JP2014148435A - Burning tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a burning tool which makes it possible to obtain a proper contact with a mating member in use.SOLUTION: A burning tool 1 is formed of a porous body 11 having a polished surface, and has a value of level difference (Rk) specified in JISB0671-2 being 1-5 μm.

Description

  The present invention relates to a firing jig having features on the surface.

  Devices such as electronic components and semiconductor elements are manufactured through a firing process (heat treatment process). In general, these devices are prepared by mixing and forming raw materials, placing them on the surface of a firing jig such as a setter (on the mounting surface), and firing (heat treatment) at a high temperature in a heating furnace. After being processed into a fired body and then forming an electrode on this, it is manufactured by finally assembling.

  Devices such as electronic components can include, for example, ceramic capacitors, ceramic piezoelectric materials, microwave dielectrics, high frequency filters, semiconductor capacitors, thermistors, ceramic varistors, ceramic sensors, etc. Examples thereof include ceramic materials such as barium, lead zirconate titanate, strontium titanate, zinc oxide, zirconium oxide, rare earth oxides, and composites thereof.

  These devices are manufactured by firing a raw material containing a resin-based binder in a ceramic material. This binder is not contained in the fired body (device to be manufactured) by evaporating at a high temperature during firing.

  If the binder transpiration is insufficient, the binder will remain in the device. The binder remaining in the device partially changes the characteristic of the resistance value. That is, the device cannot exhibit desired characteristics. That is, a device manufactured by baking becomes a defective product. For this reason, as described in Patent Document 1, a firing jig on which a device (object to be processed) is mounted at the time of firing is required not to hinder binder evaporation.

  In order not to disturb the transpiration of the binder during firing, the surface of the firing jig is blasted to form irregularities on the surface (the surface on which the object is to be treated) and fine gaps are formed. The binder is diffused from the workpiece.

  Further, the firing jig is required to suppress the reaction with the object to be processed. When a reaction occurs between the firing jig and the object to be processed, the reaction product causes a deterioration in the characteristics of the object to be processed after baking. Furthermore, when a reaction occurs between the firing jig and the workpiece, there is a problem that the particles used as the raw material of the firing jig react (sinter) with the workpiece and adhere to the workpiece. It was.

  The firing jig is required to have sufficient strength. In order to meet this requirement, conventionally, a firing jig made of densely formed ceramics has been used, but the dense firing jig has a problem that it is vulnerable to thermal shock. That is, when the firing jig is repeatedly used, there is a problem that the firing jig is damaged due to thermal shock.

  For such a problem, it is conceivable to form a firing jig using coarse particles. When a setter is formed using coarse particles, the firing jig becomes a porous body, which is considered to improve the thermal shock resistance.

  However, when the firing jig is formed from coarse particles, there is a problem that particles resulting from the coarse particles are peeled off to contaminate the workpiece. In some cases, there is a problem that a problem that the separated coarse particles are likely to adhere to the object to be processed (reaction occurs and the reaction product adheres) is likely to occur.

JP 2006-225186 A

  This invention is made | formed in view of the said actual condition, and makes it a subject to provide the baking jig which can obtain an appropriate contact with respect to the other member at the time of use.

In order to solve the above-mentioned problems, the present inventors have studied the firing jig, and as a result, have reached the present invention.
And as a result of repeated examination of the firing jig that can obtain an appropriate contact with the counterpart member,

The surface is formed by a polished porous body,
(A) The level difference (Rk) specified in JIS B 0671-2 is 1 to 5 μm. (B) A surface having a load length ratio (Mr1) specified in JIS B 0671-2 of 10% or less. (C) Have a surface with a specified load length ratio (Mr2) of 70% or more in JIS B 0671-2. (D) Concave depression so that the surface roughness (Ra) is 10.00 or less. (E) It has a surface in which a concave depression is formed so that the surface roughness (Rz) is 75.00 or less. (F) The porosity is 10 to 50%. It has been found that a firing jig satisfying any one of the above can solve the above problems.

  The firing jig of the present invention is formed of a porous body whose surface is polished, and the value of the level difference (Rk) specified in JIS B 0671-2 is 1 to 5 μm. .

