JP2014165058A - Light source device, manufacturing method of the same, and projector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device which sufficiently performs heat radiation from a wavelength conversion element and achieves high luminance and reliability even if the light volume of excitation light increases, and to provide a manufacturing method of the light source device.SOLUTION: A light source device includes: a first member; a second member; a heating element which is provided between the first member and the second member and thermally contacts with the first member and the second member; and a spacer which is provided between the first member and the second member.

Description

  The present invention relates to a light source device, a method for manufacturing the light source device, and a projector.

  As a light source device using a wavelength conversion element, Patent Document 1 discloses a light source in which excitation light emitted from an external light source is incident on a wavelength conversion element, and the wavelength conversion element and the excitation light source are physically separated. A device has been proposed. When the amount of excitation light emitted from the external light source is increased, the external light source becomes hot. However, in this configuration, the heat of the external light source is not transmitted to the wavelength conversion element, and the wavelength conversion element is not deteriorated by the heat of the light source.

Japanese Patent No. 4920907

  However, the wavelength conversion element is heated not only by heat directly transmitted from the light source but also by receiving excitation light emitted from the light source. For this reason, if the intensity of the excitation light is too high, the wavelength conversion element is altered due to melting or the like, and there is a problem that the performance required for the light source device cannot be obtained.

  The present invention has been made in view of the above-described problems of the prior art, and even when the amount of excitation light is increased, heat is sufficiently radiated from the wavelength conversion element, resulting in high brightness and excellent reliability. Another object is to provide a light source device and a method of manufacturing such a light source device. It is another object of the present invention to provide a projector with excellent reliability by using such a light source device.

  The light source device of the present invention is provided between the first member, the second member, the first member, and the second member, and the first member and the second member. A heating element in thermal contact, and a spacer provided between the first member and the second member.

  According to this configuration, the heating element is provided between the first member and the second member, and is in thermal contact with each member. Therefore, since the heat generated in the heating element is dissipated to both the first member and the second member, it is possible to efficiently dissipate heat and to prevent the heating element from reaching a high temperature. . Therefore, it is possible to suppress the deterioration of the heating element due to the high temperature, and to obtain a light source device having high luminance and excellent reliability.

The spacer may be softer than the first member.
According to this structure, the below-mentioned manufacturing method which presses a 1st member against a spacer, compresses and deforms a spacer, and makes a 1st member contact | abut to a heat generating body is employable.

The second member may be softer than the spacer.
According to this structure, the below-mentioned manufacturing method which presses a spacer against the 2nd member, compresses and deforms the 2nd member, and makes a 1st member contact | abut to a heat generating body is employable.

The heating element may emit light.
According to this structure, it can be set as the light source device excellent in the heat dissipation from a light emission part.

The heating element may be a phosphor.
According to this configuration, a light source device having excellent heat dissipation from the wavelength conversion element that generates heat by irradiation with excitation light can be obtained.

At least one of the first member and the second member may be transparent.
According to this configuration, since at least one of the first member and the second member is transparent, it can be suitably used, for example, as a reflective or transmissive wavelength conversion element.

The heating element may include a reflective film that reflects the light.
According to this configuration, since the portion of the heating element provided with the reflective film reflects light, the light emitted from the heating element is emitted only from the portion of the heating element where the reflective film is not provided. Thereby, the light emitted from the heating element is not dispersed, and the light with high brightness is emitted only in a specific direction. Therefore, a light source device having high luminance and excellent reliability can be obtained.

The heating element may be enclosed and sealed with the first member, the second member, and the spacer.
According to this configuration, since the heat generating element is hermetically sealed, the reflection film covering the periphery of the heat generating element is suppressed from being exposed to the outside air. Therefore, it can suppress that a reflective film degrades by oxidation etc., and can suppress that the conversion light which a heat generating body emits disperse | distributes, and a brightness | luminance falls. Therefore, a light source device having high luminance and excellent reliability can be obtained.

The heating element may have a truncated cone shape that tapers from the first member side toward the second member side.
According to this configuration, since the side surface of the heating element is an inclined surface, when the heating element is viewed from the second member side, the surface and the side surface that come into contact with the second member of the heating element in plan view Can be viewed at the same time. Therefore, when the reflective film is formed around the heat generating element other than the surface in contact with the first member of the heat generating element, the material of the reflective film is vapor-deposited from the second member side of the heat generating element. The reflective film can be simultaneously formed on the surface and the side surface of the heating element that contacts the second member. Therefore, the formation of the reflective film is simple.

The first member may be a plano-convex lens shape.
When the first member has a flat plate shape or the like, the light incident on the first member is also emitted from the side end surface of the first member by reflecting at the interface between the first member and air. The Therefore, light is emitted in a direction other than the direction from the heating element toward the first member (in front of the heating element), and the luminance of the light emitted in front of the heating element is reduced.
On the other hand, when the first member has a plano-convex lens shape, the light incident on the first member and emitted from the heating element is reflected at the interface between the first member and air. There is no, and it is injected in front of a heating element.
Therefore, according to this configuration, since the light emitted from the heating element can be emitted in front of the heating element, a light source device having high luminance and excellent reliability can be obtained.

  The method of manufacturing a light source device according to the present invention is a method of manufacturing a light source device in which a heating element is disposed between a first member and a second member, on the surface on one side of the second member. A step of providing a spacer thicker than the heating element, a step of installing the heating element on the surface of the one side of the second member, and the first member From the side, contacting the spacer, pressing the first member against the spacer, and deforming at least one of the spacer and the second member, the first member is And a step of contacting the heating element.

  According to this configuration, the spacer and the heating element are installed on one surface of the second member, and the first member is brought into contact with the spacer and pressed, thereby the spacer and the second member. At least one of them is deformed. Thereby, a 1st member is made to approach a heat generating body. Since the pressing is performed until the first member and the heating element come into contact with each other, as a result, until the one surface of the spacer and the one surface of the heating element are flush with each other, At least one of the members is deformed. Thereby, the surface of the one side of a heat generating body and the surface of the one side of a spacer can be made to closely_contact | adhere with respect to the surface on the opposite side to the one side of a 1st member. Therefore, the thermal resistance between the heating element and the first member and between the first member and the spacer can be reduced. Accordingly, since heat efficiently moves from the heating element to the first member and from the first member to the spacer, a light source device having excellent cooling performance of the heating element can be obtained.

The first member may be brought into contact with the heating element by compressing and deforming the spacer.
According to this configuration, the adhesion between the first member and the spacer can be improved.

The first member may be brought into contact with the heating element by compressing and deforming the second member.
According to this configuration, the adhesion between the spacer and the second member can be improved.

The projector of the present invention uses the light source device of the present invention.
According to this configuration, a highly reliable projector can be obtained.

