JP2014188649A - Pallet for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pallet for a wire saw, which enables a workpiece to be conveyed depending on each processing step in the state of being loaded on the pallet, when the workpiece is processed by the wire saw.SOLUTION: A pallet for a wire saw includes a plurality of workpiece holding parts 21, a pallet base 22 for supporting the plurality of workpiece holding parts 21 in the state of laying them out in a line, and a connection part 23 for connecting the adjacent workpiece holding parts 21 together. The pallet base 22 allows movement of the workpiece holding part 21 in the direction of arrangement of the plurality of workpiece holding parts 21, and the connection part 23 is configured to be capable of changing a distance between the adjacent workpiece holding parts 21.

Description

  The present invention relates to a wire saw pallet, and more particularly to a wire saw pallet used when a workpiece is processed by a wire saw.

  Conventionally, a wire is spirally wound around a plurality of rollers at a predetermined pitch interval to provide a cutting path composed of a plurality of wire rows, and a cylindrical ingot is lowered so as to pass through the cutting path to supply slurry containing abrasive grains. On the other hand, a wire saw is known in which a large number of wafers having a constant thickness are manufactured at the same time by cutting into a thickness of a wire pitch interval (see, for example, Patent Document 1).

JP 2000-141364 A

  The wire saw has an advantage that a plurality of pieces can be processed simultaneously from one material while suppressing generation of shavings. On the other hand, when the interval for supporting the processing wire becomes wide, it becomes difficult to maintain the wire tension necessary for processing. There was a problem. Conventionally, a silicon ingot has been mainly sliced to produce a wafer as a semiconductor substrate, and applied to a method of machining a plurality of predetermined shapes by dividing and cutting other members such as plate-like workpieces. It was not examined. In addition, it has not been so much studied to transport the workpiece placed on the pallet so as to correspond to each processing step.

  An object of the present invention is to provide a wire saw pallet that can be conveyed so as to be placed on the pallet and correspond to each processing step when the workpiece is processed by the wire saw.

The above object of the present invention can be achieved by the following constitution.
(1) a plurality of work holding units;
A pallet base for supporting the plurality of workpiece holding portions in a row, and
A connecting part that connects the workpiece holding parts adjacent to each other,
The pallet base allows movement of the work holding part in the arrangement direction of the plurality of work holding parts,
The said connection part is comprised so that change of the distance of the said adjacent workpiece holding parts is possible, The pallet for wire saws characterized by the above-mentioned.
(2) The pallet base is formed with an opening that opens to the upper surface,
The plurality of work holding portions are each provided with a protruding portion that is movably engaged with the opening in the arrangement direction from the bottom surface,
The connecting portion is an end portion of two connecting members arranged so that the end portions of two connecting members arranged so as to cross through the protruding portion are inserted through the adjacent protruding portions. The wire saw pallet according to (1), wherein the pallet is configured to be rotatably connected to the wire saw.
(3) The work holding part has a rectangular shape,
The protrusion is provided at an intersection of diagonal lines connecting two corners,
An engagement portion that protrudes downward from the bottom surface is provided on a virtual line that passes through the intersection and is orthogonal to the arrangement direction,
The engaging portion regulates its position so that a predetermined gap is formed between the workpiece holding portions adjacent to each other in a state in which the two connecting bodies that pass through the protruding portion are closest to each other. The wire saw pallet as described in (2).
(4) The wire saw pallet according to (3), wherein the angle of the workpiece holding portion can be changed by rotating the engagement portion.

  According to the wire saw pallet of the present invention, the pallet base is configured to allow movement of the work holding part in the arrangement direction of the plurality of work holding parts, and the connecting part can change the distance between adjacent work holding parts. When the workpiece is divided and cut and simultaneously processed into a plurality of workpieces having a predetermined shape, it is not necessary to reload the workpieces corresponding to each processing step, and the workpieces can be loaded and conveyed over multiple steps.

