JP2014116422A - Sheet sticking device, and sheet sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device capable of sticking an adhesive sheet, applied with tension in a crossing direction, on an adherend without using any dedicated raw fabric.SOLUTION: A sheet sticking device 1 includes: first delivery means 2 for delivering a raw fabric having a belt-like peel sheet RL temporarily fitted on an adhesion surface AD of an adhesive sheet having the adhesion surface AD on its one surface; second delivery means 3 for delivering a support material SL1 capable of supporting the adhesive sheet A from the other surface side of the adhesive sheet AS; first pressing means 4 for pressing and sticking the support material SL1 on the other surface of the adhesive sheet AS; sheet peeling means for peeling the adhesive sheet AS from the peel sheet RL; second press means 6 for pressing and sticking the adhesive sheet AS supported on the support material SL1 on an adherend WF; width-directional tension applying means for applying tension to the support material SL1 pressed by the second press means 6 in a direction crossing the delivery direction of the adhesive sheet A; and support material peeling means 8 for peeling the support material SL1 from the adhesive sheet AS.

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

2. Description of the Related Art Conventionally, a sheet pasting apparatus for pasting an adhesive sheet on a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking device described in Patent Document 1 is provided with a pressing roller means for sticking a sticking portion (adhesive sheet) peeled off from a wafer mount tape (original fabric) to a wafer, and the adhesive sheet. Tension applying means for applying tension in a direction intersecting with the feeding direction (hereinafter sometimes simply referred to as “intersection direction”). The tension applying means includes two pin gears provided at both ends of the pressing roller means, and springs that urge in the direction of expanding the interval between the two pin gears.
When sticking the adhesive sheet to the wafer, the projections of the pin gears are fitted into the holes provided at the edges of the both ends of the raw fabric, and tension is applied in the crossing direction by the expansion action of the spring. However, the adhesive sheet is peeled from the original fabric, and the adhesive sheet is adhered to the wafer.

Japanese Patent Laid-Open No. 11-74231

  However, in the conventional sheet sticking apparatus as described in Patent Document 1, an original fabric having a hole for a pin gear must be used in accordance with the configuration of the sheet sticking apparatus, which is inferior in versatility. There is.

  The objective of this invention is providing the sheet sticking apparatus and the sheet sticking method which can stick the adhesive sheet which provided the tension | tensile_strength to the crossing direction on the to-be-adhered body, without using a dedicated original fabric.

  In order to achieve the above object, the sheet sticking apparatus of the present invention can support the adhesive sheet from a first feeding means for feeding out an adhesive sheet having one surface as an adhesive surface, and the other surface side of the adhesive sheet. Second feeding means for feeding out the supporting material, first pressing means for pressing and attaching the supporting material to the other surface of the adhesive sheet, and pressing the adhesive sheet supported by the supporting material against the adherend. The second pressing means for attaching the sheet, the width direction tension applying means for applying tension to the support member pressed by the second pressing means in a direction crossing the feeding direction of the adhesive sheet, and the adhesive sheet The structure of having a support material peeling means for peeling the support material is adopted.

  Further, another sheet sticking device of the present invention includes a first feeding means for feeding an original sheet in which a strip-shaped release sheet is temporarily attached to the adhesive surface of the adhesive sheet having one surface as an adhesive surface, and the adhesive sheet. Second feeding means for feeding out a support material capable of supporting the adhesive sheet from the other surface side of the sheet, first pressing means for pressing the support material against the other surface of the adhesive sheet, and from the release sheet Sheet peeling means for peeling the adhesive sheet, second pressing means for pressing and adhering an adhesive sheet supported by the support material to an adherend, and a support material pressed by the second pressing means, A configuration in which a width direction tension applying unit that applies tension in a direction crossing the feeding direction of the adhesive sheet and a support material peeling unit that peels the support material from the adhesive sheet is employed.

  In this case, it is preferable that the sheet sticking apparatus of the present invention includes a cutting unit that cuts the support material on the adhesive sheet stuck to the adherend into a predetermined shape.

