JP2014107316A - Lid, package, electronic device, mobile, and manufacturing method for mobile - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lid which can facilitate degassing and sealing in a cavity while reducing the cost, and to provide a package and an electronic device using the same.SOLUTION: A lid 92 as a cover comprises: a first surface 92a and a second surface 92b having a relation of the front and back; an outer peripheral surface 92c connecting the first and second surfaces 92a, 92b; first bottomed grooves 94a, 94b provided in the first surface 92a from the outer peripheral surface 92c toward the central part, in the plan view; and second bottomed grooves 94a', 94b' provided in the second surface 92b from the outer peripheral surface 92c toward the central part, in the plan view.

Description

  The present invention relates to a lid, a package using the lid, an electronic device using the lid, an electronic apparatus using the electronic device, a moving body, and a method for manufacturing the electronic device.

  In recent years, portable electronic devices have been widely used, and accordingly, demands for reducing the size and weight of electronic devices and reducing the cost have increased. For this reason, there is an increasing demand for miniaturization and cost reduction while maintaining high accuracy in electronic components used in electronic devices. In particular, in a vibration device in which a vibration element is housed in a package, vibration characteristics are maintained by maintaining a space in which the vibration element is housed in an airtight manner, and therefore various proposals have been made for its sealing technology.

  For example, in the joining methods disclosed in Patent Document 1 and Patent Document 2, the lid that covers the opening of the space in which the vibration device element (vibration element) is accommodated and the periphery of the opening are welded after leaving a part thereof. Care is taken, and then the lid and the peripheral edge of the opening are sealed. In addition, in the small crystal resonator disclosed in Patent Document 3, a notch is formed in the package surface to be joined to the lid (lid), and the metal brazing material is melted leaving a part other than the notch. The lid and the package are joined and deaerated. Thereafter, the metal brazing material in the notched portion is remelted to seal the lid and the package.

JP 2000-223604 A JP 2002-359111 A Japanese Patent Laid-Open No. 1-151813

  However, in the joining method shown in Patent Document 1 and Patent Document 2 described above, the lid and the periphery of the opening portion are welded leaving a part, and the unwelded portion is welded after deaeration. It is difficult to stably manage the dimensions and the like, and the deaeration takes place from a slight gap in the unwelded part, so the deaeration time becomes long and the number of sealing steps increases. Moreover, in the structure shown by patent document 3, in order to deaerate while fuse | melting a metal brazing material, management of a molten state is required, and stable deaeration and sealing cannot be performed. The vibration characteristics may not be stable. In addition, it is conceivable to provide a notch (groove) on the lid side, but it is necessary to orient the side on which the notch is provided to the package side, and a new problem that requires selection of the front and back of the lid also appears. .

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] A lid according to this application example includes a first surface and a second surface in a front-back relationship, an outer peripheral surface connecting the first surface and the second surface, and the outer peripheral surface. A first groove provided on the first surface from the outer surface to the central portion of the second surface, and a second groove provided on the second surface from the outer peripheral surface toward the central portion of the second surface. And a groove.

According to this application example, the first groove and the second groove of the lid body are provided from the outer peripheral surface of the lid body toward the central portion of the lid body. In other words, the first groove and the second groove are provided on the first surface and the second surface from the outer peripheral surface of the lid toward the inside of the lid. And the 1st groove | channel and the 2nd groove | channel are provided in the 1st surface and 2nd surface of the cover body which have a front-back relationship. With these configurations, when the lid body is joined to the joining member, the portion provided with the first groove or the second groove is not joined, and either the first groove or the second groove that is not joined. Exhaust can be performed by this groove. The first groove and the second groove are provided in the lid in advance, and the first groove and the second groove serve as exhaust holes as they are. It is not necessary to manage the dimensions of the holes), and stable exhaust and joining can be performed. Moreover, the said cover body can be mounted in a joining member, without distinguishing front and back.
Note that the above-described central portion of the lid means a portion of the first and second surfaces facing inward from the outer peripheral surface of the lid, and the first surface and the second surface of the lid. It is the part that entered the inside from the outer periphery on the surface.

  Application Example 2 In the lid according to the application example described above, the first groove and the second groove are provided at positions where at least a part thereof overlaps in a plan view.

  According to this application example, when the first groove and the second groove are provided at a position where at least a part thereof overlaps in a plan view, when the lid is placed on the joining member, the plan view is viewed from above. In addition, the position of the exhaust hole can be easily estimated. As a result, the exhaust hole can be easily sealed.

  Application Example 3 In the lid according to the application example described above, the first groove and the second groove are provided at different positions in plan view.

  According to this application example, since the first groove and the second groove are provided at different positions in plan view, the thickness of the member remaining in the portion where the first groove and the second groove are provided. Can be thickened. Thereby, the fusion allowance (melting volume) at the time of sealing an exhaust hole can be enlarged, and it becomes possible to perform more stable sealing.

  Application Example 4 In the lid according to the application example, the first groove and the second groove pass through the center of the first surface or the second surface, and pass through the first surface or the second surface. It is characterized by being provided at a line-symmetrical position with respect to one virtual line divided into two.

  According to this application example, when the lid is turned upside down, the first groove or the second groove is disposed at the same position, so that the sealing can be performed at the same position. As a result, the efficiency of the sealing work can be increased.

  Application Example 5 In the lid according to the application example described above, the first groove and the second groove are provided at point-symmetrical positions with respect to the center of the first surface or the second surface. It is characterized by.

  According to this application example, when the lid is turned upside down, the first groove or the second groove is disposed at the same position, so that the sealing can be performed at the same position. As a result, the efficiency of the sealing work can be increased.

  Application Example 6 In the lid according to the application example described above, when the first groove and the second groove are a pair of the first groove and the second groove, a plurality of pairs are provided. Features.

  According to this application example, since a plurality of exhaust holes can be provided, the exhaust capacity can be improved and the exhaust speed can be increased. As a result, the efficiency of the sealing work can be increased.

  Application Example 7 A package according to this application example includes the lid according to any one of the application examples described above and a base to which the lid is joined.

  According to this application example, the first groove and the second groove of the lid body have a bottomed and front-back relationship with the first surface of the lid body from the outer peripheral surface of the lid body toward the center portion of the lid body. It is provided on two sides. With these configurations, when the lid is joined to the base, the portion provided with the first groove or the second groove is not joined, and either the first groove or the second groove that is not joined is joined. Exhaust can be performed by the groove. In addition, the first groove and the second groove are provided in the lid in advance, and the first groove and the second groove serve as exhaust holes as they are. It is not necessary to manage the size of the holes), and a package that can be stably exhausted and bonded can be provided.

  Application Example 8 An electronic device according to this application example includes a package including the lid according to any one of the application examples described above and a base to which the lid is bonded, and is accommodated in the package. It is characterized by comprising an element.

  According to this application example, the first groove and the second groove of the lid body are bottomed grooves from the outer peripheral surface of the lid body toward the central portion of the lid body, and the first groove of the lid body that is in a front-back relationship. It is provided on the surface and the second surface. With these configurations, when the lid is joined to the base, the portion provided with the first groove or the second groove is not joined, and either the first groove or the second groove that is not joined is joined. Exhaust can be performed by the groove. In addition, the first groove and the second groove are provided in the lid in advance, and the first groove and the second groove serve as exhaust holes as they are. It is not necessary to manage the dimensions of the holes), and stable exhaust and joining can be performed. As a result, it is possible to prevent deterioration of the characteristics of the elements housed in the package due to the influence of residual gas and the like, and it is possible to provide an electronic device having stable characteristics.

