JP2014115084A - ガスセンサ - Google Patents
ガスセンサ Download PDFInfo
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- JP2014115084A JP2014115084A JP2012266906A JP2012266906A JP2014115084A JP 2014115084 A JP2014115084 A JP 2014115084A JP 2012266906 A JP2012266906 A JP 2012266906A JP 2012266906 A JP2012266906 A JP 2012266906A JP 2014115084 A JP2014115084 A JP 2014115084A
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- sensor
- gas
- lgs
- acoustic wave
- saw
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
【解決手段】圧電結晶基板のイオン結合性を評価し、これがある指標以上(望ましくは50%以上)である結晶を選択することにより、弾性表面波の減衰をもたらす感応膜を使用せずに極性ガスを吸着させ、弾性表面波とガスとの相互作用距離を増大させる。すなわち、50%以上のイオン結合性を有する構成要素を持つ圧電結晶基板に弾性表面波を伝搬させ、圧電結晶基板の表面に極性ガス分子を吸着させることにより生じた弾性表面波の音速または減衰の変化を利用する。
【選択図】図4
Description
実施例として、従来から良く用いられている水晶と、最近使用されだしたLGSに着目し、これらのイオン結合性の相違を利用したセンサ構成法の有用性を示す。なお、通常の弾性表面波センサで相互作用長を増大させるものとして、反射器を用いた共振器が知られているが、本実施例では、低濃度ガスに対する応答をSAWの多重周回現象を利用して増幅するボールSAWセンサを使用することにより、5.8ppbの検出限界という、SAWセンサ中の最高感度を達成できることを示す。
Claims (4)
- 50%以上のイオン結合性を有する構成要素を持つ圧電結晶基板に弾性表面波を伝搬させ、前記圧電結晶基板の表面に極性ガス分子を吸着させることにより生じた前記弾性表面波の音速または減衰の変化を利用することを特徴とするガスセンサ。
- 使用前に、前記圧電結晶基板の表面を酸素雰囲気に暴露して紫外光を照射しておくことを特徴とする請求項1記載のガスセンサ。
- 使用した前記圧電結晶基板の表面を酸素雰囲気に暴露して紫外光を照射することにより高イオン結合性の表面を露出させ、感度を再生させることを特徴とする請求項1または2記載のガスセンサ。
- 前記圧電結晶基板が球状をなすことを特徴とする請求項1、2または3記載のガスセンサ。
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JP2012266906A JP6213761B2 (ja) | 2012-12-06 | 2012-12-06 | ガスセンサの使用方法 |
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JP2012266906A JP6213761B2 (ja) | 2012-12-06 | 2012-12-06 | ガスセンサの使用方法 |
Publications (2)
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JP2014115084A true JP2014115084A (ja) | 2014-06-26 |
JP6213761B2 JP6213761B2 (ja) | 2017-10-18 |
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JP2012266906A Active JP6213761B2 (ja) | 2012-12-06 | 2012-12-06 | ガスセンサの使用方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018079509A1 (ja) * | 2016-10-27 | 2018-05-03 | 国立研究開発法人物質・材料研究機構 | ガスセンサー装置および気体成分除去方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09221392A (ja) * | 1996-02-16 | 1997-08-26 | Matsushita Electric Ind Co Ltd | 複合圧電基板とその製造方法 |
JP2009109343A (ja) * | 2007-10-30 | 2009-05-21 | Toppan Printing Co Ltd | 匂いセンサ用球状弾性表面波素子および匂いセンシングシステム |
-
2012
- 2012-12-06 JP JP2012266906A patent/JP6213761B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09221392A (ja) * | 1996-02-16 | 1997-08-26 | Matsushita Electric Ind Co Ltd | 複合圧電基板とその製造方法 |
JP2009109343A (ja) * | 2007-10-30 | 2009-05-21 | Toppan Printing Co Ltd | 匂いセンサ用球状弾性表面波素子および匂いセンシングシステム |
Non-Patent Citations (1)
Title |
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永井弘樹、外10名: "「ボールSAWセンサによる極性ガスの高感度測定」", 圧電材料・デバイスシンポジウム2011講演論文集, JPN6016034938, 31 January 2011 (2011-01-31), JP, pages 121 - 126 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018079509A1 (ja) * | 2016-10-27 | 2018-05-03 | 国立研究開発法人物質・材料研究機構 | ガスセンサー装置および気体成分除去方法 |
JPWO2018079509A1 (ja) * | 2016-10-27 | 2019-09-19 | 国立研究開発法人物質・材料研究機構 | ガスセンサー装置および気体成分除去方法 |
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