It is a top view of the wire saw which can mount the pallet for wire saws of one Embodiment of this invention. It is a principal part perspective view of the wire drive mechanism which shows the state from which a wire is sent out from one bobbin, and is wound up by the other bobbin. (A) is a principal part top view of the wire saw when the plate-shaped workpiece | work hold | maintained on the pallet is simultaneously cut | divided into a some primary cutting workpiece | work by a 1st cutting part, (b) is a side view. (A) is a side view of a 1st cutting part, (b) is a back view of a 1st cutting part. (A) is a plurality of primary cutting workpieces in which the distance between adjacent primary cutting workpieces is widened by the adjacent distance changing mechanism, and two sides having an angle different from the two sides cut by the first cutting part are the second cutting. The principal part top view of the wire saw at the time of cut | disconnecting simultaneously by a part, (b) is a side view. It is a perspective view of a 2nd cutting part. (A) is a side view of a 2nd cutting part, (b) is a back view of a 2nd cutting part. (A) When changing the angles of a plurality of rectangular workpieces held on the pallet by the angle changing mechanism, and simultaneously cutting two corners positioned diagonally to each rectangular workpiece by the third cutting unit The principal part top view of this wire saw, (b) is a side view.

Hereinafter, a wire saw pallet according to an embodiment of the present invention and a wire saw on which the wire saw pallet can be mounted will be described in detail with reference to the drawings.
As shown in FIG. 1, the wire saw 10 includes a conveyance path 12 extending in a straight line and a base 11 including a circulation path 13 formed in parallel with the conveyance path 12, a first cutting unit 50, and a second cutting unit 70. A plurality of wire saw pallets (hereinafter simply referred to as pallets) 20 that hold the workpiece W so as to be transported on the transport path 12 and the circulation path 13. It has become.

  As shown in FIG. 3, the pallet 20 of the present embodiment includes a plurality of work holding units 21 that place and hold a work W on the upper surface, and a plurality of work holding units 21 in the conveyance direction of the work W (in FIG. 3). A pallet base 22 that is supported in a line along the right direction) and a connecting portion 23 that connects adjacent workpiece holding portions 21 to each other.

  Each work holding part 21 is formed in a substantially rectangular shape in a top view. For example, the work W is sucked and held by sucking air from a suction hole (not shown) provided on the upper face or sucking with a suction pad. To do. On the bottom surface 24 of each work holding portion 21, a protrusion 25 is formed that protrudes downward from an intersection CP at which a pair of diagonal lines DL intersect. A pair of engagement pins 26 that protrude downward from the bottom surface 24 are provided on a virtual line VL that passes through the intersection CP and is orthogonal to the arrangement direction of the work holding portions 21.

  Note that the pair of engagement pins 26 are sandwiched between the pair of coupling bodies 31 when the adjacent workpiece holding portions 21 are moved toward each other by the adjacent distance changing mechanism 30 described later (state shown in FIG. 3). The operation of the coupling body 31 is restricted, and the position thereof is regulated so that a predetermined gap is formed between the adjacent workpiece holding portions 21.

  A horizontally long opening 27 extending in the arrangement direction of the work holding portions 21 is formed on the upper surface of the pallet base portion 22, and the protrusions 25 of the work holding portions 21 are movably fitted in the openings 27. .

  The connecting portion 23 includes a plurality of connecting units 32 in which the protruding portions 25 of the work holding portion 21 are rotatably inserted at the intersecting portions of the pair of connecting bodies 31 arranged so as to intersect with each other. The end portions 31 a of the pair of connecting bodies 31 of the unit 32 are rotatably connected by pins 33.