It is a figure which shows the light source device of 1st Embodiment. (A) is a top view, (b) is AA sectional drawing in (a). It is sectional drawing which shows the manufacturing method of the light source device of 1st Embodiment. It is sectional drawing which shows the modification of the light source device of 1st Embodiment. It is sectional drawing which shows the light source device of 2nd Embodiment. It is sectional drawing which shows the light source device of 3rd Embodiment. It is a schematic diagram which shows 1st Embodiment of a projector. It is a schematic diagram which shows 2nd Embodiment of a projector.

Hereinafter, a light source device, a method for manufacturing the light source device, and a projector according to an embodiment of the invention will be described with reference to the drawings.
The scope of the present invention is not limited to the following embodiment, and can be arbitrarily changed within the scope of the technical idea of the present invention. Moreover, in the following drawings, in order to make each structure easy to understand, the actual structure may be different from the scale, number, or the like in each structure.

[First Embodiment]
(Light source device)
FIG. 1 is a diagram showing a light source device 1 of the present embodiment. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along line AA in FIG.
As shown in FIG. 1, the light source device 1 of the present embodiment includes a plano-convex lens (first member) 11, a substrate (second member) 12, a spacer 13, a light emitter (heating element) 14, It has.

  The substrate 12 is a flat plate material, and the shape in plan view is not particularly limited, and may be rectangular or circular (rectangular in FIG. 1A). The size of the substrate 12 is not particularly limited as long as the spacer 13 and the heating element 14 can be installed on the upper surface (one surface) 12a of the substrate 12. The material of the substrate 12 is not particularly limited as long as it has a low thermal resistance and is harder than the spacer 13. For example, Al or Cu can be used.

The spacer 13 is bonded to the upper surface 12a of the substrate 12 as shown in FIG. A through hole 13 a that penetrates the spacer 13 in the thickness direction is formed in the central portion of the spacer 13 in plan view. A concave portion 13b is formed on the upper surface 13d of the spacer 13 on the plano-convex lens 11 side.
The thickness H1 of the spacer 13 is preferably as thin as possible within a range thicker than the thickness H3 of the light emitter 14. This is because it is easy to compress and deform the spacer 13 by pressing the plano-convex lens 11 in the manufacturing method of the present embodiment described later. Although the thickness H1 of the spacer 13 depends on the thickness H3 of the light emitter 14, it is, for example, 30 to 500 μm.
The material of the spacer 13 is not particularly limited as long as it has a low thermal resistance and is softer than the plano-convex lens 11. For example, oxygen-free copper or pure aluminum can be used.

  The shape of the through hole 13a of the spacer 13 is not particularly limited. For example, the planar view shape may be a rectangular shape or a circular shape (in FIG. 1A, a rectangular shape). The size of the through hole 13a is preferably smaller within a range in which the light emitter 14 can be accommodated. This is because the smaller the through hole 13a is, the shorter the distance between the light emitter 14 and the spacer 13 is. As a result, the heat of the light emitter 14 is more easily transmitted to the spacer 13 through the plano-convex lens 11.

  The concave portion 13b of the spacer 13 has a circular shape in plan view and a diameter that is substantially the same as the diameter of the flat surface 11a of the plano-convex lens 11. The depth of the recess 13b is the same as the difference between the thickness H1 of the spacer 13 and the thickness H3 of the light emitter 14. The thickness H2 of the spacer 13 in contact with the plano-convex lens 11 is the same as the thickness H3 of the light emitter 14. As shown in FIG. 1B, the plano-convex lens 11 is fitted into the recess 13b. The height of the bottom surface 13c of the recess 13b from the upper surface 12a of the substrate 12 is the same as the height from the upper surface 12a of the substrate 12 on the surface (upper surface 14a) of the light emitter 14 in contact with the plano-convex lens 11.

  The light emitter 14 may be a light emitting element that emits light, or a phosphor that emits light upon receiving excitation light. An example of the light emitting element is an LED. Examples of the phosphor include YAG (yttrium, aluminum, garnet) phosphors.

The light emitter 14 is provided so as to be surrounded by the plano-convex lens 11, the spacer 13, and the substrate 12, and is in thermal contact with the plano-convex lens 11 and the substrate 12, respectively.
The light emitted from the light emitter 14 is transmitted between the upper surface 14a of the light emitter 14 and the flat surface 11a of the plano-convex lens 11 so that the light emitted from the light emitter 14 is efficiently taken into the plano-convex lens 11. A filler 19 is provided. The filler 19 also functions as an adhesive for adhering the light emitter 14 to the plano-convex lens 11. However, the filler 19 is not necessarily provided. The surface (bottom surface 14 b) of the light emitting body 14 that comes into contact with the substrate 12 is bonded to the upper surface 12 a of the substrate 12.

The light emitter 14 has a quadrangular frustum shape that tapers from the upper surface 14a toward the bottom surface 14b. The planar view shape of the light emitter 14 is not particularly limited, and may be a rectangular shape or a circular shape (rectangular shape in FIG. 1A).
The thickness H3 of the luminous body 14 is thinner than the thickness H1 of the spacer 13, and is 20 to 490 μm, for example.

  The light-emitting body 14 is provided with a reflective film 15a on the surface (the bottom surface 14b and the side surface) excluding the top surface 14a in contact with the plano-convex lens 11. The reflective film 15a is a thin film that reflects the light emitted from the light emitter 14. Since the reflective film 15a is also formed on the bottom surface 14b of the light emitter 14 in contact with the substrate 12, it is preferable that the material of the reflective film 15a has a high thermal conductivity. As a material of the reflective film 15a, for example, silver (Ag) can be used. The method for forming the reflective film 15a is not particularly limited, and for example, a vapor deposition method can be used.

A sealed space 17 sealed with a plano-convex lens 11, a substrate 12, and a spacer 13 is formed around the light emitter 14.
The sealed space 17 is filled with an inert gas. For example, nitrogen (N ₂ ) can be selected as the inert gas.

The plano-convex lens 11 is a convex lens in which one surface has a curved surface shape that is convex outward in the optical axis direction, and the other surface is a flat surface 11a.
The plano-convex lens 11 is fixed by fitting the flat surface 11 a side into the recess 13 b of the spacer 13. The flat surface 11 a of the plano-convex lens 11 is bonded to the bottom surface 13 c of the concave portion 13 b of the spacer 13 and the upper surface 14 a of the light emitter 14.
The material of the plano-convex lens 11 is not particularly limited as long as it is harder than the spacer 13 and transparent. For example, glass or quartz can be used.

The heat sink 16 a is bonded to the back surface 12 b of the substrate 12. The heat sink 16a includes a substrate and a plurality of flat fins. The plurality of fins are arranged on the surface of the substrate of the heat sink 16a opposite to the side where the heat sink 16a is bonded to the substrate 12 so as to be substantially equidistant. The material of the heat sink 16a is not particularly limited as long as it can dissipate the heat of the substrate 12. For example, aluminum can be used.
The heat sink 16a is not limited to that described above, and may be any other known heat sink. For example, a heat sink in which a plurality of columnar fins are provided on the substrate may be used.