  On the other hand, the sheet sticking method of the present invention includes a step of feeding an adhesive sheet having one surface as an adhesive surface, a step of feeding a support material capable of supporting the adhesive sheet from the other surface side of the adhesive sheet, A step of pressing and adhering a support material to the other surface of the adhesive sheet, and an adhesion supported by the support material while applying tension to the support material in a direction crossing the feeding direction of the adhesive sheet A configuration is adopted that includes a step of pressing and attaching the sheet to the adherend and a step of peeling the support material from the adhesive sheet.

  In addition, the other sheet sticking method includes a step of feeding an original sheet in which a strip-like release sheet is temporarily attached to the adhesive surface of the adhesive sheet whose one surface is an adhesive surface, and from the other surface side of the adhesive sheet. A step of feeding a support material capable of supporting the adhesive sheet; a step of pressing and supporting the support material on the other surface of the adhesive sheet; a step of peeling the adhesive sheet from the release sheet; and the support material On the other hand, the step of pressing and adhering the adhesive sheet supported by the support material to the adherend while applying tension in the direction intersecting the feeding direction of the adhesive sheet; and the support material from the adhesive sheet The structure of providing the process to peel is employ | adopted.

  According to the present invention as described above, the adhesive sheet is pressed against the adherend by the second pressing means while applying the tension in the cross direction to the support material supporting the adhesive sheet by the width direction tension applying means. Therefore, the adhesive sheet can be attached to the adherend while applying tension in the crossing direction to the adhesive sheet. Thereby, the adhesive sheet which provided tension | tensile_strength in the crossing direction can be affixed on a to-be-adhered body, without using an exclusive original fabric.

  At this time, if the support material on the adhesive sheet affixed to the adherend is cut into a predetermined shape, the support material can be used as a protective material for the adhesive sheet, and the support material can be used effectively. Can do.

The side view of the sheet sticking apparatus which concerns on 1st Embodiment of this invention. Operation | movement explanatory drawing of 1st Embodiment. The side view of the sheet sticking apparatus which concerns on 2nd Embodiment of this invention. The fragmentary sectional view of 2nd Embodiment. The fragmentary sectional view concerning the modification of the present invention.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
The X axis, Y axis, and Z axis in the first and second embodiments are orthogonal to each other, the X axis and the Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. And Furthermore, in the first and second embodiments, when viewed from the front direction in FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis and “down” is the direction. In the reverse direction, “left” is the X-axis arrow direction, “right” is the reverse direction, “front” is the Y-axis arrow direction, and “rear” is the reverse direction.

  1 and 2, the sheet affixing device 1 is a first feeding means for feeding out an original fabric RS in which a strip-like release sheet RL is temporarily attached to the adhesive surface AD of an adhesive sheet AS whose one surface is an adhesive surface AD. 2 and a second feeding means 3 for feeding out a support material SL1 capable of supporting the adhesive sheet AS from the other surface side of the adhesive sheet AS, and a second pressing means 3 for pressing and sticking the support material SL1 to the other surface of the adhesive sheet AS. 1 pressing means 4, a peeling plate 5 as a sheet peeling means for peeling the adhesive sheet AS from the peeling sheet RL, and an adhesive sheet AS supported by the support material SL1 are pressed and attached to a wafer WF as an adherend. The second pressing means 6, the width direction tension applying means 7 (FIG. 2) that applies tension in the intersecting direction to the supporting material SL 1 pressed by the second pressing means 6, and the supporting material SL 1 is peeled from the adhesive sheet AS. Peeling support material And it means 8 in its entirety above the table 92 with a support surface 91 for supporting the wafer WF by a suction means such as vacuum pumps and vacuum ejector (not shown) is supported by a frame (not shown).

  The first feeding means 2 includes a support roller 20 that supports the original fabric RS, a guide roller 21 that guides the original fabric RS drawn from the support roller 20, and a drive roller 23 that is driven by a rotation motor 22 as a drive device. And a pinch roller 24 that sandwiches the raw fabric RS between it and a driving roller 26 that is driven by a rotation motor 25 as a driving device, and a driving device that is not shown, and a pinch roller 27 that sandwiches the release sheet RL. And a collection roller 28 for collecting the release sheet RL.

