JP2014168892A - Ultrasonic working apparatus and manufacturing method of ink jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an ultrasonic working apparatus capable of precisely and collectively forming multiple ink grooves in multiple piezoelectric members.SOLUTION: An ultrasonic working apparatus includes a single pedestal attached to a hone ultrasonically vibrating in a vertical direction and multiple tools corresponding to multiple piezoelectric members. Each of the tools includes a surface layer of a polycrystalline diamond laminated on a super hard alloy substrate. Multiple convex parts are individually formed on the surface layer of each of the tools by wire discharge machining. Each of the tools is fixed on an undersurface of the pedestal so as to correspond to a physical relationship of ink grooves between piezoelectric members in which their convex parts are adjacent to each other. By ultrasonically vibrating the tools in a state that the convex parts of the tools are opposed to the piezoelectric members, the ink grooves each complying with a shape of each of the convex parts of the piezoelectric members are collectively formed.

Description

  Embodiments described herein relate generally to an ultrasonic processing apparatus used when manufacturing an inkjet head and a method of manufacturing the inkjet head.

  As a technique for forming a plurality of ink grooves in a piezoelectric member of an inkjet head, ultrasonic processing is known. In the conventional ultrasonic processing, since the tool that vibrates ultrasonically is formed of metal or ceramic, the tool is worn out at an early stage, and the durability of the tool is difficult.

  On the other hand, in order to ensure the durability of the tool, an ultrasonic processing apparatus in which the tool is made of PCD (polycrystalline diamond) is known. As a method of forming a plurality of comb-like convex portions corresponding to the ink grooves on a PCD tool, wire electric discharge machining which is non-contact machining is suitable.

Japanese Patent Laid-Open No. 10-217113 JP 2004-1113 A

  By the way, for example, a share mode / share wall type ink jet head which requires high resolution includes, for example, a pair of nozzle rows and a pair of piezoelectric members as actuators. The nozzle row has a plurality of nozzles arranged in parallel at a predetermined pitch while being arranged in parallel with each other. Between the nozzle rows adjacent to each other, the nozzles of each nozzle row are shifted by a half pitch.

  The piezoelectric member is fixed on the substrate so as to correspond to the nozzle row. Each piezoelectric member includes a plurality of ink grooves that pressurize the ink. The ink grooves are arranged at a predetermined pitch in the longitudinal direction of the piezoelectric member so as to correspond to the nozzles. Between adjacent piezoelectric members, the ink grooves of each piezoelectric member are shifted by a half pitch. For this reason, by forming the ink grooves obliquely with respect to the longitudinal direction of the piezoelectric member, the ink grooves of adjacent piezoelectric members can be aligned on the same straight line.

  For this reason, even when the ink groove is formed by applying ultrasonic processing to the piezoelectric member, by using a PCD tool having a size straddling the piezoelectric member, it is the same between adjacent piezoelectric members. Ink grooves positioned on the straight line can be formed collectively.

  However, in order to collectively form ink grooves with a PCD tool, it is necessary to form a long comb-like convex portion straddling between piezoelectric members on the tool. Since the convex portion is formed by wire electric discharge machining as described above, it is inevitable that the total length of the wire used as the electrode increases as the convex portion becomes longer.

  As a result, at the time of wire electric discharge machining, the wire may be loosened between adjacent piezoelectric members, and the processing accuracy of the convex portion may be reduced, or the wire may be cut. Therefore, it is difficult to accurately form the convex portion on the PCD tool.

  An object of the present invention is to obtain an ultrasonic machining apparatus capable of forming a plurality of ink grooves in a plurality of piezoelectric members with high accuracy.

  According to the embodiment, the ultrasonic processing apparatus includes a horn that ultrasonically vibrates in the vertical direction, a single pedestal attached to the horn, and a plurality of tools corresponding to a plurality of piezoelectric members. . The tool is composed of a laminated plate in which a surface layer of polycrystalline diamond is laminated on a cemented carbide substrate, and a plurality of convex portions are formed on the surface layer by wire electric discharge machining. The convex portions are arranged at intervals so as to correspond to a plurality of ink grooves provided in the piezoelectric member. The tool is fixed to the lower surface of the pedestal so that the convex portion corresponds to the positional relationship of the ink grooves between the piezoelectric members adjacent to each other. By ultrasonically vibrating the tool, the ink groove having a shape following the convex portion is formed in the piezoelectric member at a time.

