP 2013066063 A JP2013066063 A JP 2013066063A JP 2013066063 A JP2013066063 A JP 2013066063A JP 2014190807 A5 JP2014190807 A5 JP 2014190807A5
Authority
JP
Japan
Prior art keywords
support substrate
torsion beam
lower electrodes
acceleration
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013066063A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014190807A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013066063A priority Critical patent/JP2014190807A/ja
Priority claimed from JP2013066063A external-priority patent/JP2014190807A/ja
Priority to PCT/JP2014/001697 priority patent/WO2014156119A1/ja
Publication of JP2014190807A publication Critical patent/JP2014190807A/ja
Publication of JP2014190807A5 publication Critical patent/JP2014190807A5/ja
Pending legal-status Critical Current

Links

JP2013066063A 2013-03-27 2013-03-27 加速度センサ Pending JP2014190807A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013066063A JP2014190807A (ja) 2013-03-27 2013-03-27 加速度センサ
PCT/JP2014/001697 WO2014156119A1 (ja) 2013-03-27 2014-03-25 物理量センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013066063A JP2014190807A (ja) 2013-03-27 2013-03-27 加速度センサ

Publications (2)

Publication Number Publication Date
JP2014190807A JP2014190807A (ja) 2014-10-06
JP2014190807A5 true JP2014190807A5 (cg-RX-API-DMAC10.html) 2015-07-16

Family

ID=51837199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013066063A Pending JP2014190807A (ja) 2013-03-27 2013-03-27 加速度センサ

Country Status (1)

Country Link
JP (1) JP2014190807A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109444467B (zh) * 2018-12-29 2021-07-06 深迪半导体(绍兴)有限公司 一种共享质量块的三轴电容式加速度计

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
US8539836B2 (en) * 2011-01-24 2013-09-24 Freescale Semiconductor, Inc. MEMS sensor with dual proof masses

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