JP2014139027A5 - - Google Patents

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Publication number
JP2014139027A5
JP2014139027A5 JP2014086922A JP2014086922A JP2014139027A5 JP 2014139027 A5 JP2014139027 A5 JP 2014139027A5 JP 2014086922 A JP2014086922 A JP 2014086922A JP 2014086922 A JP2014086922 A JP 2014086922A JP 2014139027 A5 JP2014139027 A5 JP 2014139027A5
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JP
Japan
Prior art keywords
silicon carbide
carbide plate
cutter wheel
scribing
scribe
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Application number
JP2014086922A
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English (en)
Japanese (ja)
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JP5884852B2 (ja
JP2014139027A (ja
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Priority to JP2014086922A priority Critical patent/JP5884852B2/ja
Priority claimed from JP2014086922A external-priority patent/JP5884852B2/ja
Publication of JP2014139027A publication Critical patent/JP2014139027A/ja
Publication of JP2014139027A5 publication Critical patent/JP2014139027A5/ja
Application granted granted Critical
Publication of JP5884852B2 publication Critical patent/JP5884852B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014086922A 2014-04-18 2014-04-18 炭化珪素板のスクライブ方法及びスクライブ装置 Expired - Fee Related JP5884852B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014086922A JP5884852B2 (ja) 2014-04-18 2014-04-18 炭化珪素板のスクライブ方法及びスクライブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014086922A JP5884852B2 (ja) 2014-04-18 2014-04-18 炭化珪素板のスクライブ方法及びスクライブ装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012551742A Division JPWO2012093422A1 (ja) 2011-01-07 2011-01-07 炭化珪素板のスクライブ方法及びスクライブ装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016009319A Division JP2016104571A (ja) 2016-01-20 2016-01-20 炭化珪素板のスクライブ方法及びスクライブ装置

Publications (3)

Publication Number Publication Date
JP2014139027A JP2014139027A (ja) 2014-07-31
JP2014139027A5 true JP2014139027A5 (enExample) 2015-03-19
JP5884852B2 JP5884852B2 (ja) 2016-03-15

Family

ID=51416049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014086922A Expired - Fee Related JP5884852B2 (ja) 2014-04-18 2014-04-18 炭化珪素板のスクライブ方法及びスクライブ装置

Country Status (1)

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JP (1) JP5884852B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI837150B (zh) 2018-09-28 2024-04-01 日商三星鑽石工業股份有限公司 GaN基板之分斷方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4710148B2 (ja) * 2001-02-23 2011-06-29 パナソニック株式会社 窒化物半導体チップの製造方法
TWI286232B (en) * 2002-10-29 2007-09-01 Mitsuboshi Diamond Ind Co Ltd Method and device for scribing fragile material substrate
JP5022602B2 (ja) * 2004-02-02 2012-09-12 三星ダイヤモンド工業株式会社 カッターホイールおよびこれを用いた脆性材料基板のスクライブ方法および分断方法
US7392732B2 (en) * 2005-01-24 2008-07-01 Micro Processing Technology, Inc. Scribing tool and method
KR101651557B1 (ko) * 2009-04-10 2016-08-26 반도키코 가부시키가이샤 유리판 선긋기 장치

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