  The second feeding means 3 is driven by a rotation motor 30 as a drive device, and a support roller 31 that supports a support material SL1 whose one surface is an adhesive surface SD, a plurality of guide rollers 32, and a drive device. And a recovery roller 34 that recovers the support material SL1. Note that the adhesive force with which the adhesive surface SD adheres to the adhesive sheet AS is set to be weaker than the adhesive force with which the adhesive surface AD of the adhesive sheet AS adheres to the wafer WF.

  The first pressing means 4 has a pressing roller 43 rotatably supported by a bracket 42 supported by an output shaft 41 of a linear motion motor 40 as a driving device, and a support material SL1 and a raw fabric RS. A pressing roller 43 and a receiving roller 44 disposed to face each other are provided.

  The second pressing means 6 can be rotated by a linear motion motor 62 as a drive device supported by a first slider 61 of a linear motor 60 as a drive device and a bracket 64 supported by an output shaft 63 of the linear motion motor 62. And a pressing roller 65 supported by the motor.

  The width direction tension applying means 7 includes a linear motion motor 72 as a driving device supported by each slider 71 of a pair of front and rear linear motors 70 as a driving device, and a lower portion supported by an output shaft 73 of the linear motion motor 72. A chuck 74 and an upper chuck 75 supported on the lower surface of the linear motor 72 main body are provided. The upper and lower chucks 75 and 74 are arranged above the table 92. In this embodiment, the length in the left-right direction is set to the same length as the length in the left-right direction of the table 92. However, it may be more or less.

  The support material peeling means 8 includes a frame 81 supported by an output shaft (not shown) of a linear motion motor 80 as a drive device supported by the second slider 66 of the linear motor 60, and a drive device supported by the frame 81. A peeling roller 83 driven by a rotation motor 82 and a pinch roller 84 that sandwiches the support material SL1 between the peeling roller 83 are provided.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, in a state where the first and second sliders 61 and 66 of the linear motor 60 are stopped at a position indicated by a two-dot chain line in FIG. 1, the operator shows the original fabric RS and the support material SL1 as shown in FIG. set. Thereafter, when an operation start signal is input via an operation panel (not shown), the first feeding means 2 drives the rotation motors 22 and 25 to feed out the raw fabric RS, and in synchronization with the feeding, The second feeding means 3 and the support material peeling means 8 drive the rotation motors 30, 33, and 82 to feed out the support material SL1 at the same speed as the original fabric RS (hereinafter, such an original fabric RS and the support material SL1). ) May be simply referred to as “first synchronous delivery”). At this time, the 1st press means 4 drives the linear motion motor 40, presses support material SL1 with the press roller 43, and adheres the adhesive surface SD to the adhesive sheet AS. When the detection means (not shown) detects that the adhesive sheet AS to which the support material SL1 has been applied is fed out from the peeling edge of the peeling plate 5 by a predetermined amount, the first and second feeding means 2 and 3 and the support material The peeling means 8 stops the first synchronous feeding and enters a standby state.
Thereafter, when the wafer WF is placed on the support surface 91 of the table 92 by a transfer means (not shown), the suction means (not shown) is driven to hold the wafer WF by suction.
The second pressing means 6 drives the linear motor 60 in a state where the support material peeling means 8 stops driving the rotation motor 82, and the first and second sliders 61 and 66 are indicated by solid lines in FIG. Move to position. In synchronization with this movement, the first and second feeding means 2 and 3 drive the rotation motors 22, 25, 30 and 33 to feed out the support material SL 1 and the adhesive sheet AS, so that the adhesive sheet AS becomes the support material. It is supported by SL1 and peeled off from the release sheet RL. Thereafter, when the detection means (not shown) detects that the adhesive sheet AS supported by the support material SL1 is located immediately above the wafer WF, the first and second feeding means 2, 3 and the second pressing means 6 are rotated. The dynamic motors 22, 25, 30, 33 and the linear motor 60 are stopped. At this time, at least one of the first and second feeding means 2, 3 and at least one of the second pressing means 6 and the support material peeling means 8 serve as a feeding direction tension applying means, and the adhesive sheet AS is attached to the support material SL1. Rotation motors 22, 25, 30, 33, 82, linear so that a predetermined tension is applied in the feeding direction (hereinafter simply referred to as “feeding direction”), and then tension is applied to the adhesive sheet AS. One or more torques of the motor 60 are controlled.