  Since the firing jig of the present invention has a predetermined surface, it can make an appropriate contact with the mating member, and can suppress contamination of the mating member and deformation of the mating member.

It is the figure which showed the setter of the Example. It is the figure which showed the surface state of the setter of the sample 1. It is the figure which showed the surface state of the setter of the sample 2. FIG. It is the figure which showed the surface state of the setter of the sample 3. It is the figure which showed the surface state of the setter of the sample 4. FIG. 6 is a view showing a surface state of a setter of sample 5. It is the figure which showed the surface state of the setter of the sample 6. It is the figure which showed the surface state of the setter of the sample 7 (flat plate). It is the figure which showed the surface state of the setter of the sample 8 (blast). It is a flowchart which shows a process when using the setter of an Example repeatedly. It is the figure which showed the setter of the deformation | transformation form. It is the figure which showed the usage pattern of the setter of a deformation | transformation form.

  In the firing jig of the present invention, the level difference (Rk) defined in JIS B 0671-2 is 1 to 5 μm. That is, the firing jig of the present invention is a firing jig that satisfies the above (a).

If the level difference (Rk) exceeds 5 μm, the contact area with the mating member will be too small, and the contact area between the mating member and the firing jig will be too small (for example, supporting the mating member sufficiently) The deformation of the mating member is likely to occur). When the level difference (Rk) value is less than 1 μm, there are too few voids (portions that do not come into contact with the mating member) on the surface of the firing jig, the transpiration of the binder becomes insufficient, and the binder removal property can be maintained. Disappear.
In the firing jig of the present invention, the preferred level difference (Rk) is 1 to 4 μm, more preferably 1 to 3 μm.

  The firing jig of the present invention preferably has a surface with a load length ratio (Mr1) defined in JIS B 0671-2 of 10% or less. That is, the firing jig of the present invention is preferably a firing jig satisfying the above (b).

The load length ratio (Mr1) indicates the ratio of the convex portions of the concave and convex portions on the surface of the firing jig having fine concave and convex portions (concave opening). That is, when the firing jig is in contact with the mating member on the surface, the ratio of the portion in point contact with the mating member is shown. And the baking jig | tool of this invention can contact an other party member in more area because Mr1 will be 10% or less. Here, when Mr1 exceeds 10%, the contact area with the mating member increases, and malfunctions due to an increase in the contact area with the mating member (for example, the mating member is distorted or reacts with the mating member). Occurring and contaminating the mating member).
In the firing jig of the present invention, the preferable load length ratio (Mr1) is 8% or less, more preferably 7% or less.

  The firing jig of the present invention preferably has a surface with a load length ratio (Mr2) defined in JIS B 0671-2 of 70% or more. That is, the firing jig of the present invention is preferably a firing jig satisfying the above (c).

The load length ratio (Mr2) indicates the ratio of the concave portion of the firing jig to the surface of the firing jig having fine unevenness (concave opening). That is, the ratio of the part which is not contacting the other party member when the baking jig is contacting the other party member on the surface is shown. And the baking jig | tool of this invention can contact an other party member in a suitable area because Mr2 will be 70% or more. Here, if Mr2 is less than 70%, the mating member is likely to be distorted while the surface is in contact with the mating member.
In the firing jig of the present invention, a preferable load length ratio (Mr2) is 75% or more.

  The firing jig of the present invention preferably has a surface on which concave depressions are formed so that the surface roughness (Ra) is 10.00 or less. That is, the firing jig of the present invention is preferably a firing jig satisfying the above (d).

  When the surface roughness (Ra) is 10.00 or less, the surface is provided with a fine depression (a depression having a narrow opening width). Since the dents on the surface are fine, the mating member is not distorted when the firing jig and the mating member come into contact with each other. When the roughness of the surface becomes rough, deformation (distortion) is likely to occur so that the counterpart member itself enters between the recesses opened in the surface, and the dimensional accuracy of the counterpart member is likely to be reduced.

  In the firing jig of the present invention, the preferred surface roughness (Ra) is 8.00 or less, more preferably 7.00 or less. In the present invention, the surface roughness (Ra) can be determined by a method defined in JIS B 0601.