  Thereby, for example, when the connecting portion 23 moves the protrusion 25a arranged at the rightmost end in FIG. 3 in the right-left direction, each connecting body 31 rotates about the protrusion 25, and a plurality of connecting units 32 is obtained. Can be expanded and contracted in the connecting direction (left-right direction in FIG. 3). That is, as shown in FIG. 5, the adjacent distance changing mechanism 30 that engages with a pair of engagement pins 26 arranged at the rightmost end and moves rightward and leftward moves the workpiece holding portion 21 to the rightmost end without rotating. The distance between the adjacent work holding parts 21 can be increased by moving the arranged protrusions 25a in the right direction, and the adjacent works can be held by moving the protrusion 25a arranged at the rightmost end in the left direction. The distance between the parts 21 can be shortened.

  Further, as shown in FIG. 8, the work holding portion 21 on the pallet 20 engages with an engagement pin 26 on one side (lower side in FIG. 8) of the work holding portion 21 and rotates around the protrusion 25. By rotating the work holding part 21 without moving it, the angle changing mechanism 40 to be moved is inclined to one side (right oblique in FIG. 1) and the other side (left oblique in FIG. 1).

  The adjacent distance changing mechanism 30 and the angle changing mechanism 40 are arranged at predetermined positions on the transport path 12, respectively, and plate-like locking drive plates 45 and 41 that advance between the connecting portion 23 and the work holding portion 21. And a driving mechanism (not shown) that drives the locking drive plates 45 and 41 in a direction orthogonal to the conveyance direction of the workpiece W and in the conveyance direction. Specifically, the adjacent distance changing mechanism 30 is arranged in a second machining area A2 described later, and the angle changing mechanism 40 is arranged in a third machining area A3 and a fourth machining area A4.

  As shown in FIG. 5, the pair of locking drive plates 45 of the adjacent distance changing mechanism 30 are arranged on both sides of the work holding part 21 arranged at the rightmost end, and at the tip thereof, the work holding of the rightmost end is held. A U-shaped groove 46 that can be engaged with the engaging pin 26 of the portion 21 is formed. Then, after the locking drive plate 45 is moved in a direction orthogonal to the conveying direction of the workpiece W by a drive mechanism (not shown) and the engagement pin 26 is fitted in the U-shaped groove 46, the pair of locking drive plates 45 Is moved in the conveyance direction of the workpiece W, the distance between the adjacent workpiece holding portions 21 is increased.

  As shown in FIG. 8, the locking drive plate 41 of the angle changing mechanism 40 has a horizontally long base 42 extending in the arrangement direction of the work holding portions 21, and extends from the base 42 toward the center of the pallet 20, and has a U at the tip. A plurality of arm portions 43 formed with a character groove 44 are provided. The interval P between the U-shaped grooves 44 is set to be the same as the interval between the engagement pins 26 of the workpiece holding portion 21 in a state where the distance between the adjacent workpiece holding portions 21 is expanded by the adjacent distance changing mechanism 30.

  Then, after the locking drive plate 41 is moved in a direction orthogonal to the conveying direction of the workpiece W by a drive mechanism (not shown) and the engagement pin 26 is fitted in the U-shaped groove 44, the locking drive plate 41 is moved to the workpiece. When moved in the direction of conveyance of W and the direction orthogonal to the direction of conveyance, the work holding unit 21 rotates about the protrusion 25. The rotation direction and rotation angle of the work holding unit 21 are determined by the movement direction and movement distance of the locking drive plate 41. The locking drive plates 45 and 41 are disposed at positions separated from the engagement pins 26 except when the adjacent distance changing mechanism 30 and the angle changing mechanism 40 are operated.

  As shown in FIG. 1, the pallet 20 configured as described above includes a loading area LA on which a plate-like workpiece W is placed on the workpiece holding portion 21, and a first workpiece that simultaneously cuts the workpiece W into a plurality of primary cutting workpieces 15. The machining area A1, the second machining area A2 that simultaneously cuts the plurality of primary cutting workpieces 15 to form the secondary cutting workpiece 16, and the third cutting section 16a that cuts two corners 16a located on the diagonal of the secondary cutting workpiece 16. Unloading the processing area A3, the fourth processing area A4 for cutting the other two corners 16b located on the diagonal of the secondary cutting workpiece 16, and removing the secondary cutting workpiece 16 that has been processed from the workpiece holder 21. It is sequentially conveyed along the conveyance path 12 to the area UA. Further, the pallet 20 is returned to the loading area LA via the circulation path 13 and is circulated and conveyed.