In the light source device 1 of the present embodiment, the light emitted from the light emitter 14 is reflected by the bottom surface 14b and the reflective film 15a provided on the side surface of the light emitter 14, and thus the light emitter 14 without the reflective film 15a. Light is emitted only from the upper surface 14a. Light emitted from the upper surface 14a of the light emitter 14 passes through the plano-convex lens 11 and is emitted to the outside.
Thereby, the light source device 1 of this embodiment can be suitably used as, for example, illumination or a light source of a projector when a light emitting element is used as the light emitter 14.
In the light source device 1 of this embodiment, when a phosphor is used as the light emitter 14, the excitation light is received from the plano-convex lens 11 side, and the fluorescence having the converted excitation light wavelength is emitted to the plano-convex lens side. Therefore, it can be suitably used as a reflective wavelength conversion element. Such a wavelength conversion element can be used for a projector etc., for example.

(Method for manufacturing light source device)
FIG. 2 is a diagram illustrating a method for manufacturing the light source device 1.
The manufacturing method of the light source device 1 in the present embodiment includes a spacer installation step S11, a light emitter installation step S12, a plano-convex lens contact step S13, and a compression step S14, as shown in FIG.

The spacer installation step S11 is a step of installing the spacer 13 by adhering the back surface of the spacer 13 to the upper surface 12a of the substrate 12, as shown in FIG.
The method for adhering the spacer 13 to the upper surface 12a of the substrate 12 is not particularly limited. For example, a method using an adhesive or a pressure bonding method for joining the contact surfaces by applying pressure can be selected. It is preferable to select a material for the adhesive and the spacer so that the thermal resistance between the substrate 12 and the spacer 13 can be lowered.

Next, in the light emitter installation step S12, as shown in FIG. 2B, the light emitter 14 is accommodated in the through hole 13a of the spacer 13, and the bottom surface 14b of the light emitter 14 is bonded to the upper surface 12a of the substrate 12. In this step, the light emitter 14 is installed.
The method for adhering the light emitter 14 to the upper surface 12a of the substrate 12 is not particularly limited, and for example, an adhering method using Ag paste as an adhesive can be selected. It is preferable to select a method that can reduce the thermal resistance between the light emitter 14 and the substrate 12.

Next, the plano-convex lens contact step S13 is a step of bringing the flat surface 11a of the plano-convex lens 11 into contact with the spacer 13, as shown in FIG.
The plano-convex lens contact step S13 is performed in an inert gas atmosphere. This is because the space 17 formed in the compression step S14 described later is filled with an inert gas. As described above, for example, nitrogen (N ₂ ) can be used as the inert gas.

The flat surface 11 a of the plano-convex lens 11 is brought into contact with the upper surface 13 d of the spacer 13 so as to close the through hole 13 a of the spacer 13. A transparent adhesive is applied in advance to the flat surface 11 a of the plano-convex lens 11, and the flat surface 11 a of the plano-convex lens 11 and the upper surface 13 d of the spacer 13 are bonded.
Thereby, the light emitter 14 is enclosed in a space surrounded by the substrate 12, the spacer 13, and the plano-convex lens 11. Since the thickness H1 of the spacer 13 is larger than the thickness H3 of the light emitter 14, a gap 18 is formed between the plano-convex lens 11 and the light emitter 14 at this point.

  Next, the compression step S14 is a step of pressing the plano-convex lens 11 and compressing the spacer 13 as shown in FIG.

  By pressing the plano-convex lens 11 made of a material harder than the spacer 13 toward the substrate 12, the portion of the upper surface 13d of the spacer 13 that is in contact with the plano-convex lens 11 is compressed and deformed. Partially sink. Thereby, the plano-convex lens 11 approaches the light emitter 14. The plano-convex lens 11 moves by the distance of the gap 18, and the pressing is stopped at a position where the flat surface 11 a of the plano-convex lens 11 contacts the upper surface 14 a of the light emitter 14.

  Through the above process, the recess 13b is formed on the upper surface 13d of the spacer 13, and the plano-convex lens 11 is fixed in the recess 13b. Further, a sealed space 17 is formed which is sealed by the plano-convex lens 11, the substrate 12, and the spacer 13 and filled with an inert gas.

  Through the above steps, the light source device 1 is obtained in which the upper surface 14a of the light emitter 14 is in thermal contact with the flat surface 11a of the plano-convex lens 11, and the bottom surface 14b of the light emitter 14 is in thermal contact with the upper surface 12a of the substrate 12. It is done.

According to the light source device 1 of the present embodiment described in detail above, since the bottom surface 14b of the light emitter 14 is in thermal contact with the substrate 12, the heat of the light emitter 14 is transferred from the bottom surface 14b to the substrate 12. The heat is dissipated by being sequentially transmitted from the substrate 12 to the heat sink 16a. In addition, since the upper surface 14a of the light emitter 14 is in thermal contact with the plano-convex lens 11, the heat of the light emitter 14 is transferred from the upper surface 14a to the plano-convex lens 11, from the plano-convex lens 11 to the spacer 13, and from the spacer 13 to the substrate. 12, heat is also dissipated by being sequentially transmitted from the substrate 12 to the heat sink 16a.
Therefore, since heat can be radiated from both the upper surface 14a side and the bottom surface 14b side of the light emitter 14, the light emitter 14 can be sufficiently cooled, and the light emitter 14 can be prevented from being altered by heat, with high brightness and reliability. An excellent light source device 1 is obtained.

In particular, heat radiation from the upper surface 14a side of the light emitter 14 is effective for ensuring reliability. This is because the light emitting body 14 is easily deteriorated due to high temperature on the side from which light is emitted (the upper surface 14a side), and therefore, the light emitting body 14 is effectively suppressed from being deteriorated by cooling the surface on which light is emitted. This is because it can.
Normally, such a light source device cannot provide a heat sink on the light emitting side because of the light emitting function, and it is difficult to sufficiently cool the light emitter. On the other hand, the light source device 1 according to the present embodiment has a structure that can dissipate heat from the side from which light is emitted, and therefore has a higher light-emitting body cooling performance than a conventional light source device.

  Further, according to the method of manufacturing the light source device of the present embodiment, the spacer 13 and the light emitter 14 are installed on the upper surface of the substrate 12, and the plano-convex lens 11 is pressed against the spacer 13 to press the spacer 13. Compress and deform. Thereby, the upper surface 14a of the light emitter 14 and the bottom surface 13c of the concave portion 13b of the spacer 13 can be closely adhered to the flat surface 11a of the plano-convex lens 11. Therefore, the thermal resistance between the light emitter 14 and the plano-convex lens 11 and between the plano-convex lens 11 and the spacer 13 can be reduced. Therefore, since heat efficiently moves from the light emitter 14 to the plano-convex lens 11 and from the plano-convex lens 11 to the spacer 13, the light source device 1 having excellent cooling performance of the light emitter 14 can be obtained.

  In the present embodiment, since the spacer 13 is made of a softer material than the plano-convex lens 11, it is easy to compress and deform the spacer 13 in the compression step S14.