  The firing jig of the present invention preferably has a surface on which concave depressions are formed so that the surface roughness (Rz) is 75.00 or less. That is, the firing jig of the present invention is preferably a firing jig that satisfies the above (e).

  When the surface roughness (Rz) is 75.00 or less, it is possible to prevent the firing jig from adhering to or contaminating the mating member in contact with the firing jig. When the surface roughness (Rz) exceeds 75.00, the concave depression on the surface becomes too deep, and the side wall surface defining the depression cannot maintain strength, and peeling is likely to occur. When peeling occurs on the side wall surface, the peeled off piece comes to adhere to the mating member.

  In the firing jig of the present invention, the preferred surface roughness (Rz) is 25.00 or less, more preferably 10.00 or less. In the present invention, the surface roughness (Ra) can be determined by a method defined in JIS B 0601.

  The firing jig of the present invention preferably has a porosity of 10 to 50%. That is, the firing jig of the present invention is preferably a firing jig satisfying the above (f). A more preferable porosity is 10 to 45%.

  When the porosity of the firing jig of the present invention is 10 to 50%, the thermal shock resistance and strength of the firing jig are excellent. Moreover, the effect which can make it easy to make surface roughness into a predetermined range can also be exhibited. If the porosity is less than 10%, the firing jig becomes dense and the thermal shock resistance is lowered. On the other hand, if the porosity exceeds 50%, the amount of pores increases, the strength decreases, and peeling easily occurs from the firing jig. When peeling occurs, the peeled pieces that peel off contaminate the mating member when used in contact with the mating member. Furthermore, when the porosity becomes too high, reaction / adhesion between particles (particles for forming a porous body) constituting the firing jig and the counterpart member tends to occur.

When the firing jig of the present invention satisfies at least one of the above (a) to (f) (at least satisfies (a)), the contact with the counterpart member to be processed becomes appropriate. In addition to suppressing contamination of the mating member due to peeling, it is possible to suppress distortion of the mating member.
Furthermore, the firing jig of the present invention has a concave depression on the surface, and the binder component evaporated from the mating member can be easily removed from the mating member side.

  The firing jig of the present invention is preferably formed of a porous body whose surface is polished. By forming the surface in contact with the mating member with a polished porous body, a surface satisfying the above conditions (a) to (f) can be easily obtained. Also, by polishing the surface of the porous body before heat treatment, even if there is distortion on the surface of the firing jig (setter), this distortion can be corrected, and as a result, the counterpart member during heat treatment It is possible to suppress distortion of the (processed object). In the firing jig of the present invention, the polishing applied to the surface of the porous body is not limited as long as it is the same method as the surface treatment method used for smoothing the surface of the firing jig. For example, a method of cutting and smoothing the surface irregularities and a method of polishing the surface using a grindstone can be given.

  In the firing jig of the present invention, the surface is formed by polishing the surface of the porous body, so that the flatness of the contact surface (surface (non-recessed portion)) with the counterpart member (object to be processed) is increased. Can be high. Furthermore, since the surface is formed by polishing the porous body, the pores inside the porous body are exposed by polishing, and a fine concave recess can be formed by the exposed pores.

  In the firing jig of the present invention, it is preferable that the surface of the porous body is polished to form a mounting surface before being subjected to heat treatment in contact with the counterpart member (object to be processed). By polishing the surface of the porous body before heat treatment, even if there is distortion on the surface (or the firing jig) that will be in contact with the mating member, this distortion can be corrected and the result As a result, distortion of the mating member during heat treatment can be suppressed.

  The timing for polishing the surface of the porous body is not limited. When the firing jig is used repeatedly, it may be performed every predetermined number of times (one or more times) before the heat treatment. If the surface state is observed and a deformation (strain) or a change in the surface state is detected more than a predetermined value, it may be performed.

  In the firing jig of the present invention, the material of the placement surface is not limited. That is, the material used for a conventionally known firing jig can be used. For example, zirconia, alumina, mullite, spinel, silicon nitride, silicon carbide, or a composite material thereof, which is a material of the firing jig, can be given. Of these, zirconia is more preferable. The surface is preferably formed by firing powders made of these materials (satisfying conditions such as particle size distribution determined as appropriate in relation to the counterpart member).