Next, from the state of FIG. 2A, the width direction tension applying means 7 drives each linear motor 70 and the linear motion motor 72 and is supported by the upper and lower chucks 75 and 74 as shown in FIG. 2B. After sandwiching the front and rear ends of the material SL1, the sliders 71 are moved away from each other as shown in FIG. At this time, the width direction tension applying means 7 has a predetermined tension in the cross direction with respect to the support material SL1 so that the tension in the feed direction tension applying means is substantially equal to the tension applied to the support material SL1. And, as a result, the torque of each linear motor 70 is controlled so as to apply tension to the adhesive sheet AS.
Then, after the second pressing means 6 drives the linear motor 62 and the linear motor 60 to lower the pressing roller 65, the first slider 61 is moved to the position indicated by the two-dot chain line in FIG. The adhesive sheet AS is pressed through the material SL1 and attached to the wafer WF. As a result, the adhesive sheet AS is affixed to the wafer WF in a state where substantially equal tension is applied in the feeding direction (left-right direction) and the crossing direction (front-rear direction).

Next, after the width direction tension applying means 7 drives the linear motion motor 72 and the linear motor 70 to release the support material SL1 between the upper and lower chucks 75 and 74, the sliders 71 are moved away from each other. . Thereafter, the support member peeling means 8 drives the linear motion motor 80 and the rotation motor 82 to lower the frame 81, and then rotates the peeling roller 83. At the same time, the second pressing means 6 drives the linear motor 60. The second slider 66 is moved to a position indicated by a two-dot chain line in FIG. Thereby, support material SL1 peels from adhesive sheet AS. Thereafter, after the support material peeling means 8 stops the rotation motor 82, the linear motion motor 80 is driven to raise the frame 81, and the second pressing means 6 drives the linear motion motor 62 to raise the pressure roller 65. Let
Next, after the suction unit (not shown) is stopped and the suction and holding of the wafer WF is released, the wafer WF with the adhesive sheet AS attached is transferred to the next process by a transfer unit (not shown), and thereafter the same operation as described above is performed. Repeated.

  According to the first embodiment as described above, the adhesive sheet AS applied with tension in the crossing direction can be attached to the wafer WF without using a dedicated original fabric RS.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
Note that detailed description of the same configuration and operation as in the first embodiment will be omitted.
As shown in FIGS. 3 and 4, the sheet sticking apparatus 1 </ b> A of the second embodiment is different from the sheet sticking apparatus 1 of the first embodiment in the second pressing means 6, the width direction tension applying means 7, and the support material peeling means 8. The second pressing means 6A, the width direction tension applying means 7A (FIG. 4), and the support material peeling means 8A are provided instead of the above, and are arranged above the table 92 supported by the slider 93A of the linear motor 94A. To do. Further, the support material SL2 of the second embodiment is different in that circular holes SH2 (FIG. 4) are provided at predetermined intervals at both ends in the width direction of the support material SL1 of the first embodiment. In addition, the guide roller 32 of the 2nd feeding means 3 is single.

  In the second pressing means 6A, a pressing roller 65 is rotatably supported by a bracket 64 supported by a frame (not shown).