1 is a perspective view of an ink jet head according to a first embodiment. FIG. 2 is a plan view of the ink jet head according to the first embodiment. Sectional drawing which follows the F3-F3 line | wire of FIG. Sectional drawing which follows the F4-F4 line | wire of FIG. 1 is a side view schematically showing an ultrasonic processing apparatus according to a first embodiment. (A) is a side view of a machining head showing a positional relationship between a horn, a pedestal, and a tool in the first embodiment. FIG. 6B is a side view of the machining head as viewed from the direction of the arrow X in FIG. Sectional drawing which shows the relationship between the convex part formed in the tool, and the ink groove formed in the piezoelectric member in 1st Embodiment. The top view of the processing head which looked at FIG. 6 (A) from the direction of arrow Y. FIG. (A) is a side view of a machining head showing the positional relationship between a horn, a pedestal, and a tool in the second embodiment. FIG. 9B is a side view of the machining head as viewed from the direction of arrow Z in FIG.

[First embodiment]
Hereinafter, the first embodiment will be described with reference to FIGS. 1 to 8.

  FIG. 1 to FIG. 3 disclose the main part of a share mode / share wall type inkjet head 1 which is mounted on a carriage of a printer, for example. The inkjet head 1 includes a substrate 2, a frame member 3, and a nozzle plate 4.

  The substrate 2 is a flat plate having an elongated mounting surface 2a. A plurality of ink supply ports 5 and a plurality of ink discharge ports 6 are provided on the substrate 2. The ink supply ports 5 are arranged in a line at intervals in the longitudinal direction of the substrate 2 at the central portion along the width direction of the substrate 2. The ink discharge ports 6 are arranged in two rows at intervals in the longitudinal direction of the substrate 2 so as to sandwich the ink supply port 5. The ink supply port 5 and the ink discharge port 6 are opened on the mounting surface 2a of the substrate 2 and are connected to an ink tank (not shown) in which ink is stored.

  The frame member 3 is formed in, for example, an elongated rectangular shape. The frame member 3 is bonded onto the mounting surface 2 a of the substrate 2 so as to surround the ink supply port 5 and the ink discharge port 6.

  The nozzle plate 4 is made of, for example, an elongated rectangular polyimide film. The nozzle plate 4 is bonded onto the frame member 3 and faces the mounting surface 2 a of the substrate 2. As shown in FIG. 3, the substrate 2, the frame member 3, and the nozzle plate 4 constitute an ink supply chamber 7 in cooperation with each other.

  The ink supply chamber 7 is connected to the ink tank via the ink supply port 5 and the ink discharge port 6. The ink stored in the ink tank is supplied from the ink supply port 5 to the ink supply chamber 7. Excess ink supplied to the ink supply chamber 7 is returned from the ink discharge port 6 to the ink tank.

  As shown in FIGS. 1 and 2, a pair of nozzle rows 10 a and 10 b are formed on the nozzle plate 4. The nozzle rows 10 a and 10 b are arranged in parallel to each other at intervals in the width direction of the nozzle plate 4 so as to extend in the longitudinal direction of the nozzle plate 4.

  The nozzle rows 10a and 10b each have a plurality of nozzles 11. The nozzles 11 are arranged in a line at a predetermined pitch P along the longitudinal direction of the nozzle plate 4. Further, between the adjacent nozzle rows 10a and 10b, the nozzles 11 of the nozzle rows 10a and 10b are shifted by a half pitch P / 2 in the longitudinal direction of the nozzle rows 10a and 10b.

  As shown in FIGS. 2 and 3, a pair of piezoelectric members 12 a and 12 b are accommodated in the ink supply chamber 7. The piezoelectric members 12a and 12b are arranged in parallel to each other with the ink supply port 5 interposed therebetween. One piezoelectric member 12a is bonded to the mounting surface 2a of the substrate 2 so as to be positioned directly below the one nozzle row 10a. The other piezoelectric member 12b is bonded onto the mounting surface 2a of the substrate 2 so as to be positioned directly below the other nozzle row 10b.

  The piezoelectric members 12a and 12b have a common configuration. Therefore, in the present embodiment, one piezoelectric member 12a will be described as a representative, and the other piezoelectric member 12b will be denoted by the same reference numeral, and the description thereof will be omitted.