  Application Example 9 In the electronic device according to the application example described above, the first groove or the second groove is melted and sealed.

  According to this application example, since the sealing is performed by melting the first groove or the second groove, the sealing can be performed easily and reliably.

  Application Example 10 An electronic apparatus described in this application example includes the electronic device described in the application example.

  According to this application example, by using an electronic device having the above-described lid body and stable characteristics, an electronic apparatus having stable characteristics, particularly a highly reliable electronic apparatus having stable long-term aging characteristics, etc. Can be provided.

  Application Example 11 A moving object described in this application example includes the electronic device described in the application example.

  According to this application example, by using an electronic device to which the above-described lid is applied and characteristics are stable, a mobile object with stable characteristics, particularly a mobile object with stable long-term aging characteristics and the like is highly reliable. Can be provided.

  Application Example 12 An electronic device manufacturing method according to this application example includes a step of joining the lid according to any one of the above application examples and a base in which an element is stored in a storage unit, and the lid A step of exhausting the storage portion from the first groove or the second groove of a body, and a step of sealing the first groove or the second groove used for the exhaust. And

  According to this application example, there is no need to distinguish the front and back of the lid body, and management of an unwelded part for providing an exhaust hole is not necessary. In other words, exhaust and sealing are performed by a simple method. It is possible to provide a method of manufacturing an electronic component that can be used.

The perspective view which shows the outline of the vibrator | oscillator as an electronic device using the cover body (lid) which concerns on this invention. It is the schematic which shows the vibrator | oscillator as an electronic device (1st Embodiment) using the cover body (lid) based on this invention, (a) is a top view, (b) is a front sectional view. The top view which shows the gyro element as an element used for the electronic device which concerns on this invention. An example of the cover body (lid) which concerns on this invention is shown, (a) is a top view, (b) is a front sectional view. The modification of the lid (lid) concerning the present invention is shown, (a) is modification 1, (b) is modification 2, and (c) is a figure showing modification 3. The modification of the lid (lid) concerning the present invention is shown, (a) is modification 4, (b) is modification 5, (c) is a figure showing modification 6. (A)-(d) is a front sectional view which shows the outline of the manufacturing process of the vibrator | oscillator as an electronic device. The front sectional view showing the outline of the gyro sensor as the electronic device (second embodiment) according to the present invention. The perspective view which shows the structure of the mobile type personal computer as an example of an electronic device. The perspective view which shows the structure of the mobile telephone as an example of an electronic device. The perspective view which shows the structure of the digital still camera as an example of an electronic device. The perspective view which shows the structure of the motor vehicle as an example of a mobile body.

Hereinafter, the lid of the present invention and an electronic device using the lid will be described in detail based on embodiments shown in the accompanying drawings.
[First Embodiment of Electronic Device]
First, an embodiment of a vibrator will be described as a first embodiment of an electronic device in which the lid according to the present invention and the lid piece are applied to a package.

  FIG. 1 is a schematic perspective view showing a vibrator as an electronic device using a lid according to the present invention. 2A and 2B schematically show a vibrator as an electronic device using the lid according to the present invention, wherein FIG. 2A is a plan view and FIG. 2B is a front sectional view. FIG. 3 is a plan view showing a gyro element as an element included in the vibrator shown in FIG. In the following, as shown in FIG. 1, the three axes orthogonal to each other are defined as an x-axis, a y-axis, and a z-axis, and the z-axis coincides with the thickness direction of the vibrator. A direction parallel to the x-axis is referred to as an “x-axis direction (second direction)”, a direction parallel to the y-axis is referred to as a “y-axis direction (first direction)”, and a direction parallel to the z-axis is “ z-axis direction ".

  A vibrator 1 as an example of the electronic device shown in FIGS. 1 and 2 includes a gyro element (vibration element) 2 as an element and a package 9 that houses the gyro element 2. Hereinafter, the gyro element 2 and the package 9 will be sequentially described in detail.

(Gyro element)
FIG. 3 is a plan view of a gyro element as a resonator element viewed from above (from the side of a lid 92 described later and in the z-axis direction of FIG. 2). The gyro element includes a detection signal electrode, a detection signal wiring, a detection signal terminal, a detection ground electrode, a detection ground wiring, a detection ground terminal, a drive signal electrode, a drive signal wiring, a drive signal terminal, a drive ground electrode, and a drive ground wiring. In addition, a driving ground terminal and the like are provided, but are omitted in the figure.

  The gyro element 2 as a vibrating piece is an “out-of-plane detection type” sensor that detects an angular velocity around the z axis, and although not shown, a base material and a plurality of electrodes provided on the surface of the base material, It consists of wiring and terminals. The gyro element 2 can be made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate. Among these, it is preferable that the gyro element 2 is made of quartz. Thereby, the gyro element 2 which can exhibit the outstanding vibration characteristic (frequency characteristic) is obtained.

  Such a gyro element 2 includes a so-called double T-shaped vibrating body 4, a first supporting portion 51 and a second supporting portion 52 as supporting portions for supporting the vibrating body 4, the vibrating body 4, the first and first 2 It has the 1st beam 61, the 2nd beam 62, the 3rd beam 63, and the 4th beam 64 as a beam which connects the support parts 51 and 52.

  The vibrating body 4 has an extension in the xy plane and has a thickness in the z-axis direction. Such a vibrating body 4 includes a base 41 located at the center, a first detection vibrating arm 421 and a second detection vibrating arm 422 extending from the base 41 to both sides along the y-axis direction, and an x from the base 41. A first connecting arm 431 and a second connecting arm 432 that extend to both sides along the axial direction, and a vibrating arm that extends from the tip of the first connecting arm 431 to both sides along the y-axis direction. A first driving vibrating arm 441, a second driving vibrating arm 442, a third driving vibrating arm 443 as a vibrating arm extending from the tip of the second connecting arm 432 to both sides along the y-axis direction, and a fourth driving arm 443; And a drive vibrating arm 444. The distal ends of the first and second detection vibrating arms 421 and 422 and the first, second, third, and fourth driving vibrating arms 441, 442, 443, and 444 are substantially larger in width than the base end side, respectively. Weight portions (hammer heads) 425, 426, 445, 446, 447, and 448 as rectangular wide portions are provided. By providing such weight parts 425, 426, 445, 446, 447, 448, the sensitivity of detecting the angular velocity of the gyro element 2 is improved.

  Further, the first and second support portions 51 and 52 respectively extend along the x-axis direction, and the vibrating body 4 is located between the first and second support portions 51 and 52. . In other words, the first and second support portions 51 and 52 are disposed so as to face each other along the y-axis direction with the vibrating body 4 interposed therebetween. The first support 51 is connected to the base 41 via the first beam 61 and the second beam 62, and the second support 52 is connected to the base 41 via the third beam 63 and the fourth beam 64. It is connected with.