  The surface is preferably formed by firing zirconia powder having an average particle size of 0.3 to 2 μm. Here, in this invention, an average particle diameter shows a median diameter (D50). A porous surface can be formed by firing fine zirconia powder having an average particle size of 0.3 to 2.0 μm. Further, since the fine zirconia powder is used, a relatively dense surface (having few pores) can be formed. A dense surface is excellent in strength.

  Furthermore, since the surface is formed from fine zirconia powder, the zirconia powders are strongly sintered together, so when used as a firing jig for heat treatment of the mating member, the fine zirconia powder reacts with the workpiece.・ It is possible to suppress adhesion.

  When the average particle diameter of the zirconia powder is less than 0.3 μm, the particle diameter becomes too small, the fluidity is deteriorated, and the density variation at the time of molding increases. When the average particle size exceeds 2.0 μm, the particle size becomes too large, and the zirconia particles easily adhere to the counterpart member. A more preferable average particle diameter is 0.4 to 1.5 μm.

  The zirconia powder preferably exhibits a sharp peak when the particle size distribution is measured. That is, the zirconia powder is preferably a powder having a relatively uniform particle size. The powder whose particle size distribution shows a broad peak has a large proportion of coarse particles due to variations in the particle size of the zirconia particles, and the strength of the mounting surface of the firing jig decreases.

In the present invention, the zirconia powder is not only a powder made of zirconium oxide (ZrO ₂ ), but is a partially stabilized zirconia in which elements such as yttrium, cerium, calcium, magnesium, and rare earth elements are added to zirconium oxide. Containing powder. The ratio of the additive element in the partially stabilized zirconia is not particularly limited, and can be a conventionally known ratio (for example, 3.0 to 8.0 mol%). The zirconium oxide may contain hafnium oxide (HfO ₂ ) that is difficult to separate.

  It is preferably formed by firing with microbeads having an average particle diameter of 1 to 20 μm. Microbeads are fine particles (powder made of) that disappear when fired and function as a pore-forming agent having a sintered body as a porous body. That is, by firing together with the microbeads, the microbeads disappear during firing, and the fired body after firing becomes a porous body. In the porous body, the exposed pores become the above-described concave depression.

  When the average particle size of the microbeads is 1 to 20 μm, the porous body can obtain the above surface roughness. When the average particle diameter is less than 1 μm, the particle diameter becomes too fine and the effect of pore formation cannot be obtained sufficiently. On the other hand, when the average particle diameter exceeds 20 μm, the particle diameter becomes too large, the pore diameter becomes large, and the strength of the sintered body decreases. Furthermore, it becomes difficult to form a desired placement surface.

  The micro beads are preferably made of at least one of acrylic resin and phenol resin. When the microbead is made of a resin selected from these resins, the pores of the fired body can have a desired pore diameter (pore characteristics). Microbeads made of at least one of an acrylic resin and a phenolic resin generate less heat than the microbeads made of only carbon when they disappear during firing.

Further, the microbead may be solid or a hollow body having a hollow inside.
In the present invention, when used as a firing jig, it can be fired together with an additive that does not affect its properties.
The shape of the firing jig of the present invention is not limited, and may be the same shape as that of a conventionally known firing jig.

  The firing jig of the present invention has, for example, a plate-like shape in which the surface is a mounting surface on which a mating member (object to be processed) is placed, and a plurality of plates that are stacked at intervals (projections) ) And the shape of a tank or the like.

As described above, when the firing member of the present invention is subjected to heat treatment on the mating member (object to be processed), the firing jig peels off or the firing jig and the mating member (object to be treated) are separated. The occurrence of adhesion and contamination due to the reaction is suppressed, and the occurrence of distortion of the object to be processed is suppressed. For this reason, it is preferably used for heat treatment (firing) of devices such as electronic components and semiconductor devices.
The manufacturing method of the firing jig of the present invention is not limited except that it is formed by a porous body whose surface is polished. For example, it is manufactured by the following manufacturing method. It is preferable.