  In the present embodiment, since the reflective film 15a is provided on the surface other than the upper surface 14a of the light emitter 14, the light emitted from the light emitter 14 is only the upper surface 14a of the light emitter 14 on which the reflective film 15a is not formed. Is injected from. Thereby, the light emitted from the light emitter 14 is not dispersed, and light having high luminance is emitted only in a specific direction. Therefore, the light source device 1 having high luminance and excellent reliability can be obtained.

  In the present embodiment, the sealed space 17 is filled with an inert gas. Therefore, the reflective film 15a formed on the side surface of the light emitter 14 that is in contact with the sealed space 17 can be prevented from being exposed to air. Therefore, for example, it is possible to prevent the reflection performance of the reflection film 15a from being deteriorated when the reflection film 15a made of Ag is exposed to air and oxidized. As a result, it is possible to suppress a decrease in luminance of emitted light due to dispersion of light emitted from the light emitter 14.

  Further, in the present embodiment, since the light emitter 14 has a quadrangular pyramid shape, the side surface is an inclined surface. When the light emitter 14 is viewed from the bottom surface 14b side, the light emitter 14 has a plan view. It is the shape which can visually recognize the bottom face 14b and a side surface simultaneously. Therefore, when the reflective film 15a is formed around the light emitter 14 other than the upper surface 14a of the light emitter 14, the material of the reflective film 15a is deposited from the side of the bottom surface 14b, so that the bottom surface 14b and the side surfaces of the light emitter 14 are formed. At the same time, the reflective film 15a can be formed. Therefore, formation of the reflective film 15a is simple.

Further, in the present embodiment, since the plano-convex lens 11 is used, the light emitted from the light emitter 14 incident on the plano-convex lens 11 is not reflected at the interface between the plano-convex lens 11 and the air, and is emitted. It is injected above the body 14.
On the other hand, instead of the plano-convex lens 11, for example, when a plate-like member is used, the light incident on the member is reflected at the interface between the plate-like member and air, so that the plate-like member It is also injected from the side end face. For this reason, light is emitted in a direction other than the direction from the light emitter 14 toward the plate-like member (above the light emitter 14), and the brightness of the light emitted above the light emitter 14 is reduced.
Therefore, in the present embodiment, since the light emitted from the light emitter 14 is emitted above the light emitter 14, the light source device 1 having high luminance and excellent reliability can be obtained.

  In the present embodiment, the following configuration can also be adopted.

  The light emitter installation step S12 may be performed before the spacer installation step S11.

  The plano-convex lens contact step S13 and the compression step S14 may be performed in a vacuum.

[Modification of First Embodiment]
(Light source device)
FIG. 3 is a cross-sectional view showing a light source device 1A according to this modification.
The light source device 1 </ b> A of the present modification is a light source device in which the plano-convex lens 11 is in contact with the light emitter 14 because the lower portion of the spacer 37 is buried in the substrate 38.
As shown in FIG. 3, this modification includes a plano-convex lens 11, a substrate 38, a spacer 37, and a light emitter 14.

  The substrate 38 is a flat plate material, and the shape in plan view is not particularly limited, and may be rectangular or circular. The size of the substrate 38 is not particularly limited as long as the spacer 37 and the light emitter 14 can be installed on the upper surface 38a. A recess 38 b into which the lower part of the spacer 37 is fitted is formed on the upper surface 38 a of the substrate 38. The shape and size of the recess 38 b are substantially the same as the planar view shape of the spacer 37. The depth of the recess 38b is the same as the difference between the thickness H4 of the spacer 37 and the thickness H3 of the light emitter 14. A heat sink 16 a is bonded to the back surface 38 c of the substrate 38. The material of the substrate 38 is not particularly limited as long as the material is softer than the spacer 37. For example, oxygen-free copper or pure aluminum can be used.

  The spacer 37 is fitted and fixed in the recess 38 b of the substrate 38. A through hole 37 a is formed in the upper surface 37 d of the spacer 37 so as to penetrate the light emitter 14 in the thickness direction. The spacer 37 is partially buried in the substrate 38 by the depth of the recess 38b. Therefore, the distance H5 between the upper surface 38a of the substrate 38 and the upper surface 37d of the spacer 37 is the same as the thickness 14a of the light emitter 14, and the upper surface 37d of the spacer 37 and the upper surface 14a of the light emitter 14 are flush with each other. Yes. Thereby, the upper surface 14a of the light emitter 14 and the upper surface 37d of the spacer 37 are adhered to the flat surface 11a of the plano-convex lens 11 with high accuracy. The material of the spacer 37 is not particularly limited as long as the material is harder than the substrate 38. For example, Al or Cu can be used.

(Method for manufacturing light source device)
The manufacturing method of the light source device 1A of the present modification is a manufacturing method of the light source device when the substrate 38 is deformed instead of the spacer 37 in the compression step.
The manufacturing method of the light source device 1A of the present modification includes a spacer installation process, a light emitter installation process, a plano-convex lens contact process, and a compression process.

  The spacer installation process, the light emitter installation process, and the plano-convex lens contact process are the same as the spacer installation process S11, the light emitter installation process S12, and the plano-convex lens contact process S13 in the first embodiment, respectively.

The compression process is a process of pressing the spacer 37 and compressing the substrate 38.
The compression step is performed under an inert gas atmosphere.

  By pressing a spacer 37 made of a material harder than the substrate 38 toward the substrate 38, a portion of the upper surface 38a of the substrate 38 which is in contact with the spacer 38 is compressed and deformed, and the substrate 38 is partially deformed. To sink into. As a result, the lower portion of the spacer 37 is buried in the substrate 38, and the plano-convex lens 11 bonded to the upper surface 37d of the spacer 37 approaches the light emitter 14. The spacer 37 is pressed until the flat surface 11 a of the plano-convex lens 11 comes into contact with the upper surface 14 a of the light emitter 14.

  Through the above steps, a recess 38b is formed on the upper surface 38a of the substrate 38, and the spacer 37 is fixed in the recess 38b. The height of the upper surface 37 d of the spacer 37 from the upper surface 38 a of the substrate 38 is the same as the height of the upper surface 14 a of the light emitter 14 from the upper surface 38 a of the substrate 38.

  Through the above steps, the light source device 1A in which the upper surface 14a of the light emitter 14 is in thermal contact with the flat surface 11a of the plano-convex lens 11 and the bottom surface 14b of the light emitter 14 is in thermal contact with the upper surface 38a of the substrate 38 is obtained. It is done.

  According to this modification, the lower portion of the spacer 37 is buried in the substrate 38 by pressing the spacer 37 and compressing and deforming the substrate 38. Therefore, even if there is a dimensional error between the thickness H4 of the spacer 37 and the thickness H3 of the light emitter 14, the substrate 38 is compressed and deformed at the time of manufacture, and the lower portion of the spacer 37 is buried, so that the upper surface 38a of the substrate 38 is buried. The distance H5 to the upper surface 37d of the spacer 37 can be adjusted to the thickness H3 of the light emitter 14.