  The piezoelectric member 12a includes an elongated body 13 that extends along the nozzle row 10a. As shown in FIG. 4, the main body 13 includes two piezoelectric plates 14a and 14b. The piezoelectric plates 14a and 14b are bonded in the thickness direction, and the polarization directions are opposite to each other in the thickness direction of the piezoelectric plates 14a and 14b.

  The main body 13 has a front surface 15, a back surface 16, and a pair of side surfaces 17a and 17b. The surface 15 faces the nozzle plate 4. The back surface 16 is located on the back side of the front surface 15 and is bonded to the mounting surface 2 a of the substrate 2.

  One side surface 17 a connects between one end along the width direction of the front surface 15 and one end along the width direction of the back surface 16. The other side surface 17 b connects the other end along the width direction of the front surface 15 and the other end along the width direction of the back surface 16. Further, the side surfaces 17 a and 17 b are inclined so as to be separated from each other from the front surface 15 toward the back surface 16. In other words, the side surfaces 17 a and 17 b are inclined so as to spread outside the main body 13 with respect to the mounting surface 2 a of the substrate 2.

  As shown in FIGS. 3 and 4, a plurality of ink grooves 19 are formed in the main body 13. The ink grooves 19 extend along a direction orthogonal to the longitudinal direction of the main body 13 and are arranged at a predetermined pitch P1 in the longitudinal direction of the main body 13 so as to correspond to the nozzles 11. Between the adjacent piezoelectric members 12a and 12b, the ink grooves 19 of the piezoelectric members 12a and 12b are shifted by a half pitch in the longitudinal direction of the piezoelectric members 12a and 12b.

  The ink groove 19 is continuously opened on the surface 15 and the side surfaces 17 a and 17 b of the main body 13. Portions of the main body 13 positioned between the ink grooves 19 function as a plurality of partition walls 20 that separate the adjacent ink grooves 19.

  As shown in FIG. 4, each ink groove 19 is defined by a bottom surface 21 and a pair of side surfaces 22a and 22b. The side surfaces 22a and 22b face each other with an interval in the width direction of the ink groove 19.

  As shown in FIGS. 3 and 4, the nozzle plate 4 is bonded onto the partition wall 20 of the main body 13 to close a portion of the ink groove 19 that is opened on the surface 15 of the main body 13. A space surrounded by the ink grooves 19 and the nozzle plate 4 constitutes a plurality of pressure chambers 23. The pressure chamber 23 communicates with the ink supply chamber 7 from the opening end of the ink groove 19 opened in the side surfaces 17 a and 17 b of the main body 13. Further, the nozzles 11 of the nozzle plate 4 are individually opened at the center of the pressure chamber 23.

  As shown in FIG. 4, electrodes 25 are respectively provided inside the pressure chambers 23. The electrode 25 continuously covers the bottom surface 21 and the side surfaces 22a and 22b of the ink groove 19. The electrodes 25 of the adjacent ink grooves 19 are separated by the partition walls 20 so as to be electrically independent.

  The electrode 25 includes a plurality of wiring patterns 26. As shown in FIG. 2, the wiring pattern 26 is guided from the end of the electrode 25 to the mounting surface 2 a of the substrate 2 through the side surface 17 a of the main body 13 of the piezoelectric member 12 a. The wiring patterns 26 are arranged at intervals in a direction orthogonal to the longitudinal direction of the main body 13.

  The leading end of the wiring pattern 26 is drawn out of the ink supply chamber 7. A plurality of tape carrier packages (TCP) 27 are connected to the leading end of the wiring pattern 26. The tape carrier package 27 is mounted with a drive circuit that drives the inkjet head 1.

  According to this embodiment, the drive circuit applies a drive voltage to the electrode 25 of the inkjet head 1 based on, for example, a print signal input from the control unit of the printer. As a result, a potential difference is generated between the adjacent electrodes 25, and an electric field is generated in the partition 20 corresponding to these electrodes 25. Therefore, the adjacent partition wall 20 with the pressure chamber 23 interposed therebetween is curved in a direction to increase the volume of the pressure chamber 23 by shear mode deformation.

  Thereafter, when the application of the driving voltage to the electrode 25 is cut off, the partition wall 20 is displaced so as to return to the initial shape. When the partition wall 20 is displaced, the ink supplied from the ink supply chamber 7 to the pressure chamber 23 is pressurized. Part of the pressurized ink is ejected from the nozzle 11 as ink droplets.

  In such an ink jet head 1, the ink groove 19 constituting the pressure chamber 23 is formed in the main body 13 of the piezoelectric members 12 a and 12 b using the ultrasonic processing device 31.