(Example of first manufacturing method)
First, fine particle powder (for example, zirconia powder) made of the material forming the firing jig (inorganic oxide such as zirconia) and fine particle pore former powder (for example, microbeads) are uniformly mixed. Prepare a mixed powder. At this time, the mixed powder may have an additive.
The mixed powder is molded into the shape of a firing jig to produce a molded body.
The molded body is dried, degreased and fired (sintered) to produce a fired body.
The mounting surface of the fired body is polished.
As described above, the firing jig of the present invention can be manufactured.

(Second production method example)
First, fine particle powder (for example, zirconia powder) made of the material forming the firing jig (inorganic oxide such as zirconia) and fine particle pore former powder (for example, microbeads) are uniformly mixed. Prepare a mixed powder. At this time, the mixed powder may have an additive.
The mixed powder is molded into the shape of a firing jig to produce a molded body.
The molded body is dried, degreased and fired (sintered) to produce a fired body.
Polishing treatment is performed on the mounting surface of the fired body to form irregularities on the surface.
As described above, the firing jig of the present invention can be manufactured.

Hereinafter, the present invention will be specifically described with reference to examples.
As an embodiment of the firing jig of the present invention, a flat setter was manufactured.
(Example embodiment)
(Samples 1-6)

First, zirconia powder and microbeads were weighed and prepared in the proportions shown in Table 1.
The zirconia powder used in this embodiment example has an average particle diameter (D50) of 0.5 to ₂ μm, and 8 mol%, and yttria (Y ₂ O ₃ ) is added to zirconium oxide (ZrO ₂ ). Zirconia was used. As the microbeads, a powder made of at least one of solid acrylic resin particles and phenol resin particles having an average particle diameter (D50) of 5 μm was used.

Each of the weighed and prepared powders was mixed well until a uniform mixed state was obtained, thereby preparing a mixed powder.
The mixed powder was molded by press molding into a square plate using a mold. This molding was performed by applying a pressure of 1000 kgf / cm ² .
Next, the molded body was naturally dried, and then degreased by being kept at 400 ° C. for 24 hours.

After degreasing, it was calcined by holding at 1500 ° C. for 2 hours in air atmosphere (sintered partially stabilized zirconia and disappeared microbeads). After firing, a plate-like fired body (sintered body) was obtained by cooling by cooling.
The surface (both surfaces) of the obtained plate-like fired body was polished. Surface polishing was performed by a surface polishing machine.
Thus, the setters of Samples 1 to 6 in which the surface of the porous body was polished were manufactured.

  The setters 1 of the manufactured samples 1 to 6 had a plate shape of 150 × 150 × 3 mm as shown in FIG. Further, in the setter 1 of each sample, both surfaces (10a, 10b) of the plate are mounting surfaces on which the object to be processed is placed.

(Samples 7-8)
A plate-like fired body (sintered body) was produced in the same manner as in samples 1 to 6. The blending of raw materials is shown in Table 1. As shown in Table 1, the setters of Samples 7 to 8 are dense because they do not use microbeads that are pore forming agents.
The produced plate-like fired body was used as a setter for Sample 7 (flat plate).
Moreover, the setter of the sample 8 (blast) was manufactured by blasting the surface of the manufactured plate-like fired body.

  Measurement results of load length ratio (Mr1, Mr2), level difference (Rk), surface roughness (Ra), (Rz) and porosity of the setter mounting surface (10a) of each manufactured sample Are shown in Table 2.

(Load length ratio, level difference)
The measurement of load length ratio (Mr1, Mr2) and level difference (Rk) was performed using the method prescribed | regulated to JISB0601-2.

(Surface roughness)
The surface roughness (Ra) and (Rz) were measured using the method specified in JIS B 0601.

(Porosity)
For measuring the porosity, the mounting surface of the setter was measured according to JIS R 2205.