  The width direction tension applying means 7A includes a pair of pin gears 70A that are provided at both front and rear ends of the pressure roller 65 and are rotatable about the rotation axis of the pressure roller 65. The pin gear 70A includes a disc-shaped main body portion 71A having a diameter substantially equal to that of the pressing roller 65, and a plurality of pins 72A provided on the outer peripheral surface of the main body portion 71A at intervals substantially equal to the intervals in the feeding direction in the holes SH2. It has. The pin 72A includes a cylindrical columnar portion 73A that protrudes from the main body portion 71A and has an outer diameter that can be inserted into and removed from the hole SH2, and a conical conical portion 74A provided at the tip of the cylindrical portion 73A. As shown in FIG. 4B, the outer space DA1 in the intersecting direction in the cylindrical portion 73A is set longer than the outer space DB of the hole SH2 in the support member SL2 in which no tension is applied in the intersecting direction. Thereby, when the holes SH2 on both the front and rear sides are inserted into the respective cylindrical portions 73A, the support material SL2 is given a tension in the crossing direction due to the difference in the outer distance between them, and consequently, the tension is applied to the adhesive sheet AS. Is to be granted.

  The support material peeling means 8A includes a peeling roller 83 driven by a rotating motor 82 and a pinch roller 84 that sandwiches the support material SL2 between the peeling roller 83.

In the above sheet sticking apparatus 1A, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, an operator sets the raw fabric RS and the support material SL2 as shown in FIG. At this time, the hole SH2 of the support material SL2 is inserted into the pin 72A of the pin gear 70A, thereby applying tension in the crossing direction to the support material SL2. Thereafter, when an operation start signal is input via an operation panel (not shown), the first feeding means 2 drives the rotation motors 22 and 25 to feed out the raw fabric RS, and in synchronization with the feeding, The second feeding means 3 and the support material peeling means 8A drive the rotation motors 30, 33, and 82 to feed out the support material SL2 at the same speed as the original fabric RS (hereinafter, such an original fabric RS and the support material SL2). ) May be simply referred to as “second synchronous delivery”). At this time, the 1st press means 4 drives the linear motion motor 40, presses support material SL2 with the press roller 43, and adheres the adhesive surface SD to the adhesive sheet AS. When the detection means (not shown) detects that the adhesive sheet AS to which the support material SL2 has been applied is fed out from the peeling edge of the peeling plate 5 by a predetermined amount, the first and second feeding means 2, 3 and the support material The peeling means 8A stops the second synchronous feeding and enters a standby state.

  Thereafter, the table 92 that supports the wafer WF by the suction means (not shown) is conveyed leftward from the position indicated by the two-dot chain line on the right side of FIG. 3, and the detection means (not shown) detects that the wafer WF has reached a predetermined position. Then, the first and second feeding means 2 and 3 and the support material peeling means 8A start the second synchronous feeding. As a result, the adhesive sheet AS is supported by the support material SL2 and peeled from the release sheet RL, and the pressing roller 65 presses and adheres the adhesive sheet AS to the wafer WF via the support material SL2. At this time, at least one of the first and second feeding means 2 and 3 and the support material peeling means 8A serve as a feeding direction tension applying means, and a predetermined tension is applied to the supporting material SL2 in the feeding direction of the adhesive sheet AS. As a result, one or more torques of the rotation motors 22, 25, 30, 33, 82 are controlled so as to apply tension to the adhesive sheet AS. That is, the tension in the feeding direction applied to the adhesive sheet AS by the feeding direction tension applying means is applied to the adhesive sheet AS due to the difference between the outer distance DA1 of the cylindrical portion 73A in the pin gear 70A and the outer distance DB in the hole SH2. The tension is set to be substantially the same as the tension in the crossing direction. On the contrary, the tension in the crossing direction applied to the adhesive sheet AS due to the difference between the outer distance DA1 of the cylindrical portion 73A in the pin gear 70A and the outer distance DB in the hole SH2 is adhered to the feeding direction tension applying means. The distance between the pins 72A is set so that the tension in the feeding direction applied to the sheet AS is substantially the same.