  FIG. 5 schematically shows an ultrasonic processing apparatus 31 used when forming the ink grooves 19. The ultrasonic processing apparatus 31 includes a table 32 and a processing head 33. The table 32 is installed horizontally. A processing tank 34 to which the working fluid L is supplied is installed on the table 32. As the working fluid L, for example, a slurry fluid such as water or a solvent containing abrasive grains such as SiC can be used. The piezoelectric members 12a and 12b bonded to the substrate 2 are attached to the bottom of the processing tank 34 so as to be immersed in the working fluid L.

  The processing head 33 is installed on the processing tank 34 and can move up and down in a direction approaching or moving away from the processing tank 34. The processing head 33 includes an ultrasonic generator 36, an ultrasonic vibrator 37 that vibrates in the vertical direction in response to a high-frequency current output from the ultrasonic generator 36, and a horn 38 connected to the ultrasonic vibrator 37. It is equipped with. The horn 38 is an element that amplifies the vibration of the ultrasonic vibrator 37 and protrudes from the ultrasonic vibrator 37 toward the processing tank 34.

  As shown in FIGS. 5 and 6, a single pedestal 39 is attached to the lower end of the horn 38. The pedestal 39 is detachably connected to the lower end of the horn 38 by a known means such as screwing. The lower surface of the pedestal 39 constitutes a flat tool support surface 40. When the machining head 33 is lowered, the tool support surface 40 enters the inside of the machining tank 34 and faces the main body 13 of the piezoelectric members 12a and 12b from above.

  A pair of tools 42 a and 42 b are attached to the tool support surface 40 of the base 39. The tools 42a and 42b are elongated rectangular elements extending along the main body 13 of the piezoelectric members 12a and 12b, respectively, and vibrate in the vertical direction following the horn 38.

  The tools 42a and 42b have a common configuration. For this reason, in this embodiment, one tool 42a will be described as a representative.

  As shown in FIG. 7, the tool 42 a is composed of a laminated plate 45 in which a surface layer 44 of polycrystalline diamond (PCD) is laminated on a cemented carbide substrate 43. The cemented carbide substrate 43 is overlaid on the tool support surface 40 of the base 39. The surface layer 44 is an element pressed against the main body 13 of the piezoelectric members 12 a and 12 b, and the surface layer 44 includes a plurality of comb-shaped convex portions 46 corresponding to the ink grooves 19.

  The convex portion 46 is formed by individually performing wire electric discharge machining on the surface layer 44 of the laminated plate 45. In wire electric discharge machining, a plurality of grooves 48 are formed in the surface layer 44 using a wire. The grooves 48 cross the laminated plate 45 linearly in the width direction and are arranged at intervals in the longitudinal direction of the laminated plate 45. By forming the groove 48 in the surface layer 44, a portion located between the adjacent grooves 48 in the surface layer 44 functions as the convex portion 46. The convex portions 46 are arranged at a pitch P2 corresponding to the ink grooves 19 to be formed.

  Specifically, for example, when the groove width D1 of the ink groove 19 is 40 μm and the pitch P1 between the ink grooves 19 is 80 μm, the width D2 of the convex portion 46 of the tool 42a is approximately 30 μm. Therefore, by using a wire having a thickness (diameter) of approximately 30 μm, it is possible to alternately form convex portions 46 having a width D2 of 30 μm and grooves 48 having a groove width D3 of 50 μm on the surface layer 44 of the tool 42a.

  The relationship between the width D2 of the convex portion 46 formed on the tool 42a and the groove width D1 of the ink groove 19 and the relationship between the thickness of the wire and the groove width D1 of the ink groove 19 differ depending on the processing conditions during wire electric discharge machining. . Therefore, when performing wire electric discharge machining, it is preferable to select a wire having a thickness that is optimal for the machining conditions.

  The tools 42a and 42b on which the convex portions 46 are formed individually face the piezoelectric members 12a and 12b, and the bases so that the convex portions 46 correspond to the positional relationship of the ink grooves 19 between the adjacent piezoelectric members 12a and 12b. It is fixed to 39 tool support surfaces 40.

  In this embodiment, after the positioning of the tools 42a and 42b with respect to the tool support surface 40 is completed, the tools 42a and 42b are fixed using a jig so as not to deviate from the fixed positions of the tool support surface 40. In this state, the cemented carbide substrate 43 of the tools 42 a and 42 b is joined to the tool support surface 40 of the base 39 by a technique such as brazing using a brazing material 49.