  In the present modification, the substrate 38 is made of a softer material than the spacer 37, so that it is easy to compress and deform the substrate 38 in the compression process.

  In this modification, the following configuration can also be adopted.

  In the compression step, the spacer 37 may be pressed through the plano-convex lens 11 or both the plano-convex lens 11 and the spacer 37 may be pressed.

  In the compression step, the substrate 38 may be compressed and deformed, and the spacer 37 may be compressed and deformed.

[Second Embodiment]
(Light source device)
The light source device of this embodiment uses a support member in which these are integrated instead of the substrate 12 and the spacer 13 in the first embodiment. In addition, about the component similar to the said embodiment, the code | symbol similar to the said embodiment is attached | subjected suitably, and the description is simplified or abbreviate | omitted.

4A and 4B are diagrams showing the present embodiment. FIG. 4A is a cross-sectional view showing the manufacturing process of the present embodiment, and FIG. 4B is a cross-sectional view showing the light source device 2 of the present embodiment. is there.
As shown in FIG. 4B, the light source device 2 of the present embodiment includes a plano-convex lens 11, a support member 45, and a light emitter 14.

The support member 45 is a substantially plate-shaped member. On the upper surface 45f of the support member 45 on the plano-convex lens 11 side, a first recess 45a that houses the light emitter 14, and a second recess 45b that is formed around the first recess 45a and into which the plano-convex lens 11 is fitted. And are formed. A heat sink 16 a is bonded to the back surface 45 c of the support member 45.
The depth D1 of the first recess 45a is deeper than the thickness H3 of the light emitter 14, as shown in FIG. The plan view shape of the first recess 45a is not particularly limited as long as the light emitter 14 can be installed. For example, the first recess 45a may be rectangular or circular.

  The second recess 45b has a circular shape in plan view and a diameter substantially the same as the diameter of the flat surface 11a of the plano-convex lens 11. The depth of the second recess 45b is the same as the difference between the depth D1 of the first recess 45a and the thickness H3 of the light emitter 14. The depth D2 of the bottom surface 45e from the bottom surface 45d is the same as the thickness H3 of the light emitter 14. Therefore, the height from the bottom surface 45e of the bottom surface 45d of the second recess 45b is the same as the height from the bottom surface 45e of the top surface 14a of the light emitter 14.

The upper part 46 of the support member 45 corresponds to the spacer 13 of the first embodiment, and the lower part 47 of the support member 45 corresponds to the substrate 12 of the first embodiment.
The material of the support member 45 is not particularly limited as long as the material is softer than the plano-convex lens 11. For example, oxygen-free copper or pure aluminum can be used.

(Method for manufacturing light source device)
The manufacturing method of the light source device 2 of this embodiment is a manufacturing method of the light source device when the spacer installation step S11 in the first embodiment is a recess forming step.
The manufacturing method of the light source device 2 of this embodiment has a recessed part formation process, a light-emitting body installation process, a plano-convex lens contact process, and a compression process.

The recess forming step corresponds to the spacer installation step S11 in the first embodiment, and is a step of forming the first recess 45a on the upper surface 45f of the support member 45.
The method for forming the first recess 45a is not particularly limited, and for example, press working can be used. As shown in FIG. 4A, the depth D1 of the first recess 45a is deeper than the thickness H3 of the light emitter 14. The depth D1 of the first recess 45a is preferably as shallow as possible within a range deeper than the thickness H3 of the light emitter 14. This is because it is easy to compress and deform the support member 45 by pressing the plano-convex lens 11 in the compression step described later. The depth D1 of the first recess 45a is, for example, 30 to 500 μm although it depends on the thickness H3 of the light emitter 14. The size of the first recess 45a is not particularly limited as long as the light emitter 14 can be accommodated. The shape of the first recess 45a may be, for example, a rectangular shape or a circular shape.
Through the above steps, the recess 45a is formed, and the upper portion 46 and the lower portion 47 are formed.

  Next, in the light emitter installation step, the light emitter 14 is installed by adhering the bottom surface 14b of the light emitter 14 to the bottom surface 45e of the first recess 45a in the same manner as the light emitter installation step S12 of the first embodiment. It is a process.

  Next, the plano-convex lens contact step is a step of bringing the flat surface 11a of the plano-convex lens 11 into contact with the upper surface 45f of the support member 45 in the same manner as the plano-convex lens contact step S13 of the first embodiment.

Next, the compression step is a step of pressing the plano-convex lens 11 and compressing the support member 45 in the same manner as the compression step S14 of the first embodiment.
By pressing the plano-convex lens 11 made of a material harder than the support member 45 toward the support member 45, a portion of the upper surface 45f of the support member 45 that is in contact with the plano-convex lens 11 is compressed and deformed. The support member 45 is partially depressed. Thereby, the plano-convex lens 11 approaches the light emitter 14. The position where the plano-convex lens 11 is moved by the difference between the depth D1 of the first recess 45a and the thickness H3 of the light emitter 14, and the flat surface 11a of the plano-convex lens 11 is in contact with the upper surface 14a of the light emitter 14. Stop pressing.

  Through the above process, the second recess 45b is formed on the upper surface 45f of the support member 45, and the plano-convex lens 11 is fixed in the second recess 45b.

  Through the above steps, the top surface 14a of the light emitter 14 is in thermal contact with the flat surface 11a of the plano-convex lens 11, and the bottom surface 14b of the light emitter 14 is in thermal contact with the bottom surface 45e of the first recess of the support member 45. The light source device 2 is obtained.

  According to the light source device of the present embodiment, the spacer 13 and the substrate 12 in the first embodiment are integrated. Therefore, the thermal resistance between the spacer (upper part 46) and the substrate (lower part 47) is low, and the heat is efficiently transferred, so that a light source device with excellent cooling performance can be obtained.

  Moreover, according to the manufacturing method of the light source device of this embodiment, since the supporting member 45 which serves as the board | substrate 12 and the spacer 13 can be formed by processing a single member, it is simple.

  As in the light source device 1 of the first embodiment shown in FIG. 1, a filler that transmits light emitted from the light emitter 14 is provided between the upper surface 14 a of the light emitter 14 and the flat surface 11 a of the plano-convex lens 11. 19 may be provided.

[Third Embodiment]
The light source device of the present embodiment uses a transparent substrate instead of the substrate 12 in the first embodiment. In addition, about the component similar to the said embodiment, the code | symbol similar to the said embodiment is attached | subjected suitably, and the description is simplified or abbreviate | omitted.

FIG. 5 is a diagram showing the light source device 3 of the present embodiment.
As illustrated in FIG. 5, the light source device 3 of the present embodiment includes a plano-convex lens 11, a spacer 13, a light emitter 39, and a transparent substrate 61.

  The transparent substrate 61 is a transparent flat plate member. The material of the transparent substrate 61 is not particularly limited as long as it is harder than the spacer 13 and transparent. For example, glass or quartz can be used. A heat sink 16b is bonded to the back surface 61a of the transparent substrate 61.