  The first beam 61 passes between the first detection vibrating arm 421 and the first drive vibrating arm 441 to connect the first support portion 51 and the base 41, and the second beam 62 is connected to the first detection vibrating arm 421. The first support part 51 and the base part 41 are connected to each other through the third drive vibration arm 443, and the third beam 63 passes between the second detection vibration arm 422 and the second drive vibration arm 442. The second support portion 52 and the base portion 41 are connected, and the fourth beam 64 connects the second support portion 52 and the base portion 41 through the space between the second detection vibration arm 422 and the fourth drive vibration arm 444.

  Each of the beams 61, 62, 63, and 64 is formed in an elongated shape having a meandering portion extending along the y-axis direction while reciprocating along the x-axis direction, and thus has elasticity in all directions. . Therefore, even if an impact is applied from the outside, each beam 61, 62, 63, 64 has an action of absorbing the impact, so that detection noise caused by this can be reduced or suppressed.

  The gyro element 2 having such a configuration detects the angular velocity ω around the z-axis as follows. When an electric field is generated between the drive signal electrode (not shown) and the drive ground electrode (not shown) in a state where the angular velocity ω is not applied, the gyro element 2 causes the drive vibrating arms 441, 442, 443, 444 to Bending vibration is performed in the x-axis direction. At this time, the first and second drive vibrating arms 441 and 442 and the third and fourth drive vibrating arms 443 and 444 perform plane-symmetric vibration with respect to the yz plane passing through the center point (center of gravity). The base 41, the first and second connecting arms 431 and 432, and the first and second detection vibrating arms 421 and 422 hardly vibrate.

  When an angular velocity ω is applied to the gyro element 2 around the z-axis in the state where the drive vibration is performed, Coriolis force in the y-axis direction is applied to the drive vibration arms 441, 442, 443, 444 and the connection arms 431, 432. In response to this vibration in the y-axis direction, the detected vibration in the x-axis direction is excited. Then, the detection signal electrode (not shown) and the detection ground electrode (not shown) detect the distortion of the detection vibrating arms 421 and 422 generated by this vibration, and the angular velocity ω is obtained.

(package)
The package 9 stores the gyro element 2. The package 9 may contain an IC chip or the like for driving the gyro element 2 in addition to the gyro element 2 as in an electronic device described later. Such a package 9 has a substantially rectangular shape in plan view (xy plan view).

  As shown in FIGS. 1 and 2, the package 9 includes a base 91 having a recess opened on the upper surface, and a lid as a lid joined to the base via a seam ring 93 so as to close the opening of the recess. 92. The base 91 has a plate-like bottom plate 911 and a frame-like side wall 912 provided on the peripheral edge of the upper surface of the bottom plate 911. On the upper surface of the frame-shaped side wall 912, a seam ring 93 made of an alloy such as Kovar is provided. The seam ring 93 has a function as a bonding material with the lid 92, and is provided in a frame shape (circumferential shape) along the upper surface of the side wall 912. The lid 92 is provided with first grooves 94a and 94b at opposite ends of the first surface 92a, and second grooves 94a 'and 94b' at opposite ends of the second surface 92b, which is the back surface of the first surface 92a. Is provided. The configuration of the lid 92 will be described in detail later. When the lid 92 is placed on the seam ring 93, the second grooves 94 a ′ and 94 b ′ or the first grooves 94 a and 94 b are formed so as to cover the storage portion. In this example, the second grooves 94a 'and 94b' cover the storage space. Such a package 9 has a storage space as a storage portion inside thereof, and the gyro element 2 is stored and installed in the storage space in an airtight manner. In the storage space in which the gyro element 2 is stored, the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ are formed after exhausting (degassing) from the second grooves 94a ′ and 94b ′. The lid 92 remaining in the formed portion is sealed by a sealing portion 95 that is solidified after being melted.

  The constituent material of the base 91 is not particularly limited, but various ceramics such as aluminum oxide can be used. The constituent material of the lid 92 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 91. For example, when the constituent material of the base 91 is ceramic as described above, an alloy such as Kovar is preferable.

  The gyro element 2 has conductive properties such as solder, silver paste, and conductive adhesive (adhesive in which conductive fillers such as metal particles are dispersed in a resin material) at the first and second support portions 51 and 52. It is fixed to the upper surface of the bottom plate 911 via a fixing member 8. Since the first and second support portions 51 and 52 are located at both ends of the gyro element 2 in the y-axis direction, the vibrating body 4 of the gyro element 2 can be held at both ends by fixing such portions to the bottom plate 911. The gyro element 2 is supported and can be stably fixed to the bottom plate 911. Therefore, unnecessary vibration (vibration other than detection vibration) of the gyro element 2 is suppressed, and the detection accuracy of the angular velocity ω by the gyro element 2 is improved.

  The conductive fixing member 8 corresponds to two detection signal terminals 714, two detection ground terminals 724, a drive signal terminal 734, and a drive ground terminal 744 provided in the first and second support portions 51 and 52 ( 6) in contact with each other and spaced apart from each other. Further, six connection pads 10 corresponding to the two detection signal terminals 714, the two detection ground terminals 724, the drive signal terminal 734, and the drive ground terminal 744 are provided on the upper surface of the bottom plate 911, and a conductive fixing member is provided. These connection pads 10 and any one of the corresponding terminals are electrically connected via 8.

(Lid as lid)
Here, the lid 92 as a lid will be described with reference to FIG. FIG. 4 shows an example of a lid as a lid according to the present invention, where (a) is a plan view and (b) is a front sectional view.

  The lid 92 serving as a lid closes the opening of the recess opening on the upper surface of the package 9 and is joined around the opening of the recess using, for example, a seam welding method. More specifically, the lid 92 has a plate shape having a first surface 92a and a second surface 92b that are in a front-back relationship, and an outer peripheral surface 92c that connects the first surface 92a and the second surface 92b. It is a member. For the lid 92 of this example, a Kovar plate material is used. By using a Kovar plate for the lid 92, when sealing, the seam ring 93 and the lid 92 formed of Kovar are melted in the same molten state, and further easily alloyed so that sealing is easy. And reliably. The lid 92 may be made of a plate material of another material instead of Kovar. For example, a metal material such as 42 alloy or stainless steel, or the same material as the side wall 912 of the package 9 may be used.

  When the lid 92 is viewed in plan from the first surface 92a side, the two bottomed first grooves 94a provided on the first surface 92a from the outer peripheral surface 92c toward the inside (center portion) of the lid 92. , 94b. The first grooves 94a and 94b pass through the center G of the first surface 92a and are provided on one virtual line C1 among the virtual lines C1 and C2 that divide the first surface 92a into two. In other words, the first grooves 94a and 94b are provided at positions that are line-symmetric with respect to the other virtual line C2. The first grooves 94a and 94b are formed from the outer peripheral surface 92c of the lid 92 so as to have a portion overlapping the opening when the lid 92 is placed so as to close the opening of the recess opening on the upper surface of the package 9. It is provided toward the inside (center). In other words, the ends of the first grooves 94 a and 94 b on the center side are inside the inner wall of the frame-shaped side wall 912 provided on the peripheral edge of the upper surface of the bottom plate 911 that constitutes the base 91 (the center in the plan view of the package). Side).