  Thereafter, when the table 92 moves to the left, the support material SL2 attached to the adhesive sheet AS is peeled off by the peeling roller 83, and when the entire surface of the adhesive sheet AS passes below the peeling roller 83, the bonding to the wafer WF is performed. The application of the sheet AS is completed. Even after the adhesive sheet AS has been pasted, the first and second feeding means 2 and 3 and the support material peeling means 8A continue the second synchronous feeding, and the next adhesive sheet AS is peeled from the peeling sheet RL. When the detection means (not shown) detects that the next adhesive sheet AS has been fed out for a predetermined length, the second synchronous feeding is stopped and the standby state is entered again. Thereafter, the table 92 stops at a position indicated by a two-dot chain line in FIG. 3, and the wafer WF to which the adhesive sheet AS is attached is transferred to the next process by a transfer means (not shown). Then, the table 92 returns to the position indicated by the two-dot chain line on the right side of FIG. 3, and thereafter the same operation as described above is repeated.

  According to the second embodiment as described above, the same effects as those of the first embodiment can be obtained.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, as shown by a two-dot chain line in FIGS. 1 and 3, a rotation motor 13B as a drive device supported by an output shaft 12B of a linear motor 11B as a drive device and an output shaft 14B of the rotation motor 13B. A cutting blade 16B extending downward from the tip of the supported bracket 15B, and cutting means 10B for cutting the support materials SL1, SL2 on the adhesive sheet AS attached to the wafer WF into a predetermined shape. May be provided. In the case of the sheet sticking apparatus 1A, the support material peeling means 8A may be changed to a position indicated by a two-dot chain line. With such a configuration, the portions of the support materials SL1 and SL2 cut on the adhesive sheet AS can be used as a protective sheet for the adhesive sheet AS.
In addition, as shown by a two-dot chain line in FIGS. 1 and 3, instead of the second feeding means 3, the support material SL <b> 1 is provided between drive rollers 32 </ b> C and 33 </ b> C driven by rotation motors 30 </ b> C and 31 </ b> C as drive devices. A second feeding means 3C including pinch rollers 34C and 35C that sandwich SL2 and a plurality or a single guide roller 32 may be provided to rotate the endless support material SL3.

  Further, instead of the pin 72A in FIG. 4, a pin 72D shown in FIG. 5 may be used. The pin 72D protrudes from the main body 71A and has a columnar column part 73D having an outer diameter that can be inserted into and removed from the hole SH2, and the column And an inclined portion 74D obtained by obliquely cutting the portion 73D. With such a configuration, the interval between the apexes 75D of the inclined portions 74D can be made larger than the interval between the apexes 75A of the conical portions 74A shown in FIG. The outer space DA2 can be increased, and the tension in the crossing direction with respect to the support material SL2 can be made larger than the tension shown in FIG.

Further, instead of the first feeding means 2 of the first and second embodiments, a first feeding means for feeding the single-sheet adhesive sheet AS to which the release sheet RL is not temporarily attached may be provided.
In addition, the direction in which the width direction tension applying unit applies tension to the support member may be a direction inclined with respect to the Y axis as long as the direction intersects the feeding direction.
Furthermore, the direction in which the width direction tension applying means applies tension to the support material may be not only one direction but also a plurality of directions. In this case, for example, a plurality of the width direction tension applying means 7 of the first embodiment may be arranged by shifting the direction in which the tension is applied.
Further, in the first embodiment, instead of the width direction tension applying means 7, a width direction tension applying means 7A having a pin gear 70A that is rotatable coaxially with the pressing roller 65 is provided, and a support material is used instead of the support material SL1. SL2 is used to drive the linear motion motor 62 and the linear motor 60 so that the pin 72A of the pin gear 70A is fitted into the hole SH2 of the support material SL2 to apply tension to the support material SL2 and to move to the right. The adhesive sheet AS may be pressed from above the support material SL2 by the roller 65 and attached to the wafer WF.
Furthermore, in the second embodiment, the shape of the hole SH2 is not limited to a circle, but may be a polygon or an ellipse. The shape of the pins 72A and 72D may be any shape that can be inserted into and removed from the hole SH2. Any shape is possible.
In the second embodiment, the pin gears 70 </ b> A and 70 </ b> D may be rotatably supported by a bracket different from the pressing roller 65.
Furthermore, pins 72A and 72D equivalent to the pin gears 70A and 70D may be provided on the peeling roller 83 in the second embodiment.
Furthermore, the tension applied to the support materials SL1 and SL2 by the feeding direction tension applying means and the tension applied to the support materials SL1 and SL2 by the width direction tension applying means 7 and 7A may be the same or the same. It does not have to be.