  The light emitter 39 has a quadrangular frustum shape that tapers from the upper surface 39a toward the bottom surface 39b. The planar view shape of the light emitter 39 is not particularly limited, and may be rectangular or circular. The upper surface 39 a of the light emitter 39 is bonded to the flat surface 11 a of the plano-convex lens 11. The bottom surface 39 b of the light emitter 39 is bonded to the top surface of the transparent substrate 61.

A reflective film 15 b is formed on the side surface of the light emitter 39, and a dichroic mirror 62 is formed on the bottom surface 39 b of the light emitter 39.
The reflective film 15b is the same as the reflective film 15a in the first embodiment.
The dichroic mirror 62 reflects light emitted from the light emitter 39 and transmits specific light having a wavelength different from that of the light emitted from the light emitter 39. As the dichroic mirror 62, for example, one that transmits blue light and reflects red light and green light can be selected.

The heat sink 16b is formed with a through hole 16c penetrating in the direction in which the excitation light Le passes in the center so as not to prevent the excitation light Le from entering the light emitter 39 through the transparent substrate 61.
The heat sink 16b may be the same as the heat sink 16a in the first embodiment and having a through hole 16c.

  According to the light source device of the present embodiment, both the plano-convex lens 11 and the transparent substrate 61 sandwiching the light emitter 39 are transparent. Therefore, when a phosphor is used as the illuminant 39, as shown in FIG. 5, the converted light converted into the wavelength by the illuminant 39 when the excitation light Le enters the illuminant 39 from the transparent substrate 61 side. Lc is emitted from the plano-convex lens 11 side. Thereby, it can be set as a transmission type wavelength conversion element. In this case, the dichroic mirror 62 has a property of transmitting the excitation light Le but reflecting the converted light Lc.

  As in the light source device 1 of the first embodiment shown in FIG. 1, a filler that transmits light emitted from the light emitter 39 is provided between the upper surface 39 a of the light emitter 39 and the flat surface 11 a of the plano-convex lens 11. 19 may be provided.

[First embodiment of projector]
The present embodiment is a projector using a wavelength conversion element 300a (light source device 1) using a phosphor 310a as the light emitter 14 as a part of the light source device. In addition, about the component similar to said embodiment, the code | symbol similar to said embodiment is attached | subjected suitably, and the description is simplified or abbreviate | omitted.

FIG. 6 is a schematic diagram showing an optical system of the projector 1000a of this embodiment.
The projector 1000a includes a light source device 100a, a color separation light guide optical system 200, a light modulation device 400R, a light modulation device 400G, a light modulation device 400B, a cross dichroic prism 500, and a projection optical system 600. ing.

  The light source device 100a includes a first light source 50, a first collimator lens array 53, a first condenser lens 60, a rotating diffusion plate 70 as a diffusion member, a first pickup optical system 80, a second light source 30, and a second collimator. The lens array 33, the second condenser lens 20, the first collimating lens 21, the dichroic mirror 22, the wavelength conversion optical system 320a, the fly eye integrator 90, the polarization conversion element 93, and the second collimating lens 94 are provided.

  The first light source 50 is a light source array including a first base 51 and a plurality of first solid state light emitting elements 52 arranged side by side on the first base 51. The first solid state light emitting device 52 is a light source that emits blue light that can be reflected by the dichroic mirror 22. In the present embodiment, the first solid-state light emitting element 52 is a semiconductor laser that emits blue laser light (peak of emission intensity: around 450 nm), but the first solid-state light emitting element 52 is reflected by the dichroic mirror 22. As long as the light has a wavelength that can be emitted, light having a peak wavelength other than 450 nm may be emitted.

  The first collimator lens array 53 includes a plurality of first microlenses 530 corresponding to the first solid-state light emitting elements 52 on a one-to-one basis. The plurality of first microlenses 530 are arranged side by side on the first base 51. Each first microlens 530 is installed on the optical axis of the blue light emitted from the corresponding first solid-state light emitting element 52 and collimates the blue light. The blue light emitted from the first collimator lens array 53 is condensed by the first condenser lens 60 made of a convex lens. A first condensing optical system 55 that condenses a plurality of blue lights emitted from the first light source 50 is formed by the first collimator lens array 53 and the first condensing lens 60.

  The rotation diffusion plate 70 as a diffusion member is a transmission type rotation diffusion plate that diffuses incident blue light and emits it from a surface opposite to the incident side. The rotary diffusion plate 70 includes a substrate 71 as a diffusion member that is rotationally driven by a motor 73. As the substrate 71, a known diffusion plate, for example, polished glass, a holographic diffuser, a blasted surface of a transparent substrate, a scattering material such as beads dispersed in the transparent substrate, Those that scatter light can be used. In this embodiment, a disc is used as the substrate 71, but the shape of the substrate 71 is not limited to a disc. In the rotating diffusion plate 70, by rotating the substrate 71, a region (light irradiation region) S1 irradiated with blue light is drawn so that a portion irradiated with blue light (irradiated portion) draws a circle. Move relatively.

  The light emitted from the rotary diffusion plate 70 is collimated by the first pickup optical system 80 and enters the dichroic mirror 22. The dichroic mirror 22 is disposed so as to face the light emitting surface of the first light source 50 so that the surface thereof forms an angle of about 45 ° with respect to the light emitting surface of the first light source 50. The dichroic mirror 22 bends blue light incident from the first pickup optical system 80 by 90 ° and reflects it to the fly eye integrator 90 side.

  The first pickup optical system 80 is disposed on the optical path of light between the dichroic mirror 22 and the rotary diffusion plate 70. The first pickup optical system 80 includes a first lens 81 as a pickup lens into which light from the rotating diffusion plate 70 enters and a second lens 82 that collimates the light emitted from the first lens 81. Has been. The first lens 81 is, for example, a plano-convex lens having a flat light incident surface and a convex light emission surface, and the second lens 82 is, for example, a convex lens. The first pickup optical system 80 causes the light from the rotating diffusion plate 70 to enter the dichroic mirror 22 in a substantially parallel state.

  In the first pickup optical system 80, the refractive index and shape of the lens to be used are determined according to the spread of the blue light emitted from the rotary diffusion plate 70. Further, the number of lenses is not limited to two, and may be one or more than two.

  The second light source 30 includes a second base 31 and a plurality of second solid state light emitting elements 32 arranged side by side on the second base 31. The second solid-state light emitting element 32 is a light source that emits excitation light that excites the phosphor 310a provided in the wavelength conversion element 300a. In the present embodiment, the second solid-state light emitting element 32 is a semiconductor laser that emits blue laser light (peak of emission intensity: around 450 nm) as excitation light, but the second solid-state light emitting element 32 is a phosphor 310a. As long as the light has a wavelength that can excite the light, it may emit light having a peak wavelength other than 450 nm.