  Further, the second surface 92b is also provided with two second grooves 94a 'and 94b' similarly to the first surface 92a. The two second grooves 94a ′ and 94b ′ pass through the center G of the second surface 92b in the same manner as the first surface 92a, and are one of the virtual lines C1 and C2 that divide the second surface 92b into two. It is provided above. In other words, the second grooves 94a 'and 94b' are provided at positions symmetrical with respect to the other virtual line C2. The second grooves 94a ′ and 94b ′ are formed from the outer peripheral surface 92c of the lid 92 so as to have a portion overlapping the opening when the lid 92 is placed on the upper surface of the package 9 so as to block the opening of the recess. It is provided toward the center. In other words, the ends of the second grooves 94 a ′ and 94 b ′ on the center side are inside the inner wall of the frame-like side wall 912 provided on the peripheral edge of the upper surface of the bottom plate 911 constituting the base 91 (the package plane). It is provided to reach the visual center side).

  Thus, by providing the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′, the lid 92 can be set without distinguishing between the front and the back, and the first grooves 94a and 94b or Exhaust can be performed from the second grooves 94a ′ and 94b ′.

  And after exhausting a recessed part (storage space as a storage part) from the clearance gap between the 1st groove | channel 94a, 94b or 2nd groove | channel 94a ', 94b' and the joint surface of the package 9, this 1st groove | channel 94a is exhausted. , 94b or the second grooves 94a ′ and 94b ′ are melted with a laser beam or the like and sealed to perform airtight sealing.

  As described above, the lid 92 has four bottomed grooves, that is, the first groove 92 so as to overlap the both surfaces of the first surface 92a and the second surface 92b when the lid 92 is viewed from the first surface 92a side. Grooves 94a and 94b and second grooves 94a ′ and 94b ′ are provided. In this example, four bottomed grooves are provided on both the first surface 92a and the second surface 92b so as to overlap when the lid 92 is viewed in plan from the first surface 92a side. Although described, the arrangement of the grooves is not limited to this. Other examples of the arrangement of the grooves will be described in detail in a modification described later.

  According to the lid 92 having such a configuration, when the lid 92 and the package 9 are joined, the first grooves 94a and 94b or the second grooves 94a ′ and 94b ′ on the joint surface side with the package 9 are not formed. It is not joined by seam welding. Further, the first grooves 94 a and 94 b or the second grooves 94 a ′ and 94 b ′ on the joint surface side with the package 9 are opened in the outer peripheral surface 92 c, and the extending center side end is inside the inner wall of the side wall 912. That is, it is provided so as to reach a recess (storage space as a storage portion). Therefore, exhaust can be performed from the recessed portion (the storage space as the storage portion) by any one of the first grooves 94a and 94b or the second grooves 94a 'and 94b' that are not joined. In addition, since the first grooves 94a and 94b or the second grooves 94a ′ and 94b ′ are provided in the lid 92 in advance, it is possible to control the dimensions of the unjoined portions (exhaust holes) used for exhausting as in the prior art. It is not necessary to perform this, and it becomes possible to perform exhaust and joining stably.

  Furthermore, since the first grooves 92a and 94b and the second grooves 94a ′ and 94b ′ provided on the first surface 92a and the second surface 92b which are in a front-back relationship are provided, the lid 92 is distinguished from the front and back. It can be mounted on the package 9 which is a joining member without performing.

  The first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ pass through the center G of the first surface 92a and the second surface 92b, and the virtual line C1 that divides the first surface 92a and the second surface 92b into two parts. , C2 on one imaginary line C1 and provided at a position symmetrical with respect to the other imaginary line C2. As a result, when the first grooves 94a and 94b and the second grooves 94a 'and 94b' are sealed, it is possible to seal them by welding the same portions. That is, it is possible to perform sealing without changing the welding position, which is effective in reducing the number of man-hours for sealing and the stability of sealing.

(Modification of lid)
Next, a modified example of the lid as the lid will be described with reference to FIGS. 5 and 6. 5A is a diagram showing Modification Example 1, FIG. 5B is a modification example 2, FIG. 5C is a diagram showing Modification Example 3, and FIG. 6A is a modification example 4 and FIG. ) Is a fifth modification example, and FIG. 6C is a diagram showing a sixth modification example. In addition, description of the same structure as the above-mentioned form is abbreviate | omitted.

<Modification 1 of the lid>
A modification 1 of the lid will be described with reference to FIG. 5A. In the figure, the left figure is a plan view and the right figure is a right side view. The lid 92 of Modification 1 has a configuration in which one bottomed groove is provided on each of the first surface 92a and the second surface 92b.

  More specifically, the first groove 94 a is provided on the first surface 92 a as a bottomed groove that opens to one surface of the outer peripheral surface of the lid 92 and then extends toward the center of the lid 92. In other words, the first groove 94a is provided on an imaginary line C1 that passes through the center G of the first surface 92a and divides the first surface 92a and the second surface 92b into two, and is shown on the left side of the figure with the imaginary line C1 as a reference. They are slightly shifted in the (−y-axis direction).

  Further, a second groove 94a 'is provided on the second surface 92b opposite to the first surface 92a and at a position overlapping the first groove 94a in plan view. The second groove 94 a ′ opens on one surface of the outer peripheral surface of the lid 92 (the same surface as the surface on which the first groove 94 a is opened), and from there to the second surface as a groove with a bottom toward the center portion of the lid 92. 92b. In other words, the second groove 94a ′ is provided on the imaginary line C1 that passes through the center G of the second surface 92b and divides the first surface 92a and the second surface 92b into two, and is illustrated with reference to the imaginary line C1. They are arranged slightly shifted to the right (y-axis direction).

  As described above, the first groove 94a and the second groove 94a 'are provided at positions where at least a part thereof overlaps in a plan view. Therefore, when the lid 92 is placed on a package (not shown), the position of the first groove 94a or the second groove 94a 'serving as an exhaust hole can be estimated from the plane (above). Thereby, it becomes possible to perform sealing easily. Further, in the arrangement of this example, when the lid 92 is inverted around the imaginary line C1, the first groove 94a is arranged at the position of the second groove 94a 'before being inverted. Therefore, when the lid 92 is inverted around the imaginary line C1, the lid 92 is inverted so that the first groove 94a is arranged at the position of the second groove 94a ′ before the inversion. Even if the first groove 94a or the second groove 94a ′ is set at the same position, the sealing can be performed at the same position, which is efficient.

<Modification 2 of the lid>
Next, modification 2 of the lid will be described with reference to FIG. 5B. In the figure, the left view is a plan view and a front view, and the right view is a right side view. The lid 92 of Modification 2 has a configuration in which two bottomed grooves are provided on the first surface 92a and the second surface 92b.