  Next, an example of a procedure for forming the ink grooves 19 in the piezoelectric members 12a and 12b will be described.

  First, the main body 13 of the piezoelectric members 12a and 12b is formed by overlapping the two piezoelectric plates 14a and 14b. Subsequently, the main bodies 13 of the piezoelectric members 12 a and 12 b are bonded onto the mounting surface 2 a of the substrate 2.

  Thereafter, the main body 13 bonded to the substrate 2 is cut so that both end portions along the width direction of the main body 13 are cut obliquely. As a result, side surfaces 17 a and 17 b that are inclined with respect to the mounting surface 2 a of the substrate 2 are formed at both ends along the width direction of the main body 13.

  Subsequently, the piezoelectric members 12 a and 12 b bonded to the substrate 2 are accommodated in the processing tank 34 of the ultrasonic processing apparatus 31, and the substrate 2 is fixed to the bottom of the processing tank 34. In this state, by supplying the machining fluid L to the machining tank 34, the piezoelectric members 12a and 12b are immersed in the machining fluid L.

  In this state, the machining head 33 of the ultrasonic machining apparatus 31 is lowered, and the convex portions 46 of the tools 42a and 42b are individually pressed against the surface 15 of the main body 13 of the piezoelectric members 12a and 12b. At the same time, the ultrasonic vibrator 37 is vibrated at, for example, a high frequency output of 1 kW and a transmission frequency of 20 KHz to 50 KHz. The vibration of the ultrasonic vibrator 37 is transmitted to the tools 42a and 42b via the horn 38.

  As a result, the abrasive grains contained in the working fluid L are interposed between the convex portion 46 and the main body 13, and the main body 13 is scraped so as to follow the shape of the convex portion 46 while the abrasive grains become cutting edges. Therefore, a plurality of ink grooves 19 are formed in the body 13 of the pair of piezoelectric members 12a and 12b at a time.

  Thereafter, the electrode 25 is formed on the bottom surface 21 and the side surfaces 22a and 22b of the ink groove 19 by using, for example, photolithography, and the wiring pattern 26 is formed on the side surface 17a of the main body 13 and the mounting surface 2a of the substrate 2. Form.

  Subsequently, after the frame member 3 is bonded onto the mounting surface 2 a of the substrate 2, the nozzle plate 4 before nozzle formation is bonded so as to straddle between the surface 15 of the main body 13 and the frame member 3. As a result, a pressure chamber 23 is formed between the ink groove 19 of the main body 13 and the nozzle plate 4.

  After the nozzle 11 is formed on the nozzle plate 4, the tape carrier package 27 is electrically connected to the tip of the wiring pattern 26 located outside the ink supply chamber 7 using, for example, an anisotropic conductive film or a bonding wire. To do. Thereby, a series of manufacturing processes of the inkjet head 1 is completed.

  According to the first embodiment, the pair of tools 42a and 42b that vibrate ultrasonically are individually pressed against the piezoelectric members 12a and 12b immersed in the working fluid L, whereby a plurality of ink grooves 19 are applied to the piezoelectric members 12a and 12b. Can be formed at once.

  At this time, in each of the tools 42a and 42b, a convex portion 46 corresponding to the ink groove 19 is formed by individually performing wire electric discharge machining on the surface layer 44 of polycrystalline diamond. In other words, since the convex portion 46 corresponding to the ink groove 19 may be formed by wire electric discharge machining for each of the tools 42a and 42b, the total length of the wire used as an electrode during electric discharge machining can be kept short. For this reason, the processing accuracy of the convex portions 46 can be maintained satisfactorily, and a plurality of convex portions 46 corresponding to the ink grooves 19 can be accurately formed on the surface layer 44 of polycrystalline diamond.

  Further, the tools 42a and 42b on which the convex portions 46 are formed are brazed to the tool support surface 40 of the base 39 so as to correspond to the positional relationship of the ink grooves 19 between the piezoelectric members 12a and 12b. Therefore, the ink grooves 19 that are shifted by a half pitch between the adjacent piezoelectric members 12a and 12b can be collectively formed with high accuracy by ultrasonic processing.