  The second collimator lens array 33 includes a plurality of second microlenses 130 corresponding to the second solid-state light emitting elements 32 on a one-to-one basis. The plurality of second microlenses 130 are arranged side by side on the second base 31. Each second microlens 130 is installed on the optical axis of the excitation light emitted from the corresponding second solid-state light emitting element 32 and collimates the excitation light. The excitation light emitted from the second collimator lens array 33 is condensed by the second condenser lens 20 made of a convex lens.

  On the optical path of the excitation light between the second condenser lens 20 and the dichroic mirror 22, a first collimating lens 21 made of a biconcave lens is disposed. The first collimating lens 21 is disposed between the second condensing lens 20 and the focal position of the second condensing lens 20, and collimates the excitation light incident from the second condensing lens 20 to dichroic mirror 22. To ejaculate.

  The dichroic mirror 22 is disposed so as to face the respective surfaces so that the surface thereof forms an angle of about 45 ° with respect to the light emitting surface of the second light source 30 and the light emitting surface of the phosphor 310a. ing. The dichroic mirror 22 bends the excitation light (blue light component) incident from the first collimating lens 21 by 90 ° and reflects it to the wavelength conversion optical system 320a side, and the fluorescence (red light component) incident from the wavelength conversion optical system 320a. And green light component).

  The wavelength conversion optical system 320a includes a first lens 42 and a wavelength conversion element 300a. The wavelength conversion element 300a is the light source device 1 according to the first embodiment using the phosphor as the light emitter 14, and the phosphor 310a and a plano-convex lens (second lens) that suppresses the spread of fluorescence from the phosphor 310a. 11).

  A second pickup optical system 40 is configured by the first lens 42 and the plano-convex lens 11. The second pickup optical system 40 is disposed on the optical path of excitation light and fluorescence between the dichroic mirror 22 and the wavelength conversion element 300a. The first lens 42 is a lens made of, for example, a convex lens that collimates the fluorescence incident from the plano-convex lens 11.

  The second pickup optical system 40 causes the fluorescence from the wavelength conversion element 310a to enter the dichroic mirror 22 in a substantially parallel state. Further, the first lens 42 and the plano-convex lens 11 of the second pickup optical system 40 also have a function of condensing the excitation light incident from the dichroic mirror 22, and the light emitter 310a is focused on the excitation light. Make it incident. That is, the light is emitted from the second light source 30 by the second collimator lens array 33, the second condenser lens 20, the first collimating lens 21, the dichroic mirror 22, and the second pickup optical system 40. A second condensing optical system 35 that condenses a plurality of excitation lights is formed.

  In the second pickup optical system 40, the refractive index and shape of the lens to be used are determined according to the spread of the fluorescence emitted from the wavelength conversion element 300a, and the number of lenses is not limited to two. It can also be a plurality of three or more.

  The phosphor 310a has a particulate phosphor (phosphor particle) that absorbs excitation light emitted from the second solid-state light emitting element 32 and emits fluorescence. The phosphor 310a has a function of absorbing excitation light (blue light) having a wavelength of about 450 nm and converting it into fluorescence (yellow light) having a wavelength of about 490 to 750 nm (emission intensity peak: 570 nm). Fluorescence includes green light (near wavelength 530 nm) and red light (near wavelength 630 nm).

The material of the phosphor 310a is not particularly limited as long as it is a hard material resistant to heat. For example, sapphire can be used. The phosphor particles are mixed in the phosphor 310a.
As the phosphor particles, commonly known YAG (yttrium, aluminum, garnet) phosphors can be used. For example, a YAG-based phosphor having a composition represented by (Y, Gd) ₃ (Al, Ga) ₅ O ₁₂ : Ce having an average particle diameter of 10 μm can be used. The phosphor particle forming material may be one kind, or a mixture of particles formed using two or more kinds of forming materials may be used as the phosphor particles.

  Excitation light (blue light) collected by the first lens 42 is incident on the wavelength conversion element 300 a from the plano-convex lens 11. The excitation light is further condensed by the plano-convex lens 11 and enters the phosphor 310a. The phosphor 310a emits yellow light (fluorescence) obtained by converting the wavelength of the excitation light toward the same side as the side on which the excitation light is incident.

  The light emitted from the phosphor 310 a is collimated by the second pickup optical system 40 and enters the dichroic mirror 22. The dichroic mirror 22 reflects and removes excitation light (blue light) from light incident from the second pickup optical system 40, and transmits green light and red light. The blue light emitted from the first light source 50 is incident on the dichroic mirror 22 on the surface opposite to the incident surface on which the light from the second pickup optical system 40 is incident, and is emitted from the second pickup optical system 40. Is reflected in a direction parallel to the optical axis of the reflected light. As a result, the green light and red light emitted from the second pickup optical system 40 and the blue light emitted from the first pickup optical system 80 are combined into white light.

  The green light, red light, and blue light synthesized by the dichroic mirror 22 are incident on the fly eye integrator 90 including the first fly eye lens array 91 and the second fly eye lens array 92, and the light quantity distribution is made uniform. Green light, red light, and blue light emitted from the fly-eye integrator 90 are converted into linearly polarized light whose polarization direction is aligned in one direction by the polarization conversion element 93, and are collimated by the second collimating lens 94. Injected from the apparatus 100a. Note that the fly-eye integrator 90 and the polarization conversion element 93 are well-known techniques whose details are disclosed in, for example, Japanese Patent Laid-Open No. 8-304739, and thus detailed description thereof is omitted.

  The color separation light guide optical system 200 includes a dichroic mirror 210, a dichroic mirror 220, a reflection mirror 230, a reflection mirror 240, a reflection mirror 250, and a relay lens 260. The color separation light guide optical system 200 separates light from the light source device 100a into red light, green light, and blue light, and the red light, green light, and blue light are respectively modulated by the light modulation device 400R, the light modulation device 400G, and the light modulation. It has a function of guiding light to the device 400B.

  The dichroic mirror 210 and the dichroic mirror 220 are mirrors in which a wavelength selective transmission film made of a dielectric multilayer film that reflects light in a predetermined wavelength region and transmits light in other wavelength regions is formed on a substrate. . Specifically, the dichroic mirror 210 transmits a blue light component and reflects a red light component and a green light component. The dichroic mirror 220 reflects the green light component and transmits the red light component.

  The reflection mirror 230, the reflection mirror 240, and the reflection mirror 250 are mirrors that reflect incident light. Specifically, the reflection mirror 230 reflects the blue light component transmitted through the dichroic mirror 210. The reflection mirror 240 and the reflection mirror 250 reflect the red light component transmitted through the dichroic mirror 220.

  The blue light transmitted through the dichroic mirror 210 is reflected by the reflection mirror 230 and enters the image forming region of the light modulation device 400B for blue light. The green light reflected by the dichroic mirror 210 is further reflected by the dichroic mirror 220 and enters the image forming area of the light modulation device 400G for green light. The red light transmitted through the dichroic mirror 220 enters the image forming area of the light modulator for red light 400R via the incident-side reflection mirror 240, the relay lens 260, and the emission-side reflection mirror 250.