  The 1st cutting part 50, the 2nd cutting part 70, the 3rd cutting part 80, and the 4th cutting part 90 wind around a plurality of rollers, and run, for example, a piano wire about 0.1-0.25 mm in diameter A cutting device that presses against the workpiece W while supplying slurry containing abrasive grains to a wire such as a wire. The wire may have a diamond fixed on the surface.

  The first, second, third, and fourth cutting portions 50, 70, 80, 90 are supplied with a wire from the wire driving mechanism shown in FIG. More specifically, the wire saw 10 is provided with two wire drive mechanisms 51A and 51B, the wire drive mechanism 51A is for the first cutting unit 50, and the wire drive mechanism 51B is the second and third. And for the fourth cutting portions 70, 80, 90. Since the two wire drive mechanisms 51A and 51B have the same structure, the wire drive mechanism 51A of the first cutting unit 50 will be described as an example with reference to FIG.

  As shown in FIG. 2, the wire drive mechanism 51A of the first cutting unit 50 sends the first wire 52 from the first delivery bobbin 53 to the first cutting unit 50, and the processing of the workpiece W by the first cutting unit 50 is completed. The first wire 52 thus wound is wound around the first winding bobbin 54.

  A pair of dancer arms 55 </ b> A and 55 </ b> B are swingably supported between the first delivery bobbin 53 and the first winding bobbin 54 and the first cutting portion 50. Dancer rollers 56A and 56B around which the first wire 52 is wound are rotatably attached to the tip ends of the dancer arms 55A and 55B. The dancer arms 55A and 55B are driven by an actuator (not shown) to apply an appropriate tension to the first wire 52.

  In the vicinity of the first delivery bobbin 53 and the first take-up bobbin 54, traverse rollers 57A and 57B capable of traversing along the axial direction of the first delivery bobbin 53 and the first take-up bobbin 54 are arranged. The wire drive mechanism 51A includes a plurality of guide rollers 58A and 58B that guide the wound first wire 52.

  As shown in FIG. 4, the first cutting unit 50 cuts the workpiece W placed on the pallet 20 in a direction orthogonal to the conveyance direction, thereby dividing the workpiece W into a plurality of primary cut workpieces 15 in the conveyance direction. They are cut at the same time, and are positioned above the transport path 12 in the first processing area A1 and arranged so as to be vertically movable.

  The first cutting unit 50 includes a first roller group 63A in which a plurality of rollers 62A having a rotation shaft 61A in the vertical direction are arranged in a straight line at equal intervals, and a plurality of rollers 62B having a rotation shaft 61B in the vertical direction. And a second roller group 63 </ b> B arranged on a straight line at intervals, each being arranged on the lower surface of the roller support 60. The rollers 62A of the first roller group 63A and the rollers 62B of the second roller group 63B are arranged on the same plane, offset by ½ pitch in the conveyance direction of the workpiece W.

  Between the roller 62A of the first roller group 63A and the roller 62B of the second roller group 63B, a pair of tension rollers 65A and 65B having rotating shafts 64A and 64B in the horizontal direction, the workpiece W and the conveying direction. They are sandwiched between orthogonal directions.

  The first wire 52 delivered from the first delivery bobbin 53 is alternately wound around the roller 62A of the first roller group 63A and the roller 62B of the second roller group 63B, and is also wound around the pair of tension rollers 65A and 65B. It is stretched.