As shown in Table 2, Sample 1 is a relatively dense setter having a porosity of 26%, and has a surface roughness (Ra) of 3 and (Rz) of 15. Samples 2 to 5 are setters having a porosity of 18 to 48%, a surface roughness (Ra) of 2 to 4.5, and a surface roughness (Rz) of 10 to 23. Sample 6 is a porous setter having a porosity of 56%, and has a surface roughness (Ra) of 5 and (Rz) of 25. Samples 7 to 8 are setters having a smooth or uneven surface.
Furthermore, the state of the surface (mounting surface) of each sample was evaluated.

  First, the setter surface (mounting surface) of each sample was confirmed. The setters of Samples 1 to 6 and the setter of Sample 7 whose surfaces were polished at the time of manufacture were smooth surface plates. The setter of Sample 8 where the surface was not polished had irregularities on the surface.

  Next, the uneven shape (surface roughness) of the surfaces (mounting surfaces) of Samples 1 to 6 and 7 to 8 was measured and shown in FIGS. 2 shows sample 1, FIG. 3 shows sample 2, FIG. 4 shows sample 3, FIG. 5 shows sample 4, FIG. 6 shows sample 5, FIG. 7 shows sample 6, FIG. Fig. 9 shows the surface irregularity state of sample 7 and Fig. 9 shows sample 8 respectively. 2 to 9 were measured using a surface roughness meter (trade name: Surfcom 1400, manufactured by Tokyo Seimitsu Co., Ltd.).

  As shown in FIGS. 2 to 7, the setters of Samples 1 to 6 have a concave recess having a substantially V-shaped cross section on the surface of the mounting surface, that is, a convex shape on the surface. It can be confirmed that there is no portion. Furthermore, it can be confirmed that the setters of Samples 1 to 6 have a substantially flat surface on which no concave depression is formed. It can be seen that this surface was formed by polishing the surface after firing the porous body.

  As can be seen from FIGS. 2 to 7, it can be confirmed that the surface roughness (Ra and Rz) increases as the porosity increases. That is, it can be seen that the surface of the mounting surface was polished to expose the pores, thereby forming a concave recess on the surface.

  Further, as shown in FIG. 8, the setter of the sample 7 (flat plate) is a surface formed by sintering without using microbeads and the surface of the mounting surface is substantially smooth and has unevenness. It can be confirmed that there is not. As shown in FIG. 9, the setter of the sample 8 (blast) can confirm that the surface of the mounting surface has an uneven shape. It can be seen that these surfaces were formed by the surface state of the porous body in a fired state (the surface was not polished) or by blasting.

  The setters of Samples 1 to 6 have a surface on which a concave recess is formed, and when used as a firing jig, it is possible to obtain an appropriate contact with the workpiece placed on the surface. Recognize. On the other hand, the setter of the sample 7 (flat plate) has a substantially smooth surface, and when used as a firing jig, the evaporation of the binder from the workpiece placed on the surface becomes insufficient. The setter of the sample 8 (blast) is a surface having a concavo-convex shape, and in particular, the tip of the convex portion and the object to be processed are likely to be sintered, and the shape change (size) of the object to be processed is fine. (Decrease in accuracy) is likely to occur.

(Evaluation)
As an evaluation of the setter of each sample, the moldability and the thermal shock temperature were examined and are shown in Table 2 respectively.

(Formability)
□ Molded to 200 × 200 × 4 mm and visually judged for cracks and chips. In Table 2, a sample in which cracks and cracks could not be confirmed was marked with ◯, a fine crack and a sample in which cracks could be confirmed were marked with △, and a sample that could not be used as a setter was marked with ×.

  Even in the setters of Samples 1 to 8, cracks and chips that were evaluated as x and could not be used could not be confirmed. In the setter of sample 6, a chip was confirmed, but it was a fine chip that did not affect the use as a setter, and there was no problem in actual use.

(Heat shock temperature)
For measurement of the thermal shock temperature, first, the setter of each sample is processed to 150 × 150 × 3 mm and heated (heated) to a predetermined heating temperature of 180 to 300 ° C. in a state where it is placed in a heating furnace. When the furnace temperature is stabilized at the heating temperature, it is determined that the setter of each sample is sufficiently heated, and the setter of each sample is taken out from the heating furnace and allowed to cool (rapidly cool) at room temperature (25 ° C.). When the temperature of each sample reaches the same temperature as the room temperature, the sample is again put into the heating furnace and heated (heated) to the heating temperature.
The temperature rise (heating) to this heating temperature and the cooling to room temperature (rapid cooling) were repeated 5 times, and the temperature at which the setter did not crack was defined as the thermal shock temperature.