In addition, the material, type, shape, and the like of the adhesive sheet AS, the support materials SL1 and SL2, and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS and the support materials SL1 and SL2 are not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is employed, the adhesive sheet AS and Appropriate heating means for heating the support materials SL1 and SL2 may be provided. In addition, the adhesive sheet AS and the support materials SL1 and SL2 are, for example, a single layer having only an adhesive layer, an intermediate layer between the base material sheet and the adhesive layer, and an upper surface of the base material sheet. 3 or more layers, such as having a cover layer, or a so-called double-sided adhesive sheet that can peel the substrate sheet from the adhesive layer. It may have a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, earthenware, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes, and the like can be attached to any adherend as described above.
Further, the support materials SL1 and SL2 may be made of a resin or an elastomer that supports the adhesive sheet AS with wettability or static electricity.

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1, 1A ... Sheet sticking apparatus 2 ... 1st feeding means 3, 3C ... 2nd feeding means 4 ... 1st press means 5 ... Release plate (sheet peeling means)
6, 6A ... second pressing means 7, 7A ... width direction tension applying means 8, 8A ... support material peeling means 10B ... cutting means AD ... adhesive surface AS ... adhesive sheet RL ... peeling sheet RS ... original fabric SL1, SL2, SL3 ... support material

Claims (5)

First feeding means for feeding out an adhesive sheet whose one surface is an adhesive surface;
A second feeding means for feeding out a support material capable of supporting the adhesive sheet from the other surface side of the adhesive sheet;
First pressing means for pressing and attaching the support material to the other surface of the adhesive sheet;
A second pressing means for pressing and adhering the adhesive sheet supported by the support material to the adherend;
A width direction tension applying means for applying a tension in a direction intersecting a feeding direction of the adhesive sheet to the support member pressed by the second pressing means,
A sheet sticking device comprising: a support material peeling means for peeling the support material from the adhesive sheet. A first feeding means for feeding out an original fabric in which a strip-shaped release sheet is temporarily attached to the adhesive surface of the adhesive sheet whose one surface is an adhesive surface;
A second feeding means for feeding out a support material capable of supporting the adhesive sheet from the other surface side of the adhesive sheet;
First pressing means for pressing and attaching the support material to the other surface of the adhesive sheet;
Sheet peeling means for peeling the adhesive sheet from the release sheet;
A second pressing means for pressing and adhering the adhesive sheet supported by the support material to the adherend;
A width direction tension applying means for applying a tension in a direction intersecting a feeding direction of the adhesive sheet to the support member pressed by the second pressing means,
A sheet sticking device comprising: a support material peeling means for peeling the support material from the adhesive sheet.   The sheet sticking apparatus according to claim 1, further comprising a cutting unit that cuts the support material on the adhesive sheet attached to the adherend into a predetermined shape. A step of feeding out an adhesive sheet in which one surface is an adhesive surface;
Extending the support material capable of supporting the adhesive sheet from the other surface side of the adhesive sheet;
A step of pressing and attaching the support material to the other surface of the adhesive sheet;
A process of pressing and adhering the adhesive sheet supported by the support material to the adherend while applying tension to the support material in a direction crossing the feeding direction of the adhesive sheet;
And a step of peeling the support material from the adhesive sheet. A step of feeding out an original fabric in which a strip-shaped release sheet is temporarily attached to the adhesive surface of the adhesive sheet whose one surface is an adhesive surface;
Extending the support material capable of supporting the adhesive sheet from the other surface side of the adhesive sheet;
A step of pressing and attaching the support material to the other surface of the adhesive sheet;
Peeling the adhesive sheet from the release sheet;
A process of pressing and adhering the adhesive sheet supported by the support material to the adherend while applying tension to the support material in a direction crossing the feeding direction of the adhesive sheet;
And a step of peeling the support material from the adhesive sheet.

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