  As shown in FIGS. 6 and 7, the second cutting unit 70 is different from the two sides cut by the first cutting unit 50 so that the primary cutting workpiece 15 has a predetermined shape (here, a rectangular shape). Two sides of the angle (here, two sides orthogonal to each other) are cut at the same time to obtain a plurality of secondary cutting workpieces 16, which are located above the conveying path 12 in the second processing area A2 and can be moved up and down. It is arranged. The second cutting unit 70 includes a third roller group 73A in which a plurality of tension rollers 72A having a rotation shaft 71A in the horizontal direction are arranged in a straight line at equal intervals, and a plurality of tension rollers having the rotation shaft 71B in the horizontal direction. 72B includes a fourth roller group 73B arranged in a straight line at equal intervals, and each is arranged on a bottom 74a of a roller support 74 formed in a substantially U-shape.

  The tension roller 72A of the third roller group 73A and the tension roller 72B of the fourth roller group 73B are arranged apart from each other in a direction orthogonal to the conveyance direction of the workpiece W. The tension roller 72A is disposed opposite to the interval between the adjacent primary cutting workpieces 15 expanded by the adjacent distance changing mechanism 30 on one end side of the primary cutting workpiece 15, and the tension roller 72B is the other end side of the primary cutting workpiece 15. Are arranged opposite to each other at the interval between the adjacent primary cutting workpieces 15 expanded by the adjacent distance changing mechanism 30.

  After the second wire 75 is stretched around the tension roller 72A of the third roller group 73A, the second wire 75 is wound around a pair of guide pulleys 76 provided on the side wall 74b of the roller support 74, and is turned back, so that the fourth roller group 73B. The tension roller 72B is stretched.

  The third cutting unit 80 and the fourth cutting unit 90 differ only in the interval between the roller groups arranged on a straight line and the interval between the tension roller 72A of the third roller group 73A and the tension roller 72B of the fourth roller group 73B. The second cutting unit 70 has the same configuration, is positioned above the conveyance path 12 in the third processing area A3 and the fourth processing area A4, and is arranged to be movable up and down.

  The 3rd cutting part 80 cuts two corners 16a (refer to Drawing 1) located on the diagonal of secondary cutting work 16 in the 3rd processing area A3. Moreover, the 4th cutting part 90 cut | disconnects the other two corner | angular parts 16b (refer FIG. 1) located on the diagonal of the secondary cutting workpiece 16 in 4th process area A4. The wires disposed in the third cutting unit 80 and the fourth cutting unit 90 are the second wires 75 continuous from the second cutting unit 70. However, a wire driving mechanism may be separately provided for the third cutting unit 80 and the fourth cutting unit 90, and cutting may be performed with a wire independent of the second cutting unit 70.

Next, a procedure for processing the plate-like workpiece W into the secondary cutting workpiece 16 using the wire saw 10 will be described.
First, as shown in FIGS. 1 and 3, in the loading area LA, the plate-shaped workpiece W is placed on the workpiece holding portion 21 of the pallet 20, held in a vacuum, and conveyed to the first processing area A1.

  And the 1st cutting part 50 shown in Drawing 4 arranged above conveyance path 12 of the 1st processing area A1 is lowered, and it is alternated with roller 62A of the 1st roller group 63A, and roller 62B of the 2nd roller group 63B. The plate-like workpiece W is divided into a plurality of pieces in the carrying direction so that the two sides 15a facing each other are parallel by a first wire 52 that is wound around and reciprocates in a direction perpendicular to the carrying direction of the workpiece W. It cuts into the primary cutting workpiece | work 15 simultaneously (1st cutting process).

  At this time, an appropriate tension necessary for processing is applied to the first wire 52 by a pair of tension rollers 65A and 65B. The plurality of primary cut workpieces 15 that have been cut maintain the state of being held on the workpiece holding unit 21. The first cutting unit 50 obtained by dividing the workpiece W into a plurality of primary cutting workpieces 15 moves upward and returns to the original position to prepare for the next processing.