  Specifically, the first surface 92a of the lid 92 is provided with first grooves 94a and 94b, and the second surface 92b is provided with second grooves 94a 'and 94b'. The first groove 94 a is opened on one surface of the outer peripheral surface of the lid 92, and is provided on the first surface 92 a as a bottomed groove from there toward the central portion of the lid 92. In other words, the first groove 94a is provided on an imaginary line C1 that passes through the center G of the first surface 92a and divides the first surface 92a and the second surface 92b into two, and is shown on the left side of the figure with the imaginary line C1 as a reference. They are slightly shifted in the (−y-axis direction). The other first groove 94b is provided on the first surface 92a that is point-symmetric with respect to the center G of the first groove 94a and the first surface 92a. In other words, the first groove 94 b is a bottomed groove that opens to the outer peripheral surface of the lid 92 and that extends from the first groove 94 b toward the center of the lid 92. In other words, the first groove 94a is provided on an imaginary line C1 that passes through the center G of the first surface 92a and divides the first surface 92a and the second surface 92b into two, and is shown on the right side of the figure with reference to the imaginary line C1. They are arranged slightly shifted in the (y-axis direction).

  The second groove 94a 'is provided on the second surface 92b opposite to the first surface 92a where the first groove 94a is provided, that is, on the second surface 92b at a position overlapping the first groove 94a in plan view. The second groove 94 a ′ opens on one surface of the outer peripheral surface of the lid 92 (the same surface as the surface on which the first groove 94 a is opened), and from there to the second surface as a groove with a bottom toward the center portion of the lid 92. 92b. In other words, the second groove 94a ′ is provided on the imaginary line C1 that passes through the center G of the second surface 92b and divides the first surface 92a and the second surface 92b into two, and is illustrated with reference to the imaginary line C1. They are arranged slightly shifted to the right (y-axis direction). The other second groove 94b 'is provided on the second surface 92b at a point-symmetrical position with respect to the center G of the second groove 94a' and the second surface 92b. In other words, the second groove 94 b ′ is a bottomed groove that opens on the outer peripheral surface of the lid 92 and goes from there to the center of the lid 92. In other words, the second groove 94b ′ is provided on an imaginary line C1 that passes through the center G of the first surface 92a and divides the first surface 92a and the second surface 92b into two, and is illustrated with reference to the imaginary line C1. They are arranged slightly shifted to the left (−y axis direction).

  Thus, the first groove 94a (first surface 92a) and the second groove 94a ′ (second surface 92b), and the first groove 94b (first surface 92a) and the second groove 94b ′ (second surface 92b). Are provided at positions where at least a part thereof overlaps in plan view. Therefore, when the lid 92 is placed on a package (not shown), the positions of the first groove 94a or the second groove 94a ′ and the first groove 94b or the second groove 94b ′ to be exhaust holes are flat (lid). It can be estimated from the upper side of the first surface 92a side of 92). Thereby, it becomes possible to perform sealing easily.

  Further, in the arrangement of this example, the first groove 94a and the first groove 94b provided on the first surface 92a, and the second groove 94a ′ and the second groove 94b ′ provided on the second surface 92b, Each is arranged at a point-symmetrical position with respect to the center G of the lid 92. In addition, when the first groove 94a and the second groove 94a ′, and the first groove 94b and the second groove 94b ′ have the lid 92 inverted with the imaginary line C1 as the center, the front and back grooves are switched to the same position. It is arranged to be. Accordingly, when the lid 92 is set in the package, any of the first groove 94a, the second groove 94a ′, the first groove 94b, and the second groove 94b ′ is placed at the same position no matter how the lid 92 is inverted. The groove is arranged. This makes it possible to set the lid 92 in the package without considering the orientation of the lid 92. The workability is remarkably improved, and the sealing can be performed at the same position. It becomes possible to raise.

<Modification 3 of the lid>
Next, a third modification example of the lid will be described with reference to FIG. 5C. In the figure, the upper diagram is a plan view and the lower diagram is a front view. The lid 92 of Modification 3 has a configuration in which one bottomed groove is provided on each of the first surface 92a and the second surface 92b at different positions in plan view.

  More specifically, the first groove 94 a is provided on the first surface 92 a as a bottomed groove that opens to one surface of the outer peripheral surface of the lid 92 and then extends toward the center of the lid 92. The first groove 94a passes through the center G of the first surface 92a, and is displaced from the imaginary line C1 that divides the first surface 92a and the second surface 92b into two on the left side (−y axis direction).

  In addition, a second groove 94a 'is provided in the second surface 92b at a position symmetrical with respect to the virtual line C1 in plan view. Accordingly, the second groove 94a 'is disposed so as to be shifted to the right side (y-axis direction) in the drawing from the virtual line C1. The second groove 94a ′ opens on one surface of the outer peripheral surface of the lid 92 (the same surface as the surface on which the first groove 94a is opened), and from there, the second groove 94a ′ is a bottomed groove toward the center of the lid 92. The second surface 92b is provided.

  As described above, since the first groove 94a and the second groove 94a ′ are provided at different positions in plan view, the portion where the first groove 94a and the second groove 94a ′ are provided remains. The member thickness can be increased. Thereby, it is possible to increase the melting allowance (melting volume) when sealing the exhaust hole (the first groove 94a or the second groove 94a '), and it is possible to perform more stable sealing.

  In addition, if the first groove 94a and the second groove 94a ′ are arranged at positions symmetrical with respect to the virtual line C1 in plan view as in the third modification, the lid 92 is inverted with respect to the virtual line C1. When this occurs, the first groove 94a becomes the position of the second groove 94a ′ before being inverted. Thereby, even when the lid 92 is set in the package by reversing the front and back, since the first groove 94a or the second groove 94a ′ is arranged at the same position, sealing can be performed at the same position, which is efficient. .

<Modification 4 of the lid>
Next, a fourth modification of the lid will be described with reference to FIG. 6A. In the figure, the left figure is a plan view and the right figure is a right side view. The lid 92 of Modification 4 has a configuration in which one bottomed groove is provided on each of the first surface 92a and the second surface 92b at different positions in plan view.

  More specifically, the first groove 94 a is provided on the first surface 92 a as a bottomed groove that opens to one surface of the outer peripheral surface of the lid 92 and then extends toward the center of the lid 92. The first groove 94a passes through the center G of the first surface 92a, and is on the left side (−y-axis direction) in the drawing from the virtual line C1 of the virtual lines C1 and C2 that divide the first surface 92a and the second surface 92b into two. They are offset.

  In addition, a second groove 94a 'is provided in the second surface 92b at a position symmetrical with respect to the virtual line C2 in plan view. Accordingly, the second groove 94a 'is arranged so as to be shifted from the virtual line C1 to the left side in the drawing (-y axis direction). The second groove 94 a ′ opens in a surface (an opposite surface) that faces the surface of the first groove 94 a that is open in the outer peripheral surface of the lid 92, and then travels toward the center of the lid 92. It is provided on the second surface 92b as a bottomed groove.

  Thus, since the first groove 94a and the second groove 94a ′ are provided at different positions in plan view, the member thickness of the portion where the first groove 94a and the second groove 94a ′ are provided. Can be thickened. Thereby, it is possible to increase the melting allowance (melting volume) when sealing the exhaust hole (the first groove 94a or the second groove 94a '), and it is possible to perform more stable sealing.

  In addition, if the first groove 94a and the second groove 94a ′ are arranged at positions symmetrical with respect to the virtual line C2 in plan view as in the third modification, the lid 92 is inverted with the virtual line C2 as the center. When this occurs, the first groove 94a becomes the position of the second groove 94a ′ before being inverted. Thereby, even when the lid 92 is set in the package by reversing the front and back, since the first groove 94a or the second groove 94a ′ is arranged at the same position, sealing can be performed at the same position, which is efficient. .