  As the light modulation device 400R, the light modulation device 400G, and the light modulation device 400B, those that are generally known can be used. For example, the light modulation device 400R, the polarization elements 420 and 430 that sandwich the liquid crystal element 410, and the transmission It is composed of a light modulation device such as a liquid crystal light valve. For example, the polarizing elements 420 and 430 have a configuration in which the transmission axes are orthogonal to each other (crossed Nicols arrangement).

  For example, the light modulation device 400R, the light modulation device 400G, and the light modulation device 400B are transmission type light modulation devices in which liquid crystal is hermetically sealed in a pair of transparent substrates, and given image information using a polysilicon TFT as a switching element. Accordingly, the polarization direction of one type of linearly polarized light emitted from the incident side polarization element 420 is modulated.

  The cross dichroic prism 500 is an optical element that forms a color image by synthesizing an optical image modulated for each color light emitted from the exit side polarization element 430. The cross dichroic prism 500 has a substantially square shape in plan view in which four right angle prisms are bonded. A dielectric multilayer film is formed on the substantially X-shaped interface to which the right-angle prism is bonded. The dielectric multilayer film formed at one of the substantially X-shaped interfaces reflects red light, and the dielectric multilayer film formed at the other interface reflects blue light. By these dielectric multilayer films, red light and blue light are bent, and the traveling direction of green light is aligned, so that three color lights are synthesized.

  The color image emitted from the cross dichroic prism 500 is enlarged and projected by the projection optical system 600 to form an image on the screen SCR.

  According to the projector of the present embodiment, it is possible to obtain a projector having a high brightness and excellent reliability, which includes the reflective wavelength conversion element 300a.

  In the present embodiment, the light source device 1 of the first embodiment is used as the wavelength conversion element 300a. However, the light source device 2 of the second embodiment may be used as the wavelength conversion element 300a.

[Second Embodiment of Projector]
The present embodiment is a projector using a wavelength conversion element 300b (light source device 3) using a phosphor 310b as a light emitter 39 as a part of the light source device. In addition, about the component similar to said embodiment, the code | symbol similar to said embodiment is attached | subjected suitably, and the description is simplified or abbreviate | omitted.

  FIG. 7 is a schematic diagram showing an optical system of the projector 1000b of this embodiment. The present embodiment is configured such that the light source is only the second light source in the first embodiment of the projector.

  As shown in FIG. 7, the projector 1000b includes a light source device 100b, a color separation light guide optical system 200, a light modulation device 400R, a light modulation device 400G, a light modulation device 400B, a cross dichroic prism 500, and a projection. And an optical system 600.

  The light source device 100b includes a second light source 30, a second collimator lens array 33, a second condenser lens 20, a wavelength conversion optical system 320b, a fly eye integrator 90, a polarization conversion element 93, and a second collimating lens 94. Yes.

  The wavelength conversion optical system 320b includes a first lens 42 and a wavelength conversion element 300b. The wavelength conversion element 300b is the light source device 3 according to the second embodiment using a phosphor as a light emitter, and includes a phosphor 310b and a planoconvex lens (second lens) 11 that suppresses the spread of fluorescence from the phosphor 310b. Prepare.

  A second pickup optical system 40 is configured by the first lens 42 and the plano-convex lens 11. The second pickup optical system 40 is disposed on the optical path of excitation light and fluorescence between the dichroic mirror 22 and the wavelength conversion element 300b. The first lens 42 is a lens made of, for example, a convex lens that collimates the fluorescence incident from the plano-convex lens 11.

  Similar to the first embodiment, the phosphor 310b has a function of converting excitation light (blue light) emitted from the second solid-state light emitting element 32 into fluorescence (yellow light). Here, a part of the excitation light is not converted into fluorescence (yellow light). That is, white light including red, green, and blue is emitted from the wavelength conversion element 300b.

  Excitation light (blue light) emitted from the second solid-state light emitting element 32 and condensed by the second condenser lens 20 enters the wavelength conversion element 300b from the transparent substrate 61 side. The excitation light incident on the wavelength conversion element 300b enters the phosphor 310b through the transparent substrate 61, and the phosphor 310b sets the wavelength of the excitation light on the opposite side (plano-convex lens 11 side) from the incident side. The converted fluorescence is emitted.

  The light emitted from the phosphor 310b is collimated by the second pickup optical system 40, enters the fly eye integrator 90 including the first fly eye lens array 91 and the second fly eye lens array 92, and the light quantity distribution is uniform. It becomes. Thereafter, an image is formed on the screen SCR in the same manner as in the first embodiment.

  According to the projector of the present embodiment, it is possible to obtain a projector with high luminance and excellent reliability, which includes the transmission type wavelength conversion element 300b.

  The example in which the light source device according to the first to third embodiments is applied to the projector has been described above, but is not limited thereto. For example, the light source devices of the first to third embodiments can be applied to other optical devices (optical disk devices, automobile headlamps, lighting devices, etc.).

  DESCRIPTION OF SYMBOLS 1,1A, 2,3,100a, 100b ... Light source device, 11 ... Plano-convex lens (1st member), 12 ... Board | substrate (2nd member), 13 ... Spacer, 14, 39 ... Light-emitting body (heating element) , 15a, 15b ... reflective film, 310a, 310b ... phosphor, 1000a, 1000b ... projector

Claims (14)

A first member;
A second member;
A heating element provided between the first member and the second member and in thermal contact with the first member and the second member;
A spacer provided between the first member and the second member;
A light source device.   The light source device according to claim 1, wherein the spacer is softer than the first member.   The light source device according to claim 1, wherein the second member is softer than the spacer.   The light source device according to claim 1, wherein the heating element emits light.   The light source device according to claim 4, wherein the heating element is a phosphor.   The light source device according to claim 4 or 5, wherein at least one of the first member and the second member is transparent.   The light source device according to claim 4, wherein the heating element includes a reflective film that reflects the light.   The light source device according to any one of claims 1 to 7, wherein the heating element is enclosed and sealed by the first member, the second member, and the spacer.   9. The light source device according to claim 1, wherein the heating element has a frustum shape that tapers from the first member side toward the second member side. 10.   The light source device according to claim 1, wherein the first member has a plano-convex lens shape. In the method of manufacturing the light source device in which the heating element is disposed between the first member and the second member,
Providing a spacer having a thickness greater than that of the heating element on the surface of one side of the second member;
Installing the heating element on the surface of the one side of the second member;
Bringing the first member into contact with the spacer from the one side;
Pressing the first member against the spacer and deforming at least one of the spacer and the second member to bring the first member into contact with the heating element;
A method of manufacturing a light source device.   The method of manufacturing a light source device according to claim 11, wherein the first member is brought into contact with a heating element by compressing and deforming the spacer.   The method of manufacturing a light source device according to claim 11, wherein the first member is brought into contact with a heating element by compressing and deforming the second member.   A projector using the light source device according to claim 1.

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