  Next, the workpiece is conveyed to the second machining area A2, and as shown in FIG. 5, the pair of locking drive plates 45 of the adjacent distance changing mechanism 30 are moved in a direction approaching each other (a direction perpendicular to the conveyance direction of the workpiece W). After the engagement pin 26 is fitted in the U-shaped groove 46, the pair of locking drive plates 45 are moved in the conveyance direction of the workpiece W. Thereby, each connection body 31 rotates centering | focusing on the projection part 25, and expands the distance between the adjacent workpiece holding parts 21 to a predetermined distance (adjacent distance change process).

  In the second processing area A2, the second cutting unit 70 shown in FIGS. 6 and 7 disposed above the conveyance path 12 is lowered, and each of the tension rollers 72A and the fourth roller group 73B of the third roller group 73A is lowered. The plurality of primary cutting workpieces 15 are formed in a rectangular shape by the second wire 75 that travels in the conveyance direction of the workpiece W by allowing the tension roller 72B to enter the interval between the adjacent primary cutting workpieces 15 expanded to a predetermined distance. In addition, a plurality of secondary cutting workpieces 16 are formed by simultaneously cutting two sides having different angles from the two sides cut by the first cutting unit 50 (second cutting step).

  Next, the pallet 20 is transported to the third processing area A3, and the locking drive plate 41 is orthogonal to the transport direction of the secondary cutting workpiece 16 by a drive mechanism (not shown) of the angle changing mechanism 40 as shown in FIG. The engagement drive plate 41 is moved in the direction opposite to the conveyance direction of the workpiece W (left direction in FIG. 8) and in the direction perpendicular to the conveyance direction. Move. Thereby, the secondary cutting workpiece 16 held on the workpiece holding portion 21 rotates 45 ° together with the workpiece holding portion 21 about the protrusion 25 (first angle changing step).

  Then, the chamfering process is performed by simultaneously cutting the two corner portions 16a located on the diagonal of the secondary cutting workpiece 16 by the third cutting portion 80 (third cutting step).

  The secondary cutting workpiece 16 that has been chamfered at the two corners 16a in the third machining area A3 moves the locking drive plate 41 in the carrying direction, that is, the third machining area, before being conveyed to the fourth machining area A4. The secondary cutting work 16 is moved 90 ° around the projection 25 by moving it in the direction opposite to A3 (rightward in FIG. 8) (second angle changing step). Thereafter, the secondary cutting workpiece 16 is transported to the fourth machining area A4, and the other two corner portions 16b located on the diagonal of the secondary cutting workpiece 16 are cut by the fourth cutting portion 90 to perform chamfering. (Fourth cutting step).

  In the conveyance path 12 of the wire saw 10, as shown in FIG. 1, different pallets 20 are arranged in the first processing area A1 to the fourth processing area A4. Thereby, the pallet 20 in a different area can be processed simultaneously. In particular, in the second processing area A2 to the fourth processing area A4, it is possible to make the wire common by controlling to be simultaneously cut by the second, third, and fourth cutting portions 70, 80, 90. it can.

  The secondary cut workpiece 16 that has been processed is removed from the workpiece holder 21 in the unloading area UA. The empty pallet 20 is returned to the loading area LA via the circulation path 13 after the distance between the adjacent workpiece holding portions 21 is reduced by the adjacent distance changing mechanism 30. Thereafter, the same operation is repeated, and the plate-like workpiece W is processed into a plurality of secondary cutting workpieces 16 that have been chamfered.

  The workpiece W is not particularly limited, and for example, a glass plate, a resin plate, a metal plate, or the like can be used.

  As described above, according to the wire saw pallet 20 of the present embodiment, the plurality of workpiece holding portions 21, the pallet base portion 22 that supports the plurality of workpiece holding portions 21 in a line, and the workpiece holding portion 21. And a connecting portion 23 that connects the two. The pallet base portion 22 allows the workpiece holding portion 21 to move in the arrangement direction of the plurality of workpiece holding portions 21, and the connecting portion 23 is configured to be able to change the distance between the adjacent workpiece holding portions 21. Is divided and cut into a plurality of secondary cut workpieces 16 having a predetermined shape at the same time, it is not necessary to reload the workpieces W corresponding to each machining step, and the workpieces W (primary cutting workpieces 15 The next cutting workpiece 16) can be loaded and conveyed.