<Modification 5 of the lid>
Next, a fifth modification example of the lid will be described with reference to FIG. 6B. In the figure, the left figure is a plan view and the right figure is a right side view. The lid 92 of Modification 5 has a configuration in which one bottomed groove is provided on each of the first surface 92a and the second surface 92b at different positions in plan view.

  More specifically, the first groove 94 a is provided on the first surface 92 a as a bottomed groove that opens to one surface of the outer peripheral surface of the lid 92 and then extends toward the center of the lid 92. The first groove 94a passes through the center G of the first surface 92a, and is on the left side (−y-axis direction) in the drawing from the virtual line C1 of the virtual lines C1 and C2 that divide the first surface 92a and the second surface 92b into two. They are offset.

  A second groove 94a 'is provided in the second surface 92b at a point-symmetrical position with respect to the center G of the lid 92 in plan view. Accordingly, the second groove 94a 'is disposed so as to be shifted to the right side (y-axis direction) in the drawing from the virtual line C1. The second groove 94 a ′ opens in a surface (an opposite surface) that faces the surface of the first groove 94 a that is open in the outer peripheral surface of the lid 92, and then travels toward the center of the lid 92. It is provided on the second surface 92b as a bottomed groove.

  Thus, since the first groove 94a and the second groove 94a ′ are provided at different positions in plan view, the member thickness of the portion where the first groove 94a and the second groove 94a ′ are provided. Can be thickened. Thereby, it is possible to increase the melting allowance (melting volume) when sealing the exhaust hole (the first groove 94a or the second groove 94a '), and it is possible to perform more stable sealing.

<Modification 6 of the lid>
Next, a modification 6 of the lid will be described with reference to FIG. 6C. In the figure, the upper figure is a plan view and the lower figure is a front view. The lid 92 of Modification 6 has a configuration in which one bottomed groove is provided on each of the first surface 92a and the second surface 92b at different positions in plan view.

  More specifically, the first groove 94 a is provided on the first surface 92 a as a bottomed groove that opens to one surface of the outer peripheral surface of the lid 92 and then extends toward the center of the lid 92. The first groove 94a passes through the center G of the first surface 92a, and is provided in a line-symmetric shape with respect to the virtual line C1 of the virtual lines C1 and C2 that divide the first surface 92a and the second surface 92b into two. ing.

  In addition, a second groove 94a 'is provided in the second surface 92b at a position symmetrical with respect to the virtual line C2 in plan view. The second groove 94a 'is also provided in a line-symmetric shape with respect to the virtual line C1. The second groove 94 a ′ opens in a surface (an opposite surface) that faces the surface of the first groove 94 a that is open in the outer peripheral surface of the lid 92, and then travels toward the center of the lid 92. It is provided on the second surface 92b as a bottomed groove. Accordingly, the first groove 94 a and the second groove 94 a ′ are provided in a point-symmetric position and shape with respect to the center G of the lid 92 in plan view.

  Thus, since the first groove 94a and the second groove 94a ′ are provided at different positions in plan view, the member thickness of the portion where the first groove 94a and the second groove 94a ′ are provided. Can be thickened. Thereby, it is possible to increase the melting allowance (melting volume) when sealing the exhaust hole (the first groove 94a or the second groove 94a '), and it is possible to perform more stable sealing.

  Further, as in the sixth modification, the first groove 94a and the second groove 94a ′ are provided in a point-symmetric position and shape with respect to the center G of the lid 92 in a plan view, so that the lid is centered on the virtual line C2. When 92 is inverted, the first groove 94a becomes the position of the second groove 94a ′ before being inverted. Thereby, even when the lid 92 is set in the package by reversing the front and back, since the first groove 94a or the second groove 94a ′ is arranged at the same position, sealing can be performed at the same position, which is efficient. .

  In the above description, the example in which the first groove and the second groove are provided at one end of the lid 92 or two opposite ends has been described. However, the present invention is not limited to this example, and the same effect can be achieved by the configuration provided at the other end. Play.

  Moreover, when a 1st groove | channel and a 2nd groove | channel are made into a pair, multiple pairs may be provided. As described above, by providing a plurality of pairs of the first groove and the second groove, the exhaust capacity can be improved and the exhaust speed can be increased. As a result, the efficiency of the sealing work can be increased.

  The cross-sectional shapes of the first groove and the second groove are not particularly limited as long as they have a function as an exhaust hole such as a rectangular shape, a semicircular shape, and a tapered shape (wedge shape).

(Manufacturing method of vibrator)
Next, a method for manufacturing a vibrator as an electronic device according to the present invention will be described with reference to FIG. 7A to 7D are front sectional views showing an outline of a manufacturing process of the vibrator as the electronic device shown in FIGS. 1 and 2 described above.

  First, a process of storing the gyro element 2 as an element in the storage portion of the base 91 will be described. As shown in FIG. 7A, it has a plate-like bottom plate 911 and a frame-like side wall 912 provided on the peripheral edge of the upper surface of the bottom plate 911, and is surrounded by the inner wall of the side wall 912 and opened to the upper surface. A base 91 having a concave portion (hereinafter referred to as “storage portion”) is prepared. In the base 91, a seam ring 93 is formed on the upper surface of the frame-shaped side wall 912, and the connection pad 10 is formed on the upper surface of the bottom plate 911. Further, the gyro element 2 as the above-described element is prepared. Then, the connection pad 10 and the gyro element 2 are electrically connected and fixed. For this connection, a conductive fixing member 8 such as solder, silver paste, or conductive adhesive (adhesive in which conductive fillers such as metal particles are dispersed in a resin material) can be used. At this time, the gyro element 2 forms a gap with the upper surface of the bottom plate 911 depending on the thickness of the conductive fixing member 8.

  Next, a process of placing the lid 92 as a lid on the storage unit will be described. As shown in FIG. 7B, the lid 92 as the lid described above is placed on the seam ring 93 in order to keep the gyro element 2 housed in the housing portion airtight. The first surface 92a and the second surface 92b, which are the front and back surfaces of the lid 92, are respectively provided with first grooves 94a and 94b and second grooves 94a 'and 94b' at both ends thereof. When the lid 92 is placed on the seam ring 93, second grooves 94 a ′ and 94 b ′ on the side to be joined to the seam ring 93 are hung on the storage portion.

  Next, the process of joining the lid 92 to the base 91 will be described. As shown in FIG. 7C, seam welding is performed using a roller electrode 97 of a seam welder on a portion where the lid 92 and the seam ring 93 face each other on a frame-like side wall 912, and the lid 92 and the seam are seamed. The ring 93 is joined. That is, the lid 92 is joined to the base 91. At this time, the portions where the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ are provided are not joined because the lid 92 and the seam ring 93 are not in contact with each other by the second grooves 94a ′ and 94b ′. It becomes a space and functions as an exhaust hole in the next sealing process.

  Next, a process of exhausting air from the storage portion using the first grooves 94a and 94b or the second grooves 94a 'and 94b' (exhaust holes) will be described. In this example, as shown in FIG. 7 (d), the second grooves 94a 'and 94b' that are not welded during the seam welding described above are hung on the storage portion. Therefore, the second grooves 94a 'and 94b' are used as exhaust holes, and the gas in the storage portion is exhausted as shown by the arrows in the figure.