[Second Embodiment]
FIG. 9 discloses a second embodiment. The second embodiment is different from the first embodiment in matters relating to the pedestal interposed between the tool and the horn. Other configurations are the same as those in the first embodiment. For this reason, in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 9, a pair of pedestals 100 a and 100 b are attached to the lower end of the horn 38 of the machining head 33. The pedestals 100a and 100b have the same shape as each other, and are detachably connected to the lower end of the horn 38 by a known means such as screwing.

  The lower surface of each base 100a, 100b constitutes a flat tool support surface 101. The tool support surfaces 101 of the pedestals 100a and 100b are located on the same plane. The tool support surface 101 enters the inside of the processing tank 34 when the processing head 33 is lowered, and faces the main body 13 of the piezoelectric members 12a and 12b from above.

  The tools 42a and 42b on which the convex portions 46 are formed individually face the piezoelectric members 12a and 12b and are individually pedestal so that the convex portions 46 correspond to the positional relationship of the ink grooves 19 between the piezoelectric members 12a and 12b. It is being fixed to the tool support surface 101 of 100a, 100b.

  In the present embodiment, the laminated plate 45 serving as the foundation of the tools 42a and 42b is fixed to a predetermined position of the tool support surface 101 of each pedestal 100a and 100b by means such as brazing, and then is applied to the surface layer 44 of the laminated plate 45. The convex part 46 is formed by performing wire electric discharge machining.

  In wire electric discharge machining, a plurality of grooves 48 are formed in the surface layer 44 using wires as electrodes. The grooves 48 cross the laminated plate 45 linearly in the width direction and are arranged at intervals in the longitudinal direction of the laminated plate 45. By forming the groove 48 in the surface layer 44, a portion located between the adjacent grooves 48 in the surface layer 44 functions as the convex portion 46. The convex portions 46 are arranged at a pitch P2 corresponding to the ink grooves 19 to be formed. Thereby, the tools 42a and 42b having the convex portions 46 are integrated with the bases 100a and 100b.

  The bases 100a and 100b are attached to the lower end of the horn 38 in a state where the tools 42a and 42b are integrated. At this time, the pedestals 100a and 100b are configured so that the tools 42a and 42b individually face the piezoelectric members 12a and 12b, and the horn 38 so that the convex portion 46 corresponds to the positional relationship of the ink grooves 19 between the piezoelectric members 12a and 12b. It is attached to the lower end.

  In order to form the ink groove 19 in the piezoelectric members 12a and 12b by ultrasonic processing, the piezoelectric members 12a and 12b are immersed in the working fluid L as in the first embodiment. Subsequently, the convex portions 46 of the tools 42a and 42b are individually pressed against the surface 15 of the main body 13 of the piezoelectric members 12a and 12b, and the ultrasonic vibrator 37 is vibrated. The vibration of the ultrasonic vibrator 37 is transmitted to the tools 42a and 42b via the horn 38.

  As a result, the abrasive grains contained in the working fluid L are interposed between the convex portion 46 and the main body 13, and the main body 13 is scraped so as to follow the shape of the convex portion 46 while the abrasive grains become cutting edges. Therefore, a plurality of ink grooves 19 are formed in the body 13 of the pair of piezoelectric members 12a and 12b at a time.

  According to the second embodiment, the convex portion 46 corresponding to the ink groove 19 may be formed by wire electric discharge machining for each of the tools 42a and 42b, so that the total length of the wire used as an electrode during electric discharge machining is kept short. Can do. For this reason, as in the first embodiment, the processing accuracy of the convex portions 46 can be maintained satisfactorily, and the plurality of convex portions 46 corresponding to the ink grooves 19 are accurately formed in the surface layer 44 of polycrystalline diamond. be able to.

  Furthermore, according to the second embodiment, in the bases 100a and 100b to which the tools 42a and 42b are fixed, the convex portions 46 of the tools 42a and 42b correspond to the positional relationship of the ink grooves 19 between the piezoelectric members 12a and 12b. In this way, they are individually attached to the lower end of the horn 38. Therefore, the ink grooves 19 that are shifted by a half pitch between the adjacent piezoelectric members 12a and 12b can be collectively formed with high accuracy by ultrasonic processing.

  The number of tools is not limited to a pair, and can be appropriately changed according to the number of nozzle rows of the inkjet head.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 1 ... Inkjet head, 2 ... Board | substrate, 12a, 12b ... Piezoelectric member, 19 ... Ink groove, 31 ... Ultrasonic processing apparatus, 38 ... Horn, 39, 100a, 100b ... Base, 42a, 42b ... Tool, 43 ... Carbide Alloy substrate, 44 ... surface layer, 45 ... laminate, 46 ... convex portion.