  Further, the protrusions 25 protruding from the bottom surfaces 24 of the plurality of work holding parts 21 are inserted through the two connecting bodies 31 arranged so that the connecting parts 23 intersect with each other, and open to the upper surface of the pallet base part 22. The opening 27 is movably engaged. Since the connecting portion 23 is configured by rotatably connecting the end portions 31 a of the two connecting bodies 31 and the end portions 31 a of the two adjacent connecting bodies 31, the connecting portion 23 is an opening of the pallet base portion 22. It can be expanded and contracted along the portion 27.

  Further, on the bottom surface 24 of the work holding part 21, a protrusion 25 is provided to protrude downward at an intersection CP of the diagonal line DL of the rectangular work holding part 21, and is orthogonal to the arrangement direction of the work holding parts 21 through the intersection CP. On the virtual line VL to be engaged, the engaging pin 26 is provided so as to protrude downward. Since the engagement pin 26 restricts the position so that a predetermined gap is formed between the adjacent workpiece holding portions 21 when the two connecting bodies 31 are closest to each other, the workpiece holding portions 21 Interference can be prevented.

  Moreover, since the angle of the work holding part 21 can be changed by rotating the engagement pin 26 by the angle changing mechanism 40, the work W held by the work holding part 21 is set to an arbitrary angle and processed. Can do.

In addition, this invention is not limited to embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably.
For example, in the pallet 20 of the above embodiment, the connecting portion 23 includes a plurality of connecting units 32 in which the protrusions 25 of the work holding portion 21 are rotatably inserted, and a pair of connecting bodies of adjacent connecting units 32. The end portions 31a of 31 are rotatably connected by pins 33, and the distance can be changed by the adjacent distance changing mechanism 30, but not limited to this, the pallet is an electric or magnetic drive device, or A drive device such as a hydraulic drive device may be built in, and a distance change and an angle change may be possible with the drive device.

15 Primary cutting work 16 Secondary cutting work 16a, 16b Corner 20 Pallet (Pallet for wire saw)
21 Workpiece holding part 22 Pallet base part 23 Connecting part 24 Bottom face 25, 25a Projection part 26 Engaging pin (engaging part)
27 Opening 31 Link 31a End CP Intersection DL Diagonal Line VL Virtual Line W Workpiece

Claims (4)

A plurality of workpiece holders;
A pallet base for supporting the plurality of workpiece holding portions in a row, and
A connecting part that connects the workpiece holding parts adjacent to each other,
The pallet base allows movement of the work holding part in the arrangement direction of the plurality of work holding parts,
The said connection part is comprised so that change of the distance of the said adjacent workpiece holding parts is possible, The pallet for wire saws characterized by the above-mentioned. The pallet base is formed with an opening that opens to the upper surface,
The plurality of work holding portions are each provided with a protruding portion that is movably engaged with the opening in the arrangement direction from the bottom surface,
The connecting portion is an end portion of two connecting members arranged so that the end portions of two connecting members arranged so as to cross through the protruding portion are inserted through the adjacent protruding portions. The wire saw pallet according to claim 1, wherein the pallet is configured to be rotatably connected to the wire saw pallet. The work holding part has a rectangular shape,
The protrusion is provided at an intersection of diagonal lines connecting two corners,
An engagement portion that protrudes downward from the bottom surface is provided on a virtual line that passes through the intersection and is orthogonal to the arrangement direction,
The engaging portion regulates its position so that a predetermined gap is formed between the workpiece holding portions adjacent to each other in a state in which the two connecting bodies that pass through the protruding portion are closest to each other. The pallet for wire saws according to claim 2.   The wire saw pallet according to claim 3, wherein the angle of the work holding portion can be changed by rotating the engagement portion.

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