  Next, a process of hermetically sealing the storage section after exhausting will be described. As shown in FIG. 7D, in a state where the exhaust of the storage portion is completed, the second grooves 94a ′ and 94b ′ used as exhaust holes are irradiated with laser light 98, and the remaining portion of metal (Kovar) The second grooves 94a ′ and 94b ′ are hermetically sealed (closed) by melting and solidifying. In FIG. 7D, the melted and solidified sealing portion 95 shown in FIG. 2 is omitted.

  By using the method for manufacturing the vibrator 1 as an electronic component having such a process, it is not necessary to manage the unwelded portion for providing an exhaust hole without distinguishing the front and back of the lid 92, in other words, Then, exhaust and sealing can be performed by a simple method.

  In the above description, the example in which two exhaust holes (second grooves 94a ′ and 94b ′) are used has been described. However, the exhaust hole is one of the second groove 94a ′ and the second groove 94b ′. Further, there may be three or more exhaust holes.

  According to the above-described first embodiment, the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ of the lid 92 serving as a lid that closes the housing portion are directed from the outer peripheral surface 92c of the lid 92 toward the center portion. And provided on the first surface 92a and the second surface 92b of the lid 92 having a bottomed and front-back relationship. When such a lid 92 is joined to the base 91 (package 9), the portions where the first grooves 94a, 94b or the second grooves 94a ′, 94b ′ are not joined and are not joined. Exhaust can be performed through one of the grooves 94a and 94b or the second grooves 94a ′ and 94b ′. The first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ are provided in the lid 92 in advance, and the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ serve as exhaust holes as they are. Therefore, it is not necessary to manage the dimensions of unjoined parts (exhaust holes) used for exhaust as in the prior art, and stable exhaust and joining (sealing) are performed. Even when the vibrator 1 is heated at a high temperature, the generated gas can be suppressed. In addition, stable exhaust and bonding (sealing) can prevent deterioration in characteristics of the gyro element 2 as an element housed in the package 9 due to the influence of residual gas and the like, and an electronic device having stable characteristics The vibrator 1 can be provided.

[Second Embodiment of Electronic Device]
Next, as a second embodiment of the electronic device, an embodiment of a gyro sensor will be described with reference to FIG. FIG. 8 is a front sectional view showing an outline of the gyro sensor. In the present embodiment, the same components as those in the first embodiment described above may be denoted by the same reference numerals and description thereof may be omitted.

  The gyro sensor 200 includes a gyro element 2 as an element, an IC 112 as a circuit element, a package (base) 111 as a container, and a lid 92 as a lid. A package 111 made of ceramic or the like includes a stacked third substrate 125c, second substrate 125b, and first substrate 125a, and a frame-shaped side wall 115 provided on the peripheral surface of the first substrate 125a, And a frame-like side wall 120 provided at the peripheral edge of the surface of the third substrate 125c.

  A seam ring 117 made of an alloy such as Kovar is formed on the upper surface of the frame-like side wall 115. The seam ring 117 has a function as a bonding material with the lid 92, and is provided in a frame shape (circumferential shape) along the upper surface of the side wall 115. The lid 92 is provided with first grooves 94a and 94b at opposite ends of the first surface 92a, and second grooves 94a 'and 94b' at opposite ends of the second surface 92b, which is the back surface of the first surface 92a. Is provided. The configuration of the lid 92 is the same as that of the first embodiment described above. When the lid 92 is placed on the seam ring 117, the second grooves 94a 'and 94b' or the first grooves 94a and 94b are formed so as to cover the storage portion. In this example, the second grooves 94a 'and 94b' cover the storage space. A space surrounded by the surface of the first substrate 125a and the inner wall of the frame-shaped side wall 115 serves as a storage portion (storage space) for the gyro element 2, and is a space surrounded by the third substrate 125c and the inner wall of the frame-shaped side wall 120. Is a storage portion (storage space) of the IC 112. In the storage space in which the gyro element 2 is stored, the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ are formed after exhausting (degassing) from the second grooves 94a ′ and 94b ′. The lid 92 remaining in the formed portion is sealed by a sealing portion 95 that is solidified after being melted. A plurality of external terminals 122 are provided on the surface (the lower surface in the drawing) of the frame-shaped side wall 120.

  A connection pad 110 is formed on the surface of the first substrate 125a located in the storage portion (storage space) of the gyro element 2, and the gyro element 2 is fixed by being electrically connected to the connection pad 110. . For this connection, a conductive fixing member 127 such as solder, silver paste, or conductive adhesive (adhesive in which conductive fillers such as metal particles are dispersed in a resin material) can be used. At this time, the gyro element 2 has a gap with respect to the upper surface of the first substrate 125 a depending on the thickness of the conductive fixing member 127.

  The opening of the storage part (storage space) in which the gyro element 2 is stored is closed with a lid 92 as a lid body and hermetically sealed. Since the lid 92 has the same configuration as the lid 92 described in the first embodiment, a detailed description thereof will be omitted and the outline will be described. The lid 92 closes the opening of the storage portion that opens to the upper surface of the package 111, and the periphery of the opening is joined using, for example, a seam welding method. The lid 92 is made of Kovar plate material, and has a first surface 92a and a second surface 92b that are in a front-back relationship. Similarly to the first embodiment described above, the lid 92 has two bottomed first grooves 94a and 94b provided on the first surface 92a side from the outer peripheral surface of the lid 92 toward the center, Two bottomed second grooves 94a ′ and 94b ′ located on the second surface 92b side facing the first grooves 94a and 94b are provided. Then, after exhausting the storage space as the storage portion from the gap between the first groove 94a, 94b or the second groove 94a ′, 94b ′ and the seam ring 117, the first groove 94a, 94b or the second groove Airtight sealing is performed by melting portions 94a ′ and 94b ′ with a laser beam or the like.

  On the other hand, a connection electrode 118 is formed on the surface of the third substrate 125 c located in the storage portion (storage space) of the IC 112, and the connection electrode 118 and the IC 112 are electrically connected by bonding with gold (Au) bumps 124. Fixed and fixed. The gap between the IC 112 and the surface of the third substrate 125c is filled with an underfill 131 such as resin. Note that the resin may be provided so as to cover the IC 112. Note that each of the connection pad 110, the connection electrode 118, the external terminal 122, and the like is connected by an internal wiring or the like, but description in the present invention is omitted including illustration.

  According to the second embodiment described above, the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ of the lid 92 serving as a lid for closing the housing portion are directed from the outer peripheral surface 92c of the lid 92 toward the center portion. And provided on the first surface 92a and the second surface 92b of the lid 92 having a bottomed and front-back relationship. When such a lid 92 is joined to the package 111, the portion provided with the first groove or the second groove is not joined, and the first grooves 94a and 94b or the second grooves 94a ′ and 94b that are not joined are joined. Exhaust can be performed by either one of the grooves. The first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ are provided in the lid 92 in advance, and the first grooves 94a and 94b and the second grooves 94a ′ and 94b ′ serve as exhaust holes as they are. Therefore, it is not necessary to manage the dimensions of an unjoined portion (exhaust hole) used for exhaust as in the prior art, and it is possible to perform exhaust and joining (sealing) stably. Thus, since stable exhaust and joining (sealing) are performed, even when the gyro sensor 200 is heated at high temperature after joining (sealing), the generated gas can be suppressed. In addition, stable exhaust and bonding (sealing) can prevent deterioration in characteristics of the gyro element 2 as an element accommodated in the package 111 due to the influence of residual gas and the like, and an electronic device having stable characteristics The gyro sensor 200 can be provided.