Claims (5)

A plurality of piezoelectric members are arranged on the substrate at intervals, and the positional relationship of the plurality of ink grooves provided in the piezoelectric members is between the adjacent piezoelectric members. An ultrasonic processing apparatus used when manufacturing inkjet heads that are displaced from each other in a direction,
A single pedestal attached to a horn that ultrasonically vibrates vertically,
It is composed of a laminated plate in which a surface layer of polycrystalline diamond is laminated on a cemented carbide substrate, and a plurality of protrusions corresponding to the ink grooves are spaced apart from each other by performing wire electric discharge machining on the surface layer individually. A plurality of tools formed with
The tool is fixed to the lower surface of the base so that the convex portion corresponds to the positional relationship of the ink grooves between the adjacent piezoelectric members, and the convex portion of the tool is opposed to the piezoelectric member. An ultrasonic machining apparatus configured to form the ink groove having the shape following the convex portion in the piezoelectric member at a time by ultrasonically vibrating the tool. A plurality of piezoelectric members arranged on the substrate with a space between each other, and between the adjacent piezoelectric members, the positional relationship of the plurality of ink grooves provided in the piezoelectric members is the longitudinal direction of the piezoelectric members. An ultrasonic processing apparatus used when manufacturing inkjet heads that are displaced from each other in a direction,
A plurality of pedestals that are attached to a horn that ultrasonically vibrates in the vertical direction and that correspond to the piezoelectric member,
It is composed of a laminated plate in which a surface layer of polycrystalline diamond is laminated on a cemented carbide substrate, and a plurality of protrusions corresponding to the ink grooves are spaced apart from each other by performing wire electric discharge machining on the surface layer individually. A plurality of tools formed with
The tools are individually fixed to the lower surface of the base so that the convex portions correspond to the positional relationship of the ink grooves between the adjacent piezoelectric members, and the convex portions of the tools are opposed to the piezoelectric members. An ultrasonic processing apparatus configured to form the ink groove having the shape following the convex portion in the piezoelectric member at a time by ultrasonically vibrating the tool in a state.   The ultrasonic processing apparatus according to claim 1, wherein the pedestal is interposed between the horn and the tool, and is detachably connected to the horn. A plurality of piezoelectric members are arranged on the substrate at intervals, and the positional relationship of the plurality of ink grooves provided in the piezoelectric members is between the adjacent piezoelectric members. A method of manufacturing inkjet heads that are offset from each other in a direction,
Consists of a plurality of laminated plates in which a surface layer of polycrystalline diamond is laminated on a cemented carbide substrate, and by subjecting the surface layer of the laminated plate to wire electric discharge machining individually, the surface layer corresponds to the ink grooves. Prepare a plurality of tools formed with a plurality of convex portions arranged with a space between each other,
The tool is fixed to the lower surface of a single base attached to a horn that ultrasonically vibrates in the vertical direction so that the convex portion of the tool corresponds to the positional relationship of the ink grooves between the adjacent piezoelectric members. ,
The piezoelectric member has a shape following the convex portion by ultrasonically vibrating the tool in a state where a working fluid containing abrasive grains is interposed between the convex portion of the tool and the piezoelectric member. An ink jet head manufacturing method in which ink grooves are formed at a time. A plurality of piezoelectric members are arranged on the substrate at intervals, and the positional relationship of the plurality of ink grooves provided in the piezoelectric members is between the adjacent piezoelectric members. A method of manufacturing inkjet heads that are offset from each other in a direction,
After fixing a plurality of tools in which a surface layer of polycrystalline diamond is laminated on a cemented carbide substrate individually to the lower surfaces of a plurality of pedestals, the surface layer is individually subjected to wire electric discharge machining, whereby the ink is applied to the surface layer. Forming a plurality of protrusions arranged at intervals to correspond to the grooves,
The pedestal is attached to a horn that ultrasonically vibrates in the vertical direction so that the convex portion of the tool corresponds to the positional relationship of the ink grooves between the adjacent piezoelectric members,
The piezoelectric member has a shape following the convex portion by ultrasonically vibrating the tool in a state where a working fluid containing abrasive grains is interposed between the convex portion of the tool and the piezoelectric member. An ink jet head manufacturing method in which ink grooves are formed at a time.

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