  As shown in Table 2, it can be confirmed that the thermal shock temperature increases as the porosity increases. The setters of Samples 1 to 6 all have a thermal shock temperature of 250 ° C. or higher. Moreover, the setters of Samples 7 to 8 are dense by not using a pore-forming agent, and the thermal shock temperature is as low as 180 ° C.

  As described above, the setters of Samples 1 to 6 each have an Rk value within a predetermined range, so that any contact with the workpiece can be obtained and the thermal shock temperature is 250 ° C. or higher. It has become a thing. Moreover, not all of the setters of the samples 7 to 8 can obtain an appropriate contact with the object to be processed, and the thermal shock temperature is significantly lower than the setters of the samples 1 to 6.

(Example of usage of setter)
As described above, the setter (firing jig) of the present invention manufactured in the examples has excellent thermal shock resistance. Therefore, it can be repeatedly used as a setter for heat treatment of an object to be processed. The repeated use can be performed as follows, for example. A flowchart of repeated use is shown in FIG.
A workpiece is placed and heat treated, and then the state of the setting surface of the setter is observed.
When the observation result is in a state where it can be used as a setter, it is again used for heat treatment of the object to be processed.

When the observation result is in a state unsuitable for use as a setter (for example, a state in which the surface roughness (Ra, Rz) is too large or warping or distortion occurs), the mounting surface is polished. Apply. Here, the polishing process can be the same as the process performed when polishing the fired body during the production of the setter.
After polishing, it is used for heat treatment of the object to be processed.

  As described above, the setter of the present invention can form a placement surface on which a new object is placed by performing a polishing process. That is, it can be used repeatedly as a setter.

(Deformation)
The setter (firing jig) of the present invention can have various shapes other than the plate-shaped setter.

  For example, as shown in FIG. 11, a substantially table-shaped setter 1 in which legs (12) are erected on the peripheral edge of a plate-like mounting portion (11) whose upper surface (11a) is a mounting surface. I can give you. As shown in FIG. 12, the setter 1 can be used in a state where a plurality of the setters 1 are stacked. In this case, the plurality of objects to be processed 2 can be heat-treated at once by placing the objects to be processed (2, 2,...) On the respective setters (1, 1,...).

  In the setter of this embodiment, the plate-like placement portion (11) and the leg portion (12) may be formed of the same material or different materials. Moreover, even if the plate-shaped mounting part (11) and the leg part (12) are integrally formed, they may be formed separately.

1: Setter 11: Placement part 12: Leg part 2: Object to be processed

Claims (10)

The surface is formed by a polished porous body,
A firing jig characterized in that the level difference (Rk) defined in JIS B 0671-2 is 1 to 5 μm.   The firing jig according to claim 1, which has a surface having a load length ratio (Mr1) defined in JIS B 0671-2 of 10% or less.   The firing jig according to any one of claims 1 to 2, wherein the load length ratio (Mr2) defined in JIS B 0671-2 has a surface of 70% or more.   The firing jig according to any one of claims 1 to 3, which has a surface on which a concave recess is formed so that the surface roughness (Ra) is 10.00 or less.   The firing jig according to any one of claims 1 to 4, which has a surface on which a concave recess is formed so that the surface roughness (Rz) is 75.00 or less.   The firing jig according to any one of claims 1 to 5, wherein the porosity is 10 to 50%.   The firing jig according to any one of claims 1 to 6, wherein the surface is formed of a polished porous body.   The firing jig according to claim 1, wherein the surface is formed by firing zirconia powder having an average particle size of 0.3 to 2.0 μm.   The firing jig according to claim 8, which is fired together with microbeads having an average particle diameter of 1 to 20 μm.   The firing jig according to claim 9, wherein the micro beads are made of at least one of an acrylic resin and a phenol resin.

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