  In the above description of the electronic device, the vibrator 1 and the gyro sensor 200 using the so-called double T-type gyro element 2 as the resonator element have been described as an example. However, the present invention is not limited to this. Can be applied to devices. Other electronic devices include, for example, a gyro sensor using an H-type or tuning-fork type gyro element as an element, a timing device (vibrator, oscillator, etc.) using a vibration element, a pressure sensor using a pressure-sensitive element, and a semiconductor A semiconductor device using an element may be used.

  As the vibration element, a piezoelectric vibration element such as a MEMS element using a piezoelectric body, or a crystal vibration piece that performs bending vibration such as a tuning fork type crystal vibration piece using quartz as a material, a longitudinal vibration type crystal vibration piece, a thickness A sliding crystal vibrating piece or the like can be suitably used.

[Electronics]
Next, an electronic apparatus to which the vibrator 1 as an electronic device or the gyro sensor 200 as an electronic device according to an embodiment of the present invention is applied will be described in detail with reference to FIGS. In the description, an example in which the vibrator 1 using the gyro element 2 is applied is shown.

  FIG. 9 is a perspective view schematically illustrating a configuration of a mobile (or notebook) personal computer as an electronic apparatus including the vibrator 1 as an electronic device according to an embodiment of the present invention. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 has a built-in vibrator 1 using a gyro element 2 having a function of detecting angular velocity.

  FIG. 10 is a perspective view schematically illustrating a configuration of a mobile phone (including PHS) as an electronic apparatus including the vibrator 1 as an electronic device according to an embodiment of the invention. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a vibrator 1 using a gyro element 2 that functions as an angular velocity sensor or the like.

  FIG. 11 is a perspective view schematically illustrating a configuration of a digital still camera as an electronic apparatus including the vibrator 1 as an electronic device according to an embodiment of the present invention. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 100 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit 100 displays an object as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 100 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates a vibrator 1 using a gyro element 2 that functions as an angular velocity sensor or the like.

  In addition to the personal computer (mobile personal computer) in FIG. 9, the mobile phone in FIG. 10, and the digital still camera in FIG. (For example, inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations , Video phone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (eg, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices , Instruments (eg, vehicles, aircraft Gauges of a ship), can be applied to electronic equipment such as a flight simulator.

[Moving object]
FIG. 12 is a perspective view schematically showing an automobile as an example of a moving object. The automobile 106 is equipped with the vibrator 1 as an electronic device according to the present invention. For example, as shown in the figure, an automobile 106 as a moving body includes an electronic control unit 108 that includes a vibrator 1 using a gyro element 2 and controls a tire 109 and the like. The vibrator 1 also includes keyless entry, immobilizer, car navigation system, car air conditioner, anti-lock brake system (ABS), air bag, tire pressure monitoring system (TPMS), engine The present invention can be widely applied to electronic control units (ECUs) such as controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle body attitude control systems.

  DESCRIPTION OF SYMBOLS 1 ... Vibrator as an electronic device, 2 ... Gyro element as an element, 4 ... Vibrating body, 8 ... Conductive fixing member (silver paste), 9 ... Package, 10 ... Connection pad, 41 ... Base, 51 ... 1st Support part 52 ... 2nd support part 61 ... 1st beam 62 ... 2nd beam 63 ... 3rd beam 64 ... 4th beam 61a, 61b, 62a, 62b, 63a, 63b, 64a, 64b ... Projection, 91 ... base, 92 ... lid as lid, 92a ... first surface, 92b ... second surface, 92c ... outer peripheral surface, 93 ... seam ring, 94a, 94b ... first groove, 94a ', 94b' DESCRIPTION OF SYMBOLS 2nd groove | channel, 95 ... Sealing part, 97 ... Roller electrode of seam welding machine, 98 ... Laser beam, 106 ... Automobile as a moving body, 110 ... Connection pad, 111 ... Package (base), 112 ... IC, 115 120 side walls 117 Seam ring, 118 ... connection electrode, 122 ... external terminal, 124 ... gold bump, 125a ... first substrate, 125b ... second substrate, 125c ... third substrate, 127 ... conductive fixing member, 131 ... underfill, 200 ... Gyro sensor as an electronic device, 421... First detection vibrating arm, 422... Second detection vibrating arm, 425, 426, 445, 446, 447, 448... Weight part (hammer head), 431. ... second connecting arm, 441 ... first driving vibration arm, 442 ... second driving vibration arm, 443 ... third driving vibration arm, 444 ... fourth driving vibration arm, 714 ... detection signal terminal, 724 ... detection ground terminal, 734: Drive signal terminal, 744: Drive signal terminal, 911 ... Bottom plate, 912 ... Side wall, 1100 ... Mobile personal computer as electronic equipment, 12 0 ... mobile phone as an electronic device, 1300 ... digital still camera as an electronic device, C1, C2 ... virtual line, G ... center of the lid.

Claims (12)

A first surface and a second surface in a front-back relationship;
An outer peripheral surface connecting the first surface and the second surface;
A first groove provided on the first surface from the outer peripheral surface toward the center of the first surface;
A second groove provided in the second surface from the outer peripheral surface toward the center of the second surface;
The lid body characterized by being provided.   The lid according to claim 1, wherein the first groove and the second groove are provided at a position where at least a part thereof overlaps in a plan view.   The lid according to claim 1, wherein the first groove and the second groove are provided at different positions in plan view.   The first groove and the second groove pass through the center of the first surface or the second surface, and are in a line-symmetrical position with respect to one virtual line that divides the first surface or the second surface into two. The lid according to claim 3, wherein the lid is provided.   5. The lid according to claim 3, wherein the first groove and the second groove are provided at point-symmetric positions with respect to the center of the first surface or the second surface. body.   The said 1st groove | channel and the said 2nd groove | channel WHEREIN: When the said 1st groove | channel and the said 2nd groove | channel are made into a pair, multiple pairs are provided, The any one of Claim 1 thru | or 5 characterized by the above-mentioned. The lid described in 1. The lid according to any one of claims 1 to 6,
A base to which the lid is joined;
A package characterized by comprising: A package comprising: the lid according to any one of claims 1 to 6; and a base to which the lid is joined.
An element housed in the package;
An electronic device comprising:   The electronic device according to claim 8, wherein the first groove or the second groove is melted and sealed.   An electronic apparatus comprising the electronic device according to claim 8 or 9.   A moving body comprising the electronic device according to claim 8. A step of joining the lid according to any one of claims 1 to 6 to a base in which an element is stored in a storage portion;
Exhausting the storage part from the first groove or the second groove of the lid;
Sealing the first groove or the second groove used for the exhaust;
An electronic device manufacturing method comprising:

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