JP2014095122A5 - - Google Patents

Download PDF

Info

Publication number
JP2014095122A5
JP2014095122A5 JP2012247222A JP2012247222A JP2014095122A5 JP 2014095122 A5 JP2014095122 A5 JP 2014095122A5 JP 2012247222 A JP2012247222 A JP 2012247222A JP 2012247222 A JP2012247222 A JP 2012247222A JP 2014095122 A5 JP2014095122 A5 JP 2014095122A5
Authority
JP
Japan
Prior art keywords
scm
peak
detected
portions
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012247222A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014095122A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012247222A priority Critical patent/JP2014095122A/ja
Priority claimed from JP2012247222A external-priority patent/JP2014095122A/ja
Publication of JP2014095122A publication Critical patent/JP2014095122A/ja
Publication of JP2014095122A5 publication Critical patent/JP2014095122A5/ja
Pending legal-status Critical Current

Links

JP2012247222A 2012-11-09 2012-11-09 マグネトロンスパッタ装置 Pending JP2014095122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012247222A JP2014095122A (ja) 2012-11-09 2012-11-09 マグネトロンスパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012247222A JP2014095122A (ja) 2012-11-09 2012-11-09 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JP2014095122A JP2014095122A (ja) 2014-05-22
JP2014095122A5 true JP2014095122A5 (enExample) 2015-11-26

Family

ID=50938439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012247222A Pending JP2014095122A (ja) 2012-11-09 2012-11-09 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JP2014095122A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108923019B (zh) * 2018-06-30 2021-05-25 深圳市神火照明有限责任公司 基于磁控溅射方法的锂离子电池正极材料的制备方法
JP7379027B2 (ja) * 2019-09-04 2023-11-14 Hoya株式会社 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに半導体装置の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892633A (en) * 1988-11-14 1990-01-09 Vac-Tec Systems, Inc. Magnetron sputtering cathode
JP2007169705A (ja) * 2005-12-21 2007-07-05 Kobe Steel Ltd 非平衡マグネトロンスパッタ用カソード
JP2008121077A (ja) * 2006-11-14 2008-05-29 Hitachi Metals Ltd マグネトロンスパッタリング用磁気回路
JP4999602B2 (ja) * 2007-08-16 2012-08-15 株式会社アルバック 成膜装置
JP4843582B2 (ja) * 2007-08-17 2011-12-21 株式会社アルバック リン酸リチウム焼結体の製造方法およびスパッタリングターゲット
JP2009179867A (ja) * 2008-01-31 2009-08-13 Ulvac Japan Ltd 平行平板型マグネトロンスパッタ装置、固体電解質薄膜の製造方法、及び薄膜固体リチウムイオン２次電池の製造方法
JP5714481B2 (ja) * 2008-04-29 2015-05-07 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ 無機傾斜バリア膜及びそれらの製造方法

Similar Documents

Publication Publication Date Title
EA201490232A1 (ru) Высокотемпературное устройство аккумулирования энергии
JP2013030472A5 (ja) 蓄電装置
MY169902A (en) Energy storage device
JP2010524177A5 (enExample)
JP2014187002A5 (enExample)
JP2013082606A5 (enExample)
WO2016087675A3 (en) An electrochemical device for releasing ions
JP2012021904A5 (enExample)
JP2014520090A5 (enExample)
CL2012003399A1 (es) Sistema para generacion electroquimica de hipoclorito que comprende camara de dosificacion de solucion de cloruro alcalino, celda electrolitica no dividida, medios para aplicar corriente electrica, sensor para medir diferencia de potencial conectado a un dispositivo de alerta, recipiente de recogida para la solucion de hipoclorito y procesador programado para controlar el sistema.
JP2011507171A5 (enExample)
EP2881994A3 (en) Solar cell measuring apparatus
EP2960976A4 (en) POLYMERELECTROLYTMEMBRANE, MEMBRANE ELECTRODE ASSEMBLY WITH POLYMER ELECTROLYTEMEMBRANE AND FUEL CELL WITH MEMBRANE ELECTRODE ASSEMBLY
BR112015015459A2 (pt) elemento de armazenamento eletrolítico não aquoso
JP2013222610A5 (enExample)
JP2014089948A5 (enExample)
WO2014170733A3 (en) Process for manufacture of membrane electrode units
JP2014095122A5 (enExample)
JP2014531765A5 (enExample)
JP2012212621A5 (enExample)
JP2016096023A5 (ja) 蓄電装置
WO2013080041A3 (en) Fuel cell
JP2013185228A5 (enExample)
JP2014105368A5 (enExample)
WO2016089156A3 (ko) 중합체 및 이를 포함하는 고분자 전해질막